Screw-free buckle type mask box device

Abstract

The utility model discloses a screw-free buckle type mask box device, which relates to the technical field of semiconductor manufacturing and comprises a box body, a box cover and two clamping components, the box cover is rotatably connected to the top of the box body, and the two clamping components are both mounted between the box body and the box cover. Through cooperation between the box cover and the clamping assembly, when the box cover is turned over for closing operation, the mounting block can get close to the mounting frame and extrude the inclined face of the clamping block, so that the clamping block compresses the spring and retracts into the mounting frame, the mounting frame is aligned with the mounting block when the box cover is completely closed, and the clamping block is clamped in the clamping groove through the elastic force of the spring I; when the box cover is opened, the first push plate is pressed, the clamping block is moved out of the clamping groove through the sliding column and the second push plate, fixation of the box cover is relieved, and then the box cover can be opened, so that the box cover is rapidly opened and closed through the arrangement of the clamping assembly, and additional tools are not needed during opening and closing.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, and specifically relates to a screwless buckle type mask plate box device. BACKGROUND

[0002] Mask plate is like the "negative" of chip manufacturing, and bears the key mission of transferring complex circuit patterns to silicon wafer, and mask plate box device is an important carrier to ensure the safe and efficient circulation of mask plate in the production process, and the mask plate box device is very important, which is used for storing and transporting the mask plate, and ensures that they are properly protected and managed during transportation from mask plate manufacturing workshop to photoetching machine and other equipment.

[0003] However, the existing mask plate box device has obvious defects in actual use, the overall design has defects, the fixing mode of the box body and the box cover is often too complex, and the common screw fixing mode is usually used, when opening and closing the box cover, a tool needs to be used to screw the screw, the operation process is cumbersome, the box cover cannot be quickly opened or quickly fixed, and the storage and use efficiency of the mask plate is greatly affected, therefore, the screwless buckle type mask plate box device is provided to solve the above problems. UTILITY MODEL CONTENTS

[0004] The utility model aims at making up for the defects of prior art, and provides a screwless buckle type mask plate box device.

[0005] To achieve the above object, the utility model provides the following technical scheme: a screwless buckle type mask plate box device, including box body, box cover and clamping assembly, the box cover is rotatably connected at the top of the box body, the clamping assembly is two in common, the two clamping assemblies are all installed between the box body and the box cover, the clamping assembly includes mounting block and mounting frame, the mounting block is fixedly connected to the front of the box cover, the mounting frame is fixedly connected to the front of the box body, the mounting frame corresponds to the mounting block, a spring one is fixedly connected in the mounting frame, a clamping block is slidably connected in the mounting frame, the clamping block is fixed with the spring one, a clamping groove is formed in the mounting frame, and the clamping block is matched with the clamping groove.

[0006] Further, the inner wall of the mounting block is slidably connected with a slide column, one end of the slide column is located outside the mounting block, the other end of the slide column is located inside the clamping groove, one end of the slide column fixedly connected with a push plate one is located outside the mounting block, the outer surface of the slide column located outside the mounting block is sleeved with a spring two, and the other end of the slide column fixedly connected with a push plate two is located inside the clamping groove.

[0007] Further, the left and right inner side walls of the box body are both provided with a fixing assembly, and the two fixing assemblies are respectively left-right symmetrical.

[0008] Further, the fixing assembly comprises two telescopic rods, both of which are fixedly connected to the inner side wall of the box body, and the ends of both of the telescopic rods away from the box body are fixedly connected with a clamping block, and the outer surfaces of both of the telescopic rods are sleeved with springs three, and the side of the clamping block away from both of the telescopic rods is provided with a clamping groove.

[0009] Further, the two sides of the clamping block are fixedly connected with sliding blocks, and the front and rear inner side walls of the box body are provided with limiting sliding grooves, and both of the sliding blocks are slidingly connected in the limiting sliding grooves.

[0010] Further, the upper surface of the box body is provided with a sealing gasket, and the bottom surface of the box cover is provided with a sealing groove, and the sealing groove is matched with the sealing gasket.

