Vacuum pump
By integrating an energy-saving structure into the vacuum pump and using high-speed fluid to create negative pressure to discharge gas, the problems of high energy consumption and particle deposition in vacuum pumps are solved, resulting in reduced energy consumption and extended service life.
Patent Information
- Application Number
- CN202520224301.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-12
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-02-12
AI Technical Summary
Existing vacuum pumps have high energy consumption and are in short supply. They consume even more energy when the gas pressure at the exhaust end is high, which can easily lead to the deposition of process material particles and affect their service life.
An energy-saving structure is integrated into the vacuum pump, including a high-speed fluid inlet pipe, an intake pipe, and a mixed gas outlet pipe. By creating a negative pressure, the gas in the pumping chamber is discharged, reducing the exhaust pressure and diluting the process gas to prevent particle deposition.
It effectively reduces the energy consumption of vacuum pumps, reduces the deposition of process particles, extends service life, lowers temperature, and achieves energy saving and consumption reduction.
Smart Images
Figure CN223839332U_ABST
Abstract
Description
Technical Field
[0001] This disclosure belongs to the field of vacuum pump technology, and specifically relates to a vacuum pump. Background Technology
[0002] In industrial machinery, vacuum pumps are devices used to generate, improve, and maintain vacuum. Vacuum pumps have been applied to many sectors of the national economy, including defense, steel, coating, microelectronics, semiconductors, biomedicine, chemicals, food, and environmental protection. However, with the widespread use of vacuum pumps, problems such as high energy consumption and energy shortages have emerged. Because vacuum pumps expel gas through various physical or mechanical means, the gas pressure is higher closer to the exhaust end, and the energy required to expel the gas is greater. Utility Model Content
[0003] This disclosure aims to at least address one of the technical problems existing in the prior art by providing a vacuum pump.
[0004] This disclosure provides a vacuum pump, the vacuum pump comprising:
[0005] The stator includes at least one pumping chamber having a gas inlet and a gas outlet;
[0006] The rotor includes at least one rotor component, which is housed in a corresponding pumping chamber and rotates to drive the gas to be pumped from the gas inlet to the gas outlet.
[0007] At least one energy-saving structure is provided in at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe that are connected to each other, and the air inlet pipe is connected to the gas outlet of the pumping chamber.
[0008] When high-speed fluid is introduced into the high-speed fluid inlet pipe, a negative pressure is formed at the connection of the three pipes, which can discharge the gas in the pumping chamber through the air inlet pipe to the mixed gas outlet pipe.
[0009] Optionally, the outlet cross-sectional area of the high-speed fluid inlet pipe is smaller than the inlet cross-sectional area.
[0010] Optionally, when the stator includes a primary pumping chamber and the rotor includes a primary rotor component, the number of energy-saving structures is one, and the energy-saving structure is disposed at the outlet end of the pumping chamber.
[0011] Optionally, a one-way valve is provided between the inlet of the intake pipe and the outlet of the mixed gas discharge pipe.
[0012] Optionally, when the stator includes multiple pumping chambers and the rotor includes multiple rotor components, the number of energy-saving structures is plurality, and each energy-saving structure corresponds to one pumping chamber; wherein,
[0013] The intake pipe is connected to the gas outlet of the preceding pumping chamber, and the mixed gas discharge pipe is connected to the gas inlet of the following pumping chamber.
[0014] Optionally, the energy-saving structure includes multiple intake pipes and / or multiple mixed gas exhaust pipes; wherein,
[0015] Multiple air intake lines are connected to the gas outlet of the preceding pumping chamber;
[0016] Multiple of the mixed gas discharge lines are connected to the gas inlet of the subsequent pumping chamber.
[0017] Optionally, the stator includes a plurality of stator components, each of which has a pumping chamber inside;
[0018] Each stator component has a sidewall that is connected to a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe.
