Chip epitaxial surface micro-processing equipment

Abstract

The utility model discloses chip epitaxial surface micro-processing equipment, which relates to the technical field of chip epitaxial surface micro-processing, and comprises a workbench, the top of the workbench is fixedly connected with a support frame, the top of the support frame is fixedly connected with a control end, the bottom of the control end is fixedly connected with a microprocessor main body, and the microprocessor main body is fixedly connected with a power supply. A micro-processing mechanism is movably connected to the bottom of the control end, a first groove is formed in the inner wall of the supporting frame, and a clamping device is movably connected into the first groove. The air cylinder is connected with the first annular push rod, the push block is pushed towards one side through the first annular push rod, so that the pinhole processor connected with the bottom can move on a chip board at the bottom, tiny flaws on the chip board are processed, the chip board is clamped by the contact layer, and the clamping distance is controlled by the hydraulic telescopic rod in the mounting box; and one end is connected with the rotator, and the rotator is installed, so that the clamped chip board can be overturned conveniently, and the device is more convenient to use.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip epitaxial surface microprocessing technical field, concretely relates to a chip epitaxial surface microprocessing equipment. BACKGROUND

[0002] Integrated circuit is circuit, mainly including semiconductor device, also including passive components such as miniaturization mode, using certain process, the transistor, resistance, capacitance and inductance etc. Component and wiring interconnection required in a circuit are interconnected together, made on a small piece or several small pieces of semiconductor wafer or dielectric substrate, then encapsulated in a tube shell, become the microstructure with required circuit function.

[0003] The existing microprocessing of chip epitaxial, when one side is processed, the other side needs to be processed, however, this needs the operator to take it down from the fixing device, and place it on the fixing device again after turning over, which not only increases the labor intensity and cumbersome operation steps, but also reduces the processing efficiency.

[0004] The existing technology has the following problems:

[0005] 1. The existing chip epitaxial surface microprocessing equipment is processed by the processor, but only for the larger defect area, and the small defect part of the chip plate cannot be processed more accurately, which causes improper processing and damage to the chip.

[0006] 2. The existing chip epitaxial surface microprocessing equipment is installed on the bottom support table, and the top machine is processed, which needs manual turning over for processing the other side of the chip plate, and a large amount of manual work is required, which is not convenient to use. UTILITY MODEL CONTENTS

[0007] To solve the above technical problems, the technical scheme adopted by the utility model is:

[0008] A chip epitaxial surface microprocessing equipment, comprising a workbench, a support frame is fixedly connected to the top of the workbench, a control end is fixedly connected to the top of the support frame, a microprocessor main body is fixedly connected to the bottom of the control end, a microprocessing mechanism is movably connected to the bottom of the control end, a first groove is formed in the inner wall of the support frame, a clamping device is movably connected in the first groove, a support rod is fixedly connected to the top of the workbench, and a placing plate is fixedly connected to the top of the support rod.

[0009] A further improvement of the present invention is that the microprocessor body includes a connection end, the top of the connection end is fixedly connected to the bottom of the control end, a first hydraulic lifting rod is fixedly connected to the bottom of the connection end, a processor grinding plate is fixedly connected to the bottom of the first hydraulic lifting rod, and a balance plate is fixedly connected to the top of the processor grinding plate.

[0010] A further improvement of this utility model is that: a second groove is provided at the bottom of the control terminal; the microprocessor mechanism includes a cylinder; a fixed tube is fixedly connected to the front end of the cylinder; a first annular push rod is fixedly connected to the output end of the cylinder; a push block is fixedly connected to one end of the first annular push rod; a second annular push rod is fixedly connected to one side of the push block; a second hydraulic lifting rod is fixedly connected to the bottom of the push block; and a pinhole processor is fixedly connected to the bottom of the second hydraulic lifting rod.

[0011] A further improvement of this utility model is that: the cylinder is engaged inside the second groove, the push block is slidably connected inside the second groove, and one end of the second annular push rod is connected to another set of push blocks.

[0012] A further improvement of the present invention is that the clamping device includes a third hydraulic lifting rod, a connecting block is fixedly connected to the top of the third hydraulic lifting rod, a rotator is fixedly connected to the front end of the connecting block, an installation box is fixedly connected to the front end of the rotator, a hydraulic telescopic rod is fixedly connected inside the installation box, a contact layer is fixedly connected to one end of the hydraulic telescopic rod, and sliders are fixedly connected to both sides of the connecting block.

