Public rotation and rotation mechanism and vacuum treatment equipment

Abstract

The utility model discloses a revolution and rotation mechanism. The revolution and rotation mechanism comprises a central shaft and revolution and rotation modules, a plurality of revolution and rotation modules are arranged at intervals in the axial direction of the central shaft; the revolution and rotation module comprises a rotation driving gear and a fixed power strip which are coaxially arranged in the circumferential direction of the central shaft, a plurality of revolution transmission gears are rotationally arranged on the fixed power strip, the revolution transmission gears are meshed with the rotation driving gear, and a workpiece to be coated is arranged on the revolution transmission gears; the rotation driving gear is fixedly or rotatably connected with the center shaft, the fixed power strip is rotatably or fixedly connected with the center shaft, when the rotation driving gear is fixedly connected with the center shaft, the fixed power strip is rotatably connected with the center shaft and is driven to rotate through the driving part, and the center shaft is fixedly arranged on the fixed end sleeve. The vacuum treatment equipment is vacuum coating equipment with a revolution and rotation mechanism. Through modular design, a plurality of coaxial bevel gear sets are designed, each rotation driving gear drives a plurality of revolution transmission gears in the same set to rotate, the rotation inclination angle of the coating jig is adjustable, and the coating jig better meets the film forming requirement of a complex curved surface.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of revolution and rotation mechanism and vacuum processing equipment, belong to the technical field of rotary transmission mechanism. BACKGROUND

[0002] Functional film such as optical film can improve the comprehensive performance of workpiece such as optics, electricity and machinery, therefore, more and more workpieces need to be improved by vacuum processing mode such as vacuum coating to improve the comprehensive performance of products. For example, when the surface to be processed of workpiece is spherical surface or other non-planar surface, the workpiece is usually loaded on workpiece fixture, and the expected coating uniformity is realized by using revolution and rotation mechanism. To realize the revolution and rotation movement of workpiece, multiple gear mechanisms can be used to drive multiple workpieces to revolve and rotate respectively. However, when the aforementioned workpiece fixture is placed in vacuum coating equipment for coating, the coating uniformity between workpieces at different positions on workpiece fixture or between different positions of the same workpiece may still have obvious difference. Moreover, when the surface to be processed of workpiece is complex curved surface or the shape of surface to be processed changes, workpiece fixture often needs to be redesigned to obtain the expected coating effect.

[0003] Therefore, there is an urgent need in the art for a revolution and rotation mechanism and vacuum processing equipment that can satisfy the coating effect of better coating uniformity when the surface to be processed of workpiece is complex curved surface or the shape of surface to be processed changes. SUMMARY

[0004] The utility model aims at providing a kind of revolution and rotation mechanism and vacuum processing equipment, by modularization design, design out coaxial multiple bevel gear sets, each big bevel gear drives multiple small bevel gears of same group to rotate, the rotation angle of coating fixture is adjustable, better fit the film-forming demand of complex curved surface.

[0005] To achieve the above technical purpose and achieve the above technical effect, the utility model realizes the following technical scheme:

[0006] The utility model provides a kind of revolve and rotate mechanism, including driving part, center shaft, revolve and rotate module and fixed end sleeve;The transmission axis of the driving part coincides with the axis of the center shaft, the revolve and rotate module is provided with multiple and is arranged along the center shaft axial direction interval;The revolve and rotate module includes rotation driving gear, fixed socket and revolves transmission gear, the rotation driving gear and the fixed socket are coaxially arranged in the circumferential direction of the center shaft, the revolves transmission gear is set up multiple and is rotated on the fixed socket, the revolves transmission gear is engaged with the rotation driving gear, and the workpiece to be coated can be detachably connected to the revolves transmission gear;The rotation driving gear is fixed / rotational connected with the center shaft, and the fixed socket is rotational / fixed connected with the center shaft, specifically: when the rotation driving gear is fixedly connected with the center shaft, the fixed socket is rotational connected with the center shaft, the driving part drives the fixed socket to rotate, and the center shaft is fixedly arranged in the fixed end sleeve.

