Supporting rod assembly and turnover device

By designing a support rod assembly for the slide block and sliding unit during the wafer inspection process, and by using limiting grooves and opening/closing components to improve mechanical strength, the problem of jamming caused by easy damage to the limiting grooves was solved, and more stable operation of the flipping device was achieved.

CN223857274UActive Publication Date: 2026-01-30HANGZHOU CHANGCHUAN TECH CO LTD
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Patent Information

Application Number
CN202423172128.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-21
Publication Date
2026-01-30
Estimated Expiration
2034-12-21

AI Technical Summary

Technical Problem

In the existing wafer inspection process, the limiting groove of the strut assembly is easily deformed and damaged by compression, causing the slide bar to jam and affecting the normal operation of the flipping device.

Method used

A strut assembly was designed, including a slide block and a sliding unit. The slide block has a partition protrusion forming multiple sliding grooves. The sliding unit slides in the sliding grooves through a guide part. The mechanical strength is improved by using a limiting groove and an opening and closing part, and the risk of jamming is reduced.

Benefits of technology

The mechanical strength of the strut assembly was improved, the risk of jamming was reduced, the service life was extended, and the stable operation of the tilting device was ensured.

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Abstract

The utility model relates to a supporting rod assembly and a turnover device, the supporting rod assembly comprises a sliding seat, the sliding seat comprises a main body and a separation protrusion, a sliding groove is formed in the main body, the separation protrusion is arranged in the sliding groove and divides the sliding groove into a first sliding groove and a second sliding groove, and the first sliding groove and the second sliding groove are distributed in the width direction of the main body; the separation protrusion is provided with a first face arranged in the length direction of the body, the first face and the groove side wall of the sliding groove define a first transition section communicating with the starting position of the first sliding groove and the stopping position of the second sliding groove, and the first face is sunken to form a limiting groove. The sliding unit is provided with a sliding guiding part, and the sliding guiding part extends into the sliding groove; the sliding unit can slide relative to the sliding seat in the length direction of the main body to extend to a first state. When the sliding unit is in the first state, the sliding guiding part is located on the first transition section and limited in the limiting groove. According to the supporting rod assembly and the turnover device, the damage probability can be reduced, and the supporting rod assembly and the turnover device are not prone to being blocked.
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Description

TECHNICAL FIELD

[0001] The application relates to the technical field of wafer detection, in particular to a supporting rod assembly and a turnover device. BACKGROUND

[0002] In the wafer manufacturing process, defects may occur on the wafer surface, and in order to prevent the wafer with defects from flowing into the packaging process, the wafer needs to be detected. A common detection method includes a needle contact method, which detects through the contact between a probe and the wafer surface.

[0003] The probe card provided with the probe is installed on a needle card tray, the needle card tray is installed on a turnover frame, and the turnover frame is connected with the supporting rod assembly and a turnover driving member. The supporting rod assembly comprises a sliding base and a sliding rod. When the turnover driving member pulls down the turnover frame, the sliding rod slides out relative to the sliding base and is limited by a limiting groove on the sliding base. At this time, the sliding rod bears most of the gravity of the turnover frame and the needle card tray. However, the limiting groove on the sliding base is relatively weak, and after being used for a period of time, the limiting groove at the position is prone to deformation and damage due to extrusion, resulting in the problems of jamming of the sliding rod, turnover jamming, inclination of the needle card tray, unevenness of the supporting surface of the needle card tray supporting the probe card, and difficulty in card replacement. CONTENT OF THE UTILITY MODEL

[0004] Therefore, it is necessary to provide a supporting rod assembly and a turnover device which can reduce the damage probability and are not prone to jamming.

[0005] A supporting rod assembly comprises:

[0006] The sliding base comprises a main body and a separation protrusion. The main body has a sliding groove therein. The separation protrusion is arranged in the sliding groove and separates the sliding groove into a first sliding groove and a second sliding groove arranged along the width direction of the main body. The separation protrusion has a first surface arranged along the length direction of the main body. The first surface and the groove side wall of the sliding groove define a first transition section connecting the start position of the first sliding groove and the end position of the second sliding groove. The first surface is recessed to form a limiting groove.

[0007] The sliding unit has a guide sliding part which extends into the sliding groove.

[0008] The sliding unit can slide out to a first state along the length direction of the main body relative to the sliding base. When the sliding unit is in the first state, the guide sliding part is located in the first transition section and is limited in the limiting groove.

