Detection device of wafer holder

Abstract

The utility model discloses a detection device for a wafer holder, and the device comprises a supporting part which is used for bearing the wafer holder; the detection assembly is rotationally arranged on the supporting piece, the detection assembly comprises a transmitting piece and a receiving piece, and an included angle is formed between the transmitting piece and the receiving piece; wherein the emitting part is used for emitting light, and the light is received by the receiving part after being reflected by the wafer holder so as to detect the wafer holder. According to the utility model, the problem of difficulty in observation caused by small defects / bulges / foreign matters can be improved, the detection accuracy is improved, and the risk of wafer damage is reduced at the same time.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor integrated circuit technology, and in particular to a detection device for a wafer holder. Background Technology

[0002] The final stage of wafer back-side processing is usually back-side metallization, which currently uses two methods: magnetron sputtering and evaporation. The main principle of evaporation is that an electron beam is accelerated under high pressure, deflected by a strong magnetic field, and strikes the target material, heating the evaporation source, and the heating range can be limited to the surface of the evaporation source.

[0003] Before the operation of the vapor deposition machine, the wafer loading process involves manually placing the wafer into the wafer holder, and then placing the wafer holder and the wafer onto the planetary carrier. However, with the increase in the number of uses, a metal coating will be generated on the wafer holder. During the operation, metal will fall off and fall into the wafer placement area, which also poses a great risk of causing the wafer to break or be chipped.

[0004] In existing technologies, wafer holders are inspected, and in actual production processes, inspection, cleaning, and rinsing are all done manually. As production volume increases, manual inspection still has significant omissions, and small bumps / defects / lost metal are not easily detected, increasing the risk of wafer damage.

[0005] Therefore, it is necessary to provide a new detection device for wafer holders to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0006] The purpose of this invention is to provide a detection device for wafer holders, which can improve the problem of difficulty in observation due to small defects / bulges / foreign objects, improve the accuracy of detection, and reduce the risk of wafer damage.

[0007] To achieve the above objectives, the technical solution of this utility model is as follows:

[0008] A detection device for a wafer holder, comprising:

[0009] Support member for supporting the wafer holder;

[0010] A detection component is rotatably mounted on the support member. The detection component includes a transmitter and a receiver, and the transmitter and receiver have an included angle.

[0011] The transmitter emits light, which is reflected by the wafer holder and received by the receiver to detect the wafer holder.

[0012] By adopting the above technical solution, the wafer holder can be inspected using a testing device after use or between uses. Because a rotatable testing component is provided, the wafer holder can be inspected in a 360° range during the testing process to detect whether there are defects / protrusions / foreign objects inside the wafer holder. This improves the problem of difficulty in observation due to small defects / protrusions / foreign objects, improves the accuracy of testing, and reduces the risk of wafer damage.

[0013] Optionally, the wafer holder 200 includes a housing 210 and a cover 220;

[0014] The support member is provided with a first positioning part to position the housing, so that there is a gap between the housing and the end face of the support member; the transmitter and the receiver are both disposed within the gap to detect the housing.

[0015] Optionally, the first positioning part is an annular positioning groove formed on the support member; the annular positioning groove divides the end face of the support member into an inner region and an outer region; the annular positioning groove is used to place the housing so that there is the interval between the housing and the inner region;

[0016] Both the transmitter and the receiver are rotatably disposed in the internal region to detect the housing.

[0017] Optionally, a plurality of support pillars are provided at intervals around the transmitter and receiver in the inner region to support the cover, so that the cover and the inner region have the interval.

[0018] Optionally, the first positioning part is a circular positioning groove formed in the support member; the positioning groove is used to place the housing so that there is the gap between the housing and the bottom wall of the circular positioning groove;

[0019] Both the transmitter and the receiver are rotatably positioned within the circular positioning groove to detect the housing.

