Horizontal carrying device
By employing a top and bottom cover design in a horizontal transport device, and utilizing the elastic structure to achieve elastic deformation under the action of the supporting structure, the problem of the fixed instability of the frame and wafer during transport is solved, thereby improving the stability during transport and preventing wear.
Patent Information
- Application Number
- CN202520155956.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-22
- Publication Date
- 2026-01-27
- Estimated Expiration
- 2035-01-22
AI Technical Summary
Existing horizontal transport devices have poor stability in fixing the frame and wafer, which makes them prone to movement and wear during transport.
A horizontal transport device including a top cover and a bottom cover was designed. The bottom cover has a baffle and an elastic structure. When the top cover and the bottom cover are fastened together, the elastic structure undergoes elastic deformation under the action of the supporting structure, which fastens the product and improves the stability of the fixation.
It effectively improves the stability of the product during transportation, reduces the probability of wear caused by fixed instability, and prevents particulate contamination.
Smart Images
Figure CN223844239U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of wafer storage equipment technology, and more specifically, to a horizontal transport device. Background Technology
[0002] A wafer generally refers to a silicon wafer used to fabricate silicon semiconductor circuits. Wafers are formed by laterally dicing single-crystal silicon ingots. After photolithography, etching, testing, and back-side thinning, the wafer needs to be diced to cut it into a suitable package size. Before dicing, a blue film is attached to the back of the wafer. This film holds the chip in place, maintaining its integrity during dicing and reducing breakage, displacement, and chipping. A ring-shaped frame is used in this process. The wafer is typically placed in the center of the frame, and the blue film is attached to both the frame and the wafer, forming a unified structure for storage.
[0003] Currently, the horizontal transport devices used for storing frames and wafers on the market have poor stability. During the transport process of the horizontal transport device, the frames and wafers are very easy to move, which can easily cause wafer friction and wear. Utility Model Content
[0004] The purpose of this utility model is to provide a horizontal transport device to solve, to a certain extent, the technical problem of poor stability in fixing the frame and wafer in the prior art.
[0005] To achieve the above objectives, the present invention provides the following technical solution:
[0006] A horizontal transport device includes a top cover and a bottom cover; the top cover and the bottom cover are detachably connected to form an enclosed space for placing products;
[0007] The bottom cover includes a bottom cover body and at least two baffle members, all of which are connected to the same surface of the bottom cover body and form a first receiving cavity for receiving the product.
[0008] The baffle is provided with an elastic structure for abutting the product; the top cover has a support structure for abutting the elastic structure;
[0009] When the top cover and the bottom cover are in a snap-fit state, the elastic structure is configured to have elastic deformation toward the first receiving cavity under the force of the supporting structure.
[0010] In any of the above technical solutions, optionally, the baffle member has a baffle opening that penetrates the inner and outer surfaces of the bottom cover, and the elastic structure is disposed within the baffle opening; wherein, the outer surface of the bottom cover is away from the first receiving cavity;
[0011] The elastic structure includes an abutment and an elastic protrusion; along the circumference of the bottom cover, the two ends of the abutment are respectively spaced apart from the baffle, and the elastic protrusion is respectively connected between the two ends of the abutment and the baffle.
[0012] The elastic protrusion protrudes in a direction away from the first receiving cavity;
[0013] When the top cover and the bottom cover are in a snap-fit state, the elastic protrusion is configured to have an elastic deformation toward the first receiving cavity under the force of the supporting structure, so that at least a portion of the abutment moves toward the first receiving cavity, and the elastic protrusion has an elastic restoring force away from the first receiving cavity.
[0014] In any of the above technical solutions, optionally, the number of elastic protrusions at each end of the abutment is at least two, and two adjacent elastic protrusions are arranged along the height direction of the bottom cover.
[0015] Optionally, in any of the above technical solutions, the two ends of the abutment member are respectively spaced apart from the baffle member along the height direction of the bottom cover.
[0016] Optionally, in any of the above technical solutions, the baffle opening is located at the center of the baffle member;
[0017] Both the elastic structure and the baffle are axisymmetric structures.
[0018] All the baffle components together form a centrally symmetrical structure.
[0019] In any of the above technical solutions, optionally, the top cover includes a top cover body and a baffle wall, the baffle wall is connected to the top cover body and forms a second receiving cavity with the top cover body, and the baffle member is located in the second receiving cavity;
[0020] The support structure is located within the second accommodating cavity and is connected to the baffle wall.
[0021] Optionally, in any of the above technical solutions, a connector is provided on the bottom cover; the connector is located on the side of the baffle that is away from the first receiving cavity, and the position of the connector corresponds to the position of the elastic structure;
[0022] The top cover body has a top cover through groove that mates with the connector;
[0023] The top of the connector has a hook; the hook is configured to pass through the top cover slot and engage with the top cover body.
