Support plate cleaning device and coating equipment

Abstract

The utility model relates to a carrier plate cleaning device and coating equipment. The carrier plate cleaning device comprises a conveying mechanism, a reading mechanism and a cleaning mechanism. Wherein the conveying mechanism is used for conveying a carrier plate, and the conveying mechanism is sequentially provided with a reading station and a cleaning station in the conveying direction. The reading mechanism is arranged at the reading station and used for obtaining the serial number information of the carrier plates entering the reading station so as to determine the carrier plates needing to be cleaned. The cleaning mechanism is arranged at the cleaning station and comprises a driving assembly and a wiping piece connected with the driving assembly, and the driving assembly is used for driving the wiping piece to reciprocate on the carrier plate which enters the cleaning station and needs to be cleaned. According to the carrier plate cleaning device, foreign matter on the carrier plate is automatically cleaned on line, the carrier plate does not need to be moved away from a production line, the whole production line does not need to be shut down for waiting, the carrier plate cleaning efficiency and the cleaning effect are improved, and the productivity is improved.

Description

Technical Field

[0001] This application relates to the field of solar cell manufacturing equipment technology, and in particular to carrier plate cleaning devices and coating equipment. Background Technology

[0002] In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, PECVD (Plasma Enhanced Chemical Vapor Deposition), PVD (Physical Vapor Deposition), and screen printing to form solar cells.

[0003] In both PECVD and PVD coating processes, a carrier plate is required to feed the silicon wafer into the coating equipment. During the coating process, the carrier plate is in direct contact with the solar cell, and the cleanliness of the carrier plate surface affects the coating quality of the silicon wafer. If there are foreign objects on the carrier plate surface, it will cause abnormal appearance of the coated silicon wafer, such as black spots and dirt. Therefore, when foreign objects appear on the carrier plate surface, it is necessary to clean the carrier plate in a timely manner.

[0004] Currently, when foreign objects appear on the carrier plate, if the object is located at the edge of the carrier plate, personnel manually clean it from inside the machine. If the object is in the middle of the carrier plate, where a person's arm cannot directly reach it, at least four people are needed to lift the carrier plate out of the machine, stand it upright, and then clean the object. After cleaning, the carrier plate is then lifted back into the machine. This process is not only labor-intensive but also requires equipment shutdown, affecting production capacity. Utility Model Content

[0005] Therefore, it is necessary to provide a carrier plate cleaning device and coating equipment to address the problem of how to clean foreign objects from the carrier plate more quickly and effortlessly.

[0006] In a first aspect, this application provides a carrier plate cleaning device, comprising:

[0007] The conveying mechanism is used to convey the carrier plate, and the conveying mechanism is provided with a reading station and a cleaning station in sequence along the conveying direction;

[0008] A reading mechanism is provided at the reading station, and the reading mechanism is used to obtain the serial number information of the carrier board entering the reading station in order to determine the carrier board that needs to be cleaned;

[0009] A cleaning mechanism is provided at the cleaning station. The cleaning mechanism includes a drive component and a wiping component connected to the drive component. The drive component is used to drive the wiping component to clean the carrier plate that needs to be cleaned upon entering the cleaning station.

[0010] The technical solutions are further described below:

[0011] In one of the embodiments, the carrier plate cleaning device further comprises a positioning mechanism arranged at the cleaning station, which is used to limit the carrier plate to be cleaned at the cleaning station.

[0012] In one of the embodiments, the positioning mechanism comprises a telescopic member arranged on the cleaning station in a telescopic manner, which has a limiting state protruding from the surface of the conveying mechanism and a avoiding state retracted into the conveying mechanism, and in the limiting state, the telescopic member is used to abut against the carrier plate to be cleaned to limit the carrier plate to be cleaned at the cleaning station.

[0013] In one of the embodiments, the number of the telescopic members is multiple, and the multiple telescopic members are arranged at the cleaning station in a spaced manner, and the multiple telescopic members jointly enclose a limiting space for accommodating the carrier plate to be cleaned.

