Silicon optical wafer test equipment and silicon optical wafer test system

Abstract

The utility model discloses silicon optical wafer test equipment. The silicon optical wafer test equipment comprises a camera assembly, a deflection optical path assembly, a probe station and an optical fiber coupling module, the driving assembly is used for driving the probe station and the deflection optical path assembly to move to the lower part of the camera assembly and the optical fiber end part of the optical fiber array in a mutual switching manner; the optical fiber coupling module is used for clamping the optical fiber end part of the optical fiber array; when the probe station moves to the position below the camera assembly, a cross cursor of a camera of the camera assembly is adjusted to be parallel to a cutting channel of the silicon optical wafer; when the deflection light path assembly moves into the imaging view field of the camera assembly, the camera assembly is used for collecting a first lateral image and a second lateral image through the deflection light path assembly and collecting a vertical image; and adjusting the end part of the optical fiber by using an optical fiber coupling module according to the image, so that the end part of the optical fiber and the optical waveguide are aligned and coupled. According to the application, the operation difficulty and the equipment structure for realizing alignment coupling between the optical fiber end part and the silicon optical waveguide are simplified, and the equipment cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of silicon photonics wafer testing technology, and in particular to a silicon photonics wafer testing device and a silicon photonics wafer testing system. Background Technology

[0002] Silicon photonics wafer testing equipment is mainly used to test whether the silicon photonic waveguides formed on the wafer can work properly. In the actual testing process, it is necessary to use an optical fiber array to output light waves to the optical waveguides arranged in an array on the wafer, so as to test the optical performance of the optical waveguides.

[0003] In the performance testing of optical waveguides, it is necessary to align and couple the output ports of the fiber optic array with the optical interfaces of the silicon optical waveguide on the wafer. Therefore, achieving proper alignment and coupling between the ports of the fiber optic array and the optical interfaces of the silicon optical waveguide on the wafer during silicon optical wafer testing, while reducing the difficulty of alignment and coupling, is one of the key issues of concern in the industry. Utility Model Content

[0004] The purpose of this invention is to provide a silicon photonics wafer testing device and a silicon photonics wafer testing system. The device has a simple structure and can achieve preliminary alignment between the optical waveguide and the optical fiber port, reducing the difficulty of alignment and coupling between the optical waveguide and the optical fiber port.

[0005] To address the aforementioned technical problems, this utility model provides a silicon photonics wafer testing device, comprising a camera assembly; a deflection optical path assembly; a probe station for supporting the silicon photonics wafer; an optical fiber coupling module; and a driving assembly.

[0006] The driving component is used to drive the probe station and the deflection optical path component to switch between moving into the imaging field of view of the camera component;

[0007] When the driving component drives the deflection optical path component to be within the imaging field of view of the camera component, the fiber end and the camera of the camera component are respectively located on the incident optical path and the outgoing optical path of the deflection optical path component. The deflection optical path component is used to transmit the lateral images of at least two directions from the fiber end to the camera.

[0008] The end connection structure is used to clamp the fiber coupling module of the fiber end of the fiber array, and to drive the fiber end to translate in a first direction, a second direction and a third direction, and to drive the fiber end to rotate around a first rotation axis, a second rotation axis and a third rotation axis respectively; wherein, the first direction is parallel to the first rotation axis, the second direction is parallel to the second rotation axis, the third direction is parallel to the third rotation axis, and the first direction, the second direction and the third direction are perpendicular to each other.

[0009] In one optional embodiment of this application, the silicon photonics wafer testing equipment further includes a light source assembly for outputting a light beam at the location of the fiber end; wherein the light source assembly is disposed on the support platform of the deflecting optical path assembly.

[0010] In one optional embodiment of this application, the deflecting optical path assembly includes a support stage connected to the probe stage, and a first reflective element and a second reflective element disposed on the support stage;

[0011] The light source assembly includes a first light source assembly and a second light source assembly disposed on the support platform;

[0012] When the driving component drives the deflection optical path component to the set position below the camera component, the first reflective element and the first light source component are located on opposite sides of the end of the optical fiber along a first horizontal direction, and the second reflective element and the first light source component are located on opposite sides of the end of the optical fiber along a second horizontal direction; wherein the first horizontal direction and the second horizontal direction are perpendicular to each other.

[0013] In one optional embodiment of this application, the first reflective element is provided with a first marking line parallel to the second horizontal direction; the second reflective element is provided with a second marking line parallel to the first horizontal direction.

[0014] In one optional embodiment of this application, the first light source assembly includes a first surface light source and a third reflective element; the second light source assembly includes a second surface light source and a fourth reflective element;

[0015] Furthermore, the first reflective element, the second reflective element, the third emitting element, and the fourth reflective element are all right-angled triangular prisms, and a reflective film layer is provided on the inclined reflective surface of the right-angled triangular prism;

[0016] The oblique reflective surface of the third reflective element is located in the output light path of the first surface light source, and is used to reflect the light beam output by the first surface light source along the first horizontal direction through the set intersection area and incident on the first reflective element, so that the first reflective element reflects the light carrying the lateral contour information of the end of the optical fiber.

[0017] The oblique reflective surface of the fourth reflective element is located in the output light path of the second light source, and is used to reflect the light beam output by the second surface light source along the second horizontal direction through the set intersection area and incident on the second reflective element, so that the second reflective element reflects the light carrying the lateral contour information of the end of the optical fiber.

