Miniature detection device

Abstract

The utility model relates to the technical field of X-ray detection devices, in particular to a mini-type detection device. Comprising a workbench, a shell, a light pipe assembling assembly and a camera shooting assembly, a Z-axis moving assembly is arranged on the workbench, and the Z-axis moving assembly drives an objective table to move in the direction close to or away from the light pipe assembling assembly. The receiving flat plate assembly comprises a mounting bracket and a flat plate detector, and is provided with a flat plate protection fiber plate. In addition, the device further comprises a laser positioning assembly, an auxiliary light source and other components, the overall design is compact, and the overall convenience and detection precision of the device are improved.

Description

Technical Field

[0001] This application relates to the field of X-ray detection device technology, and in particular to a miniature detection device. Background Technology

[0002] In modern industrial production, electronics manufacturing, medical fields, and materials science, the demand for non-destructive testing of the internal structure of objects is increasing. Traditional testing methods often have many limitations and cannot meet the requirements of high precision, high efficiency, and miniaturization.

[0003] In the electronics manufacturing industry, as electronic products become increasingly miniaturized and highly integrated, the precision requirements for detecting internal defects in electronic components are becoming increasingly stringent. For example, during chip packaging, minute defects such as cracks, voids, or poor pin connections can lead to a decline in the performance of the entire electronic product or even its failure. However, traditional optical inspection methods cannot penetrate the casing of electronic components, making it difficult to detect these minute internal defects.

[0004] Traditional X-ray inspection equipment is typically large and power-intensive, making it unsuitable for use in space-constrained environments such as small laboratories or clinics. Furthermore, its effectiveness in detecting fine tissue structures is unsatisfactory. In addition, with continuous technological advancements, the demand for on-site and real-time inspections is increasing, highlighting the poor portability and complex installation of traditional large X-ray inspection devices. To overcome these problems, there is an urgent need for a miniaturized, high-power X-ray inspection device with high-resolution imaging capabilities, capable of accurate and non-destructive testing of various objects within limited spaces, while also offering advantages such as ease of operation and low cost, to meet the pressing needs of different fields for miniaturized, high-precision non-destructive testing. Utility Model Content

[0005] The purpose of this application is to provide a miniature detection device.

[0006] The above-mentioned technical objective of this application is achieved through the following technical solution: a miniature detection device, including a worktable, a housing on the worktable, the worktable and the housing together forming a receiving cavity, a light tube assembly and a camera capturing assembly inside the receiving cavity, and a receiving plate assembly on the worktable corresponding to the position of the light tube assembly; a Z-axis moving assembly is provided on the worktable, and a stage is provided on the Z-axis moving assembly, and the stage is driven by the Z-axis moving assembly to move towards the light tube assembly or towards the receiving plate assembly.

[0007] By adopting the above technical solution, the device achieves a miniature design by integrating the optical tube assembly, camera imaging assembly, and receiving plate assembly into the cavity enclosed by the worktable and the outer shell, making it convenient for use in different spatial environments. The Z-axis moving assembly and the stage can precisely control the movement of the stage towards the optical tube assembly or the receiving plate assembly. This allows for flexible adjustment of the distance between the sample and the X-ray source and receiving device, adapting to objects of different thicknesses and sizes, improving the accuracy and flexibility of the detection. It also helps to optimize the X-ray irradiation angle and imaging effect, thereby improving the overall detection accuracy and quality. This meets the needs of high-power, high-precision X-ray detection of small objects, broadens the applicability of the device, and can be widely used in detection scenarios in multiple fields such as electronics, medical, and industrial manufacturing.

[0008] Optionally, the receiving flat panel assembly includes a mounting bracket, a flat panel detector is provided inside the mounting bracket, the flat panel detector is electrically connected to an external control system, and a flat panel protective fiberboard is provided on the mounting bracket.

[0009] By adopting the above technical solution, the flat panel detector can convert the received X-ray signals into electrical signals and transmit them to the external control system for image reconstruction and analysis, thereby realizing the visualization of the internal structure of the object being inspected, greatly improving the accuracy and efficiency of the inspection. The protective fiberboard on the mounting bracket plays a crucial protective role. On the one hand, it effectively blocks external dust, moisture, and other impurities from corroding the flat panel detector, preventing performance degradation or damage due to contamination and extending the detector's lifespan. On the other hand, the protective fiberboard can also buffer potential external impacts to a certain extent, preventing detector malfunctions due to accidental collisions, ensuring the stability and reliability of the entire inspection device, and providing strong support for continuous and accurate X-ray inspection.

