Czochralski method crystal growth device

Abstract

The utility model relates to the field of crystal growth, in particular to a Czochralski method crystal growth device. The Czochralski method crystal growth device comprises a crucible, a moving unit, a seed crystal, a seed crystal moving unit and a furnace body, the crucible is used for accommodating molten raw materials; the moving unit is in transmission connection with the crucible, and the moving unit is used for driving the crucible to move in multiple directions in the movable plane; the seed crystal moving unit is connected with the seed crystal; the seed crystal moving unit is used for driving the seed crystal to move and driving the seed crystal to rotate along the axis of the seed crystal; the furnace body is connected with the moving unit and the seed crystal moving unit; wherein the moving direction of the seed crystal under the driving action of the seed crystal moving unit is perpendicular to the moving plane. The Czochralski method crystal growth device can adjust the growth direction of the crystal, and is simple in structure and convenient for later single crystal processing.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth, and more specifically, to a Czochralski crystal growth apparatus. Background Technology

[0002] The Czochralski method is a highly efficient and widely used crystal growth technique, especially suitable for growing high-quality single-crystal materials. The Czochralski method involves heating and melting the raw materials that make up the crystal in a crucible, attaching a seed crystal to the surface of the melt, and pulling the melt. Under controlled conditions, the atoms or molecules of the seed crystal and the melt continuously rearrange at the interface, gradually solidifying as the temperature decreases to grow a single crystal.

[0003] However, existing Czochralski crystal growth devices cannot adjust the growth direction of the crystal and have problems such as complex structure and high cost of post-processing of the crystal. Utility Model Content

[0004] The purpose of this invention is to provide a Czochralski crystal growth apparatus that can adjust the growth direction of the crystal and has a simple structure, which facilitates subsequent single crystal processing.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] This utility model provides a Czochralski crystal growth apparatus, comprising:

[0007] A crucible is used to hold molten raw materials.

[0008] The moving unit is connected to the crucible drive and is used to drive the crucible to move in multiple directions within the movable plane;

[0009] The seed crystal and the seed crystal moving unit are connected to the seed crystal; the seed crystal moving unit is used to drive the seed crystal to move and to drive the seed crystal to rotate along its own axis.

[0010] The furnace body is connected to the moving unit and the seed crystal moving unit;

[0011] In this case, the direction of movement of the seed crystal under the driving action of the seed crystal active unit is perpendicular to the active plane.

[0012] In an optional embodiment, the moving unit includes a first moving mechanism, a moving platform, and a second moving mechanism; the first moving mechanism is drivenly connected to the crucible and the moving platform; the second moving mechanism is drivenly connected to the moving platform.

[0013] The direction of movement of the crucible driven by the first moving mechanism and the direction of movement of the moving platform driven by the second moving mechanism are perpendicular to each other.

[0014] In an optional embodiment, the moving unit includes a first sensor connected to the first moving mechanism for detecting the moving speed of the crucible under the drive of the first moving mechanism.

[0015] In an optional implementation, the moving unit includes a second sensor connected to the second moving mechanism for detecting the moving speed of the moving platform under the drive of the second moving mechanism.

[0016] In an optional implementation, both the first moving mechanism and the second moving mechanism are lead screw mechanisms.

[0017] In an optional embodiment, the seed crystal moving unit includes a seed crystal rod, a telescopic component, a worm gear, and a worm; both ends of the seed crystal rod are connected to the seed crystal and the moving ends of the telescopic component, respectively; the worm gear is fixedly sleeved on the seed crystal rod; the worm gear and the worm gear are movably engaged; wherein, the axis of the seed crystal, the axis of the seed crystal rod, and the axis of the worm gear coincide with each other.

[0018] In an optional embodiment, the seed crystal moving unit further includes a third sensor, which is disposed at the fixed end of the telescopic member and is used to detect the moving speed of the seed crystal under the drive of the seed crystal moving unit.

