Coating machine

Abstract

The utility model discloses a coating machine. The coating machine comprises a first displacement mechanism and a second displacement mechanism, the coating tool bit is arranged on the first displacement mechanism, and the coating tool bit is used for coating a substrate; the number of the detection sensors is at least two, and the at least two detection sensors are arranged at intervals in the length direction of the coating tool bit; and the control piece is electrically connected with the coating tool bit and the detection sensor, and switches the coating machine to be in an alarm state when the offset or the warping degree of the substrate is greater than a set value. According to the utility model, the at least two detection sensors are arranged at intervals along the length direction of the coating tool bit, the offset and the warping degree of the substrate are detected, and an alarm is triggered when the offset or the warping degree is relatively large, so that a solution is prevented from polluting the lower bottom surface of the substrate and the adsorption platform along the edge of the substrate, the reject ratio is reduced, and the production efficiency is improved. And the detection sensor is fully utilized.

Description

TECHNICAL FIELD

[0001] The utility model relates to coating device technical field especially is related to a coating machine. BACKGROUND

[0002] In the production process of perovskite solar cells, coating technology is one of the important steps in manufacturing the cells. Coating machine is usually used to uniformly coat perovskite material on the substrate to form the active layer of the cell. However, there are still some technical problems in the current coating process. On the one hand, during coating, the coating tool bit needs to maintain a very small gap with the substrate to form a nano-thickness coating film. However, during coating on a large-area substrate, the flatness of the substrate is difficult to guarantee. A substrate with excessive warping not only leads to poor coating effect, but also has the risk of collision with the coating tool bit, causing great loss. On the other hand, if the substrate is offset too much relative to the coating tool bit during coating, it will also cause uneven coating and material waste. Therefore, before coating, the warping degree or offset of the substrate needs to be detected. SUMMARY

[0003] The utility model aims at at least solves one of the technical problems existing in prior art. For this reason, the utility model provides a coating machine, which reduces the defective rate.

[0004] According to the coating machine of the utility model embodiment, the first displacement mechanism, the coating tool bit, the detection sensor and the control member are provided, the coating tool bit is arranged on the first displacement mechanism and used for coating the substrate, the detection sensor is at least two, the at least two detection sensors are arranged along the length direction of the coating tool bit, the control member is electrically connected with the coating tool bit and the detection sensor, and the coating machine is switched to the alarm state when the offset or warping degree of the substrate is greater than the set value.

[0005] According to the coating machine of the utility model embodiment, at least two detection sensors are arranged along the length direction of the coating tool bit. One detection sensor senses the edge of the substrate as the starting point, and the other detection sensor senses the edge of the substrate. A time difference is formed between the two, and the displacement speed of the coating tool bit is combined to judge the displacement, and then the offset of the substrate relative to the coating tool bit is judged. The offset of the substrate is detected, and the alarm is triggered when the offset is large, so as to avoid the solution from polluting the lower surface of the substrate and the adsorption platform along the edge of the substrate, reduce the defective rate, and fully utilize the detection sensor.

[0006] In another aspect, by arranging at least two detection sensors in the length direction of the coating knife head, when the coating knife head is running empty above the substrate, the detection sensors can collect multiple points on the substrate to determine the height difference of the upper surface of the substrate, and further determine whether the substrate is excessively warped.

[0007] In some embodiments, the detection sensor is connected to the first displacement mechanism by a second displacement mechanism, the second displacement mechanism extending along the length direction to drive the detection sensor to move along the length direction; wherein the detection sensor has a static state and a moving state, the detection sensor being in the static state to detect the offset, and the detection sensor being in the moving state to detect the warping degree of the substrate.

[0008] In some embodiments, the second displacement mechanism comprises a track and a moving member movably arranged on the track, and the detection sensor is arranged on the moving member; wherein a plurality of tracks corresponding to a plurality of detection sensors are arranged in parallel.

