Roller way self-cleaning device and vacuum coating equipment
By designing a self-cleaning device for the roller conveyor in the vacuum coating equipment, the problem of increased O-ring hardness and glass scratches is solved by using brush plates and bristles to remove sputtering material from the conveyor rollers. This achieves continuous cleaning capability, reduces maintenance frequency and cost, and improves production efficiency and yield.
Patent Information
- Application Number
- CN202520441283.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-13
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-03-13
AI Technical Summary
In vacuum coating equipment, the adhesion of sputtered material on the transfer rollers increases the hardness of the O-rings and reduces their friction, making them more prone to scratching the glass, increasing the defect rate and maintenance costs, and reducing production efficiency.
Design a self-cleaning device for roller conveyors, including a brush plate and brush bristles. By moving the brush plate, the brush bristles come into contact with the O-ring to remove splashes, avoid localized wear, and ensure continuous cleaning effect.
It effectively removes sputtering material, prevents O-ring hardening and glass scratches, reduces maintenance frequency and costs, and optimizes production efficiency and yield.
Smart Images
Figure CN223852760U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to photovoltaic glass manufacturing technical field especially, relates to a roller way self -cleaning device and vacuum coating equipment. BACKGROUND
[0002] Vacuum coating sputtering section is one of the steps in the vacuum magnetron sputtering process, and the sputtering process of SiNx, ZnO, ZnSnOx, ZrOx and other material targets is included in the sputtering section area. While sputtering the substrate (glass), the target material will also be sputtered onto the adjacent structure such as the transmission roller, resulting in the attachment of a thick sputtering material on the transmission roller during long-term sputtering, which increases the surface hardness of the O-ring installed on the transmission roller and reduces the friction, making it easy to scratch the glass surface during transmission, resulting in the glass product failing to pass the quality inspection and increasing the defect rate. At the same time, the entire vacuum coating equipment needs to be shut down for maintenance and the corresponding transmission roller and O-ring need to be replaced to avoid similar glass scratches in subsequent production, thereby increasing maintenance and production costs and reducing production efficiency.
[0003] Therefore, there is an urgent need for a roller way self-cleaning device and vacuum coating equipment to solve the above technical problems. UTILITY MODEL CONTENTS
[0004] The utility model aims at providing a roller way self-cleaning device and vacuum coating equipment that can reduce glass scratches caused by sputtering material attachment, reduce the frequency of shutdown maintenance, and optimize the yield rate and production cost of glass.
[0005] To achieve this purpose, the utility model adopts the following technical solutions:
[0006] The roller way self-cleaning device is arranged in the vacuum coating equipment and includes:
[0007] The brush plate is arranged adjacent to the transmission roller, at least two O-rings are arranged on the transmission roller along the axial direction, a bristle area is arranged on the side of the brush plate facing the transmission roller, the bristle area is provided with bristles and can abut against the O-rings for cleaning, and the brush plate can move along the axial direction of the transmission roller to make the O-rings abut against the bristles at different positions of the bristle area.
[0008] As a preferred embodiment, the brush plate is slidably connected to the inner wall of the sputtering chamber of the vacuum coating equipment or the rack structure of the vacuum coating equipment.
[0009] Preferably, the roller self-cleaning device further includes a fixing member, which is fixedly connected to the bottom surface of the sputtering chamber and has a protrusion. The protrusion is arranged in a direction parallel to the bottom surface of the sputtering chamber and can form a limiting groove with the bottom surface of the sputtering chamber. Part of the brush plate is limited and disposed in the limiting groove.
[0010] Preferably, the conveying roller is capable of conveying a glass plate, and the brush plate is disposed below the conveying roller in a direction parallel to the glass plate.
[0011] Preferably, the conveying roller is capable of conveying a glass plate, the brush plate and the glass plate are arranged at a preset angle, and the brush plate is arranged below the glass plate.
[0012] Preferably, the roller self-cleaning device further includes a fixing component, which includes a wedge block. The top surface of the wedge block and the glass plate are set at the preset angle, and the top surface of the wedge block can slide from bottom to top to support the brush plate.
