Crystal multi-angle directional goniometer assembly

Abstract

The utility model discloses a crystal multi-angle directional goniometer assembly, which belongs to the technical field of crystal processing and comprises a mounting plate. The two driving frames are symmetrically and fixedly connected to the mounting plate; the two worms are connected to the driving frame in a rotating mode respectively; and the two inner ring arc rails are symmetrically and fixedly connected to the mounting plate, fan-shaped worm wheels are arranged on the two inner ring arc rails correspondingly, and second sliding blocks are fixedly connected to the bottoms of the two fan-shaped worm wheels correspondingly. The first sliding block at the bottom of the generator connecting plate is slidably connected with the outer ring arc rail, and the fan-shaped worm wheel is slidably connected with the inner ring arc rail through the second sliding block, so that the two ends of the generator connecting plate are limited and supported by the arc rails when the generator connecting plate moves, the influence of the dead weight of the generator connecting plate and the dead weight of the X-ray generator on the angle is reduced, and movement is more stable; and large angle deviation is avoided.

Description

Technical Field

[0001] This utility model relates to the field of crystal processing technology, specifically to a crystal multi-angle orientation goniometer assembly. Background Technology

[0002] In the field of crystal testing or processing, it is necessary to detect the HKL crystal orientation of the crystal being tested. Based on the measured HKL orientation data, users perform subsequent processes such as cutting or grinding on the crystal. Due to the rapid development of semiconductor material technology, some crystals are currently large in size or have special shapes. Traditional orientation equipment has a θ or 2θ structure, which is inconvenient for measuring such types of crystal materials. Or, due to the structural characteristics of the measurement system, the tooling design is inconvenient, resulting in large measurement errors. Sometimes, some crystal materials require the test center of the X-ray optical path to be placed directly, requiring the measurement system to be a centerless measurement system, which is simply not feasible in the design of traditional measurement structures.

[0003] In other processing techniques, it is sometimes necessary to integrate a measurement system with the processing equipment (such as a crystal rod grinding machine or a reference edge processing machine). In such cases, the measurement system must possess characteristics such as automated measurement, small overall size, versatility in placement, and high measurement accuracy. Existing measurement systems on the market, even those without a central structure, always have some inapplicable specifications (such as dimensional or measurement accuracy deficiencies). This necessitates redesigning when integrating different devices, or makes it difficult to guarantee overall processing accuracy. Furthermore, in existing structures, the X-ray generator is prone to eccentricity or warping during movement, and the calibration process is extremely complex. After a certain period of use, users are unable to perform calibration corrections themselves. Utility Model Content

[0004] This utility model aims to solve at least one of the technical problems existing in the prior art.

[0005] Therefore, one objective of this utility model is to provide a crystal multi-angle orientation goniometer assembly, which can solve the problem of X-ray generating devices being prone to eccentricity or warping, and at the same time, to a certain extent, solve the cumbersomeness of the calibration process.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a crystal multi-angle orientation goniometer assembly, comprising a mounting plate; two drive frames, the two drive frames being symmetrically and fixedly connected to the mounting plate; two worm gears, the two worm gears being rotatably connected to the drive frames respectively; two inner arc rails, the two inner arc rails being symmetrically and fixedly connected to the mounting plate, each of the two inner arc rails being provided with a sector-shaped worm wheel, the bottom of each of the two sector-shaped worm wheels being fixedly connected to a second slider, the two sector-shaped worm wheels being slidably connected to the two inner arc rails respectively through the second sliders, the two... The fan-shaped worm gears are respectively meshed with the two worms, and a receiver connecting plate and a generator connecting plate are respectively fixedly connected to the two fan-shaped worm gears; two angle measuring mechanisms are respectively mounted on the receiver connecting plate and the generator connecting plate; two drive mechanisms are respectively mounted on the two drive frames; an outer arc rail is fixedly connected to the mounting plate, and the outer arc rail and the inner arc rail have a common center; a first slider is fixedly connected to the bottom of the generator connecting plate, and the first slider is slidably connected to the outer arc rail.

[0007] Preferably, the angle measuring mechanism includes an X-ray receiver and an X-ray generator, wherein an X-ray tube is also installed on the X-ray generator, the X-ray receiver is installed on the receiver connection plate, and the X-ray generator is installed on the generator connection plate.

[0008] Preferably, the drive mechanism includes two motors, both of which are mounted on the bottom of the mounting plate. The output shaft of each motor is fixedly connected to a drive wheel, and the output shaft of the worm gear is fixedly connected to a driven wheel. The driven wheel and the drive wheel are connected by a transmission belt.

[0009] Preferably, both drive frames are equipped with absolute encoders on their exteriors, and one end of the worm gear is connected to the absolute encoder in a transmission connection.

[0010] Preferably, the inner arc track has the same curvature as the outer arc track.

