Push rod capable of achieving nanoscale control
By combining a stepper motor, reducer, and lead screw nut, and utilizing precise pulse control and reduction ratio, the problem of insufficient nanometer-level control accuracy in traditional push rod mechanisms is solved, achieving high-precision push rod displacement control.
Patent Information
- Application Number
- CN202520348265.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-28
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-02-28
AI Technical Summary
Traditional push rod mechanisms cannot meet the precision requirements for nanometer-level micro-motion control and cannot achieve high-precision displacement control.
By employing a combination of stepper motor, reducer, and lead screw nut, and through precise control of pulse signals and reduction ratio, nanometer-level precision control of the push rod is achieved.
It achieves precise displacement control of the push rod mechanism at the nanometer level, meeting the high-precision equipment extension and positioning requirements.
Smart Images
Figure CN223872141U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of push rod mechanism technology, and in particular to a push rod that can achieve nanometer-level control. Background Technology
[0002] A push rod mechanism mainly consists of a drive source, a transmission mechanism, and a push rod assembly. Its primary function is to convert the rotational motion of the drive source into the linear motion of the push rod through the transmission mechanism, thereby enabling functions such as extension, lifting, and positioning of the equipment. For example, in cutting-edge technology fields such as precision manufacturing, micro-nano scale processing, biomedical research, and high-precision measurement, increasingly stringent requirements are placed on the displacement control accuracy of push rod mechanisms, especially in nanometer-level micro-motion control, where the demand is particularly urgent.
[0003] Traditional actuator mechanisms, such as hydraulic, pneumatic, or DC motor drives, can effectively meet displacement requirements on a macroscopic scale, but they are insufficient for achieving nanometer-level control precision and cannot meet the requirements of nanometer-level precision control. Utility Model Content
[0004] The purpose of this invention is to overcome the shortcomings of existing push rod mechanisms that cannot meet the requirements of nanometer-level precision control, and to provide a push rod that can achieve nanometer-level control.
[0005] This invention provides a push rod capable of nanometer-level control, comprising:
[0006] A stepper motor, comprising a motor shaft, wherein the stepper motor can drive the motor shaft to rotate a predetermined angle when receiving a pulse signal;
[0007] A speed reducer, one end of which is connected to the motor shaft, and the rotation of the motor shaft can drive the speed reducer to rotate;
[0008] A lead screw is connected to the other end of the reducer, and the rotation of the reducer can drive the lead screw to rotate.
[0009] A lead screw nut, which is sleeved on the lead screw, and the rotation of the lead screw can drive the lead screw nut to make linear motion;
[0010] An actuator is connected to a lead screw nut, and the lead screw nut can drive the actuator to move axially along the lead screw nut;
[0011] When the stepper motor receives a pulse signal, the actuator rod can move from 0.1 nanometers to 9 nanometers.
[0012] The utility model provides a kind of push rod of nanometer level control can be realized, the stepping motor is used to receive the pulse signal, and drive the motor shaft rotates predetermined angle.The angular displacement of the motor shaft is proportional to the number of input pulses, i.e. every input one pulse signal, the motor shaft will rotate a fixed angle.Through the accurate control of the number of input pulses, the rotation angle of the motor shaft of the stepping motor can be accurately controlled.
[0013] The speed reducer is used to connect the motor shaft and the lead screw, and the speed reducer can further reduce the rotation amplitude of the motor shaft under the driving of each pulse, which means that under the same number of pulses, the rotation angle of the lead screw after the adjustment of the speed reducer is smaller.
[0014] The lead screw and the lead screw nut cooperate with each other to convert the rotation of the lead screw into the linear motion of the lead screw nut. The actuator rod is connected with the lead screw nut, thereby realizing the conversion of the rotary motion of the motor shaft of the stepping motor into the linear motion of the actuator rod.
[0015] In actual application, by accurately calculating the number of pulse signals, the speed reduction ratio of the speed reducer and the pitch of the lead screw, the moving distance of the actuator rod when receiving one pulse signal can be controlled between 0.1 nanometer and 9 nanometers.