[0009] In some embodiments, the partitioning protrusion has a second surface opposite to the first surface along the length direction of the main body, and the second surface and the slot side wall of the slot define a second transition section that communicates the end position of the first slot and the start position of the second slot.

[0010] In some embodiments, the sliding unit is capable of slidingly retracting relative to the sliding seat along the length direction of the main body to a second state; when the sliding unit is in the second state, the guide sliding part is limited in the start position of the second slot; when the guide sliding part circulates in the first transition section, the first slot, the second transition section and the second slot, the sliding unit switches between the first state and the second state.

[0011] In some embodiments, the sliding unit comprises a sliding rod and a guide sliding block, the guide sliding block comprises a connecting part and the guide sliding part, the connecting part and the sliding rod are both located outside the slot, and the connecting part and the sliding rod are rotationally connected, and the guide sliding part is arranged on the connecting part and at least partially extends into the slot;

[0012] In some embodiments, the sliding rod is capable of slidingly extending relative to the sliding seat along the length direction of the main body to the first state, and the sliding rod is capable of slidingly retracting relative to the sliding seat along the length direction of the main body to the second state.

[0013] In some embodiments, the second transition section has a transition opening that communicates with the second slot;

[0014] The supporting rod assembly further comprises an opening and closing member for opening and closing the transition opening, one end of the opening and closing member is arranged on the partitioning protrusion, and the other end extends into the second slot along the length direction of the main body and abuts against the slot wall of the second slot close to the first slot.

[0015] In some embodiments, the opening and closing member is a resilient sheet, the resilient sheet is capable of opening the transition opening by abutting against the guide sliding part, and when the guide sliding part is separated from the resilient sheet, the resilient sheet rebounds under the action of its own resilience and closes the transition opening.

[0016] In some embodiments, the resilient sheet has a hooking part and an opening and closing part, the hooking part is hooked on the partitioning protrusion, and the opening and closing part extends along the length direction of the main body and is used for opening and closing the transition opening.

[0017] In some embodiments, the guide sliding block further comprises a shaft part, and the connecting part is rotationally connected with the sliding rod through the shaft part;

[0018] The sliding unit further comprises a torsion spring, which is sleeved on the shaft portion, and opposite ends of the torsion spring are connected with the guide sliding block and the slide rod respectively.

[0019] In some embodiments, the sliding seat is provided with a mounting groove, which is arranged along the thickness direction of the main body and is in communication with the sliding groove, and the slide rod and the connecting portion are located in the mounting groove.

[0020] In some embodiments, the support rod assembly further comprises a cover plate, which covers the slot of the mounting groove and is fixedly connected with the sliding seat.

[0021] A turnover device, comprising:

[0022] A turnover assembly, comprising a mounting seat, a turnover driving member and a turnover frame, the turnover driving member is installed on the mounting seat and is in transmission connection with the turnover frame; and

[0023] The support rod assembly according to any one of the above, the sliding seat is rotatably installed on the mounting seat, and the sliding unit is in rotational connection with the turnover frame.

[0024] Compared with the prior art, the present application has the following beneficial effects:

[0025] The support rod assembly and the turnover device have the following beneficial effects: BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 It is a whole structure schematic view of the support rod assembly in an embodiment of the present application;

[0027] Figure 2 It is a whole structure schematic view of the support rod assembly in an embodiment of the present application; Figure 1 It is a structure schematic view of the support rod assembly shown in the figure without the cover plate;

[0028] Figure 3 It is a structure schematic view of the support rod assembly shown in the figure without the slide rod, the first assembly seat and the second assembly seat; Figure 2 It is a structure schematic view of the support rod assembly shown in the figure without the guide sliding block;

[0029] Figure 4 It is a structure schematic view of the support rod assembly shown in the figure without the guide sliding block; Figure 3 It is a structure schematic view of the support rod assembly shown in the figure without the guide sliding block;

[0030] Figure 5 It is a structure schematic view of the support rod assembly shown in the figure without the guide sliding block; Figure 4An exploded view of the brace rod assembly shown;

[0031] Figure 6 An exploded view of the brace rod assembly shown; Figure 3 An exploded view of the brace rod assembly shown;

[0032] Figure 7 An exploded view of the brace rod assembly shown; An exploded view of the brace rod assembly shown;

