Clamp for mask detection

By designing an adjustable horizontal angle mask inspection fixture, the problem of not being able to fix masks vertically during inspection was solved, achieving high-precision and consistent inspection results. It is suitable for clamping masks of various specifications.

CN223917724UActive Publication Date: 2026-02-17CHANGZHOU WEIPU SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information

Application Number
CN202520412201.6
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-03-10
Publication Date
2026-02-17
Estimated Expiration
2035-03-10

AI Technical Summary

Technical Problem

Existing mask inspection fixtures cannot adjust the horizontal angle of the mask, resulting in the mask not being perpendicular to the inspection equipment, which affects the inspection accuracy and the consistency of the results.

Method used

A fixture was designed that includes a fixed base, an adjusting base, a clamping mechanism, and a horizontal adjustment mechanism. The horizontal angle of the adjusting base is adjusted by the horizontal adjustment mechanism, and the vertical fixation of the mask is achieved by combining the lifting mechanism and the clamping drive mechanism.

Benefits of technology

It improves the accuracy and consistency of mask detection results, avoids mask skew and damage, and adapts to the clamping requirements of masks of various specifications.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN223917724U_ABST
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Patent Text Reader

Abstract

The utility model discloses a fixture for mask detection. The fixture comprises a fixed seat, an adjusting seat, a clamping mechanism and a horizontal adjusting mechanism, wherein the clamping mechanism is connected to the adjusting seat, the clamping mechanism is used for clamping and fixing a mask, the adjusting seat is connected to the horizontal adjusting mechanism, the horizontal adjusting mechanism is connected to the fixing seat, and the fixing seat is used for fixing the mask. And the horizontal adjusting mechanism is used for adjusting the horizontal angle of the adjusting seat so as to adjust the horizontal angle of the mask clamped on the clamping mechanism. According to the utility model, the horizontal angle of the mask can be adjusted so as to adjust the mask to be vertical to the detection equipment, thereby being beneficial to ensuring the consistency of the mask detection precision and the detection result.
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Description

TECHNICAL FIELD

[0001] The utility model relates to a mask detection clamp. BACKGROUND

[0002] At present, the mask needs to be clamped and fixed by using a clamp in the process of mask detection, for example, a general mask clamp is disclosed in Chinese patent with publication number CN112213928A. In order to improve the detection accuracy and ensure the consistency of the detection results during mask detection, the horizontal angle of the mask in the clamp often needs to be adjusted to make the mask perpendicular to the detection equipment. However, some existing clamps cannot adjust the horizontal angle of the mask, so the mask cannot be adjusted to be perpendicular to the detection equipment, which will affect the detection accuracy and the consistency of the detection results. SUMMARY

[0003] The technical problem to be solved by the utility model is to overcome the defects of the prior art and provide a mask detection clamp which can adjust the horizontal angle of the mask to make the mask perpendicular to the detection equipment, thereby facilitating the guarantee of the detection accuracy and the consistency of the detection results.

[0004] In order to solve the above technical problem, the technical scheme of the utility model is as follows: a mask detection clamp, comprising a fixed seat, an adjusting seat, a clamping mechanism and a horizontal adjusting mechanism.

[0005] The clamping mechanism is connected to the adjusting seat, and the clamping mechanism is used to clamp and fix the mask.

[0006] The adjusting seat is connected to the horizontal adjusting mechanism.

[0007] The horizontal adjusting mechanism is connected to the fixed seat, and the horizontal adjusting mechanism is used to adjust the horizontal angle of the adjusting seat and further adjust the horizontal angle of the mask clamped on the clamping mechanism.

[0008] Further, a specific structure of the horizontal adjusting mechanism is provided, which comprises three jacking mechanisms, the jacking mechanism is connected to the fixed seat and connected to the adjusting seat and used to drive the corresponding parts on the adjusting seat to rise and fall up and down so as to adjust the horizontal angle of the adjusting seat.

[0009] Further, a specific structure of the jacking mechanism is provided, which comprises a base, a jacking seat, a lifting slide, a top rod and a lifting driving mechanism.

[0010] The base is connected to the fixed seat.

[0011] The jacking seat is connected to the adjusting seat.

[0012] The lifting slide is connected to the base in a sliding manner along the vertical direction;

[0013] The top rod is connected to the lifting slide, and the upper end of the top rod abuts against the jacking base upwardly;

[0014] The lifting driving mechanism is connected to the lifting slide and is used to drive the lifting slide to move up and down, so as to drive the jacking base to move up and down through the top rod, and then drive the corresponding part on the adjusting base to move up and down, so as to adjust the horizontal angle of the adjusting base.

