Cleaning device for FOUP component

Abstract

Cleaning equipment for an FOUP component comprises a cleaning tank mechanism, a bearing mechanism and a water spraying mechanism, the bearing mechanism and the water spraying mechanism are installed on the cleaning tank mechanism, and the bearing mechanism comprises a rotating disc module arranged in the cleaning tank mechanism and used for bearing a box body or a cover plate of an FOUP, and a rotation driving module connected to the rotating disc module. And the driving module can be used for driving the turntable module to drive the box body or the cover plate to rotate. The water spraying mechanism comprises an upper water sprayer and a lower water sprayer which are vertically arranged in the cleaning space in a spaced mode and located above and below the box body or the cover plate borne by the rotating disc module respectively. Through the structural design of the bearing mechanism and the water spraying mechanism installed on the cleaning tank mechanism, the box body or the cover plate can be rotationally cleaned, and the cleaning effect of the box body and the cover plate of the FOUP can be improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of cleaning equipment, in particular to a kind of cleaning equipment for the cleaning of FOUP component member. BACKGROUND

[0002] In the process of wafer processing, the wafer needs to be transferred between various processing stations. In order to ensure that the wafer is not damaged or contaminated during the transfer process, a front opening unified pod (FOUP) is usually used to store the wafer, and multiple wafers are transferred at a time through the FOUP. In order to maintain the cleanliness of the FOUP, the FOUP must be cleaned regularly.

[0003] Currently, the cleaning device for FOUP generally includes a cleaning tank for accommodating the box body or cover plate of FOUP, and multiple water spray pipes arranged in the cleaning tank. The box body or cover plate is sprayed with cleaning liquid by the water spray pipes to perform cleaning operation. However, since the water spray pipes are fixedly arranged on the inner wall of the cleaning tank, they cannot clean every corner of the box body or cover plate, which is prone to cause specific cleaning dead angles. SUMMARY

[0004] The utility model aims to provide a cleaning device for FOUP component member, which can improve at least one disadvantage of the prior art.

[0005] The utility model relates to a cleaning device for FOUP component member, which is suitable for connecting a water supply device for supplying cleaning water, and can be used to clean the box body or cover plate of FOUP.

[0006] The cleaning device includes a cleaning tank mechanism, a bearing mechanism installed in the cleaning tank mechanism, and a water spraying mechanism. The interior of the cleaning tank mechanism defines a cleaning space for accommodating the box body or cover plate. The bearing mechanism includes a turntable module rotatably arranged in the cleaning space and used to bear the box body or cover plate, and a drive module installed in the cleaning tank mechanism and connected to the turntable module. The drive module can be controlled to drive the turntable module to rotate the box body or cover plate. The water spraying mechanism is installed in the cleaning tank mechanism and connected to the water supply device. The water spraying mechanism includes an upper water sprayer and a lower water sprayer arranged in the cleaning space in an upper-lower interval and located above and below the box body or cover plate borne by the turntable module, respectively. The upper water sprayer can be used to spray the cleaning water downward toward the box body or cover plate. The lower water sprayer can be used to spray the cleaning water upward toward the box body or cover plate.

[0007] The utility model discloses a cleaning equipment for FOUP component member, bearing mechanism still includes with the annular base of disc wheel that the bottom of the cleaning space is fixed in the carousel module, and a plurality of top surface distribution of the periphery interval of the base is arranged on the base, carousel module can be relatively rotatory displacement and stack on the disc wheel.

[0008] The utility model discloses a cleaning equipment for FOUP component member, carousel module includes the carousel of linking to drive carousel module and leaning on the disc wheel, a plurality of vertical setting in the top surface of carousel and being used for bearing the box body or the cover plate of bearing frame, and a plurality of setting on bearing frame's positioning piece, positioning piece can be used for the positioning of the box body or the cover plate to the front and back left and right.

[0009] The utility model discloses a cleaning equipment for FOUP component member still contains setting in the object sensor of the cleaning tank mechanism and in the cleaning space, the object sensor can when sensing that carousel module bears the box body or the cover plate correspondingly produces object signal.

[0010] The utility model discloses a cleaning equipment for FOUP component member, carousel module sets up the rotary positioning part, and the cleaning equipment still includes setting in the cleaning tank mechanism and in the cleaning space, and can be used for sensing the positioning sensor of rotary positioning part, positioning sensor can produce positioning signal when sensing rotary positioning part.