[0013] Preferably, there is an interference of 0.5-1.5 mm between the brush bristles and the O-ring.
[0014] Preferably, the conveying roller is capable of conveying a glass plate, and the brush plate is set at a preset angle to the horizontal plane and is located below the glass plate. The preset angle is greater than 0 degrees and not greater than 30 degrees.
[0015] Preferably, along the axial direction of the transfer roller, the width of the brush area is not less than twice the width of the corresponding O-ring.
[0016] A vacuum coating equipment includes at least one transfer roller and at least one roller self-cleaning device. Each transfer roller is provided with at least one roller self-cleaning device, which is used to clean the O-rings disposed on the transfer roller.
[0017] The beneficial effects of this utility model are as follows: By setting the above-mentioned roller self-cleaning device, not only can the sputtered matter on the O-ring be removed, avoiding the phenomenon of increased hardness of the O-ring, reduced friction, and scratches on the glass surface, but also the O-ring can be made to contact with the brush bristles at different positions in the brush area by moving the brush plate, avoiding the disadvantage of reduced cleaning effect after local brush bristle wear, ensuring the continuous cleaning ability of the roller self-cleaning device, reducing the maintenance frequency and maintenance cost of the roller self-cleaning device and the entire vacuum coating equipment, and optimizing the glass production efficiency and production cost. Attached Figure Description
[0018] Figure 1is the front view of the roller table self-cleaning device and the transmission roller provided in the first embodiment of the utility model;
[0019] Figure 2 is Figure 1 is the local enlarged view of A in the figure;
[0020] Figure 3 is the side view of the roller table self-cleaning device and the transmission roller provided in the second embodiment of the utility model;
[0021] Figure 4 is the side view of the roller table self-cleaning device and the transmission roller provided in the first embodiment of the utility model.
[0022] in the figure:
[0023] 100, transmission roller; 200, glass plate;
[0024] 1, brush plate; 11, brush; 2, fixed part; 3, wedge block; 4, driving part; 5, shaft coupling; 6, connecting rod. DETAILED DESCRIPTION
[0025] The utility model will be further explained in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model, and not limited to the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawings, not all structures.
[0026] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed", "abutment" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.
[0027] In the utility model, unless otherwise explicitly specified and limited, the first feature is "on" or "below" the second feature, which can include the direct contact of the first and second features, or the contact of the first and second features through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.
[0028] In the description of the embodiments, the terms "upper", "lower", "right", "left" and the like orientation or position relationship are based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.
[0029] The following will be described according to the accompanying Figure 1 to the accompanying Figure 4 The roller self-cleaning device and the vacuum coating equipment provided by the utility model are introduced.
[0030] As Figure 1 , Figure 2 As shown in the first embodiment of the utility model, the roller self-cleaning device is arranged in the interior of the vacuum coating equipment, i.e. in the sputtering chamber. The roller self-cleaning device mainly comprises a brush plate 1, which is arranged adjacent to the transmission roller 100 of the vacuum coating equipment and can remove sputtering materials from the O-ring arranged on the transmission roller 100.
[0031] Specifically, on each transmission roller 100, a plurality of O-rings are arranged at intervals along the axial direction thereof, and the O-rings can abut the bottom surface of the glass plate 200 from bottom to top, so as to transmit the glass plate 200 when the transmission roller 100 rotates. The side of the brush plate 1 facing the transmission roller 100 is provided with a bristle area, and the bristle area is provided with a plurality of bristle holes in which bristles 11 are inserted. The bristles 11 can abut the O-rings and remove the sputtering materials adhering to the O-rings when the transmission roller 100 rotates, thereby achieving the cleaning effect and avoiding the phenomenon of continuous accumulation of sputtering materials. It should be noted that, in order to clearly display, the area where the bristles 11 should be arranged is not shown in the figure.
