Micro-nano bubble generating device and cleaning equipment

Abstract

The utility model discloses a micro-nano bubble generating device and cleaning equipment, and belongs to the technical field of cleaning equipment. The micro-nano bubble generating device comprises a pump, a jet device, a mixing structure and a nozzle assembly, wherein the jet device is connected with the pump; the mixing structure is connected with the jet device and is provided with a mixing pipe; the nozzle assembly is located on the side, away from the jet device, of the mixing structure and connected with the mixing structure. Gas and liquid are mixed for the first time in the jet device, and a gas-liquid mixture is mixed with gas in the mixing structure for the second time at the position of the mixing pipe. By adopting a secondary mixing mode, gas generated by bubble gathering in the barrel body can be continuously mixed, the problems that a pipeline system is filled with a large amount of accumulated gas, large bubbles appear in the tank body, the large bubbles are broken to generate violent fluctuation, silicon wafers vibrate to generate cracks, position deviation or fragmentation and the like are solved, and it is guaranteed that micro-nano bubbles are uniformly and stably output; the efficiency of generating the micro-nano bubbles is improved, and a good cleaning effect is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of micro-nano bubble generating device and cleaning equipment, belong to cleaning equipment technical field. BACKGROUND

[0002] Micro-nano bubble generating device is a kind of equipment that mixes water and gas and generates micro-nano bubble, high-speed liquid flow passes through micropore, forms low-pressure area, causes gas in liquid to precipitate and form micro-nano bubble.Micro-nano bubble generating device cleans silicon wafer, mixes gas and cleaning liquid under high pressure, and forms micro-nano bubble by special nozzle, sprays cleaning liquid containing micro-nano bubble to the surface of silicon wafer, bubble breaks on the surface of silicon wafer, and generates strong micro-impact wave.These impact waves can penetrate into the microstructure of silicon wafer, remove micro-particles and organic contaminants.

[0003] At present, micro-nano bubble generating device in prior art is usually provided with nozzle in barrel, jet flow device is preliminarily mixed and then divided into two streams to enter barrel, micro-bubble is generated by internal nozzle, and micro-bubble is collected in barrel and then flows to working tank.The micro-nano bubble generated by nozzle will adhere to barrel wall and gradually accumulate into large bubble, which will cause large fluctuation of liquid surface when passing through outlet and entering tank through pipeline, resulting in problems such as crack, position deviation or fragmentation of silicon wafer caused by vibration of silicon wafer;And the structure has low micro-nano bubble concentration, poor effect and poor stability, which affects the cleaning effect of silicon wafer. UTILITY MODEL CONTENT

[0004] The utility model provides a kind of micro-nano bubble generating device and cleaning equipment, to solve the problem that micro-nano bubble in prior art adheres to barrel wall and gradually accumulates into large bubble, and large bubble floats up and breaks, which will cause large fluctuation of liquid surface, resulting in problems such as crack, position deviation or fragmentation of silicon wafer caused by vibration of silicon wafer;And the problem that the micro-nano bubble generated has low concentration, poor effect and poor stability, which affects the cleaning effect of silicon wafer.

[0005] The utility model realizes the following technical scheme:

[0006] In the first aspect, the utility model provides a kind of micro-nano bubble generating device, comprising:

[0007] Pump;

[0008] Jet flow device, the jet flow device is connected with the pump;

[0009] Mixing structure, the mixing structure is connected with the jet flow device, and the mixing structure is provided with mixing pipe;

[0010] A nozzle assembly is located on the side of the mixing structure away from the jet device and is connected to the mixing structure.

[0011] In an embodiment of the present application, the mixing pipe is provided with a hole. The gas-liquid mixture enters the mixing pipe, and the gas in the mixing structure is sucked into the mixing pipe through the hole in the mixing pipe under the driving of the gas-liquid mixture, mixed with the gas-liquid mixture, and forms a second mixing. The second mixing mode can continuously mix the gas generated by the bubble aggregation in the barrel, avoid the pipeline system from being filled with a large amount of accumulated gas, prevent large bubbles from appearing in the tank, prevent the large bubbles from breaking and causing violent fluctuations, ensure uniform and stable output of micro-nano bubbles, and improve the cleaning effect of the silicon wafer.

