Cable storage tool of semiconductor equipment

Abstract

The utility model discloses a cable storage tool for semiconductor equipment, which comprises a plurality of wire ducts, each wire duct is formed by sequentially connecting a first side plate, a bottom plate and a second side plate, the first side plate is opposite to the second side plate, at least part of the wire duct is provided with a blocking assembly, the wire duct is divided into a storage space and a storage opening, and the bottom plates of the wire ducts are sequentially connected; the blocking assembly comprises a first blocking piece and a second blocking piece which are arranged on the first side plate and the second side plate respectively, the first blocking piece extends towards the second side plate, the second blocking piece extends towards the first side plate, and a wire passing channel is defined between the first blocking piece and the second blocking piece; the storage space is communicated with the storage opening through a wire channel; the size of the radial opening of the wire passing channel is reduced along the axial direction of the wire duct, and the wire duct axially points to the bottom plate, so that the cable is not easy to fall off from the wire duct, meanwhile, the cable does not need to be fixed by a binding belt, and the maintenance efficiency of the cable is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor equipment especially relates to a cable storage frock of semiconductor equipment. BACKGROUND

[0002] Semiconductor growth equipment, for example, MOCVD vapor deposition equipment, will use a large number of cables, and the cables are usually stored in a cable slot.

[0003] When a large number of cables are stored in the cable slot, a cable tie is needed to temporarily fix the large number of cables. When maintenance work such as adding cables or replacing problem cables needs to be performed, the cable tie needs to be removed and re-tied. If the cable bundle is not tied, the cables can easily fall out of the cable slot during subsequent maintenance work, which is not conducive to the smooth progress of the maintenance work. In addition, the cables are fixed in the cable slot by tying, which can easily cause problems such as cable heating and signal interference.

[0004] Therefore, it is necessary to provide a new cable storage frock for semiconductor equipment to solve the above problems in the prior art. SUMMARY

[0005] The utility model discloses a cable storage frock for semiconductor equipment, which is used to store cables, so that the cable bundle is not easy to fall out of the cable slot during maintenance work such as adding cables, replacing or troubleshooting problem cables, and the cable tie does not need to be fixed on the cable bundle, thereby avoiding problems such as cable heating and signal interference caused by tying the cables, and improving the efficiency of cable maintenance work.

[0006] To achieve the above-mentioned purpose, the technical scheme of the utility model is as follows:

[0007] A cable storage frock for semiconductor equipment includes:

[0008] A plurality of cable slots, each cable slot is sequentially connected by a first side plate, a bottom plate and a second side plate, the first side plate is opposite to the second side plate, at least part of the cable slots is provided with a blocking component, which divides the cable slot into a storage space and a storage opening, and the bottom plates of each cable slot are sequentially connected.

[0009] The blocking component includes a first blocking piece and a second blocking piece provided on the first side plate and the second side plate respectively, the first blocking piece extends towards the second side plate, the second blocking piece extends towards the first side plate, and a wire passing channel is formed between the first blocking piece and the second blocking piece.

[0010] The storage space and the storage opening are communicated through the wire passing channel.

[0011] The radial opening size of the wire passing channel decreases along the wire slot axial direction, and the wire slot axial direction points to the bottom plate.

[0012] By adopting the technical scheme, since the wire slots are sequentially connected by the first side plates, the bottom plates and the second side plates, the bottom plates of the wire slots are sequentially connected, the blocking assembly separates at least part of the wire slots into the accommodation space and the accommodation opening, and the accommodation space and the accommodation opening are communicated through the wire channel, so that in the process of accommodating the cable bundle, the cable bundle can be placed in the space sequentially connected by the first side plates, the bottom plates, the second side plates and the blocking assembly through the wire channel, and the blocking assembly includes the first blocking piece and the second blocking piece arranged on the first side plate and the second side plate respectively, so that the first blocking piece and the second blocking piece have a blocking effect on the cable bundle, and the cable bundle does not need to be bundled, thereby avoiding problems such as cable heating and signal interference caused by bundling the cable. The first blocking piece and the second blocking piece form the wire passing channel therebetween, so that the accommodation space and the accommodation opening are communicated through the wire channel, and in the process of replacing or troubleshooting the cable, each cable to be troubleshooted can be sequentially taken out through the wire passing channel for inspection and placed on the first blocking plate or the second blocking plate for differentiation until the problem cable is found, thereby avoiding cable falling off or differentiation confusion in the troubleshooting process. The radial opening size of the wire passing channel decreases along the wire slot axial direction, and the wire slot axial direction points to the bottom plate, further reducing or avoiding the possibility of the cable bundle placed in the accommodation space falling off to the outside through the wire channel, and improving the efficiency of cable maintenance work.

