Chip flatness detection device
By combining a suction negative pressure tube and a flow sensor, the problems of inaccurate flatness detection and damage during chip flipping are solved, achieving high-precision chip flatness control and quality assurance.
Patent Information
- Application Number
- CN202520562131.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-03-27
- Publication Date
- 2026-02-13
- Estimated Expiration
- 2035-03-27
AI Technical Summary
During the current chip flipping process, the limited detection range of the sensing fiber leads to inaccurate flatness detection, which may cause chip damage. In addition, the negative pressure nozzle impacts the chip, affecting quality.
The design employs a suction negative pressure tube and an internal suction hole, using negative pressure to ensure a tight fit between the chip and the flipping support block. A flow sensor monitors the gas flow rate to ensure chip flatness and reduce damage during the flipping process.
It enables precise chip flatness detection, reduces damage during the flipping process, and improves chip quality.
Smart Images
Figure CN223910238U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the technical field of detection device, concretely is a chip flatness detection device. BACKGROUND
[0002] Chip needs to pass through the turnover procedure in the production process, in the turnover, the negative pressure suction nozzle absorbs the chip, places the chip on the turnover mechanism, is provided with the inductive optical fiber on the turnover mechanism, and the inductive optical fiber is used to detect whether the chip is placed flat, after the chip is placed flat, the turnover mechanism starts 180 DEG turnover to the chip, after the chip is turned over, the inductive optical fiber detects the flatness of the chip again, and then the negative pressure suction nozzle absorbs the chip again and transports the chip to the next procedure. The turnover mechanism includes two turnover supporting blocks of upper and lower and the limiting plate between the two turnover supporting blocks, the limiting groove for placing the chip is passed through and set up in the limiting plate, the initial position is that the lower turnover supporting block is located below the limiting groove and is used to support the chip, and the upper turnover supporting block is located on the right side of the limiting groove, when turning over, the two turnover supporting blocks and the limiting plate turn over 180 DEG simultaneously, and at the same time, the upper turnover supporting block stretches out to the left while turning over downward, and the lower turnover supporting block retracts to the right while turning over upward, and after turning over, it is still in the initial position, but the turnover of the chip is completed.
[0003] The detection principle of the inductive optical fiber is that the transmitter emits an inductive optical fiber, if the chip is not placed flat, the chip will be on the emission path of the inductive optical fiber, thereby blocking the inductive optical fiber, and the receiver cannot receive the inductive optical fiber, if the chip is placed flat, the chip will not block the inductive optical fiber, and the receiver can receive the inductive optical fiber, thereby detecting whether the chip is placed flat. However, the detection of the inductive optical fiber is only a line, and the detection range has certain limitations, and there may be a situation that the chip is not placed flat and the chip does not block the inductive optical fiber, so that the detection of the flatness of the chip has deviation, if the chip is not placed flat, the upper turnover supporting block will hit the chip when stretching out to the left in the turnover process, causing the simultaneous damage of the chip and the turnover supporting block, in addition, the negative pressure suction nozzle will also hit the chip when moving downward to absorb the chip after turning over, thereby causing damage to the chip. UTILITY MODEL CONTENTS
[0004] In order to solve the problems in the above background art, the utility model provides a chip flatness detection device, which uses negative pressure to downwardly suck the chip through the air suction negative pressure pipe, the first inner suction hole and the second inner suction hole, so that the chip is tightly attached to the lower turnover supporting block, and therefore the chip is placed flat on the lower turnover supporting block and in the limiting groove, thereby ensuring the flatness of the chip.
