Flow beam full-coverage light resistance method particle counter

Abstract

The utility model discloses a flow beam full coverage light resistance method particle counter, which comprises a sampling port, a support frame and a discharge channel, the sampling port is arranged above the support frame, the discharge channel is arranged below the support frame, a flow channel is arranged inside the support frame, the flow channel comprises a leading-in section, a measuring section and a leading-out section, the thickness of the leading-in section and the thickness of the leading-out section are both smaller than the width of the cross section of the measuring section. According to the utility model, the thickness of the leading-in section and the thickness of the leading-out section of the flow channel are reasonably adjusted, so that particulate matters carried by a flow beam completely pass through a measurement area, the problem of missing measurement is avoided, and the comprehensiveness and the reliability of measurement are improved.

Description

Technical Field

[0001] This utility model relates to the field of particle counting technology, and in particular to a photoresist particle counter with full beam coverage. Background Technology

[0002] An optical obscuration particle counter is a device used to measure the particle size in a fluid (gas or liquid). Its working principle is based on the attenuation and scattering of light on particles. Existing optical obscuration particle counters have several key technical problems. For example, the particle size measured by current techniques is usually the light-attenuated equivalent particle size, which does not necessarily reflect the true geometric size of the particle. This means that the measurement results may deviate from the actual particle size. Secondly, the measurement results are significantly affected by the optical properties of the particles (such as refractive index and absorption coefficient). Particles of the same geometric size may give different particle size values ​​due to different optical properties. Furthermore, the measurement results are closely related to the position of the particle in the measurement area. Even particles of the same size and with the same optical properties will lead to different measurement results depending on their location within the measurement area.

[0003] Currently, some innovative solutions to the above problems have been found in optical obscuration particle counters. However, during the measurement process, because the thickness of the internal flow stream of the optical obscuration particle counter is always equal to the width of the flow channel, while the width of the measurement area is always less than the width of the flow channel, some particles in the flow stream do not enter the measurement area, resulting in missed measurements. Utility Model Content

[0004] In view of this, this utility model proposes a photoresist particle counter with full beam coverage, which improves the accuracy of the true particle size by reasonably adjusting the beam thickness and the lead-out section thickness. The technical solution of this utility model is as follows:

[0005] This invention proposes a photoresist particle counter with full beam coverage, comprising a sampling port, a flow channel, a support frame, and a discharge channel. The sampling port is located above the support frame, the discharge channel is located below the support frame, and the flow channel is located inside the support frame. The flow channel includes an inlet section, a measuring section, and an outlet section. The thickness of the inlet section and the thickness of the outlet section are both smaller than the cross-sectional width of the measuring section.

[0006] Specifically, the sampling port, the inlet section, the measurement section, the outlet section, and the discharge channel are connected in sequence.

[0007] Specifically, the input segment is a cuboid, the measurement segment is a cylinder, and the output segment is a cuboid.

[0008] Specifically, the optical resist particle counter further includes an optical emitting component and an optical receiving component, with the optical emitting component disposed at one end of the measuring section and the optical receiving component disposed at the other end of the measuring section.

[0009] Specifically, the optical emitting component, the measuring segment, and the optical receiving component are connected in sequence.

[0010] Specifically, the light emitting component includes a light source, a lens, and a beam-limiting aperture.

[0011] Specifically, the light receiving component includes a converging lens, a pinhole aperture, and a detector.

[0012] Specifically, the light emitting component emits a light beam that passes through the measuring segment and reaches the light receiving component.

[0013] Specifically, the measurement segment includes a measurement area, which is the space occupied by the light beam in the measurement segment.

[0014] This invention ensures that all particles carried by the flow stream pass through the measurement area by reasonably adjusting the thickness of each section of the flow channel, thus avoiding missed measurements and improving the comprehensiveness and reliability of the measurement. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one embodiment of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Identical parts are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to directions in the accompanying drawings, while the terms "bottom surface," "top surface," "inner," and "outer" refer to directions toward or away from the geometric center of a specific part, respectively.

[0017] Figure 1 This is a front view of an embodiment of the present utility model;

[0018] Figure 2 This is a cross-sectional view of an embodiment of the present utility model;

[0019] Figure 3 This is a schematic diagram of the measurement area in an embodiment of this utility model.

[0020] The meanings of the reference numerals in the above figures are as follows:

[0021] 1. Sealing components;

[0022] 2. Light source;

[0023] 3. Lens;

[0024] 4. Beam limiting aperture;

[0025] 5. Measurement area;

[0026] 6. Converging lens;

[0027] 7. Small aperture;

[0028] 8. Detector;

[0029] 9. Sampling port;

[0030] 10. Flow;

[0031] 11. Support frame;

[0032] 12. Introduction section;

[0033] 13. Measurement section;

[0034] 14. Derived segment;

[0035] 15. Discharge tract;

[0036] 16. Fan;

[0037] H0, width of the import segment;

[0038] H1, Exported segment width;

[0039] H, diameter of the measuring section;

[0040] W, the width of the cross-section of the measurement area;

[0041] θ F Zhang Jiao. Detailed Implementation

[0042] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments and accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0043] Unless otherwise defined, all technical and scientific terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains; the terminology used in the detailed description is for the purpose of describing particular embodiments only and is not intended to limit the invention; the terms “comprising” and “having” and any variations thereof in the specification, claims and foregoing description of the invention are intended to cover non-exclusive inclusion.

