Chuck coating preparation adjusting device

Abstract

The utility model provides a chuck coating preparation adjusting device, relates to the technical field of semiconductor processing equipment manufacturing processes, and aims to solve the problem that a film on the surface of a chuck is not uniform. The chuck coating preparation adjusting device comprises a base and an adjusting piece, the adjusting piece is arranged on the first surface of the base, the adjusting piece is provided with a first spiral adjusting part, the first spiral adjusting part is configured to be spirally and rotationally connected with second spiral adjusting parts of a coating mask plate, and the coating mask plate is provided with a plurality of second spiral adjusting parts; and the first spiral adjusting part and the second spiral adjusting part can be self-locked in one direction. The uniformity of a film on the surface of the chuck can be improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment manufacturing technology, and more specifically, to a chuck coating preparation and adjustment device. Background Technology

[0002] Electrostatic chucks are core components in semiconductor equipment, playing a crucial role in wafer adsorption and controlling wafer surface temperature. Typically, bumps, strips, or rings are fabricated on the surface of the electrostatic chuck's adsorption layer to reduce the contact area between the wafer and the chuck, minimizing scratches and optimizing the process by shortening wafer removal time. However, varying coating thickness at different locations results in uneven sample pad surfaces, leading to gaps and angles during subsequent wafer fixation. This affects film uniformity and quality, and as the accumulated film thickens, it can easily peel off. Utility Model Content

[0003] The first aspect of this utility model is to provide a chuck coating preparation and adjustment device to solve the technical problem of uneven film on the surface of existing chucks.

[0004] The first aspect of this utility model provides a chuck coating preparation adjustment device, including a base and an adjustment component. The adjustment component is placed on a first surface of the base. The adjustment component has a first spiral adjustment part, which is configured to be spirally connected to a second spiral adjustment part of a coating mask. The coating mask has a plurality of second spiral adjustment parts, and the first spiral adjustment part and the second spiral adjustment parts are capable of unidirectional self-locking.

[0005] The beneficial effects of this novel chuck coating preparation and adjustment device are:

[0006] By setting an adjusting component and utilizing the helical rotation connection between the first helical adjusting part of the adjusting component and the second helical adjusting part of the coating mask, the rotation of the adjusting component relative to the coating mask can be converted into movement of the adjusting component relative to the coating mask in the thickness direction of the coating mask. This changes the distance between the part of the coating mask where the second helical adjusting part is located and the first surface of the base, thereby adjusting the gap between each area of ​​the coating mask and the workpiece to be coated. This improves the uniformity and film quality of the film on the chuck and avoids unnecessary waste caused by putting multiple sets of masked workpieces into production.

[0007] In an optional technical solution, the chuck coating preparation and adjustment device further includes a clamping mechanism, which is used to fix the adjustment component to the base.

[0008] In an optional technical solution, the adjusting member has a mounting hole, and the clamping mechanism includes a clamping member that is inserted into the mounting hole.

[0009] In an optional technical solution, the mounting hole is through at both ends, the adjusting member has a first end and a second end, the first end and the second end are opposite ends of the adjusting member, the first end abuts against the first surface of the base, the clamping member has a third end and a fourth end, the third end and the fourth end are opposite ends of the clamping member, the third end is fixed to the base, and the fourth end has a clamping part, the clamping part abuts against the second end of the adjusting member.

[0010] In an optional technical solution, the base is provided with a first threaded hole, and the clamping member is a first male threaded connector.

[0011] In an optional technical solution, the adjusting member further includes a limiting part, which is used to limit the extreme position of the coating mask plate relative to the adjusting member along a first direction, the first direction being the direction away from the first surface.

[0012] In an optional technical solution, the limiting part is a flange part disposed at the second end of the adjusting member.

[0013] In the optional technical solution, there are multiple second spiral adjustment parts, which are evenly distributed on the coating mask; there are multiple pressing mechanisms, which are arranged in a one-to-one correspondence with the second spiral adjustment parts.

[0014] In an optional technical solution, the chuck coating preparation and adjustment device further includes a coating adapter, which is used to support the workpiece to be coated; the coating adapter is fixedly connected to the base.

