Cleaning and shielding device for heating base

Abstract

The utility model discloses a cleaning and shielding device for a heating base in plasma enhanced chemical vapor deposition coating equipment, which comprises a corrosion-resistant elastic cylinder and an elastic stepped shaft, and the elastic cylinder is used for being matched with a bushing hole of the heating base. One end of the elastic cylinder is in threaded connection with the small end of the elastic stepped shaft, and the large end of the elastic stepped shaft is used for being matched with an ejector pin head hole of the heating base. According to the cleaning shielding device, the elastic cylinder and the elastic stepped shaft are in threaded connection to avoid falling off, meanwhile, radial expansion is generated due to threaded connection, and the elastic cylinder and the elastic stepped shaft are elastically attached and shield the inner wall of the stepped through hole.

Description

TECHNICAL FIELD

[0001] The utility model relates to PECVD film coating equipment in the heating base maintenance cleaning technical field, especially a kind of cleaning shielding device of heating base. BACKGROUND

[0002] Plasma enhanced chemical vapor deposition (PECVD) film coating process is an important process in thin film transistor liquid crystal display (TFT-LCD) manufacturing process, and heating base (Susceptor) is one of the key components in plasma enhanced chemical vapor deposition equipment, which is made of aluminum alloy and can be used as the lower plate of parallel capacitor; It has heating effect and can provide temperature conditions for reaction; It can make lifting movement and can provide reaction spacing conditions for reaction. Figure 1 As shown in the drawings, the specific position of heating base in plasma enhanced chemical vapor deposition film coating equipment is uniformly distributed with stepped through hole as positioning reference. Figure 2 And Figure 3 As shown in the drawings, bush hole 402 (Bush hole) in stepped through hole is used to fix ceramic bushing, and thimble is sleeved in ceramic bushing, stepped through hole has thimble shaft hole and thimble head hole 403 respectively matched with thimble shaft and thimble head, and stepped through hole, ceramic bushing and thimble are coaxially arranged.

[0003] Particles, arc breakdown, discolored spots and incorrect operation all indicate that heating base needs to be replaced, and the replaced heating base will remove ceramic bushing and thimble and return to supply end for maintenance. The returned heating base needs to be cleaned to remove anodic oxide film on the surface of heating base and other dirt adhered to the anodic oxide film, and then anodizing is performed again. This cleaning operation is mainly carried out in alkaline aqueous solution, that is, heating base is completely immersed in alkaline aqueous solution. Since each cleaning operation will reduce the base material of heating base, the inner diameter of stepped through hole will be expanded after the inner wall of stepped through hole is corroded by alkaline aqueous solution. Basically, each time the maintenance is cleaned, the diameter of stepped through hole will increase by about 0.1mm. When the increased size exceeds 0.5mm, the gap between stepped through hole and ceramic bushing is too large, which greatly reduces the fitting accuracy and coaxial accuracy of stepped through hole and ceramic bushing and thimble, and the heating base will be scrapped.

[0004] In the existing maintenance cleaning and stripping operation, the inner wall surface of the stepped through hole is usually shielded by a conical plug, but a good and stable shielding effect cannot be achieved. This is because the pin head hole 403 has a hole diameter of about 11 mm and a hole depth of about 3 mm, and the pin shaft hole has a hole diameter of about 8 mm and a hole depth of about 4 mm. When the conical plug is used, due to the existence of the stepped hole, the conical plug is difficult to simultaneously contact the pin head hole wall and the pin shaft hole wall. At the same time, due to the shallow hole depth, the insertion depth of the conical plug is insufficient, and the contact area of the conical plug with the inner wall of the hole is limited. This leads to the fact that in actual application, the conical plug at the pin head hole is easily detached during the cleaning process. Moreover, during the entire maintenance process, the temperature change of part of the program also causes the conical plug at the pin head hole to be detached due to thermal expansion and contraction, thereby failing to effectively shield the inner wall surface of the stepped through hole, and the inner wall surface of the stepped through hole cannot avoid corrosion by the alkaline aqueous solution, and the service life of the heating base cannot be prolonged. Therefore, how to effectively and stably shield the inner wall surface of the stepped through hole from corrosion by the alkaline aqueous solution, avoid the increase in the diameter of the stepped through hole, and prolong the service life of the heating base is a technical problem to be solved. Content of the utility model

