Magnetic imaging device and sample stage therefor

Abstract

The utility model discloses a magnetic imaging device and a sample stage used for the same, and the sample stage comprises a sample support used for placing a sample to be tested; a displacement table; the mounting base is arranged on the side, facing the sample support, of the displacement table, the mounting base is provided with a rotating shaft and a turning plate capable of turning around the rotating shaft, and the turning plate is used for pressing and fixing the sample support. According to the utility model, the turning plate pressing structure is arranged above the displacement table, so that the sample support can be flexibly disassembled, and the locking between the sample support and the mounting seat belongs to internal force and cannot be transmitted to the displacement table to damage the displacement table, thereby being beneficial to reducing the loading stress of the displacement table and preventing the displacement table from bearing excessive pressure.

Description

Technical Field

[0001] This utility model relates to the field of magnetic imaging technology, and in particular to a magnetic imaging device and a sample stage therefor. Background Technology

[0002] Quantum scanning magnetic imaging technology is a high-precision magnetic imaging technology based on the principles of quantum mechanics. It is mainly used to detect and map the distribution of magnetic fields at the microscopic or macroscopic scale. It combines quantum sensing technology and advanced scanning methods, and can measure magnetic fields with extremely high sensitivity and resolution. It is widely used in materials science, biomedicine, geological exploration and other fields.

[0003] In existing quantum scanning magnetic imaging devices, a high-precision piezoelectric displacement stage is typically incorporated into the magnetic imaging microscope probe. A sample plate is mounted on this stage, and high spatial resolution scanning of the sample is achieved by controlling the stage's movement. Due to the limited vertical space within the microscope probe, the sample plate is usually pushed into a slot on the stage using a sliding method. Once the sample plate is in place, a spring within the slot contacts the electrodes on the sample plate. However, the significant resistance of the spring generates considerable stress on the displacement stage when pushing the sample plate into the slot. Frequent pressing of the stage during sample loading can damage the sample material or reduce displacement control accuracy, making the design of the sample plate mounting structure difficult. Utility Model Content

[0004] This invention provides a magnetic imaging device and a sample stage therefor, to solve the problems of limited space in the existing magnetic imaging microscope probe structure, which causes large stress on the displacement stage during sample loading, easily leading to damage to the sample material or a decrease in displacement control accuracy.

[0005] According to one aspect of the present invention, a sample stage for a magnetic imaging device is provided, comprising: a sample holder for placing a sample to be tested; a displacement stage; and a mounting base disposed on the side of the displacement stage facing the sample holder. The mounting base is provided with a rotating shaft and a flip plate capable of rotating around the rotating shaft, the flip plate being used to press and fix the sample holder.

[0006] Optionally, the sample holder is provided with multiple conductive electrodes, which are used to apply electrical transport measurement conditions to the sample to be tested placed on the sample holder in order to obtain the electrical transport measurement signal of the sample to be tested.

[0007] Optionally, the bottom surface of the sample holder is provided with a plurality of first conductive electrodes, and the top surface of the mounting base is provided with a plurality of second conductive electrodes, wherein the first conductive electrodes and the second conductive electrodes are in one-to-one electrical contact; the top surface of the sample holder is provided with a sample area for placing the sample to be tested; a wiring area is provided around the sample area, the wiring area is connected to the first conductive electrodes through wire holes, the wiring area is connected to the sample to be tested through a first metal wire, and the wiring area is also connected to the probe of the magnetic imaging device through a second metal wire.

[0008] Optionally, the wiring area is provided with at least one zero-potential wiring area and at least one non-zero-potential wiring area; the zero-potential wiring area is electrically connected to the sample area, and the zero-potential wiring area is electrically connected to the non-zero-potential wiring area via printed circuits.

[0009] Optionally, the sample area is a conductive coating.

[0010] Optionally, the mounting base is provided with a top plate on the side facing the sample holder, and the top surface of the top plate is provided with a plurality of second conductive electrodes, a limiting plate and a side baffle; the rotating shaft is provided on one end face of the top plate, and the end face is opposite to the end face where the limiting plate is located; the free end of the flip plate can be flipped around the rotating shaft to the top of the top plate.

