Linear cutting driving main shaft, linear cutting device and machine tool
By eliminating the roller structure and mechanical spindle motor through the design of an external rotor electric spindle and directly winding diamond wire, the problems of complex structure and high cost of multi-wire EDM machines are solved, resulting in a reduction in machine size and cost, as well as an improvement in cutting accuracy and yield.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-03-03
AI Technical Summary
Existing multi-wire cutting machine tools are complex, bulky, and costly, and their cutting accuracy and product yield are insufficient.
It adopts an external rotor electric spindle design, eliminating the roller structure and the rear motor of the mechanical spindle. Diamond wire is directly wound on the outer cylindrical surface of the spindle rotation, reducing the number of spindles by half. A labyrinth seal structure and stator cooling tank are used to improve accuracy and lifespan.
Significantly reduce machine tool size and cost, improve cutting accuracy and product yield, and extend equipment life.
Smart Images
Figure CN223961494U_ABST
Abstract
Description
Technical Field
[0001] This utility model is applicable to the field of machine tool equipment, and in particular relates to a wire EDM drive spindle, a wire EDM device, and a machine tool. Background Technology
[0002] Multi-wire cutting is a cutting method for hard and brittle materials such as semiconductors. It uses the high-speed reciprocating motion of diamond wires to bring abrasive into the workpiece's processing area for grinding, simultaneously cutting the workpiece of hard and brittle materials such as semiconductors into hundreds of thin slices in one go. Currently, CNC multi-wire cutting machines have gradually replaced traditional internal circle cutting and become the main method for silicon wafer cutting.
[0003] Most current multi-wire cutting machines have six mechanical spindles, which are installed in three opposing groups. The mechanical spindles have a motor installed at the rear end and a roller connected in the middle. This structure is used to wind diamond wire for cutting silicon rods or semiconductors. This structural design makes the entire machine tool complex, bulky and cumbersome, and significantly increases the cost of the machine tool. Utility Model Content
[0004] The purpose of this utility model is to solve at least one of the technical problems existing in the prior art, and to provide a wire EDM drive spindle, a wire EDM device and a machine tool.
[0005] The technical solution adopted by this utility model to solve its technical problem is:
[0006] In a first aspect, a wire cutting drive spindle includes a spindle core, a body, and a motor. The body has an inner hole for the spindle core, and the spindle core is disposed in the inner hole. The body is supported on the spindle core by bearings. The motor includes an inner stator and an outer rotor. The inner stator is disposed on the spindle core, and the outer rotor is disposed in the inner hole of the body corresponding to the inner stator. The body has an outer cylindrical surface coaxial with the spindle core, and the outer cylindrical surface has a helical groove.
[0007] In conjunction with the first aspect, in some implementations of the first aspect, the bearing includes a first bearing supported at one end of the machine body and a second bearing supported at the other end of the machine body, and the motor is disposed between the first bearing and the second bearing.
[0008] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, one end of the shaft core is provided with a first shoulder, one end of the inner hole of the shaft core is provided with a flange, the inner ring of the first bearing is axially locked to the first shoulder by a first inner pressure cover, the outer ring of the first bearing is axially locked to the flange by a first outer pressure cover, the other end of the shaft core is provided with a second shoulder, the inner ring of the second bearing is axially locked to the second shoulder by a second inner pressure cover, and the outer ring of the second bearing is axially locked by a second outer pressure cover.
[0009] In combination with the first aspect and the above-described implementation, in some implementations of the first aspect, a labyrinth seal structure is formed between the first inner pressure cover and the first outer pressure cover, and a labyrinth seal structure is formed between the second inner pressure cover and the second outer pressure cover.
[0010] In combination with the first aspect and the above-mentioned implementation methods, in some implementation methods of the first aspect, the outer peripheral surface of the shaft core is provided with a stator cooling groove, a stator sleeve is fitted outside the stator cooling groove, the inner stator is disposed outside the stator sleeve, and the shaft core is provided with a liquid inlet hole and a liquid outlet hole communicating with the stator cooling groove.
[0011] In combination with the first aspect and the above-described implementations, in some implementations of the first aspect, the shaft core is provided with a wiring hole, and the wiring hole is provided with a wire connected to the inner stator.
[0012] In a second aspect, a wire cutting apparatus includes a diamond wire and a wire cutting drive spindle as described in any implementation of the first aspect, wherein the diamond wire is disposed in the helical groove and is driven by the wire cutting drive spindle.