[0005] The utility model provides a kind of chip flatness detection device, including bottom plate, one end of bottom plate is fixedly connected with lower suction seat, first inner suction hole is opened in lower suction seat, the top of lower suction seat movably is provided with limiting plate and two turnover blocks, limiting slot for placing chip is passed in limiting plate, two turnover blocks are located above and below limiting plate respectively, second inner suction hole is opened in two turnover blocks, the turnover block in above is located in one side of limiting slot, the turnover block in below is located below limiting slot, second inner suction hole in the turnover block in below is communicated with first inner suction hole, the turnover mechanism that drives limiting plate and turnover block to overturn and simultaneously drives two turnover blocks to stagger is provided on bottom plate, the bottom of lower suction seat is connected with suction negative pressure pipe, suction negative pressure pipe is communicated with first inner suction hole, one end of suction negative pressure pipe away from lower suction seat is connected on negative pressure gas source.
[0006] Further, a flow sensor is installed on the suction negative pressure pipe.
[0007] Further, the turnover block is a semi-cylindrical shape, a semi-circular accommodating groove is formed in the top of the lower suction seat, and the turnover block in the lower part is movably arranged in the accommodating groove.
[0008] Further, the turnover mechanism includes a turnover motor, the turnover motor is fixedly connected to one end of the bottom plate away from the lower suction seat, a bearing fixing seat is fixedly connected to the bottom plate, a turnover bearing is rotatably connected in the bearing fixing seat, the limiting plate and the turnover block are arranged on one side of the turnover bearing, a rotating shaft is fixedly connected to the other side of the turnover bearing, and the output shaft of the turnover motor is fixedly connected to the rotating shaft through a coupling.
[0009] Further, the limiting plate is fixedly connected to the turnover bearing, two linear guides are slidably connected in the turnover bearing, the linear guides transversely pass through the turnover bearing, the turnover block is fixedly connected to one end of the linear guide, a fixed cam is fixedly connected to the bottom plate, the fixed cam is located between the bearing fixing seat and the turnover motor, the rotating shaft transversely passes through the fixed cam, the side end face of the fixed cam close to the bearing fixing seat is a special-shaped end face, the thickness of the top of the fixed cam is less than the thickness of the bottom and smoothly transitions in the middle, an installation block is fixedly connected to one end of the linear guide away from the turnover block, a roller is rotatably connected to the installation block, the roller abuts on the end face of the fixed cam, and an elastic member is arranged between the installation block and the turnover bearing to drive the roller close to the fixed cam.
[0010] Further, the elastic member is a compression spring, the installation block moves to the direction close to the fixed cam under the elastic action of the compression spring, so that the roller is always in contact with the end face of the fixed cam.
[0011] Further, a negative pressure suction nozzle vertically moving is arranged above the turnover block, and a lifting assembly driving the negative pressure suction nozzle to vertically move is arranged on the bearing fixing seat.
[0012] Further, the lifting assembly comprises a lifting base fixedly connected to the top of the bearing fixing seat, one side of the lifting base is fixedly provided with a lifting motor, the output shaft end of the lifting motor is eccentrically fixedly connected with a lifting wheel, the side, away from the lifting motor, of the lifting base is vertically fixedly connected with a lifting guide rail, the lifting guide rail is vertically slidably connected with a movable plate, the movable plate is fixedly connected with a contact wheel, the lifting wheel abuts against the movable plate to drive the movable plate to vertically move, and the top of the negative pressure suction nozzle is fixedly connected with a connecting plate, the contact wheel abuts against the connecting plate to drive the negative pressure suction nozzle to vertically move.
[0013] Compared with the prior art, the utility model has the advantages that:
[0014] (1) The negative pressure suction nozzle sucks the chip and places the chip in the limiting groove, then the negative pressure source provides negative pressure for the air suction negative pressure pipe, because the air suction negative pressure pipe is communicated with the first inner suction hole, and the first inner suction hole is communicated with the second inner suction hole below, therefore, the second inner suction hole below is also under negative pressure, the chip is sucked downward by the negative pressure, the bottom surface of the chip is tightly attached to the top surface of the turnover supporting block below, thereby guaranteeing the flatness of the chip, then the turnover mechanism turns over the limiting plate and the two turnover supporting blocks by 180 DEG, at the same time, the two turnover supporting blocks move staggeredly, namely, the turnover supporting block below is turned over to the upper side and is retracted to the right, and the turnover supporting block above is turned over to the lower side and is extended to the left, the turnover of the chip is completed, after the chip is turned over, the chip is placed flatly by the negative pressure again, then the negative pressure suction nozzle moves downward to suck the chip and convey the chip to the next process, the flatness of the chip is guaranteed by the negative pressure, the situation that the negative pressure suction nozzle hits the chip is reduced, thereby guaranteeing the quality of the chip.