[0012] In an embodiment of the present application, the mixing structure is provided with a liquid inlet pipe, and the liquid inlet pipe is connected to the mixing pipe. The length of the liquid inlet pipe should ensure that the liquid inlet pipe can penetrate into the liquid in the mixing structure, prevent the gas-liquid mixture from impacting the liquid surface when input into the mixing structure, generate a large fluctuation, and generate a large number of large bubbles in the mixing structure.

[0013] In an embodiment of the present application, the nozzle assembly comprises a connecting pipe and a second barrel, the connecting pipe is tangentially connected to the second barrel, and the side of the connecting pipe away from the second barrel is connected to the mixing structure. The gas-liquid mixture directly flows into the second barrel without colliding with the second barrel, reducing the fluctuation of the liquid surface and the generation of large bubbles.

[0014] In an embodiment of the present application, the nozzle assembly further comprises a first spray head and a second spray head, the first spray head is located at both ends of the second barrel, and the second spray head is connected to the second barrel.

[0015] In an embodiment of the present application, the first spray head is a V-shaped spray head. By increasing or decreasing the pressure, high-speed rotation of the gas-liquid in the second barrel is realized, the first spray head sprays the broken bubbles, and the nozzle assembly generates more micro-nano bubbles.

[0016] In an embodiment of the present application, a flow stabilizing cover is provided, and the flow stabilizing cover is sleeved on the outer periphery of the nozzle assembly. The flow stabilizing cover uniformly and stably transports the gas-liquid mixture containing micro-nano bubbles sprayed by the spray head assembly into the tank.

[0017] In an embodiment of the utility model, including groove and pipeline, the steady flow cover is connected with the groove, the pipeline is connected with the pump and the groove respectively. Make the whole micro - nanometer bubble generating device form a complete circulation system, the gas - liquid mixture in the groove reenters the micro - nanometer bubble generating device through the pipeline, and new micro - nanometer bubble is produced, thereby improve the concentration of micro - nanometer bubble, and improve the efficiency of micro - nanometer bubble production.

[0018] In an embodiment of the utility model, still include air inlet and water inlet, the air inlet is connected with the jet flow ware, the water inlet is connected with the groove.

[0019] Secondly, the utility model provides a kind of cleaning equipment, including the micro - nanometer bubble generating device, the cleaning equipment further include pure water pipeline and gas source system, the pure water pipeline is connected with the air inlet, and the gas source system is connected with the air inlet.

[0020] Beneficial effects

[0021] The micro - nanometer bubble generating device provided by the utility model includes a jet flow device, a mixing structure and a nozzle assembly, a mixing pipe is arranged in the mixing structure, gas and liquid are mixed for the first time in the jet flow device, and the gas-liquid mixture is mixed with the gas in the mixing structure for the second time at the mixing pipe.Using the secondary mixing mode, the gas generated by the bubble aggregation in the barrel can be continuously mixed, the pipeline system is prevented from being filled with a large amount of accumulated gas, large bubbles in the groove are prevented from occurring, and problems such as cracks, position deviation or fragmentation of the silicon wafer caused by the rupture of large bubbles and the resulting violent fluctuations are avoided, so that the micro - nanometer bubbles are uniformly and stably outputted, and the cleaning effect of the silicon wafer is improved.

[0022] The nozzle assembly of the micro - nanometer bubble generating device includes a first nozzle and a second nozzle, the first nozzle is a V-shaped nozzle, the high-speed rotational flow of gas and liquid in the second barrel is realized by increasing or decreasing the pressure, the first nozzle sprays the broken bubbles, so that more micro - nanometer bubbles are generated by the nozzle assembly. The micro - nanometer bubble generating device is connected by a pipeline, so that the entire micro - nanometer bubble generating device forms a complete circulation system, the gas-liquid mixture in the groove reenters the micro - nanometer bubble generating device through the pipeline, and new micro - nanometer bubbles are generated, so that the concentration of micro - nanometer bubbles is improved, and the efficiency of micro - nanometer bubble generation is improved. BRIEF DESCRIPTION OF DRAWINGS

[0023] Fig. 1 The utility model provides a front view of micro - nanometer bubble generating device.

[0024] Fig. 2 The utility model provides a perspective view of mixing structure.

[0025] Fig. 3The utility model provides a nozzle assembly's perspective view.

