Coating equipment
By introducing a bidirectional sample carrier device with heating and cooling functions into the coating equipment, the problem of the single function of the substrate stage in traditional equipment is solved, realizing bidirectional heating and cooling of the substrate and meeting diverse coating needs.
Patent Information
- Application Number
- CN202520134339.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-21
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-01-21
AI Technical Summary
In traditional electron beam coating equipment, the substrate stage has a relatively simple function, only capable of heating and lacking cooling capabilities.
A coating device was designed, comprising a first sample carrier and a second sample carrier. The first sample carrier heats the substrate through a heating device, and the second sample carrier cools the substrate through a cooling medium in a cooling chamber. The cooling medium is circulated by a feeding and discharging device.
It enables bidirectional processing of the substrate, allowing for both heating and cooling to meet different coating requirements.
Smart Images
Figure CN223866746U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of electron beam coating technology, and in particular to a coating device. Background Technology
[0002] Electron beam evaporation is a type of physical vapor deposition. Unlike traditional evaporation methods, electron beam evaporation utilizes an electromagnetic field to precisely bombard a target with high-energy electrons, melting the target and depositing it onto a substrate. Electron beam evaporation can deposit high-purity, high-precision thin films.
[0003] However, in traditional electron beam coating equipment, the substrate stage has a relatively simple function, and it can usually only heat the substrate. Utility Model Content
[0004] Therefore, it is necessary to provide a coating device that can perform both heating and cooling treatments on the substrate.
[0005] This application provides a coating apparatus, including a coating chamber, a first sample carrier, and a second sample carrier;
[0006] The first sample carrier is disposed in the coating chamber; the first sample carrier includes a first sample stage and a heating device; the first sample stage has a first sample-carrying surface for carrying materials; the heating device is connected to the first sample stage and is used to heat the materials on the first sample stage;
[0007] The second sample carrier is disposed in the coating chamber; the second sample carrier includes a second sample stage and a cooling chamber; the second sample stage has a second sample-carrying surface for carrying materials; the cooling chamber is connected to the second sample stage, and the interior of the cooling chamber is filled with a cooling medium for cooling the materials on the second sample stage.
[0008] In some embodiments, the second sample carrier further includes a feeding device and a discharging device; one end of the feeding device is disposed in the cooling chamber and the other end extends to the outside of the coating chamber, and the feeding device is used to introduce the cooling medium into the cooling chamber; one end of the discharging device is disposed in the cooling chamber and the other end extends to the outside of the coating chamber, and the discharging device is used to discharge the cooling medium in the cooling chamber.
[0009] In some embodiments, the first sample carrier further includes a first connecting shaft, a first drive assembly, and a first control device;
[0010] The first connecting shaft is connected to the first sample stage; the first driving assembly is connected to the first connecting shaft and is used to control the first connecting shaft to move along its axial direction; the first control device is connected to the first driving assembly and is used to control the first driving assembly.
[0011] In some embodiments, the first sample carrier further includes a second drive assembly and a second control device;
[0012] The second drive assembly is connected to the first connecting shaft and is used to control the first connecting shaft to rotate about its axis; the second control device is connected to the second drive assembly and is used to control the second drive assembly.
[0013] In some embodiments, the first connecting shaft extends along a first direction, which is perpendicular to the plane containing the first sample surface.
[0014] In some embodiments, the second sample carrier further includes a second connecting shaft, a third drive assembly, and a third control device;
[0015] The second connecting shaft is connected to the second sample stage; the third driving assembly is connected to the second connecting shaft and is used to control the second connecting shaft to move along its axial direction; the third control device is connected to the third driving assembly and is used to control the third driving assembly.
[0016] In some embodiments, the second sample carrier further includes a fourth drive assembly and a fourth control device;
[0017] The fourth drive assembly is connected to the second connecting shaft and is used to control the second connecting shaft to rotate about its axis; the fourth control device is connected to the fourth drive assembly and is used to control the fourth drive assembly.