[0011] Optionally, the flap and the top plate are fastened together using fasteners.

[0012] Optionally, the limiting plate is provided with a limiting groove; the sample holder is provided with a limiting plug; the limiting plug and the limiting groove are mutually engaged and inserted into each other.

[0013] Optionally, the sample holder is provided with a gripping part, and a first limiting slope is provided on the end face of the sample holder facing the extension direction of the gripping part; the flip plate is provided with a pressing slope, and the pressing slope is configured to cooperate with the first limiting slope.

[0014] According to another aspect of the present invention, a magnetic imaging device is provided, comprising: a quantum probe assembly, an optical assembly, and the sample stage described above; the quantum probe assembly is provided with a tuning fork and a piezoelectric crystal, the free end of the tuning fork is provided with an NV probe, and the tuning fork vibrates under the excitation of the piezoelectric crystal; the optical assembly is used to emit excitation light, focus the excitation light onto the NV probe, apply microwave radiation to the NV probe, and collect the fluorescence signal emitted by the NV probe.

[0015] The technical solution of this utility model embodiment includes a sample holder, a displacement stage, and a mounting base. The sample holder is used to place the sample to be tested. The mounting base is equipped with a rotating shaft and a flip plate that can rotate around the shaft. The flip plate is used to press and fix the sample holder. By setting a flip plate pressing structure above the displacement stage, the sample holder can be flexibly disassembled. Moreover, the locking between the sample holder and the mounting base is an internal force and will not be transmitted to the displacement stage to cause damage. This solves the problem that the existing magnetic imaging microscope probe structure has limited space, and the sample loading process will generate large stress on the displacement stage, which can easily cause damage to the sample material or reduce the displacement control accuracy. It helps to reduce the loading stress on the displacement stage and avoid excessive pressure on the displacement stage.

[0016] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A perspective view of a sample stage for a magnetic imaging device provided for an embodiment of this utility model;

[0019] Figure 2 A front view of a sample stage provided in an embodiment of this utility model;

[0020] Figure 3 A perspective view of another sample stage for a magnetic imaging device provided in an embodiment of this utility model;

[0021] Figure 4 A schematic diagram of the top surface structure of a sample holder provided in an embodiment of this utility model;

[0022] Figure 5 A schematic diagram of the bottom structure of a sample holder provided in an embodiment of this utility model;

[0023] Figure 6 A perspective view of a sample stage with the sample holder removed, provided for an embodiment of this utility model;

[0024] Figure 7 A rear view of a sample stage with the sample holder removed, provided for an embodiment of this utility model;

[0025] Figure 8 A right view of a sample stage with the sample holder removed, provided for an embodiment of this utility model;

[0026] Figure 9 This is a schematic diagram of the structure of a magnetic imaging device provided in an embodiment of the present invention;

[0027] Figure 10 A perspective view of another magnetic imaging device provided in an embodiment of this utility model;

[0028] Figure 11 for Figure 10 The front view of the magnetic imaging device shown. Detailed Implementation

[0029] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0030] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0031] Figure 1 A perspective view of a sample stage for a magnetic imaging device provided in an embodiment of this utility model. Figure 2 This is a front view of a sample stage provided in an embodiment of the present invention, which exemplarily illustrates a sample stage mounting structure suitable for applications where samples are loaded in a magnetic imaging microscope probe structure.

[0032] See Figure 1 and Figure 2As shown in this application, the sample stage 100 for the magnetic imaging device includes: a sample holder 110 for placing the sample to be tested; a displacement stage 120 that can deform under the action of an electric field to adjust the displacement of the sample to be tested and achieve high spatial resolution scanning; and a mounting base 130 disposed on the side of the displacement stage 120 facing the sample holder 110. The mounting base 130 is provided with a rotating shaft 131 and a flip plate 132 that can rotate around the rotating shaft 131. The flip plate 132 is used to press and fix the sample holder 110.