[0011] The utility model discloses a cleaning equipment for FOUP component member, the lower water sprayer has the lower water outlet pipe that is used for guiding the cleaning water liquid and extends horizontally, and a plurality of lower spray heads are communicated in the lower water outlet pipe and are arranged along the length direction of the lower water outlet pipe, each lower spray head can be used for spraying the cleaning water liquid upwards.

[0012] The utility model discloses a cleaning equipment for FOUP component member, the upper water sprayer includes the upper water outlet pipe that is used for guiding the cleaning water liquid and extends horizontally, and a plurality of upper spray heads are communicated in the upper water outlet pipe and are arranged along the length direction of the upper water outlet pipe, each upper spray head can be used for spraying the cleaning water liquid downwards.

[0013] The utility model discloses a cleaning equipment for FOUP component member, the water spraying mechanism still includes a plurality of interval distribution along the periphery of the cleaning space and is used for spraying the cleaning water liquid to the box body or the lateral cover plate side water sprayer, each side water sprayer includes the side water outlet pipe that is used for guiding the cleaning water liquid and is arranged in the cleaning tank mechanism and extends up and down, and a plurality of side spray heads are arranged in the side water outlet pipe and are used for spraying the cleaning water liquid horizontally.

[0014] The utility model discloses a cleaning equipment for FOUP component member, the cleaning tank mechanism includes the tank body with the entrance and exit, and the cover module is set up in the tank body, the cover module can be controlled and changes between the closing position of cover sealing the entrance and exit and the opening position of making the entrance and exit expose, and when the cover module is located the closing position, will cooperate with the tank body and define the cleaning space.

[0015] The utility model discloses a cleaning equipment for FOUP component member, the cover module includes the driver of installation in the outer circumferential side of the tank body, and the cover body is installed in the driver and cover seals the entrance and exit, the driver can be controlled to drive the cover body and leave the tank body, and make the entrance and exit expose.

[0016] The utility model discloses a cleaning equipment for FOUP component member, the cover module includes the slide rail of installation in the tank body, the cover body is installed in the slide rail and cover seals the entrance and exit, and the driver is installed in the tank body and is connected to the cover body, the driver can be controlled to drive the cover body and remove the entrance and exit along the slide rail, and make the entrance and exit expose.

[0017] The utility model discloses a cleaning equipment for FOUP component member, the cover module includes the slide rail of installation in the tank body, the cover body is installed in the slide rail and cover seals the entrance and exit, and the driver is installed in the tank body and is connected to the cover body, the driver can be controlled to drive the cover body and remove the entrance and exit along the slide rail, and make the entrance and exit expose. BRIEF DESCRIPTION OF DRAWINGS

[0018] The utility model discloses other features and efficacy, will be clearly presented in the embodiment of referring to the attached drawing, wherein:

[0019] Figure 1 It is a perspective exploded view, and the structure of a FOUP is explained.

[0020] Figure 2 It is a perspective view, and the structure of a first embodiment of the utility model for FOUP component member cleaning equipment is explained, and the situation when a cover module is located in a closing position is explained.

[0021] Figure 3 It is a perspective exploded view, and the situation when the first embodiment is used with a box body is explained, and the situation when the cover module is located in an opening position is explained.

[0022] Figure 4 It is an incomplete top view, and the structure of the first embodiment is explained.

[0023] Figure 5Fig. 1 is an incomplete side sectional view illustrating the first embodiment of the present application;

[0024] Figure 6 Fig. 2 is an incomplete front view illustrating the first embodiment of the present application;

[0025] Figure 7 Fig. 3 is a perspective view illustrating a second embodiment of the present application for a cleaning apparatus of a FOUP component;

[0026] Figure 8 Fig. 4 is an incomplete front view illustrating the second embodiment of the present application when carrying a cover plate;

[0027] Figure 9 Fig. 5 is a bottom sectional view illustrating the second embodiment of the present application;

[0028] Figure 10 Fig. 6 is an incomplete front view illustrating the second embodiment of the present application when the cover body is closed. DETAILED DESCRIPTION

[0029] Before the present application is described in detail, it is to be understood that like components are denoted by like numerals throughout the description.