[0013] Optionally, at least one of the first blocking piece and the second blocking piece is an elastic blocking piece.

[0014] Optionally, one end of the first blocking piece is fixedly arranged on the first side plate, the first blocking piece extends towards the second side plate to be opposite to the middle part of the bottom plate, then extends towards the bottom plate in a direction inclined to the bottom plate and away from the first side plate.

[0015] Optionally, one end of the second blocking piece is fixedly arranged on the second side plate, the second blocking piece extends towards the first side plate to be opposite to the middle part of the bottom plate, then extends towards the bottom plate in a direction inclined to the bottom plate and away from the second side plate.

[0016] Optionally, the first blocking piece and the second blocking piece are arranged opposite to each other.

[0017] Optionally, the bottom plates of the wire slots are sequentially connected to form an integrated structure.

[0018] Optionally, there is a spacing between adjacent first side plates and a spacing between adjacent second side plates, so as to facilitate heat dissipation.

[0019] Optionally, the first baffle, the first side plate, the bottom plate, the second side plate and the second baffle are sequentially connected to enclose the receiving space, and the first side plate top, the first baffle, the second baffle and the second side plate top enclose the receiving opening.

[0020] Optionally, the utility model further includes a cover body, which is detachably arranged with the first side plate and the second side plate of each wire slot and covers each receiving opening.

[0021] Optionally, the top surface of the first side plate is provided with a first clamping piece, the first clamping piece and the first side plate enclose a first clamping groove to clampingly match the cover body, and the top surface of the second side plate is provided with a second clamping piece, the second clamping piece and the second side plate enclose a second clamping groove to clampingly match the cover body. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a structure schematic view of a long strip tool formed by sequentially connecting the bottom plates of a plurality of wire slots according to the utility model embodiment.

[0023] Figure 2 It is a structure schematic view of a wire slot according to the utility model embodiment.

[0024] Figure 3 It is a structure schematic view of another wire slot according to the utility model embodiment.

[0025] Figure 4 It is a structure schematic view of another wire slot according to the utility model embodiment.

[0026] Figure 5 It is a structure schematic view of another wire slot according to the utility model embodiment.

[0027] Figure 6 It is a structure schematic view of a long strip tool formed by sequentially connecting the bottom plates of a plurality of wire slots according to the utility model embodiment when the long strip tool is connected with a cover body.

[0028] REFERENCE SIGNS:

[0029] 100, wire slot; 110, first side plate; 111, first clamping piece; 112, first clamping groove; 120, bottom plate; 130, second side plate; 131, second clamping piece; 132, second clamping groove; 140, receiving space; 150, receiving opening; 200, blocking assembly; 210, first baffle; 220, second baffle; 230, wire passing channel; 300, cover body; 400, long strip tool. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art to which the utility model belongs. The similar words such as "include" used in this paper mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0031] The specific embodiments of the utility model will be further described in detail below with reference to the drawings.

[0032] The embodiments of the utility model provide a cable storage tool of semiconductor equipment, and the cable storage tool is mainly used for storing cables.

[0033] Referring to Figure 1 and Figure 2 , the cable storage tool comprises a plurality of wire grooves 100, the wire grooves 100 are sequentially connected and surrounded by a first side plate 110, a bottom plate 120 and a second side plate 130, the first side plate 110 is opposite to the second side plate 130, at least part of the wire grooves 100 is provided with a blocking assembly 200, the wire grooves 100 are divided into storage spaces 140 and storage openings 150, and the bottom plates 120 of the wire grooves 100 are sequentially connected.

[0034] In some embodiments, the bottom plates 120 of the wire grooves 100 are sequentially connected, so that the plurality of wire grooves 100 integrally form a strip-shaped tool 400.

[0035] In some more specific embodiments, the bottom plates 120 of the wire grooves 100 are sequentially connected to form an integrated structure.

[0036] In some embodiments, there is a gap between the two adjacent first side plates 110, and there is a gap between the two adjacent second side plates 130. The gap between the two adjacent first side plates 110 and the gap between the two adjacent second side plates 130 are selected so as to facilitate heat dissipation of the cables.