[0018] In one optional embodiment of this application, the end connection structure of the optical fiber coupling module for connecting the end of the optical fiber is further provided with a height probe structure;

[0019] Accordingly, a calibration substrate is also provided on the support platform corresponding to the designated intersection area;

[0020] When the driving component drives the deflection optical path component to move to a distance within a set height range between the lower surface of the height probe structure and the upper surface of the calibration substrate, the end of the optical fiber is located in the set intersection area.

[0021] In one optional embodiment of this application, the height detection structure is a nanocapacitive displacement sensor.

[0022] In one optional embodiment of this application, the fiber optic coupling module includes a first translation component, a second translation component, a third translation component, a first rotation component, a second rotation component, and a third rotation component connected in sequence; the end connection structure of the fiber optic coupling module is connected to the third rotation component;

[0023] Wherein, the first translation component is used to drive the second translation component, the third translation component, the first rotation component, the second rotation component, the third rotation component, and the end connection structure to translate synchronously along the first direction;

[0024] The second translation component is used to drive the third translation component, the first rotation component, the second rotation component, the third rotation component, and the end connection structure to translate synchronously along the second direction;

[0025] The third translation component is used to drive the first rotation component, the second rotation component, the third rotation component, and the end connection structure to translate synchronously along the third direction.

[0026] The first rotating component is used to drive the second rotating component, the third rotating component, and the end connection structure to rotate synchronously around the first rotating axis as the rotation center;

[0027] The second rotating component is used to drive the third rotating component and the end connection structure to rotate synchronously around the second rotating axis as the rotation center;

[0028] The third rotating component is used to drive the end connection structure to rotate around the third rotating axis as the rotation center.

[0029] In one optional embodiment of this application, the end connection structure of the optical fiber coupling module is further provided with a piezoelectric displacement stage.

[0030] A silicon photonics wafer testing system includes a silicon photonics wafer testing device as described in any one of the preceding claims; and an optical performance testing machine connected to the silicon photonics wafer testing device;

[0031] The optical performance testing machine includes a motion controller that is communicatively connected to the optical fiber coupling module and the piezoelectric displacement stage, a tunable light source and a polarization scrambler connected to the end of the optical fiber array away from the end of the optical fiber, and an optical power meter and a photodetector for coupling connected to the output end of the polarization scrambler.

[0032] This utility model provides a silicon photonics wafer testing device, including a camera assembly; a deflection optical path assembly; a probe station for supporting the silicon photonics wafer; an optical fiber coupling module; and a driving assembly. The driving assembly drives the probe station and the deflection optical path assembly to switch between moving within the imaging field of view of the camera assembly. When the driving assembly drives the deflection optical path assembly to be within the imaging field of view of the camera assembly, the fiber optic end and the camera of the camera assembly are respectively located on the optical path of the deflection optical path assembly. The camera assembly acquires images corresponding to the lateral views of at least two directions of the fiber optic end through the deflection optical path assembly. The end connection structure is used to clamp the optical fiber coupling module at the fiber optic end, and is used to drive the fiber optic end to translate in a first direction, a second direction, and a third direction, and to drive the fiber optic end to rotate around a first rotation axis, a second rotation axis, and a third rotation axis, respectively. The first direction is parallel to the first rotation axis, the second direction is parallel to the second rotation axis, and the third direction is parallel to the third rotation axis, and the first direction, second direction, and third direction are perpendicular to each other.

[0033] The testing equipment of this application is equipped with a deflection optical path component and a driving component. The driving component drives the deflection optical path component and the probe station to move, thereby switching between their positions within the imaging field of view of the camera component. When the camera component needs to capture images of the silicon photonic wafer, the silicon photonic wafer can be driven into the imaging field of view of the camera, thereby determining the extension direction of the dicing on the silicon photonic wafer. When the end face of the fiber optic cable needs to be adjusted to be horizontal, the deflection optical path component can be moved into the imaging field of view of the camera component. The deflection optical path component alone can transmit the lateral images of the fiber optic cable end from two different directions to the camera component, thereby allowing the camera to capture images in the lateral directions on both sides of the fiber optic cable end, thereby determining the tilt angle of the end face of the fiber optic cable end relative to the horizontal plane. Combining this tilt angle with the extension direction of the dicing on the silicon photonic wafer, the fiber optic coupling module drives the movement of the fiber optic cable end in six different degrees of freedom, and the fiber optic cable end performs corresponding pose adjustments, so that the port of the fiber optic cable end and the optical interface of the optical waveguide achieve preliminary alignment coupling, providing support for further precise alignment coupling between the two.

[0034] Therefore, this application can acquire images of different angles at the end of the optical fiber using only a deflection optical path component, without the need for too many cameras, thus simplifying the structure of the test equipment. Furthermore, this application utilizes an optical fiber coupling module to achieve adjustment of six different degrees of freedom at the end of the optical fiber, providing reliable support for the precise alignment and coupling of the port at the end of the optical fiber and the optical interface of the optical waveguide, reducing the difficulty of adjusting the alignment and coupling between the optical fiber port and the optical interface of the optical waveguide. Attached Figure Description

[0035] To more clearly illustrate the technical solutions of the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the overall structure of the silicon photonics wafer testing equipment provided in the embodiments of this application;

[0037] Figure 2 This is a partial structural schematic diagram of the silicon photonics wafer testing equipment provided in the embodiments of this application;

[0038] Figure 3 This is a schematic diagram of the structure of a silicon photonics wafer;

[0039] Figure 4 This is a schematic diagram of the fiber end structure of an optical fiber array;

[0040] Figure 5 This is a schematic diagram of the deflection optical path component in the silicon photonics wafer testing equipment provided in the embodiments of this application;

[0041] Figure 6 This is a partial optical path structure diagram of the deflection optical path component provided in the embodiments of this application;

[0042] Figure 7 This is a schematic diagram of the structure of the optical fiber coupling module provided in the embodiment of this application. Detailed Implementation

[0043] The core of this invention is to provide a silicon photonic wafer testing device that reduces the operational difficulty of the alignment coupling process between the port at the end of the optical fiber and the optical interface of the silicon photonic waveguide, simplifies the overall device structure, and reduces the device cost.