[0014] In one of the embodiments, the driving assembly comprises a Y-direction driving module, an X-direction driving module and a Z-direction driving module which are connected with each other, the Y-direction driving module is used to drive the wiping member to move horizontally along the conveying direction of the conveying mechanism, the X-direction driving module is used to drive the wiping member to move horizontally along the direction perpendicular to the conveying direction of the conveying mechanism, and the Z-direction driving module is used to drive the wiping member to move up and down in the vertical direction.

[0015] In one of the embodiments, the Y-direction driving module comprises two first sliding tables arranged respectively at two sides of the conveying mechanism, each of the first sliding tables extends along the conveying direction of the conveying mechanism, and each of the first sliding tables is provided with a first walking member which can move along the first sliding table.

[0016] The X-direction driving module comprises a second sliding table arranged above the conveying mechanism and extending along the direction perpendicular to the conveying direction of the conveying mechanism, two ends of the second sliding table are connected with the two first walking members respectively, and the second sliding table is provided with a second walking member which can move along the second sliding table.

[0017] The Z-direction driving module comprises a telescopic cylinder connected with the second walking member, and an output shaft of the telescopic cylinder is connected with the wiping member.

[0018] In one of the embodiments, the reading mechanism comprises a mounting bracket connected with the conveying mechanism, and a snapshot camera arranged on the mounting bracket, the snapshot camera being configured to acquire an image of the carrier plate entering the reading station to obtain the serial number information of the carrier plate.

[0019] In one of the embodiments, the reading mechanism comprises a label reader arranged on the conveying mechanism, the label reader being configured to read an electronic label of the carrier plate entering the reading station to obtain the serial number information of the carrier plate.

[0020] In one of the embodiments, the wiping member comprises a brush, a cloth brush or a silica gel brush.

[0021] In a second aspect, the application further provides a coating equipment comprising the carrier plate cleaning device.

[0022] In operation, the reading mechanism first receives the serial number information of the carrier plate to be cleaned sent by the host or the control center, wherein the serial number information includes but is not limited to the serial number of the carrier plate, the position of the carrier plate, etc. Then the conveying mechanism sequentially conveys each carrier plate, and when the carrier plate enters the reading station, the reading mechanism acquires the serial number information of the carrier plate to determine whether the carrier plate is the carrier plate to be cleaned. If the carrier plate is not the carrier plate to be cleaned, the conveying mechanism normally conveys the carrier plate to the next production line. If the carrier plate is the carrier plate to be cleaned, the reading mechanism sends a cleaning signal, and the conveying mechanism receives the cleaning signal and then conveys the carrier plate to be cleaned to the cleaning station and stops. Subsequently, the cleaning mechanism drives the wiping member to reciprocate on the carrier plate through the driving assembly to wipe off the foreign matters on the surface of the carrier plate. After cleaning, the conveying mechanism sends the carrier plate out of the cleaning station. Therefore, the carrier plate cleaning device realizes online automatic cleaning of foreign matters on the carrier plate, without the need to move the carrier plate out of the production line or to stop the whole production line to wait, thereby accelerating the cleaning efficiency and effect of the carrier plate and improving the production capacity. BRIEF DESCRIPTION OF DRAWINGS

[0023] The accompanying drawings, which form a part of this application, are included to provide a further understanding of the application and are incorporated in and constitute a part of this application. The embodiments of the application illustrated in the drawings, and their description, are presented to add generic scope to this application.

[0024] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the application, and for those skilled in the art, other drawings can also be obtained from these drawings without creative effort.

[0025] In addition, the drawings are not drawn to scale and the relative dimensions of the various elements of the drawings are only meant to be illustrative and not necessarily drawn to scale. In the drawings:

[0026] Figure 1 Structure schematic diagram of a carrier plate cleaning device of an embodiment.

[0027] Figure 2 Side view of the carrier plate cleaning device shown in 1.