[0019] In an optional embodiment, the Czochralski crystal growth apparatus further includes a rotary motor and a rotary platform. The rotary motor is driven to drive the rotary platform to rotate. The rotary platform is driven to move the moving unit.

[0020] In an optional embodiment, the Czochralski crystal growth apparatus further includes a support, and the furnace body is connected to the support; the support has a chamber, and the moving unit is located inside the chamber; the furnace body has a cavity, and the crucible and the seed crystal are both located inside the cavity;

[0021] The cavity and chamber are connected.

[0022] In an optional embodiment, the Czochralski crystal growth apparatus further includes a connector, the two ends of which are connected to the crucible and the moving unit, respectively.

[0023] The beneficial effects of the Czochralski crystal growth apparatus provided in this embodiment of the invention include:

[0024] The Czochralski crystal growth apparatus includes a crucible, a moving unit, a seed crystal, a seed crystal moving unit, and a furnace body. The crucible is used to hold molten raw materials. The moving unit is connected to the crucible via a transmission mechanism and is used to drive the crucible to move in multiple directions within the moving plane. The seed crystal moving unit is connected to the seed crystal and is used to drive the seed crystal to move and rotate along its own axis. The furnace body is connected to the moving unit and the seed crystal moving unit. The direction of movement of the seed crystal under the driving action of the seed crystal moving unit is perpendicular to the moving plane.

[0025] This Czochralski crystal growth apparatus consists of a crucible, a seed crystal, and a furnace. A movable unit drives the seed crystal to move and rotate, causing the molten material in the crucible to solidify at the interface with the seed crystal, forming a crystal. The apparatus also incorporates a movable unit, allowing the crucible to move in multiple directions within a moving plane. This allows adjustment of the crystal growth direction by changing the direction of the movable unit; further adjustments can be made by regulating the speed of both the movable unit and the seed crystal. Furthermore, this Czochralski crystal growth apparatus has a simple structure, facilitating subsequent single-crystal processing. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a cross-sectional view of the Czochralski crystal growth apparatus provided in this embodiment;

[0028] Figure 2 A cross-sectional view of the crucible, moving unit, rotating motor, and connecting parts provided in this embodiment;

[0029] Figure 3 This is a schematic diagram of the structure of the first moving mechanism and the second moving mechanism provided in this embodiment;

[0030] Figure 4 This is a cross-sectional view of the seed crystal and the active seed crystal unit provided in this embodiment.

[0031] Icons: 100-Czochralski crystal growth apparatus; 110-Cruise; 120-Moving unit; 121-First moving mechanism; 122-Moving platform; 123-Second moving mechanism; 124-First sensor; 125-Second sensor; 126-Screw mechanism; 127-Hydraulic cylinder; 128-Linear slide rail; 129-Sliding component; 130-Seed crystal; 140-Seed crystal moving unit; 141-Seed crystal rod; 142-Telescopic component; 143-Worm gear; 144-Worm; 145-Third sensor; 150-Furnace body; 151-Cavity; 160-Rotating motor; 170-Rotating platform; 180-Support; 181-Cavity; 190-Connector. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0033] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0034] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0035] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0036] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0037] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0038] Please refer to Figure 1 and Figure 3 , Figure 1 This is a cross-sectional view of the Czochralski crystal growth apparatus 100 provided in this embodiment; Figure 2 A cross-sectional view of the crucible 110, moving unit 120, rotating motor 160, and connecting member 190 provided in this embodiment; Figure 3 This is a schematic diagram of the structure of the first moving mechanism 121 and the second moving mechanism 123 provided in this embodiment. The X direction is the first direction, the Y direction is the second direction, and the Z direction is the third direction; wherein, the first direction, the second direction, and the third direction are perpendicular to each other.

[0039] This embodiment provides a Czochralski crystal growth apparatus 100, which includes a crucible 110, a moving unit 120, a seed crystal 130, a seed crystal moving unit 140, and a furnace body 150. The crucible 110 is used to contain molten raw materials. The moving unit 120 is connected to the crucible 110 and is used to drive the crucible 110 to move in multiple directions within a movable plane. The seed crystal moving unit 140 is connected to the seed crystal 130 and is used to drive the seed crystal 130 to move and rotate along its own axis. The furnace body 150 is connected to the moving unit 120 and the seed crystal moving unit 140. The direction of movement of the seed crystal 130 under the driving action of the seed crystal moving unit 140 is perpendicular to the movable plane.

