Vacuum rotary body magnetic rotation temperature control chamber

Abstract

The utility model discloses a vacuum revolving body magnetic rotation temperature control chamber, comprising a temperature control chamber, the top of which is respectively provided with a temperature control assembly and a pressure control assembly, the side wall of the temperature control chamber is provided with a first opening, and the first opening is provided with a chamber front door corresponding to the first opening; the magnetic follower comprises a roller bracket; the two supporting rollers are arranged in parallel and are arranged on the roller support, and a to-be-machined rotary body is placed between the two supporting rollers; two first magnetic pieces; and a magnetic driving member. According to the utility model, the circumferential uniformity of the to-be-processed rotary body in the processing process is improved, so that the subsequent processing precision of the to-be-processed rotary body is improved; a rotary body structure can be driven under the non-contact condition, the non-contact characteristic of a magnetic field is utilized, mechanical abrasion can be reduced, the stability of equipment is improved, and the service life of the equipment is prolonged; and it is ensured that the circumferential uniformity of the to-be-machined rotary body is improved in the machining process.

Description

TECHNICAL FIELD

[0001] The utility model relates to electronic manufacturing technical field, concretely relates to a vacuum rotary body magnetic rotation temperature control chamber. BACKGROUND

[0002] In the manufacturing process of semiconductor equipment components, with the continuous development of semiconductor process to higher precision, smaller size and higher efficiency, the performance requirements of equipment components are increasingly strict. Especially in the processing of some key components, the design of equipment and the precise control of process are directly related to the quality and production efficiency of semiconductor products. Since the semiconductor manufacturing process often involves high-precision processing, especially in the process of film deposition, etching, cleaning, etc., the processing performance of equipment components not only requires high precision, but also needs uniformity in different directions, especially in the circumferential direction, to ensure that the process parameters of each area are consistent and avoid uneven product quality due to local errors.

[0003] The existing vacuum rotary body magnetic rotation temperature control chamber relies on pneumatic, mechanical and other means to drive the rotary body or adjust the contact state of the rotary body surface when processing the rotary body. This method usually requires complex mechanisms and control systems, which can easily increase the weight and complexity of the equipment, and cannot fully guarantee the stability and uniformity of the process conditions in the circumferential direction. SUMMARY

[0004] The utility model aims at providing a vacuum rotary body magnetic rotation temperature control chamber, which solves the problem that the existing vacuum rotary body magnetic rotation temperature control chamber relies on pneumatic, mechanical and other means when processing the rotary body, requires complex mechanisms and control systems, easily increases the weight and complexity of the equipment, and cannot fully guarantee the stability and uniformity of the process conditions in the circumferential direction.

[0005] To achieve the above-mentioned purpose, the utility model realizes by the following technical scheme:

[0006] A vacuum rotary body magnetic rotation temperature control chamber, comprising:

[0007] A temperature control chamber is provided with a temperature control assembly and a pressure control assembly at the top, respectively, and the side wall of the temperature control chamber is provided with a first opening, and the first opening is installed with a chamber front door corresponding thereto;

[0008] A magnetic driven part is arranged in the temperature control chamber, which comprises a roller support, two parallel support rollers arranged on the roller support, and a rotary body to be processed placed between the two support rollers, two first magnetic parts, and two first magnetic parts respectively arranged at one end of the two support rollers;

[0009] magnetic driving members arranged on one side of the magnetic driven members, the magnetic driving members being respectively magnetically connected with the two first magnetic members, and the magnetic driving members driving the two first magnetic members to rotate around the centers thereof.

[0010] Preferably, the magnetic driving members comprise:

[0011] a motor frame arranged outside the temperature control chamber;

[0012] two driving electrodes arranged on the motor frame in a spaced manner;

[0013] two second magnetic members respectively connected with the output ends of the two driving electrodes, and the two second magnetic members being respectively arranged opposite to the two first magnetic members.

[0014] Preferably, each of the first magnetic members comprises a driven impeller fixed with one end of a center rod of one of the support drums.

[0015] Preferably, each of the second magnetic members comprises a driving impeller arranged corresponding to the driven impeller.

[0016] Preferably, each of the driven impellers and each of the driving impellers is provided with at least one branch end for fixing a magnet, and the magnets fixed on the driven impellers and the driving impellers are opposite in polarity.