[0020] Optionally, a plurality of support columns are provided at intervals around the transmitter and receiver on the bottom wall of the circular positioning groove to support the cover, so that the cover and the bottom wall of the circular positioning groove have the aforementioned interval.

[0021] Optionally, a receiving groove is formed on the bottom wall of the circular positioning groove; a plurality of support columns are spaced apart on the bottom wall of the receiving groove to support the cover.

[0022] Both the transmitter and the receiver are rotatably mounted on the bottom wall of the receiving groove to detect the cover or the housing.

[0023] Optionally, the angle between the transmitter and the receiver is 0°-90°, and the transmitting end of the transmitter is tilted toward the receiver so that the light emitted by the transmitter is reflected to the receiver.

[0024] Optionally, the length of the receiver is greater than the length of the transmitter.

[0025] Optional, also includes:

[0026] A drive shaft, one end of which passes through the support member and is connected to the transmitter and the receiver, so as to drive the transmitter and the receiver to rotate;

[0027] A driving component is located at the other end of the driving shaft to drive the driving shaft to rotate. Attached Figure Description

[0028] Figure 1 This is a cross-sectional view of a detection device according to an embodiment of the present invention, in which a wafer holder housing is placed.

[0029] Figure 2 This is a cross-sectional view of a detection device according to an embodiment of the present invention, with a cover for a wafer holder placed on it.

[0030] Figure 3 This is a schematic diagram of the structure of a detection device according to an embodiment of the present utility model;

[0031] Figure 4 This is a schematic diagram of another detection device according to an embodiment of the present invention;

[0032] Figure 5 This is a schematic diagram of another detection device according to an embodiment of the present invention.

[0033] Figure label:

[0034] 100, Support component; 110, Circular positioning groove; 111, Internal area; 112, External area; 120, Support column; 130, Circular positioning groove; 140, Receiving groove; 210, Housing; 220, Cover; 300, Detection component; 310, Transmitter; 320, Receiver; 410, Drive shaft; 420, Drive component. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0036] The following is in conjunction with the appendix Figure 1-5 The specific embodiments of this utility model will be further described in detail below.

[0037] An embodiment of this utility model provides a detection device for a wafer holder, comprising:

[0038] Support 100 is used to support the wafer holder;

[0039] The detection component 300 is rotatably mounted on the support member 100. The detection component 300 includes a transmitter 310 and a receiver 320, and there is an included angle between the transmitter 310 and the receiver 320.

[0040] The transmitter 310 emits light, which is reflected by the wafer holder and received by the receiver 320 for detecting the wafer holder.

[0041] In some embodiments, the wafer holder includes a housing 210 and a cover 220. The housing 210 is annular and has an "L"-shaped cross-section along the radial direction, allowing a wafer to be placed inside the housing 210. The cover 220 is circular and is used to close one end of the housing 210. After the wafer is placed in the housing 210, due to the shape limitation of the wafer, the wafer will not completely fit the bottom of the housing 210. Instead, the sidewall of the wafer will fit the middle section of the sidewall of the housing 210, dividing the sidewall of the housing 210 into a first part and a second part. The first part is the portion of the housing 210 from the side that connects to the cover 220 to the point where the housing 210 is divided by the wafer sidewall. The second part is the portion of the housing 210 from the side away from the cover 220 to the point where the housing 210 is divided by the wafer sidewall. In addition, the outer diameter of the cover 220 is smaller than the outer diameter of the housing 210 to facilitate the connection between the cover 220 and the housing 210. In some specific embodiments, the outer diameter of the cover 220 is the same as the inner diameter of the shell 210, or the outer diameter of the cover 220 is smaller than the inner diameter of the shell 210. This is not a limitation, as long as the cover 220 can be connected to the shell 210 to clamp the wafer.

[0042] In some embodiments, the detection device can detect the cover 220 or housing 210 of the wafer holder.