[0026] In the drawing: 1, pump; 2, jet; 3, pressure gauge; 4, mixing structure; 41, first bucket body; 42, first connecting piece; 43, mixing pipe; 44, second connecting piece; 45, liquid inlet pipe; 46, liquid outlet; 47, liquid inlet; 5, nozzle assembly; 51, connecting pipe; 52, second bucket body; 53, first nozzle; 54, second nozzle; 6, steady flow cover; 7, groove; 8, pipeline; 9, air inlet; 10, water inlet. DETAILED DESCRIPTION

[0027] The technical scheme in the embodiments of the utility model will be described clearly and completely below in conjunction with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative work belong to the protection scope of the utility model.

[0028] In the utility model, unless another explicit provision and limitation, the terms "connected", "connected", "fixed" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or be integrated;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through intermediate medium, can be the communication of two elements or the interaction of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0029] In the utility model, unless another explicit provision and limitation, the first feature is "on" or "under" the second feature can include the direct contact of the first and second features, or the contact of the first and second features through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes the first feature directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than the second feature. The first feature "under", "below" and "below" the second feature includes the first feature directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than the second feature.

[0030] As Figs. 1 to 3As shown, the present application provides a micro-nano bubble generating device for generating micro-nano bubbles, cleaning silicon wafers, and removing small particles and organic pollutants on the surface of the silicon wafers. The micro-nano bubble generating device comprises a pump 1, a jet device 2, a mixing structure 4, a nozzle assembly 5, a flow stabilizing cover 6, and a tank 7. The pump 1 comprises an inlet and an outlet. The outlet of the pump 1 is connected to the jet device 2, and the inlet is connected to the tank 7 through a pipeline 8. The liquid at the inlet of the pump 1 is provided by the tank 7 and a pure water pipeline. The liquid at the inlet is pressurized by the pump 1 and then delivered to the jet device 2 through the outlet. The pump 1 is mainly used for pressurizing the liquid. One side of the jet device 2 is connected to an air inlet 9. The gas is pressurized and then enters the jet device 2 from the air inlet 9 and is mixed with the liquid input by the pump 1 to form a gas-liquid mixture.

[0031] In some embodiments, the side of the jet device 2 away from the pump 1 is connected to the mixing structure 4. The air inside the mixing structure 4 is mixed with the gas-liquid mixture for a second time, so that more gas is mixed into the liquid, which is beneficial to the formation of more micro-nano bubbles in the later stage. The side of the mixing structure 4 away from the jet device 2 is connected to the nozzle assembly 5, which is used to form micro-nano bubbles. The flow stabilizing cover 6 is arranged outside the nozzle assembly 5. The nozzle assembly 5 and the flow stabilizing cover 6 are both installed in the tank 7. The gas-liquid mixture containing micro-nano bubbles sprayed by the nozzle assembly 5 is uniformly and stably delivered into the tank 7 through the flow stabilizing cover 6.

[0032] In some embodiments, a water inlet 10 is installed on one side of the tank 7 for inputting pure water into the tank 7. The two ends of the pipeline 8 are respectively connected to the tank 7 and the inlet of the pump 1, so that the entire micro-nano bubble generating device forms a complete circulation system. The gas-liquid mixture in the tank 7 reenters the micro-nano bubble generating device through the pipeline 8 and generates new micro-nano bubbles, thereby improving the concentration of the micro-nano bubbles and the efficiency of the micro-nano bubble generation.

[0033] Further, in some embodiments, the mixing structure 4 comprises a first barrel 41. The top of the first barrel 41 is provided with a liquid inlet 47 connected to the output end of the jet device 2. The gas-liquid mixture mixed for the first time by the jet device 2 enters the mixing structure 4 through the liquid inlet 47. A first connecting piece 42 is arranged between the liquid inlet 47 and the first barrel 41. The two ends of the first connecting piece 42 are respectively connected to the liquid inlet 47 and the first barrel 41, and the first connecting piece 42 is sleeved on the outer periphery of the liquid inlet 47. The first connecting piece 42 is a variable-diameter pipe, so that when the diameter of the pipe mouth of the liquid inlet 47 is different from the barrel diameter of the first barrel 41, the two can be connected.