[0032] At the same time, the brush plate 1 can move along the axial direction of the transmission roller 100, so as to change the contact position of the O-rings and the bristle area, so that the bristles 11 located at the remaining positions of the bristle area can replace the part of the bristles 11 that have already been removed, continue to abut the O-rings and perform the cleaning operation. In this way, the moving mode of the brush plate 1 can avoid the phenomenon that the bristles 11 at the local position are excessively worn and the cleaning effect is reduced, so that the roller self-cleaning device can continuously and efficiently clean for a long time.
[0033] By setting the roller self-cleaning device, the sputtering material on the O-shaped ring can be removed, the phenomenon of increasing hardness of the O-shaped ring, reducing friction and scratching the glass surface can be avoided, the O-shaped ring and the bristles 11 at different positions in the bristle area are contacted by moving the brush plate 1, the cleaning effect of the local bristles 11 is avoided after being worn, the continuous cleaning ability of the roller self-cleaning device is ensured, the maintenance frequency and maintenance cost of the roller self-cleaning device and the whole vacuum coating equipment are reduced, and the production efficiency and production cost of the glass are optimized.
[0034] Optionally, the brush plate 1 is slidably connected to the inner wall surface of the sputtering chamber of the vacuum coating equipment, so that the brush plate 1 can slide along the axis direction of the transmission roller 100. Exemplarily, referring to Figure 3 In the second embodiment of the utility model, the roller self-cleaning device further comprises a fixing piece 2. The fixing piece 2 is fixedly connected to the bottom surface of the sputtering chamber and has a protruding part arranged in a direction parallel to the bottom surface of the sputtering chamber. The protruding part can form a limiting groove with the bottom surface of the sputtering chamber, and part of the brush plate 1 is limitedly arranged in the limiting groove, thereby limiting the brush plate 1. At this time, the brush plate 1 is arranged below the transmission roller 100 in a direction parallel to the glass plate 200, so that the transmission glass plate 200 and the brush removal can be performed simultaneously. At the same time, the phenomenon that the brush plate 1 moves and the cleaning effect is reduced due to the abutment between the bristles 11 and the O-shaped ring is avoided, and the effectiveness and continuity of the brush removal are further ensured.
[0035] Further optionally, the fixing piece 2 is provided with a mounting hole, and a fixing bolt can pass through the mounting hole and be threadedly connected to the bottom surface of the sputtering chamber, thereby fixing and installing the fixing piece 2. Preferably, a plurality of fixing pieces 2 are arranged on both sides of the brush plate 1, thereby forming an accommodating cavity between the fixing piece 2 and the bottom surface of the sputtering chamber, which is matched with the shape of the brush plate 1, thereby achieving a more stable limiting effect. Of course, in some other embodiments, other ways such as buckle fixing, buckle limiting and the like can be used to realize the fixing and limiting of the fixing piece 2 or the limiting of the brush plate 1, so the specific installation mode of the brush plate 1 is not limited in the utility model.
[0036] Preferably, in the first embodiment of the utility model, the brush plate 1 and the glass plate 200 can be arranged at a preset angle, so that the sputtering material removed by brushing can be separated from the bristles 11 under the action of gravity, thereby further ensuring the effectiveness of the bristles 11 during long-time work.
[0037] Exemplarily, as shown in Figure 4As shown, the roller self-cleaning device further comprises a fixing assembly, the fixing assembly comprises the wedge-shaped block 3 and the fixing piece 2 mentioned above, the bottom surface of the wedge-shaped block 3 is fixedly installed on the bottom surface of the sputtering chamber, the top surface of the wedge-shaped block 3 is arranged at a preset angle with the horizontal plane, and the top surface of the wedge-shaped block 3 can be slidably supported on the brush plate 1 from bottom to top, so that the brush plate 1 is arranged below the glass plate 200 and forms the preset angle with the horizontal plane, thereby enabling the sputtering material removed by brushing to be separated from the bristles 11 under the action of gravity. The fixing piece 2 is installed on the top surface of the wedge-shaped block 3 and forms a similar limiting groove with the top surface of the wedge-shaped block 3, thereby achieving the same limiting effect on the brush plate 1. Preferably, the preset angle is between 0-30 degrees, for example, 20 degrees.