[0016] Through the pulse control of the stepping motor, the speed reduction ratio adjustment of the speed reducer and the conversion mechanism of the lead screw and the lead screw nut, the requirements of the push rod mechanism on nanometer level precision control are realized.
[0017] Preferably, the stepping motor can drive the motor shaft to rotate one circle when receiving 2000 to 10000 pulse signals, the speed reduction ratio of the speed reduction mechanism is 200 to 500, and the lead screw rotates one circle, and the corresponding lead screw nut can move 1mm to 3mm. This scheme makes the actuator rod move 0.2 nanometer to 7.5 nanometer when the stepping motor receives one pulse signal.
[0018] Preferably, the speed reducer includes a rear end cover, a first housing, a front end cover and a speed reduction mechanism, the first housing is located between the rear end cover and the front end cover, the speed reduction mechanism is arranged in the first housing, the speed reduction mechanism is provided with an input shaft and an output shaft at two ends, the input shaft passes through the rear end cover and is connected with the motor shaft, and the output shaft passes through the front end cover and is connected with the lead screw.
[0019] The rear end cover and the front end cover both serve as support structures and connecting components. The first housing serves to protect the internal components from physical damage, dust, moisture, and other environmental factors. The motor shaft serves to drive the input shaft, and the rotation amplitude of the input shaft is reduced by the speed reduction mechanism and then transmitted to the output shaft. The output shaft in turn serves to drive the lead screw.
[0020] The speed reduction mechanism can be a harmonic reducer, a worm gear reducer, or a planetary reducer.
[0021] The connection between the input shaft and the motor shaft can be a welded connection, a bolted connection, or the use of a special coupling.
[0022] The connection between the output shaft and the lead screw can be a welded connection, a bolted connection, or the use of a special coupling.
[0023] Preferably, the input shaft is connected to the rear end cover through a first bearing, and the output shaft is connected to the front end cover through a second bearing. The bearings can provide precise axial and radial positioning, and also help to improve the smoothness and reliability of the operation of the input shaft and the output shaft, reducing failures caused by loose or offset components.
[0024] Preferably, the input shaft is connected to the motor shaft through a first coupling, and the output shaft is connected to the lead screw through a second coupling. The couplings can firmly connect the input shaft and the motor shaft, and the output shaft and the lead screw, ensuring that they can rotate in coordination.
[0025] In mechanical transmission, due to manufacturing and installation errors, thermal expansion of shafts, vibration, and other factors, axial, radial, and angular displacements may occur between shafts. The couplings have the ability to compensate for these displacements, ensuring stable operation of the transmission system and avoiding mechanical failures caused by excessive displacement.
[0026] Preferably, the front end cover is connected to a second housing on the side away from the rear end cover, the lead screw is located inside the second housing, and the lead screw is connected to the inner wall of the second housing through a third bearing. The second housing serves to protect the internal components such as the lead screw and the third bearing from physical damage, dust, moisture, and other environmental factors. At the same time, the second housing also serves as a support structure.
[0027] Preferably, a guide block is arranged on the screw nut, an inner wall of the second shell is provided with a sliding groove, the sliding groove extends in the same direction as the screw, and the guide block is movable along the sliding groove.
[0028] Preferably, an opening is arranged on an outer wall of the second shell, and the opening corresponds to the connection position of the output shaft and the screw.
[0029] Preferably, an end plate is arranged on the end of the second shell away from the front end cover, a boss is arranged on the end of the screw nut away from the output shaft, the boss penetrates through the end plate, and the actuator rod is connected to the boss.
[0030] Preferably, the speed reduction mechanism is a multi-stage planetary reducer.
[0031] Compared with the prior art, the present application has the following beneficial effects:
[0032] 1. The present application provides a push rod capable of realizing nanometer-level control, which realizes the requirements of the push rod mechanism in nanometer-level precision control through the pulse control of the stepper motor, the speed reduction ratio adjustment of the speed reducer, and the conversion mechanism of the screw and the screw nut. BRIEF DESCRIPTION OF DRAWINGS
[0033] Figure 1 It is a top view of a push rod capable of realizing nanometer-level control.