[0033] An exploded view of the brace rod assembly shown; Figure 8 An exploded view of the brace rod assembly shown; Figure 7 An exploded view of the brace rod assembly shown;

[0034] Reference signs:

[0035] 1000, a turnover device;

[0036] 100, a brace rod assembly; 200, a turnover assembly;

[0037] 10, a sliding seat; 20, a sliding unit; 30, an opening and closing member; 40, a cover plate; 50, a first assembly seat; 60, a second assembly seat;

[0038] 11, a main body; 12, a partition protrusion; 121, a first surface; 122, a second surface; 123, a limiting groove; 124, a first part; 125, a second part; 126, a hooking gap; 1261, a first segment; 1262, a second segment; 13, a first sliding groove; 14, a second sliding groove; 15, a first transition segment; 16, a second transition segment; 161, a transition opening; 17, a mounting groove; 18, a bottom plate; 19, a side plate;

[0039] 21, a sliding rod; 22, a guide sliding block; 221, a guide sliding part; 222, a connecting part; 223, a shaft part; 23, a torsional spring;

[0040] 31, a hooking part; 32, an opening and closing part;

[0041] 201, a mounting seat; 202, a turnover driving member; 203, a turnover frame;

[0042] X, a length direction; Y, a width direction; Z, a thickness direction. DETAILED DESCRIPTION

[0043] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application are described in detail below in combination with the drawings. In the following description, a large number of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit of the present application, so the present application is not limited to the specific embodiments disclosed below.

[0044] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0045] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified and limited.

[0046] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0047] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0048] It is to be understood that when an element such as a layer, region or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element or intervening elements can be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. It will be understood that, when a member is referred to as being "coupled" or "connected" to another member, it can be directly coupled or connected to the other member or intervening members can be present. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items. Expressions such as "at least one of," when preceding the syllables of a list of elements, modify the entire list of elements and do not modify the elements individually.

[0049] Referring to Figures 1 to 4 , and Figure 6 , in a first aspect, the present application provides a support rod assembly 100, which comprises a sliding base 10 and a sliding unit 20. The sliding base 10 comprises a main body 11 and a partition protrusion 12. The main body 11 has a sliding groove therein. The partition protrusion 12 is arranged in the sliding groove and divides the sliding groove into a first sliding groove 13 and a second sliding groove 14 arranged along the width direction Y of the main body 11. The first sliding groove 13 and the second sliding groove 14 are in communication with each other. The partition protrusion 12 has a first surface 121 arranged along the length direction X of the main body 11. The first surface 121 and the groove side wall of the sliding groove define a first transition section 15 at the start of the first sliding groove 13 and the end of the second sliding groove 14. The first surface 121 is recessed to form a limiting groove 123. The sliding unit 20 has a guide sliding part 221 which extends into the sliding groove and can slide along the side wall of the sliding groove.

[0050] The support rod assembly 100 has a first state and a second state. Specifically, the sliding unit 20 can slide out relative to the sliding base 10 along the length direction X of the main body 11 to the first state. When the sliding unit 20 is in the first state, the guide sliding part 221 is located in the first transition section 15 and is limited in the limiting groove 123. The sliding unit 20 can also slide in relative to the sliding base 10 along the length direction of the main body 11 to retract to the second state. When the sliding unit 20 is in the second state, the guide sliding part 221 is located at the start of the second sliding groove 14.

[0051] It can be understood that the sliding base 10 mainly plays a supporting, guiding and mounting role. It can be made of sheet metal, plastic or other materials with good mechanical strength. The sliding base 10 comprises the main body 11 and the partition protrusion 12. The main body 11 and the partition protrusion 12 are integrally processed and formed to increase the strength of the sliding base 10.

[0052] The main body 11 is provided with a sliding groove. The partition protrusion 12 is located in the sliding groove and protrudes from the groove bottom wall. The partition protrusion 12 is spaced apart from the groove side wall of the sliding groove. The partition protrusion 12 divides the sliding groove into the first sliding groove 13 and the second sliding groove 14 which are in communication with each other. The first sliding groove 13 and the second sliding groove 14 are arranged along the width direction Y of the main body 11.

[0053] The start of the first sliding groove 13 (such as the first transition section 15) and the end of the second sliding groove 14 (such as the second transition section 16) are arranged along the length direction X of the main body 11. Figure 4Position A in the diagram indicates the position where the guide slide 221 enters the first slide groove 13, and the termination position of the second slide groove 14 (as shown in Figure A). Figure 4 Position D in the diagram indicates the position where the guide slide 221 moves out of the second slide groove 14. After the guide slide 221 moves out from the end position of the second slide groove 14, it enters the starting position of the first slide groove 13 via the first transition section 15.