[0017] Preferably, a second opening is formed in the side wall of the temperature control chamber close to the side of the magnetic driving members, and a side laminated glass is installed at the second opening.

[0018] Preferably, the two first magnetic members and the two second magnetic members are respectively located on two sides of the side laminated glass.

[0019] Preferably, the temperature control assembly comprises a temperature measuring probe, one end of which extends into the temperature control chamber through a temperature probe hole formed in the temperature control chamber.

[0020] Preferably, the pressure control assembly comprises:

[0021] a pressure gauge, one end of which extends into the temperature control chamber through a pressure detection hole formed in the temperature control chamber;

[0022] a nitrogen gas inlet pipe, one end of which extends into the temperature control chamber through an air inlet formed in the temperature control chamber, and the other end of the nitrogen gas inlet pipe being connected with an external nitrogen gas pump-in device.

[0023] a vacuum bellows, one end of which extends into the temperature control chamber through a bellows opening formed in the temperature control chamber, and the other end of the vacuum bellows being connected with an external vacuum device.

[0024] Preferably, further comprising:

[0025] A front door hinge is arranged between the temperature control chamber and the chamber front door, connecting the temperature control chamber and the chamber front door.

[0026] A sealing ring is arranged along the edge of the inner side wall of the chamber front door.

[0027] Compared with the prior art, the utility model has the following beneficial effects:

[0028] The vacuum rotary body magnetic rotation temperature control chamber provided by the utility model realizes the rotation of the rotary body to be processed in the temperature control chamber when processing, improves the circumferential direction uniformity of the rotary body to be processed in the processing process, and improves the precision of subsequent processing of the rotary body to be processed; the supporting roller improves the stability of the rotary body to be processed when rotating in the temperature control chamber; by introducing the magnetic field induction technology, the rotary body structure can be driven without contact, the non-contact characteristics of the magnetic field are utilized, mechanical wear is reduced, and the stability and service life of the equipment are improved; the driving electrode drives the driven impeller to rotate, the driven impeller rotates with the rotary body to be processed through the supporting roller, the rotary body to be processed rotates when being heated in the temperature control chamber, and the circumferential direction uniformity of the rotary body to be processed in the processing process is improved; the temperature control chamber is sealed, and the rotary body to be processed can be processed at high temperature in the temperature control chamber; the temperature measuring probe, the air pressure gauge, the nitrogen inlet pipe and the vacuum bellows are arranged on the top of the temperature control chamber; when the temperature control chamber is vacuumized through the vacuum bellows, the pressure is monitored by the air pressure gauge; after the processing of the rotary body to be processed is completed, nitrogen is supplemented into the temperature control chamber through the nitrogen inlet pipe, so that the pressure in the temperature control chamber returns to the standard atmospheric pressure when the chamber front door is opened, and the pollution caused by the direct entry of air is solved; the nitrogen inlet pipe injects nitrogen after the processing of the rotary body to be processed is completed, and the vacuum bellows is vacuumized, so that the effect of rapid cooling of the rotary body to be processed in the temperature control chamber is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical scheme of the utility model, the following will briefly introduce the drawings needed to be used in the description, and obviously, the drawings in the following description are three embodiments of the utility model, and for ordinary skilled in the art, other drawings can be obtained according to these drawings without creative labor:

[0030] Figure 1 The structure diagram of the vacuum rotary body magnetic rotation temperature control chamber provided by an embodiment of the utility model is shown in the drawing;

[0031] Figure 2The structure schematic diagram of the rotating mechanism is provided for an embodiment of the utility model.

[0032] Figure 3 The structure schematic diagram of the driven impeller and the driving impeller is provided for an embodiment of the utility model.