[0030] Referring to Figure 1 , Figure 2 , Figure 3 , a first embodiment of the present application for a cleaning apparatus 200 of a FOUP component is adapted to be connected to a water supply apparatus (not shown) for supplying cleaning water and connected to a control device (not shown) for controlling the cleaning of a box body 91 of a FOUP 9. The box body 91 is generally cuboid and has an opening 910 for horizontally placing a wafer to be transported.

[0031] The cleaning apparatus 200 comprises a cleaning tank mechanism 3, a carrying mechanism 4, a water spraying mechanism 5, an object sensor 61 and a positioning sensor 62 (as shown in Figure 4 ) installed on the cleaning tank mechanism 3.

[0032] The cleaning tank mechanism 3 comprises a tank body 31 having an upward opening 310, and a cover module 32 installed on the tank body 31 and covering the opening 310.

[0033] The cover module 32 comprises a driver 321 installed on the outer surface of the tank body 31, and a cover body 322 installed on the driver 321. The driver 321 can be controlled by the control device to drive the cover body 322 to a closed position (as shown in Figure 2the opening position (as shown in Fig. 1 1 ) and the closing position (as shown in Fig. 10) of the cover body 322 relative to the tank body 31. Figure 3 When the cover body 322 covers the opening 310, a washing space 30 (as shown in Fig. 10) is defined between the cover body 322 and the tank body 31. Figure 5

[0034] In the first embodiment, the driver 321 is composed of a motor and a gear assembly, for example, but is not limited thereto, and is used to drive the cover body 322 to pivot up and down relative to the tank body 31. However, in implementation, the driver 321 can be changed to be able to drive the cover body 322 to pivot horizontally relative to the tank body 31, and the type of change between the closing position and the opening position.

[0035] In addition, in implementation, the bottom of the tank body 31 is provided with a plurality of drain hole structures (not shown in the figure) communicating with the washing space 30, which are used to drain the washing liquid. However, because the tank body 31 is provided with the drain hole structure, which is prior art, and the ways are various, and therefore will not be described in detail.

[0036] Referring to Figure 4 , Figure 5 , Figure 6 The bearing mechanism 4 is arranged in the tank body 31, and includes a circular ring-shaped base 41 fixedly arranged on the inner bottom surface of the tank body 31, a plurality of rollers 42 arranged on the top surface of the base 41 and spaced apart along the periphery of the base 41, a rotating disc module 43 rotatably arranged on the rollers 42, and a driving module 44 arranged on the outer bottom surface of the tank body 31 and connected to the rotating disc module 43.

[0037] The rotating disc module 43 includes a rotating disc 431 horizontally stacked on the rollers 42 and connected to the driving module 44, a plurality of bearing frames 433 arranged on the top surface of the rotating disc 431 and used to cooperatively bear the box body 91, and a plurality of columnar positioning members 434 protruding from the top surface of the bearing frames 433. A rotating positioning portion 432 is arranged through the rotating disc 431 in the up-down direction. The bearing frames 433 can respectively allow the box body 91 to be leaned down, so that the box body 91 is elevated above the rotating disc 431. The positioning members 434 are used to cooperatively position the box body 91 in the front-rear and left-right directions, that is, to position the box body 91 on the top surface of the bearing frames 433. In the embodiment, the positioning members 434 are designed in a columnar shape, but in implementation, the shape of the positioning members 434 is not limited thereto.

[0038] ​The drive module 44 includes a motor 441 arranged below the tank body 31, a rotating shaft 442 vertically penetrating the bottom of the tank body 31 and connected to the rotating disc 431, and a transmission unit 443 arranged in the tank body 31 and connected between the motor 441 and the rotating shaft 442. The motor 441 can be controlled to start by the control device, and drive the rotating shaft 442 through the transmission unit 443, thereby driving the rotating disc 431 to rotate against the tank body 31 and the rollers 42, and driving the box body 91 carried thereby to rotate against the tank body 31.

[0039] In the first embodiment, the transmission unit 443 is composed of a belt pulley and a transmission belt connected between the motor 441 and the rotating shaft 442. However, the type of the transmission unit 443 for transmitting the power of the motor 441 to drive the rotating shaft 442 is various, for example, a gear and a chain can also be used. Therefore, in other embodiments of the present application, the type of the transmission unit 443 is not limited to the above.

[0040] Referring to Figure 3 , Figure 4 , Figure 5 The water spraying mechanism 5 is used for connecting the water supply device, and can be used for guiding and spraying the cleaning water provided by the water supply device. The water spraying mechanism 5 includes an upper water sprayer 51 arranged on the bottom side of the cover body 322, a lower water sprayer 52 arranged in the tank body 31 and above the rotating disc 431, and a plurality of side water sprayers 53 arranged at intervals on the inner circumferential surface of the tank body 31.