[0019] The intake pipe is connected to the gas outlet of the previous stage pumping chamber, and the mixed gas discharge pipe is connected to the gas inlet of the current stage pumping chamber.
[0020] Optionally, the stator component has a high-speed fluid inlet structure connected to the high-speed fluid inlet pipe on the outside of its side wall.
[0021] Optionally, the stator is formed by an upper housing and a lower housing, and the upper housing and the lower housing enclose a plurality of pumping chambers;
[0022] The upper housing or the lower housing corresponding to the pumping chamber is provided with a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe that are connected to each other.
[0023] The intake pipe is connected to the gas outlet of the previous stage pumping chamber, and the mixed gas discharge pipe is connected to the gas inlet of the current stage pumping chamber.
[0024] Optionally, the upper housing or the lower housing is provided with a high-speed fluid inlet structure that communicates with the high-speed fluid inlet pipe.
[0025] This disclosure provides a vacuum pump, comprising: a stator including at least one pumping chamber having a gas inlet and a gas outlet; a rotor including at least one rotor component, the rotor component being housed in a corresponding pumping chamber and rotating to drive the gas to be pumped from the gas inlet to the gas outlet; and at least one energy-saving structure disposed in the at least one pumping chamber, the energy-saving structure having a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe connected together, the air inlet pipe being connected to the gas outlet of the pumping chamber; when high-speed fluid is introduced into the high-speed fluid inlet pipe, a negative pressure is formed at the connection of the three pipes, which can discharge the gas in the pumping chamber through the air inlet pipe to the mixed gas outlet pipe. Simultaneously, the high-speed fluid introduced into the energy-saving structure of this application also has the function of purging the pipes, thereby diluting the process gas and reducing the deposition of process particles and dust. The vacuum pump disclosed herein integrates an energy-saving structure, which can reduce the energy consumption of the vacuum pump and thus reduce the temperature of the vacuum pump. At the same time, the high-speed fluid can purge the pipeline and pump body, dilute the process gas, prevent the deposition of process particles in the pipeline and pump body, and thus extend the service life of the vacuum pump. Attached Figure Description
[0026] Figure 1 This is a schematic diagram of a first energy-saving structure integrated into a Roots pump or screw pump according to Embodiment 1 of this disclosure;
[0027] Figure 2 This is a schematic diagram of the second energy-saving structure integrated into the stator component according to Embodiment 2 of this disclosure;
[0028] Figure 3 This is a schematic diagram of the second energy-saving structure integrated into the stator component according to Embodiment 2 of this disclosure;
[0029] Figure 4 This is a cross-sectional view of the second energy-saving structure integrated into the lower housing according to Embodiment 3 of this disclosure. Detailed Implementation
[0030] To enable those skilled in the art to better understand the technical solutions of this disclosure, the disclosure will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain this disclosure and represent a part of the embodiments of this disclosure, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this disclosure without creative effort are within the protection scope of this disclosure.
[0031] In some descriptions of this disclosure, the terms "comprising" or "including" do not limit the shapes, numbers, steps, actions, operations, components, elements and / or groups thereof mentioned, nor do they exclude the appearance or inclusion of one or more other different shapes, numbers, steps, actions, operations, components, elements and / or groups thereof.
[0032] In some descriptions of this disclosure, the terms “first” and “second” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number and order of the indicated technical features.
[0033] In some descriptions of this disclosure, terms such as “installation,” “connection,” “linking,” or “fixing” are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect through an intermediate medium, which can be internal connections between two elements or interactions between two elements.
[0034] In some descriptions of this disclosure, the terms “center,” “longitudinal,” “lateral,” “length,” “width,” “thickness,” “upper,” “lower,” “front,” “back,” “left,” “right,” “vertical,” “horizontal,” “top,” “bottom,” “inner,” and “outer,” etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are used only to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.