[0044] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] like Figures 1 to 7 As shown, Figure 1 This is a schematic diagram of the overall structure of the silicon photonics wafer testing equipment provided in the embodiments of this application; Figure 2 This is a partial structural schematic diagram of the silicon photonics wafer testing equipment provided in the embodiments of this application; Figure 3 This is a schematic diagram of the structure of a silicon photonics wafer; Figure 4 This is a schematic diagram of the fiber end structure of an optical fiber array; Figure 5 This is a schematic diagram of the deflection optical path component in the silicon photonics wafer testing equipment provided in the embodiments of this application; Figure 6 This is a partial optical path structure diagram of the deflection optical path component provided in the embodiments of this application; Figure 7 This is a schematic diagram of the structure of the optical fiber coupling module provided in the embodiment of this application.

[0046] To facilitate understanding of the technical solution of this application, firstly, in conjunction with... Figure 3 and Figure 4 A brief introduction to the alignment coupling between silicon photonic wafers and fiber arrays is given.

[0047] like Figure 3 As shown, for the silicon photonics wafer 30, a large number of arrayed optical waveguides 31 are formed on its upper surface, and cutting grooves are cut between adjacent rows and adjacent columns of optical waveguides 31 to divide the adjacent optical waveguides 31. The straight area where the cutting groove is located is also called the cutting track 32. It can be seen that the silicon photonics wafer 30 contains cutting tracks 32 in two mutually perpendicular directions.

[0048] like Figure 4 As shown, the fiber end 20 of the fiber array includes several fiber ports 21 that are fixed together in a row on the fixing member 22. As far as the fiber end 20 is concerned, the end face formed by each fiber port 21 and the lower surface of the fixing member as a whole is roughly a rectangular plane.

[0049] During the actual coupling between the fiber array and the optical waveguide 31, when one fiber port 21 of the fiber array is located directly above and exactly opposite an optical waveguide 31, the fiber array achieves approximate alignment coupling with the optical waveguide 31. Furthermore, when the fiber ports 21 of the fiber array and the optical waveguide 31 are aligned, the vertical plane in which the fiber ports 21 are arranged should be parallel to the cleavage 32 in one direction on the silicon photonics wafer 30.

[0050] Based on the above discussion, and referring to... Figure 1 and Figure 2 In one specific embodiment of this application, the testing equipment 10 of the silicon photonics wafer 30 may include:

[0051] Camera assembly 15; deflecting optical path assembly 12; probe station 11 for supporting silicon photonic wafer 30; fiber optic coupling module 14; and drive assembly 13;

[0052] Among them, the driving component 13 is used to drive the probe station 11 and the deflection optical path component 12 to switch between moving into the imaging field of view of the camera component 15.

[0053] When the driving component 13 drives the deflection optical path component 12 to be within the imaging field of view of the camera component 15, the fiber end 20 and the camera of the camera component 15 are respectively located on the optical path of the deflection optical path component 12. The deflection optical path component 12 is used to deflect and transmit at least two different lateral images on the fiber end to the camera component 15, so that the camera component 12 can acquire images corresponding to at least two lateral images on the fiber end 20 through the deflection optical path component 12.

[0054] The end connection structure is used to clamp the fiber coupling module 14 of the fiber end 20, and to drive the fiber end 20 to translate in a first direction, a second direction and a third direction, and to drive the fiber end 20 to rotate around a first rotation axis, a second rotation axis and a third rotation axis respectively; wherein, the first direction is parallel to the first rotation axis, the second direction is parallel to the second rotation axis, the third direction is parallel to the third rotation axis, and the first direction, the second direction and the third direction are perpendicular to each other.

[0055] It is understood that in the actual testing process of the test equipment 10 in this embodiment, the silicon photonic wafer 30 is placed on the probe station 11, and the fiber port 21 of the fiber end 20 of the fiber array is vertically downward and directly facing the optical interface of the optical waveguide.

[0056] Furthermore, in this embodiment, the camera of the camera assembly 15 can be a multi-magnification fixed-magnification lens. In order to facilitate the marking of the orientation of the image captured by the camera assembly 15, a crosshair formed by the intersection of two mutually perpendicular straight lines is provided in the middle area of ​​the lens of the camera in the camera assembly 15. The two straight lines that make up the crosshair represent, to a certain extent, the directions of the two coordinate axes of the camera assembly 15's own Cartesian coordinate system.

[0057] Additionally, refer to Figure 2 ,exist Figure 2 In the illustrated embodiment, the deflection optical path component 12 can be disposed on the side of the probe station 11 and fixedly connected to the probe station 11, while the probe station 11 is disposed on the drive component 13. In addition, the drive component 13 includes two mutually perpendicular slide rails, so that the drive component 13 can drive the probe station 11 and the deflection optical path component 12 to translate along two mutually perpendicular directions, that is, it can drive and adjust the position of the probe station 11 and the deflection optical path component 12 in the horizontal plane, thereby realizing that one of the probe station 11 and the deflection optical path component 12 is located directly below the camera in the camera component 15, that is, within the field of view of the camera.