[0009] In some embodiments, the second displacement mechanism is configured as a linear displacement mechanism, and the displacement plane of the linear displacement mechanism is parallel to the substrate, so as to control the detection sensor to move along the diagonal line of the substrate in the state that the first displacement mechanism and the second displacement mechanism simultaneously displace.

[0010] In some embodiments, the coating machine further comprises at least one set of sensing assembly, the sensing assembly comprising a sensing member arranged on the first displacement mechanism, the sensing member following the first displacement mechanism, and the sensing member being used to collect a plurality of sets of points on the substrate along the displacement direction of the first displacement mechanism.

[0011] In some embodiments, the sensing member is connected to the first displacement mechanism by a third displacement mechanism, the third displacement mechanism extending along the length direction to drive the sensing member to move along the length direction; and the third displacement mechanism is configured as a reciprocating displacement mechanism, and the sensing member has a first position and a second position, and the sensing member moves reciprocally between the first position and the second position.

[0012] In some embodiments, the coating machine comprises two sets of sensing assemblies arranged along the length direction, wherein the distance between the first position and the second position is less than or equal to half of the length of the substrate.

[0013] In some embodiments, the third displacement mechanism comprises a guide rail, a displacement piece movably arranged on the guide rail, and the sensing piece is arranged on the displacement piece; wherein, in the state that the first displacement mechanism and the third displacement mechanism simultaneously displace, the sensing piece presents a reciprocating curve displacement above the substrate.

[0014] In some embodiments, a plurality of sensing pieces are arranged at intervals along the length direction, and the sensing pieces are fixed on the moving end of the first displacement mechanism.

[0015] In some embodiments, the detection sensor comprises a thickness sensor or a distance sensor.

[0016] The additional aspects and advantages of the present application will be partially given in the following description, and some will become apparent from the following description, or be understood through the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0017] The above and / or additional aspects and advantages of the present application will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:

[0018] Figure 1 is a working schematic view of the coating machine in the embodiment of the present application, wherein, the moving direction of the first displacement mechanism is the right arrow, and the dotted line on the substrate represents the trajectory of the detection sensor and the sensing piece;

[0019] Figure 2 is a structure side view of the coating machine in the present application;

[0020] Figure 3 is a structure top view of the coating machine in the present application;

[0021] Figure 4 is a trajectory schematic view of the sensing piece in the present application, wherein, the solid line on the substrate represents the trajectory of the sensing piece.

[0022] REFERENCE NUMERALS:

[0023] 100, coating machine; 10, first displacement mechanism; 11, second displacement mechanism; 20, coating knife head; 30, detection sensor; 40, sensing piece; 41, third displacement mechanism; 200, suction platform; 300, substrate. DETAILED DESCRIPTION

[0024] The embodiments of the present application are described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary, and are only used to explain the present application, and cannot be understood as a limitation of the present application.

[0025] In the description of the utility model, it needs to understand that the orientation or positional relation indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are based on the orientation or positional relation shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the utility model.

[0026] In addition, the features limited by "first" and "second" can explicitly or implicitly include one or more features for distinguishing the features described, and there is no order or difference.

[0027] In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specified.

[0028] In the description of the utility model, it needs to be explained that, unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0029] The coating machine 100 of the utility model embodiment is described below with reference to the drawings.

[0030] Referring to Figures 1 to 4 , according to the utility model embodiment, a coating machine 100 includes: a first displacement mechanism 10, a coating knife head 20, a detection sensor 30 and a control member.

[0031] The coating knife head 20 is arranged on the first displacement mechanism 10, and the coating knife head 20 is used for coating the substrate 300. The detection sensor 30 is at least two, and the at least two detection sensors 30 are arranged along the length direction of the coating knife head 20. The control member is electrically connected with the detection sensor 30, and switches the coating machine 100 to the alarm state when the offset or warping degree of the substrate 300 is greater than the set value.