[0011] Compared with the prior art, the screwless buckle type mask plate box device has the following beneficial effects:

[0012] The box cover and the clamping assembly are matched, when the box cover is turned over and closed, the mounting block is close to the mounting frame and extrudes the inclined surface of the clamping block, so that the clamping block compresses the spring one and is retracted into the mounting frame, when the box cover is completely closed, the mounting frame is aligned with the mounting block, the clamping block is clamped in the clamping groove through the elastic force of the spring one, so that the closed box cover can be fixed, when the box cover is opened, the push plate one is pressed, the clamping block is moved out of the clamping groove through the slide column and the push plate two, the fixing of the box cover is released, and the box cover can be opened, the quick opening and closing of the box cover is realized through the setting of the clamping assembly, and no additional tool is needed when opening and closing, the operation is simple, and the storage and use efficiency of the mask plate is greatly improved.

[0013] The box body, the fixing assembly, the limiting sliding groove, the sealing gasket and the sealing groove are matched, when the mask plate is put into the box body, the clamping block is pushed to move along the axial direction of the limiting sliding groove through the sliding block, and the telescopic rod and the spring three are extruded, after the mask plate is placed in place, the clamping block is clamped on the mask plate through the clamping groove driven by the elastic force of the spring three, the setting can stably clamp mask plates of different sizes, avoids shaking, displacement or even collision of the mask plate in the box during transportation or storage, and the design of the sealing gasket and the sealing groove provides a relatively closed storage environment for the mask plate, which can effectively block the invasion of dust, moisture and other pollutants. BRIEF DESCRIPTION OF DRAWINGS

[0014] Fig. 1 It is a perspective view structure schematic diagram of the box cover of the utility model in the open state.

[0015] Fig. 2 It is a perspective view structure schematic diagram of the utility model.

[0016] Fig. 3 It is the sectional view of the three-dimensional structure schematic diagram of the clamping assembly of the utility model.

[0017] Fig. 4 It is the installation structure schematic diagram of the utility model box body and fixed assembly section view.

[0018] Fig. 5 It is the three-dimensional structure schematic diagram of the utility model fixed assembly.

[0019] In the drawing: 1, box body;2, box cover;3, clamping assembly;301, mounting block;302, mounting frame;303, spring one;304, clamping block;305, clamping groove;306, sliding column;307, push plate one;308, push plate two;309, spring two;4, fixed assembly;401, telescopic rod;402, clamping block;403, spring three;404, sliding block;405, clamping groove;5, limit sliding slot;6, sealing gasket;7, sealing groove. Specific implementation

[0020] The principles and characteristics of the utility model are described below in conjunction with the drawings, and the examples are only used to explain the utility model and are not used to limit the scope of the utility model.

[0021] The embodiment provides a screwless buckle type mask plate box device, which is used for storing and transporting the mask plates, ensures that the mask plates are properly protected and managed during transportation from a mask plate manufacturing workshop to equipment such as a photoetching machine, and realizes quick opening and closing of the box cover 2 through the setting of the clamping assembly 3, and the opening and closing does not need to rely on additional tools, so that the operation is simple, and the storage and taking efficiency of the mask plates is greatly improved.

[0022] Referring to Figs. 1-5 A screwless buckle type mask plate box device, including box body 1, box cover 2 and clamping assembly 3, the box cover 2 is rotatably connected to the top of the box body 1, the clamping assembly 3 is two, the two clamping assemblies 3 are installed between the box body 1 and the box cover 2, the clamping assembly 3 includes mounting block 301 and mounting frame 302, the mounting block 301 is fixedly connected to the front surface of the box cover 2, the mounting frame 302 is fixedly connected to the front surface of the box body 1, the mounting frame 302 corresponds to the mounting block 301, the mounting frame 302 is fixedly connected with spring one 303 in the inside, the clamping block 304 is slidably connected in the inside of the mounting frame 302, the clamping block 304 is fixed with the spring one 303, the clamping groove 305 is arranged in the inside of the mounting frame 302, and the clamping block 304 is matched with the clamping groove 305.