[0058] In practical applications, the driving component 13 can first drive the probe station 11 to move directly below the camera of the camera component 15, so that the upper surface of the silicon photonic wafer 30 enters the field of view of the camera. Based on the wafer image captured by the camera, the camera of the camera component 15 is rotated and adjusted with its optical axis as the center, so that the cursor in the lens of the camera is adjusted to be parallel to the dicing track 32 of the silicon photonic wafer 30, that is, the two straight lines of the crosshair are parallel to the dicing track 32 in two different directions respectively. This adjustment is equivalent to realizing the alignment and parallelism between the coordinate axis direction of the camera component 15 and the dicing track 32 on the silicon photonic wafer 30.

[0059] Furthermore, after adjusting the crosshair of the camera to be parallel to the dicing marks on the silicon photonics wafer 30, the driving assembly 13 can move the deflecting optical path assembly 12 into the imaging field of view of the camera. The deflecting optical path assembly 12 includes at least a first reflective element 121 and a second reflective element 122, and the reflective surfaces of the first reflective element 121 and the second reflective element 122 can be perpendicular to each other and both form a 45-degree angle with the horizontal plane; when the driving assembly 13 moves the deflecting optical path assembly 12 into the imaging field of view of the camera, the first reflective element 121, the second reflective element 122, and the optical fiber end 20 should be arranged in a right-angled triangle; and the height of the end face of the optical fiber end 20 should be approximately the same as the height of the middle area of ​​the first reflective element 121 and the second reflective element 122; ensuring that the side view of the optical fiber end 20 can be deflected by 90 degrees by the first reflective element 121 and the second reflective element 122 and then incident vertically into the camera.

[0060] Based on this, the camera in the camera assembly 15 can be moved horizontally above the first reflective element 121, the second reflective element 122, and the optical fiber end 20. When the camera is directly above the first reflective element 121, the first side view of the optical fiber end 20 can be reflected to the camera through the first reflective element 121, allowing the camera to capture the first side image of the optical fiber end 20. This first side image is equivalent to the image formed by the optical fiber end 20 when the camera is positioned at the first reflective element 121 along a first horizontal direction pointing towards the optical fiber end 20. Similarly, when the camera moves directly above the second reflective element 122, it can also capture the second side image of the optical fiber end 20. This second side image is equivalent to the image formed by the optical fiber end 20 when the camera is positioned at the second reflective element 122 along a second horizontal direction pointing towards the optical fiber end 20. Furthermore, the first and second horizontal directions are perpendicular to each other. Based on the principles of geometric optics, when the end face of the fiber optic end 20 is not parallel to the horizontal plane, the angle between the end face of the fiber optic end 20 and the second horizontal direction can be determined through the first lateral image, while the angle between the end face of the fiber optic end 20 and the first horizontal direction can be determined through the second lateral image. Therefore, the fiber optic coupling module 14 can modulate the end face of the fiber optic end 20 to the horizontal plane based on these two angles.

[0061] It is understandable that, under sufficiently bright ambient light, a clear image of the end face contour of the fiber optic end 20 can be captured simply by reflecting the lateral image of the fiber optic end 20 to the camera using only the first reflective element 121 and the second reflective element 122. However, considering that the test equipment 10 has a relatively large and complex structure, resulting in relatively dim ambient light at the location of the fiber optic end 20, in order to ensure a clearer image of the end face contour of the fiber optic end 20 in both the first and second lateral images, in an optional embodiment of this application, a light source assembly 16 may be further included to output a light beam at the location of the fiber optic end 20. The light source assembly 16 is mounted on the support stage 120 of the deflecting optical path assembly 12. In this embodiment, the light source assembly 16 illuminates the fiber optic end 20, thereby ensuring the clarity of the image of the end face contour of the fiber optic end 20.

[0062] Further, optionally, in this embodiment, the deflecting optical path assembly 12 may include a support stage 120 connected to the probe stage, and a first reflective element 121 and a second reflective element 122 disposed on the support stage 120 with their reflective surfaces forming a 45-degree angle with the horizontal plane.

[0063] The light source assembly 16 includes a first light source assembly 161 and a second light source assembly 162 disposed on the support stage 120;

[0064] When the driving component 13 drives the deflection optical path component 12 to a set position below the camera component 15, the first reflective element 121 and the first light source component 161 are located on opposite sides of the optical fiber end 20 along the first horizontal direction, and the second reflective element 122 and the first light source component 161 are located on opposite sides of the optical fiber end 20 along the second horizontal direction; wherein, the first horizontal direction and the second horizontal direction are perpendicular to each other.

[0065] exist Figure 5 and Figure 6 In the illustrated embodiment, the first light source assembly 161 is used to output a light beam to the first reflective element 121 along a first horizontal direction, and the first reflective element 121 is used to reflect the incident light beam in a vertically upward direction; the second light source assembly 162 is used to output a light beam to the second reflective element 122 along a second horizontal direction, and the second reflective element 122 is used to reflect the incident light beam in a vertically upward direction; and the optical path between the first light source assembly 161 and the first reflective element 121 intersects with the optical path between the second light source assembly 162 and the second reflective element 122 in a predetermined intersection area; the first reflective element 121 and the second reflective element 122 both form a 45° angle with the horizontal plane; when the deflection optical path assembly 12 moves to below the camera assembly 15 through the driving assembly 13, the fiber end 20 is located in the predetermined intersection area.

