Lissajous scanner
By adjusting the support plate and overlapping structure of the Lissajous scanner, the natural frequencies of the scanner cantilever in both directions are made close but have a sufficient difference to avoid vibration coupling. By using a regular-shaped piezoelectric actuator, the problems of high scanner manufacturing difficulty and low yield are solved, achieving high-efficiency scanning and high yield.
Patent Information
- Application Number
- CN202423265025.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2034-12-30
AI Technical Summary
When existing Lissajous scanners utilize natural frequencies close in two directions, they are prone to vibration coupling effects, leading to scanning trajectory distortion, making them difficult to manufacture and resulting in low yield.
By designing the shape and size parameters of the support plate and overlapping part, the natural frequencies of the scanner cantilever in two directions are made close but have a sufficient difference to avoid vibration coupling. A regular-shaped, rotationally symmetrical piezoelectric actuator is used to reduce the difficulty of processing.
It achieves excellent scanning results and a uniform and dense scanning grid, while improving the yield rate and reducing the processing difficulty and error control.
Smart Images
Figure CN223883849U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of optical fiber scanner structure, and particularly relates to a Lissajous scanner. BACKGROUND
[0002] The optical fiber scanner is a display technology using a scanning driver to control the swing of an optical fiber and the emission of light rays of the optical fiber, and is mainly used in the technical fields of optical fiber scanning display technology, optical fiber scanning endoscope technology, optical fiber scanning radar and the like. When the optical fiber scanner is applied to image display, the color of the pattern irradiated by the technology is sharp and saturated, the contrast is high, the brightness is high, and the structure volume is very small.
[0003] The optical fiber scanner uses the mechanical resonance principle to make the cantilever of the optical fiber realize a large scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The micro piezoelectric scanning device of the Lissajous scanning generally has two driving parts, and the scanning device vibrates along two directions at the same time. The closer the driving frequencies of the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and theoretically, the closer the driving frequencies of the two directions are, the better. However, the closer the inherent frequencies used by the scanner in the two directions are, the more obvious the vibration coupling effect is, which can deteriorate the scanning trajectory, cause uncontrolled components in the scanning trajectory and result in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used by the Lissajous scanner in the two directions are preferably in a precise difference range, so that the coupling effect is not caused due to too small difference, and the uniformity is not caused to be not up to the requirements due to too large difference.
[0004] However, the Lissajous scanner with the inherent frequencies used in the two directions having a precise difference requires extremely high processing precision, and neither the cost of the processing equipment nor the yield can be guaranteed. Practical new type content
[0005] The present application provides a Lissajous scanner to reduce the processing difficulty and improve the processing yield.
[0006] In order to achieve the above application purposes, the application provides a Lissajous scanner, which comprises a base, a piezoelectric actuating part, a support plate and an optical fiber. The piezoelectric actuating part is a two-dimensional scanning piezoelectric actuator. The fixed end of the piezoelectric actuating part is fixedly connected with the base. The free end of the piezoelectric actuating part simultaneously vibrates in a first direction and a second direction. The first direction is perpendicular to the second direction. The free end of the piezoelectric actuating part is the front end, and the fixed end of the piezoelectric actuating part is the back end. The first direction is the left-right direction, and the second direction is the vertical direction. The back end of the support plate is fixedly connected with the free end of the piezoelectric actuating part. The support plate is arranged in parallel to the horizontal direction. The support plate and the piezoelectric actuating part have a coincident part in the front-back direction. The optical fiber is fixedly arranged on the front end of the support plate in a cantilever support manner. The piezoelectric actuating part, the support plate and the optical fiber constitute a scanner cantilever. The support plate and the coincident part make the inherent frequency of the scanner cantilever in the horizontal direction greater than the same order inherent frequency of the scanner cantilever in the vertical direction. The support plate and the coincident part make the scanner cantilever in the vertical direction have a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the horizontal direction. V is an integer greater than or equal to 1.
[0007] The scanner cantilever has a first order inherent frequency, a second order inherent frequency, a third order inherent frequency, …, and an N order inherent frequency in the vertical direction. One of the inherent frequencies (for example, a U order inherent frequency, U is an integer greater than or equal to two) is closest to the V order inherent frequency in the horizontal direction (V is less than U). The closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is. In theory, the closer the driving frequencies in the two directions are, the better. However, the closer the inherent frequencies of the scanner cantilever used in the two directions are, the more obvious the coupling effect is. Therefore, the application adjusts the shape structure and / or size parameters of the support plate and the coincident part, so that the inherent frequencies of the scanner cantilever used in the two directions are close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference, so that the vibrations of the scanner cantilever in the two directions do not produce coupling. Therefore, the difference makes the scanner cantilever have a sufficient amplitude when the piezoelectric actuating part is driven by the driving signal for Lissajous scanning, and makes the vibrations of the scanner cantilever in the horizontal direction and in the vertical direction not produce coupling.