[0032] The coating head 20 applies liquid to the substrate 300. The coating head 20 and detection sensor 30 are mounted on a first displacement mechanism 10. The first displacement mechanism 10 moves the coating head 20 and detection sensor 30 closer to and above the substrate 300. During coating, the coating head 20 applies liquid while moving. However, when detecting warpage or offset, the coating head 20 only moves without applying liquid, and the first displacement mechanism 10 moves idly above the substrate 300 along the coating direction. Multiple detection sensors 30 are spaced apart along the length direction. If the substrate 300 shifts, the multiple detection sensors 30 will detect the substrate 300 at different times.

[0033] Starting from the edge of the substrate 300 sensed by one detection sensor 30, and continuing until another detection sensor 30 senses the edge of the substrate 300, a time difference is formed between the two. The displacement amount is determined by combining the displacement speed of the coating head 20, and then the offset of the substrate 300 relative to the coating head 10 is determined. The offset of the substrate 300 is detected, and an alarm is triggered when the offset is large, thereby preventing the solution from contaminating the bottom surface of the substrate 300 and the adsorption platform along the edge of the substrate 300, and reducing the defect rate.

[0034] Specifically, through extensive experimental observation and analysis, the inventors discovered that when the substrate 300 shifts, the coating solution will contaminate the bottom surface of the substrate 300 and the adsorption platform 200 along the edge of the substrate 300, leading to an increased defect rate.

[0035] In this embodiment of the invention, by setting multiple detection sensors 30 along the length of the coating head 20, it can be understood that the detection sensors 30 will emit an electrical signal when they detect the substrate 300. By comparing the times when multiple electrical signals appear, the offset of the substrate 300 can be known. When a large offset occurs, the coating machine 100 is controlled to switch to an alarm state, thereby preventing the solution from contaminating the bottom surface of the substrate 300 and the adsorption platform 200 along the edge of the substrate 300, reducing the defect rate, and making full use of the detection sensors 30.

[0036] Warpage refers to the height difference between the highest and lowest points in a planar area. Here, warpage represents the degree of warpage of the substrate 300 and is used to measure the surface flatness and shape change of the substrate 300.

[0037] In the production process of perovskite solar cells, coating technology is one of the important steps in manufacturing the cells. The coating machine 100 is usually used to uniformly coat the perovskite material on the substrate to form the active layer of the cell. However, there are still some technical problems in the current coating process. On the one hand, when coating, the coating tool bit needs to maintain a very small gap with the substrate to form a film with a nanoscale thickness. However, when coating on a large-area substrate, it is difficult to ensure the flatness of the substrate. A substrate with excessive warping not only leads to poor plating effect, but also has the risk of collision with the coating tool bit, causing significant loss. On the other hand, if the substrate is offset from the coating tool bit during coating, it will also cause uneven coating and material waste. Therefore, before coating, the warping degree or offset of the substrate needs to be detected.

[0038] On the other hand, by providing at least two detection sensors 30 in the length direction of the coating tool bit 20, when the coating tool bit 20 is running empty above the substrate 300, the detection sensors 30 can collect multiple points on the substrate 300 to determine the height difference of the upper surface of the substrate 300, and further determine whether the substrate 300 is excessively warped.

[0039] Specifically, the set value is a value artificially set in advance.

[0040] Specifically, the material of the substrate 300 can be glass.

[0041] For example, there are two detection sensors 30, the time difference detected by the two detection sensors 30 is t, the moving speed of the first displacement mechanism 10 is v, and the offset is d, d = vt. The threshold value of d or t triggers the "substrate offset alarm" of the device.

[0042] The coating machine 100 according to the embodiment of the present application avoids the solution from polluting the lower surface of the substrate 300 and the adsorption platform 200 along the edge of the substrate 300 by setting at least two detection sensors 30, which are arranged along the length direction of the coating tool bit 20, detecting the offset of the substrate 300, and triggering the alarm when the offset is large. This reduces the defective rate and makes full use of the detection sensors 30.