[0010] Optionally, the workbench is provided with a base plate, the base plate is hollow and has a through hole, the mounting bracket is fitted and installed at the through hole, a stepped structure is formed between the base plate and the mounting bracket, and the flat protective fiberboard is provided on the stepped structure.

[0011] By adopting the above technical solution, the mounting bracket is fitted into the through-hole position of the base plate. This not only ensures the stable installation of the receiving plate assembly, preventing vibration or displacement from affecting detection accuracy during the detection process, but also makes the internal layout of the device more compact and reasonable, facilitating a miniature overall structure. Simultaneously, the stepped structure formed between the base plate and the mounting bracket provides a stable and suitable placement position for the plate protection fiberboard. The stepped structure can limit and fix the plate protection fiberboard, preventing it from moving arbitrarily. In this position, the plate protection fiberboard can better perform its function of protecting the plate detector, effectively blocking foreign objects that may appear from the stage direction from damaging the plate detector, without affecting the normal reception and detection process of X-rays. This further ensures the reliability and stability of the detection device, improving the overall detection performance and service life.

[0012] Optionally, the workbench is provided with multiple support frames for supporting the base plate.

[0013] By adopting the above technical solution, the multiple support frames provide stable and reliable support for the base plate. On the one hand, this ensures the base plate remains stable, preventing wobbling or tilting due to unstable placement. This, in turn, guarantees the positional accuracy of components such as the receiving plate assembly mounted on the base plate, maintaining a stable relative positional relationship between components throughout the entire inspection process, thus improving the precision and accuracy of the inspection. On the other hand, the support frames distribute the weight of the base plate and the components above it, reducing the pressure on the worktable itself. This effectively prevents deformation of the worktable due to uneven stress over a long period, extending its service life. It also lays a solid foundation for the entire mini high-power X-ray inspection device to operate stably for extended periods and continuously conduct high-quality inspections.

[0014] Optionally, the Z-axis moving assembly includes a back plate disposed on the worktable, the back plate being provided with a slide rail and a driving component, the slide rail being provided with a slider, the slider being connected to the driving component, the driving component driving the slider to slide along the direction set by the slide rail, and the stage being fixedly disposed on the slider.

[0015] By adopting the above technical solution, the backplate provides a stable mounting base for the slide rails and drive components, ensuring the structural rigidity and stability of the entire Z-axis moving assembly. The cooperation between the slide rails and sliders makes the movement of the stage smoother and more stable, enabling precise adjustment of its position along the Z-axis. The drive components enable automated control, allowing operators to precisely adjust the stage's movement towards or away from the optical tube assembly and receiving plate assembly according to inspection needs. This precise position control helps optimize the X-ray penetration path and imaging effect. Whether inspecting tiny precision parts or objects of varying thicknesses and shapes, the optimal inspection position can be found quickly and accurately, greatly improving the flexibility and efficiency of inspection. It also enhances the accuracy and reliability of inspection results, providing strong support for the efficient application of miniature high-power X-ray inspection devices in various complex inspection scenarios.

[0016] Optionally, the receiving cavity is provided with a plurality of laser positioning components. Each laser positioning component includes a positioning plate disposed on the outer shell, a fixing seat disposed on the positioning plate, and a laser lamp disposed on the fixing seat.

[0017] By adopting the above technical solution, the installation of several laser positioning components plays a crucial auxiliary role in the inspection operation. The positioning plate on the outer shell provides a stable mounting support for the mounting base, while the laser lamp on the mounting base emits clear laser beams. These laser beams accurately indicate the key positions of the inspection area, helping operators to place the object to be inspected in the appropriate position on the stage more conveniently and accurately, achieving rapid positioning and effectively reducing inspection errors caused by placement deviations, thus improving the initial accuracy of the inspection. Furthermore, during multiple inspections or inspections by different operators, the consistent and clear positioning indications of the laser positioning components ensure the consistency of the object's placement position in each inspection, making the inspection results more comparable and stable. This, in turn, improves the standardization and inspection quality of the entire inspection process of the mini high-power X-ray inspection device.

[0018] Optionally, the light tube assembly includes a fixing plate, a light tube generator on the fixing plate, a light tube shielding cover on the fixing plate, a light tube constraint block on the fixing plate, and the light tube generator is electrically connected to a power control box.