[0044] In the description of the specific embodiments of this utility model, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this utility model, "multiple" means two or more, unless otherwise explicitly defined.

[0045] In this invention, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this invention. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this invention can be combined with other embodiments.

[0046] In the description of this utility model embodiment, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, in this utility model, the character " / " generally indicates that the preceding and following related objects have an "or" relationship.

[0047] Throughout this invention, numerical values ​​represent approximate measurements or limits of a range to cover minute deviations from a given value, as well as embodiments having approximately the mentioned value and embodiments having the exact mentioned value. Except for the working examples provided at the end of the detailed description, all numerical values ​​of parameters, quantities, or conditions in the appended claims should be understood to be modified in all cases by the term “about,” regardless of whether “about” actually appears before the numerical value. “About” indicates that the stated numerical value allows for some minute inaccuracy that is somewhat close to the exact value of the value; approximately or reasonably close to the value; almost. If the inaccuracy provided by “about” is not otherwise understood in this common sense in the art, then “about” as used in this invention at least indicates a variation that can be produced by common methods of measuring and using such parameters. For example, “about” may include a variation of less than or equal to 5%, optionally less than or equal to 4%, optionally less than or equal to 3%, optionally less than or equal to 2%, optionally less than or equal to 1%, optionally less than or equal to 0.5%, and in some respects, optionally less than or equal to 0.1%.

[0048] Additionally, the disclosure of the range includes the disclosure of all values ​​across the entire range and the disclosure of further subdivided ranges, including the endpoints and subranges given for these ranges.

[0049] The embodiments of the present invention will be described in more detail below through examples. It should be noted that the embodiments of the present invention are not limited to these examples.

[0050] An optical obscuration particle counter is a device used to measure the particle size in a fluid (gas or liquid). Its working principle is based on the attenuation and scattering of light on particles. Existing optical obscuration particle counters have several key technical problems. For example, the particle size measured by current techniques is usually the light-attenuated equivalent particle size, which does not necessarily reflect the true geometric size of the particle. This means that the measurement results may deviate from the actual particle size. Secondly, the measurement results are significantly affected by the optical properties of the particles (such as refractive index and absorption coefficient). Particles of the same geometric size may give different particle size values ​​due to different optical properties. Furthermore, the measurement results are closely related to the position of the particle in the measurement area. Even particles of the same size and with the same optical properties will lead to different measurement results depending on their location within the measurement area.

[0051] Currently, some innovative solutions to the above problems have been found in optical obscuration particle counters. However, during the measurement process, because the thickness of the internal flow stream of the optical obscuration particle counter is always greater than the width of the measurement area, some particles in the flow stream do not enter the measurement area, resulting in missed measurements.

[0052] Therefore, this application discloses a photoresist particle counter with full beam coverage that can solve the above problems.

[0053] In one specific embodiment, such as Figures 1-3 As shown, a photoresist particle counter with full beam coverage includes a sampling port 9, a beam 10, a support frame 11, and an exhaust channel 15. The sampling port 9 is located above the support frame 11, and the exhaust channel 15 is located below the support frame 11. The beam channel is located inside the support frame 11 and consists of an inlet section 12, a measuring section 13, and an outlet section 14. The thickness of the inlet section 12 and the thickness of the outlet section 14 are both smaller than the cross-sectional width of the measuring section 13.

[0054] In this embodiment, the sampling port 9, the inlet section 12, the measurement section 13, the outlet section 14, and the discharge channel 15 are connected in sequence.

[0055] Furthermore, the import segment 12 is a cuboid, the measurement segment 13 is a cylinder, and the export segment 14 is a cuboid.

[0056] In some embodiments, the photoresist particle counter further includes a light emitting component and a light receiving component, with the light emitting component disposed at one end of the measuring section 13 and the light receiving component disposed at the other end of the measuring section.

[0057] In some implementations, the optical emitting component, the measuring section 13, and the optical receiving component are connected in sequence.

[0058] In some embodiments, the light emitting component includes a light source 2, a lens 3, and a beam-limiting aperture 4, and the light source is generally a monochromatic point light source.

[0059] In some embodiments, the light receiving component includes a converging lens 6, a pinhole aperture 7, and a detector 8.

[0060] In some implementations, the light emitting component emits a light beam that passes through the measuring segment 12 to reach the light receiving component.

[0061] Specifically, a monochromatic point light source 2 emits a diverging beam, which becomes parallel light after passing through lens 3. After passing through the beam-limiting aperture 4, the cross-sectional shape of the beam is cut to the same shape as the light-passing aperture of the beam-limiting aperture 4. The cut beam is the incident beam of the measuring optical system.

