Fixing tool for casting sheet

Abstract

The fixing tool comprises a workpiece frame and a supporting plate, the workpiece frame is provided with a through hole, the supporting plate is connected with the workpiece frame, and at least part of the supporting plate is arranged in the through hole, or the supporting plate is located outside the through hole and shields an opening in one side of the through hole; the side face, facing the interior of the through hole, of the supporting plate is configured to be a supporting plane used for supporting the casting sheet, and a containing space used for containing and fixing the casting sheet is defined by the supporting plane and the inner wall of the through hole in an enclosed mode. According to the fixing tool disclosed by the utility model, the casting sheet is supported by the supporting plane of the supporting plate, so that the casting sheet can be prevented from collapsing and deforming under the action of gravity or the pressure of the punching needle, and the accuracy of the punching position of the casting sheet is further improved, so that the position deviation degree is reduced in subsequent electrode printing; and when a plurality of follow-up casting sheets are laminated, the hole sites on the casting sheets can be aligned with one another.

Description

Technical Field

[0001] This utility model relates to the field of green blank processing technology based on electrostatic chuck manufacturing process, and in particular to a casting sheet fixing fixture. Background Technology

[0002] Electrostatic chucks (ESCs) are used in semiconductor manufacturing processes to hold and support wafers. They utilize electrostatic adsorption to hold the wafer to be processed on their surface, preventing movement or misalignment during production. ESCs are widely used in processes such as physical vapor deposition (PVD), chemical vapor deposition (CVD), and etching.

[0003] Generally, electrostatic chucks consist of a ceramic layer bonded to a metal substrate. The main manufacturing process for the ceramic layer includes: ball milling → degassing → casting → cutting → punching → filling and electrode printing → lamination → warm isostatic pressing → cutting → adhesive removal → sintering → post-processing. Punching is a crucial step, directly determining the positional accuracy of the holes in the finished electrostatic chuck. This process is completed on a specialized punching machine. The cast sheet, for example, is placed in a punching workpiece frame beforehand, its edges secured with tape. The workpiece frame then moves the cast sheet to a preset position according to a program, and finally, a cylinder drives a punch to complete the punching. However, because the cast sheet is soft and easily deformed, if the workpiece frame design is flawed, especially when the cast sheet is large, the collapse and deformation of the cast sheet during movement can affect the punching positional accuracy, leading to positional deviations in subsequent electrode printing and misalignment of holes during lamination. Utility Model Content

[0004] The purpose of this invention is to at least solve the problem that the collapse and deformation of the cast film affects the accuracy of the punching position. This purpose is achieved through the following methods:

[0005] This utility model proposes a casting sheet fixing fixture, which includes a workpiece frame and a support plate. The workpiece frame has a through hole, and the support plate is connected to the workpiece frame. At least part of the support plate is disposed in the through hole, or the support plate is located outside the through hole and covers one side opening of the through hole. The side of the support plate facing the through hole is configured as a support plane for supporting the casting sheet. The support plane and the inner wall of the through hole enclose and define a receiving space for placing and fixing the casting sheet.

[0006] According to the casting sheet fixing fixture of this utility model, in the punching process of the casting sheet, when the casting sheet is placed and fixed in the receiving space, the casting sheet is supported by the supporting plane of the tray, which can prevent the casting sheet from collapsing and deforming under the action of gravity or the pressure of the punch, thereby improving the accuracy of the punching position of the casting sheet, so as to reduce the position deviation in the subsequent printing electrode, and ensure that the holes on the subsequent multiple casting sheets can be aligned with each other.

[0007] In addition, the casting film fixing fixture according to this utility model may also have the following additional technical features:

[0008] In some embodiments of this utility model, the workpiece frame includes a first plate surface and a second plate surface arranged opposite to each other, the through hole passes through the first plate surface and the second plate surface respectively, the through hole forms a first opening on the first plate surface and a second opening on the second plate surface, the support plate is connected to the first plate surface and covers the first opening, and the second opening is used for the casting sheet to enter or move out of the receiving space.

[0009] In some embodiments of this utility model, the first plate surface is provided with an assembly groove, the assembly groove is arranged in a ring around the circumference of the through hole, and the support plate is embedded in the assembly groove.