[0041] The upper water sprayer 51 includes an upper water outlet pipe 511 extending horizontally, and a plurality of upper spray heads 512 arranged at intervals along the length of the upper water outlet pipe 511. The upper water outlet pipe 511 can be used for guiding the cleaning water, and the upper spray heads 512 can spray the cleaning water downward.

[0042] The lower water sprayer 52 is arranged between the carrier frames 433 and below the opening 910 of the box body 91 carried by the carrier frames 433. The lower water sprayer 52 includes a lower water outlet pipe 521 extending horizontally, and a plurality of lower spray heads 522 arranged at intervals along the length of the lower water outlet pipe 521. The lower water outlet pipe 521 can be used for guiding the cleaning water, and the lower spray heads 522 can spray the cleaning water upward into the interior of the box body 91.

[0043] Each of the side water sprayers 53 includes a side water outlet pipe 531 vertically arranged on the inner circumferential surface of the tank body 31, and a plurality of side spray heads 532 vertically spaced apart on the side water outlet pipe 531. The side water outlet pipe 531 is used for guiding the cleaning water, and the side spray heads 532 are used for spraying the cleaning water laterally toward the center of the tank body 31.

[0044] The object sensor 61 is arranged on the inner circumferential surface of the tank body 31 and is used for sensing whether the box body 91 is loaded on the carrier 433. In the first embodiment, the object sensor 61 is a light blocking sensor and includes a light emitting element 611 and a light sensing element 612 horizontally spaced apart and facing each other on the inner wall surface of the tank body 31. The light emitting element 611 sends sensing light toward the light sensing element 612, and the light sensing element 612 is used for sensing the sensing light. When the carrier 433 loads the box body 91, the box body 91 blocks the sensing light between the light emitting element 611 and the light sensing element 612, and the light sensing element 612 generates an object signal because the sensing light is not sensed. The object signal is used for the control device to control the operation of the equipment. However, in another embodiment of the utility model, the object sensor 61 can also be changed to a light reflection sensor, which emits the sensing light in a predetermined direction and generates the object signal when the reflected sensing light of the box body 91 is sensed. However, because there are many techniques for sensing whether an object exists, for example, the radar wave can also be used for sensing. Therefore, the object sensor 61 is not limited to the above-mentioned embodiment.

[0045] Referring to Figure 4 , Figure 5 The positioning sensor 62 is arranged on the tank body 31 below the rotating disc 431 and is used for sensing the rotating positioning part 432 of the rotating disc 431 upwardly. In the first embodiment, the rotating positioning part 432 is a through hole vertically penetrating, the positioning sensor 62 sends a detection light upwardly toward the bottom surface of the rotating disc 431, and senses the reflected detection light of the rotating disc 431. When the rotating positioning part 432 of the rotating disc 431 is rotated and displaced above the positioning sensor 62, the detection light penetrates upwardly and is not reflected, and the positioning sensor 62 generates a positioning signal because the detection light is not sensed. The positioning signal is used for the control device to control the operation of the equipment.

[0046] Referring to Figure 2 , Figure 3 , Figure 4The first embodiment of the cleaning equipment 200 is used for cleaning the box body 91 of the FOUP 9, and the cover module 32 is controlled by the control device to be changed to the open position, and the box body 91 is placed in the groove body 31 by the mechanical arm in a manner that the opening 910 (shown in Figure 1 ) faces downward, and the box body 91 is stacked on the top surface of the bearing frame 433, so that the box body 91 is positioned on the bearing frame 433 by the positioning member 434. At this time, the object sensor 61 senses the box body 91 and generates the object signal. The control device judges that the groove body 31 has been placed in the box body 91 according to the object signal. Then, the control device controls the cover module 32 to cover the groove body 31.

[0047] Then, the rotation module 44 is controlled by the control device to drive the rotation of the turntable module 43, and the box body 91 is driven to rotate relative to the upper water sprayer 51, the lower water sprayer 52 and the side water sprayer 53. Then, the upper water sprayer 51, the lower water sprayer 52 and the side water sprayer 53 spray the cleaning water on the box body 91, so as to perform the rotating cleaning operation on the outer surface and the inner surface of the box body 91, and the inner and outer surfaces of the box body 91 can be more completely cleaned.

