Melting device and production device of quartz crucible

Abstract

The utility model relates to the technical field of quartz crucible production, in particular to a melting device and a production device of a quartz crucible, which are suitable for melting raw materials of an upper opening of the quartz crucible and comprise a laser transmitter and a support component, wherein the supporting assembly can be rotationally switched between a first angle and a second angle, so that the laser transmitter can be switched to an irradiation state and a receding state; the device has the beneficial effects that a molten layer can be molten on the inner surface of the upper opening raw material of the quartz crucible in advance through the laser emitter switched to the irradiation state, so that the possibility that gas enters from the upper opening raw material in the main melting process of the quartz crucible is blocked, and the ideal quality of the transparent layer of the upper opening raw material of the crucible is obtained; and the problem of bubbles at the upper opening of the quartz crucible is solved from the source.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of quartz crucible production, especially to a quartz crucible melting device and production device. BACKGROUND

[0002] In the melting production process of the quartz crucible, due to the shape characteristics of the crucible product, the raw material density below the mold is greater, and the amount of stacked raw material is also more, combined with the processing limitations of the existing electric arc melting furnace equipment, it is difficult to achieve uniform distribution of heat in the mold within a short time during the melting and materializing process of the electrode, especially at the upper raw material position of the mold, which often cannot be melted at the same time as the inner material, resulting in gas entering the forming material through the upper end surface of the unmelting forming material during the melting process. Due to the melting of the inner layer to form a molten state, the gas is accumulated in the upper part of the crucible, and the gas cannot be discharged after the upper raw material is melted, thereby forming a relatively concentrated and large number of bubble groups in the transparent layer of the upper raw material of the crucible product.

[0003] Since the bubbles in the transparent layer of the upper raw material of the quartz crucible have a certain impact on the single yield and crystal formation rate during the crystal pulling process, both the crucible manufacturer and the crystal pulling factory always pay close attention to the problem of bubbles in the upper raw material of the crucible.

[0004] In the prior art, the generation of bubbles is mainly reduced by optimizing the melting process parameters, but the effect is limited. Or increase the cutting height of the upper raw material of the quartz crucible to cut the transparent layer of the upper raw material rich in bubbles, resulting in a large amount of material and labor waste. UTILITY MODEL CONTENT

[0005] (I) Technical problem to be solved

[0006] In view of the above-mentioned shortcomings and deficiencies of the prior art, the utility model provides a quartz crucible melting device and production device, which solves the technical problems that the effect of reducing bubble generation by optimizing the melting process parameters in the prior art is limited, and increasing the cutting height of the upper raw material of the quartz crucible to cut the transparent layer of the upper raw material rich in bubbles causes a large amount of material and labor waste.

[0007] (II) Technical scheme

[0008] In order to achieve the above-mentioned purposes, the utility model adopts the main technical scheme comprising:

[0009] The utility model provides a kind of melting device of quartz crucible, it is suitable for melting the upper mouth raw material of quartz crucible, including laser emitter and support component;Wherein, support component can be rotated between first angle and second angle switching, to make laser emitter can switch to irradiation state and let state;In irradiation state, laser emitter irradiates the upper mouth raw material of quartz crucible, to make the upper mouth raw material of quartz crucible form first thickness of molten layer on the inner surface close to quartz crucible axis;In let state, laser emitter and support component all let out the upper area of quartz crucible and rotate to position away from quartz crucible.

[0010] The utility model provides a kind of quartz crucible production device, including the melting device of quartz crucible in above-mentioned technical scheme, still including mould and water cooling jacket, water cooling jacket forms the accommodating cavity with top opening, mould is supported in accommodating cavity;Still including main heating component, main heating component is supported in the top of mould, and can be vertically moved between heating state and disengagement state switching;When main heating component works, laser transmitter keeps let state;In heating state, main heating component can be from the top opening of mould and enter the inner chamber of mould;In disengagement state, main heating component and the top of mould are vertically spaced apart.

