Integrated chip laser coating preparation device

Abstract

The utility model discloses an integrated chip laser coating preparation device, and relates to the technical field of integrated chip processing devices. The coating device comprises a bottom plate, a placing table is fixedly connected to the top of the bottom plate, a clamping mechanism is fixedly connected to an inner cavity of the placing table, a coating mechanism is movably connected to the top of the bottom plate, and a feeding mechanism is arranged on one side of the bottom plate. The first motor rotates to drive the clamps on the two sides to contract inwards, chips of different sizes can be clamped, the convenience of the clamping mechanism is improved, the production cost of the device is reduced, the non-slip mats are arranged in the clamps, the chips can be fixed more firmly, the chips can be protected from being damaged by the clamps to a certain extent, and the production efficiency is improved. And the distance between the connecting rod and the third motor can be adjusted through a bolt and an adjusting hole, so that the movement range of the laser transmitter is reduced or increased, chips of different sizes can be coated by the laser transmitter, and the flexibility and universality of the whole device are improved.

Description

Technical Field

[0001] This utility model belongs to the technical field of integrated chip processing equipment, and in particular relates to an integrated chip laser coating preparation device. Background Technology

[0002] In the manufacturing process of integrated chips, in order to improve the chip's performance, reliability and anti-interference ability, it is often necessary to prepare various functional coatings on the chip surface. Laser coating preparation technology has been widely used in the preparation of integrated chip coatings due to its advantages such as high precision, high energy density and local processing.

[0003] However, existing integrated chip laser coating preparation devices have some shortcomings. During the coating preparation process, the chip needs to withstand the energy impact of the laser and the jetting force of the coating material. If the positioning and fixing are not firm, the chip is prone to displacement, which will affect the quality and accuracy of the coating. In addition, the existing positioning and fixing methods often lack flexibility. For chips of different sizes and shapes, it is necessary to frequently adjust or change the tooling fixtures, which increases the complexity of operation and production costs. Moreover, with the continuous development of integrated chip technology, the size and shape of chips are becoming more and more diverse, while existing integrated chip laser coating preparation devices are often only applicable to chips of specific sizes and shapes, lacking versatility and flexibility.

[0004] To address these issues, we provide an integrated chip laser coating fabrication apparatus. Utility Model Content

[0005] The purpose of this invention is to provide an integrated chip laser coating preparation device. By cooperating with the clamping mechanism and the coating mechanism, it solves the problems of existing integrated chip laser coating preparation devices being not firmly fixed and unable to be adjusted and fixed according to the chip size, and only applicable to chips of specific sizes and shapes.

[0006] To solve the above-mentioned technical problems, this utility model is achieved through the following technical solution.

[0007] This utility model relates to an integrated chip laser coating preparation device, comprising a base plate, a placement stage fixedly connected to the top of the base plate, a clamping mechanism fixedly connected to the inner cavity of the placement stage, a coating mechanism movably connected to the top of the base plate, a feeding mechanism provided on one side of the base plate, and a clamping mechanism including a first motor, the bottom of which is fixedly connected to the base plate, a first gear fixedly connected to the output end of the first motor, toothed plates meshing on both sides of the first gear, a slide fixedly connected to the top side of the toothed plates, a slide rail slidably connected to the bottom of the slide, both sides of the slide rail being fixedly connected to the placement stage, and a clamp fixedly connected to the top of the slide. The coating mechanism includes a second motor, one side of which is fixedly connected to the base plate, a worm gear fixedly connected to the output end of the second motor, a worm wheel meshing on one side of the worm gear, a lead screw fixedly connected to the inner cavity of the worm wheel, one side of the lead screw penetrating the surface of the worm wheel and movably connected to the base plate via a bearing, and a movable frame threadedly connected to the other side of the lead screw, the top side of which is fixedly connected to a movable frame. The device is connected to an outer casing. A third motor is fixedly connected to one side of the inner cavity of the outer casing. A movable rod is fixedly connected to the output end of the third motor. A bolt is threaded to the other side of the movable rod. A connecting rod is movably connected to the surface of the bolt. A movable block is movably connected to the other side of the connecting rod. A laser emitter is fixedly connected to the bottom of the movable block. An adsorption plate is fixedly connected to the center of the top of the placement platform. The bottom of the adsorption plate penetrates the top of the placement platform and extends to the top of the first gear, making the clamping mechanism more secure when fixing the chip and improving the stability of the clamping mechanism. There are two slide rails and two slide blocks, which improves the stability of the clamping mechanism during operation. There are two worm gears and two lead screws, which improve the stability of the coating mechanism during operation. The outer casing can protect the third motor from external influences during operation. An inspection door is provided on one side of the outer casing to facilitate maintenance and replacement of the third motor by the staff. A mounting plate is provided in the inner cavity of the moving frame. The movable block is located between the mounting plate and the moving frame. The movable rod is connected to the connecting rod, which makes the laser emitter circulate, improving the efficiency of the coating work.