[0019] By adopting the above technical solution, the fixing plate provides a stable mounting platform for the light tube generator, light tube shielding cover, and light tube constraint block, ensuring the relative position stability of each component during operation and reducing the impact of vibration or displacement on detection accuracy. The light tube shielding cover effectively blocks radiation leakage generated by the light tube generator during operation, reducing radiation hazards to the surrounding environment and operators, and ensuring safety during use. The light tube constraint block further fixes and protects the light tube generator, preventing damage due to accidental collisions, improving the stability and reliability of the light tube generator, and extending its service life. Simultaneously, the light tube generator is electrically connected to the power control box, allowing operators to precisely control the working status of the light tube generator, such as adjusting parameters like radiation intensity and emission time, thereby meeting the diverse needs of different detection objects and requirements. This enables the entire mini high-power X-ray detection device to flexibly and efficiently complete various detection tasks, improving detection accuracy and adaptability.

[0020] Optionally, an auxiliary light source is provided inside the receiving cavity.

[0021] By adopting the above technical solution, when inspecting objects with specific lighting requirements or when more detailed information needs to be obtained from the inspection images, the auxiliary light source can provide additional illumination, enhancing the visibility of the object's surface features. This allows the camera imaging component to capture clearer and more comprehensive image information, complementing the internal structure image formed by X-ray penetration. This helps operators more accurately judge the overall condition of the object, including surface defects and the correlation between internal structure and external features, further improving the accuracy and completeness of the inspection results. It also broadens the inspection capability range of this mini high-power X-ray inspection device, enabling it to handle more complex inspection scenarios and diverse inspection needs, thus enhancing the practicality and reliability of the device in real-world applications.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. By setting a Z-axis moving component on the worktable, the movement distance of the stage can be precisely controlled, enabling the object to be inspected to accurately approach or move away from the optical tube assembly component, thereby improving inspection accuracy and image quality;

[0024] 2. The light tube assembly and camera capturing assembly are integrated in the same housing cavity, which not only reduces the overall size of the device, but also improves the compactness and stability of the system, making it suitable for working environments with limited space;

[0025] 3. The receiving flat panel assembly adopts a mounting bracket and protective fiberboard design, which effectively prevents external interference and damage, ensures the stable and reliable operation of the flat panel detector, and further improves the accuracy of the detection results. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of a miniature detection device;

[0027] Figure 2 This is a structural schematic diagram of the optical tube assembly;

[0028] Figure 3 This is an assembly diagram of a flat protective fiberboard;

[0029] Figure 4 This is a schematic diagram of the receiving tablet assembly;

[0030] Figure 5 This is a schematic diagram of the Z-axis moving component;

[0031] Figure 6 This is a schematic diagram showing the location of the laser positioning component.

[0032] Figure Labels

[0033] 1. Worktable; 2. Housing; 3. Receiving cavity; 4. Optical tube assembly; 41. Fixing plate; 42. Optical tube generator; 43. Optical tube shielding cover; 44. Optical tube constraint block; 45. Power control box; 5. Camera shooting assembly; 6. Receiving flat panel assembly; 61. Mounting bracket; 62. Flat panel detector; 63. Flat panel protective fiberboard; 64. Base plate; 65. Support frame; 7. Z-axis moving assembly; 71. Back plate; 72. Slide rail; 73. Drive component; 74. Slider; 8. Stage; 9. Through hole; 10. Step structure; 11. Laser positioning assembly; 111. Positioning plate; 112. Fixing base; 113. Laser lamp; 12. Auxiliary light source. Detailed Implementation

[0034] The present application will be further described in detail below with reference to the accompanying drawings.

[0035] Example 1

[0036] In this embodiment, refer to Figure 1-5 A miniature inspection device includes a worktable 1, a housing 2, a light tube assembly 4, a camera imaging assembly 5, a receiving plate assembly 6, a Z-axis moving assembly 7, and a stage 8. The worktable 1 and housing 2 together form a receiving cavity 3, within which the light tube assembly 4 and camera imaging assembly 5 are housed. The receiving plate assembly 6 is positioned on the worktable 1 corresponding to the position of the light tube assembly 4. The Z-axis moving assembly 7 is mounted on the worktable 1, and the stage 8 is mounted on the Z-axis moving assembly 7. The Z-axis moving assembly 7 drives the stage 8 to move closer to or further away from the light tube assembly 4, achieving miniaturization and high-precision non-destructive testing.