[0028] Legend of reference signs:

[0029] 10, conveying mechanism; 20, reading mechanism; 21, mounting bracket; 22, snapshot camera; 31, Y-direction driving module; 311, first sliding table; 312, first walking piece; 32, X-direction driving module; 321, second sliding table; 322, second walking piece; 33, Z-direction driving module; 34, wiping piece; 40, positioning mechanism; 50, carrier plate. DETAILED DESCRIPTION

[0030] In order to make the above objectives, characteristics and advantages of the present application more apparent and comprehensible, the specific embodiments of the present application are described in detail below in conjunction with the drawings. In the following description, a lot of specific details are set forth in order to fully understand the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0031] In the description of the present application, it should be understood that if these terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0032] In addition, if these terms "first", "second" appear, these terms are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, if the term "multiple" appears, the meaning of "multiple" is at least two, for example, two, three, etc., unless otherwise specifically limited.

[0033] In the present application, unless specifically defined otherwise, if there are terms such as "mount", "connect", "connect", "fix" and the like, these terms should be understood in a broad sense. For example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise specifically defined. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] In the present application, unless specifically defined otherwise, if there are similar descriptions such as "first feature on" or "second feature", the meaning can be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" of the second feature can be directly above or obliquely above the first feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature can be directly below or obliquely below the first feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0035] It should be noted that if an element is referred to as "fixed to" or "provided to" another element, it can be directly on another element or there can be a middle element. If an element is considered to be "connected" to another element, it can be directly connected to another element or there can be a middle element. If present, the terms "vertical", "horizontal", "up", "down", "left", "right" and similar expressions used in the present application are for illustrative purposes only and are not the only embodiment.

[0036] Referring to Figure 1 and Figure 2 An embodiment of the present application provides a carrier plate cleaning device, which comprises a conveying mechanism 10, a reading mechanism 20 and a cleaning mechanism. The conveying mechanism 10 is used to convey the carrier plate, and the conveying mechanism 10 is sequentially provided with a reading station and a cleaning station along the conveying direction. The reading mechanism 20 is arranged at the reading station, and the reading mechanism 20 is used to obtain the serial number information of the carrier plate 50 entering the reading station, so as to determine the carrier plate 50 to be cleaned. The cleaning mechanism is arranged at the cleaning station, and the cleaning mechanism comprises a driving assembly and a wiping piece 34 connected with the driving assembly. The driving assembly is used to drive the wiping piece 34 to clean the carrier plate 50 to be cleaned entering the cleaning station, for example, to drive the wiping piece 34 to reciprocate on the carrier plate 50 to be cleaned, so as to wipe off the foreign matter on the surface of the carrier plate 50 to be cleaned.

[0037] Specifically, in operation, the reading mechanism 20 first receives the serial number information of the carrier 50 to be cleaned from the host or control center, which includes but is not limited to the serial number of the carrier 50, the position of the carrier 50, etc. Then the conveying mechanism 10 conveys the carriers 50 one by one, and when the carrier 50 enters the reading station, the reading mechanism 20 obtains the serial number information of the carrier 50 to determine whether the carrier 50 is the carrier 50 to be cleaned. If the carrier 50 is not the carrier 50 to be cleaned, the conveying mechanism 10 will normally convey the carrier 50 to the next production line. If the carrier 50 is the carrier 50 to be cleaned, the reading mechanism 20 will send a cleaning signal, and after receiving the cleaning signal, the conveying mechanism 10 will convey the carrier 50 to be cleaned to the cleaning station and stop, and then the cleaning mechanism will drive the wiping member 34 to reciprocate on the carrier 50 to wipe off the foreign matter on the surface of the carrier 50. After cleaning is completed, the conveying mechanism 10 will send the carrier 50 out of the cleaning station. Thus, the carrier cleaning device realizes online automatic cleaning of foreign matter on the carrier 50, without the need to move the carrier 50 out of the production line or to stop the entire production line for waiting, thereby speeding up the cleaning efficiency and effect of the carrier 50 and improving the production capacity.