[0035] This disclosure discloses a vacuum pump, comprising: a stator, a rotor, and at least one energy-saving structure. The stator and rotor form a pump body. The stator includes at least one pumping chamber having a gas inlet and a gas outlet. The rotor includes at least one rotor component housed within a corresponding pumping chamber, rotating and driving the gas to be pumped from the gas inlet to the gas outlet of the vacuum pump. At least one energy-saving structure is correspondingly provided with the at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipe, an intake pipe, and a mixed gas outlet pipe connected together. The intake pipe is connected to the gas outlet of the pumping chamber. When high-speed fluid is introduced into the high-speed fluid inlet pipe, a negative pressure is formed at the connection point of the high-speed fluid inlet pipe, the intake pipe, and the mixed gas outlet pipe. Based on this negative pressure, the gas in the pumping chamber is discharged through the intake pipe to the mixed gas outlet pipe.
[0036] In this embodiment, by integrating an energy-saving structure into the vacuum pump, the exhaust pressure of the vacuum pump can be reduced, thereby effectively reducing the power consumption of the vacuum pump, reducing the load on the vacuum pump, and achieving the effect of energy saving and consumption reduction.
[0037] It should be noted that the outlet cross-sectional area of the high-speed fluid entering the pipeline needs to be smaller than its inlet cross-sectional area. According to the continuity equation for incompressible gases, A1V1 = A2V2, when the cross-section of the pipeline increases, the fluid velocity within the pipeline decreases; when the cross-section of the pipeline decreases, the fluid velocity within the pipeline increases. According to Bernoulli's principle, as the velocity increases, the pressure decreases. When the velocity increases to a certain value, the pressure will be less than one atmosphere, i.e., a negative pressure will be generated. Therefore, when a high-speed fluid is introduced into the high-speed fluid inlet pipeline, the cross-section of the high-speed fluid entering the pipeline decreases, and the pressure drops sharply, causing a vacuum to be generated at the inlet of the inlet pipeline, thereby reducing the exhaust pressure of the pumping chamber.
[0038] It should be further noted that this embodiment does not specifically limit the location of the energy-saving device, which can be determined according to the stator structure. When the stator structure includes a primary pumping chamber, the energy-saving device is installed at the outlet end of the pumping chamber. When the stator structure includes multiple pumping chambers, the energy-saving structure can be installed in one or more of the pumping chambers.
[0039] In some preferred embodiments, when the vacuum pump is a single-stage Roots pump or screw pump, its stator includes a first-stage pumping chamber, and the rotor includes a first-stage rotor component. An energy-saving structure is provided at the outlet end of the pumping chamber. In this case, the gas outlet of the pumping chamber is equivalent to the exhaust port of the vacuum pump, the gas inlet of the pumping chamber is equivalent to the air inlet of the vacuum pump, and the energy-saving structure is equivalent to being integrated into the outlet end of the vacuum pump body. The air inlet pipe is connected to the gas outlet of the pumping chamber, and the mixed gas discharge pipe is connected to the outside to discharge the gas of the pump body to the outside, thereby reducing the tail pressure of the vacuum pump.
[0040] As a further preferred embodiment, when the energy-saving structure is integrated into the outlet end of the vacuum pump body, the energy-saving structure should include an energy-saving housing, inlet pipe, inlet pipe, and mixed gas outlet pipe housed in the energy-saving housing, with the inlet of the high-speed fluid inlet pipe and the outlet of the mixed gas outlet pipe exposed outside the energy-saving housing, and in order to prevent backflow of the discharged gas, a one-way valve can be installed between the inlet of the inlet pipe and the outlet of the mixed gas outlet pipe.
[0041] In some preferred embodiments, when the vacuum pump is a multi-stage Roots pump or a claw pump, the stator includes multiple pumping chambers, the rotor includes multiple rotor components, and there are multiple energy-saving structures, each corresponding to one pumping chamber. That is, an energy-saving structure can be installed in one or more of the pumping chambers. The inlet pipe of the energy-saving structure is connected to the gas outlet of the preceding pumping chamber, and the mixed gas outlet pipe is connected to the gas inlet of the following pumping chamber, thereby reducing the exhaust pressure of each stage and effectively reducing the power consumption of the vacuum pump, achieving energy saving and consumption reduction.