[0005] Therefore, in view of the technical problem that the inner wall surface of the stepped through hole cannot be effectively shielded and is easily corroded by the alkaline aqueous solution, thereby causing the diameter of the stepped through hole to increase, the utility model provides a cleaning and shielding device for a heating base in a plasma-enhanced chemical vapor deposition film coating equipment, which can effectively and stably shield the inner wall surface of the stepped through hole from corrosion by the alkaline aqueous solution, avoid the increase in the diameter of the stepped through hole, and prolong the service life of the heating base.

[0006] The utility model provides a kind of cleaning and shielding device for a heating base in a plasma-enhanced chemical vapor deposition film coating equipment, including corrosion-resistant, with elastic elastic cylinder and elastic stepped shaft, the elastic cylinder is used to and bushing hole adaptation, the end surface of the elastic cylinder is connected with the connection hole along central axis, the small end of the elastic stepped shaft is connected with the connection hole by screw thread, the large end of the elastic stepped shaft is used to and pin head hole adaptation.

[0007] Further, a first annular groove is formed in the circumferential surface of the other end of the elastic cylinder, and a corrosion-resistant first elastic ring is arranged in the first annular groove. A third annular groove is formed in the circumferential surface of the large end of the elastic stepped shaft, and a corrosion-resistant third elastic ring is arranged in the third annular groove.

[0008] Further, a flange is further arranged at the other end of the elastic cylinder, and a fixing hole is arranged on the flange, and a fixing screw is arranged in the fixing hole.

[0009] Further, the large end face of the elastic stepped shaft is provided with a slot, a cross slot, a key slot, a hexagonal slot, a sunburst slot, a star slot or a triangular slot.

[0010] Further, the elastic stepped shaft is a three-step stepped shaft.

[0011] Further, a second annular groove is formed on the end face of the elastic cylinder, and a second elastic ring is arranged in the second annular groove.

[0012] Further, the Poisson's ratio of the elastic cylinder, the flange and the elastic stepped shaft is 0.064-0.28.

[0013] Further, the material of the first elastic ring, the second elastic ring and the third elastic ring is one of fluorine rubber, perfluorinated rubber, ethylene-propylene rubber, polytetrafluoroethylene and chloroprene rubber.

[0014] Further, the material of the elastic cylinder and the elastic stepped shaft is polyether ether ketone, tetrafluoroethylene or polyvinylidene fluoride.

[0015] Further, the material of the fixing screw is titanium alloy.

[0016] Compared with the prior art, the technical scheme has the following beneficial effects:

[0017] 1. The cleaning shielding device provided by the utility model avoids falling by thread connection of the elastic cylinder and the elastic stepped shaft. Figure 5 As shown in the drawing, the elastic cylinder is inserted into the bushing hole, the elastic stepped shaft is inserted into the thimble hole and is thread connected with the elastic cylinder from the direction of the thimble hole. The elastic cylinder and the elastic stepped shaft are screwed relatively until the elastic cylinder is in contact with the bottom of the bushing hole and the large end of the elastic stepped shaft is in contact with the bottom of the thimble hole. At this time, the elastic cylinder and the elastic stepped shaft are thread connected and clamped on the heating base, which can effectively avoid falling. The other end of the elastic cylinder is also provided with a flange, and the fixing screw is thread connected with the inherent screw hole on the heating base through the fixing hole on the flange, so as to fix the elastic cylinder on the heating base and further avoid falling. In summary, compared with the conical plug in the prior art, the cleaning shielding device provided by the utility model can effectively avoid falling.