[0040] Specifically, the Czochralski crystal growth apparatus 100 uses a crucible 110 containing molten material and a seed crystal 130 in contact with the molten material to allow the molten material to solidify at the interface between the seed crystal 130 and the molten material, thereby growing a single crystal. In this embodiment, the Czochralski method is used for crystal growth; therefore, the seed crystal 130 needs to move upwards relative to the opening of the crucible 110. Understandably, the seed crystal 130 moves along a third direction, i.e., vertically. Furthermore, the seed crystal 130 also needs to rotate around its own axis. Therefore, this embodiment includes a seed crystal moving unit 140 to drive the seed crystal 130 to move along a third direction and rotate the seed crystal 130.

[0041] This embodiment also includes a moving unit 120, which, being connected to the crucible 110, can move the crucible 110 in multiple directions within the movable plane. It should be noted that in this embodiment, the movable plane is horizontal; therefore, the moving unit 120 moves the crucible 110 in multiple directions within the horizontal plane. Thus, the moving direction of the moving unit 120 is perpendicular to the moving direction of the seed crystal 130. Consequently, since the crucible 110 moves horizontally, the seed crystal 130 moves vertically, and the crystal growth direction is influenced by both the moving directions of the crucible 110 and the seed crystal 130. Therefore, the crystal growth direction can be changed by altering the moving direction of the crucible 110.

[0042] In this embodiment, the moving unit 120 moves simultaneously in two directions, thereby causing the crucible 110 to move in two directions. If the angle between the two moving directions changes, the position of the crucible 110 will change, thereby changing the growth direction of the crystal. For example, in this embodiment, the first direction and the second direction are perpendicular. In other embodiments, the first direction and the second direction are no longer perpendicular, so the growth direction of the crystal in other embodiments is different from the growth direction of the crystal in this embodiment.

[0043] Furthermore, the growth direction of the crystal will also change under the influence of the moving speed. Understandably, due to the different moving speeds of the crucible 110, the distance that the crucible 110 moves in the same time period will also be different, resulting in different change paths of the position of the crucible 110, thus leading to different crystal growth directions. In turn, the crystal growth direction is affected by changing the moving speed.

[0044] In this embodiment, the moving unit 120 and the seed crystal moving unit 140 are both connected to the furnace body 150. The furnace body 150 has a cavity 151, and the crucible 110 is located in the cavity 151. The furnace body 150 is used to control the temperature in the crystal growth environment to improve the quality of the grown crystal.

[0045] Furthermore, in this embodiment, the moving unit 120 includes a first moving mechanism 121, a moving platform 122, and a second moving mechanism 123; the first moving mechanism 121 is drivenly connected to the crucible 110 and the moving platform 122; the second moving mechanism 123 is drivenly connected to the moving platform 122; wherein, the direction of movement of the crucible 110 under the drive of the first moving mechanism 121 and the direction of movement of the moving platform 122 under the drive of the second moving mechanism 123 are perpendicular to each other.

[0046] Specifically, the first moving mechanism 121 is driven to move the crucible 110; while the second moving mechanism 123 is driven to move the moving platform 122. Since the first moving mechanism 121 and the moving platform 122 are connected, the first moving mechanism 121 and the crucible 110, which is driven to move the first moving mechanism 121, will move with the moving platform 122.

[0047] In this embodiment, the first moving mechanism 121 drives the crucible 110 to move along a first direction, and the second moving mechanism 123 drives the moving platform 122 to move along a second direction. Since the first and second directions are perpendicular to each other, the direction of movement of the crucible 110 driven by the first moving mechanism 121 is perpendicular to the direction of movement of the moving platform 122 driven by the second moving mechanism 123.