[0038] Referring to Figure 1 In an embodiment, the carrier cleaning device further comprises a positioning mechanism 40 arranged at the cleaning station, which is used to position the carrier 50 to be cleaned at the cleaning station, so as to prevent displacement of the carrier 50 during cleaning by the wiping member 34, thereby improving the cleaning accuracy.

[0039] Optionally, in an embodiment, the positioning mechanism 40 comprises a retractable member arranged on the cleaning station in a retractable manner, which has a limiting state protruding out of the surface of the conveying mechanism 10 and a avoiding state retracted into the conveying mechanism 10. In the limiting state, the retractable member is used to abut against the carrier 50 to be cleaned, so as to position the carrier 50 to be cleaned at the cleaning station. Specifically, when the carrier 50 to be cleaned enters the cleaning station, the retractable member is extended and abuts against the side edge of the carrier 50, so as to position the carrier 50 at the cleaning station. When the carrier 50 is cleaned, the retractable member is retracted to the avoiding state, so that the carrier 50 can be transferred to the next process under the conveying of the conveying mechanism 10, and the subsequent normally conveyed carrier 50 is also avoided from being blocked by the retractable member. Exemplarily, the retractable member can be a pneumatic cylinder, a hydraulic cylinder or an electric telescopic rod, etc., which is not limited here.

[0040] Further, the number of retractable members is multiple, and the multiple retractable members are arranged at the cleaning station in a spaced manner, and the multiple retractable members jointly enclose a limiting space for accommodating the carrier 50 to be cleaned. For example, Figure 1As shown, in an embodiment, the number of the telescopic members is four, two of which are used to abut on one side of the carrier plate 50 along the conveying direction of the conveying mechanism 10, and the other two are used to abut on the other side of the carrier plate 50 along the conveying direction of the conveying mechanism 10, thereby improving the stability of the limiting of the carrier plate 50. Understandably, in other embodiments, the number of the telescopic members can also be two, three, five, six or more, which is not limited here.

[0041] It is worth noting that in other embodiments, the positioning mechanism 40 can also be a clamp or the like structure for clamping the carrier plate 50, which is not limited here.

[0042] Referring to Figure 2 In an embodiment, the driving assembly includes Y-direction driving module 31, X-direction driving module 32 and Z-direction driving module 33 which are connected with each other, the Y-direction driving module 31 is used to drive the wiping member 34 to move horizontally along the conveying direction of the conveying mechanism 10, i.e. the Y-direction driving module 31 is used to drive the wiping member 34 to move longitudinally; the X-direction driving module 32 is used to drive the wiping member 34 to move horizontally along the direction perpendicular to the conveying direction of the conveying mechanism 10, i.e. the X-direction driving module 32 is used to drive the wiping member 34 to move transversely; the Z-direction driving module 33 is used to drive the wiping member 34 to move up and down in the vertical direction.

[0043] Specifically, when the reading mechanism 20 determines the carrier plate 50 to be cleaned, the Y-direction driving module 31 synchronously moves the wiping member 34 above the cleaning station during the conveying of the carrier plate 50 to be cleaned by the conveying mechanism 10 to wait for the carrier plate 50 to be cleaned, after the carrier plate 50 to be cleaned enters the cleaning station, the positioning mechanism 40 limits the carrier plate 50 to be cleaned, then the Z-direction driving module 33 drives the wiping member 34 to descend to contact the carrier plate 50, then the X-direction driving module 32 drives the wiping member 34 to move transversely, cooperating with the Y-direction driving module 31 to drive the wiping member 34 to move longitudinally, so that the wiping member 34 wipes back and forth on the surface of the carrier plate 50, thereby realizing the cleaning of foreign matters on the surface of the carrier plate 50.

[0044] Referring to Figure 1 and Figure 2 Optionally, in an embodiment, the Y-direction driving module 31 includes two first sliding platforms 311, the two first sliding platforms 311 are respectively on both sides of the conveying mechanism 10, each first sliding platform 311 extends along the direction parallel to the conveying direction of the conveying mechanism 10, and each first sliding platform 311 is provided with a first walking member 312, the first walking member 312 can move along the first sliding platform 311, exemplarily, the first walking member 312 can be a first sliding block, and the first sliding platform 311 can be a first linear module, through which the first sliding block can be driven to move along the direction parallel to the conveying direction of the conveying mechanism 10.