[0042] It should be understood that the energy-saving structure should be installed starting from the second-stage pumping chamber. The air inlet pipe of the energy-saving structure is connected to the gas outlet of the first-stage pumping chamber, and the mixed gas discharge pipe is connected to the gas inlet of the second-stage pumping chamber. When the energy-saving structure is installed in other stages of the pumping chamber, the connection method of its air inlet pipe and mixed gas discharge pipe is the same as given above. Of course, when the energy-saving structure is installed in the last stage of the pumping chamber, its air inlet pipe is connected to the gas outlet of the previous stage of the pumping chamber, and the mixed gas discharge pipe should be directly connected to the outside.
[0043] It should be noted that this embodiment does not specifically limit the location of the energy-saving structure in the pumping chamber. The location can be determined based on the specific structure of the stator. The stator can be a split stator structure or an integral stator structure with upper and lower housings. For example, when the stator is a split stator structure formed by multiple stator components, the energy-saving structure can be located on the side wall of each stator component. When the stator is an integral stator structure formed by upper and lower housings, the energy-saving structure can be located on the side wall of the upper or lower housing.
[0044] For example, the stator includes multiple stator components, each of which has a pumping chamber and an inlet and outlet channel communicating with it. The inlet channel forms the gas inlet of the pumping chamber, and the outlet channel forms the gas outlet. When one or more pumping chambers are equipped with an energy-saving structure, the energy-saving structure is located on the side wall of the stator component. For example, a high-speed fluid inlet pipe, at least one inlet pipe, and at least one mixed gas outlet pipe are connected to the side wall of the stator component. The inlet pipe is connected to the outlet channel of the previous pumping chamber, and the mixed gas outlet pipe is connected to the inlet channel of the current pumping chamber. In this way, when high-speed fluid is introduced into the high-speed fluid inlet pipe, a negative pressure is formed at the connection of the three pipes, causing the gas in the previous pumping chamber to be discharged through the inlet pipe to the mixed gas outlet pipe and into the current pumping chamber, thereby reducing the exhaust pressure of the previous pumping chamber.
[0045] For example, the stator is formed by an upper housing and a lower housing, which enclose a plurality of pumping chambers, and an air inlet channel and an air outlet channel connected to the pumping chambers. The air inlet channel forms the gas inlet of the pumping chamber, and the air outlet channel forms the gas outlet of the pumping chamber. When an energy-saving structure is provided for one or more pumping chambers, the energy-saving structure is located on the side wall of the upper or lower shell. For example, a high-speed fluid inlet pipe, at least one air inlet pipe, and at least one mixed gas outlet pipe are connected to the side wall of the upper or lower shell corresponding to the connection area between the previous pumping chamber and the current pumping chamber. The air inlet pipe is connected to the air outlet channel of the previous pumping chamber, and the mixed gas outlet pipe is connected to the air inlet channel of the current pumping chamber. When high-speed fluid is introduced into the high-speed fluid inlet pipe, a negative pressure is formed at the connection of the three pipes, which causes the gas in the previous pumping chamber to be discharged to the current pumping chamber through the air inlet pipe to the mixed gas outlet pipe, thereby reducing the exhaust pressure of the previous pumping chamber.
[0046] It should be noted that the energy-saving structure in this embodiment can be installed in the upper shell or the lower shell, and there is no specific limitation. It can be specifically set according to the air intake and air exhaust channels distributed in the upper and lower shells.