[0034] Further, in some embodiments, the side of the liquid inlet 47 away from the jet 2 is connected with a mixing pipe 43, the mixing pipe 43 is located in the first barrel 41, and the side of the mixing pipe 43 is provided with a hole. The gas-liquid mixture enters the mixing pipe 43 through the liquid inlet 47, and the gas in the first barrel 41 is sucked into the mixing pipe 43 through the hole on the mixing pipe 43 under the driving of the gas-liquid mixture, and is mixed with the gas-liquid mixture to form a second mixing. By using the two-mixing mode, the gas generated by the aggregation of bubbles in the barrel can be continuously mixed, the pipeline system can be prevented from being filled with a large amount of accumulated gas, and large bubbles can be prevented from appearing in the tank 7, so that the breaking of the large bubbles generates violent fluctuations, the micro-nano bubbles are uniformly and stably output, and the cleaning effect of the silicon wafer is improved.

[0035] Further, in some embodiments, the side of the mixing pipe 43 away from the liquid inlet 47 is connected with the liquid inlet pipe 45, and a second connecting piece 44 is arranged between the mixing pipe 43 and the liquid inlet pipe 45. The second connecting piece 44 is also a variable-diameter pipe, the diameter of the liquid inlet pipe 45 is smaller than the diameter of the mixing pipe 43, and the two are connected through the second connecting piece 44. When the gas-liquid mixture flows through the second connecting piece 44, it flows from a large diameter to a small diameter, which increases the flow rate of the gas-liquid mixture and accelerates the flow of the gas-liquid mixture into the first barrel 41. The bottom of the first barrel 41 is provided with a liquid outlet 46, the liquid outlet 46 is connected with the nozzle assembly 5, the liquid outlet 46 is used for discharging the gas-liquid mixture in the first barrel 41, and the liquid outlet 46 is arranged at the bottom, so that the accumulated gas and the larger bubbles are not sent into the outlet, and the stability of the device is ensured.

[0036] Specifically, in the embodiment, the length of the liquid inlet pipe 45 should ensure that the liquid inlet pipe 45 can penetrate into the liquid in the first barrel 41, so as to prevent the gas-liquid mixture from impacting the liquid surface when input into the first barrel 41, generating a large fluctuation, and generating a large number of large bubbles in the first barrel 41.

[0037] Further, in some embodiments, the nozzle assembly 5 includes a connecting pipe 51, a second barrel 52, a first nozzle 53, and a second nozzle 54. The connecting pipe 51 is tangentially connected with the second barrel 52, and the side away from the second barrel 52 is connected with the liquid outlet 46 of the mixing structure 4. The gas-liquid mixture after the second mixing flows into the second barrel 52 along the connecting pipe 51. Since the connecting pipe 51 and the second barrel 52 are tangentially connected, the gas-liquid mixture directly flows into the second barrel 52 without colliding with the second barrel, thereby reducing the fluctuation of the liquid surface and the generation of large bubbles.

[0038] Further, in some embodiments, the number of first nozzles 53 is two, located at both ends of the second barrel 52, the first nozzles 53 are V-shaped nozzles, and by increasing or decreasing the pressure, the high-speed rotation of the gas-liquid in the second barrel 52 is realized, the first nozzles 53 spray the broken bubbles, so that the nozzle assembly 5 generates more micro-nano bubbles and flows into the flow stabilizer 6. At the same time, when the gas-liquid mixture is sprayed from the nozzle assembly 5 into the tank 7, the outlet is small, and when the gas-liquid mixture is sprayed, the pressure suddenly decreases, the gas dissolved in the water is released in the form of micro-nano pores, so that more micro-nano bubbles can be obtained. The second nozzles 54 are tangentially arranged at the adjacent position of the connecting pipe 51, and the second nozzles 54 are also V-shaped nozzles, which are used to discharge the gas-liquid mixture and the micro-nano bubbles, and reduce the problem of collision or accumulation of the existing gas-liquid mixture in the second barrel 52 and the new gas-liquid mixture.

[0039] Further, in some embodiments, a pressure gauge 3 is arranged between the jet device 2 and the mixing structure 4, which can detect the pressure value inside the pipeline.

[0040] In addition, the application also provides a cleaning equipment, which comprises the above-mentioned micro-nano bubble generating device, and in some embodiments, the cleaning equipment further comprises a pure water pipeline and an air source system. The pure water pipeline is connected with the tank 7 through the water inlet 10 and inputs pure water into the tank 7 to provide liquid for the micro-nano bubble generating device. The air source system comprises a pressure reducing valve, a flow meter and the like, and is connected with the jet device 2 through the air inlet 9. The air source system is used for compressing air and conveying the compressed air into the jet device 2 through the air inlet 9 to provide air source for the micro-nano bubble generating device.

