Quartz tube cleaning tool

Abstract

The utility model relates to the technical field of quartz processing, in particular to a quartz tube cleaning tool which comprises a bottom plate, a contact frame, side supports and a placing frame. A plurality of first water permeable holes are formed in the bottom plate; at least one placing rack is fixedly arranged on the bottom plate, the placing rack comprises a first connecting plate and a second connecting plate, and the first connecting plate and the second connecting plate are fixedly connected through a connecting cross rod; a first extension plate and a second extension plate are arranged on each of the first connecting plate and the second connecting plate; the first extension plates located on the first connecting plate and the second connecting plate are fixedly connected through a connecting frame, and the second extension plates located on the first connecting plate and the second connecting plate are fixedly connected through a connecting frame. In order to solve the technical problem that an existing tool for quartz tube machining has defects, the quartz tubes can be stably erected, the requirement for cleaning the quartz tubes is met, cleaning agents are not prone to being accumulated, the quartz tubes can be mutually stacked, and therefore the requirement for batch transfer of the cleaned quartz tubes is met, and carrying efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz processing technical field, concretely relates to a quartz tube cleaning frock. BACKGROUND

[0002] Quartz tube as one of the representative products of quartz has a wide range of applications in semiconductor equipment. After the quartz tube is manufactured, its cleaning and handling process has an important influence on subsequent processing. In the traditional quartz tube cleaning link, a specific frock is generally used, but such frock is not convenient for batch handling of quartz tubes. In order to improve efficiency, the handling of quartz tubes relies on other frocks. Obviously, since different frocks are used, the quartz tubes need to be transferred in different frocks before and after cleaning. Such operation of changing frocks multiple times not only increases the complexity of production process, but also may cause scratches on the quartz tubes due to contact friction during the transfer process, resulting in product defects. SUMMARY

[0003] In view of the technical problem of defects existing in the existing quartz tube processing frock, the utility model provides a quartz tube cleaning frock which can stably erect quartz tubes, meet the cleaning of quartz tubes, is not easy to accumulate cleaning agent, and can be stacked with each other, thereby meeting the demand of batch transfer of cleaned quartz tubes and improving handling efficiency.

[0004] The utility model discloses a technical scheme that a quartz tube cleaning frock, including bottom plate, contact frame, side support and placing rack, the contact frame is located one side of bottom plate, and bottom plate with contact frame are fixedly connected through side support, be provided with a plurality of first water -permeable hole on bottom plate, be provided with at least one placing rack on bottom plate, and the placing rack includes first connecting plate and second connecting plate, first connecting plate and second connecting plate are opposite and set up, and first connecting plate and second connecting plate are fixedly connected through connecting cross bar between first connecting plate and second connecting plate, first connecting plate and second connecting plate all are provided with first extension plate and second extension plate, first extension plate and second extension plate all are inclined to the side away from the connecting cross bar and set up, and be fixedly connected through connecting frame between first extension plate on first connecting plate and second connecting plate and between second extension plate on first connecting plate and second connecting plate.

[0005] Optionally, at least one support plate is fixedly arranged on the contact frame.

[0006] Optionally, a plurality of second water-permeable holes are arranged on the support plate.

[0007] Optionally, a limiting clamping groove is arranged on one of the bottom plate and the connecting cross bar, and a limiting protrusion is fixedly arranged on the other one, and the limiting clamping groove and the limiting protrusion are inserted and matched.

[0008] Optionally, a through connecting hole is arranged on the first connecting plate and the second connecting plate.

[0009] Optionally, the distance from the bottom plate to the contact frame is 1.2-1.5 times of the outer diameter of the quartz tube.

[0010] Optionally, the distance D1 between the first connecting plate and the second connecting plate is less than or equal to the width D2 of the bottom plate.

[0011] Optionally, the bottom plate, the contact frame, the side support and the placing rack are made of acid-resistant material.

[0012] Compared with the prior art, the technical scheme has the following beneficial effects: the quartz tube cleaning tool can stably erect the quartz tube, meet the cleaning of the quartz tube, is not easy to accumulate the cleaning agent, can be stacked, and thus meets the batch transportation demand of the cleaned quartz tube and improves the transportation efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0013] Fig. 1 The structure diagram of the quartz tube cleaning tool is provided for the embodiments of the utility model.

[0014] Fig. 2 The structure diagram of the placing rack is provided for the embodiments of the utility model.

[0015] Fig. 3 The stacking diagram of the quartz tube cleaning tool is provided for the embodiments of the utility model. DETAILED DESCRIPTION

[0016] In order to further understand the content of the utility model, the utility model is described in detail in combination with the drawings and the embodiments.