[0038] Of course, in some embodiments, other mounting structures can also be used to achieve the inclined installation of the brush plate 1, such as sliding connection between the two ends of the brush plate 1 and the two side inner walls of the sputtering chamber, etc., which all belong to the scope to be protected by the present application. At the same time, the preset angle can be adaptively set according to different mounting modes, so the specific value of the preset angle is not limited in the present application, which can be 10 degrees, 15 degrees, 25 degrees, or even 45 degrees, 60 degrees, or 90 degrees, etc., as long as it does not affect the conveying of the glass plate 200, which all belong to the scope to be protected by the present application.
[0039] Further, in order to guarantee the abutment and cleaning effect of the bristles 11 and the O-ring, the interference amount between the bristles 11 and the O-ring is 0.5-1.5mm. If it is less than 0.5mm, the bristles 11 cannot be removed with appropriate force, and the cleaning effect is poor; if it is more than 1.5mm, the bristles 11 abut the O-ring with too much force, causing the bristles 11 and the O-ring to be easily worn. Preferably, in the present embodiment, the interference amount between the bristles 11 and the O-ring is 1mm.
[0040] Preferably, in some embodiments, a bristle area corresponding to each O-ring is provided on the brush plate 1, and the width of each bristle area (i.e. the size of the bristle area along the axis direction of the conveying roller 100) is not less than 2 times the width of the O-ring, so that after moving the brush plate 1, the bristles 11 in each bristle area that have not abutted the O-ring can replace the bristles 11 that have been worn. For example, the width of the O-ring is about 8mm, and the width of the corresponding bristle area is not less than 16mm, so when the 8mm-wide bristles 11 at one end are worn, the brush plate 1 only needs to be moved by 8mm, and the 8mm-wide bristles 11 at the other end in the bristle area can be used to restore the use.
[0041] Optionally, in some embodiments, a bristle area is arranged on the brush plate 1 along the axis direction of the conveying roller 100, and the width of the bristle area is greater than the distance between the two O-rings farthest apart, so that the brush plate 1 can be moved to replace the bristles 11 at different positions multiple times, greatly extending the frequency of replacing the brush plate 1. For example, 32 O-rings are arranged on the conveying roller 100, with an arrangement interval of 10 mm, and the distance between the two O-rings farthest apart is 3200 mm. The brush plate 1 is continuously provided with a bristle area with a width of 3300 mm, which is about 100 mm greater than the distance between the two O-rings farthest apart. In one cycle, when part of the bristles 11 are worn, they can be moved by about 8 mm so that the unworn bristles 11 abut against the O-rings, that is, the brush plate 1 can undergo at least 12 cycles, thereby achieving the effect of reducing the frequency of replacing the brush plate 1.
[0042] Optionally, the roller way self-cleaning device further comprises a driving member 4, which is a linear motor and is drivingly connected to the brush plate 1 through a shaft coupling 5 and a connecting rod 6, so as to move the brush plate 1 along the axis direction of the conveying roller 100. When multiple brush plates 1 are arranged in the vacuum coating equipment, the multiple brush plates 1 can be synchronously adjusted in position through the driving member 4 drivingly connected to the multiple brush plates 1. Of course, in some other embodiments, the brush plate 1 can also be moved manually, which also belongs to the scope to be protected by the utility model.
[0043] The utility model also provides a kind of vacuum coating equipment, and the vacuum coating equipment includes at least one conveying roller 100 and above-mentioned roller way self-cleaning device, and at least one roller way self-cleaning device is correspondingly arranged to each conveying roller 100, and the roller way self-cleaning device is used to clean the O-ring arranged on the conveying roller 100. By arranging the above-mentioned roller way self-cleaning device, not only can the sputtering material on the O-ring be removed, to avoid the phenomenon that the hardness of O-ring increases, the friction force reduces, and the glass surface is scratched, but also by moving the brush plate 1, the O-ring and the bristle 11 at different positions of bristle area are contacted, to avoid the drawback that cleaning effect decreases after local bristle 11 wears, guarantee the sustained cleaning ability of the roller way self-cleaning device, reduce the frequency and maintenance cost of the roller way self-cleaning device and the entire vacuum coating equipment, optimize the production efficiency and production cost of glass.