[0018] 2. The cleaning and shielding device provided by this utility model generates radial expansion through the screw connection of an elastic cylinder and an elastic stepped shaft. The elastic cylinder and the elastic stepped shaft elastically adhere to and shield the inner wall of the stepped through hole. When the elastic cylinder contacts the bottom of the bushing hole and the large end of the elastic stepped shaft contacts the bottom of the ejector pin hole, continued relative screwing of the elastic cylinder and the elastic stepped shaft prevents them from getting closer due to the restriction of the corresponding hole bottoms. This causes the elastic cylinder and the elastic stepped shaft to expand radially, making the large ends of the elastic cylinder and the elastic stepped shaft fit more closely to the inner walls of the bushing hole and the ejector pin hole, effectively shielding the inner wall of the stepped through hole and thus effectively preventing corrosion of the inner wall surface of the stepped through hole by alkaline aqueous solution. Furthermore, when the fixing screw passes through the fixing hole to fix the flange to the heating base, it also exerts pressure on the elastic cylinder towards the bottom of the bushing hole, further increasing the radial expansion of the elastic cylinder and further improving the shielding effect on the inner wall surface of the stepped through hole.

[0019] 2.1 Due to the limitation of the bottom of the ejector pin hole, the elastic stepped shaft is relatively screwed and radially expanded. The third elastic ring is deformed under the pressure of the third annular groove and the inner wall of the ejector pin hole, which effectively prevents the alkaline aqueous solution from entering and contacting the inner wall of the stepped through hole from the ejector pin hole, and further protects the inner wall of the stepped through hole from the corrosion of the alkaline aqueous solution.

[0020] 2.2 Due to the limitation of the bottom of the bushing hole, the elastic cylinder is relatively screwed and causes it to expand radially. At the same time, when the fixing screw passes through the fixing hole to fix the flange to the heating base, the radial expansion of the elastic cylinder will be further increased. The first elastic ring is deformed under the compression of the first annular groove and the inner wall of the bushing hole, which effectively prevents the alkaline aqueous solution from entering and contacting the inner wall of the stepped through hole from the bushing hole, and further protects the inner wall of the stepped through hole from the corrosion of the alkaline aqueous solution.

[0021] 2.3 When the fixing screw passes through the fixing hole to fix the flange to the heating base, and when the second elastic ring contacts the bottom of the bushing hole, the elastic cylinder continues to be rotated relative to it, generating pressure on the elastic cylinder towards the bottom of the bushing hole. The second elastic ring deforms under the compression of the second annular groove and the bottom of the bushing hole, effectively preventing alkaline aqueous solution from entering and contacting the inner wall of the bushing hole from the bottom of the bushing hole, further protecting the inner wall of the bushing hole from corrosion by alkaline aqueous solution.

[0022] In summary, the cleaning and shielding device provided by this utility model can effectively and stably shield the inner wall surface of the stepped through hole, avoid corrosion by alkaline aqueous solution, thereby preventing the enlargement of the stepped through hole, ensuring the fitting accuracy and coaxiality accuracy of the stepped through hole with the ceramic bushing and ejector pin, and extending the service life of the heating base.

[0023] 3. A groove is provided on the large end face of the flexible stepped shaft to facilitate the installation and removal of the cleaning shielding device. The large end face of the flexible stepped shaft is provided with a slotted groove, cross groove, plum blossom groove, internal hexagonal groove, star groove, or triangular groove, which facilitates the installation and removal of the cleaning shielding device and helps to improve the repair efficiency of the heating base. Attached Figure Description

[0024] Figure 1 This is a top view of the heating base in a plasma-enhanced chemical vapor deposition (PECVD) coating apparatus in the prior art;

[0025] Figure 2 This is a partially enlarged cross-sectional view of the ejector pin of the heating base in a plasma-enhanced chemical vapor deposition coating device in the prior art;

[0026] Figure 3 This is a cross-sectional view of the stepped through-hole at the ejector pin of the heating base in a plasma-enhanced chemical vapor deposition coating device in the prior art;

[0027] Figure 4 This is a cross-sectional view of Embodiment 1 of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model;

[0028] Figure 5 This is an assembly diagram of Embodiment 1 of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model;

[0029] Figure 6 This is a cross-sectional view of Embodiment 2 of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model;

[0030] Figure 7 This is a three-dimensional structural diagram of the elastic cylinder and flange in Embodiment 2 of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model.