[0008] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the V-order inherent frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies the Lissajous scanning of the piezoelectric actuator and the scanner cantilever has sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not produce coupling. For those skilled in the art, the numerical selection according to the above description is a conventional technical means in the art.
[0009] Preferably, the piezoelectric actuator has the same or similar inherent frequency in the first direction and the second direction. The piezoelectric actuator here refers to the piezoelectric actuator itself, without the support plate and other components such as optical fibers. The piezoelectric actuator that meets this requirement is a regular shape and rotationally symmetric piezoelectric actuator, which has low processing difficulty, easy to control processing error and high yield.
[0010] The optical fiber is fixed on the upper surface or lower surface of the support plate in a cantilevered manner or inside the support plate. The cantilevered support refers to the part of the optical fiber that protrudes from the front end of the support plate as the optical fiber cantilever, and the part of the optical fiber behind the optical fiber cantilever is fixedly connected to the support plate. As an embodiment of the optical fiber inside the support plate, the support plate body is provided with a mounting hole for accommodating the optical fiber, and the optical fiber is fixed in the mounting hole in a cantilevered manner.
[0011] The piezoelectric actuator includes a round tube type piezoelectric actuator, a square tube type piezoelectric actuator, a square rod type piezoelectric actuator or a round rod type piezoelectric actuator.
[0012] One or more technical solutions in the present application have at least the following technical effects or advantages:
[0013] The present application adjusts the shape and / or size parameters of the support plate and the overlapping part, so that the inherent frequencies of the scanner cantilever in two directions are close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference to prevent the vibration of the scanner cantilever in two directions from being coupled.
[0014] The piezoelectric actuator of the Lissajous scanner has the same or similar inherent frequency in the first direction and the second direction. The piezoelectric actuator here refers to the piezoelectric actuator itself, without the support plate and other components such as optical fibers. The piezoelectric actuator that meets this requirement is a regular shape and rotationally symmetric piezoelectric actuator, which has low processing difficulty, easy to control processing error and high yield. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the structure of this application;
[0016] Figure 2 This is a schematic diagram of the overlapping part structure;
[0017] Figure 3 This is a schematic diagram of a cylindrical piezoelectric actuator.
[0018] Figure 4 This is a schematic diagram of a square-shaped piezoelectric actuator;
[0019] Figure 5 This is a schematic diagram of a square rod-type piezoelectric actuator;
[0020] Figure 6 This is a schematic diagram of a cylindrical piezoelectric actuator. Detailed Implementation
[0021] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.
[0022] Example 1:
[0023] like Figure 1 As shown, a Lissajous scanner includes a base 400, a piezoelectric actuator 100, a support plate 200, and an optical fiber 300. The piezoelectric actuator 100 is a two-dimensional scanning piezoelectric actuator. The fixed end of the piezoelectric actuator 100 is fixedly connected to the base 400, and the free end of the piezoelectric actuator 100 vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the piezoelectric actuator 100 is the front end, the fixed end is the rear end, the first direction is the left-right direction, and the second direction is the vertical direction. The rear end of the support plate 200 is fixedly connected to the free end of the piezoelectric actuator 100. The support plate 200 is arranged parallel to the horizontal plane, and the support plate 200 and the piezoelectric actuator 100 have an overlapping portion 500 in the front-rear direction. Figure 2As shown, the front end of the optical fiber 300 is fixed on the support plate 200 in a cantilevered manner, the piezoelectric actuating part 100, the support plate 200 and the optical fiber 300 form a scanner cantilever, the support plate 200 and the coincident part 500 make the inherent frequency of the scanner cantilever in the horizontal direction greater than the same order inherent frequency of the scanner cantilever in the vertical direction, and make the scanner cantilever in the vertical direction have a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the horizontal direction, V being an integer greater than or equal to 1.