[0044] In the description of the specification, the description referring to the terms "some embodiments", "other embodiments", etc. means that the particular feature, structure, material or characteristic being described is included in at least one embodiment or example of the present application. The illustrative appearance of the above-mentioned terms in various places in the specification are not necessarily referring to the same embodiment or example. Moreover, the particular features, structures, materials or characteristics can be combined in any suitable manner in one or more embodiments or examples.
[0045] Obviously, the above embodiments of the present application are merely illustrative for clearly explaining the present application, and are not intended to limit the implementation modes of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and also impossible to exhaust all the implementation modes. Any modification, equivalent substitution and improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.
Claims
1. A roller self-cleaning device, arranged in a vacuum coating equipment, characterized in that, The utility model relates to a kind of roller self-cleaning device, including: Brush plate (1), the brush plate (1) is arranged adjacent to transmission roller (100), at least two O-rings are provided on the transmission roller (100) along its axial direction, the side of the brush plate (1) towards the transmission roller (100) is correspondingly provided with bristle area, the bristle area is provided with bristle (11) and can be abutted to the O-ring to clean, and the brush plate (1) can be moved along the axial direction of the transmission roller (100), so that the O-ring and the bristle (11) located at different positions of the bristle area are abutted.
2. The roller self-cleaning device according to claim 1, wherein The brush plate (1) is slidably connected to the inner wall of the sputtering chamber of the vacuum coating equipment or the rack structure of the vacuum coating equipment.
3. The roller self-cleaning device according to claim 2, wherein The roller self-cleaning device further comprises a fixing member (2) fixedly connected to the bottom surface of the sputtering chamber and having a protruding portion arranged in a direction parallel to the bottom surface of the sputtering chamber and capable of forming a limiting groove with the bottom surface of the sputtering chamber, and part of the brush plate (1) is limitedly arranged in the limiting groove.
4. The roller self-cleaning device according to claim 3, wherein The transmission roller (100) can convey a glass plate (200), and the brush plate (1) is arranged below the transmission roller (100) in a direction parallel to the glass plate (200).
5. The roller self-cleaning device according to claim 2, wherein The transmission roller (100) can convey a glass plate (200), and the brush plate (1) is arranged below the glass plate (200) at a preset angle.
6. The roller self-cleaning device according to claim 5, wherein The roller self-cleaning device further comprises a fixing assembly comprising a wedge-shaped block (3), the top surface of the wedge-shaped block (3) is arranged at the preset angle with the glass plate (200), and the top surface of the wedge-shaped block (3) can be slidably supported on the brush plate (1) from bottom to top.
7. The roller self-cleaning device according to claim 5 or 6, wherein The bristle (11) and the O-ring have an interference amount of 0.5-1.5 mm.
8. The roller self-cleaning device according to claim 1, wherein The transmission roller (100) can convey a glass plate (200), and the brush plate (1) is arranged below the glass plate (200) at a preset angle with the horizontal plane, and the preset angle is greater than 0 degrees and not greater than 30 degrees.
9. The roller self-cleaning device according to claim 1, wherein In the axial direction of the transmission roller (100), the width of the bristle area is not less than 2 times the width of the corresponding O-ring.
10. A vacuum coating apparatus, characterized by The self-cleaning device for roller bed comprises at least one transmission roller (100) and at least one self-cleaning device for roller bed as claimed in any one of claims 1-9, and at least one self-cleaning device for roller bed is arranged corresponding to each transmission roller (100), and the self-cleaning device for roller bed is used for cleaning the O-shaped ring arranged on the transmission roller (100).