[0015] In an optional technical solution, the base is provided with a second threaded hole, and the coating adapter is fixedly connected to the base through a second male threaded connector, the second male threaded connector being screwed into the second threaded hole; or, the coating adapter is bonded to the base. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments or background art of this utility model, the drawings used in the description of the embodiments or background art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0017] Figure 1A schematic diagram of the structure of the chuck coating preparation and adjustment device for fixing the coating mask plate provided in this embodiment of the utility model.

[0018] Figure 2 A three-dimensional structural diagram of the chuck coating preparation and adjustment device for fixing the coating mask plate provided in an embodiment of this utility model.

[0019] Figure 3 A partial cross-sectional view of the coating mask plate fixed by the chuck coating preparation and adjustment device provided in this embodiment of the utility model.

[0020] Figure 4 This is a partial schematic diagram of the adjusting component being pressed by the pressing structure in the chuck coating preparation adjusting device provided in this embodiment of the utility model.

[0021] Figure 5 A cross-sectional view of the adjusting component in the chuck coating preparation adjusting device provided in this embodiment of the utility model.

[0022] Figure 6 A top view of the coating mask plate fixed by the chuck coating preparation and adjustment device provided in this embodiment of the utility model.

[0023] Explanation of reference numerals in the attached figures:

[0024] 100 - Base; 110 - First surface; 120 - First threaded hole; 130 - Annular inner flange;

[0025] 200 - Adjusting component; 210 - First spiral adjusting part; 220 - Mounting hole; 230 - First end; 240 - Second end; 250 - Limiting part;

[0026] 300 - Clamping mechanism; 310 - Clamping component; 311 - Third end; 312 - Fourth end; 313 - Clamping part;

[0027] 400 - Coating mask; 410 - Second spiral adjustment part;

[0028] 500 - Coated adapter; 510 - Stepped surface. Detailed Implementation

[0029] To make the above-mentioned objectives, features, and advantages of this utility model more apparent and understandable, specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it.

[0030] Example 1:

[0031] Figure 1 A schematic diagram of the structure of the chuck coating preparation and adjustment device for fixing the coating mask plate provided in this embodiment of the utility model. Figure 2A three-dimensional structural diagram of the chuck coating preparation and adjustment device for fixing the coating mask plate provided in an embodiment of this utility model. Figure 3 A partial cross-sectional view of the coating mask plate fixed in the chuck coating preparation and adjustment device provided in this embodiment of the utility model. (See attached image.) Figures 1-3 As shown, the chuck coating preparation adjustment device provided in Embodiment 1 of this utility model includes a base 100 and an adjustment member 200. The adjustment member 200 is placed on the first surface 110 of the base 100. The adjustment member 200 has a first spiral adjustment part 210. The first spiral adjustment part 210 is configured to be spirally connected to the second spiral adjustment part 410 of the coating mask plate 400. The coating mask plate 400 has a plurality of second spiral adjustment parts 410. The first spiral adjustment part 210 and the second spiral adjustment part 410 can be unidirectionally self-locking.

[0032] By setting an adjusting member 200 and utilizing the helical rotation connection between the first helical adjusting part 210 of the adjusting member 200 and the second helical adjusting part 410 of the coating mask plate 400, the rotation of the adjusting member 200 relative to the coating mask plate 400 can be converted into movement of the adjusting member 200 relative to the coating mask plate 400 in the thickness direction of the coating mask plate 400. This changes the distance between the part of the coating mask plate 400 where the second helical adjusting part 410 is located and the first surface 110 of the base 100, thereby adjusting the gap between each area of ​​the coating mask plate 400 and the workpiece to be coated, improving the uniformity and film quality of the film on the chuck, and avoiding unnecessary waste caused by putting multiple sets of masked workpieces into production.