[0054] When the sliding unit 20 is in the first state, it extends relative to the slide block 10, making the overall length of the support rod assembly 100 longer to facilitate support. At this time, the guide slide 221 is located in the first transition section 15 and confined within the limiting groove 123 to achieve effective support. Thus, by utilizing the protruding and recessed surface design to form the limiting groove 123 to achieve the purpose of limiting the guide slide 221, its structural strength is greater, it is less susceptible to damage from compression, has a lower risk of jamming, and a longer service life.

[0055] In some embodiments, the separating protrusion 12 has a second surface 122 opposite to the first surface 121 along the length direction X of the body 11. The second surface 122 and the groove sidewall define a second transition section 16 that connects the end position of the first groove 13 and the beginning position of the second groove 14. The sliding unit 20 can retract to a second state relative to the slide block 10 along the length direction of the body 11. When the sliding unit 20 is in the second state, the guide slide 221 is limited to the beginning position of the second groove 14. When the guide slide 221 circulates within the first transition section 15, the first groove 13, the second transition section 16, and the second groove 14, the strut assembly 100 switches between the first state and the second state. By limiting the guide slide 221 with the beginning position of the second groove 14, the strut assembly 100 is maintained in the second state to facilitate the storage of the strut assembly 100.

[0056] The end position of the first slide 13 (e.g.) Figure 4 Position B in the diagram indicates the position where the guide slide 221 moves out of the first slide groove 13, and the starting position of the second slide groove 14 (as shown in Figure B). Figure 4 Position C indicates the position where the guide slide 221 enters the second slide groove 14. After the guide slide 221 is displaced from the end position of the first slide groove, it enters the starting position of the second slide groove 14 via the second transition section 16.

[0057] When the strut assembly 100 is in the second state, the sliding unit 20 retracts relative to the slide block 10 along the length direction of the main body 11, and the overall length of the strut assembly 100 is relatively short.

[0058] In actual operation, when the support rod assembly 100 is in the second state, the guide sliding part 221 is located at the starting position of the second sliding groove 14. Under the driving of an external force, the sliding unit 20 moves the guide sliding part 221 from the starting position of the second sliding groove 14 to the ending position of the second sliding groove 14, and further to the first transition section 15, and limits the guide sliding part 221 in the limiting groove 123. At this time, the support rod assembly 100 is switched from the second state to the first state, and the length of the support rod assembly 100 is relatively long. Similarly, the guide sliding part 221 can move to the starting position of the first sliding groove 13 through the first transition section 15, and further move to the ending position of the first sliding groove 13 away from the side wall of the second sliding groove 14, and move to the starting position of the second sliding groove 14 through the second transition section 16. At this time, the support rod assembly 100 is switched from the first state to the second state.

[0059] Referring to Figures 2 to 6 In some embodiments, the sliding unit 20 includes a sliding rod 21 and a guide sliding block 22. The guide sliding block 22 includes a connecting part 222 and a guide sliding part 221. The connecting part 222 and the sliding rod 21 are both located outside the sliding groove, and the connecting part 222 is rotationally connected with the sliding rod 21. The guide sliding part 221 is arranged on the connecting part 222 and at least partially extends into the sliding groove. The sliding rod 21 can slide out to the first state along the length direction of the main body 11 relative to the sliding base 10, or retract to the second state along the length direction of the main body 11. When the support rod assembly 100 is in the first state, the sliding rod 21 extends relative to the sliding base 10. When the support rod assembly 100 is in the second state, the sliding rod 21 retracts relative to the sliding base 10. It can be understood that when an external force acts on the sliding rod 21, the sliding rod 21 can drive the guide sliding part 221 to cyclically move along the length direction of the main body 11 relative to the sliding base 10, so that the support rod assembly 100 is switched between the first state and the second state.

[0060] The opposite two sides of the connecting part 222 arranged along the thickness direction Z of the main body 11 are respectively provided with the sliding rod 21 and the guide sliding part 221. One end of the connecting part 222 is rotationally connected with the sliding rod 21, and the other end of the connecting part 222 is fixedly connected with the guide sliding part 221. Specifically, the guide sliding part 221 and the connecting part 222 can be integrally formed, or can be separately arranged and fixedly connected through welding, clamping or the like.