[0024] Optionally, in any of the above technical solutions, the hook is disposed on the side of the connector near the first receiving cavity.
[0025] In any of the above technical solutions, optionally, the top cover body has a recessed platform for accommodating at least part of the hook, and the top cover through groove is disposed on the recessed platform;
[0026] The recessed platform has an arcuate surface; the arcuate surface is curved toward the bottom cover, and the position of the arcuate surface corresponds to the position of at least a portion of the hooks.
[0027] Optionally, in any of the above technical solutions, the top cover has a centrally symmetrical structure.
[0028] The main beneficial effects of this utility model are as follows:
[0029] The horizontal transport device provided by this utility model includes a top cover and a bottom cover. The bottom cover includes a bottom cover body and at least two baffles. All baffles are connected to the same surface of the bottom cover body and form a first receiving cavity for accommodating the product. When the top cover and the bottom cover are in a snap-fit state, the elastic structure has elastic deformation towards the first receiving cavity under the force of the supporting structure, so that the elastic structure can fix the product more firmly, greatly improving the stability of the product being fixed, thereby effectively ensuring the stability of the product during transportation and effectively reducing the probability of the product being worn due to poor fixing stability.
[0030] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0031] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0032] Figure 1 A schematic diagram of the structure of the horizontal transport device provided in the embodiment of this utility model;
[0033] Figure 2 Another perspective structural schematic diagram of the horizontal transport device provided in an embodiment of this utility model;
[0034] Figure 3 for Figure 2 A sectional view of the horizontal transport device shown along line AA;
[0035] Figure 4 for Figure 3 Enlarged view of section B of the horizontal transport unit shown;
[0036] Figure 5 Exploded view of the horizontal transport device provided in the embodiment of this utility model;
[0037] Figure 6 for Figure 5 Enlarged view of section C of the horizontal transport device shown;
[0038] Figure 7 for Figure 5 Enlarged view of section D of the horizontal transport device shown;
[0039] Figure 8 for Figure 5 Enlarged view of area E of the horizontal transport unit shown;
[0040] Figure 9 A schematic diagram of the top cover provided in an embodiment of this utility model;
[0041] Figure 10 for Figure 9 The enlarged view of area F of the top cover is shown.
[0042] Icons: 100-Top cover; 110-Top cover body; 111-Recessed platform; 112-Curved surface; 120-Baffle; 130-Support structure; 200-Bottom cover; 210-Bottom cover body; 220-Baffle piece; 230-Elastic structure; 231-Abutting piece; 232-Elastic protrusion; 240-Connecting piece. Detailed Implementation
[0043] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.
[0044] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0045] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0046] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0047] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0048] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0049] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0050] Example
[0051] This embodiment provides a horizontal transport device that can be used for wafer storage, transfer, etc., such as for horizontal wafer storage. Please refer to... Figure 5 and Figure 9 , Figure 5 and Figure 9 The two surfaces of the top cover are shown. Figure 5 The outer surface of the top cover is shown. Figure 9 The inner surface of the top cover is shown.
[0052] See Figures 1-10As shown, the horizontal transport device includes a top cover 100 and a bottom cover 200; the top cover 100 and the bottom cover 200 are detachably connected to form a closed space for placing products; the products described in this embodiment are, for example, a frame or a wafer, or other similar items.
[0053] The bottom cover 200 includes a bottom cover body 210 and at least two baffle members 220. All baffle members 220 are connected to the same surface of the bottom cover body 210 and form a first receiving cavity for accommodating products; for example, all baffle members 220 are connected to the upper surface of the bottom cover body 210. By accommodating wafers or wafer-mounted frames in the first receiving cavity, the movement of the frames or wafers can be reduced to a certain extent, thereby preventing particulate contamination of the wafers due to movement.
[0054] The baffle 220 is provided with an elastic structure 230 for abutting the product; the top cover 100 has a support structure 130 for abutting the elastic structure 230.
[0055] When the top cover 100 and the bottom cover 200 are in the latched state, the elastic structure 230 is configured to have elastic deformation toward the first receiving cavity under the force of the support structure 130. When the top cover 100 and the bottom cover 200 are closed, the support structure 130 drives the elastic structure 230 to hold the wafer or wafer-carrying frame, etc., located in the first receiving cavity, so as to keep the product stable during transportation or movement; when the top cover 100 is opened, the support structure 130 moves away from the elastic structure 230, and the elastic structure 230 returns to its original position under the rebound force of the elastic deformation, so that the wafer or wafer-carrying frame, etc., can be smoothly removed from the first receiving cavity. Thus, when the top cover 100 and the bottom cover 200 are closed, they are in a latched state.