[0033] In this embodiment, the first surface 110 of the base 100 is the upper surface of the base 100, and the lower end of the adjusting member 200, namely the first end 230 described later, is placed on the upper surface of the base 100. Specifically, the first spiral adjusting part 210 of the adjusting member 200 is an externally threaded part provided on the outer peripheral surface of the adjusting member 200, and the second spiral adjusting part 410 of the coating mask plate 400 is a third threaded hole extending along its thickness direction. The unidirectional self-locking refers to the fact that the rotation of the first spiral adjusting part 210 and the second spiral adjusting part 410 can be converted into relative axial movement between them, but the relative axial movement between them cannot be converted into relative rotation between them.

[0034] Furthermore, the chuck in this embodiment can be an electrostatic chuck.

[0035] like Figure 1 and Figure 2 As shown, optionally, the chuck coating preparation adjustment device also includes a clamping mechanism 300, which is used to fix the adjustment member 200 to the base 100.

[0036] By setting the clamping mechanism 300, after the relative position between the adjusting member 200 and the coating mask 400 is adjusted, the clamping mechanism 300 can be used to press the adjusting member 200 onto the base 100 to prevent the shaking of the adjusting member 200 from causing the position of the coating mask 400 to change. When it is necessary to change the relative position between the adjusting member 200 and the coating mask 400, the clamping mechanism 300 can be released.

[0037] Of course, in another implementation, the clamping mechanism 300 may not be provided. Since the first surface 110 is the upper surface of the base 100, the adjusting member 200 can be placed on the upper surface of the base 100 under its own gravity without needing to be specifically clamped to the first surface 110 of the base 100. However, in this case, the weight of the adjusting member 200 needs to be increased to offset the effect of the rigidity of the coating mask plate 400 lifting the adjusting member 200.

[0038] Figure 4 This is a partial schematic diagram of the adjusting component being pressed by the pressing structure in the chuck coating preparation adjusting device provided in this embodiment of the utility model. Figure 5 A cross-sectional view of the adjusting component in the chuck coating preparation adjusting device provided in this embodiment of the utility model. Figure 4 and Figure 5 As shown, optionally, the adjusting member 200 has a mounting hole 220, and the clamping mechanism 300 includes a clamping member 310, which is inserted into the mounting hole 220.

[0039] By inserting the clamping member 310 into the mounting hole 220, not only can the adjusting member 200 be pressed against the first surface 110 of the base 100, but the clamping member 310 and the mounting hole 220 can also be used to position the adjusting member 200 in the plane direction of the coating mask 400, thereby ensuring the position of the coating mask 400.

[0040] Specifically, the mounting hole 220 provided in the adjusting member 200 is a smooth hole, and the inner circumferential surface of the mounting hole 220 mates with the clamping member 310.

[0041] Of course, in another implementation, the clamping member 310 of the clamping mechanism 300 may only be responsible for clamping. For example, a pressure plate may be provided to clamp the upper surface of the adjusting member 200. The pressure plate may be connected to the base 100 by a male threaded connector such as a screw or bolt. When the screw or bolt is tightened, the pressure plate may be used to clamp the upper surface of the adjusting member 200.

[0042] like Figure 4 and Figure 5As shown, optionally, the two ends of the mounting hole 220 are through, the adjusting member 200 has a first end 230 and a second end 240, the first end 230 and the second end 240 are opposite ends of the adjusting member 200, the first end 230 abuts against the first surface 110 of the base 100, the clamping member 310 has a third end 311 and a fourth end 312, the third end 311 and the fourth end 312 are opposite ends of the clamping member 310, the third end 311 is fixed to the base 100, and the fourth end 312 has a clamping part 313, the clamping part 313 abuts against the second end 240 of the adjusting member 200.

[0043] By setting the clamping member 310 to pass through the vertically penetrating mounting hole 220 of the adjusting member 200, and fixing the third end 311 of the clamping member 310 to the base 100, the adjusting member 200 is clamped by the clamping part 313 of the clamping member 310 abutting against the second end 240 of the adjusting member 200. Furthermore, the radial position of the adjusting member 200 relative to the clamping member 310 can be determined by the cooperation between the clamping member 310 and the mounting hole 220, thereby determining the position of the coating mask plate 400. Thus, a single component can both clamp the adjusting member 200 and fix its position.