[0031] Figure 8 This is a three-dimensional structural diagram of the elastic stepped shaft in Embodiment 2 of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model.

[0032] Figure 9 This is an assembly diagram of Embodiment 2 of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model;

[0033] Figure 10 This is a schematic diagram of the installation state of the cleaning and shielding device for the heating base in the plasma-enhanced chemical vapor deposition coating equipment of this utility model, in Embodiment 2.

[0034] Explanation of reference numerals in the attached figures:

[0035] 1-Elastic cylinder; 101-Connecting hole; 102-First elastic ring; 102'-First annular groove; 103-Second elastic ring; 103'-Second annular groove; 104-Flange; 105-Fixing hole; 2-Elastic stepped shaft; 201-Large end; 202-Small end; 203-Third elastic ring; 203'-Third annular groove; 3-Fixing screw; 4-Heating base; 401-Screw hole; 402-Bushing hole; 403-Ejector head hole; 5-Ceramic bushing; 6-Ejector pin. Detailed Implementation

[0036] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0037] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0038] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0039] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0040] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0041] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0042] Example 1

[0043] like Figure 4As shown, Embodiment 1 provides a cleaning and shielding device for the heating base in a plasma-enhanced chemical vapor deposition (PECVD) coating apparatus, comprising a corrosion-resistant elastic cylinder 1 and an elastic stepped shaft 2. The elastic cylinder 1 is adapted to a bushing hole 402. A second annular groove 103' is formed on the end face of one end of the elastic cylinder 1. The second annular groove 103' is an annular groove on the end face, and a second elastic ring 103 is disposed within the groove of the second annular groove 103'. A connecting hole 101 is formed along the central axis at the center of the end face of one end of the elastic cylinder 1, and the inner wall of the connecting hole 101 is provided with an internal thread. A first annular groove 102' is formed on the circumferential surface of the other end of the elastic cylinder 1. The first annular groove 102' is an annular groove on the circumferential surface, and a first elastic ring 102 is disposed within the groove of the first annular groove 102'. The elastic stepped shaft 2 has two steps. The circumferential surface of the small end 202 is provided with an external thread that mates with the internal thread of the connecting hole 101. The small end 202 and the connecting hole 101 are fixedly connected by the internal and external threads to the elastic cylinder 1 and the elastic stepped shaft 2. The circumferential surface of the large end 201 is provided with a third annular groove 203', which is a circumferential annular groove. A third elastic ring 203 is provided in the groove of the third annular groove 203'. The large end 201 of the elastic stepped shaft 2 is adapted to the ejector pin hole 403.

[0044] The cleaning and shielding devices are all made of corrosion-resistant materials, preferably alkali-resistant materials. Specifically, the elastic cylinder 1 and the elastic stepped shaft 2 are made of polyetheretherketone (PEEK), with a Poisson's ratio of 0.064 to 0.28, and the elastic ring is made of fluororubber.

[0045] The materials of the elastic cylinder 1 and the elastic stepped shaft 2 can also be tetrafluoroethylene or polyvinylidene fluoride; the materials of the above-mentioned elastic ring can also be one of perfluororubber, ethylene propylene rubber, polytetrafluoroethylene and chloroprene rubber.

[0046] The large end 201 of the elastic stepped shaft 2 can be laid flat in the ejector head hole 403 or protrude from the ejector head hole 403.