[0037] In some embodiments, referring to Figure 1 , the plurality of wire grooves 100 integrally form a strip-shaped tool 400, the blocking assembly 200 is arranged in part of the wire grooves 100, and the blocking assembly 200 is not arranged in part of the wire grooves 100.

[0038] At least one blocking assembly 200 is arranged in each wire slot 100. In some embodiments, one blocking assembly 200 is arranged in each wire slot 100, and a plurality of wire slots 100 are integrally formed into a long strip-shaped tool 400, and one blocking assembly 200 is arranged in each wire slot 100.

[0039] In some embodiments, one or more blocking assemblies 200 can be arranged in each wire slot 100. In the present embodiment, one blocking assembly 200 is arranged in each wire slot 100.

[0040] In some embodiments, a plurality of wire slots 100 are integrally formed into a long strip-shaped tool 400, and one or more blocking assemblies 200 can be arranged. Specifically, when one blocking assembly 200 is arranged, the blocking assembly 200 is arranged in any one wire slot 100 in the long strip-shaped tool 400. When a plurality of blocking assemblies 200 are arranged, the arrangement can be flexibly arranged according to the cable wiring requirements, such as cable length, etc. For example, a plurality of blocking assemblies 200 are arranged along the length direction of the long strip-shaped tool 400 at equal intervals. More specifically, a plurality of blocking assemblies 200 are uniformly arranged along the length direction of the long strip-shaped tool 400. Figure 1

[0041] In some more specific embodiments, two blocking assemblies 200 are arranged in the two wire slots 100 at one end of the long strip-shaped tool 400, then a blocking assembly 200 is arranged in the adjacent two wire slots 100 after a plurality of wire slots 100, and so on.

[0042] The blocking assembly 200 comprises a first blocking piece 210 and a second blocking piece 220 arranged on the first side plate 110 and the second side plate 130 respectively, the first blocking piece 210 extends towards the second side plate 130, the second blocking piece 220 extends towards the first side plate 110, and a wire passing channel 230 is formed between the first blocking piece 210 and the second blocking piece 220. The receiving space 140 and the receiving opening 150 are communicated through the wire passing channel 230.

[0043] In some embodiments, referring to Figure 1 and Figure 2 , the receiving space 140 is used to accommodate cables, and in the accommodation process, the cables are placed in the receiving space 140 through the receiving opening 150 and the wire passing channel 230 to complete the cable bundle accommodation. Since the first blocking piece 210 and the second blocking piece 220 have a blocking effect on the cable bundle, it is not necessary to bundle the cable bundle, thereby avoiding problems such as cable heating and signal interference caused by bundling the cable. In addition, in the process of replacing or troubleshooting the cable accommodation, each cable to be checked can be taken out through the wire passing channel in turn, checked and placed on the first blocking piece 210 or the second blocking piece 220 for differentiation until the problem cable is found, thereby avoiding cable falling off or differentiation confusion in the troubleshooting process.​

[0044] The radial opening size of the wire passage 230 is reduced axially along the wire slot 100, which is axially directed to the bottom plate 120. In some embodiments, the radial opening of the wire passage 230 is shaped as a trapezoid, in which the long side of the trapezoid is away from the bottom plate 120, and the short side of the trapezoid is close to the bottom plate 120. In this way, the radial opening of the wire passage 230 is larger in the direction away from the bottom plate 120, and the cable is placed into the wire passage 230 and enters the receiving space 140 through the wire passage 230. Since the radial opening size of the wire passage 230 is reduced axially along the wire slot 100, the possibility of the cable in the receiving space 140 falling out of the wire passage 230 is further reduced or avoided.

[0045] In some embodiments, referring to Figure 3 , the radial opening of the wire passage 230 can be formed by the chamfer at the end of the first and second flaps 210 and 220.

[0046] In some embodiments, referring to Figure 2 , the radial opening of the wire passage 230 can be formed by the inclination of the end of the first and second flaps 210 and 220; the specific formation is described later.

[0047] At least one of the first and second flaps 210 and 220 is an elastic flap.

[0048] In some embodiments, the first flap 210 is selected as an elastic flap, and the second flap 220 is selected as a non-elastic flap.

[0049] In some embodiments, the second flap 220 is selected as an elastic flap, and the first flap 210 is selected as a non-elastic flap.

[0050] In some embodiments, the first and second flaps 210 and 220 are both selected as elastic flaps.

[0051] In this embodiment, there is no specific limitation, and the cable can pass through the wire passage 230.