[0061] In actual operation, the sliding rod 21 drives the connecting part 222 and the guide sliding part 221 to move along the length direction of the main body 11 under the action of an external force, and at the same time, the connecting part 222 rotates relative to the sliding rod 21, so that the guide sliding part 221 can move and switch positions in the first transition section 15, the first sliding groove 13, the second transition section 16 and the second sliding groove 14, thereby promoting the sliding rod 21 to slide along the length direction X of the main body 11, and realizing the extension and retraction operation of the sliding rod 21 relative to the sliding base 10.

[0062] The connecting part 222 connects the slide rod 21 and the guide slide part 221, and is rotatably connected to the slide rod 21, so as to drive the guide slide part 221 to flexibly turn and change position in the first transition section 15, the first slide groove 13, the second transition section 16 and the second slide groove 14, thereby reducing the occurrence of jamming.

[0063] In some embodiments, the second transition section 16 has a transition opening 161 communicating with the second slide groove 14, and the support rod assembly 100 further comprises an opening and closing part 30 for opening and closing the transition opening 161. One end of the opening and closing part 30 is arranged on the partition protrusion 12, and the other end extends along the length direction of the main body 11 into the second slide groove 14 and abuts against the groove wall of the second slide groove 14 close to the first slide groove 13. The opening and closing part 30 is used to open the transition opening 161 during the movement of the guide slide part 221 from the second transition section 16 into the second slide groove 14, and to close the transition opening 161 when the guide slide part 221 moves in the second slide groove 14.

[0064] For example, the opening and closing part 30 closes the transition opening 161 when the guide slide part 221 moves in the second slide groove 14, the first transition section 15 and the first slide groove 13, that is, the opening and closing part 30 is in an open state only when the guide slide part 221 moves from the second transition section 16 into the second slide groove 14.

[0065] When the opening and closing part 30 opens the transition opening 161, the guide slide part 221 can smoothly enter the second guide slide groove from the second transition section 16 through the transition opening 161, so as to switch to the second state. When the opening and closing part 30 closes the transition opening 161, the opening and closing part 30 separates the second slide groove 14 from the second transition section 16. Thus, when the support rod assembly 100 switches from the second state to the first state, and the guide slide part 221 slides from the starting position of the second slide groove 14 to the ending position of the second slide groove 14, the guide slide part 221 will not enter the second transition section 16 and the first slide groove 13 from the transition opening 161, which ensures the normal switching of the states and improves the reliability of the state switching of the support rod assembly 100, and has a high state switching efficiency.

[0066] Please refer to Figures 4 to 6 Further, in some embodiments, the opening and closing part 30 is a resilient sheet. The resilient sheet can open the transition opening 161 by being pressed by the guide slide part 221, and can close the transition opening 161 by rebounding under the action of its own resilience when the guide slide part 221 is separated from the resilient sheet.

[0067] In actual operation, when the guide sliding part 221 is moved into the second sliding groove 14 from the second transition section 16, the guide sliding part 221 pushes the elastic sheet and pushes the elastic sheet away, and the transition opening 161 is opened. At this time, the elastic sheet is deformed and stores elastic potential energy. After the guide sliding part 221 is separated from the elastic sheet, the pushing force of the guide sliding part 221 on the elastic sheet disappears, the elastic sheet releases the elastic potential energy and rebounds to close the transition opening 161 again. It can be understood that by arranging the elastic sheet, the elastic sheet can automatically open and close the transition opening 161, which is simple and easy to operate, and has a long service life.

[0068] Of course, the opening and closing member 30 can open the transition opening 161 in the manner of the elastic sheet, but not limited to the manner of the elastic sheet, and can also open the transition opening 161 by means of a driving structure.

[0069] Please refer to Figures 4 to 5 In some embodiments, the elastic sheet has a hooking part 31 and an opening and closing part 32, the hooking part 31 is hooked on the separation protrusion 12, and the opening and closing part 32 is arranged along the length direction of the main body 11 and is used to open and close the transition opening 161.