[0048] During the rotation of the turntable 431 driven by the rotation module 44, the positioning sensor 62 continuously senses the rotating positioning part 432 of the turntable 431. The positioning signal generated by the positioning sensor 62 can be used for the control device to judge the number of rotations of the turntable 431, and the control device controls the rotation module 44 to drive the rotation of the turntable 431 to a specific position, so that the mechanical arm can accurately take and place the box body 91.

[0049] Referring to Figure 7 , Figure 8 , Figure 9 , Figure 10 , the second embodiment of the cleaning equipment 200 for the FOUP 9 can be used for cleaning a cover plate 92 (as shown in Figure 1 ) of a FOUP 9. The second embodiment differs from the first embodiment in the structural design of the cleaning groove mechanism 3 and the water spraying mechanism 5. For the sake of convenience, only the differences between the two embodiments will be described below.

[0050] In the second embodiment, the slot body 31 has an entrance 310 designed to face forward, which is used for a robot arm (not shown) to horizontally place the cover plate 92 into the slot body 31. The cover module 32 includes two slide rails 323 vertically arranged on the slot body 31 and located on the left and right sides of the entrance 310, a cover body 322 vertically arranged on the slide rails 323, and two drivers 321 arranged on the slot body 31 and connected to the left and right sides of the cover body 322. The drivers 321 can be controlled to drive the cover body 322 to change between the closed position of covering the entrance 310 and the open position of exposing the entrance 310.

[0051] In the second embodiment, the driver 321 is a telescopic cylinder, which drives the cover body 322 to vertically move. However, in other embodiments of the utility model, the slide rails 323 can be changed to extend horizontally, and the driver 321 can be changed to a telescopic cylinder that extends horizontally, which can drive the cover body 322 to horizontally move. In addition, the driver 321 can also be changed to a mechanism such as a motor, a transmission screw, and a transmission gear to drive the cover body 322 to vertically move, or to drive the cover body 322 to pivotally move between the closed position and the open position. In addition, only one driver 321 can be arranged.

[0052] The water spraying mechanism 5 only includes the upper water sprayer 51 and the lower water sprayer 52.

[0053] The object sensor 61 can be used to sense whether the cover plate 92 is placed on the carrier 433 of the carrier mechanism 4.

[0054] In the second embodiment of the cleaning equipment 200, when the cover plate 92 of the FOUP 9 is cleaned, the robot arm moves the cover plate 92 into the slot body 31 and places the cover plate 92 on the carrier 433 between the upper water sprayer 51 and the lower water sprayer 52, and the object sensor 61 senses whether the cover plate 92 is placed. Then, the driver 321 is controlled to drive the cover body 322 to cover the slot body 31. Then, the drive module 44 is controlled to drive the rotating disc module 43 to rotate relative to the upper water sprayer 51 and the lower water sprayer 52, and the upper water sprayer 51 and the lower water sprayer 52 start to spray the cleaning water, so as to rotate and clean the upper and lower surfaces and the periphery of the cover plate 92, which can more completely clean each part of the cover plate 92.

[0055] In summary, the structural design of the bearing mechanism 4 and the water spraying mechanism 5 installed in the cleaning tank mechanism 3 allows for the rotational cleaning of the FOUP 9's box body 91 or cover plate 92, enabling a more complete cleaning of the box body 91 or cover plate 92 and improving the cleaning effect of the FOUP 9's box body 91 and cover plate 92. Therefore, the cleaning equipment for FOUP components of this utility model is indeed a highly innovative and convenient creation, and it truly achieves the purpose of this utility model.

[0056] The above description is merely an embodiment of this utility model and should not be construed as limiting the scope of this utility model. Any simple equivalent changes and modifications made in accordance with the claims and description of this utility model shall still fall within the scope of this utility model.