[0024] The scanner cantilever has a first order inherent frequency, a second order inherent frequency, a third order inherent frequency,..., and an N order inherent frequency in the vertical direction, wherein the inherent frequency of a certain order (for example, U order, U being an integer greater than or equal to two) is closest to the V order inherent frequency of the scanner cantilever in the horizontal direction (V is less than U). The closer the driving frequencies of the two directions in Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and the more the number of points. In theory, the closer the driving frequencies of the two directions, the better, but the closer the inherent frequencies of the scanner cantilever used in the two directions, the more obvious the coupling effect. Therefore, the shape structure and / or size parameter of the support plate 200 and the coincident part 500 are adjusted to make the inherent frequencies of the scanner cantilever used in the two directions meet the requirements of being close enough to ensure good scanning effect and having a uniform and dense scanning grid, and at the same time having a sufficient difference to make the vibration of the scanner cantilever in the two directions not coupled. Therefore, the difference satisfies that the scanner cantilever has a sufficient amplitude when the piezoelectric actuating part 100 is driven to make Lissajous scanning, and makes the vibration of the scanner cantilever in the horizontal direction and in the vertical direction not coupled.
[0025] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value of the V order inherent frequency of the scanner cantilever in the horizontal direction is selected, as long as the difference satisfies that the scanner cantilever has a sufficient amplitude when the piezoelectric actuating part 100 is driven to make Lissajous scanning, and makes the vibration of the scanner cantilever in the horizontal direction and in the vertical direction not coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.
[0026] Preferably, the piezoelectric actuator 100 has the same or similar natural frequency in the first direction and the same order natural frequency in the second direction. The piezoelectric actuator 100 referred to herein refers to the piezoelectric actuator 100 itself, without the support plate 200, and without other components such as optical fibers. The piezoelectric actuator 100 that meets such requirements is a piezoelectric actuator of regular shape and rotational symmetry, which is low in processing difficulty, easy to control processing errors, and has a high yield. For example, a circular tube type piezoelectric actuator, a square tube type piezoelectric actuator, a circular rod type piezoelectric actuator, and a square rod type piezoelectric actuator.
[0027] The optical fiber is fixedly arranged on the upper surface or lower surface of the support plate 200 in a cantilevered manner or arranged inside the support plate 200. The cantilevered manner refers to that the front end of the optical fiber protrudes from the front end of the support plate 200 to form an optical fiber cantilever, and the part of the optical fiber behind the optical fiber cantilever is fixedly connected to the support plate 200. As an embodiment in which the optical fiber is arranged inside the support plate 200, a mounting hole for accommodating the optical fiber is arranged in the support plate 200, and the optical fiber is fixedly arranged in the mounting hole in a cantilevered manner.
[0028] As an example of the piezoelectric actuator 100:
[0029] As shown in Figure 3 , the circular tube type piezoelectric actuator has a circular tube type main body as a whole, the axis of the main body is arranged in the front-rear direction, the rear end of the main body is fixedly connected to the base 400, and the front end of the main body is connected to the rear end of the support plate 200.
[0030] The driving mode of the circular tube type main body can be a piezoelectric sheet, or the main body itself can be a piezoelectric material, and driving electrodes are arranged at corresponding positions on the inner and outer surfaces of the main body. The structure of the circular tube type piezoelectric actuator, as well as the structure of arranging piezoelectric sheets or driving electrodes, etc. all belong to the conventional technical means in the art.
[0031] As shown in Figure 4 , the square tube type piezoelectric actuator has a square tube type main body as a whole, which can have a square cross-sectional profile or a rectangular cross-sectional profile. The axis of the main body is arranged in the front-rear direction, the rear end of the tube type main body is fixedly connected to the base 400, and the front end of the tube type main body is connected to the rear end of the support plate 200. Of course, preferably, when the cross section of the square tube type is a rectangular profile, the long side of the main body is arranged in a direction parallel to the support plate 200, so that the direction in which the support plate 200 improves the natural frequency is the direction in which the main body itself has a higher natural frequency.
[0032] The square tube type piezoelectric actuator is similar to the driving mode of the cylindrical main body, which can be attached to a piezoelectric sheet, or the square tube type main body itself can be a piezoelectric material, and the corresponding positions of the inner and outer surfaces are provided with driving electrodes. The structure of the square tube type piezoelectric actuator, and the structure of the piezoelectric sheet or driving electrode are all conventional technical means in the art.
[0033] As shown in Figure 5 The square rod type piezoelectric actuator has a square rod type main body as a whole, which can be a square cross section profile or a rectangular cross section profile. The axis of the main body is arranged in the front-back direction, the rear end of the main body is fixedly connected with the base 400, and the front part of the main body is connected with the rear end of the support plate 200. Of course, when the cross section of the square rod type is a rectangular profile, the long side of the main body is arranged in a direction parallel to the support plate 200, so that the direction of the support plate 200 to improve the natural frequency is the direction of the main body itself, i.e. the higher direction.