[0008] The present invention is further configured such that the feeding mechanism includes a mixing tank, one side of which is fixedly connected to a placement platform, a fourth motor is fixedly connected to the bottom of one side of the placement platform, a second gear is fixedly connected to the output end of the fourth motor, a third gear meshes with one side of the second gear, a rotating rod is fixedly connected to the inner cavity of the third gear, the top of the rotating rod is movably connected to the placement platform via a bearing, the bottom of the rotating rod extends to the bottom of the inner cavity of the mixing tank, a stirring blade is fixedly connected to the surface of the rotating rod, a collection box is provided at the bottom of the mixing tank, an air pump is fixedly connected to one side of the collection box, and a conveying pipe is fixedly connected to one side of the air pump. The mixing tank is located behind the placement platform, and the fourth motor is located at the top of the mixing tank. Through the second gear, one fourth motor can drive the entire feeding mechanism, reducing the manufacturing cost of the device. The bottom of the mixing tank is conical to facilitate material feeding. The stirring blades located at the bottom of the mixing tank have a small diameter and fit the bottom of the mixing tank, which can stir the coating material more evenly. A movable plate is provided at the top of the inner cavity of the collection box, and the movable plate is slidably connected to the collection box to facilitate the material falling into the collection box. The other end of the conveying pipe is connected to a movable block.

[0009] The present invention is further configured such that a slot is provided on the top of the placement platform, and the top of the clamp is slidably connected to the slot. There are two slots, so that the clamp can move on the top of the placement platform.

[0010] The present invention is further configured such that movable grooves are provided on both sides of the base plate, and the bottom of the movable frame is slidably connected to the movable grooves. There are two movable grooves, which can limit the movement range of the movable frame.

[0011] The present invention is further configured such that a slider is fixedly connected to the bottom of the movable block, and a sliding groove is provided on both sides of the slider. Both sides of the slider are slidably connected to the sliding groove. The slider and the sliding groove can limit the movement of the laser emitter and the movable block and prevent the movable block from detaching from the moving frame.

[0012] The present invention is further configured such that the surface of the movable rod is provided with adjustment holes, the bolt is threadedly connected to the adjustment holes, and there are four adjustment holes. By adjusting the bolt, the range of motion of the laser emitter can be increased or decreased to achieve the purpose of coating chips of different sizes.

[0013] The present invention is further configured such that a toothed disc is movably connected to the top of the inner cavity of the mixing tank, one side of the inner cavity of the toothed disc meshes with a second gear, and a scraper is fixedly connected to the bottom of the toothed disc. There are two scrapers, and their bottoms extend to the bottom of the inner cavity of the mixing tank, which can scrape off the raw materials adhering to the inner wall of the mixing tank.

[0014] The present invention is further configured such that a feed pipe is provided on one side of the placement platform, and one side of the feed pipe is fixedly connected to the mixing tank. The feed pipe makes it more convenient for workers to feed raw materials to the feeding mechanism.

[0015] The present invention has the following beneficial effects.

[0016] 1. This utility model uses the rotation of the first motor to drive the two side clamps to retract inward, which can clamp chips of different sizes, increasing the convenience of the clamping mechanism and reducing the production cost of the device. The anti-slip pads inside the clamps not only make the chips more secure, but also protect the chips from damage by the clamps to a certain extent. The rotation of the third motor drives the movable rod to move, so that the laser emitter can circulate, improving the efficiency of the coating work. The distance between the connecting rod and the third motor can be adjusted by bolts and adjustment holes to reduce or increase the range of motion of the laser emitter, so that it can coat chips of different sizes, improving the flexibility and versatility of the entire device.

[0017] 2. This utility model, through the stirring blade and stirring tank, can uniformly stir the coating material, avoiding the problem of uneven coating caused by blockage when the coating material enters the laser emitter, thus improving the quality of the chip. The toothed plate and scraper can scrape off the material adhering to the inner wall of the stirring tank, improving the practicality of the feeding mechanism and reducing the production cost of the coating material. By setting two slide rails and slide seats, the clamping mechanism can hold the chip more firmly, improving the stability of the clamping mechanism. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0019] Figure 1 This is a three-dimensional view of an integrated chip laser coating fabrication apparatus.

