Drum-type vacuum plasma cleaning machine

Abstract

The utility model discloses a drum type vacuum plasma cleaning machine which comprises a cavity, a plasma generating device, a drum and a drum driving device, a cavity opening is formed in the front end of the cavity, a cavity door is arranged on the cavity opening, an air inlet and an air outlet are formed in the cavity, the air inlet is connected with an air supply system, and the air outlet is connected with a vacuum pump; a front opening is formed in the end, close to the cavity opening, of the roller, and a rear opening is formed in the end, away from the cavity opening, of the roller; the plasma generating device comprises a positive electrode plate and a radio frequency power supply, the positive electrode plate is arranged in a roller cavity of the roller, and the end, away from a cavity opening, of the positive electrode plate penetrates through the rear opening and the cavity and then is electrically connected with the radio frequency power supply outside the cavity. In a vacuum environment, a workpiece is fully exposed in plasma through rotation of the roller, so that uniform and efficient surface treatment on the workpiece is realized, and the surface treatment device has the characteristics of high efficiency, environmental protection, energy conservation, high uniformity and the like, and is suitable for the field with harsh requirements on surface treatment.

Description

Technical Field

[0001] This utility model relates to the field of plasma cleaning technology, and in particular to a drum-type vacuum plasma cleaner. Background Technology

[0002] Active particles in plasma (such as ions, electrons, and free radicals) can react with contaminants on the surface of materials, thereby achieving the purpose of cleaning; at the same time, these active particles can also change the chemical structure of the material surface, realizing functions such as surface activation and modification.

[0003] However, for small parts with various shapes, such as capacitors and resistors in electronic components, existing cleaning machines cannot perform batch and efficient surface cleaning. The cleaning accuracy is low and the uniformity is poor, thus failing to meet the needs of modern manufacturing for efficient, environmentally friendly, and high-precision surface treatment technology.

[0004] Therefore, there is an urgent need to design a drum-type vacuum plasma cleaner that allows the workpiece to be fully exposed to plasma in a vacuum environment through the rotation of the drum, so as to achieve uniform and efficient surface treatment of the workpiece. It has the characteristics of high efficiency, environmental protection, energy saving and high uniformity, and is suitable for fields with demanding surface treatment requirements. Utility Model Content

[0005] To solve the above problems, the technical solution adopted by this utility model is as follows:

[0006] A drum-type vacuum plasma cleaner includes a cavity, a plasma generator, a drum, and a drum drive device, characterized in that:

[0007] The cavity has an opening at its front end, and a door is provided on one side of the opening that is rotatably hinged to the cavity. The cavity has an air inlet and an air outlet. The air inlet is connected to a gas supply system, and the air outlet is connected to a vacuum pump.

[0008] The roller is rotatably disposed within the cavity, with a front opening at the end of the roller near the cavity opening and a rear opening at the end away from the cavity opening;

[0009] The plasma generating device includes a positive electrode plate and a radio frequency power supply. The positive electrode plate is disposed inside the cylinder cavity of the drum. The end of the positive electrode plate away from the cavity opening passes through the rear opening and the cavity and is electrically connected to the radio frequency power supply outside the cavity. The drum serves as a negative electrode plate.

[0010] The roller drive device is used to drive the roller to roll.

[0011] Preferably, the roller drive device includes a roller, a drive shaft, and a driver;

[0012] The roller and drive shaft are located between the drum and the cavity. The roller and drive shaft are arranged opposite to each other on the lower sides of the drum. The two ends of the roller and drive shaft are rotatably connected to the cavity through bearing seats. The roller and drive shaft are respectively connected to the drum for transmission.

[0013] The driver is located outside the cavity, and the driving end is connected to the roller drive.

[0014] Preferably, a rotating shaft is provided between the roller and the driver, one end of the rotating shaft is connected to the roller, and the other end passes through the cavity and is connected to the driving end of the driver outside. A magnetohydrodynamic sealing device is provided at the connection between the rotating shaft and the cavity.

[0015] Preferably, the outer surfaces of the roller and the shaft are knurled, and the shaft and drive shaft are in close contact with the roller.

[0016] Preferably, a shielding cover is provided on the outer surface of the cavity at the position corresponding to the radio frequency power supply.

[0017] Preferably, the cavity door is provided with an observation window, and the observation window is made of quartz glass.

[0018] Preferably, a door lock and a door lock sensor are provided between the door and the cavity body, and the door lock sensor is used to detect whether the door lock is locked in place.