[0047] In use, firstly, the elastic cylinder 1 is inserted into the bushing hole 402 of the stepped through hole of the heating base 4. The first elastic ring 102 contacts the inner wall of the bushing hole 402, and the second elastic ring 103 contacts the bottom of the bushing hole 402. Then, the elastic stepped shaft 2 is inserted into the stepped through hole from the direction of the ejector pin hole 403, and screwed to the connecting hole 101 through the small end 202, thus fixing the elastic cylinder 1 and the elastic stepped shaft 2 onto the heating base 4. The third elastic ring 203 of the elastic stepped shaft 2 contacts the inner wall of the ejector pin hole 403. As the elastic cylinder 1 and the elastic stepped shaft 2 continuously rotate relative to each other, when they can no longer approach each other due to the limitation of the bottom of the hole, they undergo radial expansion. This causes the circumferential surface of the elastic cylinder 1 to fit tightly against the inner wall of the bushing hole 402, and the circumferential surface of the large end 201 of the elastic stepped shaft 2 to fit tightly against the inner wall of the ejector pin hole 403. This effectively shields the inner wall of the stepped through hole, preventing corrosion from alkaline aqueous solutions. Simultaneously, each elastic ring deforms under the pressure of the corresponding groove and the bottom or inner wall of the hole, further enhancing the shielding effect on the inner wall of the stepped through hole, collectively protecting the surface of the inner wall of the stepped through hole from corrosion by alkaline aqueous solutions.

[0048] Example 2

[0049] See Figures 4 to 6 Example 2 provides a cleaning and shielding device for the heating base in a plasma-enhanced chemical vapor deposition (PECVD) coating apparatus. The device includes an elastic cylinder 1, an elastic stepped shaft 2, and fixing screws 3. A second annular groove 103' is formed on one end face of the elastic cylinder 1. A second elastic ring 103 is disposed within the second annular groove 103'. A connecting hole 101 is also formed along the central axis at the center of one end face of the elastic cylinder 1, and the inner wall of the connecting hole 101 is provided with internal threads. The elastic cylinder 1 is adapted to the bushing hole 402 in the heating base 4. A flange 104 is also provided at the other end of the elastic cylinder 1. The flange 104 is also an elastic cylinder, integrally formed with the elastic cylinder 1. Two through holes symmetrically arranged on the end face of the flange 104 are fixing holes 105. A first annular groove 102' is provided on the circumferential surface of one end of the elastic cylinder 1 near the flange 104. The first annular groove 102' is a circumferential annular groove, and a first elastic ring 102 is provided inside the first annular groove 102'.

[0050] The flexible stepped shaft 2 has three steps, including a large end 201, a small end 202, and a middle end. A third annular groove 203' is formed on the circumferential surface of the large end 201. The third annular groove 203' is a circumferential annular groove, and a third elastic ring 203 is disposed within the third annular groove 203'. A slotted groove is provided on the end face of the large end 201, allowing for quick disassembly of the flexible stepped shaft 2 when used with a slotted screwdriver. The large end 201 is fitted with the ejector pin hole 403, and the middle end is fitted with the ejector pin shaft hole. The inner wall surface of the connecting hole 101 of the flexible cylinder 1 is provided with internal threads, and the circumferential surface of the small end 202 of the flexible stepped shaft 2 is provided with external threads. The connecting hole 101 of the flexible cylinder 1 and the small end 202 of the flexible stepped shaft 2 are screwed together by the internal and external threads.

[0051] The cleaning and shielding devices are all made of corrosion-resistant materials, preferably alkali-resistant materials. Specifically, the body of the elastic cylinder 1 and the elastic stepped shaft 2 is made of polyetheretherketone (PEEK), with a Poisson's ratio of 0.064 to 0.28. The elastic ring is made of fluororubber, and the fixing screw 3 is made of titanium alloy.

[0052] The materials of the elastic cylinder 1 and the elastic stepped shaft 2 can also be tetrafluoroethylene or polyvinylidene fluoride; the materials of the above-mentioned elastic ring can also be one of perfluororubber, ethylene propylene rubber, polytetrafluoroethylene and chloroprene rubber.

[0053] The large end of the flexible stepped shaft can be laid flat in the ejector pin hole or protrude from the ejector pin hole.