[0047] It should also be understood that, since the energy-saving structure is located in the side wall of the stator component or the side wall of the upper and lower housings, a high-speed fluid inlet structure connected to the high-speed fluid inlet pipe needs to be provided outside the side wall of the stator component, or a high-speed fluid inlet structure connected to the high-speed fluid inlet pipe needs to be provided outside the upper or lower housing, so as to facilitate the introduction of high-speed fluid.
[0048] It should also be noted that this embodiment does not impose a specific limit on the number of intake pipes and mixed gas discharge pipes. The number can be set according to actual needs. For example, each energy-saving structure may include one intake pipe and one mixed gas discharge pipe. Alternatively, multiple intake pipes and multiple mixed gas discharge pipes can be set according to the pressure values at different locations in the pumping chamber. By adjusting the working gas pressure and flow rate, different pressure levels can be matched, and the pressure at different levels can be reduced. In other words, one end of multiple intake pipes is simultaneously connected to the gas outlet of the preceding pumping chamber, and the other end is simultaneously connected to the high-speed fluid inlet pipe and the mixed gas discharge pipe. Similarly, one end of multiple mixed gas discharge pipes is simultaneously connected to the gas inlet of the following pumping chamber, and the other end is simultaneously connected to the high-speed fluid inlet pipe and the intake pipe.
[0049] This disclosure integrates an energy-saving structure at the outlet end of a vacuum pump or in each stage of the pumping chamber. By adjusting the parameters of the high-speed fluid, the exhaust pressure of the pumping chamber is reduced, thereby improving the terminal pressure of the vacuum pump, reducing the load on the vacuum pump, and lowering the temperature of the vacuum pump. This achieves energy saving and consumption reduction, and extends the service life of the vacuum pump. The vacuum pump has the advantages of simple structure, low cost, and significant energy-saving effect.
[0050] Furthermore, since the working gas of a vacuum pump may be highly corrosive or contain dust particles, the accumulation of corrosive gases or dust particles during gas extraction and compression can cause corrosion or wear on the pump body's stator and rotor, leading to vacuum pump seizure. However, the energy-saving structure disclosed herein introduces a high-speed fluid, which acts as a purger for the pipeline. This high-speed fluid can dilute the working gas, thereby reducing its corrosive effect on the pump body. At the same time, it can also purge process materials and dust particles from the pipeline or pump body, thus preventing pump seizure and extending the service life of the vacuum pump.
[0051] The structure of the vacuum pump will be described in detail below with reference to specific embodiments:
[0052] Example 1
[0053] This embodiment uses Roots pumps and screw pumps as examples for illustration. Figure 1 As shown, the Roots pump or screw pump includes a stator and a rotor, which form the pump body 110 of the vacuum pump. The stator has a primary pumping chamber, and the rotor has a primary rotor assembly. The rotor assembly is housed in the pumping chamber and rotates to drive the pumped gas from the gas inlet of the pump body to the gas outlet. A first energy-saving structure 120 is provided at the gas outlet end of the pump body 110.
[0054] Please continue to refer to this. Figure 1 The first energy-saving structure 120 includes a first high-speed fluid inlet pipe 121, a first air inlet pipe 122, a first mixed gas outlet pipe 123, and a one-way valve 124 connected in series. The one-way valve 124 is located between the inlet of the first air inlet pipe 122 and the outlet of the first mixed gas outlet pipe 123. The first air inlet pipe 122 is connected to the gas outlet of the pump body 110. When high-speed fluid is introduced into the first high-speed fluid inlet pipe 121, a negative pressure is formed at the connection of the first high-speed fluid inlet pipe 121, the first air inlet pipe 122, and the first mixed gas outlet pipe 123, creating a vacuum at the air inlet of the first air inlet pipe. This causes the gas discharged from the pump body to be discharged through the first air inlet pipe 122 to the first mixed gas outlet pipe 123, reducing the tail pressure of the pump body and further reducing the energy consumption of the vacuum pump.