[0062] In some implementations, the measurement segment includes a measurement area 5, which is the space occupied by the light beam in the measurement segment.

[0063] Specifically, the area enclosed by the beam-limiting aperture 4, the converging lens 6, and the sealing element 1 is the measurement section through which the fluid being measured (carrying the particles being measured) passes. (See attached image) Figure 3The measuring section 13 is a cross-section perpendicular to the flow beam, so the flow direction of the fluid is perpendicular to the plane of the paper (inward or outward). The incident light beam propagates from left to right along the center of the flow beam. The space occupied by the light beam in the measuring section 13 of the flow channel is the measuring area 5 of the instrument.

[0064] In this embodiment, when there are no particles in the measurement area 5, the incident light, after passing through the converging lens 6, is focused entirely onto the center of the pinhole aperture 7 and passes through this center to reach the detector 8. When particles enter the measurement area 5, they cause light scattering or absorption. After passing through the converging lens 6, the scattered light with the same scattering angle will be converged to the same position on the pinhole aperture 7. Generally speaking, the angle subtended by the aperture radius of the pinhole aperture 7 with respect to the optical center of the converging lens is θ. F .

[0065] Specifically, θ F The size of the aperture should satisfy the following conditions: the proportion of geometrically scattered light passing through the aperture is negligible, while the vast majority of diffracted light can pass through the aperture, that is, the proportion blocked by the aperture is negligible. Thus, for detector 8, the light attenuation caused by the particles is approximately equal to the light attenuation caused by geometric scattering, and the extinction coefficient is approximately 1.

[0066] To further explain, the incident light passes through the middle of the measurement section 13, forming the measurement area 5. The cross-sectional diameter of the measurement section 13 is H, and the cross-section of the measurement area 5 is rectangular (other shapes are also acceptable), with a width of W. This ensures that the angle generated by a particle at any position within the measurement area 5 is less than θ. F For all diffracted light to enter the aperture, the following formula (1) must be satisfied:

[0067] H≥W+2Ltanθ F (1)

[0068] Where L is the width of the flow channel measurement section 13 and W is the width of the measurement area 5. Therefore, only when the thickness of the flow stream 10 is less than or equal to the width of the measurement area 5 can it be guaranteed that all particles in the flow stream enter the measurement area without any omissions.

[0069] In this embodiment, the thicknesses of the inlet section 12 and the outlet section 14 in the jet 10 are H0 and H1, respectively. After the measurement begins, the matching fan starts, and a negative pressure is formed in the discharge channel 15. The air around the sampling port 9, carrying particulate matter, is drawn in, forming the jet 10. The jet 10 first reaches the inlet section 12, then passes through the measurement section 13, and then enters the discharge channel 15 through the outlet section 14. When both the width of the inlet section H0 and the width of the outlet section H1 are less than the cross-sectional width W of the measurement area, the thickness of the jet 10 can be approximately equal to H0, thus being less than the width W of the measurement area. All the particulate matter carried by the jet 10 also passes through the measurement area 5, so that all of it can be measured.

[0070] It should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A photoresist particle counter with full beam coverage, characterized in that, Includes sampling port, flow channel, support frame, and discharge channel; The sampling port is located above the support frame, the discharge channel is located below the support frame, and the flow channel is located inside the support frame; The flow channel includes an inlet section, a measuring section, and an outlet section. The thickness of the inlet section and the thickness of the outlet section are both smaller than the cross-sectional width of the measuring section.

2. The photoresist particle counter with full beam coverage according to claim 1, characterized in that, The sampling port, the inlet section, the measurement section, and the outlet section are connected in sequence.

3. A photoresist particle counter with full beam coverage according to claim 2, characterized in that, The input segment is a cuboid, the measurement segment is a cylinder, and the output segment is a cuboid.

4. A photoresist particle counter with full beam coverage according to claim 3, characterized in that, It also includes an optical emitting component and an optical receiving component, with the optical emitting component disposed at one end of the measuring segment and the optical receiving component disposed at the other end of the measuring segment.

5. A photoresist particle counter with full beam coverage according to claim 4, characterized in that, The optical emitting component, the measuring segment, and the optical receiving component are connected in sequence.

6. A photoresist particle counter with full beam coverage according to claim 5, characterized in that, The light emitting component includes a light source, a lens, and a beam-limiting aperture, wherein the light-passing width of the beam-limiting aperture is greater than the thickness of the guide section.

7. A photoresist particle counter with full beam coverage according to claim 6, characterized in that, The optical receiving component includes a converging lens, a pinhole aperture, and a detector.

8. A photoresist particle counter with full beam coverage according to claim 7, characterized in that, The light emitting component emits a light beam that passes through the measuring segment and reaches the light receiving component.

9. A photoresist particle counter with full beam coverage according to claim 8, characterized in that, The measurement segment includes a measurement area, which is the space occupied by the light beam within the measurement segment.

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