[0020] Figure 2 This is a three-dimensional view of a clamping mechanism in an integrated chip laser coating fabrication device.

[0021] Figure 3 This is a three-dimensional view of the coating mechanism in an integrated chip laser coating fabrication device.

[0022] Figure 4 This is a schematic diagram of the connection structure between the movable rod and the connecting rod in an integrated chip laser coating fabrication device.

[0023] Figure 5 This is a three-dimensional view of the feeding mechanism in an integrated chip laser coating fabrication device.

[0024] In the attached diagram: 1. Base plate; 2. Placement platform; 3. Clamping mechanism; 301. First motor; 302. First gear; 303. Gear plate; 304. Slide block; 305. Slide rail; 306. Fixture; 4. Coating mechanism; 401. Second motor; 402. Worm gear; 403. Worm wheel; 404. Lead screw; 405. Moving frame; 406. Housing; 407. Third motor; 408. Movable rod; 409. Bolt; 410. 411 Connecting rod; 412 Movable block; 5 Laser emitter; 5 Feeding mechanism; 501 Mixing tank; 502 Fourth motor; 503 Second gear; 504 Third gear; 505 Rotating rod; 506 Mixing blade; 507 Collection box; 508 Air pump; 509 Conveying pipe; 6 Groove; 7 Movable groove; 8 Sliding block; 9 Slide; 10 Adjusting hole; 11 Gear disc; 12 Scraper; 13 Feeding pipe. Detailed Implementation

[0025] The technical solutions of the present utility model will be described below with reference to the accompanying drawings. The described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0026] Example 1

[0027] Please see Figure 1-5This utility model is an integrated chip laser coating preparation device, including a base plate 1, a placement stage 2 fixedly connected to the top of the base plate 1, a clamping mechanism 3 fixedly connected to the inner cavity of the placement stage 2, a coating mechanism 4 movably connected to the top of the base plate 1, and a feeding mechanism 5 provided on one side of the base plate 1. The clamping mechanism 3 includes a first motor 301, the bottom of the first motor 301 is fixedly connected to the base plate 1, a first gear 302 is fixedly connected to the output end of the first motor 301, toothed plates 303 mesh on both sides of the first gear 302, a slide block 304 is fixedly connected to the top side of the toothed plate 303, a slide rail 305 is slidably connected to the bottom of the slide block 304, both sides of the slide rail 305 are fixedly connected to the placement stage 2, and a clamp 306 is fixedly connected to the top of the slide block 304. The coating mechanism 4 includes a second motor 401. One side is fixedly connected to the base plate 1. The output end of the second motor 401 is fixedly connected to a worm gear 402. A worm wheel 403 meshes with one side of the worm gear 402. A lead screw 404 is fixedly connected to the inner cavity of the worm wheel 403. One side of the lead screw 404 passes through the surface of the worm wheel 403 and is movably connected to the base plate 1 through a bearing. A movable frame 405 is threadedly connected to the other side of the lead screw 404. A housing 406 is fixedly connected to one side of the top of the movable frame 405. A third motor 407 is fixedly connected to one side of the inner cavity of the housing 406. A movable rod 408 is fixedly connected to the output end of the third motor 407. A bolt 409 is threadedly connected to the other side of the movable rod 408. A connecting rod 410 is movably connected to the surface of the bolt 409. A movable block 411 is movably connected to the other side of the connecting rod 410. A laser emitter 412 is fixedly connected to the bottom of the movable block 411.

[0028] Specifically: an adsorption plate is fixedly connected to the top center of the placement platform 2. The bottom of the adsorption plate penetrates the top of the placement platform 2 and extends to the top of the first gear 302, making the clamping mechanism 3 more secure when fixing the chip and improving the stability of the clamping mechanism 3. There are two slide rails 305 and two slide blocks 304, which improves the stability of the clamping mechanism 3 during operation. There are two worm gears 403 and two lead screws 404, which improve the stability of the coating mechanism 4 during operation. The outer shell 406 can protect the third motor 407 from external influences during operation. An inspection door is provided on one side of the outer shell 406 to facilitate the maintenance and replacement of the third motor 407 by the staff. The inner cavity of the moving frame 405 is provided with a mounting plate. The movable block 411 is located between the mounting plate and the moving frame 405. The movable rod 408 is connected to the connecting rod 410, which makes the laser emitter 412 circulate and improve the efficiency of the coating work.