[0018] In some embodiments, the second connecting shaft extends along a second direction, and the plane containing the second sample surface is parallel to the second direction.
[0019] In some embodiments, the first sample carrier further includes a vacuum electrode; the vacuum electrode and the heating device are electrically connected.
[0020] In some embodiments, the coating apparatus further includes an electron beam evaporation device disposed within the coating chamber; the electron beam evaporation device and the first sample carrier and the second sample carrier are spaced apart; and / or,
[0021] The coating equipment also includes a sample transfer channel and an operating chamber; the sample transfer channel is used to connect the operating chamber and the coating chamber.
[0022] The coating equipment of this application includes a first sample carrier and a second sample carrier within the coating chamber. The first sample carrier is capable of heating the material on a first sample stage using a heating device. The second sample carrier is capable of cooling the material on a second sample stage using a cooling medium filled in a cooling chamber. The coating equipment of this application can achieve both heating and cooling of the substrate. Attached Figure Description
[0023] Figure 1 This is a schematic diagram of the structure of a coating apparatus provided in one embodiment of this application;
[0024] Figure 2 A schematic diagram of the structure of the first sample-carrying device provided in one embodiment of this application;
[0025] Figure 3 This is a schematic diagram of the structure of the second sample carrier provided in one embodiment of this application.
[0026] Explanation of reference numerals in the attached figures
[0027] 10. Coating chamber; 20. First sample carrier; 21. First sample stage; 22. First connecting shaft; 23. Heating device; 24. First drive assembly; 25. First control device; 26. Second drive assembly; 27. Second control device; 28. Vacuum electrode; 30. Second sample carrier; 31. Second sample stage; 32. Second connecting shaft; 33. Cooling chamber; 34. Feeding device; 35. Discharging device; 36. Third drive assembly; 37. Third control device; 38. Fourth drive assembly; 39. Fourth control device; 40. Electron beam evaporation device; 50. Sample transfer channel; 60. Operating chamber. Detailed Implementation
[0028] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.
[0030] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.
[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0032] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.
[0033] Reference Figures 1-3This application provides a coating apparatus, including a coating chamber 10, a first sample carrier 20, and a second sample carrier 30. The first sample carrier 20 is disposed within the coating chamber 10. The first sample carrier 20 includes a first sample stage 21 and a heating device 23. The first sample stage 21 has a first sample-carrying surface for holding material. The heating device 23 is connected to the first sample stage 21 and is used to heat the material on the first sample stage 21. The second sample carrier 30 is disposed within the coating chamber 10. The second sample carrier 30 includes a second sample stage 31 and a cooling chamber 33. The second sample stage 31 has a second sample-carrying surface for holding material. The cooling chamber 33 is connected to the second sample stage 31 and is filled with a cooling medium for cooling the material on the second sample stage 31.
[0034] In the coating equipment of this application, a first sample carrier 20 and a second sample carrier 30 are provided in the coating chamber 10. The first sample carrier 20 can heat the material on the first sample stage 21 using a heating device 23. The second sample carrier 30 can cool the material on the second sample stage 31 using a cooling medium filled in the cooling chamber 33. The coating equipment of this application can achieve both heating and cooling of the substrate.
[0035] In some embodiments, the coating equipment is an electron beam coating equipment.
[0036] In some embodiments, the cooling chamber 33 is filled with liquid nitrogen.
[0037] In some embodiments, the second sample carrier 30 further includes a feeding device 34 and a discharging device 35. One end of the feeding device 34 is disposed within the cooling chamber 33, and the other end extends to the outside of the coating chamber 10. The feeding device 34 is used to introduce cooling medium into the cooling chamber 33. One end of the discharging device 35 is disposed within the cooling chamber 33, and the other end extends to the outside of the coating chamber 10. The discharging device 35 is used to discharge the cooling medium from the cooling chamber 33.
[0038] The cooling medium in the cooling chamber 33 can be circulated through the feeding device 34 and the discharging device 35, which can achieve a better cooling effect on the material on the second sample stage 31.