[0015] Further, a specific structure of the lifting driving mechanism is provided, which comprises a wedge-shaped slider, a transmission screw rod, a transmission nut and a lifting motor;

[0016] The wedge-shaped slider is connected to the base in a sliding manner, and the wedge-shaped slider is provided with a driving slope, and the lifting slide is provided with a matching slope which matches and abuts against the driving slope;

[0017] The transmission nut is connected to the wedge-shaped slider, and the transmission screw rod is connected to the transmission nut in a matching manner;

[0018] The lifting motor is connected to the transmission screw rod and is used to drive the transmission screw rod to rotate.

[0019] Further, a specific structure of the jacking base is provided, which comprises an upper connecting part, a lower connecting part and a vertical connecting part;

[0020] The upper connecting part is connected to the adjusting base;

[0021] The upper end of the vertical connecting part is connected to the upper connecting part;

[0022] The lower connecting part is connected to the lower end of the vertical connecting part and is located below the upper connecting part;

[0023] The upper connecting part is provided with an abutting recess with an opening downwardly;

[0024] The lower connecting part is provided with a through hole;

[0025] The upper end of the top rod is provided with a ball head, the top rod passes through the through hole, and the ball head abuts against the abutting recess upwardly;

[0026] A spring is sleeved on the top rod, the upper end of the spring abuts against the ball head, and the lower end of the spring abuts against the lower connecting part.

[0027] Further, a specific structure of the clamping mechanism is provided, which comprises a fixed support, a movable support and a clamping driving mechanism;

[0028] The fixed support is connected to the adjusting seat and used to hold one end of the mask and abut against one side wall of the mask;

[0029] The movable support is slidingly connected to the adjusting seat and used to hold the other end of the mask and abut against the other side wall of the mask;

[0030] The clamping driving mechanism is connected to the adjusting seat, and the clamping driving mechanism is connected to the movable support and used to drive the movable support to move towards the fixed support to clamp the mask.

[0031] Further provided is a specific structure of the clamping driving mechanism, which comprises a power assembly and at least one transmission assembly;

[0032] The transmission assembly comprises a driving wheel, a driven wheel, a transmission belt, a connecting block and a wheel seat assembly;

[0033] The driving wheel is rotationally connected to the adjusting seat;

[0034] The wheel seat assembly is connected to the adjusting seat, and the driven wheel is rotationally connected to the wheel seat assembly;

[0035] The connecting block is connected to the adjusting seat;

[0036] The transmission belt is connected to the driving wheel and the driven wheel and connected to the connecting block;

[0037] The power assembly is connected to the adjusting seat and connected to the driving wheel, and the power assembly is used to drive the driving wheel to rotate, thereby driving the transmission belt to move and driving the movable support to move towards or away from the fixed support through the connecting block.

[0038] Further provided is a specific structure of the wheel seat assembly, which comprises a tensioning seat body, a tensioning bolt and a fixed base block;

[0039] A limiting plane is arranged on the adjusting seat, and a lower end surface of the tensioning seat body abuts against the limiting plane;

[0040] The driven wheel is rotationally connected to the tensioning seat body;

[0041] The fixed base block is connected to the adjusting seat, and the fixed base block is provided with a bolt hole;

[0042] The tensioning bolt is threadedly connected to the tensioning seat body after passing through the bolt hole, and the tensioning bolt is used to drive the tensioning seat body to move, thereby driving the driven wheel to move to tension the transmission belt.

[0043] Further, the transmission assembly is provided with two, one of which is connected with one end of the movable support, and the other of which is connected with the other end of the movable support;

[0044] The power assembly comprises a clamping motor, a first rotating shaft and a second rotating shaft;

[0045] The first rotating shaft is connected with the driving wheel in one of the transmission assemblies;

[0046] The second rotating shaft is connected with the driving wheel in the other of the transmission assemblies;

[0047] The clamping motor is connected with the adjusting seat and connected with the first rotating shaft and the second rotating shaft respectively and used for driving the first rotating shaft and the second rotating shaft to rotate respectively.