[0029] Example 2

[0030] Please see Figure 1-5Based on Embodiment 1, the feeding mechanism 5 includes a mixing tank 501. One side of the mixing tank 501 is fixedly connected to the placement platform 2. A fourth motor 502 is fixedly connected to the bottom of one side of the placement platform 2. A second gear 503 is fixedly connected to the output end of the fourth motor 502. A third gear 504 meshes with one side of the second gear 503. A rotating rod 505 is fixedly connected to the inner cavity of the third gear 504. The top of the rotating rod 505 is movably connected to the placement platform 2 via a bearing. The bottom of the rotating rod 505 extends to the bottom of the inner cavity of the mixing tank 501. A stirring blade 506 is fixedly connected to the surface of the rotating rod 505. A collection box 507 is provided at the bottom of the mixing tank 501. An air pump 508 is fixedly connected to one side of the collection box 507. A third gear 506 is fixedly connected to one side of the air pump 508. The device includes a feed pipe 509, a slot 6 on the top of the placement platform 2, a clamp 306 that is slidably connected to the top of the slot 6, movable slots 7 on both sides of the base plate 1, a movable frame 405 that is slidably connected to the bottom of the movable slots 7, a slider 8 that is fixedly connected to the bottom of the movable block 411, a sliding groove 9 on both sides of the slider 8 that is slidably connected to the sliding groove 9, an adjustment hole 10 on the surface of the movable rod 408, a bolt 409 that is threadedly connected to the adjustment hole 10, a gear 11 that is movably connected to the top of the inner cavity of the mixing tank 501, a second gear 503 that meshes with one side of the inner cavity of the gear 11, a scraper 12 that is fixedly connected to the bottom of the gear 11, a feed pipe 13 on one side of the placement platform 2 that is fixedly connected to the mixing tank 501.

[0031] Specifically: The mixing tank 501 is located behind the placement platform 2, and the fourth motor 502 is located on top of the mixing tank 501. Through the second gear 503, one fourth motor 502 can drive the entire feeding mechanism 5, reducing the manufacturing cost of the device. The bottom of the mixing tank 501 is conical to facilitate material feeding, and the mixing blade 506 at the bottom of the mixing tank 501 has a small diameter and fits the bottom of the mixing tank 501, which can mix the coating material more evenly. The top of the inner cavity of the collection box 507 is provided with a movable plate, which is slidably connected to the collection box 507 to facilitate the material falling into the collection box 507. The other end of the conveying pipe 509 is connected to the movable block 411. There are two slots 6, which allow the clamp 306 to be placed... The top of the platform 2 is movable, and there are two movable slots 7, which can limit the movement range of the moving frame 405. The slider 8 and the sliding groove 9 can limit the movement of the laser emitter 412 and the movable block 411, preventing the movable block 411 from detaching from the moving frame 405. There are four adjusting holes 10. By adjusting the bolts 409, the movement range of the laser emitter 412 can be increased or decreased to achieve the purpose of coating chips of different sizes. There are two scrapers 12, and their bottoms extend to the bottom of the inner cavity of the mixing tank 501, which can scrape off the raw materials adhering to the inner wall of the mixing tank 501. The feeding pipe 13 makes it more convenient for the staff to feed the raw materials to the feeding mechanism 5.

[0032] The working principle of this utility model is as follows: The operator starts the first motor 301, which rotates the first gear 302. The rotation of the first gear 302 moves the two side gear plates 303, which in turn moves the slide block 304. The slide block 304 then moves the clamp 306, completing the clamping of the chip. The bolt 409 is then adjusted according to the chip size. When the appropriate distance is reached, the second motor 401 and the third motor 407 are simultaneously started. The rotation of the second motor 401 drives the worm gear 402, which in turn drives the worm wheel 403. The worm wheel 403 then drives the lead screw 404, which in turn moves the moving frame 405. The moving frame 405 then moves the third motor 407, which in turn moves the movable rod 408. The movable rod 408 then moves the bolt 409. The movement of bolt 409 drives the movement of connecting rod 410, which in turn drives the movement of movable block 411. The movement of movable block 411 drives the movement of laser emitter 412, completing the coating process on the chip. When there is insufficient coating material inside laser emitter 412, the material is poured into mixing tank 501, activating fourth motor 502. The rotation of fourth motor 502 drives second gear 503, which in turn drives gear disc 11 and third gear 504, which in turn drives rotating rod 505, which in turn drives stirring blade 506, thus mixing the coating material more evenly. The rotation of gear disc 11 drives scraper 12 to scrape off the material adhering to the inner wall of mixing tank 501. Then, the movable plate is opened to allow the material to enter collection box 507, which is then transported to laser emitter 412 via air pump 508 and conveying pipe 509.