[0037] Specifically, refer to Figure 3 and Figure 5 The worktable 1 has a base plate 64 with a hollow through hole 9 for mounting the receiving plate assembly 6. Multiple support frames 65 are also provided on the worktable 1 to support the base plate 64 and ensure the stability of the overall structure. A back plate 71 is provided on the worktable 1, with a slide rail 72 and a drive component 73 on it. A slider 74 is mounted on the slide rail 72 and connected to the drive component 73. The drive component 73 drives the slider 74 to slide along the slide rail 72 in a predetermined direction. The stage 8 is fixedly mounted on the slider 74. The drive component 73 can be a motor, a cylinder, or other linear drive device, selected according to actual needs. The cooperation between the slide rail 72 and the slider 74 can be achieved through ball screws, racks and pinions, etc., to improve the smoothness and accuracy of the movement.

[0038] Reference Figure 3-4The receiving flat panel assembly 6 includes a mounting bracket 61, within which a flat panel detector 62 is housed. The flat panel detector 62 is electrically connected to an external control system. A flat panel protective fiberboard 63 is mounted on the mounting bracket 61. The mounting bracket 61 is fitted into the through hole 9 on the base plate 64, forming a stepped structure 10 between the base plate 64 and the mounting bracket 61. The flat panel protective fiberboard 63 is positioned on the stepped structure 10, serving as a buffer and protection to prevent external forces from damaging the flat panel detector 62. When X-rays penetrate the object being detected, the rays reach the receiving flat panel assembly 6. First, the X-rays pass through the flat panel protective fiberboard 63 on the mounting bracket 61. Although the flat panel protective fiberboard 63 attenuates the rays to some extent, due to its material properties, this attenuation is controlled within an acceptable range. Simultaneously, it successfully blocks any dust, debris, and some accidental impacts that may be present in the external environment, preventing damage to the flat panel detector 62 and ensuring that the flat panel detector 62 operates in a stable and clean environment. Subsequently, the attenuated X-rays reach the flat panel detector 62. The flat panel detector 62 uses its internal sensitive elements (such as a scintillator and a photodiode array) to convert the energy of X-ray photons into electrical signals. When an X-ray photon strikes the scintillator, the scintillator emits visible light photons, which are then detected by the photodiode array and converted into corresponding electrical pulse signals. The intensity and distribution of these electrical pulse signals are directly related to the intensity and distribution of the incident X-rays, thus forming an electrical signal image reflecting information about the X-rays after penetrating the object. This electrical signal image is rapidly transmitted to the external control system in digital signal form via a data line connecting the flat panel detector 62 and the external control system. After receiving this data, the external control system processes it using specialized image processing algorithms, including signal amplification, noise reduction, and grayscale correction, converting it into a visual image that can be directly observed and analyzed by the operator. This image clearly presents the internal structural information of the object being inspected, such as the presence of defects, structural integrity, and the relative positions of various components, thereby achieving non-destructive testing and quality assessment of the object. Throughout the process, the mounting bracket 61 provides stable mechanical support for the flat panel detector 62, ensuring its positional accuracy and stability during the detection process. This, in turn, ensures that the receiving flat panel assembly 6 can accurately and reliably complete the reception and conversion of X-ray signals, providing high-quality detection data for the entire detection device.

[0039] Reference Figure 2The light tube assembly 4 includes a fixing plate 41, on which a light tube generator 42 is mounted. The fixing plate 41 also has a light tube shielding cover 43 and a light tube constraint block 44. The light tube generator 42 is electrically connected to a power control box 45. The light tube generator 42 can select X-ray sources of different energy levels, such as microfocus X-ray sources, to meet the needs of different types and sizes of sample detection. The light tube shielding cover 43 can be made of lead material to effectively block scattered X-rays and reduce radiation hazards.

[0040] Reference Figure 6 The receiving cavity 3 is equipped with several laser positioning components 11. Each laser positioning component 11 includes a positioning plate 111 mounted on the outer shell 2, a fixing seat 112 mounted on the positioning plate 111, and a laser lamp 113 mounted on the fixing seat 112. The laser lamp 113 can provide a precise positioning reference when placing the sample, improving detection efficiency and accuracy. The operating wavelength of the laser lamp 113 can be adjusted according to the color and material of the object being measured to obtain the best visual contrast effect.

[0041] Reference Figure 2 The cavity 3 is also equipped with an auxiliary light source 12, which can be an LED light or a fluorescent light, to provide sufficient illumination in dark environments to make the image clearer. The position and number of auxiliary light sources 12 can be flexibly arranged according to actual application needs to achieve the best lighting effect.