[0048] Further, the mask is of a square structure;

[0049] The fixed support is provided with a first fixed side wall part and two first fixed material supporting parts, the movable support is provided with a first movable side wall part and two first movable material supporting parts, the two first fixed material supporting parts are used for supporting two corners of the mask of the first size, the two first movable material supporting parts are used for supporting the other two corners of the mask of the first size, and the first fixed side wall part is used for abutting against one side wall of the mask of the first size, and the first movable side wall part is used for abutting against the other side wall of the mask of the first size;

[0050] The fixed support is provided with a second fixed side wall part and two second fixed material supporting parts, the movable support is provided with a second movable side wall part and two second movable material supporting parts, the two second fixed material supporting parts are used for supporting two corners of the mask of the second size, the two second movable material supporting parts are used for supporting the other two corners of the mask of the second size, the second fixed side wall part is used for abutting against one side wall of the mask of the second size, and the second movable side wall part is used for abutting against the other side wall of the mask of the second size;

[0051] The fixed support is provided with a third fixed side wall part and two third fixed material supporting parts, the movable support is provided with a third movable side wall part and two third movable material supporting parts, the two third fixed material supporting parts are used for supporting two corners of the mask of the third size, the two third movable material supporting parts are used for supporting the other two corners of the mask of the third size, the third fixed side wall part is used for abutting against one side wall of the mask of the third size, and the third movable side wall part is used for abutting against the other side wall of the mask of the third size.

[0052] After the technical scheme is applied, firstly, the mask to be detected is clamped and fixed on the clamping mechanism, then the horizontal angle of the adjusting seat is adjusted through the horizontal adjusting mechanism, and the horizontal angle of the mask clamped on the clamping mechanism can be adjusted so as to adjust the mask to be perpendicular to the detection equipment, thereby facilitating to ensure the precision of mask detection and consistency of detection results. BRIEF DESCRIPTION OF DRAWINGS

[0053] Figure 1 It is a structural schematic view of the mask detection clamp of the utility model;

[0054] Figure 2 It is a structural schematic view of the jacking mechanism of the utility model Figure 1 ;

[0055] Figure 3 It is a structural schematic view of the jacking mechanism of the utility model Figure 2 ;

[0056] Figure 4 It is a structural schematic view of the adjusting seat and the clamping mechanism of the utility model Figure 1 ;

[0057] Figure 2 It is a structural schematic view of the adjusting seat and the clamping mechanism of the utility model Figure 6 ;

[0058] Figure 7 It is a structural schematic view of the power assembly of the utility model;

[0059] Figure 1 It is a structural schematic view of the wheel seat assembly of the utility model;

[0060] In the diagram: 1. Fixed seat; 2. Adjustable seat; 3. Mask; 4. Base; 5. Lifting seat; 6. Lifting slide; 7. Push rod; 8. Linear bearing; 9. Wedge slider; 10. Transmission screw; 11. Lifting motor; 12. Upper connecting part; 13. Lower connecting part; 14. Vertical connecting part; 15. Abutment groove; 16. Through hole; 17. Ball head; 18. Spring; 19. First sensor; 20. Second sensor; 21. First sensing plate; 22. Second sensing plate; 23. Fixed support; 24. Movable support; 25. Driving wheel; 26. Driven wheel; 27. Transmission belt; 28. Connecting block; 29. ​​Wheel seat assembly; 30. Tensioning seat; 31. Tensioning bolt; 32. Fixed base block; 33. Limiting plane; 34. Clamping motor; 35. First rotating shaft; 36. Second rotating shaft; 37. Third sensor; 38. Third sensing plate; 39. Cover; 40. First fixed side wall; 41. First fixed material support; 42. First movable side wall; 43. First movable material support; 44. Second fixed side wall; 45. Second fixed material support; 46. Second movable side wall; 47. Second movable material support; 48. Third fixed side wall; 49. Third fixed material support; 50. Third movable side wall; 51. Third movable material support; 100. Clamping mechanism; 200. Lifting mechanism; 300. Power assembly; 400. Transmission assembly. Detailed Implementation

[0061] To make the contents of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0062] like Figures 1-3 As shown, a mask inspection fixture includes a fixed base 1, an adjusting base 2, a clamping mechanism 100, and a horizontal adjustment mechanism;

[0063] The clamping mechanism 100 is connected to the adjusting seat 2, and the clamping mechanism 100 is used to clamp and fix the mask 3.