[0010] In some embodiments of this utility model, along the through-hole direction, the side of the support plate opposite to the workpiece frame is flush with the first plate surface; or, along the through-hole direction, the side of the support plate opposite to the workpiece frame is located inside the assembly groove.

[0011] In some embodiments of this utility model, along the through-hole, the thickness of the workpiece frame is L1, and the depth of the assembly groove is L2. Then, the value range of L2 / L1 is T, where 1 / 3 ≤ T ≤ 2 / 3.

[0012] In some embodiments of this utility model, one of the workpiece frame and the pallet is provided with at least one positioning hole, and the other of the two is provided with at least one positioning post, and the positioning posts are inserted into the positioning holes one by one.

[0013] In some embodiments of this utility model, the through hole has a square hole structure, and the workpiece frame is provided with a plurality of positioning holes, which are arranged sequentially and at intervals around the through hole in the circumferential direction.

[0014] In some embodiments of this utility model, the supporting plane is provided with a plurality of clearance holes.

[0015] In some embodiments of this utility model, the pattern formed by the arrangement of the plurality of clearance holes is configured to match the punching pattern of the cast sheet, and the diameter of the clearance holes is configured to be larger than the diameter of the punching of the cast sheet.

[0016] In some embodiments of this utility model, the edge of the workpiece frame is further provided with at least one gripping notch, which is used for the robot arm to position and grip the workpiece frame. Attached Figure Description

[0017] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. Wherein:

[0018] Figure 1 This is a schematic diagram of the structure of the fixing tool from one perspective according to an embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the fixing fixture from another perspective of an embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the workpiece frame from one perspective according to an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the workpiece frame from another perspective of an embodiment of the present invention;

[0022] Figure 5 This is a schematic diagram of the structure of a tray according to an embodiment of the present invention.

[0023] The labels in the attached diagram are as follows:

[0024] 100. Fixed tooling; 1001. Accommodation space;

[0025] 10. Workpiece frame; 11. First plate surface; 111. Assembly groove; 12. Second plate surface; 101. Through hole; 1011. First opening; 1012. Second opening; 13. Positioning hole; 14. Clamping notch;

[0026] 20. Pallet; 21. Support plane; 22. Positioning post; 23. Clearance hole. Detailed Implementation

[0027] Exemplary embodiments of the present invention will now be described in more detail with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be implemented in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this invention will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

[0028] It should be understood that the terminology used herein is for the purpose of describing particular exemplary embodiments only and is not intended to be limiting. Unless the context clearly indicates otherwise, the singular forms “a,” “an,” and “described” as used herein may also include the plural forms. The terms “comprising,” “including,” “containing,” and “having” are inclusive and therefore indicate the presence of the stated features, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein are not construed as requiring them to be performed in a particular order described or illustrated unless the order of performance is explicitly indicated. It should also be understood that additional or alternative steps may be used.

[0029] Although terms such as first, second, third, etc., may be used in this document to describe multiple elements, components, regions, layers, and / or segments, these elements, components, regions, layers, and / or segments should not be limited by these terms. These terms may be used only to distinguish one element, component, region, layer, or segment from another. Unless the context clearly indicates otherwise, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence. Therefore, the first element, component, region, layer, or segment discussed below may be referred to as the second element, component, region, layer, or segment without departing from the teachings of the exemplary embodiments.

[0030] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between the components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0031] For ease of description, spatial relative terms may be used in the text to describe the relationship of one element or feature relative to another element or feature, as shown in the figure. These relative terms include, for example, "inside," "outside," "middle," "outer," "below," "below," "above," "over," etc. Such spatial relative terms are intended to include different orientations of the device in use or operation, other than those depicted in the figure. For example, if the device in the figure rotates, then an element described as "below other elements or features" or "below other elements or features" will subsequently be oriented "above other elements or features" or "above other elements or features." Therefore, the example term "below" can include both upper and lower orientations.

[0032] According to the embodiments of this utility model, please refer to... Figure 1 , Figure 3 and Figure 5 As shown, a casting sheet fixing fixture 100 is proposed. The casting sheet fixing fixture 100 includes a workpiece frame 10 and a support plate 20. The workpiece frame 10 is provided with a through hole 101, which provides a spatial basis for the subsequent placement of the support plate 20 and the accommodation of the casting sheet. In the punching process of the casting sheet, the casting sheet will be moved to a preset position according to the program under the drive of the workpiece frame 10 to complete the punching and other operations.