[0048] Furthermore, in this embodiment, the crucible 110, the first moving mechanism 121, the moving platform 122, and the second moving mechanism 123 are stacked sequentially along the vertical direction, i.e., the third direction.

[0049] Since the moving directions of the first moving mechanism 121 and the second moving mechanism 123 in this embodiment are already determined, the growth direction of the crystal can be adjusted by changing the moving speed of the first moving mechanism 121 and the moving speed of the second moving mechanism 123.

[0050] Specifically, the crucible 110 moves at a speed of V under the drive of the first moving mechanism 121. X The moving speed of the mobile platform 122, driven by the second moving mechanism 123, is V. Y The moving speed of seed crystal 130 driven by seed crystal active unit 140 is V. Z It should be noted that the crucible 110 will move along with the moving platform 122; therefore, the moving speed of the crucible 110 in the first direction is V. X The speed of movement in the second direction is V Y In this embodiment, the moving speed V of the crucible 110 is obtained using Formula 1, which is as follows:

[0051] V = √(V X 2 +V Y 2 ).

[0052] Subsequently, using Formula 2, the deflection angle of the crystal relative to the horizontal plane is obtained, thus determining the crystal growth direction; Formula 2 is as follows:

[0053] tanθ=V / V Z .

[0054] It should be noted that since the crucible 110 moves under the drive of the moving unit 120, and the moving plane of the moving unit 120 in this embodiment is a horizontal plane, the crucible 110 only moves within the horizontal plane. Therefore, the moving speed of the crucible 110 is its moving speed in the horizontal direction. Similarly, the seed crystal 130 only moves in the vertical direction; therefore, the moving speed of the seed crystal 130 is its moving speed in the vertical direction.

[0055] If the staff wants to obtain a crystal that grows in a certain direction, they can adjust the moving speed of the first moving mechanism 121, the moving speed of the second moving mechanism 123, and the moving speed of the seed crystal 130 using Formula 1 and Formula 2 to adjust the growth direction of the crystal.

[0056] Based on the above, please refer to... Figures 1-3 In this embodiment, the first moving mechanism 121 is a lead screw moving mechanism 126, and the second moving mechanism 123 is a hydraulic cylinder 127, thereby driving the crucible 110 to move through the lead screw moving mechanism 126 and the hydraulic cylinder 127.

[0057] In other embodiments, the first moving mechanism 121 and the second moving mechanism 123 may both be lead screw mechanisms 126 or hydraulic cylinders 127. In other embodiments, the first moving mechanism 121 and the second moving mechanism 123 may also be other structures that enable the crucible 110 to move linearly.

[0058] In this embodiment, a first sensor 124 and a second sensor 125 are respectively connected to the first moving mechanism 121 and the second moving mechanism 123; the first sensor 124 is used to detect the moving speed of the first moving mechanism 121, and the second sensor 125 is used to detect the moving speed of the second moving mechanism 123.

[0059] In this embodiment, the first moving mechanism 121 is a lead screw mechanism 126, which includes a nut, a screw rod, a driver, and a guide. The driver is connected to one end of the screw rod via a coupling and drives the screw rod to rotate. The nut is threadedly engaged with the screw rod and slidably engaged with the guide, thus moving along the extension direction of the guide under the action of the guide, without rotating with the screw rod. The crucible 110 is connected to the nut in the lead screw mechanism 126, thereby moving along the extension direction of the guide, which is parallel to the first direction. The first sensor 124 can be disposed on the driver to detect the moving speed of the nut, thereby obtaining the moving speed of the crucible 110 under the drive of the first moving mechanism 121, and thus obtaining the moving speed of the crucible 110 in the first direction.