[0064] The adjusting seat 2 is connected to the horizontal adjusting mechanism;

[0065] The horizontal adjustment mechanism is connected to the fixed base 1. This mechanism adjusts the horizontal angle of the adjusting base 2, thereby adjusting the horizontal angle of the mask 3 clamped on the clamping mechanism 100. Specifically, the mask 3 to be tested is first clamped and fixed on the clamping mechanism 100. Then, the horizontal angle of the adjusting base 2 is adjusted by the horizontal adjustment mechanism, simultaneously adjusting the horizontal angle of the mask 3 clamped on the clamping mechanism 100 to ensure the mask 3 is perpendicular to the testing equipment. This helps to ensure the accuracy of the mask 3 testing and the consistency of the testing results.

[0066] likeFigures 1-3 As shown, the horizontal adjustment mechanism may include three lifting mechanisms 200. Each lifting mechanism 200 is connected to the fixed base 1 and the adjusting base 2, and is used to drive corresponding parts on the adjusting base 2 to move up and down to adjust the horizontal angle of the adjusting base 2. Specifically, the three lifting mechanisms 200 can drive three parts on the adjusting base 2 to move up and down respectively. By controlling the height of the three parts on the adjusting base 2, the horizontal angle of the adjusting base 2 can be adjusted, thereby adjusting the horizontal angle of the mask 3 clamped on the clamping mechanism 100, so that the mask 3 meets the horizontal angle requirements of the detection equipment, making the mask 3 perpendicular to the detection equipment. The three lifting mechanisms 200 must not be arranged in a straight line.

[0067] like Figure 2 As shown, the lifting mechanism 200 may include a base 4, a lifting seat 5, a lifting slide 6, a top rod 7, and a lifting drive mechanism;

[0068] The base 4 is connected to the fixed base 1;

[0069] The lifting seat 5 is connected to the adjusting seat 2;

[0070] The lifting slide 6 is slidably connected to the base 4 in the vertical direction;

[0071] The top rod 7 is connected to the lifting slide 6, and the upper end of the top rod 7 abuts against the lifting seat 5 upward;

[0072] The lifting drive mechanism is connected to the lifting slide 6 and drives the lifting slide 6 to move up and down. This, in turn, drives the lifting seat 5 to move up and down via the top rod 7, thereby causing the corresponding part on the adjusting seat 2 to move up and down to adjust the horizontal angle of the adjusting seat 2. Specifically, when the lifting drive mechanism drives the lifting slide 6 to rise, it drives the top rod 7 to rise, which in turn lifts the lifting seat 5, causing the corresponding part on the adjusting seat 2 to rise. When the lifting drive mechanism drives the lifting slide 6 to fall, it drives the top rod 7 to fall, which in turn lowers the lifting seat 5, causing the corresponding part on the adjusting seat 2 to fall. In this embodiment, the lifting slide 6 is slidably connected to the base 4 in the vertical direction via a linear bearing 8.

[0073] like Figure 2 , 3 As shown, the lifting drive mechanism may include a wedge-shaped slider 9, a transmission screw 10, a transmission nut, and a lifting motor 11;

[0074] The wedge-shaped slider 9 is slidably connected to the base 4. The wedge-shaped slider 9 is provided with a driving inclined surface, and the lifting slide 6 is provided with a mating inclined surface that abuts against the driving inclined surface.

[0075] The transmission nut is connected to the wedge-shaped slider 9, and the transmission screw 10 is connected to the transmission nut.

[0076] The lifting motor 11 is connected to the transmission screw 10 and drives the transmission screw 10 to rotate. The transmission screw 10, in conjunction with the transmission nut, drives the wedge-shaped slider 9 to slide, thereby causing the lifting slide block 6 to move up and down through the cooperation of the driving inclined surface and the mating inclined surface. Specifically, the lifting motor 11 can be connected to the base 4 or to the fixed base 1.

[0077] like Figure 1 , 3 As shown, the lifting seat 5 may include an upper connecting part 12, a lower connecting part 13 and a vertical connecting part 14;

[0078] The upper connecting part 12 is connected to the adjusting seat 2;

[0079] The upper end of the vertical connecting part 14 is connected to the upper connecting part 12;

[0080] The lower connecting part 13 is connected to the lower end of the vertical connecting part 14 and is located below the upper connecting part 12;

[0081] The upper connecting part 12 is provided with a downward-facing abutting groove 15;

[0082] The lower connecting part 13 is provided with a through hole 16;

[0083] The upper end of the push rod 7 is provided with a ball head 17, the push rod 7 passes through the through hole 16 and the ball head 17 abuts upward in the abutment groove 15;