[0034] Figure 2 It is a side view of a push rod capable of realizing nanometer-level control.
[0035] Figure 3 It is a three-dimensional structure diagram of a push rod capable of realizing nanometer-level control.
[0036] Figure 4 It is a side view of a push rod capable of realizing nanometer-level control.
[0037] Figure 5 It is a first schematic diagram of the internal structure of the speed reducer.
[0038] Figure 6 It is a second schematic diagram of the internal structure of the speed reducer.
[0039] MARKS IN THE DRAWINGS:
[0040] 1 - stepper motor,
[0041] 101 - motor shaft,
[0042] 2 - speed reducer,
[0043] 201 - rear end cover,
[0044] 202 - first housing,
[0045] 203 - front end cover,
[0046] 204 - speed reduction mechanism,
[0047] 2041 - input shaft, 2042 - output shaft,
[0048] 3 - second housing,
[0049] 301 - end plate, 302 - opening,
[0050] 4 - execution rod,
[0051] 5 - end nut,
[0052] 6 - lead screw,
[0053] 7 - lead screw nut,
[0054] 701 - guide block, 702 - boss,
[0055] 8 - third bearing,
[0056] 9 - locking member,
[0057] 10 - second coupling,
[0058] 11 - second bearing,
[0059] 12 - first bearing,
[0060] 13 - first coupling,
[0061] 14 - power supply line. DETAILED DESCRIPTION
[0062] The utility model will be described in further detail below in combination with specific embodiments. However, this should not be understood as the scope of the above-mentioned subject matter of the utility model being limited to the following embodiments only, and any technology realized based on the content of the utility model falls within the scope of the utility model.
[0063] In the description of the embodiments of the present application, the terms of orientation or position relationship such as "upper", "lower", "left", "right", "center", "inner", "outer" and the like are expressed based on the orientation or position relationship shown in the drawings, or the orientation or position relationship when the product / device / apparatus of the present application is usually used. These terms of orientation or position relationship are only for the convenience of describing the present application or simplifying the description of the embodiments, and for the convenience of the technicians to quickly understand the scheme, and therefore cannot be understood as indicating or implying that a specific device / component / element must have a specific orientation or be constructed and operated in a specific position relationship, and therefore cannot be understood as limiting the present application.
[0064] In addition, the terms "horizontal", "vertical", "overhanging", "parallel" and the like do not mean that the corresponding device / component / element must be absolutely horizontal or vertical or overhanging or parallel, but can be slightly inclined or have a deviation. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined. Alternatively, it can be simplified to understand that the corresponding device / component / element is arranged in the direction of "horizontal", "vertical", "overhanging", "parallel" and the like, and can have an error / deviation of ±10% relative to the corresponding direction, more preferably an error / deviation of ±8% or less, more preferably an error / deviation of ±6% or less, more preferably an error / deviation of ±5% or less, and more preferably an error / deviation of ±4% or less. As long as the corresponding device / component / element is within the error / deviation range, it can still achieve its role in the scheme of the present application.
[0065] In addition, the terms "first", "second", "third" and the like in the description of the embodiments of the present application are only used to distinguish the same or similar components, and should not be understood as emphasizing or implying the relative importance of the specific components.
[0066] In addition, in the description of the embodiments of the present application, "several", "a plurality of", "several" represent at least 2. It can be 2, 3, 4, 5, 6, 7, 8, 9, etc. in any case, and even more than 9.
[0067] In addition, in the description of the technical scheme of the present application, unless otherwise specified / limited / limited, the terms "set", "install", "connect", "connect", "set", "lay", "arrange" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected, which can be welding, riveting, bolting, screwing and other commonly used connection means in the art. The connection can be mechanical connection, electrical connection or communication connection; it can be directly connected, or indirectly connected through an intermediate medium, or the communication between two elements.