[0054] During installation, the difference from Embodiment 1 is that the fixing screw 3 passes through the fixing hole 105 on the flange 104 and screws into the screw hole 401 of the heating base 4, thereby fixing the elastic cylinder 1 on the heating base 4 and further avoiding the problem of the cleaning shielding device falling off.

[0055] The cooperation of the elastic cylinder 1 and the elastic stepped shaft 2 effectively and stably shields the inner wall of the stepped through hole, preventing corrosion from alkaline aqueous solutions and maintaining the stability of each diameter within the stepped through hole. This ensures the fitting and coaxial accuracy between the stepped through hole and the ceramic bushing 5 and ejector pin 6, extending the service life of the heating base 4. Especially for the diameter of the bushing hole 402, the cleaning and shielding device provides double protection to the inner wall of the bushing hole 402 from the direction of the ejector pin head hole 403, further emphasizing the fitting and coaxial accuracy between the bushing hole 402 and the ceramic bushing 5 and ejector pin 6.

[0056] Meanwhile, the corrosion-resistant material of the cleaning shielding device has a low coefficient of thermal expansion and good dimensional stability, maintaining the dimensional accuracy of the parts even in environments with large temperature variations. Furthermore, the temperature will not exceed 100℃ throughout the entire maintenance process of the heating base 4.

[0057] After the heating base 4 is repaired, it can be disassembled in the reverse order of installation to put it back into use. This is convenient and quick, extends the service life of the heating base 4, and reduces production costs.

[0058] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0059] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A cleaning and shielding device for a heating base, characterized in that, It includes a corrosion-resistant elastic cylinder (1) and an elastic stepped shaft (2). The elastic cylinder (1) is adapted to the bushing hole (402) of the heating base. One end of the elastic cylinder (1) is threaded to the small end (202) of the elastic stepped shaft (2). The large end (201) of the elastic stepped shaft (2) is adapted to the pin hole (403) of the heating base.

2. The cleaning and shielding device for the heating base according to claim 1, characterized in that, A first annular groove (102') is provided on the circumferential surface of the other end of the elastic cylinder (1), and a corrosion-resistant first elastic ring (102) is provided in the first annular groove (102'). A third annular groove (203') is provided on the circumferential surface of the large end (201) of the elastic stepped shaft (2), and a corrosion-resistant third elastic ring (203) is provided in the third annular groove (203').

3. The cleaning and shielding device for the heating base according to claim 2, characterized in that, The other end of the elastic cylinder (1) is also provided with a flange (104), and a fixing hole (105) is provided on the flange (104), and a fixing screw (3) is provided in the fixing hole (105).

4. The cleaning and shielding device for the heating base according to claim 3, characterized in that, The large end (201) end face of the elastic stepped shaft (2) is provided with a slotted groove, a cross groove, a plum blossom groove, an internal hexagonal groove, a star groove, a star-shaped groove, or a triangular groove.

5. The cleaning and shielding device for the heating base according to claim 4, characterized in that, The elastic stepped shaft (2) is a stepped shaft with three steps.

6. The cleaning and shielding device for the heating base according to claim 5, characterized in that, A second annular groove (103') is provided on one end face of the elastic cylinder (1), and a second elastic ring (103) is provided in the second annular groove (103').

7. The cleaning and shielding device for the heating base according to claim 6, characterized in that, The Poisson's ratios of the elastic cylinder (1), flange (104), and elastic stepped shaft (2) are all 0.064 to 0.

28.

8. The cleaning and shielding device for the heating base according to claim 7, characterized in that, The first elastic ring (102), the second elastic ring (103) and the third elastic ring (203) are made of one of the following materials: fluororubber, perfluororubber, ethylene propylene rubber, polytetrafluoroethylene and chloroprene rubber.

9. The cleaning and shielding device for the heating base according to any one of claims 1 to 8, characterized in that, The materials of the elastic cylinder (1) and the elastic stepped shaft (2) are polyetheretherketone, tetrafluoroethylene or polyvinylidene fluoride.

10. The cleaning and shielding device for the heating base according to claim 3, characterized in that, The fixing screw (3) is made of titanium alloy.

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