[0084] A spring 18 is sleeved on the push rod 7. The upper end of the spring 18 abuts against the ball head 17, and the lower end of the spring 18 abuts against the lower connecting part 13. Specifically, the abutting groove 15 is a V-shaped groove with the opening facing downward. The push rod 7 passes through the through hole 16 to prevent the push rod 7 from slipping off the lifting seat 5. On the one hand, under the action of gravity, the abutting groove 15 in the lifting seat 5 will always remain abutting against the ball head 17 on the push rod 7. On the other hand, the elasticity of the spring 18 can also ensure that the ball head 17 and the abutting groove 15 remain in contact.

[0085] Specifically, the mask detection fixture also includes a controller, and the lifting mechanism 200 also includes a first sensor 19, a second sensor 20, a first sensing plate 21, and a second sensing plate 22;

[0086] The first sensor 21 and the second sensor 22 are respectively connected to the lifting slide 6;

[0087] The first sensor 19 and the second sensor 20 are respectively connected to the base 4 and respectively connected to the controller. The first sensor 19 is used to detect the first sensing element 21 when the lifting slide 6 slides upward to the limit position and send a first signal to the controller. The second sensor 20 is used to detect the second sensing element 22 when the lifting slide 6 slides downward to the limit position and send a second signal to the controller. When the controller receives the first signal or the second signal, it controls the lifting motor 11 to stop operating.

[0088] like Figure 1 , 4 As shown in Figures 5 and 6, the clamping mechanism 100 may include a fixed support member 23, a movable support member 24, and a clamping drive mechanism.

[0089] The fixed support 23 is connected to the adjusting seat 2 and is used to support one end of the mask 3 and to abut against one side wall of the mask 3;

[0090] The movable support 24 is slidably connected to the adjusting seat 2 and is used to support the other end of the mask 3 and abut against the other side wall of the mask 3;

[0091] The clamping drive mechanism is connected to the adjusting seat 2 and is connected to the movable support 24, which is used to drive the movable support 24 toward the fixed support 23 to clamp the mask 3. Specifically, firstly, the movable support 24 is driven to move to a suitable position according to the size of the mask 3 to be clamped. Then, the mask 3 is placed on the fixed support 23 and the movable support 24, so that the fixed support 23 supports one end of the mask 3 and abuts against one side wall of the mask 3, and the movable support 24 supports the other end of the mask 3 and abuts against the other side wall of the mask 3. Then, the clamping drive mechanism drives the movable support 24 toward the fixed support 23 to clamp the mask 3, thereby completing the clamping of the mask 3. More specifically, after the detection is completed, the clamping drive mechanism drives the movable support 24 to move away from the fixed support 23 to release the mask 3.

[0092] like Figure 1 , 4As shown in ~7, the clamping drive mechanism may include a power component 300 and at least one transmission component 400;

[0093] The transmission assembly 400 includes a driving wheel 25, a driven wheel 26, a transmission belt 27, a connecting block 28, and a wheel seat assembly 29;

[0094] The drive wheel 25 is rotatably connected to the adjusting seat 2;

[0095] The wheel seat assembly 29 is connected to the adjusting seat 2, and the driven wheel 26 is rotatably connected to the wheel seat assembly 29;

[0096] The connecting block 28 is connected to the adjusting seat 2;

[0097] The transmission belt 27 is connected to the driving pulley 25 and the driven pulley 26 and is connected to the connecting block 28;

[0098] The power assembly 300 is connected to the adjusting seat 2 and to the driving wheel 25. The power assembly 300 is used to drive the driving wheel 25 to rotate, thereby driving the transmission belt 27 to move, and then driving the movable support 24 to move towards or away from the fixed support 23 through the connecting block 28. In this embodiment, the driving wheel 25 and the driven wheel 26 are both synchronous pulleys, and the transmission belt 27 is a synchronous belt. The synchronous belt transmission can play a clamping and buffering effect, which can more effectively protect the mask 3 from being pinched.