[0019] Preferably, sealing rings are provided between the cavity door and the cavity body, as well as on the air outlet and air inlet.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] This invention utilizes a vacuum environment to fully expose the workpiece to plasma through the rotation of a drum, achieving uniform and efficient surface treatment. It features high efficiency, environmental friendliness, energy saving, and high uniformity, making it suitable for applications with stringent surface treatment requirements. Attached Figure Description

[0022] Figure 1 This is one of the three-dimensional structural schematic diagrams of this utility model;

[0023] Figure 2 This is the second three-dimensional structural schematic diagram of the present invention;

[0024] Figure 3 This is the right view of the present invention;

[0025] Figure 4 for Figure 3 Schematic diagram of the cross-sectional structure of the middle AA section;

[0026] Figure 5 for Figure 3Schematic diagram of the cross-sectional structure of the middle BB section;

[0027] The components include: cavity 1, roller 2, roller drive device 3, cavity door 4, positive electrode plate 5, bearing seat 6, rotating shaft 7, magnetic fluid sealing device 8, shielding cover 9, door lock 10, air inlet 11, air outlet 12, door lock sensor 20, front opening 21, rear opening 22, roller 31, transmission shaft 32, driver 33, and observation window 41. Detailed Implementation

[0028] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0029] It should be noted that when a component is said to be "fixed to" another component, it can be directly attached to the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," "up," "down," "front," "back," and similar expressions used in this document are for illustrative purposes only.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0031] The present invention will now be further described in conjunction with the accompanying drawings and specific embodiments:

[0032] like Figure 1-5 As shown, a drum-type vacuum plasma cleaner includes a cavity 1, a plasma generator, a drum 2, and a drum drive device 3. The front end of the cavity 1 has an opening, and a door 4 is provided on the opening, which is rotatably hinged to the cavity 1 on one side. The cavity 1 is provided with an air inlet 11 and an air outlet 12. The air inlet 11 is connected to a gas supply system (not shown in the figure), and the air outlet 12 is connected to a vacuum pump (not shown in the figure).

[0033] The roller 2 is rotatably disposed within the cavity 1. The roller 2 has a front opening 21 at one end near the cavity opening and a rear opening 22 at the other end away from the cavity opening.

[0034] The plasma generating device includes a positive electrode plate 5 and a radio frequency power supply (not shown in the figure). The positive electrode plate 5 is disposed in the cylinder cavity of the drum 2. The end of the positive electrode plate 5 away from the cavity opening passes through the rear opening 22 and the cavity 1 and is electrically connected to the radio frequency power supply outside the cavity 1. The drum 2 can be used as a negative electrode plate.

[0035] The roller drive device 3 is used to drive the roller 2 to roll.

[0036] In this embodiment, the air and reacted gas in the cavity 1 are discharged by the operation of the vacuum pump, so that the cavity 1 reaches and maintains the required vacuum level; the process gas is delivered into the vacuum cavity 1 by the gas supply system, and then the electrical energy generated by the radio frequency power supply is transmitted to the vacuum cylinder through the positive electrode plate 5, so that plasma is generated in the cylinder. Then, the roller drive device 3 drives the roller 2 to roll, so that the workpiece in the cylinder is continuously turned over with the rotation of the roller 2, so that the plasma can fully and uniformly contact the surface of the workpiece. The active particles in the plasma are used to carry out chemical reactions with the contaminants on the surface of the workpiece, or the high-energy particles in the plasma are used to bombard the contaminants on the surface of the workpiece to achieve the purpose of cleaning, activation, etc.

[0037] This enables uniform and efficient surface treatment of workpieces, featuring high efficiency, environmental friendliness, energy saving, and high uniformity, making it suitable for fields with stringent surface treatment requirements.

[0038] In this embodiment, the conditions for plasma generation and action are ensured by setting up a vacuum pump.

[0039] Furthermore, such as Figure 1-5 As shown, the roller drive device 3 includes a roller 31, a drive shaft 32, and a driver 33;

[0040] The roller 31 and the drive shaft 32 are located between the drum 2 and the cavity 1. The roller 31 and the drive shaft 32 are arranged opposite to each other on the lower sides of the drum 2. The two ends of the roller 31 and the drive shaft 32 are rotatably connected to the cavity 1 through the bearing seat 6, and the roller 31 and the drive shaft 32 are respectively connected to the drum 2 in a driving connection.

[0041] The driver 33 is located outside the cavity 1, and its driving end is connected to the roller 31 for transmission.

[0042] In this embodiment, the driver 33 drives the roller 31 to rotate, thereby driving the drum 2 and the workpiece to roll together, ensuring that the workpiece is in full contact with the plasma and achieving a uniform cleaning effect; in addition, the transmission shaft 32 is used to support and transmit power.

[0043] Compared with traditional cleaning methods, this cleaning method has the advantages of shorter processing time and lower energy consumption, which can improve production efficiency and reduce production costs.

[0044] In this embodiment, the dynamically rotating drum 2 design allows the workpiece to undergo plasma treatment in a disordered manner within the drum cavity, ensuring the uniformity of the treatment. Even for workpieces with complex shapes, including the inner walls of internal holes, it is possible to achieve uniform cleaning in all directions.

[0045] In this embodiment, the cleaning process does not require the use of chemical solvents, thus avoiding environmental pollution and harm to the human body caused by chemical solvents, and is an environmentally friendly surface treatment technology.

[0046] In this embodiment, it can effectively remove contaminants such as organic matter, oxides, and oil stains from the surface of the workpiece. It can also activate and modify the surface of the workpiece to improve surface tension and adhesion, and improve the wettability and bonding properties of the material. It is widely used in semiconductor, electronics, optics, automotive, medical and other fields.