[0013] A further improvement of this utility model is that: a sliding groove is provided on the inner wall of the first groove, and the slider is slidably connected to the inside of the sliding groove.

[0014] Due to the adoption of the above technical solution, the technological progress achieved by this utility model compared to the prior art is as follows:

[0015] 1. This utility model provides a chip epitaxial surface microprocessing device. The bottom of the control terminal is provided with an annular second groove, which makes the internal device easier to move. A cylinder is installed inside the second groove and is supported by a fixed tube, so that the push block moves along the fixed tube as a track, making the device easier to use. The cylinder is connected to a first annular push rod, which pushes the push block to one side, so that the pinhole processor connected to the bottom can move on the chip board at the bottom to process the small defects on the chip board, making the device easier to use.

[0016] 2, the utility model provides a chip epitaxial surface microprocessing equipment, the inside of support frame is equipped with first recess, is supported by third hydraulic lift lever inside, make the connecting block move in its inside, in order to make the device stable in the process of moving and be inserted in the inside of sliding slot by the slider of two sides, keep from shaking in the process of moving, contact layer clamps chip board, the inside hydraulic telescopic rod of installation box controls the distance of clamping, one end is connected with rotator, the installation of rotator is convenient to overturn the clamping chip board, make the device use more convenient. BRIEF DESCRIPTION OF DRAWINGS

[0017] Fig. 1 It is the structural diagram of the chip epitaxial surface microprocessing equipment of the utility model;

[0018] Fig. 2 It is the structural diagram of the microprocessor main body of the utility model;

[0019] Fig. 3 It is the structural diagram of the microprocessing mechanism of the utility model;

[0020] Fig. 4 It is the structural diagram of the clamping device of the utility model.

[0021] In the drawing: 1, workbench;2, support frame;3, control end;4, microprocessor main body;5, microprocessing mechanism;6, first recess;7, clamping device;8, support rod;9, placement plate;31, second recess;41, connecting end;42, first hydraulic lift lever;43, balance plate;44, processing machine grinding plate;51, air cylinder;52, fixed tube;53, first annular push rod;54, push block;55, second hydraulic lift lever;56, pinhole processor;57, second annular push rod;71, third hydraulic lift lever;72, connecting block;73, rotator;74, installation box;75, hydraulic telescopic rod;76, contact layer;77, sliding block;78, sliding slot. DETAILED DESCRIPTION

[0022] The utility model will be further explained in detail in connection with examples:

[0023] Example 1

[0024] As Figs. 1-4 The utility model discloses a chip epitaxial surface microprocessing equipment, including workbench 1, the top of workbench 1 is fixedly connected with support frame 2, the top of support frame 2 is fixedly connected with control end 3, the bottom of control end 3 is fixedly connected with microprocessor main body 4, the bottom of control end 3 is movably connected with microprocessing mechanism 5, the inner wall of support frame 2 is equipped with first recess 6, first recess 6 is movably connected with clamping device 7 in the inside, the top of workbench 1 is fixedly connected with support rod 8, the top of support rod 8 is fixedly connected with placement plate 9.

[0025] In this embodiment, the device is made more convenient to use through the combined action of the control terminal 3, the microprocessor body 4, the microprocessor mechanism 5, and the clamping device 7. The control terminal 3 is installed on the top of the support frame 2 and then connected to the bottom microprocessor body 4 for control, making it more convenient for the device to perform chip epitaxial processing. The chip is placed on the top of the placement plate 9 and then clamped and fixed on both sides by the clamping device 7. After fixing, the chip board is processed by the microprocessor body 4 connected to the bottom of the control terminal 3. At the same time, there is also a microprocessor mechanism 5 at the bottom, which makes the device more versatile in processing.

[0026] Example 2

[0027] like Figs. 1-4 As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, the microprocessor body 4 includes a connection end 41, the top of the connection end 41 is fixedly connected to the bottom of the control end 3, a first hydraulic lifting rod 42 is fixedly connected to the bottom of the connection end 41, a processor grinding plate 44 is fixedly connected to the bottom of the first hydraulic lifting rod 42, and a balance plate 43 is fixedly connected to the top of the processor grinding plate 44.