[0055] Example 2
[0056] This embodiment uses a claw pump or a multi-stage Roots pump with a split stator structure as an example for illustration. Figure 2 and Figure 3 As shown, the stator includes multiple stator components 141, and the rotor includes multiple rotor components. Each stator component 141 includes a multi-stage pumping chamber 142 for accommodating the multi-stage rotor components, and an air inlet passage and an air outlet passage connecting the pumping chamber 142. A second energy-saving structure 130 is provided on the second stator component 141 and other subsequent stator components.
[0057] Please continue to refer to this. Figure 2 and Figure 3 The second energy-saving structure 130 includes a second high-speed fluid inlet pipe 131, a second air inlet pipe 132, and a second mixed gas outlet pipe 133 that pass through and are connected to the side wall of the stator component 141. At the same time, a high-speed fluid inlet structure 134 is provided on the outside of the side wall of the stator component 141, and the high-speed fluid inlet structure 134 is connected to the second high-speed fluid inlet pipe 131. The second intake pipe 132 is connected to the outlet channel of the previous pumping chamber, and the second mixed gas discharge pipe 133 is connected to the intake channel of the pumping chamber 142. When high-speed fluid is introduced into the second high-speed fluid intake pipe 131 through the high-speed fluid intake structure 134, a negative pressure is formed at the connection of the second high-speed fluid intake pipe 131, the second intake pipe 132, and the second mixed gas discharge pipe 133. A vacuum is formed at the intake port of the second intake pipe, which helps to reduce the exhaust pressure of the previous pumping chamber and causes the gas in the previous pumping chamber to be discharged into the pumping chamber through the second intake pipe and the second mixed gas discharge pipe.
[0058] It should be noted that this embodiment only uses the example of setting the second energy-saving structure in one stator component. When there are multiple stator components, multiple second energy-saving structures can be set. Of course, in other embodiments, other numbers of second air inlet pipes and second mixed gas outlet pipes can be arranged according to the actual working characteristics of each pumping chamber. By conveying different ratio parameters, the pressure of each pumping chamber can be adjusted, effectively reducing the energy consumption of the vacuum pump.
[0059] Example 3
[0060] This embodiment uses a claw pump or a multi-stage Roots pump with an integral stator structure of upper and lower housings as an example for illustration. Figure 4As shown, the vacuum pump includes an upper housing and a lower housing 151. The upper housing and the lower housing 151 enclose five pumping chambers, namely a first pumping chamber 152, a second pumping chamber 153, a third pumping chamber 154, a fourth pumping chamber 155, and a fifth pumping chamber 156, as well as an air inlet channel and an air outlet channel connected to each pumping chamber. A second energy-saving structure 130 is provided on the lower housing corresponding to the connection area between the first pumping chamber 152 and the second pumping chamber 153.
[0061] Please continue to refer to this. Figure 4 The second energy-saving structure 130 includes a second high-speed fluid inlet pipe 131, a second air inlet pipe 132, and a second mixed gas outlet pipe 133, which are connected to each other and pass through the side wall of the lower housing 151. The second air inlet pipe 132 is connected to the air outlet channel of the first pumping chamber 152, and the second mixed gas outlet pipe 133 is connected to the air inlet channel of the second pumping chamber 153. When high-speed fluid is introduced into the second high-speed fluid inlet pipe 131, a negative pressure is formed at the connection of the second high-speed fluid inlet pipe 131, the second air inlet pipe 132, and the second mixed gas outlet pipe 133. At this time, a vacuum is formed at the air inlet of the second air inlet pipe 132, which reduces the exhaust pressure of the previous pumping chamber and causes the gas in the previous pumping chamber to be discharged to the current pumping chamber through the second air inlet pipe and the second mixed gas outlet pipe.