[0033] The drawing mark explanation: 1-temperature control chamber, 2-chamber front door, 3-drum support, 4-supporting drum, 5-waiting processing rotary body, 6-driven impeller, 7-N pole magnet, 8-driving electrode, 9-driving impeller, 10-S pole magnet, 11-motor frame, 12-side laminated glass, 13-front door laminated glass, 14-front door folding, 15-temperature-resistant rubber sealing ring, 16-front door handle, 17-temperature measuring probe, 18-barometer, 19-nitrogen inlet pipe, 20-vacuum bellows. DETAILED DESCRIPTION

[0034] The vacuum rotary body magnetic rotation temperature control chamber provided by the utility model will be further explained in detail below in combination with the accompanying Figures 1-3 and specific embodiments. According to the following description, the advantages and characteristics of the utility model will be more apparent. It should be noted that the drawings are greatly simplified and all use non-precise proportions, only for the purpose of facilitating and clarifying the purpose of assisting the description of the utility model embodiments. In order to make the purpose, characteristics and advantages of the utility model more apparent and easy to understand, please refer to the accompanying drawings. It should be noted that the structure, proportion, size, etc. shown in the drawings attached to the specification are only used to cooperate with the content disclosed in the specification, so that those skilled in the art can understand and read, and are not used to limit the conditions of the implementation of the utility model, so they do not have the technical significance. Any modification of structure, change of proportion relationship or adjustment of size, without affecting the effect and purpose that can be achieved by the utility model, should still fall within the scope of the technical content disclosed by the utility model.

[0035] In view of the existing vacuum rotary body magnetic rotation temperature control chamber, when processing the waiting processing rotary body, it mainly depends on pneumatic, mechanical and other means, which needs complex mechanism and control system, which is easy to increase the weight and complexity of the equipment, and cannot fully guarantee the stability and uniformity of the process conditions in the circumferential direction.

[0036] Reference Figure 1 As shown in the figure, the embodiment provides a kind of vacuum rotary body magnetic rotation temperature control chamber, including: temperature control chamber 1, top is provided with temperature control assembly and pressure control assembly respectively, the side wall of the temperature control chamber 1 is provided with first opening, the first opening is installed with the chamber front door 2 corresponding thereto;Rotating mechanism for waiting processing rotary body 5 rotation is arranged in temperature control chamber 1, and the rotating mechanism includes: magnetic driven part and magnetic driving part. Figure 2The magnetic follower is arranged in the temperature control chamber 1, and the magnetic follower comprises a roller support 3, two parallel arranged supporting rollers 4 arranged on the roller support 3, a to-be-processed rotary body 5 placed between the two supporting rollers 4, two first magnetic members arranged at one end of the two supporting rollers 4 respectively, and a magnetic driving member arranged on one side of the magnetic follower and magnetically connected with the two first magnetic members, wherein the magnetic driving member drives the two first magnetic members to rotate along the center thereof, and the two first magnetic members drive the two supporting rollers 4 to rotate along the center rods thereof. The rotation mechanism arranged in the temperature control chamber 1 is used to realize the rotation of the to-be-processed rotary body 5 during the processing in the temperature control chamber 1, improve the uniformity of the to-be-processed rotary body 5 in the circumferential direction during the processing, and thus improve the precision of the subsequent processing of the to-be-processed rotary body 5.

[0037] The magnetic driving member comprises a motor frame 11 arranged outside the temperature control chamber 1, two driving electrodes 8 arranged on the motor frame 11 at intervals, and two second magnetic members connected with the output ends of the two driving electrodes 8 respectively, wherein the two second magnetic members are arranged opposite to the two first magnetic members respectively, and the two driving electrodes 8 drive the two second magnetic members to rotate along the center thereof.

[0038] Reference Figure 3 Each of the first magnetic members comprises a driven impeller 6 fixed with one end of the center rod of one supporting roller 4. Each of the second magnetic members comprises a driving impeller 9 arranged corresponding to the driven impeller 6. Each of the driven impeller 6 and the driving impeller 9 is provided with at least one branch end for fixing a magnet, and the polarity of the magnets fixed on the driven impeller 6 and the driving impeller 9 is opposite. The S-pole magnet 10 is fixed on the surface of the driving impeller 9 close to the temperature control chamber 1, the center rod of the supporting roller 4 is fixed with the driven impeller 6, the N-pole magnet 7 is fixed on the surface of the driven impeller 6 close to the magnetic driving member, and the N-pole magnet 7 and the S-pole magnet 10 are attracted by magnetic force.