[0042] The implementation principle of this embodiment is as follows: by organically combining the worktable 1, housing 2, optical tube assembly 4, camera imaging assembly 5, receiving plate assembly 6, Z-axis moving assembly 7, and stage 8, a compact design layout is achieved, making the entire device small in size, easy to carry and install. Simultaneously, through precise mechanical structure design, coordinated operation between various components is ensured, improving the accuracy and reliability of the inspection. In particular, the introduction of the laser positioning assembly 11 and auxiliary light source 12 further enhances the ease of operation and the quality of the inspection results, meeting the needs of modern industrial production and scientific research for miniaturized, high-precision non-destructive testing equipment.

[0043] Example 2

[0044] The difference between this embodiment and the previous embodiment is the addition of a rotating mechanism to facilitate comprehensive inspection of the sample from different angles. Specifically, the rotating mechanism includes a rotating platform and a rotating drive device. The rotating platform is located on the stage 8. The workpiece to be inspected is placed on the rotating platform, and the rotating drive device drives the rotating platform to rotate, thereby enabling multi-angle inspection of the sample.

[0045] Specifically, the rotary drive device can be a stepper motor or a servo motor, and the speed and direction of the motor are controlled by pulse signals emitted by the controller. The rotary platform has multiple slots for fixing samples of different shapes and sizes, ensuring the samples remain stable during rotation. The rotary platform and the stage 8 are connected by bearings to reduce frictional resistance and improve the smoothness of rotation.

[0046] The implementation principle of this embodiment is as follows: by adding a rotating mechanism, the sample can be irradiated with X-rays at different angles, solving the blind zone problem that may occur in single-view detection. Especially in the detection of complex geometric structures or multi-layered samples, multi-angle detection can provide more comprehensive information, improving the reliability and accuracy of the detection. In addition, the rotating mechanism is simple and convenient to operate; automated multi-angle scanning can be achieved simply by adjusting it through a controller, greatly improving work efficiency.

[0047] Example 3

[0048] The difference between this embodiment and the previous embodiment is the addition of a temperature monitoring module. This module monitors the temperature of key components within the device in real time, ensuring that the equipment operates within a safe range. Specifically, the temperature monitoring module includes temperature sensors, a data acquisition unit, and an alarm device. The temperature sensors are located near the light tube generator 42, the flat panel detector 62, and other heat-generating components. The data acquisition unit collects temperature data and transmits it to the external control system. Once a preset safety threshold is exceeded, the alarm device will immediately activate, alerting the operator to take appropriate measures.

[0049] Specifically, the temperature sensor can be a resistance temperature detector (RTD) or a thermocouple, with the appropriate type selected based on the characteristics of the measured object and environmental conditions. The data acquisition unit can be integrated into the main control board, working in conjunction with other control systems to achieve real-time monitoring and recording of temperature data. The alarm device can be an audible and visual alarm or a remote notification system to promptly inform operators of abnormal situations and prevent equipment damage or safety accidents caused by high temperatures.

[0050] The implementation principle of this embodiment is as follows: by introducing a temperature monitoring module, equipment failures caused by overheating are effectively prevented, extending the equipment's service life. The role of the temperature monitoring module is particularly prominent under conditions of long-term continuous operation, as it can provide early warnings of potential risks and ensure the normal operation of the equipment. Furthermore, real-time recording of temperature data can provide important reference for subsequent maintenance and optimization, helping to improve the overall performance and reliability of the equipment.

[0051] Example 4

[0052] The difference between this embodiment and the previous embodiment is that an automated loading and unloading mechanism is added, enabling rapid sample replacement and loading, and improving testing efficiency. Specifically, the automated loading and unloading mechanism includes an inlet, an outlet, a conveyor belt, and clamps. The inlet and outlet are located on both sides of the workbench 1, and the conveyor belt is equipped with multiple clamps for fixing and transporting samples.

[0053] Specifically, the conveyor belt can be a conveying device composed of belts or chains, driven by an electric motor to achieve automatic sample loading and unloading. The clamps can be vacuum suction cups or robotic grippers; the appropriate type is selected based on the properties and shape of the sample to ensure its stability during transport. The inlet and outlet are equipped with sensor switches that trigger corresponding actions when the sample reaches the designated position, achieving precise positioning and unloading.