[0033] The tray 20 is connected to the workpiece frame 10, and at least part of the tray 20 is disposed in the through hole 101 of the workpiece frame 10. One side of the tray 20 facing the through hole 101 is configured as a support plane 21 for supporting the casting sheet. The support plane 21 and the inner wall of the through hole 101 together enclose and define a receiving space 1001, which is used to place and fix the casting sheet.

[0034] The connection methods between the pallet 20 and the workpiece frame 10 include, but are not limited to, bolt connection, slot connection, bonding, and welding. For example, in some exemplary embodiments, the pallet 20 and the workpiece frame 10 are connected by bolts, with corresponding screw holes provided on both the workpiece frame 10 and the pallet 20. The pallet 20 is fixed to the workpiece frame 10 at the position corresponding to the through hole 101 using bolts and nuts. The bolt connection method is strong and reliable, capable of withstanding large external forces, ensuring the stability of the pallet 20 during operation. During installation, the bolts are first passed through the screw holes on the pallet 20 and the workpiece frame 10, and then the nuts are tightened to make the pallet 20 fit tightly against the predetermined position of the workpiece frame 10. In other exemplary embodiments, welding is used to connect the pallet 20 and the workpiece frame 10 together. The welding method can be selected according to the materials of the workpiece frame 10 and the pallet 20; for example, for metal materials, arc welding or argon arc welding can be used. If the workpiece frame 10 and the pallet 20 are made of metal, during welding, the pallet 20 is first placed in a preset position within the through hole 101 of the workpiece frame 10, and then welded at the connection point using welding equipment, so that the pallet 20 and the workpiece frame 10 form a whole. Other ways of connecting the pallet 20 and the workpiece frame 10 will not be listed here.

[0035] In this embodiment, during the punching process of the cast sheet, the cast sheet itself is prone to deformation, especially when it is large in size, and it is easy to collapse and deform during dragging and moving. The cast sheet fixing fixture 100 proposed in this utility model, when the cast sheet is placed and fixed in the receiving space 1001, the supporting plane 21 on the support plate 20 provides effective support for the cast sheet. Whether under the action of gravity or under the pressure generated by the punch, it can prevent the cast sheet from collapsing and deforming, ensuring the shape stability of the cast sheet during the punching process. By solving the problem of cast sheet deformation, the accuracy of the punching position of the cast sheet is improved, so that the punching position can meet the process requirements and avoid deviations in the punching position caused by deformation.

[0036] In the subsequent electrode printing process, the improved accuracy of the punching position reduces positional deviations during electrode printing, ensuring the accuracy of electrode printing. When performing multiple tape stacking processes, precise punching positions ensure that the holes on the tapes are aligned, avoiding process problems caused by misalignment and guaranteeing the smooth progress of the entire electrostatic chuck manufacturing process and the quality of the final product.

[0037] It should be noted that in other embodiments, the support plate 20 may also be disposed outside the through hole 101 and cover one side opening of the through hole 101, while the other side opening of the through hole 101 remains open. The support plate 20 and the inner wall of the through hole 101 together define a receiving space 1001 for placing and fixing the casting sheet. The casting sheet can be placed into the receiving space 1001 through the open opening, or removed from the receiving space 1001 through the open opening after punching is completed.