[0099] like Figure 1 , 4 As shown in Figures 5 and 7, the wheel seat assembly 29 may include a tension seat body 30, a tension bolt 31, and a fixing base block 32;

[0100] The adjusting seat 2 is provided with a limiting plane 33, and the lower end face of the tensioning seat 30 abuts against the limiting plane 33;

[0101] The driven wheel 26 is rotatably connected to the tensioning seat 30;

[0102] The fixed base block 32 is connected to the adjusting seat 2, and the fixed base block 32 is provided with bolt holes;

[0103] The tensioning bolt 31 passes through the bolt hole and is threadedly connected to the tensioning seat 30. The tensioning bolt 31 is used to drive the tensioning seat 30 to move, thereby driving the driven wheel 26 to move to tension the transmission belt 27.

[0104] like Figure 1 , 4As shown in Figures 5 and 6, the transmission assembly 400 may be provided in two parts, in which the connecting block 28 of one transmission assembly 400 is connected to one end of the movable support member 24, and the connecting block 28 of the other transmission assembly 400 is connected to the other end of the movable support member 24.

[0105] The power assembly 300 includes a clamping motor 34, a first rotating shaft 35, and a second rotating shaft 36.

[0106] The first rotating shaft 35 is connected to the drive wheel 25 in one of the transmission components 400;

[0107] The second rotating shaft 36 is connected to the drive wheel 25 in another of the transmission components 400;

[0108] The clamping motor 34 is connected to the adjusting seat 2 and is connected to the first rotating shaft 35 and the second rotating shaft 36 respectively, and is used to drive the first rotating shaft 35 and the second rotating shaft 36 to rotate respectively, thereby driving the drive wheels 25 in the two transmission components 400 to rotate respectively.

[0109] In this embodiment, a third sensor 37 is connected to the adjusting seat 2, and a third sensing plate 38 is connected to the movable support 24. The third sensor 37 is connected to the controller. The third sensor 37 is used to detect the third sensing plate 38 and send a third signal to the controller when the movable support 24 moves toward the fixed support 23 to its limit position. When the controller receives the third signal, it controls the clamping motor 34 to stop operating.

[0110] The adjusting seat 2 is also connected to a cover 39 that corresponds to and covers the corresponding transmission component 400. The clamping motor 34 and the first rotating shaft 35, as well as the clamping motor 34 and the second rotating shaft 36, are connected by couplings. The clamping motor 34 can be a dual-axis stepper motor. The movable support 24 is slidably connected to the adjusting seat 2 by a linear guide rail.

[0111] like ​ , 4 As shown in Figures 5 and 6, the mask 3 can be a square structure;

[0112] The fixed support member 23 is provided with a first fixed side wall portion 40 and two first fixed material support portions 41, and the movable support member 24 is provided with a first movable side wall portion 42 and two first movable material support portions 43. The two first fixed material support portions 41 are used to support two corners of the first size mask 3, and the two first movable material support portions 43 are used to support the other two corners of the first size mask 3. The first fixed side wall portion 40 is used to abut against one side wall of the first size mask 3, and the first movable side wall portion 42 is used to abut against the other side wall of the first size mask 3.

[0113] The fixed support member 23 is provided with a second fixed side wall portion 44 and two second fixed material support portions 45. The movable support member 24 is provided with a second movable side wall portion 46 and two second movable material support portions 47. The two second fixed material support portions 45 are used to support two corners of the second-sized mask 3, and the two second movable material support portions 47 are used to support the other two corners of the second-sized mask 3. The second fixed side wall portion 44 is used to abut against one side wall of the second-sized mask 3, and the second movable side wall portion 46 is used to abut against the other side wall of the second-sized mask 3.

[0114] The fixed support member 23 is provided with a third fixed side wall portion 48 and two third fixed material support portions 49. The movable support member 24 is provided with a third movable side wall portion 50 and two third movable material support portions 51. The two third fixed material support portions 49 are used to support two corners of the third-sized mask 3, and the two third movable material support portions 51 are used to support the other two corners of the third-sized mask 3. The third fixed side wall portion 48 is used to abut against one side wall of the third-sized mask 3, and the third movable side wall portion 50 is used to abut against the other side wall of the third-sized mask 3.

[0115] Specifically, the first-sized mask 3 can be 5 inches in size, the second-sized mask 3 can be 6 inches in size, and the third-sized mask 3 can be 7 inches in size. Taking the first-sized mask 3 as an example, the four corners of the first-sized mask 3 are supported by two first fixed support parts 41 and two first movable support parts 43, respectively. By supporting the four corners of the mask 3, the contact area with the mask 3 can be reduced, thus reducing the risk of the mask 3 being contaminated or scratched. When the movable support 24 is driven to move towards the fixed support 23, the first fixed sidewall part 40 and the first movable sidewall part 42 can clamp the mask 3. In this embodiment, three sizes of masks 3 can be clamped and fixed, avoiding frequent changes of fixtures, thereby saving time on fixture changes and improving the efficiency of mask 3 inspection.