[0041] The working principle of the utility model is as follows: the pump 1 is connected with the tank 7 through the pipeline 8, the tank 7 provides liquid for the pump 1, the pump 1 pressurizes the liquid in the pipeline and inputs it into the jet device 2, the air inlet 9 inputs the pressurized gas into the jet device 2, the gas and the liquid are mixed in the jet device 2 to form a gas-liquid mixture, the gas-liquid mixture is input into the mixing structure 4 from the jet device 2 and is mixed with the gas in the first barrel 41 for the second time, the twice-mixed gas-liquid mixture flows into the nozzle assembly 5 through the liquid outlet 46, the gas-liquid mixture rotates at high speed in the second barrel 52, micro-nano bubbles are generated under the action of the first nozzle 53 and the second nozzle 54, and are discharged into the flow stabilizer 6, the flow stabilizer 6 uniformly and stably conveys the gas-liquid mixture containing micro-nano bubbles sprayed from the nozzle assembly 5 into the tank 7. The silicon wafer is placed in the tank 7, the micro-nano bubbles break on the surface of the silicon wafer and generate strong micro-impact waves, these impact waves can penetrate into the microstructure of the silicon wafer and remove the micro-particles and organic pollutants. At the same time, the specific surface area of the micro-nano bubbles is large, which can effectively adsorb and remove the impurities on the surface of the silicon wafer.

[0042] Any combination of the technical features in the above embodiments can be made, and for the sake of brevity, not all possible combinations of the technical features in the above embodiments are described, however, as long as the combination of the technical features does not exist in contradiction, it should be considered as falling within the scope of the present disclosure.

[0043] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the present application. It should be pointed out that, for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all fall within the protection scope of the present application.

[0044] The principles and implementation manners of the present application are described by using specific embodiments in the present application, and the above embodiment description is only used to help understand the method and core idea of the present application. It should be pointed out that, for ordinary skilled persons in the art, several modifications and improvements can be made without departing from the principles of the present application, and these modifications and improvements also fall within the protection scope of the present application claims. Therefore, the protection scope of the present application patent should be subject to the appended claims.

Claims

1. A micro-nano bubble generating device, characterized by, It comprises: a pump (1); a jet device (2) connected with the pump (1); a mixing structure (4) connected with the jet device (2), the mixing structure (4) being provided with a mixing pipe (43); a nozzle assembly (5) located on the side of the mixing structure (4) away from the jet device (2) and connected with the mixing structure (4).

2. The micro-nano bubble generating device according to claim 1, wherein The mixing pipe (43) is provided with a hole. 3.The micro-nano bubble generating device according to claim 2, wherein The mixing structure (4) is provided with a liquid inlet pipe (45) connected with the mixing pipe (43). 4.The micro-nano bubble generating device according to claim 1, wherein The nozzle assembly (5) comprises a connecting pipe (51) and a second barrel (52), the connecting pipe (51) being tangentially connected with the second barrel (52), and the side of the connecting pipe (51) away from the second barrel (52) being connected with the mixing structure (4).

5. The micro-nano bubble generating device according to claim 4, wherein The nozzle assembly (5) further comprises a first spray head (53) and a second spray head (54), the first spray head (53) being located at both ends of the second barrel (52), and the second spray head (54) being connected with the second barrel (52). 6.The micro-nano bubble generating device according to claim 5, wherein The first spray head (53) is a V-shaped spray head.

7. The micro-nano bubble generating device according to claim 1, wherein It comprises a flow stabilizing cover (6) sleeved on the outer periphery of the nozzle assembly (5). 8.The micro-nano bubble generating device according to claim 7, wherein It comprises a groove (7) and a pipeline (8), the flow stabilizing cover (6) being connected with the groove (7), and the pipeline (8) being connected with the pump (1) and the groove (7) respectively. 9.The micro-nano bubble generating device according to claim 8, wherein It further comprises an air inlet (9) connected with the jet device (2) and a water inlet (10) connected with the groove (7).

10. A cleaning apparatus characterized by, It comprises a micro-nano bubble generating device according to any one of claims 1-9, and further comprises a pure water pipeline connected with the air inlet (9) and a gas source system connected with the water inlet (10). It comprises a micro-nano bubble generating device according to any one of claims 1-9, and further comprises a pure water pipeline connected with the air inlet (9) and a gas source system connected with the water inlet (10).

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