[0044] like Figure 4 As shown, optionally, the base 100 is provided with a first threaded hole 120, and the clamping member 310 is a first male threaded connector.

[0045] The first threaded hole 120 is provided to cooperate with the first male threaded connector of the clamping member 310, which can prevent the clamping member 310 from loosening and ensure the reliability of the fixing of the adjusting member 200 to the coating mask plate 400.

[0046] In this embodiment, the first male threaded connector can be a screw or a bolt. More specifically, a screw can be selected, and even more specifically, a cylindrical head internal hexagon screw can be selected.

[0047] like Figure 4 and Figure 5 As shown, optionally, the adjusting member 200 further includes a limiting part 250, which is used to limit the extreme position of the coating mask plate 400 relative to the adjusting member 200 in a first direction, the first direction being the direction away from the first surface 110.

[0048] By setting the limiting part 250, the distance that the coating mask 400 moves relative to the adjusting member 200 in the first direction can be prevented from being too large. This prevents damage to the coating mask 400 caused by excessive deformation of a part of the coating mask 400 relative to other parts due to misoperation, and helps to improve the reliability of operation.

[0049] In this embodiment, the limiting part 250 is located at the second end 240 of the adjusting member 200, that is, the end of the adjusting member 200 away from the base 100.

[0050] like Figure 4 and Figure 5 As shown, optionally, the limiting part 250 is a flange part provided at the second end 240 of the adjusting member 200.

[0051] This configuration allows the flange to be machined together with the adjusting component 200, reducing the machining steps of the adjusting component 200 and thus helping to control the machining cost of the adjusting component 200.

[0052] Specifically, the flange portion is an annular flange portion provided at the second end 240 of the adjusting member 200. Of course, in other implementations, other structures can also be used as the limiting portion 250. For example, a radially protruding protrusion can be provided at the upper end of the adjusting member 200, that is, at the second end 240 of the adjusting member 200, or the radially protruding protrusions can be evenly distributed at the second end 240 of the adjusting member 200 and form a quincunx shape, thereby facilitating direct gripping of the second end 240 of the adjusting member 200 to apply torque to the adjusting member 200 to rotate it.

[0053] Figure 6 A top view of the coating mask plate fixed in the chuck coating preparation and adjustment device provided in this embodiment of the utility model. Figure 6 As shown, optionally, there are multiple second spiral adjustment parts 410, which are evenly distributed on the coating mask plate 400; there are multiple pressing mechanisms 300, which are arranged in a one-to-one correspondence with the second spiral adjustment parts 410.

[0054] By uniformly arranging multiple second spiral adjustment parts 410 and using clamping mechanisms 300 to correspond one-to-one with the second spiral adjustment parts 410, after adjusting the gap between a portion of the coating mask plate 400 and the base 100 using each adjustment part 200, the clamping mechanism 300 can be used to immediately lock the adjustment part 200 to prevent it from loosening. Alternatively, the clamping mechanisms 300 corresponding to different adjustment parts 200 can be loosened to adjust the corresponding adjustment parts 200.

[0055] Specifically, in this embodiment, eight second spiral adjustment parts 410 are evenly arranged along the circumferential direction near the edge of the coating mask plate 400. Correspondingly, there are also eight clamping parts 310, i.e., eight first male threaded connectors. Each first male threaded connector is inserted into an adjustment part 200. After the adjustment part 200 completes the adjustment operation, the adjustment part 200 is fixed.

[0056] like Figure 1As shown, optionally, the chuck coating preparation adjustment device also includes a coating adapter 500, which is used to carry the workpiece to be coated (not shown in the figure); the coating adapter 500 is fixedly connected to the base 100.

[0057] The coating adapter 500 is provided to support the coated part and ensure the stability of the coated part's position during the chuck manufacturing process, thereby ensuring the stability of the film thickness on the chuck.