[0033] In this embodiment, the sample holder 110 is a detachable structure. When loading the sample to be tested, the sample holder 110 must first be removed from the probe structure 1, the sample to be tested loaded onto the sample holder 110, and then the sample holder 110 containing the sample to be tested is installed back into the probe structure 1. Since the sample often needs to be moved during measurement, and the vertical installation space of the probe structure 1 is small, if the sample holder is pushed into the slot of the displacement stage using a sliding method, it will generate horizontal stress on the displacement stage, easily causing damage due to stress. Therefore, this application solves the problem of the existing magnetic imaging microscope probe structure having limited space, generating significant stress on the displacement stage 120 during sample loading, easily causing damage to the sample material or reducing displacement control accuracy by setting a flap fixed at one end to the mounting base 130 to press the sample holder 110. This helps reduce the loading stress on the displacement stage 120 and avoids excessive pressure on the displacement stage 120.

[0034] Optionally, the sample holder 110 is provided with multiple conductive electrodes. These electrodes are used to apply electrical transport measurement conditions, such as bias voltage, to the sample to be tested placed on the sample holder 110, in order to obtain the electrical transport measurement signal of the sample to be tested and ensure good electrical contact during the installation of the sample holder 110. The electrical transport measurement conditions can be understood as the test conditions applied based on the physical and technical requirements that need to be met during the electrical transport measurement process. Typically, the electrical transport measurement conditions of this application include, but are not limited to, at least one of the following: measurement voltage, measurement current, sample temperature, electrode contact conditions, and sample test point. The electrical transport measurement signal can be understood as the parameters and data obtained after applying electrical transport measurement conditions to the sample to be tested. Typically, the electrical transport measurement signal of this application includes, but is not limited to, at least one of the following: conductivity, capacitance change between the probe and the sample, current path, sample surface charge and potential distribution, resistivity, conductivity, carrier concentration, and mobility.

[0035] Specifically, when applying the sample holder 110 to electrical transport measurements, the sample stage 100 and quantum probe assembly are used to apply a bias voltage to the tip of the quantum probe and scan the surface of the sample to be tested, thus mapping the spatial distribution of the surface conductivity of the sample at the nanoscale. The dielectric properties of the sample are analyzed by measuring the capacitance change between the quantum probe and the sample. The electrical properties of non-uniform materials are analyzed by detecting the current path on the sample surface. The surface potential and electric field strength are measured using the electric field interaction between the probe and the sample to analyze the charge distribution and electrical transport characteristics of the material surface. The potential distribution on the sample surface is measured to analyze the charge state and band structure of the material surface. By controlling the voltage between the probe and the sample, local charge injection and extraction can be achieved, analyzing the charge storage capacity and charge transport mechanism of the material. Temperature-dependent conductivity measurements are performed by controlling the sample temperature to analyze the electrical transport behavior of the material at different temperatures. Combined with a force sensor or quantum probe, the conductivity change of the sample can be measured under applied stress to analyze the electrical transport properties of piezoelectric materials and strain-sensitive materials.

[0036] Figure 3 A perspective view of another sample stage for a magnetic imaging device provided in an embodiment of this utility model; Figure 4 A schematic diagram of the top surface structure of a sample holder provided in an embodiment of this utility model;

[0037] Figure 5 This is a schematic diagram of the bottom structure of a sample holder provided in an embodiment of the present invention. Figure 4 and Figure 5 The illustrated embodiment demonstrates the structure of a sample holder.

[0038] See Figures 3 to 5 As shown, a plurality of first conductive electrodes 101 are disposed on the bottom surface of the sample holder 110. A sample area 110A is disposed on the top surface of the sample holder 110, which is used to place the sample to be tested. A wiring area 110B is disposed around the sample area 110A. The wiring area 110B is electrically connected to the first conductive electrodes 101 one-to-one through wire holes 110K. The wiring area 110B is connected to the sample to be tested via a first external wire (e.g., a metal wire, not shown in the figure). The wiring area 110B can also be connected to the NV probe 203 via a second external wire (e.g., a metal wire, not shown in the figure). Optionally, the first conductive electrodes 101 are provided with contact plates.