[0043] In some embodiments, during the testing process, the cover 220 or housing 210 of the wafer holder is disposed on the end face of the support 100, that is, the support 100 carries the wafer holder.

[0044] In some embodiments, the detection component 300 can rotate on the support 100, and the detection component 300 and the wafer holder are located on the same side, so that when the detection component 300 rotates to perform detection, it can circle the inner wall of the wafer holder's housing 210 or cover 220, thereby determining whether the wafer holder's housing 210 or cover 220 can continue to be used. The emitting element 310 emits light onto the inner wall of the wafer holder's housing 210 or cover 220. The light is reflected by the inner wall of the wafer holder's housing 210 or cover 220 and received by the receiving element 320. The receiving element 320 converts the optical signal into an electrical signal and outputs it, thereby detecting whether there are defects on the inner wall of the wafer holder's housing 210 or cover 220. In some specific embodiments, the light emitted by the emitting element 310 is X-rays.

[0045] In some embodiments, the transmitter 310 and the receiver 320 may overlap or be at a certain angle. When the transmitter 310 and the receiver 320 overlap, the transmitting end of the transmitter 310 remains parallel to the radial direction of the wafer holder, so that the emitted light can be reflected along the radial direction of the wafer holder and thus received by the receiver. When the transmitter 310 and the receiver 320 are at a certain angle, the transmitting end of the transmitter 310 is tilted toward the receiver 320, and the light emitted by the transmitter 310 is reflected by the inner wall of the housing 210 or the cover 220 of the wafer holder and received by the receiver 320.

[0046] The support member 100 is provided with a first positioning part to position the wafer holder, so that there is a gap between the wafer holder and the end face of the support member 100; the transmitter 310 and the receiver 320 are both provided within the gap to detect the wafer holder.

[0047] In some embodiments, in order to prevent the wafer holder from shifting its position on the support 100, a first positioning part is provided on the support 100. The first positioning part is used to position the wafer holder so that its position does not shift. At the same time, after the first positioning part positions the wafer holder, there is a gap between the end face of the wafer holder and the end face of the support 100. This gap is used to set the detection component 300, thereby facilitating the detection process.

[0048] In some embodiments, the first positioning portion may be protruding and contact the outer wall or interior of the wafer holder housing 210 to position the housing 210. Alternatively, the first positioning portion may contact the outer wall of the wafer holder cover 220 to position the cover 220.

[0049] In some embodiments, the first positioning portion is columnar and is spaced apart circumferentially on the support member 100. In some specific embodiments, the support member 100 is provided with two rings of the first positioning portion, namely an inner ring and an outer ring. When positioning the housing 210 of the wafer holder, the housing 210 is placed between the inner ring and the outer ring to complete the positioning. When positioning the cover 220 of the wafer holder, the cover 220 is placed inside the inner ring to complete the positioning.

[0050] In some embodiments, the first positioning part is an annular positioning groove 110 formed in the support member 100; the annular positioning groove 110 divides the end face of the support member 100 into an inner region 111 and an outer region 112; the annular positioning groove 110 is used to place the housing 210 of the wafer holder so that there is a gap between the housing 210 of the wafer holder and the inner region 111; the transmitter 310 and the receiver 320 are both rotatably disposed in the inner region 111 to detect the housing 210 of the wafer holder.

[0051] In some specific embodiments, the annular positioning groove 110 cuts the end face of the support member 100, and the depth of the annular positioning groove 110 is less than the height of the side wall of the wafer holder housing 210, so that after the wafer holder housing 210 is placed in the annular positioning groove 110, a portion of the wafer holder housing 210 is located outside the annular positioning groove 110. In some more specific embodiments, the first part of the wafer holder housing 210 is inside the annular positioning groove 110, and the second part is outside the annular positioning groove 110, so that the detection component 300 can detect the second part. When the first positioning part is the annular positioning groove 110 opened in the support member 100, both the transmitter 310 and the receiver 320 are rotatably disposed in the inner region 111. During the detection process, the transmitter 310 emits light to the second part, and the light is reflected by the second part and received by the receiver 320, thereby completing the detection.

