Imaging system

Abstract

The embodiment of the utility model provides an imaging system. In one specific embodiment, the system comprises a first light source, an objective lens assembly, an imaging rotation unit and a first imaging unit, the first light source is used for emitting a first light beam; the objective lens assembly is used for sequentially outputting the first light beams to a plurality of local areas of the to-be-measured object, sequentially receiving the first imaging light beams of the plurality of local areas and outputting the first imaging light beams to the imaging rotating assembly; the imaging rotating assembly is used for respectively rotating the first imaging light beams of the plurality of local areas and outputting the first imaging light beams to the first imaging unit; and the first imaging unit is used for imaging the first imaging light beams of the plurality of rotated local areas. The implementation mode is simple to operate, and the use threshold is reduced; moire patterns can be effectively reduced, the imaging quality is improved, the detection result is more accurate and reliable, the detection requirements of different texture features, different angles and different directions are met, and the universality and adaptability of the system are improved.

Description

Technical Field

[0001] This disclosure relates to the field of imaging. More specifically, it relates to an imaging system. Background Technology

[0002] Currently, in visual inspection projects, with the increasing demands for inspection accuracy, microscopic imaging technology has gradually become an important means of image acquisition. To meet the needs of high-precision inspection, microscopic imaging technology is typically used for detailed observation and measurement.

[0003] A microscopic imaging system typically consists of several key structural components, including a camera, objective lens, tube (microscopic sleeve), microscope objective, and light source. The precise coordination of these components enables the microscopic imaging system to achieve clear imaging of minute objects, providing a reliable foundation for subsequent image analysis and processing. In conventional optical microscopic imaging schemes, images with different magnifications and resolutions can be obtained by adjusting parameters such as the magnification of the objective lens and the brightness of the light source.

[0004] Existing microscopic imaging systems require interpolation motion (with the X and Y axes as the main directions of movement in a two-dimensional plane) to move different parts of the product sequentially under the lens to capture images of each part and perform inspection. However, this method cannot rotate the image angle, which makes it impossible to obtain clear images at specific angles when capturing images with specific rotational symmetry, such as rings. Post-processing of the images using algorithms is necessary, and these algorithms are usually more complex and time-consuming, increasing the difficulty and cost of data processing. Summary of the Invention

[0005] The purpose of this disclosure is to provide an imaging system capable of adjusting an image to solve at least one of the problems existing in the prior art.

[0006] To achieve the above objectives, the present disclosure adopts the following technical solution:

[0007] The first aspect of this disclosure provides an imaging system, comprising:

[0008] First light source, objective lens assembly, imaging rotation assembly, and first imaging unit;

[0009] The first light source is used to emit the first beam of light;

[0010] The objective lens assembly is used to sequentially output the first beam to multiple local areas of the object under test, and sequentially receive the first imaging beams of the multiple local areas and output them to the imaging rotation assembly.

[0011] The imaging rotation component is used to rotate the first imaging beam of the plurality of local regions respectively and output it to the first imaging unit;

[0012] The first imaging unit is used to image the first imaging beam of the multiple local regions after rotation.

[0013] Furthermore, the imaging rotation assembly includes a Dove prism.

[0014] Furthermore, the imaging system also includes a second light source and a second imaging unit;

[0015] The second light source is used to emit a second beam of light;

[0016] The objective lens assembly is also used to sequentially output the second beam to multiple local areas of the object under test, sequentially receive the second imaging beams of the multiple local areas and output them to the imaging rotation assembly;

[0017] The imaging rotation component is also used to rotate the second imaging beam of the plurality of local regions respectively and output it to the second imaging unit;

[0018] The second imaging unit is used to image the second imaging beam of the multiple local regions after rotation.

[0019] Furthermore, the imaging system also includes a third light source and a third imaging unit;

[0020] The third light source is used to emit a third beam of light;

[0021] The objective lens assembly is also used to sequentially output the third beam to multiple local areas of the object under test, sequentially receive the third imaging beams of the multiple local areas and output them to the imaging rotation assembly;

[0022] The imaging rotation component is also used to rotate the third imaging beam of the plurality of local regions respectively and output it to the third imaging unit;

[0023] The third imaging unit is used to image the third imaging beam of the multiple local regions after rotation.

[0024] Furthermore, the objective lens assembly includes a first objective lens and a second objective lens;

[0025] The first objective lens is used to sequentially output the first beam and / or the second beam to multiple local areas of the object under test, and sequentially receive the imaging beams of the multiple local areas of the object under test and output them to the imaging rotation assembly.