[0047] Furthermore, such as Figure 1-5 As shown, in order to prevent external air from entering the cavity 1 when the roller 31 rotates, a rotating shaft 7 is provided between the roller 31 and the driver 33. One end of the rotating shaft 7 is connected to the roller 31, and the other end passes through the cavity 1 and is connected to the driving end of the external driver 33. A magnetohydrodynamic sealing device 8 is provided at the connection between the rotating shaft 7 and the cavity 1.

[0048] In this embodiment, the magnetic fluid sealing device 8 is mainly used to seal the connection between the rotating shaft 7 and the cavity 1. Its structure and working principle are existing technologies in the field and will not be described in detail here.

[0049] Furthermore, such as Figure 4 As shown, in order to increase the roughness of the outer surfaces of the roller 2 and the roller 31 to increase the frictional force between them and prevent the roller 2 from moving axially relative to the cavity 1 when it rolls, the outer surfaces of the roller 2 and the roller 31 are knurled, and the roller 31 and the drive shaft 32 are in close contact with the roller 2 respectively.

[0050] Furthermore, such as Figure 1 , 2 As shown in Figures 3 and 5, in order to prevent the ultra-high frequency magnetic field from affecting the human body and to improve safety, a shielding cover 9 is provided on the outer surface of the cavity 1 at the position corresponding to the radio frequency power supply.

[0051] Furthermore, such as Figure 1 , 5 As shown, in order to observe the plasma cleaning process inside the cavity 1 directly without disrupting the vacuum environment, an observation window 41 is provided on the cavity door 4, and the observation window 41 is made of quartz glass.

[0052] Furthermore, such as Figure 1 As shown, in order to ensure that the door lock 10 is locked accurately and reliably and to improve security, a door lock 10 and a door lock sensor 20 are provided between the cavity door 4 and the cavity 1. The door lock sensor 20 is used to detect whether the door lock 10 is locked in place.

[0053] Furthermore, in order to ensure the airtightness of the cavity 1 in the closed state, sealing rings (not shown in the figure) are provided between the cavity door 4 and the cavity 1, as well as on the air outlet 12 and the air inlet 11.

[0054] For those skilled in the art, various other corresponding changes and modifications can be made based on the technical solutions and concepts described above, and all such changes and modifications should fall within the protection scope of the claims of this utility model patent.

Claims

1. A drum-type vacuum plasma cleaner, comprising a cavity, a plasma generator, a drum, and a drum drive device, characterized in that: The cavity has an opening at its front end, and a door is provided on one side of the opening that is rotatably hinged to the cavity. The cavity has an air inlet and an air outlet. The air inlet is connected to a gas supply system, and the air outlet is connected to a vacuum pump. The roller is rotatably disposed within the cavity, with a front opening at the end of the roller near the cavity opening and a rear opening at the end away from the cavity opening; The plasma generating device includes a positive electrode plate and a radio frequency power supply. The positive electrode plate is disposed inside the cylinder cavity of the drum. The end of the positive electrode plate away from the cavity opening passes through the rear opening and the cavity and is electrically connected to the radio frequency power supply outside the cavity. The drum serves as a negative electrode plate. The roller drive device is used to drive the roller to roll.

2. The drum-type vacuum plasma cleaner according to claim 1, characterized in that, The roller drive unit includes rollers, drive shafts, and drivers; The roller and drive shaft are located between the drum and the cavity. The roller and drive shaft are arranged opposite to each other on the lower sides of the drum. The two ends of the roller and drive shaft are rotatably connected to the cavity through bearing seats. The roller and drive shaft are respectively connected to the drum for transmission. The driver is located outside the cavity, and the driving end is connected to the roller drive.

3. A drum-type vacuum plasma cleaner according to claim 2, characterized in that, A rotating shaft is provided between the roller and the driver. One end of the rotating shaft is connected to the roller, and the other end passes through the cavity and is connected to the driving end of the driver outside. A magnetohydrodynamic sealing device is provided at the connection between the rotating shaft and the cavity.

4. A drum-type vacuum plasma cleaner according to claim 1, characterized in that, The outer surfaces of the roller and the shaft are knurled, and the shaft and drive shaft are in close contact with the roller.

5. A drum-type vacuum plasma cleaner according to claim 1, characterized in that, A shielding cover is provided on the outer surface of the cavity at the position corresponding to the radio frequency power supply.

6. A drum-type vacuum plasma cleaner according to claim 1, characterized in that, An observation window is provided on the cavity door, and the observation window is made of quartz glass.

7. A drum-type vacuum plasma cleaner according to claim 1, characterized in that, A door lock and a door lock sensor are provided between the door and the cavity body. The door lock sensor is used to detect whether the door lock is locked in place.

8. A drum-type vacuum plasma cleaner according to claim 1, characterized in that, Sealing rings are provided between the cavity door and the cavity body, as well as on the air outlet and air inlet.

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