[0045] Optionally, the X-direction driving module 32 comprises a second sliding table 321, the second sliding table 321 is arranged above the conveying mechanism 10 and extends in a direction perpendicular to the conveying direction of the conveying mechanism 10, two ends of the second sliding table 321 are connected with two first walking members 312 respectively, and a second walking member 322 is arranged on the second sliding table 321, the second walking member 322 can move along the second sliding table 321, and the second walking member 322 can also be a second sliding block, and the second sliding table 321 can be a second linear module, so that the second sliding block can be driven to move along a direction perpendicular to the conveying direction of the conveying mechanism 10 through the second linear module. At the same time, since the two ends of the second sliding table 321 are connected with the two first walking members 312 respectively, the X-direction driving module 32 can also move along a direction parallel to the conveying direction of the conveying mechanism 10 as a whole under the drive of the first walking members 312.

[0046] Optionally, the Z-direction driving module 33 comprises a telescopic cylinder, the telescopic cylinder is connected with the second walking member 322, and an output shaft of the telescopic cylinder is connected with the wiping member 34. The telescopic cylinder can drive the wiping member 34 to move up and down in the vertical direction, and the telescopic cylinder can also move along a direction parallel to the conveying direction of the conveying mechanism 10 and along a direction perpendicular to the conveying direction of the conveying mechanism 10 under the linkage of the Y-direction driving module 31 and the X-direction driving module 32, so that the wiping member 34 can move in three directions, and thus the wiping member 34 can wipe off foreign matters on any position on the surface of the carrier plate 50, and the cleaning effect is improved.

[0047] Continuing to refer to Figure 2 Optionally, in an embodiment, the reading mechanism 20 comprises a mounting bracket 21 and a snapshot camera 22, the mounting bracket 21 is connected with the conveying mechanism 10, and the snapshot camera 22 is arranged on the mounting bracket 21. The snapshot camera 22 is used to acquire an image of the carrier plate 50 entering the reading station, so as to acquire the serial number information of the carrier plate 50. Specifically, the snapshot camera 22 is used to capture the serial number on the carrier plate 50, so that the serial number information of the carrier plate 50 can be acquired by using a pattern recognition technology.

[0048] Optionally, in another embodiment, an electronic tag storing the serial number information of the carrier plate 50 can also be arranged on the carrier plate 50. At this time, the reading mechanism 20 can comprise a tag reader, for example, an RFID (Radio Frequency Identification) reader, etc. The tag reader is arranged on the conveying mechanism 10, and the tag reader is used to read the electronic tag of the carrier plate 50 entering the reading station, so as to acquire the serial number information of the carrier plate 50.

[0049] Optionally, in an embodiment, the wiping member 34 comprises a brush, a cloth brush or a silica gel brush, etc., as long as the wiping member 34 can remove foreign matters on the surface of the carrier plate 50 and does not damage the carrier plate 50, and the wiping member 34 is not limited here.

[0050] Optionally, in an embodiment, the conveying mechanism 10 can be a conveying belt.

[0051] An embodiment of the present application also provides a coating equipment, and an embodiment of the coating equipment comprises the substrate cleaning device of any of the above embodiments. Specifically, the substrate cleaning device can be directly arranged in the substrate 50 feeding and discharging equipment of the coating equipment, and the coating equipment can share the same conveying mechanism 10 with the substrate 50 feeding and discharging equipment.

[0052] The technical features of the above embodiments can be combined in any manner. To make the description concise, all possible combinations of the technical features in the above embodiments are not described, but as long as the combinations of the technical features do not exist in contradiction, they shall be considered as falling within the scope of the present application.

[0053] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it shall not be understood as a limitation on the patent scope of the present application. It should be pointed out that, for those skilled in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all fall within the protection scope of the present application. Therefore, the patent protection scope of the present application shall be subject to the appended claims.