[0017] The application will be described in further detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only intended to explain the related utility model, and not to limit the utility model. In addition, it should be noted that only parts related to the utility model are shown in the drawings for ease of description. The terms first, second, etc. in the utility model are set for the convenience of describing the technical solutions of the utility model, and have no specific limiting effect, and all refer to the technical solutions of the utility model. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. In the description of the utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the utility model. In addition, the terms "first", "second", "third" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance. Unless otherwise specified and limited, the terms "mounting", "connection" and "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances. The technical solutions in the same embodiment and the technical solutions in different embodiments can be arranged and combined to form new technical solutions that do not have contradictions or conflicts, and are within the scope of protection of the utility model.

[0018] In combination with the drawings Figs. 1-3 The embodiment provides a quartz tube cleaning tool, which comprises a bottom plate 1, a contact frame 2, a side support 3 and a placing rack 4. The contact frame 2 is located on one side of the bottom plate 1, and the bottom plate 1 and the contact frame 2 are fixedly connected through the side support 3; a plurality of first water-permeable holes 10 are arranged on the bottom plate 1.

[0019] At least one placing rack 4 is fixedly arranged on the bottom plate 1, the placing rack 4 comprises a first connecting plate 41 and a second connecting plate 42, the first connecting plate 41 and the second connecting plate 42 are oppositely arranged, and the first connecting plate 41 and the second connecting plate 42 are fixedly connected through a connecting cross bar 43; the first connecting plate 41 and the second connecting plate 42 are both provided with a first extension plate 44 and a second extension plate 45, and the first extension plate 44 and the second extension plate 45 are both arranged to be inclined to one side away from the connecting cross bar 43; 置The first extension plate 44 between the first connecting plate 41 and the second connecting plate 42 and the second extension plate 45 between the first connecting plate 41 and the second connecting plate 42 are fixedly connected through the connecting frame 46.

[0020] In use, the quartz tube cleaning tool of the embodiment first places the quartz tube on the placing frame 4. Multiple placing frames 4 can be arranged on one quartz tube cleaning tool, that is, multiple quartz tubes can be placed. The connecting frame 46 on the placing frame 4 blocks the circumferential rolling of the quartz tube. Since the first extension plate 44 and the second extension plate 45 are both arranged obliquely away from the connecting cross bar 43, the placing frame 4 can accommodate quartz tubes of different sizes, and has more excellent practicability.

[0021] After the quartz tube is placed on the placing frame 4, the quartz tube cleaning tool with the quartz tube is moved to the cleaning station for cleaning. After cleaning is completed, the quartz tube cleaning tool is moved to batch transport the quartz tube to the production workshop for the next process.

[0022] In the embodiment, the bottom plate 1 is provided with a plurality of first water permeable holes 10. The first water permeable holes 10 can ensure that the quartz tube cleaning tool can fully permeate water during the cleaning process, avoid the accumulation of cleaning liquid, and avoid the influence of residual cleaning liquid on subsequent processing.

[0023] In addition, the cleaning process of the quartz tube generally involves pickling. Therefore, the quartz tube cleaning tool needs to be made of a pickling-resistant material. The bottom plate 1, the contact frame 2, the side support 3, and the placing frame 4 can generally be made of a pickling-resistant material such as PP, PTFE, or a four-fluorine corrosion-resistant material.

[0024] As shown in the accompanying drawings, Fig. 3 It can be understood that multiple quartz tube cleaning tools can be stacked, and the stacked quartz tube cleaning tools can be transported as a whole by a forklift or other transportation equipment. Due to the limiting effect of the placing frame 4 on the quartz tube, the quartz tube will not roll during transportation and can remain stable, thereby further improving transportation efficiency.

[0025] In a preferred embodiment, at least one support plate 20 is fixedly arranged on the contact frame 2. The support plate 20 is arranged to improve the overall strength of the contact frame 2, so that the overall structure of the quartz tube cleaning tool can be more stable. The support plate 20 can further provide support when the quartz tube cleaning tools are stacked, so as to ensure that the stacked quartz tube cleaning tools remain stable as a whole.

[0026] In a further embodiment, a plurality of second water permeable holes 21 are arranged on the support plate 20. Similar to the first water permeable holes 10, the second water permeable holes 21 are also arranged to ensure that the stacked quartz tube cleaning tools can fully permeate water during the cleaning process, avoid the accumulation of cleaning liquid, and avoid the influence of residual cleaning liquid on subsequent processing.