[0007] Preferably, the rotation driving gear is fixed / rotational connected with the center shaft, and the fixed socket is rotational / fixed connected with the center shaft, and further comprising: when the fixed socket is fixedly connected with the center shaft, the rotation driving gear is rotational connected with the center shaft, the driving part drives the center shaft to rotate, and the center shaft is rotatably arranged in the fixed end sleeve.

[0008] Preferably, the revolve and rotate module further comprises a transmission shaft, the transmission shaft is arranged on the outer wall of the fixed socket and corresponds to the revolves transmission gear, and the revolves transmission gear is rotatably arranged on the transmission shaft with the transmission shaft as the axis.

[0009] Further, the outer wall of the fixed socket corresponds to the transmission shaft and is provided with an inclined surface, the cross-sectional area of the fixed socket gradually decreases in the direction close to the rotation driving gear, and the inclination angle of the transmission shaft of each group of revolve and rotate modules is independently set according to the coating requirement.

[0010] Further, the transmission shaft is rotatably arranged on the inclined surface of the fixed socket, and the revolves transmission gear is coaxially fixedly sleeved on the outer wall of the transmission shaft.

[0011] Further, the rotation driving gear is a large bevel gear, the revolves transmission gear is a small bevel gear, and the plurality of transmission shafts and revolves transmission gears are uniformly arranged in the circumferential direction of the center shaft.

[0012] Preferably, a connecting seat is detachably connected to the driving end of the driving part, the center shaft penetrates through the connecting seat, and the fixed socket is rotatably sleeved on the center shaft and is detachably connected and fixed with the inner wall of the connecting seat.

[0013] Further, the connecting seat comprises a synchronous rotation upper end and a rotation shaft synchronous side plate, the rotation shaft synchronous side plate is provided with two plates, the two rotation shaft synchronous side plates are symmetrically arranged on both sides of the synchronous rotation upper end to form a 'Dong' type seat body, the driving end of the driving part is detachably connected at the opening at the bottom end of the connecting seat, and the fixed row is detachably connected and fixed with the inner walls of the rotation shaft synchronous side plates on both sides.

[0014] In a second aspect, the utility model provides a kind of vacuum processing equipment, including vacuum coating equipment, the vacuum coating equipment has above-mentioned revolute mechanism.

[0015] The revolute mechanism and the vacuum processing equipment provided by the utility model have the following advantages.

[0016] 1.The revolute mechanism of the utility model adopts coaxial driving of several self-rotation driving gears with large bevel gears, each large self-rotation driving gear drives a plurality of revolution transmission gears with small bevel gears in the same group, each group can be freely switched, coaxially assembled, and the small revolution transmission gears in the same group are installed on the same fixed row, and the fixed row and the central shaft rotate relative to each other. Since the revolution transmission gears mesh with the self-rotation driving gears, and the self-rotation driving gears do not rotate around the central shaft, the revolution transmission gears will also rotate around the transmission shaft under the action of the self-rotation driving gears while revolving, and the inclination angle of the revolution transmission gears relative to the central shaft can be preset through the inclined holes on the fixed row, thereby better meeting the film formation requirements of complex curved surfaces.

[0017] 2.The revolute mechanism of the utility model has a plurality of small bevel gears distributed around the opposite sides of the large bevel gear, which meshes with the self-rotation driving gears with large bevel gears and the central shaft, and the stress is more uniform, the operation is stable, and the load fluctuation range is small. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 Fig. 1 is a structural schematic view of a revolute mechanism according to an embodiment of the utility model;

[0019] Figure 2 Fig. 2 is a sectional structural schematic view of a revolute mechanism according to the first embodiment of the utility model;

[0020] Figure 3 Fig. 3 is a sectional structural schematic view of a revolute mechanism according to the second embodiment of the utility model

[0021] In the drawings:

[0022] 1-connection seat; 11-synchronous rotation upper end; 12-rotary shaft synchronous side plate; 2-driving member; 3-center shaft; 4-public rotation module; 41-rotation driving gear; 42-fixed plugboard; 421-inclined hole; 422-inclined surface; 43-rotation transmission gear; 44-transmission shaft; 5-fixed end sleeve; 6-workpiece to be plated; 7-bearing. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0024] Embodiment one:

[0025] Referring to Figure 1 and Figure 2 A public rotation mechanism, comprising a driving member 2, a center shaft 3, a public rotation module 4 and a fixed end sleeve 5, the transmission axis of the driving member 2 coincides with the axis of the center shaft 3, the public rotation module 4 is installed with a plurality of and is arranged along the center shaft 3 axially.