[0066] When the camera moves to directly above the first reflective element 121, the first light source assembly 161 can output a light beam to the first reflective element 121 along the first horizontal direction. The light beam incident on the first reflective element 121 is deflected by 90 degrees and then vertically upwards into the camera. At this time, the image captured by the camera is the first side image.

[0067] Because the fiber end 20 of the fiber array is located between the first light source component 161 and the first reflective element 121, it will inevitably partially block the light output by the first light source component 161, thereby making the outline of the fiber end 20 appear in the first lateral image captured by the camera; and the outline of the fiber end 20 shown in the first lateral image is equivalent to the outline shown when viewing the fiber end 20 along the first horizontal direction. Obviously, based on the image shown in the first lateral image, the angle between the end face of the fiber end 20 and the second horizontal direction can be determined, and this angle is set as the first angle; based on this, the fiber end 20 is controlled to rotate around a rotation axis parallel to the first horizontal direction by the fiber coupling module 14, and the rotation angle is equal to the first angle. Obviously, after rotation, the end face of the fiber end 20 is parallel to the second horizontal direction.

[0068] Similarly, when the camera moves directly above the second reflective element 122, the second light source assembly 162 can output a light beam to the second reflective element 122 along the second horizontal direction. The light beam incident on the second reflective element 122 also undergoes a 90-degree deflection and is incident on the camera, so that the camera can acquire a second side image. Similar to the first side image mentioned above, the outline of the fiber end 20 shown in the second side image in this embodiment is equivalent to the outline shown when viewing the fiber end 20 along the second horizontal direction. That is, based on the second side image, the second included angle between the end face of the fiber end 20 and the first horizontal direction can be determined. By controlling the fiber end 20 to rotate at the second included angle with a rotation axis parallel to the second horizontal direction through the fiber coupling module 14, the end face of the fiber end 20 and the first horizontal direction can be made parallel to each other.

[0069] Furthermore, to reduce the difficulty of determining the first angle between the end face of the fiber optic end 20 and the second horizontal direction, and to reduce the difficulty of determining the second angle between the end face of the fiber optic end 20 and the first horizontal direction, a first marking line can be further provided on the first reflective element 121, which is parallel to the second horizontal direction. Thus, in the first lateral image captured by the camera, the direction in which the first marking line is imaged also represents the first horizontal direction, and the first angle can be determined directly based on the angle between the end face contour line of the fiber optic end 20 and the first marking line. Similarly, a second marking line 1221 parallel to the first horizontal direction is also provided on the second reflective element 122.

[0070] Furthermore, to ensure that the first and second marker lines 1221 can be clearly imaged in the first and second lateral images, respectively, the heights of the first and second marker lines 1221 on the first reflective element 121 and the second reflective element 122, respectively, are lower than the end face height of the optical fiber end. This allows the light output from the first light source assembly 161 to illuminate the area containing the first marker line on the first reflective element 121, thereby ensuring that the first marker line can be clearly captured. Similarly, the light output from the second light source assembly 162 can also illuminate the area containing the second marker line 1221. Moreover, the first and second marker lines 1221 can be made of black or other line films with poor reflectivity.

[0071] Based on the above discussion, the first light source component 161 and the second light source component 162 in this embodiment can be surface light sources, and the light beams output by the first light source component 161 and the second light source component 162 are both parallel light beams, thereby ensuring that the light beams output by the first light source component 161 and the second light source component 162 can more clearly illuminate the outline of the fiber end 20.

[0072] Furthermore, referring to Figure 6In another optional embodiment of this example, the deflecting optical path component 12 may further include:

[0073] The first light source assembly 161 includes a first surface light source 1611 and a third reflective element 1612; the second light source assembly 162 includes a second surface light source and a fourth reflective element; and the first reflective element 121, the second reflective element 122, the third emitting element and the fourth reflective element are all right-angled triangular prisms, and a reflective film layer is provided on the inclined reflective surface of the right-angled triangular prism.

[0074] The oblique reflective surface of the third reflective element 1612 is located on the output light path of the first surface light source 1611. It is used to reflect the light beam output by the first surface light source 1611 along the first horizontal direction through the set intersection area and incident on the first reflective element 121, so that the first reflective element 121 reflects the light carrying the lateral contour information of the fiber end 20.

[0075] The oblique reflective surface of the fourth reflective element is located in the output optical path of the second light source, and is used to reflect the light beam output by the second light source along the second horizontal direction through the set intersection area and into the second reflective element 122, so that the second reflective element 122 reflects the light carrying the lateral contour information of the fiber end 20.

[0076] exist Figure 6 The diagram shows the optical path structure between the first light source 1611 and the first reflective element 121. In addition to the first light source 1611, the first light source 1611 structure further includes a third reflective element 1612 in the output optical path of the first light source 1611. Therefore, in this embodiment, in order for the beam of light output vertically upward from the first light source 1611 to first be perpendicularly incident on the vertical plane of the right-angle side of the third reflective element 1612, and then deflected by 90 degrees by the inclined reflective surface in the third reflective element 1612, and then incident on the first reflective element 121 along the first horizontal direction, the optical path structure composed of the first light source 1611 and the third reflective element 1612 can finally output a beam of light to the first reflective element 121 along the first horizontal direction.

