Heater for EFEM temperature and humidity control

Abstract

The utility model discloses a heater used for EFEM temperature and humidity control, comprising a heating main frame body, the inner side of the heating main frame body is provided with a PTC ceramic body heat transfer sheet, the two ends of the inner side of the heating main frame body are fixedly provided with supporting brackets, the supporting brackets are provided with supporting brackets, the supporting brackets are provided with PTC ceramic heating sheets, and the PTC ceramic heating sheets are arranged on the PTC ceramic heating sheets. A PTC ceramic body heat transfer sheet is mounted on the front surface of the inner side of the heating main frame body, and clamping cavities are formed in the two sides of the PTC ceramic body heat transfer sheet; the heat dissipation part on the heater is arranged to be of a split structure, the heat dissipation part and the main body are installed in a clamped mode, meanwhile, in the using process, when the surface of the heat dissipation part is damaged or scratched, heat conduction in the heating process is affected, the heat dissipation part can be replaced through the split structure, it is guaranteed that a heated original part is evenly heated, and meanwhile the heat dissipation part can be replaced through the split structure. And the clamping mode facilitates disassembly and assembly, the convenience in the disassembly and assembly process is further improved, and the practicability of the device is further improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to PTC heater technical field, concretely relates to a kind of heater for EFEM temperature and humidity control. BACKGROUND

[0002] In the semiconductor manufacturing process, EFEM is used for transporting and processing wafer, temperature and humidity control is crucial to ensure the quality of wafer in production process, in the prior art, temperature control is provided by common PTC heater, PTC heater is mainly composed of PTC ceramic heating element, heat dissipation aluminum pipe and possible connecting piece, protective sleeve, etc., PTC ceramic heating element is the core of heater, with positive temperature coefficient characteristic, i.e. when temperature rises, its resistance also increases, this characteristic makes PTC heater can automatically adjust heating power according to temperature change, effectively avoids overheating condition.

[0003] PTC heater is disclosed in the patent with application No.202080010034.2, the application can increase heat transfer efficiency by improving the structure of heat dissipation part, can homogenize the surface temperature of heat dissipation part;Combining the above application, while comparing existing heating structure, in use process, heat dissipation part and heating structure are usually integrated, if breakage or more scratches appear on heat dissipation part in use process, heat dissipation part cannot be replaced in conventional state, which affects heat dissipation and heat conduction efficiency, and also easily leads to uneven heat conduction, thereby affecting the practicability and functionality of the heater, therefore we propose a kind of heater for EFEM temperature and humidity control. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a kind of heater for EFEM temperature and humidity control to solve the problems raised in the above background.

[0005] To achieve the above object, the utility model provides the following technical scheme: a kind of heater for EFEM temperature and humidity control, including heating main frame, the inside of heating main frame is installed with PTC ceramic body heat transfer sheet, the inside of heating main frame is fixedly installed with support bracket at both ends, support bracket is opened in support bracket, and PTC ceramic heating sheet is installed on support bracket, the inside front surface of heating main frame is installed with PTC ceramic body heat transfer sheet, the both sides of PTC ceramic body heat transfer sheet are opened with clamping cavity, the clamping cavity is provided with the clamping lug of telescopic adjustment, also be provided with the adjusting card wheel for driving the telescopic clamping lug.

[0006] Preferably, the both ends of the PTC ceramic heating sheet are provided with support blocks, and the PTC ceramic heating sheet is connected and fixed with the support bracket through the support slot and the support block.

[0007] Preferably, the inner side of the clamping cavity is rotationally mounted with a clamping screw, the clamping screw is provided with an adjusting clamping wheel, the clamping screw is rotated through the adjusting clamping wheel, and the adjusting clamping wheel protrudes from the front surface of the PTC ceramic heat transfer sheet.

[0008] Preferably, the clamping protrusion is provided with a threaded clamping seat, and the clamping protrusion is threadedly and rotationally mounted with the threaded clamping seat through the clamping screw.

[0009] Preferably, the inner side edges of the heating main frame are symmetrically provided with arc-shaped clamping grooves, and the heating main frame and the PTC ceramic heat transfer sheet are clamped through the clamping protrusion and the arc-shaped clamping groove.

[0010] Preferably, the inner side of the clamping cavity is rotationally mounted with a clamping screw, the clamping screw is provided with an adjusting clamping wheel, the clamping screw is rotated through the adjusting clamping wheel, and the adjusting clamping wheel protrudes from the front surface of the PTC ceramic heat transfer sheet.

[0011] Preferably, the rear surface of the PTC ceramic heat transfer sheet is provided with a heating sheet alignment groove, and the heating sheet alignment groove is mounted with a silica gel heat conduction sheet.