[0039] In some embodiments, sample area 110A may be configured with a conductive plating layer. It should be noted that the wiring area 110B must be configured with a conductive plating layer to achieve the electrical contact performance of the first conductive electrode 101; those skilled in the art can configure sample area 110A with a conductive or non-conductive plating layer according to actual testing requirements. By configuring sample area 110A with a conductive plating layer, the electrical contact performance of the sample is improved.

[0040] See Figure 4 As shown, the connection area 110B is provided with at least one zero-potential connection area 110B and at least one non-zero-potential connection area 110B; the zero-potential connection area 110B is electrically connected to the sample area 110A, and the zero-potential connection area 110B is electrically connected to the non-zero-potential connection area 110B via printed circuitry. In this embodiment, the potential applied to the non-zero-potential connection area 110B can be adjusted according to actual measurement requirements and is not specifically limited thereto. By setting up multi-electrode, multi-potential connection areas 110B, it is convenient to measure the electrical transport properties of different local micro-regions of the sample. By setting up zero-potential connection areas, it is convenient to directly connect to zero potential at specific locations of the sample using wires, avoiding zero-potential errors at different locations of the sample (especially for non-uniform materials).

[0041] See Figure 4 and Figure 5 As shown, the sample holder 110 is provided with a grip portion 110C (e.g., a handle), and a first limiting inclined surface S1 is provided on the end face of the sample holder 110 facing the grip portion 110C in the extension direction X1. The first limiting inclined surface S1 is provided on both sides of the grip portion 110C; the flip plate 132 is provided with a pressing inclined surface, and the pressing inclined surface cooperates with the first limiting inclined surface S1 to press.

[0042] Figure 6 A perspective view of a sample stage with the sample holder removed, provided for an embodiment of this utility model; Figure 7 A rear view of a sample stage with the sample holder removed, provided for an embodiment of this utility model; Figure 8 The image shows a sample stage with the sample holder removed, as provided in an embodiment of this utility model.

[0043] See Figure 6 As shown, a plurality of second conductive electrodes 133 are disposed on the top surface of the mounting base 130. After the sample holder 110 is loaded, the first conductive electrode 101 and the second conductive electrode 133 make electrical contact in a one-to-one correspondence. Optionally, the second conductive electrode 133 is designed as a spring-loaded ball. See [link to documentation]. Figure 6 and Figure 7 As shown, the multiple first conductive electrodes 101 and multiple second conductive electrodes 133 are arranged in the same array structure. When performing electrical transport measurement, a portion of the first conductive electrodes 101 and second conductive electrodes 133 in a specific area can be selected and voltage or current can be applied to realize the measurement of the electrical properties of the local area of ​​the material.

[0044] See Figures 6 to 8As shown, a top plate 134 is provided on the side of the mounting base 130 facing the sample holder 110. A limiting plate 135, a side baffle 136, and multiple second conductive electrodes 133 are provided on the top surface of the top plate 134. A rotating shaft 131 is located on one end face of the top plate 134, which is opposite to the end face of the limiting plate 135. The limiting plate 135 is provided with a limiting groove 135A, and the sample holder 110 is provided with a limiting insert 110D (see...). Figure 4 and Figure 5 The limiting block 110D and the limiting groove 135A are inserted into each other; the free end of the flip plate 132 can be flipped around the rotating shaft 131 to the top plate 134.

[0045] Optionally, the flap 132 and the top plate 134 are fastened together using fasteners. Typically, the fasteners may be bolts. See details... Figure 6 As shown, fastening screw holes 132K are provided at corresponding positions on the flip plate 132 and the top plate 134. The free end of the flip plate 132 is flipped to the top plate 134. Fastening bolts are passed through the fastening screw holes 132K of the flip plate 132 and the top plate 134 to make the flip plate 132 and the top plate 134 fit together tightly, so that the flip plate 132 presses the sample to be tested, improving the reliability of sample support loading.