[0062] It should be noted that this embodiment takes the example of setting a second energy-saving structure between the first and second pumping chambers of the lower shell. However, a second energy-saving structure can also be set in the connection area between the second and third pumping chambers, the third and fourth pumping chambers, and the fourth and fifth pumping chambers of the lower shell. Of course, in other embodiments, other numbers of second inlet pipes and second mixed gas outlet pipes can be arranged according to the actual working characteristics of each pumping chamber. By conveying different ratio parameters, the pressure of each pumping chamber can be adjusted, effectively reducing the energy consumption of the vacuum pump. Furthermore, in other preferred embodiments, a second energy-saving structure can also be set in the upper shell, which will not be listed here.
[0063] It is understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of this disclosure, and this disclosure is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and substance of this disclosure, and these modifications and improvements are also considered to be within the scope of protection of this disclosure.
Claims
1. A vacuum pump, characterized in that, The vacuum pump includes: The stator includes at least one pumping chamber having a gas inlet and a gas outlet; The rotor includes at least one rotor component, which is housed in a corresponding pumping chamber and rotates to drive the gas to be pumped from the gas inlet to the gas outlet. At least one energy-saving structure is provided in at least one pumping chamber, and the energy-saving structure has a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe that are connected to each other, and the air inlet pipe is connected to the gas outlet of the pumping chamber. When high-speed fluid is introduced into the high-speed fluid inlet pipe, a negative pressure is formed at the connection of the three pipes, which can discharge the gas in the pumping chamber through the air inlet pipe to the mixed gas outlet pipe.
2. The vacuum pump according to claim 1, characterized in that, The outlet cross-sectional area of the high-speed fluid entering the pipeline is smaller than the inlet cross-sectional area.
3. The vacuum pump according to claim 1, characterized in that, When the stator includes a primary pumping chamber and the rotor includes a primary rotor component, the number of the energy-saving structure is one, and the energy-saving structure is disposed at the outlet end of the pumping chamber.
4. The vacuum pump according to claim 3, characterized in that, A one-way valve is provided between the inlet of the air intake pipe and the outlet of the mixed gas discharge pipe.
5. The vacuum pump according to claim 1, characterized in that, When the stator includes multiple pumping chambers and the rotor includes multiple rotor components, the number of energy-saving structures is plurality, with each energy-saving structure corresponding to one pumping chamber; wherein... The intake pipe is connected to the gas outlet of the preceding pumping chamber, and the mixed gas discharge pipe is connected to the gas inlet of the following pumping chamber.
6. The vacuum pump according to claim 5, characterized in that, The energy-saving structure includes multiple intake pipes and / or multiple mixed gas exhaust pipes; wherein... Multiple air intake lines are connected to the gas outlet of the preceding pumping chamber; Multiple of the mixed gas discharge lines are connected to the gas inlet of the subsequent pumping chamber.
7. The vacuum pump according to claim 5, characterized in that, The stator includes multiple stator components, and each stator component has a pumping chamber inside; Each stator component has a sidewall that is connected to a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe. The air intake pipe is connected to the gas outlet of the pumping chamber of the previous stage, and the mixed gas discharge pipe is connected to the gas inlet of the pumping chamber of the next stage.
8. The vacuum pump according to claim 7, characterized in that, The stator component has a high-speed fluid inlet structure connected to the high-speed fluid inlet pipe on the outside of its side wall.
9. The vacuum pump according to claim 5, characterized in that, The stator is formed by an upper shell and a lower shell, and the upper shell and the lower shell enclose a plurality of pumping chambers; The upper housing or the lower housing corresponding to the pumping chamber is provided with a high-speed fluid inlet pipe, an air inlet pipe, and a mixed gas outlet pipe that are connected to each other. The air intake pipe is connected to the gas outlet of the pumping chamber of the previous stage, and the mixed gas discharge pipe is connected to the gas inlet of the pumping chamber of the next stage.
10. The vacuum pump according to claim 9, characterized in that, The upper housing or the lower housing is provided with a high-speed fluid inlet structure that communicates with the high-speed fluid inlet pipeline.