[0026] The public rotation module 4 comprises a rotation driving gear 41, a fixed plugboard 42 and a rotation transmission gear 43, the rotation driving gear 41 and the fixed plugboard 42 are coaxially installed on the circumference of the center shaft 3, the rotation transmission gear 43 is installed with a plurality of and is arranged on the fixed plugboard 42, the rotation transmission gear 43 is engaged with the rotation driving gear 41, the workpiece to be plated 6 can be detachably installed on the rotation transmission gear 43, in a feasible embodiment, the rotation driving gear 41 is fixedly or rotatably connected with the center shaft 3, the fixed plugboard 42 is rotatably or fixedly connected with the center shaft 3, specifically:

[0027] When the rotation driving gear 41 is fixedly connected with the center shaft 3, the fixed mode of the rotation driving gear 41 includes but is not limited to bolt fastening or key groove, key pin cooperation and fixation, the fixed plugboard 42 is rotatably connected with the center shaft 3, the driving member 2 drives the rotation of the fixed plugboard 42, the driving mode of the driving member 2 to drive the fixed plugboard 42 includes but is not limited to direct driving through the driving member 2 or driving through the connection seat 1, in the present embodiment, the fixed plugboard 42 is preferably driven to be arranged by the driving member 2 in cooperation with the connection seat 1, the fixed plugboard 42 is rotatably arranged outside the center shaft 3 and is detachably connected and fixed with the inner wall of the connection seat 1, the center shaft 3 is fixedly installed with the fixed end sleeve 5, the fixed end sleeve 5 is used for connecting the fixed seat of the suspension device, specifically, the suspension device can be a vacuum plating device, and the public rotation mechanism can be installed on the rotating frame in the vacuum plating device.

[0028] Referring toFigure 1 And Figure 2 The public-rotating module further comprises a transmission shaft 44, a plurality of transmission shafts 44 are installed on the outer wall of the fixed plug-in row 42 and are arranged obliquely, in this embodiment, the transmission shaft 44 is integrally formed with the fixed plug-in row 42, the public-rotating transmission gear 43 is correspondingly provided with a plurality of transmission shafts 44 and is rotatably sleeved on the transmission shaft 44, the inclination angle of the transmission shaft 44 of each group of public-rotating modules 4 is independently set according to the plating film requirement, when each set of public-rotating modules 4 is coaxially installed, which group of public-rotating modules 4 is freely used according to the plating film requirement, and the state that the transmission shaft 44 is perpendicular and parallel to the central shaft 3 is also within the protection scope of the present application.

[0029] When the transmission shaft 44 is arranged obliquely, a plurality of inclined surfaces 422 corresponding to the number of the transmission shaft 44 are integrally formed on the outer wall of the fixed plug-in row 42, and the cross-sectional area of the fixed plug-in row 42 gradually decreases in the direction close to the self-rotating driving gear 41.

[0030] Referring to Figure 1 In a further embodiment, the connecting seat 1 is detachably installed on the driving end of the driving member 2, the driving member 2 is preferably a servo motor, the central shaft 3 penetrates the connecting seat 1 and is rotatably connected with the connecting seat 1 through the bearing 7, the rotation axis of the connecting seat 1 coincides with the axis of the central shaft 3, when the plating film operation is performed, the fixed plug-in row 42 drives the public-rotating transmission gear 43 to rotate around the axis of the central shaft 3 together with the connecting seat 1; when rotating, since the public-rotating transmission gear 43 is engaged with the self-rotating driving gear 41 and the self-rotating driving gear 41 does not rotate around the central shaft 3, the public-rotating transmission gear 43 will rotate around the transmission shaft 44 under the action of the self-rotating driving gear 41 while rotating around the central shaft 3, thereby achieving the purpose that the workpiece 6 to be plated rotates around the central shaft 3 while rotating around the transmission shaft 44, in this embodiment, the self-rotating driving gear 41 is a large bevel gear, the public-rotating transmission gear 43 is a small bevel gear, the plurality of transmission shafts 44 and the public-rotating transmission gear 43 are uniformly arranged in the circumferential direction of the central shaft 3, so that the self-rotating driving gear 41 and the central shaft 3 are more evenly stressed, stably operated and have a small load fluctuation range.