[0070] Specifically, as Figure 5 shown, the separation protrusion 12 includes a first part 124 and a second part 125, the first surface 121 is located on the first part 124, the second surface 122 is formed by the two surfaces of the first part 124 and the second part 125 away from the first surface 121, and the first part 124 and the second part 125 are arranged at intervals and form a hooking gap 126. The hooking gap 126 includes a first section 1261 and a second section 1262 which are communicated with each other, the first section 1261 extends along the width direction Y of the main body 11 and communicates with the second sliding groove 14, and the second section 1262 extends along the length direction X of the main body 11 and communicates with the second transition section 16. The opening and closing part 32 of the hooking part 31 extends into the second sliding groove 14 along the length direction of the main body 11 and abuts against the groove wall of the second sliding groove 14 close to the second transition section 16, and the hooking part 31 is bent into the second section 1262 through the first section 1261 to realize hooking.

[0071] By means of hooking, it is not necessary to arrange additional fasteners to connect and fix the elastic sheet and the separation protrusion 12, and the installation is simple and convenient. Moreover, this kind of way does not occupy too much space in the sliding groove, and can ensure the smoothness of the guide sliding part 221 sliding in the sliding groove and reduce the occurrence of jamming.

[0072] Of course, the installation mode of the elastic sheet is not limited to the hooking mode, and can also be a buckling mode, a welding mode or other modes.

[0073] Please refer to Figure 2 , Figure 4 and Figure 6In some embodiments, the guide slider 22 further includes a shaft portion 223, and the connecting portion 222 is rotatably connected to the slide rod 21 through the shaft portion 223; the sliding unit 20 further includes a torsion spring 23, which is sleeved on the shaft portion 223, and the two opposite ends of the torsion spring 23 are respectively connected to the guide slider 22 and the slide rod 21.

[0074] The shaft portion 223 and the connecting portion 222 are integrally formed.

[0075] The torsion spring 23 ensures that the guide slider 22 is always subjected to clockwise or counterclockwise torque. This forces the guide slider 221 to slide along the side wall of the groove, the surface of the dividing protrusion 12, or the surface of the opening and closing member 30 during the sliding process. This achieves the guidance and sliding of the guide slider 221, reduces the risk of shaking during the sliding process, improves the smoothness of the sliding of the guide slider 221, and minimizes the risk of jamming.

[0076] by Figure 4 Taking the state of the middle strut assembly 100 and the torque of the torsion spring 23 forcing the guide slider 22 to always have a clockwise (as indicated by arrow W) rotation torque as an example, during the sliding process of the guide slider 221 in the first slide groove 13, the guide slider 221 slides along the groove side wall of the first slide groove 13 that is opposite to the partition protrusion 12. During the sliding process of the guide slider 221 in the second slide groove 14, the guide slider 221 slides along the groove side wall of the second slide groove 14 on the side where the partition protrusion 12 is located.

[0077] Please see Figure 2 and Figure 3 In some embodiments, the slide block 10 is provided with a mounting groove 17. The mounting groove 17 and the slide groove are arranged sequentially and connected along the thickness direction Z of the main body 11. The slide rod 21 and the connecting part 222 are both located in the mounting groove 17.

[0078] Specifically, the main body 11 includes a base plate 18 and two side plates 19. The base plate 18 and the two side plates 19 extend along the length direction X of the main body 11, and the two side plates 19 are arranged along the width direction Y of the main body 11 and connected to the base plate 18 to form a mounting groove 17. The surface of the base plate 18 facing the mounting groove 17 is recessed to form a sliding groove. The sliding rod 21 and the connecting part 222 are disposed in the mounting groove 17, and the guide part 221 extends at least partially into the sliding groove.

[0079] The mounting groove 17 allows the slide rod 21 and the connecting part 222 to be completely housed in the slide block 10, reducing the space occupied by the slide rod 21 and the connecting part 222. In addition, the two side walls of the mounting groove 17 can also play a guiding role during the movement of the slide rod 21 and the connecting part 222, ensuring the stability of the operation of the slide rod 21 and the connecting part 222.

[0080] Please see Figure 1In some embodiments, the support rod assembly 100 further comprises a cover plate 40 covering the slot of the mounting slot 17 and fixedly connected with the sliding base 10. The cover plate 40 cooperates with the sliding base 10 to separate the slide rod 21 and the guide sliding block 22 from the outside along the thickness direction of the main body 11, reducing the interference of the outside on the extension and contraction of the support rod assembly 100, and making the support rod assembly 100 operate more reliably.