[0077] In practical applications, the first surface light source 1611 can be a surface light source or a light source that outputs a diverging beam. In this case, optical elements such as convex lenses can be further added to the first light source assembly 161 to modulate the diverging beam, so that the first light source assembly 161 outputs a parallel beam.

[0078] Based on the above discussion, when the end face of the fiber array is parallel to both the first horizontal direction and the second horizontal direction, it is clear that the end face of the fiber array is also in the horizontal plane.

[0079] In addition, in order to ensure that the fiber end 20 can be located in the above-mentioned set area so as to achieve the horizontal modulation of the end face of the fiber end 20, a height probe structure 147 is also provided on the end connection structure of the fiber coupling module 14 for connecting the fiber end 20.

[0080] Correspondingly, a calibration base plate 123 is also provided on the support platform 120;

[0081] When the driving component 13 drives the deflection optical path component to move to a distance within a set height range between the lower surface of the height detection structure 147 and the upper surface of the calibration substrate 123, the fiber end 20 is located in the set intersection area.

[0082] In this embodiment, the height probe structure 147 and the calibration substrate 123 are used as mutual identifiers. The height gap between the two ensures that the fiber end 20 is exactly located in the above-mentioned set intersection area, thereby reducing the difficulty of adjusting the drive deflection component 12 to adjust the fiber end 20 to be located in the set intersection area.

[0083] In another optional implementation of this embodiment, the height detection structure 147 can also be a nanocapacitive displacement sensor, which can further detect the vertical distance between the end connection structure that clamps and connects the end of the optical fiber 20 and other structural components below it during the subsequent position adjustment of the optical fiber end 20, thereby avoiding collisions between the optical fiber end 20 and other structural components.

[0084] After adjusting the end face of the fiber optic end 20 to be horizontal, a vertical image can be further captured vertically downwards from above the fiber optic end 20 using a camera. Obviously, the third angle between the vertical plane where the side wall of the fiber optic end 20 is located and the crosshair in the camera can be displayed in the vertical image. By controlling the fiber optic coupling module 14 to rotate the fiber optic end 20 around the vertical rotation axis at the third angle, the fiber optic end 20 can be adjusted to a state where the outline and the crosshair of the camera are aligned with each other.

[0085] As mentioned earlier, the dicing 32 of the silicon photonic wafer 30 has been adjusted to be parallel to the crosshair in the camera. Thus, when the driving component 13 drives the probe station 11 back to below the camera, the fiber end 20 located below the camera and the silicon photonic wafer 30 are simultaneously positioned so that the outline of the fiber end 20 and the silicon photonic wafer 30 are parallel to each other, thus achieving the initial positioning between the fiber end 20 and the silicon photonic wafer 30.

[0086] Furthermore, the camera in the camera system of this application can be a multi-magnification fixed-magnification lens.

[0087] Based on any of the above embodiments, refer to Figure 7In this application, the fiber coupling module 14 that enables spatial position adjustment of the fiber end 20 may specifically include:

[0088] The first translation component 141, the second translation component 142, the third translation component 143, the first rotation component 144, the second rotation component 145, and the third rotation component 146 are connected in sequence; the end connection structure of the fiber optic coupling module 14 is connected to the third rotation component 146.

[0089] The first translation component 141 is used to drive the second translation component 142, the third translation component 143, the first rotation component 144, the second rotation component 145, the third rotation component 146, and the end connection structure to translate synchronously along the first direction.

[0090] The second translation component 142 is used to drive the third translation component 143, the first rotation component 144, the second rotation component 145, the third rotation component 146, and the end connection structure to translate synchronously along the second direction.

[0091] The third translation component 143 is used to drive the first rotation component 144, the second rotation component 145, the third rotation component 146, and the end connection structure to translate synchronously along the third direction.

[0092] The first rotating component 144 is used to drive the second rotating component 145 and the third rotating component and the end connection structure to rotate synchronously around the first rotating axis as the rotation center.

[0093] The second rotating component 145 is used to drive the third rotating component 146 and the end connection structure to rotate synchronously with the second rotating axis as the rotation center.

[0094] The third rotating component 146 is used to drive the end connection structure to rotate around the third rotating axis as the rotation center;

[0095] Among them, the first direction, the second direction, and the third direction are perpendicular to each other; the first direction and the first rotation axis, the second direction and the second rotation axis, and the third direction and the third rotation axis are parallel to each other;

[0096] Furthermore, the first direction and the first horizontal direction are parallel to each other; the second direction and the second horizontal direction are parallel to each other.

[0097] The fiber coupling module 14 in this application can realize the movement of the fiber end 20 in six different degrees of freedom, that is, it can translate along the first direction, the second direction, and the third direction, and rotate around the first rotation axis, the second rotation axis, and the third rotation axis, respectively.

[0098] In this embodiment, the first translation component 141, the second translation component 142, the third translation component 143, the first rotation component 144, the second rotation component 145, and the third rotation component 146 in the fiber optic coupling module 14 only need to achieve driving operation in one degree of freedom direction. This helps to ensure the motion control accuracy of the drive fiber end 20 in each degree of freedom direction. Moreover, the entire fiber optic coupling module 14 only needs to be spliced ​​together by connecting the above six components in series. There is no need for an overly complex mechanical structure, which reduces the structural assembly difficulty of the fiber optic coupling module 14 and helps to reduce the practical cost of the equipment.