[0038] In some embodiments, please combine Figure 1 , Figure 2 and Figure 3 As shown, the workpiece frame 10 has a flat plate structure. The workpiece frame 10 has a first plate surface 11 and a second plate surface 12 arranged opposite to each other. The first plate surface 11 and the second plate surface 12 are arranged in parallel. A through hole 101 is provided in the central area of ​​the workpiece frame 10. The through hole 101 passes through the first plate surface 11 and the second plate surface 12 respectively, and the through direction of the through hole 101 is perpendicular to the first plate surface 11 and the second plate surface 12 respectively. The through hole 101 forms a first opening 1011 on the first plate surface 11 and a second opening 1012 on the second plate surface 12. The support plate 20 is connected to the first plate surface 11 and covers the first opening 1011, making the support plate 20 a support and limiting structure at the bottom when the cast sheet is placed in the receiving space 1001, ensuring that the cast sheet will not detach from the receiving space 1001 from the first opening 1011. That is, the receiving space 1001 is a groove structure with an opening on one side, and the second opening 1012 is the opening of the groove structure. The support plane 21 is the bottom surface of the groove structure, and the inner wall surface of the through hole 101 is the side wall surface of the groove structure. The cast sheet can be placed into the receiving space 1001 through the second opening 1012, and the inner wall of the through hole 101 is used to limit the cast sheet. In the punching process, the cast sheet is prevented from sliding relative to the fixed fixture 100 to ensure the accuracy of the punching position. After the punching and other processes are completed, the cast film can be moved out of the receiving space 1001 through the second opening 1012. The whole operation is relatively convenient, and the existence of the second opening 1012 provides a clear and appropriate path for the placement and removal of the cast film.

[0039] It should be noted that after placing the casting sheet to be punched into the receiving space 1001, it is also necessary to use tape to bond the edge of the casting sheet to the workpiece frame 10 so that the casting sheet and the fixed fixture 100 remain relatively fixed.

[0040] In some embodiments, please combine Figure 1 , Figure 4 and Figure 5As shown, the first plate surface 11 is provided with an assembly groove 111. The assembly groove 111 is arranged in a ring around the through hole 101, that is, the assembly groove 111 is centered on the through hole 101, forming a closed annular groove structure around the through hole 101. This arrangement allows the assembly groove 111 to fit tightly with the through hole 101, providing precise positioning space for the installation of the support plate 20. The support plate 20 is embedded in the assembly groove 111, so that the edge part of the support plate 20 can be embedded in the assembly groove 111. The annular shape of the assembly groove 111 is adapted to the support plate 20, and the support plate 20 can fit well in the assembly groove 111. Through this embedding method, the connection with the workpiece frame 10 is achieved. The support plate 20 can be accurately placed in the assembly groove 111, so that the installation position of the support plate 20 has high accuracy. In this embodiment, since the assembly groove 111 is arranged in a ring around the through hole 101, the support plate 20 can be accurately positioned when installed in the assembly groove 111, thereby ensuring that the relative position of the support plane 21 of the support plate 20 and the through hole 101 is accurate, thus ensuring that stable and accurate support can be provided when placing the casting sheet.

[0041] It should also be noted that the installation method of embedding the tray 20 into the assembly slot 111 enhances the connection stability between the tray 20 and the workpiece frame 10, and the embedded connection can effectively prevent the tray 20 from shifting in the horizontal direction (parallel to the first plate surface 11). During operation, whether it is a slight collision when placing the cast film or the pressure applied by the punch during punching, the tray 20 can be firmly fixed in the assembly slot 111, and will not easily loosen or shift, ensuring the reliability of the entire fixture 100 during operation.

[0042] In some embodiments, such as Figure 2 As shown, along the through-hole 101, the side of the support plate 20 facing away from the workpiece frame 10 is flush with the first plate surface 11. The design of the support plate 20 being flush with the first plate surface 11 makes the fixed fixture 100 have a smooth overall end face on one side of the first plate surface 11. During the transfer process, the fixed fixture 100 reduces the probability of relative movement between the support plate 20 and the workpiece frame 10 due to contact or interference with other devices, and prevents the support plate 20 from detaching from the workpiece frame 10 due to interference from external devices.

[0043] The design of the pallet 20 being flush with the first plate surface 11 makes the fixed fixture 100 more compact in structure. This compact structure reduces the space occupied by the fixture, which is conducive to the rational arrangement of equipment and tools in a limited production space. At the same time, it also makes the fixture more regular in appearance, which is convenient for integration with other production equipment and improves the cleanliness and coordination of the entire production environment.