[0011] (Three) beneficial effects

[0012] The utility model has the beneficial effects that: the melting device and production device of quartz crucible of the utility model, when producing quartz crucible, through the laser emitter switched to irradiation state, can melt molten layer in advance on the inner surface of the upper mouth raw material of quartz crucible, to block the possibility of gas from the upper mouth raw material in the main melting process of quartz crucible, to obtain the quality of more ideal crucible upper mouth raw material transparent layer, solve the problem of quartz crucible upper mouth bubble from source. ACCURACY OF DRAWINGS

[0013] Figure 1 It is the structure schematic drawing that the utility model laser emitter is in irradiation state;

[0014] Figure 2 It is the structure schematic drawing that the utility model laser emitter is in let state;

[0015] Figure 3 It is the system block diagram of the utility model controller, laser emitter and rotating drive piece;

[0016] Figure 4 It is the system block diagram of the utility model controller, laser emitter, rotating drive piece, swing drive piece and telescopic drive piece;

[0017] Figure 5The system block diagram of the controller, the laser transmitter, the visual camera, the rotating driving part, the swinging driving part and the telescopic driving part is shown in the figure.

[0018] Figure 6 The structure schematic view of the main heating assembly in the heating state is shown in the figure.

[0019] Figure 7 The structure schematic view of the main heating assembly in the disengaging state is shown in the figure.

[0020]

Explanation of the reference signs

[0021] 100, quartz crucible;

[0022] 200, upper opening raw material;

[0023] 300, mold;

[0024] 400, main heating assembly;

[0025] 1, laser transmitter;

[0026] 2, supporting assembly; 21, cantilever; 22, rotating rod;

[0027] 3, controller;

[0028] 4, rotating driving part;

[0029] 5, telescopic driving part;

[0030] 6, swinging supporting part;

[0031] 7, swinging driving part;

[0032] 8, visual camera. DETAILED DESCRIPTION

[0033] In order to better explain the utility model, so as to facilitate understanding, the following will be combined with the attached Figures 1-7 , through specific embodiment, the utility model is described in detail. Wherein, the "up", "down" and other orientation nouns mentioned in this article are with the orientation of the figure as the reference. Figure 1

[0034] Example 1:

[0035] Reference Figure 1 and Figure 2 ​The embodiment of the utility model provides a kind of melting device of quartz crucible, it is suitable for melting the upper raw material 200 of quartz crucible 100, including laser emitter 1 and support assembly 2.Wherein, support assembly 2 can be rotated between first angle and second angle, to make laser emitter 1 can switch to irradiation state and let state.In irradiation state, laser emitter 1 irradiates the upper raw material 200 of quartz crucible 100, to make the inner surface of the upper raw material 200 of quartz crucible 100 close to the axis of quartz crucible 100 form the first thickness of molten layer.First thickness is 2-3mm.In let state, laser emitter 1 and support assembly 2 all let out the upper area of quartz crucible 100 and rotate to the position away from quartz crucible 100.

[0036] In the embodiment, when producing quartz crucible 100, by switching to the laser emitter 1 of irradiation state, can melt layer in advance in the inner surface of the upper raw material 200 of quartz crucible 100, to block the possibility of entering gas from the upper raw material 200 in the main melting process of quartz crucible 100, to obtain the quality of more ideal crucible upper raw material 200 transparent layer, solve the problem of quartz crucible 100 upper bubble from source.

[0037] Specifically, laser emitter 1 can use high-energy density, wavelength tunable laser emitter 1, ensure accurate heating and local melting of quartz material, while reducing the heat affected zone, maintain the overall structural stability of material.

[0038] By limiting the thickness of molten layer, the reliability of its isolation function can be improved, while reducing its influence on the subsequent main melting process of quartz crucible 100 material.By further limiting the thickness of molten layer to 2-3mm, the reliability of its isolation function can be further improved, while reducing its influence on the subsequent main melting process of quartz crucible 100 material.