[0060] The second moving mechanism 123 is a hydraulic cylinder 127. To facilitate the installation of the second sensor 125, this embodiment also includes a linear slide rail 128 and a sliding member 129. The fixed end of the hydraulic cylinder 127 is connected to one end of the linear slide rail 128, and the movable end of the hydraulic cylinder 127 is connected to the sliding member 129. Thus, under the drive of the hydraulic cylinder 127, the sliding member 129 can slide and cooperate with the linear slide rail 128. Furthermore, the extension direction of the linear slide rail 128 is parallel to the extension and retraction direction of the hydraulic cylinder 127. Thus, the second sensor 125 can be installed on the linear slide rail 128, and the moving platform 122 is connected to the sliding member 129. The second sensor 125 can detect the moving speed of the moving platform 122 under the drive of the second moving mechanism 123 by detecting the moving speed of the sliding member 129, thereby obtaining the moving speed of the crucible 110 in the second direction.

[0061] It should be noted that in this embodiment, both the first sensor 124 and the second sensor 125 are photoelectric speed sensors, which detect the movement of the nut and the sliding member 129 by utilizing the blocking and reflection of the light beam. Furthermore, the first sensor 124 and the second sensor 125 are electrically connected to an external power supply to power them. After receiving the light signal, the first sensor 124 and the second sensor 125 convert the light signal into an electrical signal, which is then transmitted to the display screen. The display screen converts the electrical signal into a digital signal to display the movement speed of the nut and the sliding member 129, thereby allowing the operator to obtain the movement speed of the crucible 110 in the first and second directions.

[0062] Further, please refer to Figures 1-4 The seed crystal moving unit 140 includes a seed crystal rod 141, a telescopic component 142, a worm gear 143, and a worm 144; both ends of the seed crystal rod 141 are connected to the seed crystal 130 and the moving ends of the telescopic component 142, respectively; the worm gear 143 is fixedly sleeved on the seed crystal rod 141; the worm 144 is movably engaged with the worm gear 143; wherein, the axis of the seed crystal 130, the axis of the seed crystal rod 141, and the axis of the worm gear 143 coincide with each other.

[0063] Specifically, the worm gear 143 and the worm 144 are movably coupled, causing the worm gear 143 to rotate around its axis under the drive of the worm 144. The worm gear 143 is fixedly sleeved on the seed crystal rod 141, and the axis of the worm gear 143 coincides with the axis of the seed crystal rod 141. Therefore, the seed crystal rod 141 will rotate around its axis under the drive of the worm gear 143. One end of the seed crystal rod 141 is connected to the seed crystal 130, and the axis of the seed crystal rod 141 coincides with the axis of the seed crystal 130. Therefore, the seed crystal 130 can rotate around its axis.

[0064] The other end of the seed crystal rod 141 is connected to the movable end of the telescopic member 142. The telescopic member 142 extends and retracts in the third direction, thereby enabling the movable end of the telescopic member 142 to drive the seed crystal rod 141 and the seed crystal 130 to move in the third direction. In this embodiment, the third direction is vertical, so the seed crystal rod 141 and the seed crystal 130 can rise and fall under the drive of the telescopic member 142.

[0065] It should be noted that the seed crystal 130 is located at the center of the crucible 110 and is in contact with the liquid surface of the solution contained in the crucible 110.

[0066] Based on the above, please refer to... Figures 1-4 The seed crystal moving unit 140 also includes a third sensor 145, which is disposed at the fixed end of the telescopic member 142 and is used to detect the moving speed of the seed crystal 130 under the drive of the seed crystal moving unit 140.

[0067] In this embodiment, the third sensor 145 is also a photoelectric speed sensor, and it is electrically connected to an external power supply, which powers the third sensor 145. After converting the optical signal into an electrical signal, the third sensor 145 transmits the electrical signal to the display screen. The display screen converts the electrical signal into a digital signal, thereby displaying the moving speed of the seed crystal 130. It should be noted that the detection object of the third sensor 145 is the movable end of the telescopic member 142. Since the movable end of the telescopic member 142 drives the seed crystal rod 141 and the seed crystal 130 to move, the extension and retraction speed of the movable end of the telescopic member 142 is the same as the lifting and lowering speed of the seed crystal 130. Therefore, the speed displayed on the screen is both the extension and retraction speed of the movable end of the telescopic member 142 and the lifting and lowering speed of the seed crystal 130.