[0034] The driving mode of the square rod type piezoelectric actuator can be attached to a piezoelectric sheet. The structure of the square rod type piezoelectric actuator and its driving mode, driving structure, etc. are all conventional technical means in the art.
[0035] As shown in Figure 6 The circular rod type piezoelectric actuator has a circular rod type main body as a whole, and the axis of the main body is arranged in the front-back direction. The rear end of the main body is fixedly connected with the base 400, and the front part of the main body is connected with the rear end of the support plate 200.
[0036] The driving mode of the circular rod type piezoelectric actuator can be attached to a piezoelectric sheet. The structure of the circular rod type piezoelectric actuator and its driving mode, driving structure, etc. are all conventional technical means in the art.
[0037] Embodiment 2:
[0038] As shown in Figure 1 A Lissajous scanner includes a base 400, a first piezoelectric actuating part 100, a sheet type piezoelectric actuating part 200, and an optical fiber 300. The first piezoelectric actuating part 100 is a one-dimensional scanning piezoelectric actuating part. The fixed end of the first piezoelectric actuating part 100 is fixedly connected with the base 400. The free end of the first piezoelectric actuating part 100 vibrates in a first direction. The free end of the first piezoelectric actuating part 100 is the front end, the fixed end of the first piezoelectric actuating part 100 is the rear end, and the first direction is the left-right direction. The rear end of the sheet type piezoelectric actuating part 200 is fixedly connected with the free end of the first piezoelectric actuating part 100. The sheet type piezoelectric actuating part 200 is arranged in a direction parallel to the horizontal plane. The sheet type piezoelectric actuating part 200 and the first piezoelectric actuating part 100 have an overlapping part 500 in the front-rear direction, as shown in Figure 2As shown, the front end of the sheet-shaped piezoelectric actuating part 200 vibrates in the vertical direction, the optical fiber 300 is fixed to the front end of the sheet-shaped piezoelectric actuating part 200 in a cantilever support manner, the first piezoelectric actuating part 100, the sheet-shaped piezoelectric actuating part 200 and the optical fiber 300 constitute a scanner cantilever, the sheet-shaped piezoelectric actuating part 200 and the overlapping part 500 make the inherent frequency of the scanner cantilever in the horizontal direction greater than the same order inherent frequency of the scanner cantilever in the vertical direction, and make the scanner cantilever in the vertical direction have a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the horizontal direction, V being an integer greater than or equal to 1.
[0039] The scanner cantilever has a first order inherent frequency, a second order inherent frequency, a third order inherent frequency, …, and an N order inherent frequency in the vertical direction, among which the inherent frequency of a certain order (for example, U order, U being an integer greater than or equal to two) is closest to the V order inherent frequency of the scanner cantilever in the horizontal direction (V is less than U), the closer the driving frequencies of the two directions in the Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, the more the number of points, and theoretically the closer the driving frequencies of the two directions, the better, but the closer the inherent frequencies of the scanner cantilever used in the two directions, the more obvious the coupling effect, so the application adjusts the shape and / or size parameters of the sheet-shaped piezoelectric actuating part 200 and the overlapping part 500, so that the inherent frequencies of the scanner cantilever used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference to make the vibration of the scanner cantilever in the two directions not coupled.
[0040] Preferably, the inherent frequency of the first piezoelectric actuating part 100 in the left-right direction is the same as or close to the inherent frequency in the vertical direction, and the first piezoelectric actuating part 100 referred to here refers to the first piezoelectric actuating part 100 itself, not including the sheet-shaped piezoelectric actuating part 200, nor including other components such as optical fibers. The first piezoelectric actuating part 100 that meets such requirements is a piezoelectric actuator of regular shape and rotational symmetry, which has low processing difficulty, easy to control processing error and high yield. For example, a round tube type piezoelectric actuator, a square tube type piezoelectric actuator, a round bar type piezoelectric actuator, and a square bar type piezoelectric actuator. The sheet-shaped piezoelectric actuating part 200 is also a conventional actuator, which has low processing difficulty. The application can obtain a scanner suitable for Lissajous scanning and having guaranteed anti-coupling effect through the combination of two easily processed components, which has low processing difficulty and high yield compared with existing Lissajous scanners.