[0043] Reference Figure 2 In some embodiments, the detection sensor 30 is connected to the first displacement mechanism 10 through the second displacement mechanism 11, and the second displacement mechanism 11 extends along the length direction of the coating tool bit 20 to drive the detection sensor 30 to move along the length direction. The detection sensor 30 has a static state and a moving state. The detection sensor 30 is in the static state to detect the offset, and the detection sensor 30 is in the moving state to detect the warping degree of the substrate 300.

[0044] The first displacement mechanism 10 moves along a coating direction, the second displacement mechanism 11 is arranged on the first displacement mechanism 10, the second displacement mechanism 11 drives the detection sensor 30 to move along the length direction of the first displacement mechanism 10, the detection sensor 30 detects data of each part of the substrate 300, and the warping of the substrate 300 can be known through analysis of the data.

[0045] In the above scheme, the second displacement mechanism 11 is arranged on the first displacement mechanism 10, the second displacement mechanism 11 drives the detection sensor 30 to move, and the data of each part of the substrate 300 is obtained, so that the warping of the substrate 300 can be known, the structure is simple, practical, and the reliability is high.

[0046] For example, the detection sensor 30 is a thickness sensor, the higher the warping of the substrate 300 is, the greater the thickness value measured by the thickness sensor is, that is, the greater the thickness measurement difference h is, and whether the warping of the substrate 300 exceeds the standard is measured by setting the size of h, so as to trigger the “substrate warping alarm” of the coating machine 100.

[0047] In some embodiments, the second displacement mechanism 11 comprises a track and a moving piece.

[0048] The moving piece is movably arranged on the track, and the detection sensor 30 is arranged on the moving piece. A plurality of tracks corresponding to a plurality of detection sensors 30 are arranged in parallel.

[0049] The moving piece moves on the track, and the plurality of detection sensors 30 move in parallel.

[0050] In the above scheme, the track and the moving piece cooperate to stably move the detection sensor 30, and the plurality of tracks are arranged in parallel, and the plurality of detection sensors 30 move in parallel to obtain accurate data.

[0051] Reference Figure 1 In some embodiments, the second displacement mechanism 11 is configured as a linear displacement mechanism, and the displacement plane of the linear displacement mechanism is parallel to the substrate 300, and in the state that the first displacement mechanism 10 and the second displacement mechanism 11 simultaneously displace, the detection sensor 30 is controlled to move along the diagonal line of the substrate 300.

[0052] It can be understood that “controlling the detection sensor 30 to move along the diagonal line of the substrate 300” means that when the first displacement mechanism 10 and the second displacement mechanism 11 are both in a moving state, the composite path of the detection sensor 30 corresponds to the diagonal line of the substrate 300. That is, the detection sensor 30 collects the points on the diagonal line of the substrate 300.

[0053] Two detection sensors 30 are arranged in a spaced manner in the normal direction of the substrate 300, so as to avoid motion interference and respectively collect the points in the diagonal direction of the substrate 300.

[0054] The second displacement mechanism 11 is configured as a linear displacement mechanism, and the moving part moves uniformly on the track. The length of the track is greater than or equal to the length of the substrate 300 or slightly shorter than the substrate 300, so that the detection sensor 30 moves along the diagonal of the substrate 300 to obtain more data of the substrate 300.

[0055] In the above scheme, by configuring the second displacement mechanism 11 as a linear displacement mechanism, the detection sensor 30 can move along the diagonal of the substrate 300, so that the detection sensor 30 obtains more data, thereby improving the degree of mastering the warping condition.

[0056] Specifically, in the first stage, the detection sensor 30 is stationary relative to the first displacement mechanism 10, so as to detect the offset condition of the substrate 300, and in the second stage, the detection sensor 30 moves relative to the first displacement mechanism 10, so as to detect the warping condition.