[0068] Example 1
[0069] like Figures 1 to 6 As shown, a push rod capable of nanometer-level control includes a stepper motor 1, a reducer 2, a lead screw 6, a lead screw nut 7, and an actuator 4.
[0070] The stepper motor 1 includes a motor shaft 101, which can drive the motor shaft 101 to rotate a predetermined angle when it receives a pulse signal. The cross-section of the stepper motor 1 can be a square with a side length of 28 mm, and the length of the stepper motor 1 can be 31.5 mm. A power cable 14 is connected to the top of the stepper motor 1 to provide power to the stepper motor 1.
[0071] One end of the reducer 2 is connected to the motor shaft 101, and the rotation of the motor shaft 101 can drive the reducer 2 to rotate.
[0072] The lead screw 6 is connected to the other end of the reducer 2, and the rotation of the reducer 2 can drive the lead screw 6 to rotate. The diameter of the lead screw 6 is 5mm.
[0073] The lead screw nut 7 is sleeved on the lead screw 6, and the rotation of the lead screw 6 can drive the lead screw nut 7 to make linear motion.
[0074] The actuator 4 is connected to the lead screw nut 7, which can drive the actuator 4 to move axially along the lead screw nut 7. An end nut 5 can be connected to the end of the actuator 4 away from the lead screw nut 7. The end nut 5 is used to connect the actuator 4 to the part that is being driven.
[0075] When the stepper motor 1 receives a pulse signal, the actuator 4 can move from 0.1 nanometers to 9 nanometers, specifically 0.1 nanometers, 0.2 nanometers, 0.5 nanometers, 0.8 nanometers, 1 nanometer, 1.5 nanometers, 2 nanometers, 3 nanometers, 4 nanometers, 5 nanometers, 6 nanometers, 7 nanometers, 8 nanometers, and 9 nanometers.
[0076] In an optional embodiment, the stepper motor 1 can drive the motor shaft 101 to rotate one circle when receiving 2000 to 10000 pulse signals, specifically, the stepper motor 1 can drive the motor shaft 101 to rotate one circle when receiving 2000, 2500, 3000, 3500, 4000, 4500, 5000, 5500, 6000, 6500, 7000, 7500, 8000, 8500, 9000 or 10000 pulse signals. The reduction ratio of the speed reducer 204 can be 200 to 500, specifically, the reduction ratio can be 200, 220, 250, 280, 300, 320, 350, 360, 380, 400, 420, 450, 480 or 500. The lead screw 6 rotates one circle, and the corresponding lead screw nut 7 can move 1mm to 3mm, specifically, the lead screw nut 7 can move 1mm, 1.2mm, 1.5mm, 1.8mm, 2.0mm, 2.4mm, 2.5mm, 2.8mm or 3mm.
[0077] For example, when the stepper motor 1 can drive the motor shaft 101 to rotate one circle when receiving 2000 pulse signals, the reduction ratio of the speed reducer 204 is 200, and the lead screw 6 rotates one circle, and the corresponding lead screw nut 7 can move 1mm. Further calculation, when the stepper motor 1 receives one pulse signal, the moving distance of the lead screw nut 7 is 1mm / 200 / 2000=0.0000005mm, i.e. 0.5 nanometer.
[0078] For another example, when the stepper motor 1 can drive the motor shaft 101 to rotate one circle when receiving 2500 pulse signals, the reduction ratio of the speed reducer 204 is 400, and the lead screw 6 rotates one circle, and the corresponding lead screw nut 7 can move 2mm. Further calculation, when the stepper motor 1 receives one pulse signal, the moving distance of the lead screw nut 7 is 2mm / 400 / 2500=0.000002mm, i.e. 2 nanometer.
[0079] In an optional embodiment, the speed reducer 2 can include a rear end cover 201, a first housing 202, a front end cover 203 and a speed reduction mechanism 204, the first housing 202 is located between the rear end cover 201 and the front end cover 203, the speed reduction mechanism 204 is arranged in the first housing 202, and the speed reduction mechanism 204 is provided with an input shaft 2041 and an output shaft 2042 at two ends, the input shaft 2041 passes through the rear end cover 201 and is connected with the motor shaft 101, and the output shaft 2042 passes through the front end cover 203 and is connected with the lead screw 6. The diameters of the input shaft 2041 and the output shaft 2042 are both 5mm.