[0028] In this embodiment, the device is made more convenient to use through the combined action of the control terminal 3 and the microprocessor body 4. The bottom of the control terminal 3 is connected to the microprocessor body 4, and the bottom of the microprocessor body 4 is connected through the first hydraulic lifting rod 42, which makes it easy to adjust the height of the processor grinding plate 44 connected to the bottom. The top of the processor grinding plate 44 is also connected to the balance plate 43, which keeps the bottom device stable and does not shake during movement, so that the processor grinding plate 44 at the bottom of the device can perform a cleaner chip epitaxial process during grinding.

[0029] Example 3

[0030] like Figs. 1-4 As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, a second groove 31 is provided at the bottom of the control terminal 3, the microprocessor 5 includes a cylinder 51, a fixed tube 52 is fixedly connected to the front end of the cylinder 51, a first annular push rod 53 is fixedly connected to the output end of the cylinder 51, a push block 54 is fixedly connected to one end of the first annular push rod 53, a second annular push rod 57 is fixedly connected to one side of the push block 54, a second hydraulic lifting rod 55 is fixedly connected to the bottom of the push block 54, and a pinhole processor 56 is fixedly connected to the bottom of the second hydraulic lifting rod 55.

[0031] The cylinder 51 is engaged inside the second groove 31, the push block 54 is slidably connected inside the second groove 31, and one end of the second annular push rod 57 is connected to another set of push blocks 54.

[0032] In the embodiment, the device is more convenient to use through the cooperation of the control end 3 and the microprocessor mechanism 5, the bottom of the control end 3 is provided with an annular second groove 31, the second groove 31 makes the internal device more convenient to move, the air cylinder 51 is installed in the inside of the second groove 31 and is supported and connected through the fixed pipe 52, the push block 54 moves along the fixed pipe 52 as a track, the device is more convenient to use, the air cylinder 51 is connected with the first annular push rod 53, the push block 54 is pushed to one side through the first annular push rod 53, the pinhole processor 56 connected at the bottom can move on the chip board at the bottom, and the tiny defects on the chip board are treated, so that the device is more convenient to use.

[0033] Embodiment 4

[0034] As Figs. 1-4 shown, on the basis of the embodiment 1, the utility model provides a technical scheme: preferably, the clamping device 7 includes third hydraulic lifting rod 71, the top fixed connection has the connecting block 72 in third hydraulic lifting rod 71, the front end fixed connection has the rotator 73 in connecting block 72, the front end fixed connection has the installation box 74 in rotator 73, the inside fixed connection has the hydraulic telescopic rod 75 in installation box 74, one end fixed connection has the contact layer 76 in hydraulic telescopic rod 75, the both sides fixed connection has the sliding block 77 in connecting block 72.

[0035] The inner wall of the first groove 6 is provided with a sliding groove 78, and the sliding block 77 is slidingly connected in the inside of the sliding groove 78.

[0036] In the embodiment, through the cooperation of the support frame 2 and the clamping device 7, the device is more convenient to use, the inside of the support frame 2 is provided with the first groove 6, which is supported by the third hydraulic lifting rod 71, so that the connecting block 72 moves in the inside, in order to make the device stable during movement, the sliding block 77 is inserted in the inside of the sliding groove 78 on both sides, the contact layer 76 clamps the chip board, the inside of the installation box 74 controls the clamping distance of the hydraulic telescopic rod 75, one end is connected with the rotator 73, the rotator 73 is installed to facilitate the turning of the clamped chip board, so that the device is more convenient to use.

[0037] The working principle of the chip epitaxial surface micro-processing device will be described below.