[0013] In conjunction with the second aspect, in some implementations of the second aspect, the wire cutting device includes a first vertical plate and a second vertical plate, with a gap between the first vertical plate and the second vertical plate. The wire cutting drive spindle includes a first wire cutting drive spindle, a second wire cutting drive spindle, and a third wire cutting drive spindle. The first wire cutting drive spindle, the second wire cutting drive spindle, and the third wire cutting drive spindle are mounted on the first vertical plate and the second vertical plate at both ends via their respective shaft cores. The first wire cutting drive spindle, the second wire cutting drive spindle, and the third wire cutting drive spindle are arranged in parallel and in a triangular distribution. The first wire cutting drive spindle, the second wire cutting drive spindle, and the third wire cutting drive spindle form a drive spindle group. The diamond wire passes sequentially around the spiral grooves of the first wire cutting drive spindle, the second wire cutting drive spindle, and the third wire cutting drive spindle from the outside of the drive spindle group.
[0014] In combination with the second aspect and the above-described implementations, in some implementations of the second aspect, the wire cutting device includes a first wire reel and a second wire reel, wherein the diamond wire is led out from the first wire reel, passes around the drive spindle assembly, and is then retrieved by the second wire reel.
[0015] Thirdly, a machine tool comprising the wire cutting apparatus described in any implementation of the second aspect.
[0016] One of the above technical solutions has at least one of the following advantages or beneficial effects: In the technical solution of this utility model, the wire EDM drive spindle adopts an external rotor electric spindle. During use, diamond wire can be directly wound on the outer cylindrical surface of the machine body where the spindle rotates, thereby driving the diamond wire to reciprocate at high speed. This technical solution design can eliminate the roller structure and the motor at the rear end of the mechanical spindle, and the number of spindles can be reduced by half. This greatly reduces the size of the machine tool, and the overall weight and cost of the machine tool are also significantly reduced. At the same time, because there are no redundant connecting structures, the overall cutting accuracy and product yield are also greatly improved.
[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description
[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:
[0019] Figure 1 This is a schematic diagram of an embodiment of the wire cutting drive spindle of this utility model;
[0020] Figure 2 This is a schematic diagram of an embodiment of the wire cutting device of this utility model;
[0021] Figure 3 This is an isometric view of the wire cutting drive spindle arrangement structure of one embodiment of the wire cutting device of this utility model;
[0022] Figure 4 This is a front view of the wire cutting drive spindle arrangement structure of one embodiment of the wire cutting device of this utility model. Detailed Implementation
[0023] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.
[0024] In this utility model, when directions (up, down, left, right, front, and back) are described, it is only for the convenience of describing the technical solution of this utility model, and does not indicate or imply that the technical features referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this utility model.
[0025] In this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," "exceeding," etc. are understood to exclude the stated number; "above," "below," "within," etc. are understood to include the stated number. In the description of this utility model, if "first" or "second" is used, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of the indicated technical features.
[0026] In this utility model, unless otherwise explicitly defined, terms such as "set," "install," and "connect" should be interpreted broadly. For example, they can refer to a direct connection or an indirect connection through an intermediate medium; a fixed connection, a detachable connection, or an integrally formed connection; a mechanical connection, an electrical connection, or a connection capable of mutual communication; or the internal connection of two components or the interaction between two components. Those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model based on the specific content of the technical solution.
[0027] An embodiment of this utility model provides a wire EDM drive spindle, which can be used to drive diamond wire in wire EDM equipment.
[0028] See Figure 1 The wire EDM drive spindle 100 includes a spindle core 101, a body 102, and a motor. The body 102 has a spindle core inner hole 103. The spindle core 101 serves as the support structure for the wire EDM drive spindle 100 and is located within the spindle core inner hole 103. The body 102 is supported on the spindle core 101 by bearings. The motor includes an inner stator 104 and an outer rotor 105. The inner stator 104 is located on the spindle core 101, and the outer rotor 105 is located within the spindle core inner hole 103 of the body 102, corresponding to the inner stator 104. The body 102 can rotate around the spindle core 101 under the action of the inner stator 104 and the outer rotor 105. The body 102 has an outer cylindrical surface 106 coaxial with the spindle core 101, and the outer cylindrical surface 106 has a helical groove. Figure 2 , Figure 3 , Figure 4 The spiral groove can be used to arrange the diamond wire 200, thereby driving the diamond wire 200 to move during the rotation of the machine body 102, and further cutting silicon rods or semiconductors through the diamond wire 200.
[0029] See Figures 1-4In this invention, the wire EDM drive spindle 100 uses an external rotor electric spindle. During operation, diamond wire 200 is directly wound onto the outer cylindrical surface 106 of the rotating spindle body 102, thereby driving the diamond wire 200 to reciprocate at high speed. This design eliminates the need for a roller structure and the motor at the rear end of the mechanical spindle, while also reducing the number of spindles by half. This significantly reduces the size of the machine tool, as well as its overall weight and cost. Furthermore, the absence of unnecessary connecting structures greatly improves the overall cutting accuracy and product yield.