[0052] It is worth noting that in some embodiments, referring to Figure 4, at least one of the first baffle 210 and the second baffle 220 is an elastic baffle, at this time, the openings of the wire passing channel 230 near one end of the bottom plate 120 can be in contact with each other, that is, the end and a part of the first baffle 210 and the second baffle 220 can be attached, so that the cross section of the wire passing channel 230 forms a triangle, and since at least one of the first baffle 210 and the second baffle 220 is an elastic baffle, the end and a part of the first baffle 210 and the second baffle 220 can be attached, so that the cross section of the wire passing channel 230 forms a triangle, and since at least one of the first baffle 210 and the second baffle 220 is an elastic baffle, the process of the cable passing through the wire passing channel 230 will not be interfered.

[0053] The first baffle 210 is fixedly arranged at one end of the first side plate 110, and the first baffle 210 extends towards the second side plate 130 to be opposite to the middle part of the bottom plate 120, and then extends towards the bottom plate 120 in a direction inclined to the bottom plate 120 and away from the first side plate 110.

[0054] The second baffle 220 is fixedly arranged at one end of the second side plate 130, and the second baffle 220 extends towards the first side plate 110 to be opposite to the middle part of the bottom plate 120, and then extends towards the bottom plate 120 in a direction inclined to the bottom plate 120 and away from the second side plate 130.

[0055] In some embodiments, referring to Figure 5 , the end of one of the first baffle 210 and the second baffle 220 is inclined, and the other is not inclined.

[0056] In some embodiments, referring to Figure 2 , the ends of the first baffle 210 and the second baffle 220 are both inclined. In this embodiment, the ends of the first baffle 210 and the second baffle 220 are both inclined.

[0057] In some embodiments, the lengths of the first baffle 210 and the second baffle 220 are the same.

[0058] In some embodiments, the lengths of the first baffle 210 and the second baffle 220 are different.

[0059] In this embodiment, the lengths of the first baffle 210 and the second baffle 220 are different.

[0060] In some embodiments, the first baffle 210 and the second baffle 220 are oppositely arranged.

[0061] In some embodiments, the first baffle 210 and the second baffle 220 are arranged alternately. It is worth noting that when the first baffle 210 and the second baffle 220 are arranged alternately, the first baffle 210 is higher than the second baffle 220, or the second baffle 220 is higher than the first baffle 210, so that the cable passage 230 formed by the first baffle 210 and the second baffle 220 facilitates the passage of cables, while the first baffle 210 and the second baffle 220 mainly serve to prevent cables from falling out of the storage space 140.

[0062] In this specific embodiment, the first baffle 210 and the second baffle 220 are arranged opposite to each other.

[0063] In some embodiments, the first baffle 210 is fixedly disposed at the end of the first side plate 110, and the second baffle 220 is fixedly disposed at the end of the second side plate 130. In this case, the storage opening 150 is the wire passage 230.

[0064] In some embodiments, the first baffle 210 is fixedly disposed on the side wall of the first side plate 110, and the second baffle 220 is fixedly disposed on the side wall of the second side plate 130. At this time, the wire passage 230 is close to the bottom plate 120, and the storage opening 150 is away from the bottom plate 120.

[0065] In some more specific embodiments, refer to Figure 2 The first baffle 210, the first side plate 110, the bottom plate 120, the second side plate 130 and the second baffle 220 are connected in sequence to form a storage space 140. The top of the first side plate 110, the first baffle 210, the second baffle 220 and the top of the second side plate 130 form a storage opening 150. The portion of the first baffle 210 extending toward the bottom plate 120 in a direction inclined to the bottom plate 120 and the portion of the second baffle 220 extending toward the bottom plate 120 in a direction inclined to the bottom plate 120 form a wire passage 230.

[0066] Reference Figure 1 and Figure 6 The cable storage fixture also includes a cover 300, which is detachably connected to the first side plate 110 and the second side plate 130 of each cable tray 100 and covers each storage opening 150. The cover 300 minimizes the accumulation of dust and other debris in the storage space 140, thus reducing the adverse effects on cable heat dissipation and subsequent maintenance.

[0067] The top surface of the first side plate 110 is provided with a first snap-fit ​​member 111. The first snap-fit ​​member 111 and the first side plate 110 form a first snap-fit ​​groove 112 to fit the cover body 300. The top surface of the second side plate 130 is provided with a second snap-fit ​​member 131. The second snap-fit ​​member 131 and the second side plate 130 form a second snap-fit ​​groove 132 to fit the cover body 300.