Claims

1. A cleaning apparatus for a constituent member of a FOUP, which is adapted to be connected to a water supply apparatus for supplying cleaning water, and which is capable of performing cleaning of a case body or a lid plate of a FOUP, the cleaning apparatus comprising a cleaning tank mechanism, and a water spraying mechanism installed in the cleaning tank mechanism, an inside of the cleaning tank mechanism defining a cleaning space for accommodating the case body or the lid plate, characterized in that: The cleaning device further comprises a bearing mechanism installed in the cleaning space of the cleaning tank mechanism, which includes a rotating disc module rotatably arranged in the cleaning space and used for bearing the box body or the cover plate, and a driving rotating module installed in the cleaning tank mechanism and connected to the rotating disc module, which can be controlled to drive the rotating disc module to rotate the box body or the cover plate; the water spraying mechanism is connected to the water supply device and includes an upper water sprayer and a lower water sprayer arranged in the cleaning space in an upper-lower interval and located above and below the box body or the cover plate borne by the rotating disc module respectively, the upper water sprayer being used for spraying the cleaning liquid downward to the box body or the cover plate, and the lower water sprayer being used for spraying the cleaning liquid upward to the box body or the cover plate. ​ 2. The cleaning apparatus for FOUP constituent members according to Claim 1, characterized by: The bearing mechanism further includes an annular base fixed to the bottom of the cleaning space with the rotating disc module, and a plurality of rollers arranged on the top surface of the base in a circumferential interval along the periphery of the base, the rotating disc module being capable of being relatively rotatably displaced and stacked on the rollers.

3. The cleaning apparatus for FOUP constituent members according to Claim 2, characterized by: The rotating disc module includes a rotating disc connected to the driving rotating module and abutting against the rollers, a plurality of bearing frames vertically arranged on the top surface of the rotating disc and used for bearing the box body or the cover plate, and a plurality of positioning members arranged on the bearing frames, the positioning members being used for cooperating to position the box body or the cover plate in a front-rear and left-right direction.

4. The cleaning apparatus for FOUP constituent members according to claim 1, 2 or 3, characterized by: The cleaning device further comprises an object sensor arranged in the cleaning tank mechanism and located in the cleaning space, the object sensor being capable of generating an object signal when sensing that the rotating disc module bears the box body or the cover plate.

5. The cleaning apparatus for FOUP constituent members according to claim 1, 2 or 3, characterized by: The rotating disc module is provided with a rotating positioning part, and the cleaning device further comprises a positioning sensor arranged in the cleaning tank mechanism and located in the cleaning space and capable of sensing the rotating positioning part, the positioning sensor being capable of generating a positioning signal when sensing the rotating positioning part.

6. The cleaning apparatus for FOUP constituent members according to Claim 1, characterized by: The lower water sprayer has a lower water outlet pipe laterally extending and used for guiding the cleaning liquid, and a plurality of lower spray heads arranged in the lower water outlet pipe in a length direction of the lower water outlet pipe, each of the lower spray heads being used for upwardly spraying the cleaning liquid.

7. The cleaning apparatus for FOUP constituent members according to Claim 1, characterized by: The upper water sprayer includes an upper water outlet pipe laterally extending and used for guiding the cleaning liquid, and a plurality of upper spray heads arranged in the upper water outlet pipe in a length direction of the upper water outlet pipe, each of the upper spray heads being used for downwardly spraying the cleaning liquid.

8. The cleaning apparatus for FOUP constituent members according to claim 1, 6 or 7, characterized by: The water spraying mechanism further includes a plurality of side water sprayers arranged in a circumferential interval along the periphery of the cleaning space and used for laterally spraying the cleaning liquid to the box body or the cover plate, each of the side water sprayers including a side water outlet pipe extending upwardly and downwardly in the cleaning tank mechanism and used for guiding the cleaning liquid, and a plurality of side spray heads arranged in the side water outlet pipe in an upward-downward interval and used for laterally spraying the cleaning liquid.

9. The cleaning apparatus for FOUP constituent members according to Claim 1, characterized by: The cleaning tank mechanism includes a tank body having an opening, and a cover module disposed on the tank body, the cover module being controllable to change between a closed position in which the cover seals the opening, and an open position in which the opening is exposed, and when the cover module is in the closed position, cooperates with the tank body to define the cleaning space.

10. The cleaning apparatus for FOUP constituent members according to Claim 9, characterized by: The cover module includes a driver mounted on the tank body at a peripheral side, and a cover body mounted on the driver and sealing the opening, the driver being controllable to drive the cover body away from the tank body to expose the opening.

11. The cleaning apparatus for FOUP constituent members according to Claim 9, characterized by: The cover module includes a slide rail mounted on the tank body, a cover body mounted on the slide rail and sealing the opening, and a driver mounted on the tank body and connected to the cover body, the driver being controllable to drive the cover body along the slide rail away from the opening to expose the opening.

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