[0031] Referring to Figure 1 The connecting seat 1 comprises a synchronous rotating upper end 11 and a rotating shaft synchronous side plate 12, two rotating shaft synchronous side plates 12 are symmetrically installed on both sides of the synchronous rotating upper end 11 through bolts to form a “|” type seat body, the driving end of the driving member 2 is fixedly installed at the opening at the bottom end of the connecting seat 1 through bolts, and the fixed plug-in row 42 is fixedly connected with the inner walls of the rotating shaft synchronous side plates 12 on both sides through bolts, so that the whole device is convenient to disassemble and assemble.

[0032] Embodiment two:

[0033] Referring to Figure 1 And Figure 3The embodiment is different from the embodiment one in that the transmission shaft 44 is rotationally connected with the fixed row 42, the revolving transmission gear 43 is fixedly sleeved on the outer wall of the transmission shaft 44, the inclined hole 421 for rotationally sleeving the transmission shaft 44 is formed on each inclined surface 422 of the fixed row 42, the inclined hole 421 is a circular hole formed perpendicularly to the inclined surface 422, and the transmission shaft 44 is coaxially rotationally sleeved in the inclined hole 421. In the feasible embodiment, the transmission shaft 44 can be cut and formed in the fixed row 42, or can be rotationally sleeved in the fixed row 42 through the cover plate detachably connected with the fixed row 42, which is prior art and will not be described in detail.

[0034] Embodiment three:

[0035] The embodiment is different from the embodiment one in that the revolving driving gear 41 is rotationally sleeved on the outer wall of the central shaft 3, the rotationally connecting structure of the revolving driving gear 41 is achieved by setting the step and the bearing (not shown in the figure) on the central shaft 3, the fixed row 42 is fixedly sleeved on the outer wall of the central shaft 3, and when the fixed row 42 is thus arranged, the connecting seat 1 is not needed, the driving end of the driving part 2 is directly connected with the central shaft 3 to drive the central shaft 3 to rotate, and the central shaft 3 is rotationally connected with the fixed end sleeve 5. It can be understood that the connecting seat 1 can also be arranged in the embodiment to connect the revolving driving gears 41 to the fixed end sleeve 5, so as to improve the stability of the whole mechanism.

[0036] When the rotation driving is performed, the fixed row 42 and the revolving transmission gear 43 rotate synchronously with the central shaft 3, so as to realize the revolution motion of the revolving transmission gear 43, the revolving transmission gear 43 has the tendency to drive the revolving driving gear 41 rotationally engaged with the revolving transmission gear 43 to rotate, and in turn drives the revolving transmission gear 43 to revolve under the reaction force of the revolving driving gear 41.

[0037] The above is only the preferred embodiment of the utility model, and is not any form and substantial limitation of the utility model. It should be noted that the ordinary skilled in the art can make some improvements and supplements without departing from the utility model, and these improvements and supplements should be regarded as the protection range of the utility model. The skilled in the art can make some changes, modifications and equivalent changes of the above disclosed technical contents without departing from the spirit and range of the utility model, which are equivalent embodiments of the utility model. Meanwhile, any equivalent change, modification and evolution of the above embodiments according to the essential technology of the utility model are still within the range of the technical scheme of the utility model.