[0068] The staff obtained the moving speed V of the first moving mechanism 121 from the first sensor 124, the second sensor 125, and the third sensor 145 respectively. X The moving speed V of the second moving mechanism 123 Y and the moving speed V of the seed crystal active unit 140 Z Then, the deflection angle of the crystal relative to the horizontal plane can be calculated according to Formula 1 and Formula 2, thereby obtaining the growth direction of the crystal.

[0069] In other embodiments, the first sensor 124, the second sensor 125, and the third sensor 145 can transmit electrical signals to a computer, and the computer can calculate the deflection angle by using formulas 1 and 2 after receiving the electrical signals.

[0070] In other embodiments, the first sensor 124, the second sensor 125, and the third sensor 145 may also employ other sensors capable of detecting speed, such as magnetoelectric speed sensors, Hall effect speed sensors, and ultrasonic speed sensors.

[0071] Further, please refer to Figure 1 and Figure 2 This embodiment also includes a rotating motor 160 and a rotating platform 170. The rotating motor 160 is connected to the rotating platform 170 and is used to drive the rotating platform 170 to rotate. The rotating platform 170 is connected to the moving unit 120.

[0072] Specifically, the rotating platform 170 is located below the second moving mechanism 123, and the rotating motor 160 is located below the rotating platform 170. The rotating motor 160 drives the rotating platform 170 to rotate, thereby driving the moving unit 120 and the crucible 110 to rotate synchronously. In turn, by rotating the crucible 110, the solute distribution of the molten raw material in the crucible 110 is made more uniform, avoiding defects in the grown crystal.

[0073] The synchronous rotation of the moving platform 122 and the crucible 110 ensures that the moving platform 122 does not deflect relative to the crucible 110, thus not affecting the horizontal movement of the crucible 110.

[0074] It should be noted that the rotational speed of the mobile platform 122 is the same as the rotational speed of the seed crystal 130.

[0075] Furthermore, this embodiment also includes a support 180, and the furnace body 150 is connected to the support 180; the support 180 has a chamber 181, and the moving unit 120 is located in the chamber 181; wherein, the cavity 151 and the chamber 181 are connected.

[0076] In this embodiment, the crucible 110 is placed inside the cavity 151 of the furnace body 150, allowing the furnace body 150 to control the temperature of the molten material inside the crucible 110, thus enabling stable crystal growth. Furthermore, a support 180 is provided to support the furnace body 150, ensuring that the moving unit 120 is located within the cavity 181 of the support 180. This prevents the heat generated inside the furnace body 150 from affecting the movement of the moving unit 120; for example, when the hydraulic cylinder 127 is used to move the crucible 110, the temperature can affect the hydraulic oil inside the hydraulic cylinder 127.

[0077] In order to ensure that the crucible 110 can move in the horizontal direction, the furnace body 150 needs to be provided with through holes to provide space for the crucible 110 to move, and the cavity 151 is also connected to the chamber 181 through the through holes.

[0078] As described above, since the cavity 151 and the chamber 181 are connected, some of the heat from the furnace body 150 will be dispersed into the chamber 181. In order to make the crystal growth more stable, this embodiment also provides a connector 190, the two ends of which are connected to the crucible 110 and the moving unit 120 respectively; thereby raising the crucible 110 so that the crucible 110 can absorb more heat, thereby improving the stability of crystal growth.

[0079] In summary, this embodiment, by setting up a crucible 110, a seed crystal 130, and a furnace body 150, and utilizing a seed crystal moving unit 140 to drive the seed crystal 130 to move and rotate, allows the molten material in the crucible 110 to solidify at the interface between the seed crystal 130 and the molten material in the crucible 110, forming a crystal. This embodiment also includes a moving unit 120, enabling the crucible 110 to move in multiple directions within a movable plane. This allows adjustment of the crystal growth direction by changing the moving direction of the moving unit 120; furthermore, the crystal growth direction can be adjusted by regulating the moving speed of the moving unit 120 and the moving speed of the seed crystal 130. Furthermore, this embodiment has a simple structure, facilitating subsequent single-crystal processing.