[0026] The second objective lens is used to sequentially output the third beam to multiple local areas of the object under test, and sequentially receive the imaging beams of the multiple local areas of the object under test and output them to the imaging rotation component.

[0027] Furthermore, the imaging system also includes an optical wheel and an objective lens switch;

[0028] The optical wheel is used to switch between the first beam and the third beam so that the objective lens sequentially outputs the first beam or the third beam to multiple local areas of the object under test.

[0029] The objective lens switcher is used to switch between the first objective lens and the second objective lens.

[0030] Furthermore, the first light source is a bright field light source, the second light source is a dark field light source, and the third light source is an infrared light source.

[0031] Furthermore, the imaging system also includes a first beam splitter;

[0032] The first beam splitter is used to reflect a first beam from the first light source or a third beam from the third light source to the objective lens, and to transmit a first imaging beam or a third imaging beam from the plurality of local regions of the objective lens to the imaging rotation assembly.

[0033] Furthermore, the imaging system also includes a second beam splitter and a third beam splitter;

[0034] The second beam splitter is used to reflect a portion of the imaging beam from the multiple local regions after rotation from the imaging rotation assembly to the third imaging unit, and transmit another portion to the third beam splitter.

[0035] The third beam splitter is used to reflect a portion of the imaging beam from the second beam splitter after another part of it has been rotated to the second imaging unit, and to transmit the other portion to the first imaging unit.

[0036] Furthermore, a first sleeve is provided between the first imaging unit and the third beam splitter, a second sleeve is provided between the second imaging unit and the third beam splitter, and a third sleeve is provided between the third imaging unit and the second beam splitter.

[0037] The beneficial effects of this disclosure are as follows:

[0038] This manual is easy to operate and lowers the barrier to entry for users.

[0039] When detecting regular, fine textures on an object's surface, the relative positional relationship between these textures and the camera's image sensor can easily cause moiré patterns. By rotating the optical path, the angle at which light enters the camera's image sensor can be changed, thereby breaking the fixed positional relationship between the textures and the image sensor, effectively reducing or eliminating moiré patterns. Therefore, this invention can effectively reduce moiré patterns, further improving image quality and making the detection results more accurate and reliable.

[0040] This disclosure improves the versatility and adaptability of the system by adjusting the parameters of the rotating optical path to meet the detection requirements of different texture features, angles, and directions.

[0041] Traditional methods for eliminating moiré patterns may require complex image processing algorithms or additional hardware. This application, however, achieves moiré pattern elimination through a simple design of a rotating optical path, requiring no additional computational resources or hardware costs, thus improving detection efficiency. Furthermore, when measuring rotationally symmetric objects, the rotated images exhibit high similarity, reducing the complexity of defect detection.

[0042] By introducing an imaging rotation component, this system can precisely rotate the imaging beam to multiple local areas of the object under test, ensuring that each local area is imaged at the optimal angle, thus greatly improving the detection accuracy. Simultaneously, the system's objective lens assembly can sequentially output beams to multiple local areas of the object under test, enabling the system to flexibly handle objects of different shapes and sizes, meeting the detection needs of complex projects. Attached Figure Description

[0043] The specific embodiments of this disclosure will be described in further detail below with reference to the accompanying drawings.

[0044] Figure 1 The results of image acquisition using an existing microscopic imaging system are shown.

[0045] Figure 2 A schematic diagram of the imaging system provided in the first embodiment of this disclosure is shown.

[0046] Figure 3 The image acquisition result is shown after the imaging system provided in the first embodiment of this disclosure performs image acquisition.

[0047] Figure 4 A schematic diagram of the imaging system provided in the second embodiment of this disclosure is shown. Detailed Implementation

[0048] To more clearly illustrate this disclosure, the following description, in conjunction with embodiments and accompanying drawings, provides further insight. Similar components in the drawings are indicated by the same reference numerals. Those skilled in the art should understand that the specific description below is illustrative rather than restrictive and should not be construed as limiting the scope of protection of this disclosure.

[0049] like Figure 1 As shown, A is the first starting position for image acquisition. Existing microscopic imaging systems require interpolation motion (with the X and Y axes as the main directions of motion in a two-dimensional plane) to move each part of the product sequentially under the lens to capture images of each part of the product and perform inspection. However, this method cannot rotate the image angle, which makes it impossible to obtain a clear image at a specific angle when capturing images with specific rotational symmetry, such as rings. Post-processing of the image is required through algorithms, which are usually more complex and time-consuming, increasing the difficulty and cost of data processing.