Claims

1. A carrier plate cleaning device, characterized in that, include: The conveying mechanism (10) is used to convey the carrier plate. The conveying mechanism (10) is provided with a reading station and a cleaning station in sequence along the conveying direction. A reading mechanism (20) is provided at the reading station. The reading mechanism (20) is used to obtain the serial number information of the carrier plate (50) entering the reading station in order to determine the carrier plate (50) that needs to be cleaned. A cleaning mechanism is provided at the cleaning station. The cleaning mechanism includes a drive component and a wiping component (34) connected to the drive component. The drive component is used to drive the wiping component (34) to clean the carrier plate (50) that enters the cleaning station.

2. The carrier plate cleaning device according to claim 1, characterized in that, The carrier plate cleaning device further includes a positioning mechanism (40), which is disposed at the cleaning station and is used to limit the carrier plate (50) to be cleaned to the cleaning station.

3. The carrier plate cleaning device according to claim 2, characterized in that, The positioning mechanism (40) includes a telescopic member that is telescopically disposed on the cleaning station. The telescopic member has a limiting state that protrudes from the surface of the conveying mechanism (10) and a retracting state that avoids the conveying mechanism (10). In the limiting state, the telescopic member is used to abut against the carrier plate (50) to be cleaned, so as to limit the carrier plate (50) to be cleaned to the cleaning station.

4. The carrier plate cleaning device according to claim 3, characterized in that, The number of telescopic components is multiple, and the multiple telescopic components are arranged at intervals at the cleaning station, and the multiple telescopic components together enclose a limiting space for accommodating the carrier plate (50) to be cleaned.

5. The carrier plate cleaning device according to claim 1, characterized in that, The drive assembly includes a Y-axis drive module (31), an X-axis drive module (32), and a Z-axis drive module (33) that are interconnected. The Y-axis drive module (31) is used to drive the wiping component (34) to move horizontally along the conveying direction parallel to the conveying mechanism (10). The X-axis drive module (32) is used to drive the wiping component (34) to move horizontally along the conveying direction perpendicular to the conveying mechanism (10). The Z-axis drive module (33) is used to drive the wiping component (34) to move up and down in the vertical direction.

6. The carrier plate cleaning device according to claim 5, characterized in that: The Y-axis drive module (31) includes two first slides (311), which are located on both sides of the conveying mechanism (10). Each first slide (311) extends along the conveying direction parallel to the conveying mechanism (10). Each first slide (311) is provided with a first traveling member (312), which can move along the first slide (311). The X-axis drive module (32) includes a second slide (321), which is mounted above the conveying mechanism (10) and extends along the conveying direction perpendicular to the conveying mechanism (10). The two ends of the second slide (321) are respectively connected to two first traveling members (312). The second slide (321) is provided with a second traveling member (322), which can move along the second slide (321). The Z-axis drive module (33) includes a telescopic cylinder, which is connected to the second traveling member (322), and the output shaft of the telescopic cylinder is connected to the wiping member (34).

7. The carrier plate cleaning device according to claim 1, characterized in that, The reading mechanism (20) includes a mounting bracket (21) and a snapshot camera (22). The mounting bracket (21) is connected to the conveying mechanism (10). The snapshot camera (22) is mounted on the mounting bracket (21). The snapshot camera (22) is used to acquire images of the carrier plate (50) entering the reading station in order to obtain the serial number information of the carrier plate (50).

8. The carrier plate cleaning device according to claim 1, characterized in that, The reading mechanism (20) includes a tag reader, which is disposed on the conveying mechanism (10). The tag reader is used to read the electronic tag of the carrier plate (50) entering the reading station to obtain the serial number information of the carrier plate (50).

9. The carrier plate cleaning device according to claim 1, characterized in that, The wiping device (34) includes a brush, a cloth brush, or a silicone brush.

10. A coating apparatus, characterized in that, The carrier plate cleaning device includes any one of claims 1-9 above.

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