[0033] The preferred embodiments of the present utility model disclosed above are only used to help illustrate the present utility model. The preferred embodiments do not describe all the details in detail, nor do they limit the present utility model to the specific implementation methods described. The present specification selects and specifically describes these embodiments in order to better explain the principle and practical application of the present utility model, so that those skilled in the art can better understand and utilize the present utility model.

Claims

1. An integrated chip laser coating fabrication apparatus, comprising a base plate (1), characterized in that: The bottom plate (1) is fixedly connected to a placement platform (2), the inner cavity of the placement platform (2) is fixedly connected to a clamping mechanism (3), the bottom plate (1) is movably connected to a coating mechanism (4), and a feeding mechanism (5) is provided on one side of the bottom plate (1). The clamping mechanism (3) includes a first motor (301), the bottom of the first motor (301) is fixedly connected to the base plate (1), the output end of the first motor (301) is fixedly connected to a first gear (302), both sides of the first gear (302) are meshed with toothed plates (303), a slide block (304) is fixedly connected to one side of the top of the toothed plate (303), a slide rail (305) is slidably connected to the bottom of the slide block (304), both sides of the slide rail (305) are fixedly connected to the placement platform (2), and a clamp (306) is fixedly connected to the top of the slide block (304). The coating mechanism (4) includes a second motor (401), one side of which is fixedly connected to the base plate (1). A worm gear (402) is fixedly connected to the output end of the second motor (401). A worm wheel (403) meshes with one side of the worm gear (402). A lead screw (404) is fixedly connected to the inner cavity of the worm wheel (403). One side of the lead screw (404) passes through the surface of the worm wheel (403) and is movably connected to the base plate (1) through a bearing. A movable frame (405) is threadedly connected to the other side of the lead screw (404). A housing (406) is fixedly connected to one side of the top of the mobile frame (405). A third motor (407) is fixedly connected to one side of the inner cavity of the housing (406). A movable rod (408) is fixedly connected to the output end of the third motor (407). A bolt (409) is threadedly connected to the other side of the movable rod (408). A connecting rod (410) is movably connected to the surface of the bolt (409). A movable block (411) is movably connected to the other side of the connecting rod (410). A laser emitter (412) is fixedly connected to the bottom of the movable block (411).

2. The integrated chip laser coating fabrication apparatus according to claim 1, characterized in that: The feeding mechanism (5) includes a mixing tank (501), one side of which is fixedly connected to a placement platform (2). A fourth motor (502) is fixedly connected to the bottom of one side of the placement platform (2). A second gear (503) is fixedly connected to the output end of the fourth motor (502). A third gear (504) meshes with one side of the second gear (503). A rotating rod (505) is fixedly connected to the inner cavity of the third gear (504). The top of the rotating rod (505) is movably connected to the placement platform (2) through a bearing. The bottom of the rotating rod (505) extends to the bottom of the inner cavity of the mixing tank (501). A stirring blade (506) is fixedly connected to the surface of the rotating rod (505). A collection box (507) is provided at the bottom of the mixing tank (501). An air pump (508) is fixedly connected to one side of the collection box (507). A conveying pipe (509) is fixedly connected to one side of the air pump (508).

3. The integrated chip laser coating fabrication apparatus according to claim 1, characterized in that: The top of the placement platform (2) is provided with a slot (6), and the top of the clamp (306) is slidably connected to the slot (6).

4. The integrated chip laser coating fabrication apparatus according to claim 1, characterized in that: The base plate (1) has movable slots (7) on both sides, and the bottom of the movable frame (405) is slidably connected to the movable slots (7).

5. The integrated chip laser coating fabrication apparatus according to claim 1, characterized in that: The bottom of the movable block (411) is fixedly connected to a slider (8), and both sides of the slider (8) are provided with grooves (9), and both sides of the slider (8) are slidably connected to the grooves (9).

6. The integrated chip laser coating fabrication apparatus according to claim 1, characterized in that: The movable rod (408) has an adjustment hole (10) on its surface, and the bolt (409) is threadedly connected to the adjustment hole (10).

7. The integrated chip laser coating fabrication apparatus according to claim 2, characterized in that: The top of the inner cavity of the mixing tank (501) is movably connected to a toothed disc (11), one side of the inner cavity of the toothed disc (11) meshes with a second gear (503), and a scraper (12) is fixedly connected to the bottom of the toothed disc (11).

8. The integrated chip laser coating fabrication apparatus according to claim 1, characterized in that: A feed pipe (13) is provided on one side of the placement platform (2), and one side of the feed pipe (13) is fixedly connected to the mixing tank (501).

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