[0054] The implementation principle of this embodiment is as follows: by introducing an automated loading and unloading mechanism, the time and labor intensity of manual intervention are significantly reduced, and the level of automation in testing is improved. The advantages of the automated loading and unloading mechanism are particularly evident in large-volume sample testing, as it can significantly shorten the testing cycle and improve production efficiency. Furthermore, the automated loading and unloading mechanism can effectively avoid errors caused by human factors, ensuring the consistency and accuracy of each test result.

[0055] Example 5

[0056] The difference between this embodiment and the previous embodiments is that it integrates a wireless communication module, supporting remote monitoring and data transmission. Specifically, the wireless communication module includes an antenna, a transceiver, and a protocol processor. The antenna is used to transmit and receive wireless signals, the transceiver is responsible for signal modulation and demodulation, and the protocol processor is responsible for packet packaging and parsing, enabling seamless integration with external systems.

[0057] Specifically, the antenna can be an omnidirectional antenna or a multi-band antenna, with the appropriate type selected based on the usage scenario and frequency range. The transceiver can support multiple wireless communication standards, such as Wi-Fi, Bluetooth, or LoRa, to adapt to different network environments and distance requirements. The protocol processor can be integrated on the main control board to collaborate with other control systems, achieving efficient data transmission and management.

[0058] The implementation principle of this embodiment is as follows: by integrating a wireless communication module, remote monitoring and data transmission functions are realized, allowing users to view test results and equipment status at any location and at any time, improving the flexibility of management and use. It is particularly suitable for widely distributed laboratories and production lines, eliminating the need for dedicated personnel and saving labor costs. Furthermore, the wireless communication module can also connect to other smart devices to realize the application of the Internet of Things (IoT), further enhancing the overall system's intelligence level.

[0059] The embodiments described in this specific implementation are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A miniaturized detection device, characterized in that Including workbench (1), the workbench (1) is equipped with shell (2), the workbench (1) and the shell (2) are enclosed and form have containing cavity (3), the containing cavity (3) is equipped with light pipe assembly component (4) and camera shooting component (5), the workbench (1) is equipped with receiving flat plate component (6) corresponding the light pipe assembly component (4) position;The workbench (1) is equipped with Z-axis movement component (7), the Z-axis movement component (7) is equipped with object table (8), the Z-axis movement component (7) drives the object table (8) to move towards the direction of approaching the light pipe assembly component (4) or approaching the receiving flat plate component (6).

2. The miniaturized detection device according to claim 1, characterized in that The receiving flat plate component (6) includes mounting bracket (61), the mounting bracket (61) is equipped with flat plate detector (62), the flat plate detector (62) is electrically connected with external control system, the mounting bracket (61) is equipped with flat plate protection fiber plate (63).

3. The miniaturized detection device according to claim 2, characterized in that The workbench (1) is equipped with bottom plate (64), the bottom plate (64) is hollow and is equipped with through-hole (9), the mounting bracket (61) is fitted and installed at the position of the through-hole (9), the bottom plate (64) and the installation form have stepped structure (10), the flat plate protection fiber plate (63) is located on the stepped structure (10).

4. The miniaturized detection device according to claim 3, characterized in that The workbench (1) is equipped with a plurality of support frames (65) for supporting the bottom plate (64).

5. The miniaturized detection device of claim 1, wherein The Z-axis movement component (7) includes back plate (71) provided on the workbench (1), the back plate (71) is equipped with slide rail (72) and driving part (73), the slide rail (72) is equipped with sliding block (74), the sliding block (74) is connected with the driving part (73), the driving part (73) drives the sliding block (74) to slide along the slide rail (72) setting direction, the object table (8) is fixedly arranged on the sliding block (74).

6. The miniaturized detection device of claim 1, wherein The containing cavity (3) is equipped with a plurality of laser positioning components (11), the laser positioning component (11) includes positioning plate (111) provided on the shell (2), the positioning plate (111) is equipped with fixed seat (112), the fixed seat (112) is equipped with laser lamp (113).

7. The miniaturized detection device of claim 1, wherein The light pipe assembly component (4) includes fixed plate (41), the fixed plate (41) is equipped with light pipe generator (42), the fixed plate (41) is further equipped with light pipe shielding cover (43), the fixed plate (41) is equipped with light pipe constraint block (44), the light pipe generator (42) is electrically connected with power supply control box (45).

8. The miniaturized detection device of claim 1, wherein The containing cavity (3) is equipped with auxiliary light source (12).

Images