[0041] Therefore, the difference satisfies that the scanner cantilever has sufficient amplitude when the first piezoelectric actuating part 100 makes Lissajous scanning under the driving of the driving signal, so that the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not produce coupling.
[0042] Generally, the difference is in the range of 10Hz-12KHz. Further preferably, the difference is in the range of 1KHz-10KHz. The value is selected according to the V-order natural frequency of the selected scanner cantilever in the horizontal direction, as long as the difference satisfies the piezoelectric actuation part under driving to make the scanner cantilever have sufficient amplitude when Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not produce coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0043] The optical fiber is fixed in a cantilever support manner on the upper surface or lower surface of the sheet-shaped piezoelectric actuation part 200 or inside the sheet-shaped piezoelectric actuation part 200. The cantilever support means that the front end of the optical fiber beyond the front end of the sheet-shaped piezoelectric actuation part 200 forms an optical fiber cantilever, and the part of the optical fiber behind the optical fiber cantilever is fixedly connected with the sheet-shaped piezoelectric actuation part 200. As an embodiment of the optical fiber arranged inside the sheet-shaped piezoelectric actuation part 200, a mounting hole for accommodating the optical fiber is arranged inside the sheet-shaped piezoelectric actuation part 200, and the optical fiber is fixed in a cantilever support manner in the mounting hole.
[0044] As an example of the first piezoelectric actuation part 100:
[0045] As shown in Figure 3 , the circular tube type actuator has a circular tube type body as a whole, the axis of the body is arranged in the front-back direction, the rear end of the body is fixedly connected with the base 400, and the front part of the body is connected with the rear end of the sheet-shaped piezoelectric actuation part 200.
[0046] The driving mode of the circular tube type body can be a piezoelectric sheet, or the body itself can be a piezoelectric material, and driving electrodes are arranged at the corresponding positions of the inner and outer surfaces of the body. The structure of the circular tube type actuator, as well as the structure of the piezoelectric sheet or driving electrode arranged, etc. all belong to routine technical means in the art.
[0047] As shown in Figure 4 , the square tube type actuator has a square tube type body as a whole, which can be a square profile in cross section or a rectangular profile in cross section. The axis of the body is arranged in the front-back direction, the rear end of the tube type body is fixedly connected with the base 400, and the front part of the tube type body is connected with the rear end of the sheet-shaped piezoelectric actuation part 200. Of course, preferably, when the cross section of the square tube type is a rectangular profile, the long side of the body is arranged in a direction parallel to the sheet-shaped piezoelectric actuation part 200, so as to make the direction in which the sheet-shaped piezoelectric actuation part 200 improves the natural frequency be the direction in which the body itself has a higher natural frequency.
[0048] The driving mode of the square cylinder type actuator is similar to the driving mode of the cylinder type body, which can be a piezoelectric sheet or a square cylinder type body itself with piezoelectric material, and the corresponding positions of the inner and outer surfaces are arranged with driving electrodes. The structure of the square cylinder type actuator, and the structure of the piezoelectric sheet or driving electrode are all conventional technical means in the art.
[0049] As shown in Figure 5 The square rod type actuator has a square rod type body as a whole, which can be a square cross section profile or a rectangular cross section profile. The axis of the body is arranged in the front-back direction, the rear end of the body is fixedly connected with the base 400, and the front part of the body is connected with the rear end of the sheet-shaped piezoelectric actuating part 200. Of course, when the cross section of the square rod type is a rectangular profile, the long side of the body is arranged in parallel to the direction of the sheet-shaped piezoelectric actuating part 200, so as to make the direction of the sheet-shaped piezoelectric actuating part 200 to improve the inherent frequency of the body itself, that is, the higher direction.
[0050] The driving mode of the square rod type actuator can be a piezoelectric sheet. The structure of the square rod type actuator and its driving mode, driving structure, etc. are all conventional technical means in the art.
[0051] As shown in Figure 6 The circular rod type actuator has a circular rod type body as a whole, and the axis of the body is arranged in the front-back direction. The rear end of the body is fixedly connected with the base 400, and the front part of the body is connected with the rear end of the sheet-shaped piezoelectric actuating part 200.
[0052] The driving mode of the circular rod type actuator can be a piezoelectric sheet. The structure of the circular rod type actuator and its driving mode, driving structure, etc. are all conventional technical means in the art.
[0053] Optionally, the sheet-shaped piezoelectric actuating part 200 is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.