[0039] Embodiment 2:

[0040] Referring to Figure 1 , Figure 2 and Figure 3 , the embodiment of the utility model further has the following technical solutions in addition to all the technical solutions of the above-mentioned embodiments:

[0041] Support assembly 2 includes horizontally extending cantilever 21 and vertically extending rotating rod 22, one end of cantilever 21 and one end of rotating rod 22 are fixedly connected, and laser emitter 1 is supported on the other end of cantilever 21.The melting device of quartz crucible further includes controller 3 and driving set connected with controller 3, and driving set includes rotating drive 4, and rotating drive 4 can be rotated under the control of controller 3 between first angle and second angle to switch.

[0042] Before the melting starts, the laser emitter 1 is supported at the end of the cantilever 21, and the rotating rod 22 is in the initial position, i.e. the second angle, i.e. the position for making room. When it is necessary to start melting the upper raw material 200 of the quartz crucible 100, the controller 3 sends a command to the rotating drive 4 to drive the rotating rod 22 to rotate around the fixed shaft to the first angle, at this time, the laser emitter 1 is aligned with the upper raw material 200 of the quartz crucible 100, and starts emitting laser to melt. When the melting is completed, the controller 3 sends a command to the rotating drive 4 again to drive the rotating rod 22 to rotate around the fixed shaft back to the second angle to make room for the subsequent processing steps.

[0043] On the automatic production line, the melting device can continuously perform the above operation to realize efficient and continuous production of the quartz crucible 100, improve the production efficiency of the quartz crucible 100, and shorten the production cycle.

[0044] The cantilever 21 and the rotating rod 22 form an L-shaped support, which can well match the shape of the quartz crucible 100. At the same time, it also has a lower cost.

[0045] The rotating rod 22 is a telescopic rod, so that the irradiation height of the laser emitter 1 matches the height of the upper raw material 200 of the quartz crucible 100, and thus the melting device can better adapt to the use requirements of quartz crucibles 100 of different heights. The drive assembly further includes a telescopic drive 5, which can extend and retract the rotating rod 22. The telescopic drive 5 is connected with the controller 3, so as to realize intelligent control of the length of the rotating rod 22, and further improve the use efficiency of the melting device.

[0046] Embodiment 3:

[0047] With reference to Figure 1 , Figure 2 and Figure 4 , the embodiments of the utility model further have the following technical solutions in addition to all the technical solutions of the above embodiments:

[0048] The support assembly 2 further includes a swing support 6, and the laser emitter 1 is supported at the end of the cantilever 21 through the swing support 6, so that the laser emitter 1 can swing in the front and back directions within a limited range. The drive assembly further includes a swing drive 7 connected with the controller, and the swing drive 7 can drive the laser emitter 1 to swing.

[0049] In this embodiment, the swing support 6 is installed at the end of the cantilever 21, allowing the laser emitter 1 to swing in the front and back directions within a limited range. This design increases the flexibility of the laser emitter 1 in the horizontal plane, allowing it to adjust the irradiation position more accurately. The controller 3 serves as a central control unit, responsible for receiving operation instructions and controlling the operation of each component according to the preset program.

[0050] The swing driving member 7 is connected with the swing support member 6, and is responsible for driving the laser emitter 1 to swing in the front-back direction within a limited range under the instruction of the controller 3. The swing driving member 7 can adopt a linear motor, an electric push rod, or a hydraulic / pneumatic cylinder driving mode.

[0051] By adding the swing support member 6 and the swing driving member 7, the melting device further enhances the flexibility of the laser emitter 1 in the horizontal plane, so that it can more accurately adjust the irradiation position and adapt to quartz crucibles 100 of different shapes and sizes.

[0052] The automatic control system greatly shortens the production cycle and improves the production efficiency. At the same time, the precise laser melting technology also reduces the waste rate and further reduces the production cost.