[0050] Based on this, such as Figure 2 As shown, one embodiment of this disclosure provides an imaging system, including:

[0051] First light source 1, objective lens assembly 12, imaging rotation assembly 5, and first imaging unit 9;

[0052] First light source 1, used to emit the first beam;

[0053] The objective lens assembly 12 is used to sequentially output a first beam to multiple local areas of the object under test 16, and sequentially receive the first imaging beams of multiple local areas and output them to the imaging rotation assembly 5.

[0054] The imaging rotation component 5 is used to rotate the first imaging beam in multiple local areas respectively and output it to the first imaging unit 9;

[0055] The first imaging unit 9 is used to image the first imaging beam in multiple local areas after rotation.

[0056] In this embodiment, the working principle is as follows:

[0057] The first light source 1 is turned on to emit a first beam. The product under test (DUT) is moved to the lower part of the objective lens assembly 12 by interpolation. The first beam illuminates the first part of the DUT through the objective lens assembly 12 to provide supplementary lighting. The objective lens assembly 12 receives the first imaging beam of the first part of the DUT and outputs it to the imaging rotation assembly 5. The imaging rotation assembly 5 rotates the first imaging beams of multiple part regions and outputs them to the first imaging unit 9. The image in the first imaging unit 9 is observed. The imaging rotation assembly 5 is rotated so that the image in the first imaging unit 9 reaches a preset angle. The first imaging unit 9 images the first imaging beams of the multiple rotated part regions to obtain the image of the first part region. Then, the product under test is moved to the lower part of the objective lens assembly 12 by interpolation and the above operation is performed to obtain the images of each part region of the DUT. The obtained images are as follows. Figure 3 As shown, B is the second starting position for image acquisition. It can be seen that when measuring the rotationally symmetric object 16, the rotated images exhibit high similarity, effectively improving recognition accuracy and reducing the complexity of defect detection (eliminating the need for subsequent image rotation and other adjustments). It should be noted that in this embodiment, the first light source 1 can be one of an infrared light source, a bright-field light source, or a dark-field light source; no limitation is imposed in this embodiment.

[0058] In summary, this manual is easy to use and lowers the barrier to entry.

[0059] When detecting regular, fine textures on an object's surface, the relative positional relationship between these textures and the camera's image sensor can easily cause moiré patterns. By rotating the optical path, the angle at which light enters the camera's image sensor can be changed, thereby breaking the fixed positional relationship between the textures and the image sensor, effectively reducing or eliminating moiré patterns. Therefore, this invention can effectively reduce moiré patterns, further improving image quality and making the detection results more accurate and reliable.

[0060] This disclosure improves the versatility and adaptability of the system by adjusting the parameters of the rotating optical path to meet the detection requirements of different texture features, angles, and directions.

[0061] Traditional methods for eliminating moiré patterns may require complex image processing algorithms or additional hardware. This application, however, achieves moiré pattern elimination through a simple design of a rotating optical path, requiring no additional computational resources or hardware costs, thus improving detection efficiency. Furthermore, when measuring a rotationally symmetric object 16, the rotated images exhibit high similarity, reducing the complexity of defect detection.

[0062] By introducing the imaging rotation component 5, the system can precisely rotate the imaging beam for multiple local areas of the object under test 16, thereby ensuring that each local area can be imaged at the optimal angle, greatly improving the detection accuracy. At the same time, the objective lens assembly 12 of the system can sequentially output beams to multiple local areas of the object under test 16, enabling the system to flexibly handle objects under test 16 of different shapes and sizes, and meet the detection needs of complex projects.

[0063] In one possible implementation, the imaging rotation component 5 includes a Dove prism.

[0064] like Figure 2 As shown, the Dowell prism can invert and rotate the image of the imaging unit, capturing a local area of ​​the object 16 under test at the same location. With the detection platform and imaging unit stationary, rotating the Dowell prism can change the position of the detection area in the camera's field of view. For example, if an arc is detected and 8 images are taken, 360° / 8 equals 45°. For each image of the workpiece being detected, rotating the Dowell prism rotates the image of the imaging unit by 45°, ensuring that the detection area is consistently positioned in the field of view. The image of the imaging unit rotates twice the angle of the prism rotation.