[0015] (2) The flow sensor can monitor the gas flow in the air suction negative pressure pipe in real time, when the chip is not placed flatly, namely, there is a gap between the chip and the turnover supporting block below, therefore, the gas flow in the air suction negative pressure pipe is larger, when the chip is placed flatly, namely, the chip is tightly attached to the turnover supporting block below, therefore, the gas flow in the air suction negative pressure pipe is smaller, therefore, whether the chip is placed flatly can be judged by the flow value fed back by the flow sensor, and the detection is more accurate.
[0016] (3) when the chip is turned over, the turning motor drives the rotating shaft to rotate through the shaft coupling, the rotating shaft drives the turning bearing to rotate, the turning bearing directly drives the limiting plate to turn over by 180 DEG, at the same time, the turning bearing drives the two linear guides to rotate, the linear guide drives the turning block to turn over by 180 DEG, the position of the two turning blocks is exchanged, at the same time of turning over, the linear guide drives the right roller to roll on the special-shaped end face of the fixed cam, since the end face of the fixed cam is specially shaped, when the upper turning block turns over to the lower side, the special-shaped end face of the fixed cam pushes the roller to move to the left side, the roller pushes the turning block to stretch out to the left side through the mounting block and the linear guide, and the lower turning block turns over to the upper side and is retracted to the right side, so that the limiting plate and the turning block are turned over by 180 DEG and the two turning blocks are moved staggeredly. BRIEF DESCRIPTION OF DRAWINGS
[0017] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained from these drawings without creative labor.
[0018] Figure 1 It is a whole structure schematic view of a chip flatness detection device;
[0019] Figure 2 It is a sectional view of a lower suction seat and a turning block;
[0020] Figure 3 It is a whole structure schematic view of a turning mechanism;
[0021] Figure 4 It is a side view of a turning mechanism;
[0022] Figure 5 It is a structure schematic view of a fixed cam;
[0023] Figure 6 It is an explosion schematic view of a lifting assembly;
[0024] Explanation of reference signs: 1, bottom plate; 2, lower suction seat; 20, first inner suction hole; 21, containing groove; 3, limiting plate; 30, limiting groove; 4, turnover supporting block; 40, second inner suction hole; 5, chip; 6, turnover mechanism; 60, turnover motor; 61, bearing fixing seat; 62, turnover bearing; 63, rotating shaft; 64, coupling; 65, linear guide rail; 66, fixed cam; 67, mounting block; 68, roller; 69, elastic member; 690, compression spring; 7, air suction negative pressure pipe; 8, flow sensor; 9, negative pressure suction nozzle; 10, lifting assembly; 100, lifting base; 101, lifting motor; 102, lifting wheel; 103, lifting guide rail; 104, movable plate; 105, contact wheel. DETAILED DESCRIPTION
[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor are within the protection scope of the utility model.
[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skilled in the art without creative labor are within the protection scope of the utility model. Figure 1 to the drawings Figure 6 The utility model is described in detail below with specific embodiments.