[0052] In some embodiments, since the diameters of the housing 210 and the cover 220 are different, in order to detect the cover 220, a plurality of support pillars 120 are provided at intervals around the transmitter 310 and the receiver 320 in the inner region 111 to support the cover 220 of the wafer holder, so that the cover 220 of the wafer holder is spaced apart from the inner region 111.

[0053] In some specific embodiments, multiple support columns 120 are arranged in a ring on the support member 100, adapting to the shape of the cover 220, thereby facilitating the positioning of the cover 220. The multiple support columns 120 are evenly distributed on the support member 100. In this embodiment, four support columns 120 are used as an example.

[0054] During the testing process, the support column 120 can support the outer edge of the bottom of the cover 220 and limit the side wall of the cover 220. In actual use, the position of the support column 120 is set according to different usage conditions. In this embodiment, since the internal space of the cover 220 is small, the support column 120 is preferentially selected to support the outer edge of the bottom of the cover 220, thereby increasing the gap between the cover 220 and the end face of the support member 100, which facilitates the testing process. The detection component 300 rotates in the internal region 111, and the emitting element 310 emits light to the inner wall of the cover 220. The light is reflected by the inner wall of the cover 220 and received by the receiving element 320, thus completing the testing.

[0055] In some embodiments, the annular positioning groove 110 has a depth of 2-5 mm and a width of 1-3 mm to facilitate placement of the wafer holder housing 210. In some more specific embodiments, the annular positioning groove 110 has a depth of 3 mm and a width of 2 mm.

[0056] In some embodiments, the support post 120 has a height of 2-5 mm and a width of 2-7 mm to facilitate support of the cover 220 of the wafer holder. In some more specific embodiments, the support post 120 has a height of 4 mm and a width of 4-5 mm.

[0057] In some embodiments, the support column 120 is made of engineering plastic.

[0058] In some embodiments, the first positioning part is a circular positioning groove 130 formed in the support member 100; the positioning groove is used to place the housing 210 of the wafer holder so that there is a gap between the housing 210 of the wafer holder and the bottom wall of the circular positioning groove 130; the transmitter 310 and the receiver 320 are both rotatably disposed in the circular positioning groove 130 to detect the wafer holder.

[0059] The circular positioning groove 130 and the support member 100 are coaxially arranged. When positioning the housing 210 of the wafer holder, the inner wall of the circular positioning groove 130 abuts against the outer wall of the housing 210, thereby achieving the positioning of the housing 210. At the same time, the detection component 300 is disposed within the circular positioning groove 130. More specifically, the transmitter 310 and the receiver 320 are both rotatably disposed on the bottom wall of the circular positioning groove 130. During the detection process, the transmitter 310 and the receiver 320 rotate on the bottom wall of the circular positioning groove 130 to complete the detection of the housing 210 of the wafer holder.

[0060] To facilitate the positioning of the cover 220 of the wafer holder, protrusions or recesses can be provided on the bottom wall of the circular positioning groove 130.

[0061] In some embodiments, a plurality of support pillars 120 are provided at intervals around the transmitter 310 and receiver 320 on the bottom wall of the circular positioning groove 130 to support the cover 220 of the wafer holder, so that the cover 220 of the wafer holder is spaced apart from the bottom wall of the positioning groove.

[0062] Specifically, multiple support columns 120 are evenly spaced on the bottom wall of the circular positioning groove 130. The support columns 120 can position the inner or outer wall of the cover 220 of the wafer holder, and can also support the bottom of the cover 220 of the wafer holder. In order to facilitate the movement of the detection component 300, in this embodiment, the support columns 120 are preferred to support the bottom of the cover 220. At this time, the transmitter 310 and receiver 320 in the detection component 300 are still rotatably disposed on the bottom wall of the circular positioning groove 130. When they rotate, they can detect the cover 220 or the housing 210 of the wafer holder.