[0065] In one possible implementation, such as Figure 4 As shown, the imaging system also includes a second light source 2 and a second imaging unit 10;

[0066] Second light source 2, used to emit a second beam;

[0067] The objective lens assembly 12 is also used to sequentially output a second beam to multiple local areas of the object under test 16, and sequentially receive the second imaging beams of multiple local areas and output them to the imaging rotation assembly 5.

[0068] The imaging rotation component 5 is also used to rotate the second imaging beam of multiple local areas respectively and output it to the second imaging unit 10;

[0069] The second imaging unit 10 is used to image the second imaging beam in multiple local areas after rotation.

[0070] In one possible implementation, the imaging system further includes a third light source 3 and a third imaging unit 11;

[0071] The third light source 3 is used to emit the third beam;

[0072] The objective lens assembly 12 is also used to sequentially output a third beam to multiple local areas of the object under test 16, and sequentially receive the third imaging beams of multiple local areas and output them to the imaging rotation assembly 5.

[0073] The imaging rotation component 5 is also used to rotate the third imaging beam of multiple local regions respectively and output it to the third imaging unit 11;

[0074] The third imaging unit 11 is used to image the third imaging beam of multiple local regions after rotation.

[0075] In one possible implementation, the objective lens assembly 12 includes a first objective lens 121 and a second objective lens 122;

[0076] The first objective lens 121 is used to sequentially output a first beam and / or a second beam to multiple local areas of the object under test 16, and sequentially receive the imaging beams of multiple local areas of the object under test 16 and output them to the imaging rotation component 5.

[0077] The first objective lens 121 is a BD (BD Plane) objective lens. BD objectives are specifically designed for microscopes and have specific optical properties and uses. They are typically used to observe scratches, unevenness, and other detailed features on the surface of an object being measured.

[0078] BD objectives typically have a longer working distance, which allows for more space between the tip of the objective and the object being observed during the observation process, facilitating operation and observation. They employ an apochromatic lens design to correct various chromatic aberrations, ensuring image sharpness and accuracy. Furthermore, these objectives support both brightfield and darkfield observation methods, making them suitable for diverse observation needs and experimental conditions.

[0079] The second objective lens 122 is used to sequentially output a third beam to multiple local areas of the object under test 16, and sequentially receive the imaging beams of multiple local areas of the object under test 16 and output them to the imaging rotation assembly 5.

[0080] In one possible implementation, the imaging system also includes an optical wheel 4 and an objective lens switcher 123;

[0081] The light wheel 4 is used to switch the first beam and the third beam so that the objective lens outputs the first beam or the third beam to multiple local areas of the object under test 16 in sequence.

[0082] Objective lens switcher 123 is used to switch between the first objective lens 121 and the second objective lens 122.

[0083] In one possible implementation, the imaging system also includes a first beam splitter 6;

[0084] In one possible implementation, the first light source 1 is a bright-field light source, the second light source 2 is a dark-field light source, and the third light source 3 is an infrared light source. In this embodiment, the dark-field light source is positioned between the first objective lens 121 and the first beam splitter 6.

[0085] The first beam splitter 6 is used to reflect the first beam from the first light source 1 or the third beam from the third light source 3 to the objective lens, and to transmit the first imaging beam or the third imaging beam from multiple local areas of the objective lens to the imaging rotation assembly 5.

[0086] In one possible implementation, the imaging system also includes a second beam splitter 7 and a third beam splitter 8;

[0087] The second beam splitter 7 is used to reflect a portion of the imaging beam from the multiple local regions after rotation from the imaging rotation assembly 5 to the third imaging unit 11, and transmit the other portion to the third beam splitter 8.

[0088] The third beam splitter 8 is used to reflect a portion of the imaging beam from the second beam splitter 7 after another part of the beam has been rotated to the second imaging unit 10, and transmit the other portion to the first imaging unit 9.

[0089] In this disclosure, the imaging beam can originate from any of the following sources: infrared light source, visible light source, and dark field light source.

[0090] like Figure 4 As shown, the working principle of this embodiment is as follows:

[0091] In this embodiment, the first light source 1 is a visible light source, and the first imaging unit 9 is a visible light imaging unit; the second light source 2 is a dark field light source, and the second imaging unit 10 is a dark field imaging unit; the first objective lens 121 is a BD objective lens, the third light source 3 is an infrared light source, and the third imaging unit 11 is an infrared imaging unit; the second objective lens 122 is an infrared objective lens.