[0081] In some embodiments, the support rod assembly 100 further comprises a first assembly seat 50 and a second assembly seat 60, both of which are located outside the sliding base 10, and the first assembly seat 50 is rotatably connected with the end of the slide rod 21 away from the guide sliding block 22, and the second assembly seat 60 is rotatably connected with the end of the sliding base 10 away from the first assembly seat 50, and the first assembly seat 50 and the second assembly seat 60 are used to realize the mounting of the support rod assembly 100 with external structures.

[0082] Please refer to Figure 1 and Figure 2 , Figures 6 to 8 In a second aspect, the application provides a turnover device 1000, which comprises a turnover assembly 200 and the support rod assembly 100 as described in the above embodiments. The turnover assembly 200 at least comprises a mounting seat 201, a turnover driving member 202 and a turnover frame 203, the turnover driving member 202 is mounted on the mounting seat 201 and is in transmission connection with the turnover frame 203, the turnover frame 203 is rotatably connected with the mounting seat 201, and the turnover driving member 202 is used to drive the turnover frame 203 to rotate relative to the mounting seat 201; the sliding base 10 of the support rod assembly 100 is rotatably mounted on the mounting seat 201, and the sliding unit 20 is rotatably connected with the turnover frame 203, and the turnover frame 203 drives the support rod assembly 100 to switch between the first state and the second state in the process of rotation.

[0083] Specifically, the first assembly seat 50 of the support rod assembly 100 is fixedly connected with the turnover frame 203, and the second assembly seat 60 is assembled with the mounting seat 201.

[0084] The turnover driving member 202 can be a telescopic cylinder.

[0085] In actual operation, the telescopic rod of the turnover driving member 202 is elongated and pulls down the turnover frame 203, the turnover frame 203 is unfolded and switched to a horizontally placed state. In this process, the support rod assembly 100 is elongated and switched to the first state under the action of the turnover frame 203, and the support rod assembly 100, the turnover driving member 202 and the turnover frame 203 form a triangular support. The telescopic rod of the turnover driving member 202 is retracted and upholds the turnover frame 203, the turnover frame 203 is tightened and switched to a vertically placed state. In this process, the support rod assembly 100 is shortened and switched to the second state under the action of the turnover frame 203, so as to facilitate the storage of the turnover device 1000.

[0086] The turnover device 1000 in the present application has the effects brought by any one of the above-mentioned embodiments, and thus will not be described here again.

[0087] In a third aspect, the present application further provides a detection system, which comprises the turnover device 1000, the needle card tray and the probe card according to any one of the above-mentioned embodiments.

[0088] The needle card tray is installed on the side of the turnover frame 203 away from the support rod assembly 100, and the probe card is installed on the side of the needle card tray away from the support rod assembly 100.

[0089] When the turnover frame 203 is unfolded and switched to the horizontally placed state, the needle card tray arranged on the turnover frame 203 is also in the horizontally arranged state. When the turnover frame 203 is tightened and switched to the vertically placed state, the needle card tray arranged on the turnover frame 203 is also in the vertically arranged state.

[0090] Since the above-mentioned support rod assembly 100 is not easy to be damaged and the risk of jamming is reduced, when the detection system is working, the turnover device 1000 does not jam during turnover, the probability of tilting of the tray is small, the supporting surface of the needle card tray supporting the probe card is horizontal, and the card replacement is simple. It can be understood that the card replacement refers to replacing the probe card.

[0091] The above-mentioned support rod assembly 100, turnover device 1000 and detection system, the support rod assembly 100 has a first state, when the support rod assembly 100 is in the first state, the sliding unit 20 extends relative to the sliding seat 10, and the overall length of the support rod assembly 100 is relatively long, so as to facilitate the support of the support rod assembly 100. At this time, the guide sliding part 221 is located in the first transition section 15 and limited in the limiting groove 123. This kind of limiting groove 123 using the convex and concave surface to form the limiting guide sliding part 221 has greater mechanical strength, is not easy to be damaged by extrusion, has small risk of jamming, and has long service life.

[0092] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description simple, all possible combinations of the technical features in the above-mentioned embodiments are not described, but as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0093] The above-mentioned embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the patent application scope. It should be pointed out that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application. Therefore, the patent protection scope of the present application should be subject to the appended claims.