[0053] Embodiment 4:

[0054] With reference to Figure 1 , Figure 2 and Figure 5 , the embodiments of the utility model further have the following technical solutions in addition to all the technical solutions of the above embodiments:

[0055] The melting device further comprises a visual camera 8 connected with the controller 3, and the visual camera 8 is supported on the support assembly 2 or the laser emitter 1 to identify the upper raw material 200 of the quartz crucible 100. Among them, the visual camera 8, the controller 3 and the driving set form the state and position control channel of the visual camera 8.

[0056] In this embodiment, the visual camera 8 is supported on the cantilever 21 or the laser emitter 1, which is used to shoot the image of the upper raw material 200 of the quartz crucible 100 in real time, and transmit the image data to the controller 3 for identification and positioning. The position and angle of the visual camera 8 can be adjusted as needed to ensure that the target area can be clearly shot.

[0057] The controller 3 starts the visual camera 8 to shoot the image of the upper raw material 200 of the quartz crucible 100. Through the image processing algorithm, the controller 3 identifies the shape, position and size of the upper raw material 200 of the quartz crucible 100.

[0058] According to the result of visual identification, the controller 3 sends instructions to the rotating driving member 4 and the swing driving member 7 to adjust the angle and position of the laser emitter 1, so as to ensure that the laser beam can accurately irradiate the target area of the upper raw material 200 of the quartz crucible 100. Subsequently, the controller 3 starts the laser emitter 1 to perform the melting operation.

[0059] During the melting process, the visual camera 8 can continue to shoot the image of the melting process for the controller 3 to monitor and adjust in real time.

[0060] By integrating the vision camera 8 and the image processing algorithm, the melting device realizes automatic recognition and positioning of the raw material 200 on the upper opening of the quartz crucible 100, improves the accuracy and stability of the melting operation, and greatly improves the production efficiency of the quartz crucible 100. At the same time, real-time melting process monitoring and adjustment ensure the quality of the melting layer.

[0061] Embodiment 5:

[0062] Figures 1-7 The embodiment of the utility model provides a quartz crucible production device, including the melting device of quartz crucible in any one of above-mentioned embodiments, still include mould 300 and water cooling jacket, water cooling jacket forms the containing cavity of opening top, mould 300 is supported in containing cavity. Quartz crucible production device still includes main heating component 400, main heating component 400 is supported in the top of mould 300, and can be vertically moved and switches between heating state and disengagement state. In heating state, main heating component 400 can from the top opening of mould 300 stretch into the inner chamber of mould 300. In disengagement state, main heating component 400 and the top of mould 300 are vertically spaced apart.

[0063] Main heating component 400 is the main melting component of quartz crucible 100 raw material, such as setting up as graphite electrode, cooperation can vertically lift mechanical arm and complete the switching of heating state and disengagement state. Since when main heating component 400 works, laser transmitter keeps the state of giving way, so it will not have any influence on the work of main heating component 400.

[0064] Mould 300 is used for supporting and shaping the melted quartz raw material, to ensure that the finally formed quartz crucible 100 has the required shape and size. The water cooling jacket forms an open-top containing cavity, and the mold 300 is supported in the containing cavity. The water cooling jacket effectively removes the heat generated during the heating process by circulating cooling water, preventing the device from overheating and protecting the surrounding equipment.

[0065] Main heating component 400 is supported above the mold 300 and can be vertically moved and switched between the heating state and the disengagement state. In the heating state, the main heating component 400 extends into the inner cavity of the mold 300 to heat the quartz raw material. In the disengagement state, the main heating component 400 is vertically spaced apart from the top of the mold 300 to perform other operations.

[0066] It can be understood that the above-mentioned embodiments 1-5, except for the contradictory parts, can be freely combined to form other embodiments of the utility model.