[0092] The light source is switched to the first light source 1 via the light wheel 4, and the first light source 1 is turned on to emit the first beam. The objective lens is set to the first objective lens 121 via the objective lens switcher 123. The first local area of ​​the test object 16 is moved below the objective lens assembly 12 by interpolation. The first beam illuminates the first local area of ​​the test object 16 through the objective lens assembly 12. The first imaging beam of the first local area is received by the objective lens assembly 12 and output to the imaging rotation assembly 5. The imaging rotation assembly 5 rotates the first imaging beams of multiple local areas and outputs them to the first imaging unit 9. The image in the first imaging unit 9 is observed, and the imaging rotation assembly 5 is rotated so that the image in the first imaging unit 9 reaches a preset angle. The first imaging unit 9 images the first imaging beams of the multiple local areas after rotation to obtain the visible light image of the first local area. Then, the second local area of ​​the test object 16 is moved below the objective lens assembly 12 by interpolation and the above operation is performed to obtain the visible light images of each local area of ​​the test object 16.

[0093] The first light source 1 is turned off, and the second light source 2 is turned on to emit a second beam. The product under test (DUT) is moved to the lower part of the first local area of ​​the DUT 16 by interpolation. The second beam illuminates the first local area of ​​the DUT 16 through the objective lens assembly 12 to provide supplementary lighting. The objective lens assembly 12 receives the second imaging beam of the first local area and outputs it to the imaging rotation assembly 5. The imaging rotation assembly 5 rotates the first imaging beams of multiple local areas and outputs them to the second imaging unit 10. The image in the second imaging unit 10 is observed, and the imaging rotation assembly 5 is rotated so that the image in the second imaging unit 10 reaches a preset angle. The second imaging unit 10 images the second imaging beams of the multiple local areas after rotation to obtain the dark field image of the first local area. Then, the product under test is moved to the lower part of the second local area of ​​the DUT 16 by interpolation and the above operation is performed to obtain the dark field images of each local area of ​​the DUT 16.

[0094] The second light source 2 is turned off, and the light source currently in use is switched to the third light source 3 via the light wheel 4. The third light source 3 is turned on to emit a third beam, and the objective lens currently in use is set to the second objective lens 122 via the objective lens switcher 123. The first local area of ​​the test object 16 is moved below the objective lens assembly 12 by interpolation. The third beam illuminates the first local area of ​​the test object 16 through the objective lens assembly 12 to provide supplementary lighting. The third imaging beam of the first local area is received by the objective lens assembly 12 and output to the imaging rotation assembly 5. The imaging rotation assembly 5 rotates the first imaging beams of multiple local areas respectively and outputs them to the third imaging unit 11. The image in the third imaging unit 11 is observed, and the imaging rotation assembly 5 is rotated so that the image in the third imaging unit 11 reaches a preset angle. The third imaging unit 11 images the third imaging beams of the multiple local areas after rotation to obtain the infrared image of the first local area. Then, the second local area of ​​the test object 16 is moved below the objective lens assembly 12 by interpolation and the above operation is performed to obtain the infrared images of each local area of ​​the test object 16 respectively.

[0095] This disclosure employs three imaging units to meet the infrared detection, bright field detection, and dark field detection requirements of the detection project, respectively. It is combined with an inverted prism to achieve image rotation. During bright field detection, the light source wheel 4 switches to white light to emit a coaxial light source. During dark field detection, the light source is turned off and the bright field camera acquires the image.

[0096] During dark-field detection, the white light source and infrared light source are not working; the dark-field light source provides illumination, the objective lens is switched to a conventional objective lens, and the dark-field camera acquires images.

[0097] Infrared detection: the light source wheel 4 switches to an infrared light source to emit coaxial infrared light, the objective lens switches to an infrared objective lens, and the infrared camera acquires images.

[0098] Therefore, this disclosure is comprehensive in function and can meet the needs of complex projects.

[0099] In this embodiment, the wavelength of the infrared light ranges from 750nm to 1200nm.

[0100] In one possible implementation, a first sleeve 13 is provided between the first imaging unit 9 and the third beam splitter 8, a second sleeve 14 is provided between the second imaging unit 10 and the third beam splitter 8, and a third sleeve 15 is provided between the third imaging unit 11 and the second beam splitter 7.

[0101] During installation, care should be taken to ensure that the optical axis of the Dowell prism and the optical axis of the sleeve are aligned during assembly. If the acquired image becomes dark, an intensifying lens needs to be added to the Dowell prism to ensure optical brightness. If vignetting occurs in the image during application, a larger size Dowell prism can be used instead.