Claims

1. A strut assembly characterized by, The support rod assembly comprises: A slide base (10) comprising a main body (11) having a sliding groove therein and a partition protrusion (12) arranged in the sliding groove and separating the sliding groove into a first sliding groove (13) and a second sliding groove (14) arranged along the width direction (Y) of the main body (11), the partition protrusion (12) having a first surface (121) arranged along the length direction (X) of the main body (11), the first surface (121) and the groove side wall of the sliding groove defining a first transition section (15) connecting the start position of the first sliding groove (13) and the end position of the second sliding groove (14), and the first surface (121) being recessed to form a limiting groove (123); A sliding unit (20) having a guide sliding part (221) extending into the sliding groove; The sliding unit (20) can slide out to a first state along the length direction of the main body (11) relative to the slide base (10); when the sliding unit (20) is in the first state, the guide sliding part (221) is located in the first transition section (15) and is limited in the limiting groove (123).

2. The strut assembly of claim 1 wherein, The partition protrusion (12) has a second surface (122) opposite to the first surface (121) along the length direction of the main body (11), the second surface (122) and the groove side wall of the sliding groove defining a second transition section (16) connecting the end position of the first sliding groove (13) and the start position of the second sliding groove (14); The sliding unit (20) can slide in to a second state along the length direction of the main body (11) relative to the slide base (10); when the sliding unit (20) is in the second state, the guide sliding part (221) is limited at the start position of the second sliding groove (14); when the guide sliding part (221) moves in the first transition section (15), the first sliding groove (13), the second transition section (16) and the second sliding groove (14), the sliding unit (20) switches between the first state and the second state.

3. The strut assembly of claim 2 wherein, The sliding unit (20) comprises a slide rod (21) and a guide sliding block (22), the guide sliding block (22) comprises a connecting part (222) and the guide sliding part (221), the connecting part (222) and the slide rod (21) are both located outside the sliding groove, and the connecting part (222) is rotationally connected with the slide rod (21), and the guide sliding part (221) is arranged on the connecting part (222) and at least partially extends into the sliding groove; The slide rod (21) can slide out to the first state along the length direction of the main body (11) relative to the slide base (10), and the slide rod (21) can slide in to the second state along the length direction of the main body (11) relative to the slide base (10).

4. The strut assembly of claim 3, wherein, The second transition section (16) has a transition opening (161) connected with the second sliding groove (14); The support rod assembly further comprises an opening and closing member (30) for opening and closing the transition opening (161), one end of the opening and closing member (30) is arranged on the partition protrusion (12), and the other end extends along the length direction of the main body (11) into the second sliding groove (14) and abuts against the groove wall of the second sliding groove (14) close to the first sliding groove (13).

5. The strut assembly of claim 4 wherein, The opening and closing member (30) is a resilient sheet, the resilient sheet can open the transition opening (161) by abutting and pressing of the guide sliding part (221), and when the guide sliding part (221) is separated from the resilient sheet, the resilient sheet rebounds under the action of its own resilience and closes the transition opening (161).

6. The strut assembly of claim 5 wherein, The resilient sheet has a hooking part (31) and an opening and closing part (32), the hooking part (31) is hooked on the partition protrusion (12), and the opening and closing part (32) extends along the length direction of the main body (11) and is used for opening and closing the transition opening (161).

7. The strut assembly of claim 3 wherein, The guide sliding block (22) further comprises a shaft part (223), the connecting part (222) is rotationally connected with the sliding rod (21) through the shaft part (223); The sliding unit (20) further comprises a torsion spring (23), the torsion spring (23) is sleeved on the shaft part (223), and opposite ends of the torsion spring (23) are connected with the guide sliding block (22) and the sliding rod (21) respectively.

8. The strut assembly of claim 3 wherein, The sliding seat (10) is provided with a mounting groove (17), the mounting groove (17) and the sliding groove are arranged and communicated along the thickness direction (Z) of the main body (11), and the sliding rod (21) and the connecting part (222) are located in the mounting groove (17).

9. The strut assembly of claim 8 wherein, The support rod assembly further comprises a cover plate (40), the cover plate (40) covers the groove opening of the mounting groove (17) and is fixedly connected with the sliding seat (10).

10. A turnover device, characterized in that The turnover device comprises: A turnover assembly (200) comprising a mounting seat (201), a turnover driving member (202) and a turnover frame (203), the turnover driving member (202) is mounted on the mounting seat (201) and is in transmission connection with the turnover frame (203); and The support rod assembly according to any one of claims 1 to 9, the sliding seat (10) is rotationally mounted on the mounting seat (201), and the sliding unit (20) is in rotational connection with the turnover frame (203).