[0063] In some embodiments, a receiving groove 140 is provided on the bottom wall of the circular positioning groove 130; a plurality of support columns 120 are provided at intervals on the bottom wall of the receiving groove 140 to support the cover 220 of the wafer holder; the transmitter 310 and the receiver 320 are both rotatably disposed on the bottom wall of the receiving groove 140 to detect the cover 220 or the housing 210 of the wafer holder.

[0064] Specifically, the receiving groove 140 and the circular positioning groove 130 are coaxially arranged, such that the bottom wall of the circular positioning groove 130 is stepped from the side wall of the circular positioning groove 130 to the axis of the circular positioning groove 130. The inner diameter of the receiving groove 140 is slightly larger than the outer diameter of the cover 220, so that the inner wall of the receiving groove 140 has a limiting effect on the cover 220.

[0065] Furthermore, multiple circumferentially distributed support columns 120 or annular support rings can be provided in the receiving groove 140 to support the cover 220, so that there is a gap between the cover 220 and the bottom wall of the receiving groove 140, and the cover 220 will not shift in position under the action of the side wall of the receiving groove 140.

[0066] At this time, the transmitter 310 and receiver 320 in the detection assembly 300 are both rotatably disposed on the bottom wall of the receiving groove 140. The transmitter 310 and receiver 320 rotate to detect the housing 210 or cover 220 of the wafer holder.

[0067] In some embodiments, the transmitter 310 and receiver 320 rotate synchronously during rotation to ensure the stability of light reflection. Specifically, the angle between the transmitter 310 and receiver 320 is 0°-90°, and the emitting end of the transmitter 310 is tilted towards the receiver 320 so that the light emitted by the transmitter 310 is reflected to the receiver 320. The 0°-90° angle between the transmitter 310 and receiver 320 allows the receiver 320 to better receive the reflected light. More specifically, the angle between the transmitter 310 and receiver 320 is 90°.

[0068] In some embodiments, the length of the receiver 320 is greater than the length of the transmitter 310 to increase the receiving range of the receiver 320 and reduce the possibility that the receiver 320 may not be able to receive reflected light. In some specific embodiments, the length ratio of the transmitter 310 to the receiver 320 is 1:1.8. More specifically, the transmitter 310 is 5 cm long and the receiver 320 is 9 cm long.

[0069] In some embodiments, to facilitate the rotation of the transmitter 310 and the receiver 320, the detection device further includes:

[0070] The drive shaft 410 has one end passing through the support member 100 and is connected to the transmitter 310 and the receiver 320 to drive the transmitter 310 and the receiver 320 to rotate;

[0071] A drive element 420 is located at the other end of the drive shaft 410 to drive the drive shaft 410 to rotate.

[0072] The drive shaft 410 passes through the support member 100. Both the transmitter 310 and receiver 320 are fixedly mounted on the end of the drive shaft 410. The fixing method can be either snap-fit ​​or bolt-fit, which is not limited here, as long as the drive shaft 410 can drive the transmitter 310 and receiver 320 to rotate synchronously when rotating. The drive member 420 is located at the other end of the drive shaft 410 and connected to it, used to drive the drive shaft 410 to rotate. The connection between the drive member 420 and the drive shaft 410 can be a direct connection, such as a key connection; or an indirect connection, such as a pulley connection; which is not limited here, as long as the drive member 420 can drive the drive shaft 410 to rotate. In some specific embodiments, the drive member 420 is a motor.

[0073] In some embodiments, the detection component 300 is electrically connected to a console, thereby enabling it to convert optical signals into electrical signals for output. In some specific embodiments, the console can be a computer. This is prior art and will not be described in detail here.