[0023] The box cover 2 is installed on the top of the box body 1 through a specific rotary connection structure, so that the box cover 2 can be flexibly rotated around the connection point, realizing the opening and closing of the box body 1. The clamping assembly 3 has two, which are distributed and installed between the box body 1 and the box cover 2, and is the key component for realizing the quick fixing and opening of the box cover 2. The positions of the mounting frame 302 and the mounting block 301 in the clamping assembly 3 correspond to each other, so as to ensure that they can be accurately matched. When the box cover 2 is rotated to close, the mounting block 301 will be close to the mounting frame 302, and the mounting block 301 will extrude the inclined surface of the clamping block 304. The clamping block 304 is compressed by the spring one 303 and retracted into the mounting frame 302. When the box cover 2 is completely closed, the positions of the mounting frame 302 and the mounting block 301 are accurately corresponding. At this time, the spring one 303 restores the elastic force and can push the clamping block 304 into the clamping groove 305 on the inner wall of the mounting block 301, so as to realize the fixing of the box cover 2.

[0024] The inner wall of the mounting block 301 is slidably connected with a slide column 306. One end of the slide column 306 is located outside the mounting block 301, and the other end of the slide column 306 is located inside the clamping groove 305. The end of the slide column 306 located outside the mounting block 301 is fixedly connected with a push plate one 307. The outer surface of the slide column 306 located outside the mounting block 301 is sleeved with a spring two 309. The end of the slide column 306 located inside the clamping groove 305 is fixedly connected with a push plate two 308.

[0025] The slide column 306 is slidably connected to the inner wall of the mounting block 301. One end of the slide column 306 is located outside the mounting block 301, and the other end is located inside the clamping groove 305. By pressing the push plate one 307, the slide column 306 and the push plate two 308 can be moved, and the spring two 309 can be extruded, so that the push plate two 308 is close to the clamping block 304, and the clamping block 304 is pushed out of the clamping groove 305, so that the fixing of the box cover 2 can be released. At this time, the box cover 2 can be easily opened. The spring two 309 plays a resetting role, so that when the push plate one 307 is loosened, the slide column can be automatically reset.

[0026] The left and right inner side walls of the box body 1 are each provided with a fixing assembly 4, and the two fixing assemblies 4 are left-right symmetrical.

[0027] The two fixing assemblies 4 are distributed inside the box body 1 and can provide uniform and stable clamping force for the mask plate placed in the box body 1.

[0028] The fixing assembly 4 includes two telescopic rods 401, both of which are fixedly connected to the inner side wall of the box body 1. The ends of the two telescopic rods 401 away from the box body 1 are fixedly connected with a clamping block 402. The outer surfaces of the two telescopic rods 401 are sleeved with a spring three 403. The side of the clamping block 402 away from the two telescopic rods 401 is provided with a clamping groove 405.

[0029] The fixed assembly 4 mainly consists of two telescopic rods 401 and a clamping block 402. The outer surfaces of the two telescopic rods 401 are sleeved with spring three 403, which provides elastic clamping force. The side of the clamping block 402 away from the two telescopic rods 401 is provided with a clamping groove 405. The shape and size of the clamping groove 405 are designed to match the edge of the common mask plate, so as to better realize the clamping function.

[0030] The two sides of the clamping block 402 are fixedly connected with sliding blocks 404. The front and rear inner side walls of the box body 1 are provided with limiting sliding grooves 5. The two sliding blocks 404 are slidingly connected in the two limiting sliding grooves 5 respectively.

[0031] The sliding blocks 404 fixedly connected on the two sides of the clamping block 402 slide in the limiting sliding grooves 5 opened on the front and rear inner side walls of the box body 1. The limiting sliding grooves 5 limit the sliding blocks 404, so that the clamping block 402 keeps stable during movement and does not deviate or shake.

[0032] The upper surface of the box body 1 is provided with a sealing gasket 6. The bottom surface of the box cover 2 is provided with a sealing groove 7 which matches the sealing gasket 6.

[0033] The design of the sealing gasket 6 and the sealing groove 7 provides a relatively closed storage environment for the mask plate, which can effectively block the invasion of dust, moisture and other pollutants.