[0011] Preferably, the mounting plate has two through slots on its exterior, and the drive belt passes through the through slots.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] This invention, by setting up a worm gear, an inner arc rail, a sector worm wheel, and an outer arc rail, with the first slider at the bottom of the generator connecting plate slidably connected to the outer arc rail, and the sector worm wheel slidably connected to the inner arc rail via a second slider, ensures that both ends of the generator connecting plate are limited and supported by arc rails during movement. Utilizing a three-arc guide rail combined with a worm gear structure, it successfully solves the problem of eccentricity or warping in X-ray generating devices, and also reduces the complexity of the calibration process to some extent. The θ-θ centerless structure can be used both parallel and perpendicularly, and there is no need to worry about eccentricity or warping during measurement due to the weight and installation method of the X-ray generating device; thus, it at least partially solves the problems existing in the prior art. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of the crystal multi-angle orientation goniometer assembly of this utility model;

[0015] Figure 2 This is a schematic diagram of the drive frame in the crystal multi-angle orientation goniometer assembly of this utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the second slider in the crystal multi-angle orientation goniometer assembly of this utility model.

[0017] In the diagram: 1. Mounting plate; 2. Drive frame; 3. Worm gear; 4. Inner ring arc rail; 5. Sector worm gear; 6. Receiver connecting plate; 7. X-ray receiver; 8. Driven wheel; 9. Drive belt; 10. Drive wheel; 11. Motor; 12. Generator connecting plate; 13. X-ray generator; 14. Outer ring arc rail; 15. Absolute encoder; 16. First slider; 17. X-ray tube; 18. Second slider; 19. Through slot. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figures 1-3This utility model provides a crystal multi-angle orientation goniometer assembly, including: a mounting plate 1; two drive frames 2, symmetrically fixedly connected to the mounting plate 1; two worm gears 3, rotatably connected to the drive frames 2 respectively; two inner arc rails 4, symmetrically fixedly connected to the mounting plate 1, each inner arc rail 4 being provided with a sector-shaped worm wheel 5, and each sector-shaped worm wheel 5 having a second slider 18 fixedly connected to its bottom. The two sector-shaped worm wheels 5 are slidably connected to the two inner arc rails 4 respectively through the second slider 18. The receiver connecting plate 6 and the generator connecting plate 12 are respectively connected to two worm gears 3 and two sector worm wheels 5. Two angle measuring mechanisms are respectively installed on the receiver connecting plate 6 and the generator connecting plate 12. Two drive mechanisms are respectively installed on two drive frames 2. The outer ring arc rail 14 is fixedly connected to the mounting plate 1, and the outer ring arc rail 14 and the inner ring arc rail 4 have the same center. The bottom of the generator connecting plate 12 is fixedly connected to a first slider 16, which is slidably connected to the outer ring arc rail 14.

[0020] The angle measuring mechanism includes an X-ray receiver 7 and an X-ray generator 13. An X-ray tube 17 is also installed on the X-ray generator 13. The X-ray receiver 7 is installed on the receiver connection plate 6, and the X-ray generator 13 is installed on the generator connection plate 12.

[0021] Before operation, the X-ray receiver 7 and the X-ray generator 13 are calibrated using a standard angle crystal plate to adjust the angle measurement data to the normal range during the measurement by the standard angle crystal plate.

[0022] The inner arc rail 4 and the outer arc rail 14 can be adjusted in curvature using set screws to reduce the impact of curvature error on the running trajectory.

[0023] This invention can be installed on a lifting frame and used with a laser displacement sensor for accurate positioning, thus making it applicable to various crystal specifications.

[0024] The drive mechanism includes two motors 11, both mounted on the bottom of the mounting plate 1. A drive wheel 10 is fixedly connected to the output shaft of each motor 11, and a driven wheel 8 is fixedly connected to the output shaft of the worm gear 3. The driven wheel 8 and the drive wheel 10 are connected via a transmission belt 9. Two through slots 19 are formed on the outside of the mounting plate 1, through which the transmission belt 9 passes. During installation, the transmission belt 9 passes through the through slots 19, connecting the drive wheel 10 and the driven wheel 8.

[0025] In use, the motor 11 of the drive mechanism is started. The motor 11 rotates the driving wheel 10 and the transmission belt 9, thereby driving the driven wheel 8, which in turn rotates the worm 3. The worm 3 drives the sector worm wheel 5 to move, and the sector worm wheel 5 moves on the inner arc rail 4. One end of the generator connecting plate 12 is also provided with a first slider 16 that is slidably connected to the outer arc rail 14. When the generator connecting plate 12 moves, both ends are limited and supported by the arc rail, which makes the generator connecting plate 12 less affected by the gravity of the automatic and X-ray generator 13, and the movement more stable, thereby avoiding large angular deviations and better maintaining the calibrated angle.