[0056] The horizontal transport device described in this embodiment includes a top cover 100 and a bottom cover 200. The bottom cover 200 includes a bottom cover body 210 and at least two baffle members 220. All baffle members 220 are connected to the same surface of the bottom cover body 210 and form a first receiving cavity for accommodating the product. When the top cover 100 and the bottom cover 200 are in a snap-fit state, the elastic structure 230 has an elastic deformation towards the first receiving cavity under the force of the supporting structure 130, so that the elastic structure 230 fixes the product more firmly, which greatly improves the stability of the product being fixed, thereby effectively ensuring the stability of the product during transportation and effectively reducing the probability of the product being worn due to poor fixing stability.
[0057] The horizontal transport device described in this embodiment, by providing an elastic structure 230 in the bottom cover 200, can effectively secure the product when the top cover 100 is fastened, and automatically return to its original position after the top cover 100 is opened, preventing fatigue caused by prolonged fastening. This horizontal transport device can effectively fix the product in the first receiving cavity in a fixed state during transportation or vibration, and can effectively reduce the increase of frictional particles during product movement.
[0058] See Figure 7 As shown, in an optional embodiment, the baffle member 220 has a baffle opening that penetrates the inner and outer surfaces of the bottom cover 200, and the elastic structure 230 is disposed within the baffle opening; wherein, the outer surface of the bottom cover 200 is away from the first receiving cavity.
[0059] The elastic structure 230 includes an abutment 231 and an elastic protrusion 232; along the circumference of the bottom cover 200, the two ends of the abutment 231 are respectively spaced apart from the baffle 220, and the two ends of the abutment 231 are respectively connected to the baffle 220 by the elastic protrusion 232.
[0060] The elastic protrusion 232 protrudes in a direction away from the first receiving cavity.
[0061] When the top cover 100 and the bottom cover 200 are engaged, the elastic protrusion 232 is configured to elastically deform toward the first receiving cavity under the force of the support structure 130, so that at least part of the abutment 231 moves toward the first receiving cavity, and the elastic protrusion 232 has an elastic restoring force away from the first receiving cavity. When the top cover 100 and the bottom cover 200 are closed, the support structure 130 drives the elastic protrusion 232 to elastically deform toward the first receiving cavity, so that at least part of the abutment 231 moves toward the first receiving cavity, thereby allowing the abutment 231 to hold the wafer or wafer-carrying frame or other product located in the first receiving cavity, so that the product remains stable during transportation or movement; when the top cover 100 is opened, the support structure 130 moves away from the elastic protrusion 232, and the elastic protrusion 232 returns to its original position under the restoring force of the elastic deformation, so that the abutment 231 returns to its original position.
[0062] See Figure 7 As shown, in an optional embodiment, the number of elastic protrusions 232 at each end of the abutment member 231 is at least two, and two adjacent elastic protrusions 232 are arranged along the height direction of the bottom cover 200. The height direction of the bottom cover 200 is, for example, the fastening direction between the top cover 100 and the bottom cover 200.
[0063] Optionally, the number of elastic protrusions 232 at each end of the abutment 231 may be, for example, two, three, four, etc.
[0064] See Figure 7As shown, in an optional embodiment, along the height direction of the bottom cover 200, the two ends of the abutment 231 are respectively spaced apart from the baffle 220, that is, the abutment 231 and the baffle 220 are spaced apart, and the abutment 231 is connected to the baffle 220 through the elastic protrusion 232. By spaced apart from the baffle 220, the abutment 231 can move closer to or further away from the first receiving cavity with the elastic protrusion 232, thereby facilitating the abutment 231 to better hold or release the product.
[0065] In an optional embodiment, the baffle opening is located at the center of the baffle member 220 to facilitate production operations.
[0066] In the optional embodiment, both the elastic structure 230 and the baffle 220 are axisymmetric structures to facilitate production operations.
[0067] In the optional embodiment, all baffle components 220 form a centrally symmetrical structure to facilitate production operations.
[0068] See Figures 1-10 As shown, in an optional embodiment, the top cover 100 includes a top cover body 110 and a baffle 120. The baffle 120 is connected to the top cover body 110, and the baffle 120 and the top cover body 110 form a second receiving cavity. The baffle member 220 is located in the second receiving cavity. The support structure 130 is located in the second receiving cavity and connected to the baffle 120.
[0069] In the optional embodiment, the top cover 100 has a centrally symmetrical structure, that is, the top cover 100 has no directionality, which makes it easy for the top cover 100 to close the bottom cover 200 from any direction, so as to facilitate production operations.