[0080] The cross sections of the rear end cover 201, the first housing 202 and the front end cover 203 can all be square with a side length of 28.6mm. The overall length of the speed reducer 2 can be 55mm. The rear end cover 201 is connected to the stepping motor 1 by bolts.
[0081] In an optional embodiment, the input shaft 2041 can be connected to the rear end cover 201 by a first bearing 12, and the output shaft 2042 can be connected to the front end cover 203 by a second bearing 11. The inner rings of the first bearing 12 and the second bearing 11 are connected to the input shaft 2041 and the output shaft 2042 respectively, and the outer rings of the first bearing 12 and the second bearing 11 are connected to the inner walls of the rear end cover 201 and the front end cover 203 respectively.
[0082] The inner diameters of the first bearing 12 and the second bearing 11 are both 5mm, and the outer diameters are both 13mm. The widths of the first bearing 12 and the second bearing 11 are both 4mm.
[0083] In an optional embodiment, the input shaft 2041 can be connected to the motor shaft 101 by a first coupling 13, and the output shaft 2042 can be connected to the lead screw 6 by a second coupling 10.
[0084] In an optional embodiment, the side of the front end cover 203 away from the rear end cover 201 can be connected to a second housing 3, the lead screw 6 is located inside the second housing 3, and the lead screw 6 is connected to the inner wall of the second housing 3 by a third bearing 8. Specifically, one side of the inner ring of the third bearing 8 is connected to a locking piece 9, which is used to connect the inner ring of the third bearing 8 to the lead screw 6. The outer ring of the third bearing 8 is connected to the inner wall of the second housing 3.
[0085] In an optional embodiment, a guide block 701 can be provided on the lead screw nut 7, and the inner wall of the second housing 3 can be provided with a sliding groove, the extension direction of the sliding groove being consistent with the axial direction of the lead screw 6, and the guide block 701 being movable along the sliding groove. The width of the guide block 701 is 5mm, and the width of the corresponding sliding groove is also 5mm. The depth of the sliding groove is 2mm. The guide block 701 is connected above the lead screw nut 7.
[0086] In an optional embodiment, the outer wall of the second housing 3 can be provided with an opening 302, the position of the opening 302 corresponding to the connection between the output shaft 2042 and the lead screw 6. Specifically, the outer contour of the cross section of the second housing 3 is circular at the part away from the front end cover 203, and the diameter of the circular shape is 38mm. When the second housing 3 extends towards the end close to the front end cover 203, the outer contour of the cross section gradually changes to a square shape, and the side length of the square shape is 28.6mm. On the four sides of this square cross section area, there are openings 302. The shape of the opening 302 is a rectangle, and the size is 14mm in length and 12mm in width.
[0087] In an optional embodiment, the second housing 3 can be provided with an end plate 301 at one end away from the front end cover 203, the lead screw nut 7 can be provided with a boss 702 at one end away from the output shaft 2042, the boss 702 passes through the end plate 301, and the execution rod 4 is connected to the boss 702. Specifically, the cross section of the lead screw nut 7 is a circle with a diameter of 18 mm. A through hole is formed in the center of the lead screw nut 7 along the axial direction, and a thread is formed on the inner wall of the through hole, which is matched with the design of the lead screw 6 to ensure that the two are tightly and smoothly connected. The boss 702 is 10.5 mm high, and the cross section of the boss 702 is also a circle with a diameter of 12 mm. The boss 702 is provided with a cavity at one end facing the lead screw 6, the cross section of the cavity is a circle, and the size of the cavity is larger than the cross section of the lead screw 6, so that the cavity can accommodate the part of the lead screw 6 close to the execution rod 4. The execution rod 4 is 8 mm long, and the cross section is also a circle with a diameter of 5 mm. It is worth noting that the three of the lead screw nut 7, the boss 702 and the execution rod 4 are coaxial in layout, that is, their central axes coincide.