[0026] During the testing process of X-ray receiver 7 and X-ray generator 13, the position calibrated by the standard angle crystal plate is used as the workpiece positioning reference point. Driven by the drive mechanism and CNC system, X-ray receiver 7 and X-ray generator 13 move along the inner ring arc rail 4 and the outer ring arc rail 14 to measure the crystal workpiece located at the workpiece positioning reference point.

[0027] In order to record the data of the two motors 11 so that they can be recalibrated without calibration after power failure and restart, absolute encoders 15 are installed on the outside of the two drive frames 2, and one end of the worm gear 3 is connected to the absolute encoder 15 for transmission.

[0028] The inner arc rail 4 and the outer arc rail 14 have the same curvature.

[0029] Based on the above technical solution, the working steps of this solution are summarized as follows: When this utility model is used, the motor 11 of the drive mechanism is started. The rotation of the motor 11 drives the driven wheel 8, which in turn rotates the worm 3. The worm 3 drives the sector worm wheel 5 to move, and the sector worm wheel 5 moves on the inner arc rail 4. One end of the generator connecting plate 12 is also provided with a first slider 16 that is slidably connected to the outer arc rail 14. When the generator connecting plate 12 moves, both ends are limited and supported by the arc rail, so that the generator connecting plate 12 is less affected by the gravity of the automatic X-ray generator 13, and the movement is more stable, thereby avoiding large angular deviations and maintaining the calibrated angle better. During the testing process of the X-ray receiver 7 and the X-ray generator 13, the position calibrated by the standard angle crystal plate is used as the workpiece positioning base point. Under the drive of the drive mechanism and the CNC system, the X-ray receiver 7 and the X-ray generator 13 move along the inner arc rail 4 and the outer arc rail 14 to measure the crystal workpiece located at the workpiece positioning base point.

[0030] All standard parts used in this invention can be purchased from the market, and irregularly shaped parts can be customized according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are mature technologies in the prior art. The machinery, parts, and equipment all use conventional models in the prior art, and the circuit connections also use conventional connection methods in the prior art, which will not be detailed here. Any content not described in detail in this specification belongs to the prior art known to those skilled in the art.

[0031] All parts not described in this utility model are the same as or can be implemented using existing technology. Although embodiments of this utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this utility model, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A crystal multi-angle orientation goniometer assembly, characterized in that, include: Mounting plate (1); Two drive frames (2) are symmetrically fixedly connected to the mounting plate (1); Two worm gears (3) are rotatably connected to the drive frame (2); Two inner ring arc rails (4) are symmetrically fixedly connected to the mounting plate (1). Each of the two inner ring arc rails (4) is provided with a fan-shaped worm wheel (5). The bottom of each of the two fan-shaped worm wheels (5) is fixedly connected with a second slider (18). The two fan-shaped worm wheels (5) are slidably connected to the two inner ring arc rails (4) through the second slider (18). The two fan-shaped worm wheels (5) are respectively meshed with the two worms (3). A receiver connecting plate (6) and a generator connecting plate (12) are respectively fixedly connected to the two fan-shaped worm wheels (5). Two angle measuring mechanisms are respectively installed on the receiver connecting plate (6) and the generator connecting plate (12); Two drive mechanisms are respectively mounted on two drive frames (2); An outer ring arc rail (14) is fixedly connected to the mounting plate (1), and the outer ring arc rail (14) and the inner ring arc rail (4) have the same center. A first slider (16) is fixedly connected to the bottom of the generator connecting plate (12), and the first slider (16) is slidably connected to the outer ring arc rail (14).

2. The crystal multi-angle orientation goniometer assembly according to claim 1, characterized in that: The angle measuring mechanism includes an X-ray receiver (7) and an X-ray generator (13). An X-ray tube (17) is also installed on the X-ray generator (13). The X-ray receiver (7) is installed on the receiver connection plate (6), and the X-ray generator (13) is installed on the generator connection plate (12).

3. The crystal multi-angle orientation goniometer assembly according to claim 1, characterized in that: The drive mechanism includes two motors (11), both of which are mounted on the bottom of the mounting plate (1). The output shaft of each motor (11) is fixedly connected to a drive wheel (10), and the output shaft of the worm (3) is fixedly connected to a driven wheel (8). The driven wheel (8) and the drive wheel (10) are connected by a transmission belt (9).

4. The crystal multi-angle orientation goniometer assembly according to claim 1, characterized in that: Absolute encoders (15) are mounted on the outside of both drive frames (2), and one end of the worm gear (3) is connected to the absolute encoders (15) for transmission.

5. A crystal multi-angle orientation goniometer assembly according to claim 1, characterized in that: The inner arc rail (4) has the same curvature as the outer arc rail (14).

6. A crystal multi-angle orientation goniometer assembly according to claim 3, characterized in that: The mounting plate (1) has two through slots (19) on its exterior, and the transmission belt (9) passes through the through slots (19).

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