[0074] The implementation principle of the wafer holder detection device in this application embodiment is as follows: After the housing 210 or cover 220 to be used is placed, the detection component 300 rotates 360° under the drive of the drive component 420 and drive shaft 410, and stops after scanning one revolution to analyze the received signal data. Complete scan signals without defects / protrusions / foreign objects are collected on the computer. Each scan result is compared with the normal information spectrum. If it exceeds the normal information spectrum, for example, by 5%, it indicates that there is a defect on the metal surface of the inner wall of the housing 210 or cover 220, randomly triggering an alarm message, requiring replacement of the wafer holder. Before each placement, the wafer holder number is entered, and the number of uses and usage time can be calculated through scanning historical data. This effectively avoids product abnormalities caused by the use of abnormal wafer holders, and by recording data, an effective lifespan is defined, reducing unnecessary cleaning.

[0075] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A detection device for a wafer holder, characterized in that, include: Support member (100) for supporting the wafer holder; A detection component (300) is rotatably mounted on the support member (100). The detection component (300) includes a transmitter (310) and a receiver (320), and there is an angle between the transmitter (310) and the receiver (320). The transmitter (310) emits light, which is reflected by the wafer holder and received by the receiver (320) to detect the wafer holder.

2. The detection device according to claim 1, characterized in that, The wafer holder includes a housing (210) and a cover (220); The support member (100) is provided with a first positioning part to position the housing (210) so that the housing (210) and the end face of the support member (100) are spaced apart; the transmitter (310) and the receiver (320) are both provided within the space to detect the housing (210).

3. The detection device according to claim 2, characterized in that, The first positioning part is an annular positioning groove (110) formed on the support member (100); the annular positioning groove (110) divides the end face of the support member (100) into an inner region (111) and an outer region (112); the annular positioning groove (110) is used to place the housing (210) so that there is the gap between the housing (210) and the inner region (111); Both the transmitter (310) and the receiver (320) are rotatably disposed in the inner region (111) to detect the housing (210).

4. The detection device according to claim 3, characterized in that, A plurality of support columns (120) are provided at intervals around the transmitter (310) and the receiver (320) in the inner region (111) to support the cover (220) so that the cover (220) and the inner region (111) have the interval.

5. The detection device according to claim 2, characterized in that, The first positioning part is a circular positioning groove (130) formed in the support member (100); the positioning groove is used to place the housing (210) so that there is the gap between the housing (210) and the bottom wall of the circular positioning groove (130); Both the transmitter (310) and the receiver (320) are rotatably disposed within the circular positioning groove (130) to detect the housing (210).

6. The detection device according to claim 5, characterized in that, The bottom wall of the circular positioning groove (130) is provided with a plurality of support columns (120) spaced around the transmitter (310) and the receiver (320) to support the cover (220) and to create the aforementioned gap between the cover (220) and the bottom wall of the circular positioning groove (130).

7. The detection device according to claim 5, characterized in that, The bottom wall of the circular positioning groove (130) is provided with a receiving groove (140); a plurality of support columns (120) are provided at intervals on the bottom wall of the receiving groove (140) to support the cover (220); Both the transmitter (310) and the receiver (320) are rotatably mounted on the bottom wall of the receiving groove (140) to detect the cover (220) or the housing (210).

8. The detection device according to any one of claims 1-7, characterized in that, The included angle between the transmitter (310) and the receiver (320) is 0°-90°. The transmitting end of the transmitter (310) is tilted toward the receiver (320) so that the light emitted by the transmitter (310) is reflected to the receiver (320).

9. The detection device according to claim 8, characterized in that, The length of the receiver (320) is greater than the length of the transmitter (310).

10. The detection device according to claim 8, characterized in that, Also includes: A drive shaft (410) extends through the support member (100) at one end and is connected to the transmitter (310) and the receiver (320) to drive the transmitter (310) and the receiver (320) to rotate; A drive element (420) is provided at the other end of the drive shaft (410) to drive the drive shaft (410) to rotate.

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