[0099] As shown above, using the fiber coupling module 14 to move the fiber end 20 only achieves preliminary alignment between the fiber end 20 and the optical waveguide 31 on the silicon photonics wafer 30. Therefore, the end of the fiber coupling module 14 in this application can be further equipped with a piezoelectric displacement stage 4, an optical power meter, and a nanocapacitive displacement sensor. The fiber end 20 of the fiber array and the nanocapacitive displacement sensor are fixedly connected to the fiber coupling module 14 via the piezoelectric displacement stage 4, while the optical power meter is connected to the fiber port 21 of the fiber end 20.

[0100] In this embodiment, the piezoelectric displacement stage 4 is specifically a driving device containing piezoelectric ceramics. As the voltage of the piezoelectric displacement stage 4 changes, the piezoelectric ceramics in the piezoelectric displacement stage 4 can drive the fine-tuning of the position of the fiber end 20. During this process, light waves can be input into the fiber array. The light waves are transmitted from the port of the fiber end 20 to the optical interface of the optical waveguide 31. After the light waves are transmitted in the optical waveguide 31, they can be retransmitted to the fiber port 21 and received by the optical power meter. Based on this, when the fiber port 21 of the fiber array and the optical interface of the optical waveguide 31 are exactly aligned, the power of the light waves retransmitted through the optical waveguide 31 is greater. Therefore, as the piezoelectric displacement stage 4 moves with the fine-tuning of the fiber end 20, the power of the light waves measured by the optical power meter also changes. When the power measured by the optical power meter is the maximum, that is, when the alignment coupling between the fiber port 21 of the fiber array and the optical interface of the optical waveguide 31 is the best, fine alignment coupling between the fiber array and the optical waveguide 31 can be achieved.

[0101] In addition, to avoid the distance between the fiber end 20 and the silicon photonic wafer 30 being too close, a nanocapacitive displacement sensor is used to detect the relative position between the fiber end 20 and the silicon photonic wafer 30 below it, so as to avoid the fiber end 20 being too low and causing damage to the silicon photonic wafer 30.

[0102] In summary, the testing equipment of this application is equipped with a deflection optical path component and a driving component. The driving component drives the deflection optical path component and the probe station to move, thereby switching between being located within the imaging field of view of the camera component. When the camera needs to capture images on the silicon photonic wafer, the silicon photonic wafer can be driven into the imaging field of view of the camera, thereby determining the extension direction of the dicing on the silicon photonic wafer. When the end face of the fiber needs to be adjusted to be horizontal, the deflection optical path component can be moved into the imaging field of view of the camera component. The deflection optical path component alone can transmit the lateral images of the fiber end in two different directions to the camera, thereby allowing the camera to capture images in the lateral directions on both sides of the fiber end, thereby determining the tilt angle of the end face of the fiber end relative to the horizontal plane. Combining this tilt angle with the extension direction of the dicing on the silicon photonic wafer, the fiber coupling module drives the movement of the fiber end in six different degrees of freedom, and the fiber end performs corresponding pose adjustments, so that the port of the fiber end and the optical interface of the optical waveguide achieve preliminary alignment coupling, providing support for further precise alignment coupling between the two.

[0103] Therefore, this application can acquire images from different angles at the end of the optical fiber using only an optical fiber coupling module, without the need for too many cameras, thus simplifying the structure of the test equipment. Furthermore, this application utilizes an optical fiber coupling module to achieve adjustment of six different degrees of freedom at the end of the optical fiber, providing reliable support for precise alignment and coupling between the port at the end of the optical fiber and the optical interface of the optical waveguide, reducing the difficulty of adjusting the alignment and coupling between the optical fiber port and the optical interface of the optical waveguide.

[0104] This application also provides an embodiment of a testing system for silicon photonics wafers, which may include the silicon photonics wafer testing equipment and optical performance testing machine as described in any of the preceding claims;

[0105] The optical performance tester includes a motion controller that communicates with the fiber optic coupling module and the piezoelectric displacement stage, a tunable light source and a polarization scrambler that are connected to the end of the fiber array away from the fiber end (i.e. the end that is aligned and coupled with the optical waveguide of the silicon photonic wafer), and an optical power meter and a photodetector for coupling that are connected to the output end of the polarization scrambler.

[0106] In practical applications, the motion controller first controls the fiber coupling module to drive the attitude adjustment of the fiber end, achieving initial alignment between the fiber end and the optical waveguide on the silicon photonic wafer. Then, a tunable light source outputs light waves to the fiber in the fiber array. These light waves are transmitted through the fiber end to the optical waveguide on the silicon photonic wafer, and the light waves transmitted back from the silicon photonic wafer are received. These light waves are then transmitted along the fiber in the fiber array to the polarization scrambler, and split into two light waves by the polarization scrambler, which are transmitted to the coupling photodetector and the optical power meter, respectively. The coupling photodetector converts the received light signal into a voltage signal, which is then used by the motion controller to control the piezoelectric displacement stage to finely adjust the position of the fiber end. The position point corresponding to the fiber end when the voltage signal is at its maximum is taken as the optimal alignment and coupling position point between the fiber end and the optical waveguide on the silicon photonic wafer.

[0107] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that the elements inherent in a process, method, article, or apparatus that includes a list of elements are included. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. Additionally, portions of the technical solutions provided in the embodiments of this application that are consistent with the implementation principles of corresponding technical solutions in the prior art have not been described in detail to avoid excessive elaboration.