[0054] The application utilizes the shape structure and / or size parameter adjustment of the sheet-shaped piezoelectric actuating part and the coincidence part, so that the scanner cantilever inherent frequency in two directions can be used at the same time to meet the requirements of being close enough to ensure good scanning effect, having uniform and dense scanning grid, and having sufficient difference to prevent the vibration of the scanner cantilever in two directions from being coupled.
[0055] Since the inherent frequency of the first piezoelectric actuating part in the left-right direction and the inherent frequency in the vertical direction are the same or similar, the first piezoelectric actuating part here refers to the single first piezoelectric actuating part itself, which does not include the sheet-shaped piezoelectric actuating part or other components such as optical fibers. The first piezoelectric actuating part meeting such requirements is a regular shape and rotationally symmetric piezoelectric actuator, which has low processing difficulty, easy to control processing error, and high yield.
[0056] It should be noted that the foregoing examples have been provided merely for the purpose of explanation and are in no way to be construed as limiting of the present application. While the application has been described with reference to preferred embodiments and methods, one skilled in the art will readily appreciate that other embodiments and / or methods might be adapted similarly as combinations of the various novel features and methods described herein, without departing from the scope of the claims. Those skilled in the art will readily recognize numerous adaptations and modifications which can be made within the scope of the present application. For example, those skilled in the art will recognize that the present application can be used in alternative embodiments or methods. Therefore, although the application has been described in some detail to provide a clear understanding thereof, various embodiments and methods are not limited to the descriptions above but only by the claims which follow. Additionally, it is intended that all claims encompassed by the application are to be construed as including alternative language and describe only one of the embodiments of the application. Therefore, the specification and figures are to be regarded as illustrative in nature and not as restrictive.
[0057] All of the features disclosed in this specification (including any accompanying claims, abstract and drawings) can be combined in any combination, except combinations where at least some of such features (whether corresponding to claims, abstract and drawings or not) are mutually exclusive.
[0058] Any feature of the present specification (including any accompanying claims, abstract and drawings) can be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is one of alternative possibilities only and is not necessarily a limitation of the application.
[0059] This application is not limited to the specific embodiments and methods described herein. This application extends to any novel one, or any novel combination, of the features disclosed in this specification, including any novel one, or any novel combination, of the steps of any novel method or process disclosed in this specification.
Claims
1. A Lissajous scanner, characterized in that, The device includes a base, a piezoelectric actuator, a support plate, and an optical fiber. The piezoelectric actuator is a two-dimensional scanning piezoelectric actuator. The fixed end of the piezoelectric actuator is fixedly connected to the base. The free end of the piezoelectric actuator vibrates simultaneously along a first direction and a second direction, which are perpendicular to each other. The free end of the piezoelectric actuator is the front end, the fixed end is the rear end, the first direction is the left-right direction, and the second direction is the vertical direction. The rear end of the support plate is fixedly connected to the free end of the piezoelectric actuator. The support plate is parallel to the horizontal plane. The support plate and the piezoelectric actuator have overlapping portions in the front-to-back direction. The optical fiber is fixedly mounted on the front end of the support plate in a cantilever support manner. The piezoelectric actuator, the support plate, and the optical fiber constitute the scanner cantilever. The support plate and the overlapping portion make the natural frequency of the scanner cantilever in the horizontal direction greater than its natural frequency of the same order in the vertical direction. Furthermore, the scanner cantilever has a difference between a certain natural frequency in the vertical direction that is closest to its V-order natural frequency in the horizontal direction and the V-order natural frequency in the horizontal direction, where V is an integer greater than or equal to 1.
2. A Lissajous scanner as described in claim 1, characterized in that, The difference satisfies that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under the drive signal, and that the vibration of the scanner arm in the horizontal and vertical directions will not couple.
3. A Lissajous scanner as described in claim 1 or 2, characterized in that, The difference range is 10Hz to 12KHz.
4. A Lissajous scanner as described in claim 3, characterized in that, The difference range is 1kHz to 10kHz.
5. A Lissajous scanner as described in claim 1 or 2, characterized in that, The piezoelectric actuator has the same or similar natural frequency in the first direction and the same natural frequency in the second direction.
6. A Lissajous scanner as described in claim 1 or 2, characterized in that, The optical fiber is fixedly installed on the upper or lower surface of the support plate or inside the support plate in a cantilever support manner.
7. A Lissajous scanner as described in claim 1 or 2, characterized in that, The piezoelectric actuator includes a cylindrical piezoelectric actuator, a square tube piezoelectric actuator, a square bar piezoelectric actuator, or a round bar piezoelectric actuator.