[0044] In other embodiments, along the through-hole 101, the side of the pallet 20 facing away from the workpiece frame 10 is located inside the assembly groove 111. When viewed from the first side of the workpiece frame 10, the assembly groove 111 partially covers the top surface of the pallet 20. This arrangement provides the pallet 20 with a relatively concealed position inside the workpiece frame 10 and creates a height difference with the first side of the workpiece frame 10. Because the top surface of the pallet 20 is recessed inside the assembly groove 111, the surface of the pallet 20 is less likely to be directly impacted or rubbed by external objects during operation. During the transfer process, the fixing fixture 100 reduces the probability of relative movement between the pallet 20 and the workpiece frame 10 due to contact or interference between the pallet 20 and other devices, and prevents the pallet 20 from detaching from the workpiece frame 10 due to interference from external devices.

[0045] In some embodiments, along the through-hole 101, the thickness of the workpiece frame 10 is L1, and the depth of the assembly groove 111 is L2. The value range of L2 / L1 is T, where 1 / 3 ≤ T ≤ 2 / 3. For example, in some exemplary embodiments, the thickness of the workpiece frame 10 is L1 = 1.5 mm, and the thickness of the inner support plate 20 is 1.0 mm. Therefore, the depth of the assembly groove 111 is 0.5 mm ≤ L2 ≤ 1 mm.

[0046] This arrangement ensures that the tray 20 and the workpiece frame 10 at least partially overlap along the through hole 101, and the thickness of the overlapping portion is in the range of 0.5 mm to 1 mm.

[0047] The workpiece frame 10 is a rectangular frame structure with a length and width of 660mm × 510mm. The through hole 101 is a square hole structure. The side length of the through hole 101 is 270mm, which is calculated based on the size of the finished 8-inch electrostatic chuck and taking into account sintering shrinkage and machining allowance.

[0048] In this embodiment, by limiting the range of L2 / L1, the stability of the overall structure of the assembly groove 111 and the workpiece frame 10 can be balanced to a certain extent. While ensuring that the assembly groove 111 has sufficient depth to securely install the support plate 20, it also ensures that the workpiece frame 10 itself has good load-bearing capacity. This ensures that the fixed fixture 100 is not easily damaged or deformed during long-term use, whether facing the impact force of the punch in the punching process or external forces such as daily handling and equipment operation vibration. This ensures that the entire fixed fixture 100 can work stably and maintain the normal operation of processes such as casting sheet punching.

[0049] In some embodiments, please combine Figure 1 , Figure 2 and Figure 5As shown, the workpiece frame 10 has at least one positioning hole 13, and the pallet 20 has at least one positioning post 22, which are inserted into the positioning holes 13 one by one. Specifically, the positioning hole 13 is usually a regular geometric shape, such as a circle or a square. The diameter of the positioning hole 13 matches the diameter of the positioning post 22 to ensure that the positioning post 22 can be inserted smoothly and with a certain degree of fitting accuracy. For example, if the positioning post 22 is cylindrical, the positioning hole 13 is also circular, but its diameter will be slightly larger than the diameter of the positioning post 22 to facilitate insertion and ensure accurate positioning. When installing the pallet 20 onto the workpiece frame 10, the positioning post 22 needs to be aligned with the positioning hole 13, and then the pallet 20 is connected to the workpiece frame 10 by insertion. This connection method is simple and direct, and through the cooperation of the positioning post 22 and the positioning hole 13, the position of the pallet 20 on the workpiece frame 10 can be accurately determined, ensuring that the installation position of the pallet 20 meets the design requirements. Furthermore, the plug-in connection method enhances the connection stability between the pallet 20 and the workpiece frame 10 to a certain extent. When the pallet 20 is subjected to external forces, such as the gravity of the cast sheet or the impact force of the punch, the cooperation between the positioning post 22 and the positioning hole 13 prevents the pallet 20 from shifting or rotating on the workpiece frame 10, ensuring that the pallet 20 is firmly fixed to the workpiece frame 10 and guaranteeing the reliability of the entire fixture 100 during operation. The installation process is relatively simple; it only requires aligning the positioning post 22 with the positioning hole 13 and inserting it, without requiring complex tools or operating skills. Similarly, when it is necessary to disassemble the pallet 20, it is only necessary to pull the pallet 20 out of the positioning post 22, which facilitates the replacement or maintenance of the pallet 20, improves work efficiency, and reduces maintenance costs. In this embodiment, the positioning post 22 and the pallet 20 are an integral structure.