[0039] In some embodiments, the first sample carrier 20 further includes a first connecting shaft 22, a first drive assembly 24, and a first control device 25. The first connecting shaft 22 is connected to the first sample stage 21. The first drive assembly 24 is connected to the first connecting shaft 22 and is used to control the first connecting shaft 22 to move along its axial direction. The first control device 25 is connected to the first drive assembly 24 and is used to control the first drive assembly 24.
[0040] The first control device 25 controls the first drive assembly 24, which in turn controls the first connecting shaft 22 to move along its axial direction. This allows for adjustment of the position of the material on the first sample stage 21 within the coating chamber 10, facilitating the fulfillment of different coating requirements.
[0041] In some embodiments, the first drive component 24 is a linear drive mechanism.
[0042] In some embodiments, the first control device 25 is a motor.
[0043] In some embodiments, the first sample carrier 20 further includes a second drive assembly 26 and a second control device 27. The second drive assembly 26 is connected to the first connecting shaft 22 and is used to control the rotation of the first connecting shaft 22 about its axis. The second control device 27 is connected to the second drive assembly 26 and is used to control the second drive assembly 26.
[0044] The second control device 27 controls the second drive assembly 26, and the second drive assembly 26 controls the first connecting shaft 22 to rotate around its axis, which can realize the rotation of the material on the first sample stage 21 during the coating process, so as to facilitate the realization of different coating requirements.
[0045] In some embodiments, the second drive component 26 is a magnetically coupled drive mechanism.
[0046] In some embodiments, the second control device 27 is a motor.
[0047] In some embodiments, the first connecting shaft 22 extends along a first direction, which is perpendicular to the plane containing the first sample surface.
[0048] Refer again Figure 1 , Figure 2 As shown, exemplarily, Figure 1 , Figure 2 The X direction in the diagram is the first direction.
[0049] In some embodiments, the second sample carrier 30 further includes a second connecting shaft 32, a third drive assembly 36, and a third control device 37. The second connecting shaft 32 is connected to the second sample stage 31. The third drive assembly 36 is connected to the second connecting shaft 32 and is used to control the second connecting shaft 32 to move along its axial direction. The third control device 37 is connected to the third drive assembly 36 and is used to control the third drive assembly 36.
[0050] The third control device 37 controls the third drive assembly 36, which in turn controls the second connecting shaft 32 to move along its axial direction. This allows for adjustment of the position of the material on the second sample stage 31 within the coating chamber 10, facilitating the fulfillment of different coating requirements.
[0051] In some embodiments, the third drive component 36 is a linear drive mechanism.
[0052] In some embodiments, the third control device 37 is a motor.
[0053] In some embodiments, the second sample carrier 30 further includes a fourth drive assembly 38 and a fourth control device 39. The fourth drive assembly 38 is connected to the second connecting shaft 32 and is used to control the rotation of the second connecting shaft 32 about its axis. The fourth control device 39 is connected to the fourth drive assembly 38 and is used to control the fourth drive assembly 38.
[0054] The fourth control device 39 controls the fourth drive assembly 38, which in turn controls the second connecting shaft 32 to rotate around its axis, thereby adjusting the tilt angle of the second sample surface to facilitate different coating requirements.
[0055] In some embodiments, the fourth drive component 38 is a magnetically coupled drive mechanism.
[0056] In some embodiments, the fourth control device 39 is a motor.
[0057] In some embodiments, the second connecting shaft 32 extends along a second direction, and the plane containing the second sample surface is parallel to the second direction.
[0058] Refer again Figure 1 , Figure 3 As shown, exemplarily, Figure 1 , Figure 3 The Y direction in the equation is the second direction.
[0059] In some implementations, the first direction is perpendicular to the second direction.
[0060] In some embodiments, the first sample carrier 20 further includes a vacuum electrode 28. The vacuum electrode 28 is electrically connected to the heating device 23.