[0030] In some embodiments, see Figure 1 The bearing includes a first bearing 107 supported at one end of the body 102 and a second bearing 108 supported at the other end of the body 102. The motor is disposed between the first bearing 107 and the second bearing 108. One or more of the first bearing 107 and the second bearing 108 may be provided. The body 102 is stably supported on the shaft core 101 by the first bearing 107 and the second bearing 108 at both ends, and can rotate around the shaft core 101 under the drive of the built-in external rotor 105 motor.
[0031] Further, see Figure 1 One end of the shaft core 101 is provided with a first shoulder 109, and one end of the inner hole 103 of the shaft core is provided with a flange 110. The inner ring of the first bearing 107 is axially locked to the first shoulder 109 by a first inner pressure cover 111, and the outer ring of the first bearing 107 is axially locked to the flange 110 by a first outer pressure cover 112. The other end of the shaft core 101 is provided with a second shoulder 113, and the inner ring of the second bearing 108 is axially locked to the second shoulder 113 by a second inner pressure cover 115, and the outer ring of the second bearing 108 is axially locked by a second outer pressure cover 116. The bearings are precisely and securely positioned and installed axially, effectively improving the machining accuracy of the entire wire EDM drive spindle 100.
[0032] Furthermore, in some embodiments, see Figure 1 A labyrinth seal structure 117 is formed between the first inner pressure cover 111 and the first outer pressure cover 112, and a labyrinth seal structure 117 is also formed between the second inner pressure cover 115 and the second outer pressure cover 116. The labyrinth seal structure 117 effectively prevents external particles, oil, water and other impurities from entering the wire EDM drive spindle 100, thus extending the service life of the wire EDM drive spindle 100.
[0033] In some embodiments, see Figure 1The outer circumferential surface of the shaft core 101 is provided with a stator cooling groove 118. A stator sleeve is fitted outside the stator cooling groove 118, and the inner stator 104 is disposed outside the stator sleeve. The shaft core 101 is provided with a liquid inlet hole 120 and a liquid outlet hole 121 communicating with the stator cooling groove 118. The wire EDM drive spindle 100 generates a large amount of heat during operation, especially the inner stator 104. In this embodiment, coolant can be introduced through the liquid inlet hole 120 of the shaft core 101. The coolant flows along the stator cooling groove 118, exchanges heat with the outer inner stator 104, and then flows out through the liquid outlet hole 121, thereby carrying away the heat of the inner stator 104.
[0034] In some embodiments, see Figure 1 The shaft core 101 is provided with a wiring hole 122, which is provided with a wire connected to the inner stator 104. The shaft core 101 remains stationary when the wire cutting drive spindle 100 is working. By providing a wiring hole 122 for arranging wires inside the shaft core 101, the structure of the wire cutting drive spindle 100 can be simplified.
[0035] See Figures 2-4 The present invention also provides a wire cutting device, including a diamond wire 200 and a wire cutting drive spindle 100 as described in any of the above embodiments. The diamond wire 200 is disposed in a spiral groove and is driven by the wire cutting drive spindle 100.
[0036] In this invention, the wire EDM drive spindle 100 uses an external rotor electric spindle. During operation, diamond wire 200 is directly wound onto the outer cylindrical surface 106 of the rotating spindle body 102, thereby driving the diamond wire 200 to reciprocate at high speed. This design eliminates the need for a roller structure and the motor at the rear end of the mechanical spindle, while also reducing the number of spindles by half. This significantly reduces the size of the machine tool, as well as its overall weight and cost. Furthermore, the absence of unnecessary connecting structures greatly improves the overall cutting accuracy and product yield.
[0037] It is understood that one or more wire cutting drive spindles 100 can be provided. When one wire cutting drive spindle 100 is provided, the wire cutting device can be further provided with one or more driven shafts for co-winding and arranging the diamond wire 200 of the wire cutting drive spindle 100.
[0038] In some embodiments, see Figures 2-4The wire cutting device includes a first vertical plate 301 and a second vertical plate 302, with a gap between the first vertical plate 301 and the second vertical plate 302. The wire cutting drive spindle 100 includes a first wire cutting drive spindle 123, a second wire cutting drive spindle 124, and a third wire cutting drive spindle 125. The first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125 are mounted on the first vertical plate 301 and the second vertical plate 302 at both ends through their respective shaft cores 101. The first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125 are arranged in parallel and in a triangular distribution. The first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125 form a drive spindle group. The diamond wire 200 passes sequentially around the spiral grooves of the first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125 from the outside of the drive spindle group. The first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125 rotate synchronously in the same direction during operation, jointly driving the diamond wire 200. During operation, the first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125, arranged in a triangular configuration, can spread the diamond wire 200. The diamond wires 200 of the two adjacent wire cutting drive spindles at the top are used to cut the workpiece, allowing the workpiece to move along... Figure 3 , Figure 4 The material is fed in the direction of the arrow. The first wire cutting drive spindle 123, the second wire cutting drive spindle 124, and the third wire cutting drive spindle 125 form a triangular prism-shaped internal space to provide as much clearance as possible for the cut workpiece.