[0012] Preferably, when the PTC ceramic heat transfer sheet and the heating main frame are mounted and fixed, the silica gel heat conduction sheet is used to contact and adhere to the PTC ceramic heating sheet.

[0013] Compared with the prior art, the beneficial effects of the present application are:

[0014] (1) The heat dissipation part of the heater is provided in a split structure, and the heat dissipation part and the main body are clamped and mounted. When the surface of the heat dissipation part is damaged or scratched during use, the heat conduction during the heating process is affected. The split structure can be used to replace the heat dissipation part, ensuring that the heated elements are uniformly heated. The clamping and mounting method facilitates disassembly and improves the convenience during disassembly, further improving the practicality of the device. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 The structure of the present application is shown in the schematic diagram.

[0016] Figure 2 The installation structure of the PTC ceramic heating sheet of the present application is shown in the schematic diagram.

[0017] Figure 3 The structure of the PTC ceramic heating sheet of the present application is shown in the schematic diagram.

[0018] Figure 4 The rear surface structure of the PTC ceramic heat transfer sheet of the present application is shown in the schematic diagram.

[0019] Figure 5The utility model discloses a PTC ceramic body heat transfer sheet's front surface structure schematic view.

[0020] In the drawing: 100, heating main frame; 101, PTC ceramic heating sheet; 102, support holder; 103, support groove; 104, support block; 200, PTC ceramic body heat transfer sheet; 201, adjusting clamping wheel; 202, heating sheet alignment groove; 203, silica gel heat conduction sheet; 204, clamping cavity; 205, clamping screw; 206, clamping lug; 207, threaded clamping seat. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model and not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the utility model.

[0022] Embodiment one

[0023] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 and Figure 5 , the utility model provides a technical scheme: after PTC heater is electrified, the current passes through PTC ceramic heating element and generates heat, along with the temperature rise, the resistance of PTC element increases, leads to the current reduction, thereby makes the heating amount reduce, reaches the effect of self-regulation, and this self-limiting property makes PTC heater have remarkable advantage on safety, a kind of heater for EFEM temperature and humidity control, including heating main frame 100, the inside of heating main frame 100 is installed with PTC ceramic body heat transfer sheet 200, the inside of heating main frame 100 is fixedly installed with support holder 102 on both ends, support groove 103 is opened on support holder 102, and PTC ceramic heating sheet 101 is installed on support groove 103, the inside front surface of heating main frame 100 is installed with PTC ceramic body heat transfer sheet 200, clamping cavity 204 is opened on the both sides of PTC ceramic body heat transfer sheet 200, clamping lug 206 of telescopic adjustment is arranged in clamping cavity 204, and adjusting clamping wheel 201 for driving clamping lug 206 telescopic is also provided, when using the heater in the application to provide temperature control, the split structure combination is installed, then PTC ceramic body heat transfer sheet 200 is installed on heating main frame 100 in alignment.

[0024] Specific, PTC ceramic heating sheet 101 both ends are fixedly connected with support block 104, PTC ceramic heating sheet 101 and support seat 102 are connected and fixed between through support groove 103 and support block 104, the inner side of clamping cavity 204 is rotatably installed with clamping screw 205, adjusting clamping wheel 201 is arranged on clamping screw 205, clamping screw 205 rotates through adjusting clamping wheel 201, and adjusting clamping wheel 201 protrudes the front surface of PTC ceramic body heat sheet 200, and the integral threaded clamping seat 207 is arranged on the clamping lug 206, and the clamping lug 206 is screw threadedly installed through the clamping screw 205 and the threaded clamping seat 207, and the inner edge of the heating main frame body 100 is symmetrically provided with an arc-shaped clamping groove, and the heating main frame body 100 and the PTC ceramic body heat sheet 200 are clamped through the clamping lug 206 and the arc-shaped clamping groove, and the inner side of the clamping cavity 204 is further provided with a limiting groove, and the clamping lug 206 moves through the limiting groove for guiding and limiting, so that the clamping lug 206 is limitedly moved in the clamping cavity 204, and the element to be heated is placed on the PTC ceramic body heat sheet 200, that is, temperature control can be provided, when the PTC ceramic body heat sheet 200 and the heating main frame body 100 are paired and installed, the heating sheet alignment groove 202 on one side surface of the PTC ceramic body heat sheet 200 is aligned with the PTC ceramic heating sheet 101 fixed in the inner side of the heating main frame body 100, and the two ends of the PTC ceramic heating sheet 101 are fixedly installed on the support seat 102 through the support groove 103 and the support block 104, and the PTC ceramic heating sheet 101 is installed in multiple numbers, when the PTC ceramic body heat sheet 200 is installed, the PTC ceramic body heat sheet 200 is loaded into the inner side of the heating main frame body 100 on both sides, the adjusting clamping wheel 201 can be rotated, the clamping screw 205 inside the clamping cavity 204 is driven to rotate when the adjusting clamping wheel 201 rotates, the clamping screw 205 is telescopic through the threaded clamping seat 207 when rotating, so that the clamping lug 206 is lifted from the clamping cavity 204, and the clamping lug 206 is clamped into the arc-shaped clamping groove on both sides of the heating main frame body 100, the arc-shaped clamping groove can be used for lamination and clamping, better contact and conduct heat, finally, the element to be heated is placed on the PTC ceramic body heat sheet 200.