[0038] As Figs. 1-4As shown, when the chip epitaxial surface microprocessing device is in use, the control end 3 is installed on the top of the support frame 2, and then the bottom microprocessor body 4 is connected to the control, so that the device is more convenient for processing the chip epitaxial, the chip is placed on the top of the placing plate 9, and then the two sides are clamped by the clamping device 7, after fixing, the chip plate is processed by the microprocessor body 4 connected to the bottom of the control end 3, and the bottom also has the microprocessing mechanism 5, so that the device processing is more diversified, the bottom of the microprocessor body 4 is connected through the first hydraulic lifting rod 42, so that the height of the processor grinding plate 44 connected at the bottom is convenient to adjust, the top of the processor grinding plate 44 is connected with the balance plate 43 at the same time, the balance plate 43 keeps the device stable during movement without shaking, so that the processor grinding plate 44 at the bottom of the device is more clean during polishing, the bottom of the control end 3 is provided with an annular second groove 31, the second groove 31 makes the internal device move more conveniently, the air cylinder 51 is installed in the second groove 31, and is supported and connected through the fixed pipe 52, so that the push block 54 moves along the fixed pipe 52 as a track, so that the device is more convenient to use, the air cylinder 51 is connected with the first annular push rod 53, the push block 54 is pushed to one side through the first annular push rod 53, so that the pinhole processor 56 connected at the bottom can move on the chip plate at the bottom, and the tiny defects on the chip plate are processed, so that the device is more convenient to use, the first groove 6 is arranged in the support frame 2, which is supported by the third hydraulic lifting rod 71, so that the connecting block 72 moves in the first groove 6, in order to keep the device stable during movement, the sliding block 77 is inserted into the sliding groove 78 at the two sides, the contact layer 76 clamps the chip plate, the hydraulic telescopic rod 75 in the installation box 74 controls the clamping distance, one end is connected with the rotator 73, and the rotator 73 is installed to conveniently overturn the clamped chip plate, so that the device is more convenient to use.

[0039] The above is a detailed description of the present application, but some modifications or improvements can be made on the basis of the present application, which is obvious to those skilled in the art. Therefore, without departing from the spirit of the present application, the modifications or improvements are within the scope of the present application.

Claims

1. An off-chip epitaxial surface microprocessing apparatus comprising a worktable (1), characterized in that: The top of the workbench (1) is fixedly connected with a support frame (2), the top of the support frame (2) is fixedly connected with a control end (3), the bottom of the control end (3) is fixedly connected with a microprocessor body (4), the bottom of the control end (3) is movably connected with a microprocessing mechanism (5), the inner wall of the support frame (2) is provided with a first groove (6), the inside of the first groove (6) is movably connected with a clamping device (7), the top of the workbench (1) is fixedly connected with a support rod (8), and the top of the support rod (8) is fixedly connected with a placing plate (9).

2. An off-chip epitaxial surface microprocessing device according to claim 1, wherein: The microprocessor body (4) includes a connecting end (41), the top of the connecting end (41) is fixedly connected with the bottom of the control end (3), the bottom of the connecting end (41) is fixedly connected with a first hydraulic lifting rod (42), the bottom of the first hydraulic lifting rod (42) is fixedly connected with a processor grinding plate (44), and the top of the processor grinding plate (44) is fixedly connected with a balance plate (43).

3. An off-chip epitaxial surface microprocessing device according to claim 1, wherein: The bottom of the control end (3) is provided with a second groove (31), the microprocessing mechanism (5) includes a gas cylinder (51), the front end of the gas cylinder (51) is fixedly connected with a fixed pipe (52), the output end of the gas cylinder (51) is fixedly connected with a first annular push rod (53), one end of the first annular push rod (53) is fixedly connected with a push block (54), one side of the push block (54) is fixedly connected with a second annular push rod (57), the bottom of the push block (54) is fixedly connected with a second hydraulic lifting rod (55), and the bottom of the second hydraulic lifting rod (55) is fixedly connected with a pinhole processor (56).

4. An off-chip epitaxial surface microprocessing device according to claim 3, wherein: The gas cylinder (51) is clamped in the inside of the second groove (31), the push block (54) is slidably connected in the inside of the second groove (31), and one end of the second annular push rod (57) is connected with another group of push blocks (54).

5. An off-chip epitaxial surface microprocessing device according to claim 1, wherein: The clamping device (7) includes a third hydraulic lifting rod (71), the top of the third hydraulic lifting rod (71) is fixedly connected with a connecting block (72), the front end of the connecting block (72) is fixedly connected with a rotator (73), the front end of the rotator (73) is fixedly connected with a mounting box (74), the inside of the mounting box (74) is fixedly connected with a hydraulic telescopic rod (75), one end of the hydraulic telescopic rod (75) is fixedly connected with a contact layer (76), and the two sides of the connecting block (72) are fixedly connected with sliding blocks (77).

6. An off-chip epitaxial surface microprocessing device according to claim 5, wherein: The inner wall of the first groove (6) is provided with a sliding groove (78), and the sliding blocks (77) are slidably connected in the inside of the sliding groove (78).

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