[0057] In other specific embodiments, the second displacement mechanism 11 is configured as a screw displacement module, a gear and rack displacement module, a telescopic assembly, etc., to drive the detection sensor 30 to move.

[0058] Referring to Figures 1 to 4 In some embodiments, the coating machine 100 further comprises at least one set of sensing assembly. The sensing assembly comprises a sensing part 40. The sensing part 40 is arranged on the first displacement mechanism 10 and follows the first displacement mechanism 10. The sensing part 40 is used to collect a plurality of groups of points on the substrate 300 along the displacement direction of the first displacement mechanism 10.

[0059] The sensing part 40 is fixed on the first displacement mechanism 10 and is used to detect the offset condition of the substrate 300. The sensing part 40 is movably arranged on the first displacement mechanism 10 and is used to collect a plurality of groups of points on the substrate 300 along the displacement direction of the first displacement mechanism 10. The sensing part 40 is used to detect the warping condition of the substrate 300.

[0060] In the above scheme, the sensing part 40 is added on the basis of the detection sensor 30. The detection sensor 30 is used to detect the offset and warping conditions of the substrate 300. The sensing part 40 can also be used to detect the offset and warping conditions of the substrate 300. The two are independent of each other, so that the structure and function of each part are more clear. While the detection sensor 30 detects the warping, the sensing part 40 independently collects different points on the substrate 300 along different trajectories.

[0061] Referring to Figure 1 , Figure 2 , Figure 3 and Figure 4In some embodiments, the inductor 40 is connected to the first displacement mechanism 10 through a third displacement mechanism 41, which extends along the length direction of the coating knife head to drive the inductor 40 to move along the length direction.

[0062] In the above scheme, the third displacement mechanism 41 is configured to drive the inductor 40 to move, which is simple and practical, and facilitates the movement of the inductor 40.

[0063] In the above scheme, the third displacement mechanism 41 is configured to drive the inductor 40 to move, which is simple and practical, and facilitates the movement of the inductor 40.

[0064] Specifically, the third displacement mechanism 41 can be a guide rail, a displacement piece, a lead screw displacement module, a gear rack displacement module, or a telescopic mechanism.

[0065] In some embodiments, the third displacement mechanism 41 is configured as a reciprocating displacement mechanism, and the inductor 40 has a first position and a second position, and the inductor 40 moves reciprocally between the first position and the second position.

[0066] Specifically, the coating machine 100 includes two groups of inductor assemblies arranged along the length direction, and the distance between the first position and the second position is less than or equal to half the length of the substrate 300.

[0067] In the above scheme, the third displacement mechanism 41 is configured to drive the inductor 40 to move, which is simple and practical, and facilitates the movement of the inductor 40.

[0068] In the above scheme, the third displacement mechanism 41 is configured to drive the inductor 40 to move, which is simple and practical, and facilitates the movement of the inductor 40.

[0069] Specifically, in the second stage, the inductor 40 moves reciprocally relative to the third displacement mechanism 41 in the state of the first displacement mechanism 10, so as to detect the warping condition. The displacement paths of the two groups of inductors 40 are as shown in Figure 4

[0070] In some embodiments, the third displacement mechanism 41 includes a guide rail and a displacement piece.

[0071] ​The displacement member is movably arranged on the guide rail, and the sensing member 40 is arranged on the displacement member; in the state that the first displacement mechanism 10 and the third displacement mechanism 41 simultaneously displace, the sensing member 40 reciprocally and curvilinearly displaces above the substrate 300.

[0072] The displacement member moves on the guide rail, the guide rail plays a role of track, the sensing member 40 is installed on the displacement member, and in the state that the first displacement mechanism 10 and the third displacement mechanism 41 simultaneously displace, the sensing member 40 reciprocally and curvilinearly displaces to collect a plurality of groups of points on the substrate 300.

[0073] In the above scheme, the displacement member moves stably through cooperation of the guide rail and the displacement member, the overall stability is improved, and the accuracy of the collected information is further improved.