[0025] Example two

[0026] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 And Figure 5The utility model provides a kind of technical scheme: a heater for EFEM temperature and humidity control, the rear surface of PTC ceramic body heat transfer sheet 200 is equipped with heating fin alignment groove 202, a plurality of heating fin alignment groove 202 are all pasted with silica gel heat-conducting sheet 203, when PTC ceramic body heat transfer sheet 200 and heating main frame body 100 are installed and fixed, still through silica gel heat-conducting sheet 203 and PTC ceramic heating fin 101 are adhered to contact, when PTC ceramic heating fin 101 and heating fin alignment groove 202 are aligned, the inner side of heating fin alignment groove 202 is contacted with PTC ceramic heating fin 101 by silica gel heat-conducting sheet 203, better conduct heat, improve heat conduction efficiency, while, better guarantee that heat is evenly radiated, and silica gel heat-conducting sheet 203 with certain elasticity can better guarantee the contact of PTC ceramic heating fin 101.

[0027] Although the embodiments of the utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made thereto without departing from the principles and spirit of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A heater for EFEM temperature and humidity control, comprising a heating main body (100), characterized in that: The inner side of the heating main frame (100) is provided with a PTC ceramic heat transfer sheet (200), both ends of the inner side of the heating main frame (100) are fixedly provided with a supporting bracket (102), the supporting bracket (102) is provided with a supporting groove (103), and the supporting groove (103) is provided with a PTC ceramic heating sheet (101); the inner side of the heating main frame (100) is provided with a PTC ceramic heat transfer sheet (200), both sides of the PTC ceramic heat transfer sheet (200) are provided with a clamping cavity (204), the clamping cavity (204) is provided with a telescopic clamping block (206), and an adjusting clamping wheel (201) for driving the telescopic clamping block (206) is further arranged.

2. The heater for EFEM temperature and humidity control according to claim 1, wherein: Both ends of the PTC ceramic heating sheet (101) are provided with a supporting block (104), and the PTC ceramic heating sheet (101) is connected and fixed with the supporting bracket (102) through the supporting groove (103) and the supporting block (104).

3. The heater for EFEM temperature and humidity control according to claim 1, wherein: The inner side of the clamping cavity (204) is rotatably provided with a clamping screw (205), the clamping screw (205) is provided with an adjusting clamping wheel (201), the clamping screw (205) is rotated through the adjusting clamping wheel (201), and the adjusting clamping wheel (201) protrudes from the front surface of the PTC ceramic heat transfer sheet (200).

4. The heater for EFEM temperature and humidity control according to claim 3, wherein: The clamping block (206) is provided with a threaded clamping seat (207), and the clamping block (206) is screw-mounted with the threaded clamping seat (207) through the clamping screw (205).

5. The heater for EFEM temperature and humidity control of claim 1, wherein: The inner side edge of the heating main frame (100) is symmetrically provided with an arc-shaped clamping groove, and the heating main frame (100) and the PTC ceramic heat transfer sheet (200) are clamped through the clamping block (206) and the arc-shaped clamping groove.

6. The heater for EFEM temperature and humidity control of claim 1, wherein: Both ends of the inner side of the clamping cavity (204) are further provided with a limiting groove, and the clamping block (206) is guided and limited through the limiting groove when moving, so as to ensure that the clamping block (206) moves in the clamping cavity (204) in a limited manner.

7. The heater for EFEM temperature and humidity control of claim 1, wherein: The rear surface of the PTC ceramic heat transfer sheet (200) is provided with a heating sheet alignment groove (202), and the heating sheet alignment groove (202) is provided with a silica gel heat conduction sheet (203).

8. The heater for EFEM temperature and humidity control according to claim 7, wherein: When the PTC ceramic heat transfer sheet (200) and the heating main frame (100) are installed and fixed, the silica gel heat conduction sheet (203) is further used to contact and adhere to the PTC ceramic heating sheet (101).

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