[0108] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A silicon photonics wafer testing device, characterized in that, Includes camera components; deflection optical path components; probe stations for supporting silicon photonic wafers; fiber optic coupling modules; and drive components; The driving component is used to drive the probe station and the deflection optical path component to switch between moving into the imaging field of view of the camera component; When the driving component drives the deflection optical path component to be within the imaging field of view of the camera component, the fiber end and the camera of the camera component are respectively located in the optical path of the deflection optical path component, and the camera component acquires images corresponding to the side views of at least two directions of the fiber end through the deflection optical path component. The end connection structure is used to clamp the fiber coupling module at the end of the optical fiber, and to drive the end of the optical fiber to translate in a first direction, a second direction, and a third direction, and to drive the end of the optical fiber to rotate around a first rotation axis, a second rotation axis, and a third rotation axis, respectively; wherein the first direction is parallel to the first rotation axis, the second direction is parallel to the second rotation axis, the third direction is parallel to the third rotation axis, and the first direction, the second direction, and the third direction are perpendicular to each other.

2. The silicon photonics wafer testing equipment as described in claim 1, characterized in that, It also includes a light source assembly for outputting a light beam at the location of the end of the optical fiber; wherein the light source assembly is disposed on the support platform of the deflecting optical path assembly.

3. The silicon photonics wafer testing equipment as described in claim 2, characterized in that, The deflecting optical path assembly includes a support platform connected to the probe station, and a first reflective element and a second reflective element disposed on the support platform; The light source assembly includes a first light source assembly and a second light source assembly disposed on the support platform; When the driving component drives the deflection optical path component to a set position below the camera component, the first reflective element and the first light source component are located on opposite sides of the end of the optical fiber along a first horizontal direction, and the second reflective element and the first light source component are located on opposite sides of the end of the optical fiber along a second horizontal direction; wherein the first horizontal direction and the second horizontal direction are perpendicular to each other.

4. The silicon photonics wafer testing equipment as described in claim 3, characterized in that, The first reflective element is provided with a first marking line that is parallel to the second horizontal direction; the second reflective element is provided with a second marking line that is parallel to the first horizontal direction.

5. The silicon photonics wafer testing equipment as described in claim 4, characterized in that, The heights of the first marking line and the second marking line on the first reflective element and the second reflective element, respectively, are lower than the end face height of the optical fiber end.

6. The silicon photonics wafer testing equipment as described in claim 3, characterized in that, The first light source assembly includes a first surface light source and a third reflective element; the second light source assembly includes a second surface light source and a fourth reflective element; Furthermore, the first reflective element, the second reflective element, the third emitting element, and the fourth reflective element are all right-angled triangular prisms, and a reflective film layer is provided on the inclined reflective surface of the right-angled triangular prism; The oblique reflective surface of the third reflective element is located in the output light path of the first surface light source, and is used to reflect the light beam output by the first surface light source along the first horizontal direction through the set intersection area and incident on the first reflective element, so that the first reflective element reflects the light carrying the lateral contour information of the end of the optical fiber. The oblique reflective surface of the fourth reflective element is located in the output light path of the second light source, and is used to reflect the light beam output by the second surface light source along the second horizontal direction through the set intersection area and incident on the second reflective element, so that the second reflective element reflects the light carrying the lateral contour information of the end of the optical fiber.

7. The silicon photonics wafer testing equipment as described in claim 6, characterized in that, The fiber optic coupling module is equipped with a height probe structure on the end connection structure for connecting the ends of the fiber optic cable. Accordingly, a calibration substrate is also provided on the support platform corresponding to the designated intersection area; When the driving component drives the deflection optical path component to move to a distance within a set height range between the lower surface of the height probe structure and the upper surface of the calibration substrate, the end of the optical fiber is located in the set intersection area.

8. The silicon photonics wafer testing equipment as described in claim 7, characterized in that, The height detection structure is a nanocapacitive displacement sensor.

9. The silicon photonics wafer testing equipment as described in any one of claims 1 to 8, characterized in that, The fiber optic coupling module includes a first translation component, a second translation component, a third translation component, a first rotation component, a second rotation component, and a third rotation component connected in sequence; the end connection structure of the fiber optic coupling module is connected to the third rotation component; Wherein, the first translation component is used to drive the second translation component, the third translation component, the first rotation component, the second rotation component, the third rotation component, and the end connection structure to translate synchronously along the first direction; The second translation component is used to drive the third translation component, the first rotation component, the second rotation component, the third rotation component, and the end connection structure to translate synchronously along the second direction; The third translation component is used to drive the first rotation component, the second rotation component, the third rotation component, and the end connection structure to translate synchronously along the third direction. The first rotating component is used to drive the second rotating component, the third rotating component, and the end connection structure to rotate synchronously around the first rotating axis as the rotation center; The second rotating component is used to drive the third rotating component and the end connection structure to rotate synchronously around the second rotating axis as the rotation center; The third rotating component is used to drive the end connection structure to rotate around the third rotating axis as the rotation center.

10. The silicon photonics wafer testing equipment as described in claim 9, characterized in that, The end connection structure of the optical fiber coupling module is also equipped with a piezoelectric displacement stage.

11. A silicon photonics wafer testing system, characterized in that, Includes a silicon photonics wafer testing device as described in any one of claims 1 to 10; and an optical performance testing machine connected to the silicon photonics wafer testing device; The optical performance testing machine includes a motion controller that is communicatively connected to the optical fiber coupling module and the piezoelectric displacement stage, a tunable light source and a polarization scrambler connected to one end of the optical fiber array away from the end of the optical fiber, and an optical power meter and a photodetector for coupling connected to the output end of the polarization scrambler.

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