[0039] In some embodiments, the wire EDM device includes a first wire reel and a second wire reel (not shown in the figure). The diamond wire 200 is led out from the first wire reel, passes around the drive spindle assembly, and is retrieved by the second wire reel. During cutting, the first wire EDM drive spindle 123, the second wire EDM drive spindle 124, and the third wire EDM drive spindle 125 rotate in a first direction. The diamond wire 200 can move along the winding direction under the drive of the first wire EDM drive spindle 123, the second wire EDM drive spindle 124, and the third wire EDM drive spindle 125, be released from the first wire reel, and be retrieved by the second wire reel, thereby completing the cutting of the workpiece.
[0040] An embodiment of this utility model also provides a machine tool, including the wire cutting device in any of the above embodiments.
[0041] In the description of this specification, references to terms such as "example," "embodiment," or "some embodiments" indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0042] Of course, the present invention is not limited to the above-described embodiments. Those skilled in the art can make equivalent modifications or substitutions without departing from the spirit of the present invention, and these equivalent modifications or substitutions are all included within the scope defined by the claims of this application.
Claims
1. A wire cutting drive spindle, characterized in that, The motor comprises a shaft core, a body and a motor, the body is provided with a shaft core inner hole, the shaft core is arranged in the shaft core inner hole, the body is supported on the shaft core through a bearing, the motor comprises an inner stator and an outer rotor, the inner stator is arranged in the shaft core, the outer rotor is arranged in the shaft core inner hole of the body corresponding to the inner stator, the body is provided with an outer cylindrical surface coaxial with the shaft core, and the outer cylindrical surface is provided with a spiral groove.
2. The wire cutting drive spindle of claim 1, wherein, The bearing comprises a first bearing supported on one end of the body and a second bearing supported on the other end of the body, and the motor is arranged between the first bearing and the second bearing.
3. The wire cutting drive spindle of claim 2, wherein, One end of the shaft core is provided with a first shaft shoulder, one end of the shaft core inner hole is provided with a flange, the inner ring of the first bearing is locked to the first shaft shoulder in the axial direction through a first inner pressure cover, the outer ring of the first bearing is locked to the flange in the axial direction through a first outer pressure cover, the other end of the shaft core is provided with a second shaft shoulder, the inner ring of the second bearing is locked to the second shaft shoulder in the axial direction through a second inner pressure cover, and the outer ring of the second bearing is locked in the axial direction through a second outer pressure cover.
4. The wire cutting drive spindle of claim 3, wherein, The first inner pressure cover and the first outer pressure cover form a labyrinth seal structure matched with each other, and the second inner pressure cover and the second outer pressure cover form a labyrinth seal structure matched with each other.
5. The wire cutting drive spindle of claim 1, wherein, The outer circumferential surface of the shaft core is provided with a stator cooling groove, a stator sleeve is sleeved outside the stator cooling groove, the inner stator is arranged outside the stator sleeve, and the shaft core is provided with a liquid inlet hole and a liquid outlet hole communicating with the stator cooling groove.
6. The wire cutting drive spindle of claim 1, wherein, The shaft core is provided with a wire hole, and the wire hole is provided with a wire connected with the inner stator.
7. A wire saw, characterized in that The wire cutting device comprises a first vertical plate and a second vertical plate, a space is left between the first vertical plate and the second vertical plate, the wire cutting device comprises a first wire cutting driving spindle, a second wire cutting driving spindle and a third wire cutting driving spindle, the first wire cutting driving spindle, the second wire cutting driving spindle and the third wire cutting driving spindle are installed on the first vertical plate and the second vertical plate at both ends through respective shaft cores, the first wire cutting driving spindle, the second wire cutting driving spindle and the third wire cutting driving spindle are arranged in parallel and in a triangular distribution, the first wire cutting driving spindle, the second wire cutting driving spindle and the third wire cutting driving spindle form a driving spindle group, and the diamond wire sequentially passes through the spiral grooves of the first wire cutting driving spindle, the second wire cutting driving spindle and the third wire cutting driving spindle from the outside of the driving spindle group.
8. The wire cutting device of claim 7, wherein, The wire cutting device comprises a first wire wheel and a second wire wheel, the diamond wire is led out from the first wire wheel, passes through the driving spindle group and is recycled by the second wire wheel.
9. The wire cutting device of claim 8, wherein, The wire cutting device comprises a first wire wheel and a second wire wheel, the diamond wire is led out from the first wire wheel, passes through the driving spindle group and is recycled by the second wire wheel.
10. A machine tool, characterized by The wire cutting device comprises a first wire wheel and a second wire wheel, the diamond wire is led out from the first wire wheel, passes through the driving spindle group and is recycled by the second wire wheel.