[0050] In other embodiments, the pallet 20 is provided with at least one positioning hole 13, and the workpiece frame 10 is provided with at least one positioning post 22, which are inserted into the positioning holes 13 one by one. The connection method between the pallet 20 and the workpiece frame 10 is the same as the above scheme, and will not be described again here.

[0051] In some embodiments, please combine Figure 1 , Figure 2 and Figure 5As shown, the workpiece frame 10 is provided with multiple positioning holes 13, which are arranged circumferentially around the through hole 101 at intervals. This circumferential arrangement around the through hole 101 fully utilizes the space surrounding it, forming a uniformly distributed structure. For example, if four positioning holes 13 are provided, the four positioning holes will be evenly distributed near the outer edges of the four sides of the square through hole 101, providing positioning constraints for the support plate 20 from various directions. A certain distance is maintained between each positioning hole 13. When the support plate 20 is installed on the workpiece frame 10, the corresponding positioning post 22 on the support plate 20 needs to be inserted into the positioning holes 13 arranged circumferentially around the square through hole 101. Due to the shape characteristics of the square through hole 101 and the uniform distribution of multiple positioning holes 13, the tray 20 can be accurately positioned from multiple directions, so that the tray 20 accurately covers the square through hole 101 and together with the inner wall of the square through hole 101, it encloses the receiving space 1001 for placing the cast film, and ensures that the tray 20 can maintain a stable position during subsequent use (such as when subjected to external forces such as the weight of the cast film or the pressure of the punch), without any displacement or misalignment.

[0052] In this embodiment, please refer to Figure 1 , Figure 2 and Figure 5 As shown, there are 8 positioning holes 13 and 8 positioning posts 22. Four positioning posts 22 are distributed at the four corners of the support plate 20, with a distance of 15mm from the edge. The other four positioning posts 22 are distributed at the midpoint of the line connecting two adjacent corners. Correspondingly, there are also 8 positioning holes 13 around the square through hole 101 in the circumferential part of the workpiece frame 10. The 8 positioning holes 13 and 8 positioning posts 22 are set one-to-one.

[0053] Furthermore, please combine Figure 1 and Figure 4 As shown, the width L3 of the mounting groove is 30mm. When the pallet 20 is installed on the workpiece frame 10, the pallet 20 and the workpiece frame 10 have an annular overlapping area, and the distance from the outer edge of the annular overlapping area to the inner edge of the annular overlapping area is 30mm.

[0054] In some embodiments, the support plane 21 is provided with a plurality of clearance holes 23. The pattern formed by the arrangement of the plurality of clearance holes 23 is configured to match the punching pattern of the cast sheet. For example, if the punching pattern of the cast sheet is a matrix arrangement of several circular punches, the clearance holes 23 on the support plane 21 of the support plate 20 will also be distributed in the same matrix arrangement, and each clearance hole 23 corresponds in position to the corresponding punch on the cast sheet, ensuring that the corresponding position of the punch has adequate clearance space during the punching process. At the same time, the diameter of the clearance holes 23 is configured to be larger than the diameter of the punch on the cast sheet. The space provided by the clearance holes 23 is larger than the space of the punch on the cast sheet itself, thereby providing sufficient clearance space for the up and down movement of the punch during the punching process, preventing the punch from touching the support plate 20 during operation, and ensuring that the punching operation can be carried out smoothly and safely.

[0055] In detail, during the actual casting sheet punching process, when the casting sheet is placed on the support plane 21 of the support plate 20 and within the receiving space 1001 formed by the support plate 20 and the inner wall of the through hole 101, the clearance hole 23 on the support plane 21 of the support plate 20 corresponds precisely to the punching position of the casting sheet. When the punch falls from above to perform the punching operation, the clearance hole 23 provides sufficient space, allowing the punch to pass smoothly through the punching hole of the casting sheet without interfering with the support plate 20. This precise matching and dimensional design makes the entire punching process smoother, ensuring the accuracy of the casting sheet punching position and preventing problems such as punch damage, support plate 20 deformation, and poor punching quality that may result from the punch contacting the support plate 20.

[0056] It should also be noted that the method of configuring the clearance holes 23 according to the punching pattern and size of the cast sheet allows the fixed fixture 100 to adapt to cast sheets with different punching patterns and size requirements. As long as the clearance holes 23 are designed and adjusted according to the corresponding punching requirements, the same fixture can be used for punching processes of cast sheets of various specifications, enhancing the versatility of the fixture and reducing the cost of equipping different fixtures for different product specifications.