[0080] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A Czochralski crystal growth apparatus, characterized in that, include: A crucible (110) for holding molten raw materials; A moving unit (120) is connected to the crucible (110) in a transmission manner, and the moving unit (120) is used to drive the crucible (110) to move in multiple directions in a movable plane; Seed crystal (130) and seed crystal moving unit (140), the seed crystal moving unit (140) being connected to the seed crystal (130); the seed crystal moving unit (140) is used to drive the seed crystal (130) to move and to drive the seed crystal (130) to rotate along its own axis; A furnace body (150) is connected to the moving unit (120) and the seed crystal moving unit (140); The seed crystal (130) moves in a direction perpendicular to the active plane under the driving action of the seed crystal active unit (140).

2. The Czochralski crystal growth apparatus according to claim 1, characterized in that, The moving unit (120) includes a first moving mechanism (121), a moving platform (122), and a second moving mechanism (123); the first moving mechanism (121) is drivenly connected to the crucible (110) and the moving platform (122); the second moving mechanism (123) is drivenly connected to the moving platform (122). The direction of movement of the crucible (110) driven by the first moving mechanism (121) and the direction of movement of the moving platform (122) driven by the second moving mechanism (123) are perpendicular to each other.

3. The Czochralski crystal growth apparatus according to claim 2, characterized in that, The moving unit (120) includes a first sensor (124), which is connected to the first moving mechanism (121) and is used to detect the moving speed of the crucible (110) under the drive of the first moving mechanism (121).

4. The Czochralski crystal growth apparatus according to claim 2, characterized in that, The moving unit (120) includes a second sensor (125), which is connected to the second moving mechanism (123) and is used to detect the moving speed of the moving platform (122) under the drive of the second moving mechanism (123).

5. The Czochralski crystal growth apparatus according to claim 2, characterized in that, Both the first moving mechanism (121) and the second moving mechanism (123) are lead screw moving mechanisms (126).

6. The Czochralski crystal growth apparatus according to any one of claims 1-5, characterized in that, The seed crystal moving unit (140) includes a seed crystal rod (141), a telescopic component (142), a worm gear (143), and a worm (144); the two ends of the seed crystal rod (141) are respectively connected to the seed crystal (130) and the moving ends of the telescopic component (142); the worm gear (143) is fixedly sleeved on the seed crystal rod (141); the worm (144) is movably engaged with the worm gear (143); wherein the axis of the seed crystal (130), the axis of the seed crystal rod (141), and the axis of the worm gear (143) coincide with each other.

7. The Czochralski crystal growth apparatus according to claim 6, characterized in that, The seed crystal moving unit (140) further includes a third sensor (145), which is disposed at the fixed end of the telescopic member (142) and is used to detect the moving speed of the seed crystal (130) under the drive of the seed crystal moving unit (140).

8. The Czochralski crystal growth apparatus according to any one of claims 1-5, characterized in that, The Czochralski crystal growth apparatus (100) further includes a rotating motor (160) and a rotating platform (170). The rotating motor (160) is connected to the rotating platform (170) and is used to drive the rotating platform (170) to rotate. The rotating platform (170) is connected to the moving unit (120).

9. The Czochralski crystal growth apparatus according to any one of claims 1-5, characterized in that, The Czochralski crystal growth apparatus (100) further includes a support (180), and the furnace body (150) is connected to the support (180); the support (180) has a chamber (181), and the moving unit (120) is located in the chamber (181); the furnace body (150) has a cavity (151), and the crucible (110) and the seed crystal (130) are both located in the cavity (151); The cavity (151) and the chamber (181) are connected.

10. The Czochralski crystal growth apparatus according to any one of claims 1-5, characterized in that, The Czochralski crystal growth apparatus (100) further includes a connector (190), the two ends of which are connected to the crucible (110) and the moving unit (120), respectively.

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