[0027] With reference to Figures 1-6 The utility model provides a chip flatness detection device, including bottom plate 1, one end of bottom plate 1 is fixedly connected with lower suction seat 2, is set up with the first inner suction hole 20 in lower suction seat 2, the top of lower suction seat 2 movably sets up limiting plate 3 and two turnover supporting blocks 4, is set up with the limiting groove 30 for placing chip 5 in limiting plate 3, two turnover supporting blocks 4 are located above and below limiting plate 3 respectively, the second inner suction hole 40 is set up in two turnover supporting blocks 4, the turnover supporting block 4 in the upper side is located at one side of limiting groove 30, the turnover supporting block 4 in the lower side is located below limiting groove 30, the second inner suction hole 40 in the turnover supporting block 4 in the lower side is communicated with the first inner suction hole 20, the bottom plate 1 is provided with turnover mechanism 6 that drives limiting plate 3 and turnover supporting block 4 to turn and drives two turnover supporting blocks 4 to stagger simultaneously, the bottom of lower suction seat 2 is connected with air suction negative pressure pipe 7, air suction negative pressure pipe 7 is communicated with the first inner suction hole 20, one end of air suction negative pressure pipe 7 away from lower suction seat 2 is connected on negative pressure air source.
[0028] The negative pressure suction nozzle 9 sucks the chip 5 and places the chip 5 in the limiting groove 30, and then the negative pressure source provides negative pressure for the suction negative pressure pipe 7. Since the suction negative pressure pipe 7 is communicated with the first inner suction hole 20, and the first inner suction hole 20 is communicated with the second inner suction hole 40 below, the second inner suction hole 40 below is also under negative pressure. The chip 5 is sucked downward by the negative pressure, so that the bottom surface of the chip 5 is tightly attached to the top surface of the turnover supporting block 4 below, thereby ensuring the flatness of the chip 5. Then, the turnover mechanism 6 turns the limiting plate 3 and the two turnover supporting blocks 4 by 180°. At the same time, the two turnover supporting blocks 4 move alternately, that is, the turnover supporting block 4 below is turned to the upper side and is retracted to the right, and the turnover supporting block 4 above is turned to the lower side and is extended to the left, thereby completing the turnover of the chip 5. After the chip 5 is turned over, the negative pressure is used again to place the chip 5 flat. Then, the negative pressure suction nozzle 9 moves downward to suck the chip 5 and deliver the chip 5 to the next process. The flatness of the chip 5 is ensured by the negative pressure, and the situation that the negative pressure suction nozzle 9 hits the chip 5 is reduced, thereby ensuring the quality of the chip 5.
[0029] The flow sensor 8 is installed on the suction negative pressure pipe 7. The flow sensor 8 can monitor the gas flow in the suction negative pressure pipe 7 in real time. When the chip 5 is not placed flat, that is, there is a gap between the chip 5 and the turnover supporting block 4 below, the gas flow in the suction negative pressure pipe 7 is larger. When the chip 5 is placed flat, that is, the chip 5 is tightly attached to the turnover supporting block 4 below, the gas flow in the suction negative pressure pipe 7 is smaller. Therefore, whether the chip 5 is placed flat can be judged by the flow value fed back by the flow sensor 8, and the detection is more accurate.
[0030] The turnover supporting block 4 is a semi-cylindrical shape. The top of the lower suction seat 2 is provided with a semi-circular accommodating groove 21. The turnover supporting block 4 below is movably arranged in the accommodating groove 21.
[0031] The turnover mechanism 6 includes a turnover motor 60. The turnover motor 60 is fixedly connected to one end of the bottom plate 1 away from the lower suction seat 2. A bearing fixing seat 61 is fixedly connected to the bottom plate 1. A turnover bearing 62 is rotatably connected in the bearing fixing seat 61. The limiting plate 3 and the turnover supporting block 4 are arranged on one side of the turnover bearing 62. A rotating shaft 63 is fixedly connected to the other side of the turnover bearing 62. The output shaft of the turnover motor 60 is fixedly connected with the rotating shaft 63 through a shaft coupling 64.