Claims

1. A nutation mechanism characterized by comprising: It comprises a driving part (2), a central shaft (3), a public rotation module (4) and a fixed end sleeve (5); The transmission axis of the driving part (2) coincides with the axis of the central shaft (3), and the public rotation module (4) is provided with a plurality of and is arranged axially spaced along the central shaft (3); The public rotation module (4) comprises a rotation driving gear (41), a fixed plug row (42) and a revolution transmission gear (43), the rotation driving gear (41) and the fixed plug row (42) are coaxially arranged on the circumference of the central shaft (3), the revolution transmission gear (43) is provided with a plurality of and is arranged on the fixed plug row (42), the revolution transmission gear (43) is engaged with the rotation driving gear (41), and the workpiece (6) to be plated is detachably connected to the revolution transmission gear (43). The rotation driving gear (41) is fixedly / rotatably connected with the central shaft (3), the fixed plug row (42) is rotatably / fixedly connected with the central shaft (3), and specifically: When the rotation driving gear (41) is fixedly connected with the central shaft (3), the fixed plug row (42) is rotatably connected with the central shaft (3), the driving part (2) drives the fixed plug row (42) to rotate, and the central shaft (3) is fixedly arranged on the fixed end sleeve (5).

2. A body and body mechanism as claimed in claim 1, characterized in that The rotation driving gear (41) is fixedly / rotatably connected with the central shaft (3), the fixed plug row (42) is rotatably / fixedly connected with the central shaft (3), and further comprising: When the fixed plug row (42) is fixedly connected with the central shaft (3), the rotation driving gear (41) is rotatably connected with the central shaft (3), the driving part (2) drives the central shaft (3) to rotate, and the central shaft (3) is rotatably arranged on the fixed end sleeve (5).

3. A body and body mechanism as claimed in claim 1, characterized in that The public rotation module (4) further comprises a transmission shaft (44), the transmission shaft (44) is arranged on the outer wall of the fixed plug row (42) and is provided with a plurality of corresponding to the revolution transmission gear (43), and the revolution transmission gear (43) is rotatably arranged on the transmission shaft (44) with the transmission shaft (44) as the shaft.

4. A body and body mechanism as claimed in claim 3, characterized in that The outer wall of the fixed plug row (42) is provided with an inclined surface (422) corresponding to the transmission shaft (44), the cross-sectional area of the fixed plug row (42) gradually decreases along the direction close to the rotation driving gear (41), and the inclination angle of the transmission shaft (44) of each group of the public rotation module (4) is independently set according to the plating requirement.

5. A body and body mechanism as claimed in claim 4, characterized in that The transmission shaft (44) is rotatably arranged on the inclined surface (422) of the fixed plug row (42), and the revolution transmission gear (43) is coaxially fixedly sleeved on the outer wall of the transmission shaft (44).

6. A body and body mechanism as claimed in claim 4, characterized in that The rotation driving gear (41) is a large bevel gear, the revolution transmission gear (43) is a small bevel gear, and a plurality of the transmission shaft (44) and the revolution transmission gear (43) are uniformly arranged in the circumferential direction around the central shaft (3).

7. A body and body gear mechanism as claimed in claim 1, wherein The driving end of the driving member (2) is detachably connected with a connecting seat (1), the central shaft (3) penetrates the connecting seat (1), and the fixed socket (42) is rotatably sleeved on the outer side of the central shaft (3) and is detachably connected and fixed with the inner wall of the connecting seat (1).

8. A body and body mechanism as claimed in claim 7, characterized in that The connecting seat (1) comprises a synchronous rotation upper end (11) and a rotation axis synchronous side plate (12), the rotation axis synchronous side plate (12) is provided with two plates, and the two rotation axis synchronous side plates (12) are symmetrically arranged on the two sides of the synchronous rotation upper end (11) to form a "H" type seat body, the driving end of the driving member (2) is detachably connected at the bottom end opening of the connecting seat (1), and the fixed socket (42) is detachably connected and fixed with the inner walls of the two rotation axis synchronous side plates (12).

9. A vacuum processing apparatus, characterized by, The invention also relates to a vacuum coating apparatus comprising a mechanism for synchronous rotation and revolution according to any one of claims 1 to 8.

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