[0027] In one embodiment, the limiting slot 5 is arranged on one of the bottom plate 1 and the connecting cross bar 43, and the limiting protrusion 6 is fixedly arranged on the other one, and the limiting slot 5 and the limiting protrusion 6 are insertedly matched. Thus, through the matching arrangement of the limiting slot 5 and the limiting protrusion 6, the stable matching of the placing rack 4 and the bottom plate 1 can be ensured, so as to ensure the stability of the quartz tube placement.

[0028] In another embodiment, the first connecting plate 41 and the second connecting plate 42 are both provided with the through connecting hole 40, and when the connecting member such as the bolt, the pin and the like provided with the through connecting hole 40 is arranged, the stable connection of the placing rack 4 and the bottom plate 1 can be ensured, so as to ensure the stability of the quartz tube placement.

[0029] In order to facilitate the placement and taking out of the quartz tube, in the preferred embodiment, the distance from the bottom plate 1 to the contact frame 2 is 1.2-1.5 times of the outer diameter of the quartz tube, so that the quartz tube cleaning tool has sufficient height space and the operation is facilitated.

[0030] In other embodiments, the interval D1 of the first connecting plate 41 and the second connecting plate 42 is less than or equal to the width D2 of the bottom plate 1, and the purpose is to control the relationship between the length of the placing rack 4 and the width of the bottom plate 1. The interval D1 of the first connecting plate 41 and the second connecting plate 42 actually refers to the length of the placing rack 4, and the length should not exceed the width D2 of the bottom plate 1, so as to avoid the quartz tube with the length exceeding the width D2 of the bottom plate 1. The quartz tube with the length exceeding the width D2 of the bottom plate 1 is more likely to be damaged by knocking. The quartz tube with the length less than the width D2 of the bottom plate 1 can completely fall within the structure range of the quartz tube cleaning tool, and the quartz tube cleaning tool can thus protect the internal quartz tube.

[0031] The above describes the present application and its embodiments in a schematic manner, and the description is not limited, and the shown in the drawings is only one of the embodiments of the present application, and the actual structure is not limited thereto. Therefore, if the ordinary skilled in the art is inspired thereby, without departing from the creative purpose of the present application, the similar structure mode and the embodiments are not creatively designed, and all should belong to the protection scope of the present application.

Claims

1. A quartz tube cleaning tool characterized by comprising: It comprises a bottom plate (1), a contact frame (2), a side support (3) and a placing rack (4); The contact frame (2) is located on one side of the bottom plate (1), and the bottom plate (1) and the contact frame (2) are fixedly connected through the side support (3); a plurality of first water-permeable holes (10) are arranged on the bottom plate (1); At least one placing rack (4) is fixedly arranged on the bottom plate (1), and the placing rack (4) comprises a first connecting plate (41) and a second connecting plate (42), the first connecting plate (41) and the second connecting plate (42) are oppositely arranged, and the first connecting plate (41) and the second connecting plate (42) are fixedly connected through a connecting cross bar (43); First extension plates (44) and second extension plates (45) are arranged on the first connecting plate (41) and the second connecting plate (42), and the first extension plates (44) and the second extension plates (45) are inclinedly arranged away from the connecting cross bar (43); The first extension plates (44) located between the first connecting plate (41) and the second connecting plate (42) and the second extension plates (45) located between the first connecting plate (41) and the second connecting plate (42) are fixedly connected through connecting frames (46).

2. The quartz tube cleaning tool according to claim 1, wherein At least one supporting plate (20) is fixedly arranged on the contact frame (2).

3. The quartz tube cleaning tool of claim 2, wherein, A plurality of second water-permeable holes (21) are arranged on the supporting plate (20).

4. The quartz tube cleaning tool of claim 1, wherein, A limiting clamping groove (5) is arranged on one of the bottom plate (1) and the connecting cross bar (43), and a limiting protrusion (6) is fixedly arranged on the other one, and the limiting clamping groove (5) and the limiting protrusion (6) are inserted and matched.

5. The quartz tube cleaning tool of claim 1, wherein, Connecting holes (40) are arranged on the first connecting plate (41) and the second connecting plate (42).

6. The quartz tube cleaning tool of claim 1, wherein, The distance from the bottom plate (1) to the contact frame (2) is 1.2-1.5 times the outer diameter of the quartz tube.

7. The quartz tube cleaning tool of claim 1, wherein, The interval D1 of the first connecting plate (41) and the second connecting plate (42) is less than or equal to the width D2 of the bottom plate (1).

8. The quartz tube cleaning tool of claim 1, wherein, The bottom plate (1), the contact frame (2), the side support (3) and the placing rack (4) are all made of acid-resistant materials.

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