[0061] In some embodiments, the coating apparatus further includes an electron beam evaporation device 40, which is disposed within the coating chamber 10. The electron beam evaporation device 40 is disposed at intervals from the first sample carrier device 20 and the second sample carrier device 30.
[0062] In some embodiments, the coating apparatus further includes a sample transfer channel 50 and an operating chamber 60. The sample transfer channel 50 connects the operating chamber 60 and the coating chamber 10.
[0063] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0064] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims, and the specification and drawings can be used to interpret the content of the claims.
Claims
1. A coating equipment, characterized in that, Includes a coating chamber, a first sample loading device, and a second sample loading device; The first sample carrier is disposed in the coating chamber; the first sample carrier includes a first sample stage and a heating device; the first sample stage has a first sample-carrying surface for carrying materials; the heating device is connected to the first sample stage and is used to heat the materials on the first sample stage; The second sample carrier is disposed in the coating chamber; the second sample carrier includes a second sample stage and a cooling chamber; the second sample stage has a second sample-carrying surface for carrying materials; the cooling chamber is connected to the second sample stage, and the interior of the cooling chamber is filled with a cooling medium for cooling the materials on the second sample stage.
2. The coating equipment according to claim 1, characterized in that, The second sample carrier further includes a feeding device and a discharging device; one end of the feeding device is disposed in the cooling chamber and the other end extends to the outside of the coating chamber, and the feeding device is used to introduce the cooling medium into the cooling chamber; one end of the discharging device is disposed in the cooling chamber and the other end extends to the outside of the coating chamber, and the discharging device is used to discharge the cooling medium in the cooling chamber.
3. The coating equipment according to claim 1, characterized in that, The first sample carrier further includes a first connecting shaft, a first driving assembly, and a first control device; The first connecting shaft is connected to the first sample stage; the first driving assembly is connected to the first connecting shaft, and the first driving assembly is used to control the first connecting shaft to move along its axial direction; The first control device is connected to the first drive component, and the first control device is used to control the first drive component.
4. The coating equipment according to claim 3, characterized in that, The first sample carrier also includes a second drive assembly and a second control device; The second drive component is connected to the first connecting shaft, and the second drive component is used to control the first connecting shaft to rotate about its axis; The second control device is connected to the second drive assembly, and the second control device is used to control the second drive assembly.
5. The coating equipment according to claim 3, characterized in that, The first connecting shaft extends along a first direction, which is perpendicular to the plane containing the first sample surface.
6. The coating equipment according to claim 1, characterized in that, The second sample carrier also includes a second connecting shaft, a third drive assembly, and a third control device; The second connecting shaft is connected to the second sample stage; the third driving assembly is connected to the second connecting shaft, and the third driving assembly is used to control the second connecting shaft to move along its axial direction; The third control device is connected to the third drive assembly, and the third control device is used to control the third drive assembly.
7. The coating equipment according to claim 6, characterized in that, The second sample carrier also includes a fourth drive assembly and a fourth control device; The fourth drive assembly is connected to the second connecting shaft, and the fourth drive assembly is used to control the second connecting shaft to rotate about its axis. The fourth control device is connected to the fourth drive assembly, and the fourth control device is used to control the fourth drive assembly.
8. The coating equipment according to claim 6, characterized in that, The second connecting shaft extends along the second direction, and the plane containing the second sample surface is parallel to the second direction.
9. The coating equipment according to any one of claims 1 to 8, characterized in that, The first sample carrier further includes a vacuum electrode; the vacuum electrode and the heating device are electrically connected.
10. The coating apparatus according to any one of claims 1 to 8, characterized in that, The coating equipment further includes an electron beam evaporation device disposed within the coating chamber; the electron beam evaporation device and the first sample carrier device and the second sample carrier device are arranged alternately; and / or... The coating equipment also includes a sample transfer channel and an operating chamber; the sample transfer channel is used to connect the operating chamber and the coating chamber.