[0074] In some specific embodiments, a plurality of sensing members 40 are arranged at intervals along the length direction, and the sensing members 40 are fixed to the movable end of the first displacement mechanism 10.

[0075] The plurality of sensing members 40 respectively collect a plurality of groups of points on the substrate 300, the amount of collected information is increased, and the detection accuracy is further improved.

[0076] In some embodiments, the detection sensor 30 comprises a thickness sensor or a distance sensor.

[0077] The thickness sensor detects the thickness of the substrate 300, and the distance sensor detects the distance.

[0078] Other configurations and operations of the coating machine 100 according to the embodiments of the present application are known to those skilled in the art, and will not be described in detail here.

[0079] In the description of the present specification, the description referring to the terms "embodiment", "example", and the like means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0080] Although the embodiments of the present application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements, and variations can be made to these embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A coater characterized by comprising: The application relates to a coating machine (100) comprising: a first displacement mechanism (10); a coating knife head (20) arranged on the first displacement mechanism (10), the coating knife head (20) being used for coating a substrate (300); at least two detection sensors (30) arranged along a length direction of the coating knife head (20); a control element electrically connected to the detection sensors (30) and used for switching the coating machine (100) to an alarm state when an offset or a warping degree of the substrate (300) is greater than a set value.

2. The coater according to claim 1, characterized in that, The detection sensors (30) are connected to the first displacement mechanism (10) through a second displacement mechanism (11) extending along the length direction to drive the detection sensors (30) to move along the length direction; wherein the detection sensors (30) have a static state and a moving state, the detection sensors (30) are in the static state to detect the offset, and the detection sensors (30) are in the moving state to detect the warping degree of the substrate (300).

3. The coater according to claim 2, characterized in that, The second displacement mechanism (11) comprises: a track; a moving element movably arranged on the track, and the detection sensors (30) are arranged on the moving element; wherein a plurality of tracks corresponding to a plurality of detection sensors (30) are arranged in parallel.

4. The coater according to claim 3, characterized in that The second displacement mechanism (11) is configured as a linear displacement mechanism, and a displacement plane of the linear displacement mechanism is parallel to the substrate (300), and in a state that the first displacement mechanism (10) and the second displacement mechanism (11) simultaneously displace, the detection sensors (30) are controlled to move along a diagonal line of the substrate (300).

5. The coater according to claim 1, characterized by Further comprising at least one set of sensing components, the sensing components comprising: a sensing element (40) arranged on the first displacement mechanism (10), the sensing element (40) following the first displacement mechanism (10), and the sensing element (40) being used for collecting a plurality of groups of points on the substrate (300) along a displacement direction of the first displacement mechanism (10).

6. The coater according to claim 5, characterized in that The sensing element (40) is connected to the first displacement mechanism (10) through a third displacement mechanism (41) extending along the length direction to drive the sensing element (40) to move along the length direction; the third displacement mechanism (41) is configured as a reciprocating displacement mechanism, and the sensing element (40) has a first position and a second position, and the sensing element (40) moves reciprocally between the first position and the second position.

7. The coater according to claim 6, characterized in that Two sets of sensing components arranged along the length direction are comprised, wherein a distance between the first position and the second position is less than or equal to half of a length of the substrate (300).

8. The coater according to claim 6, characterized by The third displacement mechanism (41) comprises: a guide rail; A displacement member is movably arranged on the guide rail, and the sensing member (40) is arranged on the displacement member; wherein, in the state that the first displacement mechanism (10) and the third displacement mechanism (41) simultaneously displace, the sensing member (40) reciprocally and curvilinearly displaces above the substrate (300).

9. The coater according to claim 5, characterized by A plurality of the sensing members (40) are arranged along the length direction, and the sensing members (40) are fixed on the movable end of the first displacement mechanism (10).

10. The coater according to any one of claims 1 to 9, characterized in that, The detection sensor (30) comprises a thickness sensor or a distance sensor.

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