[0070] See Figures 1-6 As shown, in an optional embodiment, a connector 240 is provided on the bottom cover 200; the connector 240 is located on the side of the baffle 220 away from the first receiving cavity, and the position of the connector 240 corresponds to the position of the elastic structure 230.
[0071] The top cover body 110 has a top cover 100 through groove that mates with the connector 240.
[0072] The top of the connector 240 has a hook; the hook is configured to pass through a slot in the top cover 100 and engage with the top cover body 110. The connector 240 provides a better connection between the top cover 100 and the bottom cover 200. The position of the connector 240 corresponds to the position of the resilient structure 230, so that when the top cover 100 and the bottom cover 200 are closed, the resilient structure 230 can better secure the product located in the first receiving cavity.
[0073] See Figure 6As shown, in an optional embodiment, the hook is provided on the side of the connector 240 near the first receiving cavity, so that the connector 240 can better connect the top cover 100 and the bottom cover 200.
[0074] See Figure 8 As shown, in an optional embodiment, the top cover body 110 has a recess 111 that accommodates at least part of the hook, and the top cover 100 has a through groove disposed on the recess 111; the recess 111 facilitates the hook of the connector 240 to engage with the top cover body 110.
[0075] Optionally, the recess 111 has an arcuate portion 112; the arcuate portion 112 is curved toward the bottom cover 200, and the position of the arcuate portion corresponds to the position of at least part of the hook. The arcuate portion 112 improves the flexibility of the recess 111, which facilitates the hook of the connector 240 engaging with or disengaging from the recess 111.
[0076] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.
Claims
1. A horizontal transport device, characterized in that, Includes a top cover and a bottom cover; the top cover and the bottom cover are detachably connected to form an enclosed space for placing the product; The bottom cover includes a bottom cover body and at least two baffle members, all of which are connected to the same surface of the bottom cover body and form a first receiving cavity for receiving the product. The baffle is provided with an elastic structure for abutting the product; the top cover has a support structure for abutting the elastic structure; When the top cover and the bottom cover are in a snap-fit state, the elastic structure is configured to have elastic deformation toward the first receiving cavity under the force of the supporting structure.
2. The horizontal transport device according to claim 1, characterized in that, The baffle member has a baffle opening that penetrates the inner and outer surfaces of the bottom cover, and the elastic structure is disposed within the baffle opening; wherein, the outer surface of the bottom cover faces away from the first receiving cavity; The elastic structure includes an abutment and an elastic protrusion; along the circumference of the bottom cover, the two ends of the abutment are respectively spaced apart from the baffle, and the elastic protrusion is respectively connected between the two ends of the abutment and the baffle. The elastic protrusion protrudes in a direction away from the first receiving cavity; When the top cover and the bottom cover are in a snap-fit state, the elastic protrusion is configured to have an elastic deformation toward the first receiving cavity under the force of the supporting structure, so that at least a portion of the abutment moves toward the first receiving cavity, and the elastic protrusion has an elastic restoring force away from the first receiving cavity.
3. The horizontal transport device according to claim 2, characterized in that, The number of elastic protrusions at each end of the abutment is at least two, and two adjacent elastic protrusions are arranged along the height direction of the bottom cover.
4. The horizontal transport device according to claim 2, characterized in that, Along the height direction of the bottom cover, the two ends of the abutment member are respectively spaced apart from the baffle member.
5. The horizontal transport device according to claim 2, characterized in that, The baffle opening is located at the center of the baffle component; Both the elastic structure and the baffle are axisymmetric structures. All the baffle components together form a centrally symmetrical structure.
6. The horizontal transport device according to claim 1, characterized in that, The top cover includes a top cover body and a baffle wall. The baffle wall is connected to the top cover body and forms a second receiving cavity with the top cover body. The baffle member is located in the second receiving cavity. The support structure is located within the second accommodating cavity and is connected to the baffle wall.
7. The horizontal transport device according to claim 6, characterized in that, A connector is provided on the bottom cover; the connector is located on the side of the baffle that is away from the first receiving cavity, and the position of the connector corresponds to the position of the elastic structure; The top cover body has a top cover through groove that mates with the connector; The top of the connector has a hook; the hook is configured to pass through the top cover slot and engage with the top cover body.
8. The horizontal transport device according to claim 7, characterized in that, The hook is located on the side of the connector near the first receiving cavity.
9. The horizontal transport device according to claim 7, characterized in that, The top cover body has a recessed platform that accommodates at least a portion of the hook, and the top cover through groove is disposed on the recessed platform; The recessed platform has an arcuate surface; the arcuate surface is curved toward the bottom cover, and the position of the arcuate surface corresponds to the position of at least a portion of the hooks.
10. The horizontal transport device according to claim 1, characterized in that, The top cover has a centrally symmetrical structure.