[0046] Therefore, by designing a flat multi-electrode sample holder and a sample seat that can flip and press the sample holder, the sample holder can be loaded at a small angle with near-horizontal plane. Vertical application is applied by the inclined surface of the flip plate with fixed fulcrum, realizing sample loading and good electrical contact in a narrow space.

[0047] Based on the above embodiments, this utility model also provides a magnetic imaging device, including the above-described sample stage, which has the sample stage structure and beneficial effects provided in the above embodiments.

[0048] The magnetic imaging device provided in this embodiment is suitable for applications studying the electrical properties of nanomaterials, thin films, device interfaces, and biomolecules. It is particularly suitable for the study and analysis of the properties of magnetic materials, such as the study of physical phenomena like spin Hall magnetoresistance, spin Seebeck, spin pumping, and spin orbital moments in magnetic heterojunctions, which is beneficial for revealing the physical mechanisms of materials. In this embodiment, the magnetic imaging device can be a magnetic imaging microscope.

[0049] Figure 9 This is a schematic diagram of a magnetic imaging device provided in an embodiment of the present invention. See also... Figure 9As shown, the magnetic imaging device of this application includes: a quantum probe assembly 200, an optical assembly 300, and the aforementioned sample stage 100; the quantum probe assembly 200 is provided with a tuning fork 201 and a piezoelectric crystal 202, and an NV probe 203 is provided at the free end of the tuning fork 201, which vibrates under the excitation of the piezoelectric crystal 202; the optical assembly 300 is used to emit excitation light, focus the excitation light onto the NV probe 203, apply microwave radiation to the NV probe 203, and collect the fluorescence signal emitted by the NV probe 203. In this embodiment, the NV probe is diamond, and the probe tip is provided with NV color centers (i.e., nitrogen-vacancy defects in the diamond crystal). Specifically, the tuning fork 201 vibrates at a set frequency and amplitude under the excitation of the piezoelectric crystal 202, and the vibration frequency and amplitude information of the tuning fork can be obtained in real time by monitoring the electrical signal of the piezoelectric crystal 202. Under excitation by excitation light, the NV center at the tip of the NV probe 203 interacts with the surface of the sample through a physical field, such as a magnetic field, electric field, or mechanical force. The electron spin of the NV center is highly sensitive to the surrounding environment, and its quantum state shifts due to changes in the local physical field of the sample surface. By detecting the fluorescence signal, the local physical field distribution on the sample surface can be characterized.

[0050] Figure 10 A perspective view of another magnetic imaging device provided in an embodiment of this utility model; Figure 11 for Figure 10 The front view of the magnetic imaging device shown.

[0051] See Figure 10 and Figure 11 As shown, the optical component 300 of this application includes: a microwave radiation unit 301, which is inclinedly disposed above the sample to be tested, for transmitting and radiating microwave signals to the area where the NV probe 203 is located; and a sample holder 110 is provided with a grip portion 110C (e.g., a handle), the extension direction X1 of the grip portion 110C being in the same direction or approximately in the same direction as the inclined opening direction X2 of the microwave radiation unit 301.

[0052] exist Figure 10 and Figure 11 In the illustrated embodiment, an exemplary spatial mounting structure for a microwave radiating unit 301 and a piezoelectric crystal 202 is shown. See also Figure 10 and Figure 11As shown, the microwave radiation unit 301 of this application is arranged opposite to the piezoelectric crystal 202. The piezoelectric crystal 202 is positioned on the side of the tuning fork 201 away from the NV probe 203, while the microwave radiation unit 301 is positioned above the area where the sample is placed, and on the side of the tuning fork 201 where the NV probe 203 is located. This arrangement ensures that the piezoelectric crystal 202 and the microwave radiation are as far apart as possible, thereby guaranteeing the microwave field strength at the NV color center location. This ensures that the NV color center spin system transitions to a higher energy state, while minimizing interference from the microwave radiation structure on the electrical signal of the piezoelectric crystal 202. The microwave radiation unit 301 is tilted above the area where the sample is placed, making it easy to observe the sample holder 110 during installation. By aligning the installation side of the sample holder 110 (i.e., the side extending in the X1 direction of the grip 110C) with the tilted opening direction of the microwave radiation unit 301 on the same side, i.e., opposite the piezoelectric crystal 202, the handle side of the sample holder 110 is easily observable. It should be noted that the tilted arrangement of the microwave radiation unit 301 facilitates observation, relative to observation from both sides of the line connecting the piezoelectric crystal 202 and the microwave radiation unit 301.