[0058] The base 100 has an annular inner flange 130 on its inner peripheral wall, while the coating adapter 500 has a stepped surface 510 on its lower surface. The stepped surface 510 matches the upper surface and inner peripheral surface of the annular inner flange 130 to position the coating adapter 500. The coated part can be a ceramic plate or a metal plate, and its shape is a circular plate.

[0059] like Figure 1 As shown, optionally, the base 100 is provided with a second threaded hole (not shown in the figure), and the coating adapter 500 is fixedly connected to the base 100 through a second male threaded connector (not shown in the figure), the second male threaded connector being screwed into the second threaded hole; or, the coating adapter 500 is bonded to the base 100.

[0060] By setting a second threaded hole to cooperate with a second male threaded connector, or by using adhesive bonding, the coating adapter 500 can be firmly fixed on the base 100, thereby ensuring the stability of the position of the coating adapter 500 and ensuring the process quality of the coated part.

[0061] While the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention; therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

[0062] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the term "comprising" or any other variations thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0063] In the above embodiments, descriptions of directions such as "up" and "down" are based on the accompanying drawings.

[0064] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention.

[0065] Therefore, this invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A chuck coating preparation and adjustment device, characterized in that, The device includes a base (100) and an adjusting member (200). The adjusting member (200) is placed on a first surface (110) of the base (100). The adjusting member (200) has a first spiral adjusting part (210) configured to be spirally connected to a second spiral adjusting part (410) of a coating mask (400). The coating mask (400) has a plurality of second spiral adjusting parts (410). The first spiral adjusting part (210) and the second spiral adjusting parts (410) are capable of unidirectional self-locking.

2. The chuck coating preparation and adjustment device according to claim 1, characterized in that, The chuck coating preparation adjustment device further includes a clamping mechanism (300), which is used to fix the adjustment member (200) to the base (100).

3. The chuck coating preparation and adjustment device according to claim 2, characterized in that, The adjusting member (200) has a mounting hole (220), and the clamping mechanism (300) includes a clamping member (310) which is inserted into the mounting hole (220).

4. The chuck coating preparation and adjustment device according to claim 3, characterized in that, The mounting hole (220) is through at both ends. The adjusting member (200) has a first end (230) and a second end (240). The first end (230) and the second end (240) are opposite ends of the adjusting member (200). The first end (230) abuts against the first surface (110) of the base (100). The clamping member (310) has a third end (311) and a fourth end (312). The third end (311) and the fourth end (312) are opposite ends of the clamping member (310). The third end (311) is fixed to the base (100), and the fourth end (312) has a clamping part (313). The clamping part (313) abuts against the second end (240) of the adjusting member (200).

5. The chuck coating preparation and adjustment device according to claim 4, characterized in that, The base (100) is provided with a first threaded hole (120), and the clamping member (310) is a first male threaded connector.

6. The chuck coating preparation and adjustment device according to any one of claims 1-5, characterized in that, The adjusting member (200) further includes a limiting part (250) for limiting the extreme position of the coating mask plate (400) relative to the adjusting member (200) in a first direction, the first direction being the direction away from the first surface (110).

7. The chuck coating preparation and adjustment device according to claim 6, characterized in that, The limiting part (250) is a flange part provided at the second end (240) of the adjusting member (200).

8. The chuck coating preparation and adjustment device according to any one of claims 2-5, characterized in that, There are multiple second spiral adjustment parts (410), and the multiple second spiral adjustment parts (410) are evenly distributed on the coating mask plate (400); there are multiple pressing mechanisms (300), and the pressing mechanisms (300) are arranged in a one-to-one correspondence with the second spiral adjustment parts (410).

9. The chuck coating preparation and adjustment device according to any one of claims 1-5, characterized in that, The chuck coating preparation and adjustment device further includes a coating adapter (500), which is used to support the workpiece to be coated; the coating adapter (500) is fixedly connected to the base (100).

10. The chuck coating preparation and adjustment device according to claim 9, characterized in that, The base (100) is provided with a second threaded hole, and the coating adapter (500) is fixedly connected to the base (100) by a second male threaded connector, the second male threaded connector being screwed into the second threaded hole; or, the coating adapter (500) is bonded to the base (100).

Images