[0067] In the description of the utility model, it is understood that the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first", "second" can be explicitly or implicitly included one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0068] In the utility model, unless otherwise specifically defined and limited, the terms "installation", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integrated. It can be mechanical connection, or electrical connection. It can be directly connected, or indirectly connected through an intermediate medium. It can be the communication between two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0069] In the utility model, unless otherwise specifically defined and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature, can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature, can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is lower than that of the second feature.

[0070] The term "includes" or any other similar term is intended to cover non-exclusive inclusion, so that the process, article or equipment / device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes the elements inherent in the process, article or equipment / device.

[0071] So far, the technical scheme of the utility model has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the utility model is obviously not limited to these specific embodiments. Without deviating from the principles of the utility model, those skilled in the art can make equivalent changes or replacements to related technical features, and the technical scheme after the changes or replacements will fall within the protection scope of the utility model.

Claims

1. A melting apparatus of a quartz crucible adapted to melt an upper mouth raw material (200) of a quartz crucible (100), characterized by: The application relates to a laser emitter (1) comprising a quartz crucible (100) and a support assembly (2) supporting the laser emitter (1). The support assembly (2) is capable of rotating between a first angle and a second angle to switch the laser emitter (1) to an irradiation state and a giving-up state. In the irradiation state, the laser emitter (1) irradiates the upper raw material (200) of the quartz crucible (100) to form a first-thickness molten layer on the inner surface of the quartz crucible (100) close to the axis of the quartz crucible (100); in the giving-up state, the laser emitter (1) and the support assembly (2) give up the upper area of the quartz crucible (100) and rotate to a position away from the quartz crucible (100).

2. The quartz crucible melting apparatus according to claim 1, wherein: The support assembly (2) comprises a horizontally-extending cantilever (21) and a vertically-extending rotating rod (22), one end of the cantilever (21) is fixedly connected with one end of the rotating rod (22), and the laser emitter (1) is supported on the other end of the cantilever (21).

3. The quartz crucible melting apparatus according to claim 2, wherein: The application further comprises a controller (3) and a driving set connected with the controller (3), the driving set comprises a rotating driving member (4) capable of driving the rotating rod (22) to rotate between the first angle and the second angle under the control of the controller (3).

4. The quartz crucible melting apparatus according to claim 3, wherein: The rotating rod (22) is a telescopic rod to match the irradiation height of the laser emitter (1) with the height of the upper raw material (200) of the quartz crucible (100); the driving set further comprises a telescopic driving member (5) connected with the controller (3) and capable of driving the rotating rod (22) to telescope.

5. The quartz crucible melting apparatus according to claim 4, wherein: The support assembly (2) further comprises a swing support member (6), the laser emitter (1) is supported on the end of the cantilever (21) through the swing support member (6) to enable the laser emitter (1) to swing in a limited range in the front-back direction. The driving set further comprises a swing driving member (7) connected with the controller (3) and capable of driving the laser emitter (1) to swing.

6. The quartz crucible melting apparatus according to claim 5, wherein: The application further comprises a visual camera (8) connected with the controller (3), the visual camera (8) is supported on the support assembly (2) or the laser emitter (1) to identify the upper raw material (200) of the quartz crucible (100). The visual camera (8), the controller (3) and the driving set form a state and position control channel of the visual camera (8).

7. The quartz crucible melting apparatus according to any one of claims 1 to 6, wherein: The first thickness is 2-3 mm.

8. A quartz crucible production apparatus comprising the quartz crucible melting apparatus according to any one of claims 1 to 7, characterized by: The application further comprises a mold (300) and a water-cooling jacket, the water-cooling jacket forms an accommodating cavity with an open top, and the mold (300) is supported in the accommodating cavity. The application further comprises a main heating assembly (400) supported above the mold (300) and capable of vertically moving between a heating state and a disengaging state. When the main heating assembly (400) works, the laser transmitter keeps the yielding state; in the heating state, the main heating assembly (400) can extend into the inner cavity of the mold (300) from the top opening of the mold (300); in the disengaging state, the main heating assembly (400) is vertically spaced apart from the top of the mold (300).

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