[0039] The side wall of the temperature control chamber 1 near the side of the magnetic drive member is provided with a second opening, and a side laminated glass 12 is installed at the second opening. Two first magnetic members and two second magnetic members are respectively located on both sides of the side laminated glass 12. The N-pole magnet 7 and the S-pole magnet 10 are located on both sides of the side laminated glass 12. In this embodiment, the magnetic drive member composed of the driven impeller 6, the N-pole magnet 7, the driving electrode 8, the driving impeller 9, the S-pole magnet 10 and the motor frame 11 is used to drive the driving impeller 9 with a fixed output shaft of the driving electrode 8 to be located outside the temperature control chamber 1, and the driven impeller 6 with a fixed center of the support roller 4 is located inside the temperature control chamber 1. At the same time, the S-pole magnet 10 fixed at the branch end of the driving impeller 9 is attracted to the N-pole magnet 7 fixed at the branch end of the driven impeller 6 by magnetic force, so as to realize the rotation of the S-pole magnet 10 through the driving electrode 8 and the driving impeller 9, the rotation of the driven impeller 6 through the N-pole magnet 7 and the S-pole magnet 10, and the rotation of the support roller 4 through the driven impeller 6 and the processing rotary body 5, so as to realize the rotation of the processing rotary body 5 in the temperature control chamber 1 during warming, and ensure the improvement of the circumferential uniformity of the processing rotary body 5 during processing.

[0040] In this embodiment, the vacuum rotary body magnetic rotation temperature control chamber 1 further comprises a front door hinge 14 arranged between the temperature control chamber 1 and the chamber front door 2, which is used to connect the temperature control chamber 1 and the chamber front door 2; and a sealing ring 15 arranged along the edge of the inner side wall of the chamber front door 2. In this embodiment, the sealing ring 15 preferably adopts a temperature-resistant rubber sealing ring. The chamber front door 2 is provided with a front door laminated glass 13 at the laminated layer, and the outer surface of the chamber front door 2 away from the front door hinge 14 is provided with a front door handle 16. Through the front door laminated glass 13 arranged at the laminated layer of the chamber front door 2, it is convenient to observe the processing condition of the processing rotary body 5, and the temperature-resistant rubber sealing ring adhered to the inner side of the chamber front door 2 makes the temperature control chamber 1 and the chamber front door 2 sealed through the temperature-resistant rubber sealing ring 15 after being locked by the front door handle 16, so as to facilitate the high-temperature processing of the processing rotary body 5 in the temperature control chamber 1.

[0041] The temperature control assembly comprises a temperature measuring probe 17, one end of which extends into the temperature control chamber 1 through a temperature probe hole formed in the temperature control chamber 1. The temperature control chamber 1 is used to monitor the internal temperature. The pressure control assembly comprises a gas pressure gauge 18, one end of which extends into the temperature control chamber 1 through a gas pressure detection hole formed in the temperature control chamber 1, and the gas pressure gauge 18 detects the internal gas pressure of the temperature control chamber 1; a nitrogen gas inlet pipe 19, one end of which extends into the temperature control chamber 1 through an air inlet formed in the temperature control chamber 1, and the other end of the nitrogen gas inlet pipe 19 is connected with an external nitrogen gas pump-in device, and the nitrogen gas inlet pipe 19 injects nitrogen gas into the temperature control chamber 1; and a vacuum bellows 20, one end of which extends into the temperature control chamber 1 through a bellows port formed in the temperature control chamber 1, and the other end of the vacuum bellows 20 is connected with an external vacuum device, and the vacuum bellows 20 is used to perform vacuumization on the inside of the temperature control chamber 1.

[0042] In the embodiment, the temperature measuring probe 17, the gas pressure gauge 18, the nitrogen gas inlet pipe 19 and the vacuum bellows 20 are arranged on the upper part of the temperature control chamber 1, the temperature measuring probe 17 is used to monitor the temperature when the temperature control chamber 1 warms the to-be-processed rotary body 5, the gas pressure gauge 18 is used to monitor the internal gas pressure of the temperature control chamber 1, the pressure is monitored by the gas pressure gauge 18 when the temperature control chamber 1 is vacuumized by the vacuum bellows 20, and after the to-be-processed rotary body 5 is processed, the nitrogen gas inlet pipe 19 is used to inject nitrogen gas into the inside of the temperature control chamber 1, so that the inside of the temperature control chamber 1 returns to the standard atmospheric pressure when the chamber front door 2 is opened, thereby solving the pollution caused by the direct entry of air and oxygen, and the nitrogen gas inlet pipe 19 injects nitrogen gas and the vacuum bellows 20 performs vacuumization after the to-be-processed rotary body 5 is processed, so that the to-be-processed rotary body 5 is rapidly cooled in the temperature control chamber 1.