[0032] The limiting plate 3 is fixedly connected to the turnover bearing 62, two linear guides 65 are slidably connected in the turnover bearing 62, the linear guides 65 transversely pass through the turnover bearing 62, the turnover block 4 is fixedly connected to one end of the linear guide 65, the fixed cam 66 is fixedly connected to the bottom plate 1, the fixed cam 66 is located between the bearing fixing seat 61 and the turnover motor 60, the rotating shaft 63 transversely passes through the fixed cam 66, the end face of the fixed cam 66 close to the bearing fixing seat 61 is a special-shaped end face, the thickness of the top of the fixed cam 66 is smaller than the thickness of the bottom and the middle is smoothly transitioned, the end of the linear guide 65 away from the turnover block 4 is fixedly connected with the mounting block 67, the roller 68 is rotatably connected to the mounting block 67, the roller 68 abuts on the end face of the fixed cam 66, and the elastic element 69 for driving the roller 68 to be close to the fixed cam 66 is arranged between the mounting block 67 and the turnover bearing 62. The elastic element 69 is a compression spring 690, the mounting block 67 moves to the direction close to the fixed cam 66 under the elastic action of the compression spring 690, so that the roller 68 is always in contact with the end face of the fixed cam 66.
[0033] When the chip 5 is turned over, the turnover motor 60 drives the rotating shaft 63 to rotate through the shaft coupling 64, the rotating shaft 63 drives the turnover bearing 62 to rotate, the turnover bearing 62 directly drives the limiting plate 3 to turn over by 180°, at the same time, the turnover bearing 62 drives the two linear guides 65 to rotate, the linear guides 65 drive the turnover block 4 to turn over by 180°, so that the positions of the two turnover blocks 4 are exchanged, at the same time of turning over, the linear guides 65 drive the roller 68 on the right to roll on the special-shaped end face of the fixed cam 66, because the end face of the fixed cam 66 is specially shaped, when the turnover block 4 above is turned over to the bottom, the special-shaped end face of the fixed cam 66 pushes the roller 68 to move to the left, the roller 68 drives the turnover block 4 to stretch out to the left through the mounting block 67 and the linear guide 65, and the turnover block 4 below is turned over to the top and is retracted to the right, so that the limiting plate 3 and the turnover block 4 are turned over by 180° and the two turnover blocks 4 are moved staggeredly.
[0034] The turnover block 4 is provided with a vertically movable negative pressure suction nozzle 9, and the bearing fixing seat 61 is provided with a lifting assembly 10 for driving the negative pressure suction nozzle 9 to move vertically.
[0035] The lifting assembly 10 comprises a lifting base 100 fixedly connected at the top of the bearing fixing seat 61, one side of the lifting base 100 is fixedly provided with a lifting motor 101, the eccentric end of the output shaft of the lifting motor 101 is fixedly connected with a lifting wheel 102, the side of the lifting base 100 away from the lifting motor 101 is fixedly connected with a lifting guide rail 103 in vertical direction, the lifting guide rail 103 is slidably connected with a movable plate 104 in vertical direction, the movable plate 104 is fixedly connected with a contact wheel 105, the lifting wheel 102 abuts against the movable plate 104 to drive the movable plate 104 to move in vertical direction, the top of the negative pressure suction nozzle 9 is fixedly provided with a connecting plate, the contact wheel 105 abuts against the connecting plate to drive the negative pressure suction nozzle 9 to move in vertical direction.
[0036] When the negative pressure suction nozzle 9 moves downward, the lifting motor 101 drives the eccentric lifting wheel 102 to rotate, the lifting wheel 102 rotates from the upper side to the lower side, thereby driving the movable plate 104 to move downward, the movable plate 104 drives the contact wheel 105 to move downward, the contact wheel 105 drives the negative pressure suction nozzle 9 to move downward through the connecting plate at the top of the negative pressure suction nozzle 9; the principle of the upward movement of the negative pressure suction nozzle 9 is the same, thereby realizing the vertical movement of the negative pressure suction nozzle 9.
[0037] The above is further described by means of specific embodiments, but it should be understood that the specific description herein should not be understood as limiting the essence and scope of the utility model, and various modifications made by the ordinary skilled in the art after reading the above description all belong to the scope of the utility model.