[0053] Therefore, the magnetic imaging device of this application, by setting up a magnetic imaging device that combines an NV scanning probe microscope, namely a quantum diamond atomic force microscope (QDAFM), solves the problem of low detection efficiency in existing electrical transport measurement techniques that only collect electrical parameters between the probe and the sample for material performance analysis. By applying electrical transport measurement conditions to the sample under test through the sample stage to obtain electrical transport measurement signals, and combining quantum scanning magnetic imaging technology to monitor the magnetic signals on the sample surface to characterize its electrical transport properties, it realizes the measurement of multiple physical quantities at the nanoscale, which helps to reduce the difficulty of local micro-charge injection and extraction and improves measurement efficiency.

[0054] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A sample stage for a magnetic imaging device, characterized in that, include: Sample holder, used to hold the sample to be tested; Displacement stage; A mounting base is provided on the side of the displacement stage facing the sample holder. The mounting base is provided with a rotating shaft and a flip plate that can rotate around the rotating shaft. The flip plate is used to press and fix the sample holder.

2. The sample stage according to claim 1, characterized in that, The sample holder is provided with multiple conductive electrodes, which are used to apply electrical transport measurement conditions to the sample to be tested placed on the sample holder in order to obtain the electrical transport measurement signal of the sample to be tested.

3. The sample stage according to claim 2, characterized in that, The bottom surface of the sample holder is provided with a plurality of first conductive electrodes, and the top surface of the mounting base is provided with a plurality of second conductive electrodes, wherein the first conductive electrodes and the second conductive electrodes are in one-to-one electrical contact. The top surface of the sample holder is provided with a sample area, which is used to place the sample to be tested; A wiring area is provided around the sample area. The wiring area is connected to the first conductive electrode through a wire hole. The wiring area is connected to the sample to be tested through a first metal wire. The wiring area is also connected to the probe of the magnetic imaging device through a second metal wire.

4. The sample stage according to claim 3, characterized in that, The wiring area is provided with at least one zero-potential wiring area and at least one non-zero-potential wiring area; The zero-potential wiring area is electrically connected to the sample area, and the zero-potential wiring area is electrically connected to the non-zero-potential wiring area via printed circuitry.

5. The sample stage according to claim 3, characterized in that, The sample area is a conductive plating layer.

6. The sample stage according to claim 1, characterized in that, The mounting base is provided with a top plate on the side facing the sample holder, and the top surface of the top plate is provided with a plurality of second conductive electrodes, a limiting plate and a side baffle; The rotating shaft is disposed on one end face of the top plate, and the end face is opposite to the end face where the limiting plate is located. The free end of the flap can be flipped around the pivot to the top plate.

7. The sample stage according to claim 6, characterized in that, The flap and the top plate are fastened together by fasteners.

8. The sample stage according to claim 6, characterized in that, The limiting plate is provided with a limiting groove; The sample holder is equipped with a limiting block; The limiting block and the limiting groove are inserted into each other.

9. The sample stage according to claim 1, characterized in that, The sample holder is provided with a gripping part, and a first limiting slope is provided on the end face of the sample holder facing the extension direction of the gripping part. The flap is provided with a pressing slope, which is configured to cooperate with the first limiting slope.

10. A magnetic imaging device, characterized in that, include: A quantum probe assembly, an optical assembly, and a sample stage according to any one of claims 1 to 9; The quantum probe assembly includes a tuning fork and a piezoelectric crystal. An NV probe is mounted on the free end of the tuning fork, and the tuning fork vibrates under the excitation of the piezoelectric crystal. The optical component is used to emit excitation light, focus the excitation light onto the NV probe, apply microwave radiation to the NV probe, and collect the fluorescence signal emitted by the NV probe.

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