[0116] In summary, the mask 3 to be tested is first clamped and fixed on the clamping mechanism 100. Then, the horizontal angle of the adjusting seat 2 is adjusted by the horizontal adjustment mechanism. At the same time, the horizontal angle of the mask 3 clamped on the clamping mechanism 100 can be adjusted so that the mask 3 is perpendicular to the testing equipment, which helps to ensure the accuracy of the mask 3 testing and the consistency of the testing results.

[0117] The specific embodiments described above further illustrate the technical problems, technical solutions, and beneficial effects of this utility model. It should be understood that the above descriptions are merely specific embodiments of this utility model and are not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A fixture for mask inspection, characterized in that, It includes a fixed base (1), an adjusting base (2), a clamping mechanism (100), and a horizontal adjusting mechanism; The clamping mechanism (100) is connected to the adjusting seat (2) and is used to clamp and fix the mask (3). The adjusting seat (2) is connected to the horizontal adjusting mechanism; The horizontal adjustment mechanism is connected to the fixed base (1) and is used to adjust the horizontal angle of the adjustment base (2) and thus adjust the horizontal angle of the mask (3) clamped on the clamping mechanism (100).

2. The mask inspection fixture according to claim 1, characterized in that, The horizontal adjustment mechanism includes three lifting mechanisms (200), which are connected to the fixed base (1) and the adjusting base (2) and are used to drive the corresponding parts on the adjusting base (2) to move up and down to adjust the horizontal angle of the adjusting base (2).

3. The fixture for mask inspection according to claim 2, characterized in that, The lifting mechanism (200) includes a base (4), a lifting seat (5), a lifting slide (6), a top rod (7), and a lifting drive mechanism; The base (4) is connected to the fixed base (1); The lifting seat (5) is connected to the adjusting seat (2); The lifting slide (6) is slidably connected to the base (4) in the vertical direction; The top rod (7) is connected to the lifting slide (6), and the upper end of the top rod (7) abuts against the lifting seat (5) upward. The lifting drive mechanism is connected to the lifting slide (6) and is used to drive the lifting slide (6) to move up and down. Then, through the top rod (7), the lifting seat (5) is driven up and down, which in turn drives the corresponding part on the adjusting seat (2) to move up and down so as to adjust the horizontal angle of the adjusting seat (2).

4. The mask inspection fixture according to claim 3, characterized in that, The lifting drive mechanism includes a wedge-shaped slider (9), a transmission screw (10), a transmission nut, and a lifting motor (11). The wedge-shaped slider (9) is slidably connected to the base (4). The wedge-shaped slider (9) is provided with a driving inclined surface, and the lifting slide (6) is provided with a mating inclined surface that abuts against the driving inclined surface. The transmission nut is connected to the wedge-shaped slider (9), and the transmission screw (10) is connected to the transmission nut. The lifting motor (11) is connected to the transmission screw (10) and is used to drive the transmission screw (10) to rotate.

5. The mask inspection fixture according to claim 3, characterized in that, The lifting seat (5) includes an upper connecting part (12), a lower connecting part (13) and a vertical connecting part (14). The upper connecting part (12) is connected to the adjusting seat (2); The upper end of the vertical connecting part (14) is connected to the upper connecting part (12); The lower connecting part (13) is connected to the lower end of the vertical connecting part (14) and is located below the upper connecting part (12); The upper connecting part (12) is provided with a downward-facing abutting groove (15). The lower connecting part (13) is provided with a through hole (16); The upper end of the push rod (7) is provided with a ball head (17), the push rod (7) passes through the through hole (16) and the ball head (17) abuts upward in the abutment groove (15); A spring (18) is sleeved on the top rod (7). The upper end of the spring (18) abuts against the ball head (17), and the lower end of the spring (18) abuts against the lower connecting part (13).

6. The mask inspection fixture according to claim 1, characterized in that, The clamping mechanism (100) includes a fixed support (23), a movable support (24), and a clamping drive mechanism; The fixed support (23) is connected to the adjusting seat (2) and is used to support one end of the mask (3) and to abut against one side wall of the mask (3); The movable support (24) is slidably connected to the adjusting seat (2) and is used to support the other end of the mask (3) and abut against the other side wall of the mask (3); The clamping drive mechanism is connected to the adjusting seat (2), and the clamping drive mechanism is connected to the movable support (24) and is used to drive the movable support (24) to move toward the fixed support (23) to clamp the mask (3).