[0102] In the description of this disclosure, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this disclosure. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly, for example, they can be fixed connections, detachable connections, or integral connections; they can be mechanical connections or electrical connections; they can be direct connections or indirect connections through an intermediate medium; they can be internal connections between two elements. For those skilled in the art, the specific meaning of the above terms in this disclosure can be understood according to the specific circumstances.

[0103] It should also be noted that, in the description of this disclosure, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes the element.

[0104] Obviously, the above embodiments of this disclosure are merely examples for clearly illustrating this disclosure, and are not intended to limit the implementation of this disclosure. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all implementation methods here. Any obvious variations or modifications derived from the technical solutions of this disclosure are still within the protection scope of this disclosure.

Claims

1. An imaging system, characterized in that, include: First light source, objective lens assembly, imaging rotation assembly, and first imaging unit; The first light source is used to emit the first beam of light; The objective lens assembly is used to sequentially output the first beam to multiple local areas of the object under test, and sequentially receive the first imaging beams of the multiple local areas and output them to the imaging rotation assembly. The imaging rotation component is used to rotate the first imaging beam of the plurality of local regions respectively and output it to the first imaging unit; The first imaging unit is used to image the first imaging beam of the rotated plurality of local regions; The imaging rotation assembly includes a Dove prism.

2. The imaging system according to claim 1, characterized in that, The imaging system also includes a second light source and a second imaging unit; The second light source is used to emit a second beam of light; The objective lens assembly is also used to sequentially output the second beam to multiple local areas of the object under test, sequentially receive the second imaging beams of the multiple local areas and output them to the imaging rotation assembly; The imaging rotation component is also used to rotate the second imaging beam of the plurality of local regions respectively and output it to the second imaging unit; The second imaging unit is used to image the second imaging beam of the multiple local regions after rotation.

3. The imaging system according to claim 2, characterized in that, The imaging system also includes a third light source and a third imaging unit; The third light source is used to emit a third beam of light; The objective lens assembly is also used to sequentially output the third beam to multiple local areas of the object under test, sequentially receive the third imaging beams of the multiple local areas and output them to the imaging rotation assembly; The imaging rotation component is also used to rotate the third imaging beam of the plurality of local regions respectively and output it to the third imaging unit; The third imaging unit is used to image the third imaging beam of the multiple local regions after rotation.

4. The imaging system according to claim 3, characterized in that, The objective lens assembly includes a first objective lens and a second objective lens; The first objective lens is used to sequentially output the first beam and / or the second beam to multiple local areas of the object under test, and sequentially receive the imaging beams of the multiple local areas of the object under test and output them to the imaging rotation assembly. The second objective lens is used to sequentially output the third beam to multiple local areas of the object under test, and sequentially receive the imaging beams of the multiple local areas of the object under test and output them to the imaging rotation component.

5. The imaging system according to claim 4, characterized in that, The imaging system also includes an optical wheel and an objective lens switcher; The optical wheel is used to switch between the first beam and the third beam so that the objective lens sequentially outputs the first beam or the third beam to multiple local areas of the object under test; The objective lens switcher is used to switch between the first objective lens and the second objective lens.

6. The imaging system according to claim 4 or 5, characterized in that, The first light source is a bright field light source, the second light source is a dark field light source, and the third light source is an infrared light source.

7. The imaging system according to claim 3, characterized in that, The imaging system also includes a first beam splitter; The first beam splitter is used to reflect a first beam from the first light source or a third beam from the third light source to the objective lens, and to transmit a first imaging beam or a third imaging beam from the plurality of local regions of the objective lens to the imaging rotation assembly.

8. The imaging system according to claim 3, characterized in that, The imaging system also includes a second beam splitter and a third beam splitter; The second beam splitter is used to reflect a portion of the imaging beam from the multiple local regions after rotation from the imaging rotation assembly to the third imaging unit, and transmit another portion to the third beam splitter. The third beam splitter is used to reflect a portion of the imaging beam from the second beam splitter after another part of it has been rotated to the second imaging unit, and to transmit the other portion to the first imaging unit.

9. The imaging system according to claim 8, characterized in that, A first sleeve is provided between the first imaging unit and the third beam splitter, a second sleeve is provided between the second imaging unit and the third beam splitter, and a third sleeve is provided between the third imaging unit and the second beam splitter.

Images