[0068] It is worth noting that the top surface of the first side plate 110 refers to the end surface of the first side plate 110 away from the bottom plate 120; the top surface of the second side plate 130 refers to the end surface of the second side plate 130 away from the bottom plate 120;

[0069] In some embodiments, the top surface of each first side plate 110 is provided with a first clamping piece 111, and the top surface of at least one second side plate 130 is provided with a second clamping piece 131.

[0070] In some embodiments, the top surface of each second side plate 130 is provided with a second clamping piece 131, and the top surface of at least one first side plate 110 is provided with a first clamping piece 111.

[0071] In some embodiments, the top surface of at least one first side plate 110 is provided with a first clamping piece 111, and the top surface of at least one second side plate 130 is provided with a second clamping piece 131. It is worth noting that in this case, the long strip-shaped tooling 400 can contain only a small number of wire slots 100, for example, two wire slots 100, or three wire slots 100, as long as the first clamping piece 111 and the second clamping piece 131 can clamp the cover body 300 and make the cover body 300 not easy to fall off.

[0072] In some more specific embodiments, the first clamping piece 111 is arranged on the first side plate 110 at the end of the long strip-shaped tooling 400, and the second clamping piece 131 is arranged on the second side plate 130 at the end of the long strip-shaped tooling 400.

[0073] In this embodiment, the specific arrangement of the first clamping piece 111 and the second clamping piece 131 is not limited, as long as it can clamp the cover body 300.

[0074] In some embodiments, the shape of the first clamping groove 112 is different from the shape of the second clamping groove 132.

[0075] In some embodiments, the shape of the first clamping groove 112 is the same as the shape of the second clamping groove 132.

[0076] In some specific embodiments, the first clamping piece 111 is arranged inclined relative to the bottom, and the second clamping piece 131 is arranged inclined relative to the bottom. The part of the first side plate 110 away from the bottom plate 120 is arranged inclined, and the first clamping piece 111 surrounds the first clamping groove 112, so that the two side walls of the first clamping groove 112 are arranged inclined. The part of the second side plate 130 away from the bottom plate 120 is arranged inclined, and the second clamping piece 131 surrounds the second clamping groove 132, so that the two side walls of the second clamping groove 132 are arranged inclined.

[0077] In some more specific embodiments, the portion of the first side plate 110 distal to the bottom plate 120 is arranged to be inclined, the portion of the second side plate 130 distal to the bottom plate 120 is arranged to be inclined, and the inclination angle of the inclined portion of the first side plate 110 is the same as the inclination angle of the inclined portion of the second side plate 130. More specifically, the inclined portion of the first side plate 110 and the inclined portion of the second side plate 130 are inclined towards each other.

[0078] In some embodiments, a portion of the wire slot 100 can only contain the first blocking piece 210 or the second blocking piece 220. Specifically, for two adjacent wire slots 100, the blocking assembly 200 can be arranged in each of the wire slots 100, and the blocking assembly 200 in one of the wire slots 100 contains the first blocking piece 210 and the second blocking piece 220, and the blocking assembly 200 in the other wire slot 100 contains only the first blocking piece 210 or the second blocking piece 220. It is worth noting that when the blocking assembly 200 contains only the first blocking piece 210 or the second blocking piece 220, the first blocking piece 210 or the second blocking piece 220 can extend to the middle of the bottom plate 120, or directly extend to the opposite first side plate 110 or second side plate 130, and the specific extension is mainly to not interfere with the cable storage process.

[0079] The implementation principle of the cable storage tool of the semiconductor device according to the embodiments of the present application is that the cable is placed into the wire slot 100 through the storage opening 150, the cable continues to pass through the wire passage 230 after passing through the storage opening 150, and then enters the storage space 140. Due to the arrangement of the first blocking piece 210 and the second blocking piece 220, the cable entering the storage space 140 is not easy to be separated from the storage space 140, and when the cable storage is completed, the cover 300 is connected with the cable storage tool, which further ensures that the cable will not be separated from the storage space 140.

[0080] Although the embodiments of the present application have been described in detail above, it is obvious for those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes all belong to the scope and spirit of the present application described in the claims. Moreover, the present application described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A cable storage tool for a semiconductor device, characterized by, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

2. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

3. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

4. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

5. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

6. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

7. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

8. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure.

9. The cable storage tool of claim 1, wherein, The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. The utility model relates to a wire slot (100) is connected in series, and the wire slot (100) is connected in series to form an integrated structure. 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