[0057] In some embodiments, such as Figure 2 and Figure 3 As shown, the edge of the workpiece frame 10 is also provided with two gripping notches 14, which are used for the robot arm to position and grip the workpiece frame 10. The shape and size of the gripping notches 14 are designed according to the gripping structure and gripping requirements of the robot arm. The gripping notches 14 usually have a certain regular geometric shape, such as a semi-circle, a rectangle, or a trapezoid with a certain curvature, so that the gripper of the robot arm can be well adapted to it, accurately positioned and embedded in it for gripping operations.

[0058] It should be noted that in automated production processes such as semiconductor manufacturing, robotic arms are often used to handle and manipulate the workpiece frame 10. When it is necessary to move the fixed fixture 100, the robotic arm uses its positioning system to identify the two gripping notches 14 on the edge of the workpiece frame 10. The robotic arm's grippers accurately align with the gripping notches 14 and then insert themselves into the notches, achieving a stable grip through the cooperation between the grippers and the gripping notches 14. This cooperation method enables the robotic arm to accurately position the workpiece frame 10, ensuring that the position and orientation of the workpiece frame 10 can be accurately controlled during gripping, handling, and subsequent placement, avoiding situations such as the workpiece frame 10 shaking, shifting, or slipping, and ensuring the accuracy and stability of the entire operation process.

[0059] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A fixture for fixing cast sheets, characterized in that, The fixed fixture includes a workpiece frame and a support plate. The workpiece frame has a through hole, and the support plate is connected to the workpiece frame. At least part of the support plate is located inside the through hole, or the support plate is located outside the through hole and covers one side opening of the through hole. One side of the tray facing the through hole is configured as a support plane for supporting the cast sheet, and the support plane and the inner wall of the through hole define a receiving space for placing and fixing the cast sheet.

2. The fixture for fixing the cast film according to claim 1, characterized in that, The workpiece frame includes a first plate and a second plate arranged in opposite directions. The through hole passes through the first plate and the second plate respectively. The through hole forms a first opening on the first plate and a second opening on the second plate. The support plate is connected to the first plate and covers the first opening. The second opening is used for the casting sheet to enter or move out of the receiving space.

3. The fixture for fixing the cast film according to claim 2, characterized in that, The first plate surface is provided with an assembly groove, which is arranged in a ring around the circumference of the through hole, and the support plate is embedded in the assembly groove.

4. The fixture for fixing the cast film according to claim 3, characterized in that, Along the through-hole's through-path, the side of the support plate facing away from the workpiece frame is flush with the first plate surface; or, along the through-hole's through-path, the side of the support plate facing away from the workpiece frame is located inside the assembly groove.

5. The fixture for fixing the cast film according to claim 3, characterized in that, Along the through-hole, the thickness of the workpiece frame is L1, and the depth of the assembly groove is L2. Then, the value range of L2 / L1 is T, where 1 / 3 ≤ T ≤ 2 / 3.

6. The fixture for fixing the cast film according to any one of claims 1 to 5, characterized in that, One of the workpiece frame and the pallet is provided with at least one positioning hole, and the other of the two is provided with at least one positioning post, and the positioning posts are inserted into the positioning holes one by one.

7. The fixture for fixing the cast film according to claim 6, characterized in that, The through hole has a square hole structure, and the workpiece frame is provided with a plurality of positioning holes, which are arranged sequentially and at intervals around the through hole in the circumferential direction.

8. The fixture for fixing the cast film according to any one of claims 1 to 5, characterized in that, The supporting plane is provided with multiple clearance holes.

9. The fixture for fixing the cast film according to claim 8, characterized in that, The pattern formed by the arrangement of the plurality of clearance holes is configured to match the punching pattern of the cast sheet, and the diameter of the clearance holes is configured to be larger than the diameter of the punching of the cast sheet.

10. The fixture for fixing the cast film according to any one of claims 1 to 5, characterized in that, The edge of the workpiece frame is also provided with at least one gripping notch, which is used for the robot arm to position and grip the workpiece frame.

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