[0088] In an optional embodiment, the speed reduction mechanism 204 can be a multi-stage planetary reducer. Specifically, the speed reduction mechanism 204 is a three-stage planetary reducer. The planetary reducer includes a sun gear, a planet gear, a planet carrier and a ring gear, and the ring gear is fixedly connected with the inner wall of the first housing 202.
[0089] The above only describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims
1. A push rod capable of nanometer-level control, characterized in that, include: A stepper motor (1) includes a motor shaft (101), which can drive the motor shaft (101) to rotate a predetermined angle when it receives a pulse signal; A speed reducer (2), one end of which is connected to the motor shaft (101), and the rotation of the motor shaft (101) can drive the speed reducer (2) to rotate; A lead screw (6) is connected to the other end of the reducer (2), and the rotation of the reducer (2) can drive the lead screw (6) to rotate. A lead screw nut (7) is sleeved on the lead screw (6), and the rotation of the lead screw (6) can drive the lead screw nut (7) to make linear motion; An actuator (4) is connected to a lead screw nut (7), and the lead screw nut (7) can drive the actuator (4) to move axially along the lead screw nut (7); When the stepper motor (1) receives a pulse signal, the actuator (4) can move from 0.1 nanometers to 9 nanometers.
2. The push rod capable of nanometer-level control according to claim 1, characterized in that, When the stepper motor (1) receives 2,000 to 10,000 pulse signals, it can drive the motor shaft (101) to rotate one revolution. The reduction ratio of the reducer (2) is 200 to 500. When the lead screw (6) rotates one revolution, the corresponding lead screw nut (7) can move 1 mm to 3 mm.
3. The push rod capable of nanometer-level control according to claim 1, characterized in that, The reducer (2) includes a rear end cover (201), a first housing (202), a front end cover (203), and a reduction mechanism (204). The first housing (202) is located between the rear end cover (201) and the front end cover (203). The reduction mechanism (204) is disposed inside the first housing (202). The two ends of the reduction mechanism (204) are provided with an input shaft (2041) and an output shaft (2042). The input shaft (2041) passes through the rear end cover (201) and is connected to the motor shaft (101). The output shaft (2042) passes through the front end cover (203) and is connected to the lead screw (6).
4. A push rod capable of nanometer-level control according to claim 3, characterized in that, The input shaft (2041) is connected to the rear end cover (201) via the first bearing (12), and the output shaft (2042) is connected to the front end cover (203) via the second bearing (11).
5. A push rod capable of nanometer-level control according to claim 3, characterized in that, The input shaft (2041) is connected to the motor shaft (101) via a first coupling (13), and the output shaft (2042) is connected to the lead screw (6) via a second coupling (10).
6. A push rod capable of nanometer-level control according to claim 3, characterized in that, The front end cover (203) is connected to a second housing (3) on the side away from the rear end cover (201). The lead screw (6) is located inside the second housing (3) and is connected to the inner wall of the second housing (3) through a third bearing (8).
7. A push rod capable of nanometer-level control according to claim 6, characterized in that, The lead screw nut (7) is provided with a guide block (701), and the inner wall of the second housing (3) is provided with a sliding groove. The extension direction of the sliding groove is consistent with the axial direction of the lead screw (6), and the guide block (701) can move along the sliding groove.
8. A push rod capable of nanometer-level control according to claim 6, characterized in that, The outer wall of the second housing (3) is provided with an opening (302), the position of which corresponds to the connection between the output shaft (2042) and the lead screw (6).
9. A push rod capable of nanometer-level control according to claim 6, characterized in that, The second housing (3) has an end plate (301) at one end away from the front end cover (203), and the screw nut (7) has a boss (702) at one end away from the output shaft (2042). The boss (702) passes through the end plate (301), and the actuator (4) is connected to the boss (702).
10. A push rod capable of nanometer-level control according to any one of claims 3-9, characterized in that, The deceleration mechanism (204) is a multi-stage planetary reducer.