[0043] In summary, the embodiment provides a vacuum rotary magnetic spin temperature control chamber. The rotating mechanism arranged in the temperature control chamber enables the rotation of the rotary body to be processed in the temperature control chamber during processing, improves the circumferential uniformity of the rotary body to be processed during processing, and improves the precision of subsequent processing of the rotary body to be processed. The magnetic follower includes a roller support and a support roller, and the two support rollers installed in parallel at the upper end of the roller support are used to support the rotary body to be processed, thereby increasing the stability of the rotary body to be processed during rotation in the temperature control chamber. By introducing magnetic field induction technology, the rotary body structure can be driven without contact, and the non-contact characteristics of the magnetic field can reduce mechanical wear and improve the stability and service life of the equipment. The magnetic drive component is composed of a driven impeller, an N-pole magnet, a drive electrode, a drive impeller, an S-pole magnet, and a motor frame. The drive electrode output shaft fixed drive impeller is located outside the temperature control chamber, the support roller center fixed driven impeller is located inside the temperature control chamber, the S-pole magnet fixed at the branch end of the drive impeller is attracted by the N-pole magnet fixed at the branch end of the driven impeller through magnetic force, and the drive electrode rotates with the S-pole magnet through the drive impeller, the S-pole magnet rotates with the driven impeller through the N-pole magnet, and the driven impeller rotates with the rotary body to be processed through the support roller, thereby realizing the rotation of the rotary body to be processed during warming in the temperature control chamber and ensuring the improvement of the circumferential uniformity of the rotary body to be processed during processing. The front door interlayer glass arranged at the front door interlayer of the chamber facilitates the observation of the processing of the rotary body to be processed through the front door interlayer glass. The temperature-resistant rubber sealing ring bonded to the inner side of the chamber front door enables the temperature control chamber and the chamber front door to be sealed by the temperature-resistant rubber sealing ring after being locked by the front door handle, thereby facilitating high-temperature processing of the rotary body to be processed in the temperature control chamber. The temperature probe, pressure gauge, nitrogen inlet pipe, and vacuum bellows arranged on the upper part of the temperature control chamber enable the temperature control chamber to be monitored by the pressure gauge when vacuumized by the vacuum bellows, and nitrogen is injected into the temperature control chamber by the nitrogen inlet pipe after the processing of the rotary body to be processed is completed, so that the temperature control chamber returns to standard atmospheric pressure when the chamber front door is opened, thereby solving the problem of pollution caused by the direct entry of air. At the same time, the nitrogen gas injection pipe injects nitrogen after the processing of the rotary body to be processed is completed, and the vacuum bellows is vacuumized, which achieves the effect of rapid cooling of the rotary body to be processed in the temperature control chamber.

[0044] It is to be understood that the terms such as first and second, and the like, refer to different entities or operations without necessarily requiring or implying any actual relationship or order between such entities or operations. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by an "including a" statement does not exclude the existence of additional identical elements in the process, method, article, or apparatus that includes the element.

[0045] In the description of the present application, it is to be understood that the orientation or positional relationship indicated by the terms "center", "height", "thickness", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present application, unless otherwise specified and limited, the meaning of "a plurality of" is two or more.

[0046] In the description of the present application, unless otherwise specified and limited, the terms "mounting", "connecting", "connecting", "fixing" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication or interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0047] In the present application, unless otherwise specified and limited, "on" or "under" of the first feature to the second feature can include that the first and second features are in direct contact, or can include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, "on", "above" and "above" of the first feature to the second feature include that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. "Below", "below" and "below" of the first feature to the second feature include that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0048] Although the content of the utility model has been introduced in detail through the above preferred embodiments, it should be recognized that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A vacuum-rotary magnetic-rotation-controlled temperature chamber, characterized in that, The utility model relates to a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

2. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 1, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

3. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 2, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

4. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 3, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

5. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 4, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

6. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 2, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

7. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 6, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

8. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 1, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

9. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 1, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body.

10. The vacuum-rotator magnetic-rotation controlled temperature chamber of claim 1, wherein, The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control chamber, a pressure control assembly and a magnetic drive assembly are arranged in the temperature control chamber, and the temperature control chamber is used for placing a rotary body. The utility model discloses a temperature control

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