7. The mask inspection fixture according to claim 6, characterized in that, The clamping drive mechanism includes a power component (300) and at least one transmission component (400). The transmission assembly (400) includes a drive wheel (25), a driven wheel (26), a transmission belt (27), a connecting block (28), and a wheel seat assembly (29). The drive wheel (25) is rotatably connected to the adjusting seat (2); The wheel seat assembly (29) is connected to the adjusting seat (2), and the driven wheel (26) is rotatably connected to the wheel seat assembly (29); The connecting block (28) is connected to the adjusting seat (2); The drive belt (27) is connected to the driving pulley (25) and the driven pulley (26) and is connected to the connecting block (28); The power assembly (300) is connected to the adjusting seat (2) and connected to the drive wheel (25). The power assembly (300) is used to drive the drive wheel (25) to rotate, thereby driving the transmission belt (27) to move, and then driving the movable support (24) to move toward or away from the fixed support (23) through the connecting block (28).

8. The mask inspection fixture according to claim 7, characterized in that, The wheel seat assembly (29) includes a tension seat body (30), a tension bolt (31), and a fixing base block (32); The adjusting seat (2) is provided with a limiting plane (33), and the lower end face of the tensioning seat (30) abuts against the limiting plane (33); The driven wheel (26) is rotatably connected to the tensioning seat (30); The fixed base block (32) is connected to the adjusting seat (2), and the fixed base block (32) is provided with bolt holes; The tensioning bolt (31) passes through the bolt hole and is threadedly connected to the tensioning seat (30). The tensioning bolt (31) is used to drive the tensioning seat (30) to move, thereby driving the driven wheel (26) to move to tension the transmission belt (27).

9. The mask inspection fixture according to claim 7, characterized in that, The transmission assembly (400) is provided in two parts, wherein the connecting block (28) in one transmission assembly (400) is connected to one end of the movable support (24), and the connecting block (28) in the other transmission assembly (400) is connected to the other end of the movable support (24); The power assembly (300) includes a clamping motor (34), a first rotating shaft (35), and a second rotating shaft (36); The first rotating shaft (35) is connected to the drive wheel (25) in one of the transmission components (400); The second shaft (36) is connected to the drive wheel (25) in another of the transmission components (400); The clamping motor (34) is connected to the adjusting seat (2) and is connected to the first rotating shaft (35) and the second rotating shaft (36) respectively, and is used to drive the first rotating shaft (35) and the second rotating shaft (36) to rotate respectively.

10. The mask inspection fixture according to claim 6, characterized in that, The mask (3) has a square structure; The fixed support member (23) is provided with a first fixed side wall part (40) and two first fixed material support parts (41), and the movable support member (24) is provided with a first movable side wall part (42) and two first movable material support parts (43). The two first fixed material support parts (41) are used to support two corners of the first size mask (3), and the two first movable material support parts (43) are used to support the other two corners of the first size mask (3). The first fixed side wall part (40) is used to abut against one side wall of the first size mask (3), and the first movable side wall part (42) is used to abut against the other side wall of the first size mask (3). The fixed support member (23) is provided with a second fixed side wall portion (44) and two second fixed material support portions (45), and the movable support member (24) is provided with a second movable side wall portion (46) and two second movable material support portions (47). The two second fixed material support portions (45) are used to support two corners of the second-sized mask (3), and the two second movable material support portions (47) are used to support the other two corners of the second-sized mask (3). The second fixed side wall portion (44) is used to abut against one side wall of the second-sized mask (3), and the second movable side wall portion (46) is used to abut against the other side wall of the second-sized mask (3). The fixed support (23) is provided with a third fixed sidewall (48) and two third fixed material support parts (49), and the movable support (24) is provided with a third movable sidewall (50) and two third movable material support parts (51). The two third fixed material support parts (49) are used to support two corners of the third-sized mask (3), and the two third movable material support parts (51) are used to support the other two corners of the third-sized mask (3). The third fixed sidewall (48) is used to abut against one side wall of the third-sized mask (3), and the third movable sidewall (50) is used to abut against the other side wall of the third-sized mask (3).

Citation Information

Patent Citations

  • Universal mask clamp

    CN112213928A