[0034] Working principle: when the device is used, the mask plate is placed in the box body 1. First, push the clamping block 402 to make it move along the axis of the limiting sliding groove 5 through the sliding blocks 404 on both sides, so as to compress the spring three 403 and the telescopic rod 401. After the mask plate is placed in place, release the clamping block 402. The elastic force of the spring three 403 will drive the clamping block 402 to approach the mask plate, and the mask plate will be clamped through the clamping groove 405 to stably clamp the mask plate. When the box cover 2 is closed, the box cover 2 is rotated around the rotating connection point with the box body 1. The two mounting blocks 301 on the front surface of the box cover 2 will approach the two mounting frames 302 on the front surface of the box body 1. The mounting blocks 301 will extrude the inclined surface of the clamping block 304 during the approaching process. After being extruded, the clamping block 304 will compress the spring one 303 and retract into the mounting frame 302. When the box cover 2 is completely closed, the positions of the mounting frame 302 and the mounting block 301 correspond. At this time, the elastic force of the spring one 303 restores, so that the clamping block 304 is clamped in the clamping groove 305 on the inner wall of the mounting block 301, thereby fixing the closed box cover 2. Through the design of the sealing gasket 6 and the sealing groove 7, the invasion of dust, moisture and other pollutants into the box body can be effectively blocked. When the box cover 2 needs to be opened subsequently, press the push plate one 307. The push plate one 307 drives the slide column 306 to move. The push plate two 308 at the other end of the slide column 306 will approach the clamping block 304 and push the clamping block 304 out of the clamping groove 305, thereby releasing the fixation of the box cover 2. At this time, the box cover 2 can be easily opened by rotating.

[0035] The above merely describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A screwless buckle type mask box device, comprising a box body (1), a box cover (2) and a clamping assembly (3), characterized in that: The box cover (2) is rotatably connected to the top of the box body (1), the clamping assemblies (3) are two in total, both of the clamping assemblies (3) are installed between the box body (1) and the box cover (2), the clamping assembly (3) comprises an installation block (301) and an installation frame (302), the installation block (301) is fixedly connected to the front face of the box cover (2), the installation frame (302) is fixedly connected to the front face of the box body (1), the installation frame (302) corresponds to the installation block (301), the inside of the installation frame (302) is fixedly connected with a spring (303), the inside of the installation frame (302) is slidably connected with a clamping block (304), the clamping block (304) is fixed with the spring (303), the inside of the installation frame (302) is provided with a clamping groove (305), and the clamping block (304) is matched with the clamping groove (305).

2. The screwless snap-on reticle pod apparatus of claim 1, wherein: The inner wall of the installation block (301) is slidably connected with a sliding column (306), one end of the sliding column (306) is located outside the installation block (301), the other end of the sliding column (306) is located inside the clamping groove (305), one end of the sliding column (306) located outside the installation block (301) is fixedly connected with a first push plate (307), the outer surface of the sliding column (306) located outside the installation block (301) is sleeved with a spring (309), and the other end of the sliding column (306) located inside the clamping groove (305) is fixedly connected with a second push plate (308).

3. The screwless snap-on reticle pod apparatus of claim 1, wherein: The left and right inner side walls of the box body (1) are both provided with a fixing assembly (4), and the two fixing assemblies (4) are respectively left-right symmetrical.

4. The screwless snap-on reticle pod apparatus of claim 3, wherein: The fixing assembly (4) comprises two telescopic rods (401), both of the telescopic rods (401) are fixedly connected to the inner side walls of the box body (1), and the ends, away from the box body (1), of the two telescopic rods (401) are fixedly connected with a clamping block (402), the outer surfaces of the two telescopic rods (401) are both sleeved with a spring (403), and the side, away from the two telescopic rods (401), of the clamping block (402) is provided with a clamping groove (405).

5. The screwless snap-on reticle pod apparatus of claim 4, wherein: Both sides of the clamping block (402) are fixedly connected with sliding blocks (404), and the front and rear inner side walls of the box body (1) are both provided with limiting sliding grooves (5), and the two sliding blocks (404) are slidably connected in the two limiting sliding grooves (5) respectively.

6. The screwless snap-on reticle pod apparatus of claim 1, wherein: The upper surface of the box body (1) is provided with a sealing gasket (6), and the bottom surface of the box cover (2) is provided with a sealing groove (7), and the sealing groove (7) is matched with the sealing gasket (6).

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