Claims
1. A chip flatness detection device, characterized by, The utility model provides a chip suction device, including bottom plate, one end of bottom plate is fixedly connected with lower suction seat, the first inner suction hole is opened in lower suction seat, the top of lower suction seat movably sets up with two turnover supporting blocks of limit board, the limit slot for placing chip is passed through and is opened in limit board, two turnover supporting blocks are located above and below limit board respectively, the second inner suction hole is opened in two turnover supporting blocks, the turnover supporting block in upper side is located in one side of limit slot, the turnover supporting block below is located below limit slot, the second inner suction hole in turnover supporting block below is communicated with first inner suction hole, the turnover mechanism that drives limit board and turnover supporting block carries out turnover and drives two turnover supporting blocks staggered movement is provided on bottom plate, the bottom of lower suction seat is connected with suction negative pressure pipe, suction negative pressure pipe is communicated with first inner suction hole, one end of suction negative pressure pipe away from lower suction seat is connected on negative pressure gas source.
2. The chip flatness detection apparatus according to claim 1, characterized by The flow sensor is installed on the suction negative pressure pipe.
3. The chip flatness detection apparatus according to claim 1, characterized by The turnover supporting block is a semi-cylindrical shape, a semi-circular accommodating groove is formed in the top of the lower suction seat, and the lower turnover supporting block is movably arranged in the accommodating groove.
4. The chip flatness detection apparatus according to claim 1, characterized by The turnover mechanism includes a turnover motor, the turnover motor is fixedly connected to one end of the bottom plate away from the lower suction seat, a bearing fixing seat is fixedly connected to the bottom plate, a turnover bearing is rotatably connected in the bearing fixing seat, the limit plate and the turnover supporting block are arranged on one side of the turnover bearing, a rotating shaft is fixedly connected to the other side of the turnover bearing, and the output shaft of the turnover motor is fixedly connected to the rotating shaft through a shaft coupling.
5. The chip flatness detection apparatus according to claim 4, characterized by The limit plate is fixedly connected to the turnover bearing, two linear guides are slidably connected in the turnover bearing, the linear guides transversely pass through the turnover bearing, the turnover supporting block is fixedly connected to one end of the linear guide, a fixed cam is fixedly connected to the bottom plate, the fixed cam is located between the bearing fixing seat and the turnover motor, the rotating shaft transversely passes through the fixed cam, the side end face of the fixed cam close to the bearing fixing seat is a special-shaped end face, the thickness of the top of the fixed cam is less than the thickness of the bottom, and the middle part is smoothly transitioned, one end of the linear guide away from the turnover supporting block is fixedly connected to a mounting block, a roller is rotatably connected to the mounting block, the roller abuts against the end face of the fixed cam, and an elastic member is arranged between the mounting block and the turnover bearing to drive the roller close to the fixed cam.
6. The chip flatness detection apparatus according to claim 5, wherein The elastic member is a compression spring, the mounting block moves to the direction close to the fixed cam under the elastic action of the compression spring, so that the roller is always in contact with the end face of the fixed cam.
7. The chip flatness detection apparatus according to claim 4, characterized by A negative pressure suction nozzle vertically moves above the turnover supporting block, and a lifting assembly is arranged on the bearing fixing seat to drive the negative pressure suction nozzle to vertically move.
8. The chip flatness detection apparatus according to claim 7, wherein The lifting assembly comprises a lifting base fixedly connected to the top of the bearing fixing seat, one side of the lifting base is fixedly provided with a lifting motor, the output shaft end of the lifting motor is eccentrically fixedly connected with a lifting wheel, the side, away from the lifting motor, of the lifting base is vertically fixedly connected with a lifting guide rail, the lifting guide rail is vertically and slidingly connected with a movable plate, the movable plate is fixedly connected with a contact wheel, the lifting wheel abuts against the movable plate to drive the movable plate to vertically move, and the top of the negative pressure suction nozzle is fixedly provided with a connecting plate, the contact wheel abuts against the connecting plate to drive the negative pressure suction nozzle to vertically move.