Ceramic electrode and plasma surface treatment machine

By adopting a double-arc surface design on the ceramic electrode, the problems of low assembly efficiency and high cost caused by the firing process are solved, achieving rapid installation and low-cost discharge effect, and improving the adaptability and yield of the ceramic electrode.

CN223987207UActive Publication Date: 2026-03-10EPPS ELECTRONIC TECH (JINAN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-04-01
Publication Date
2026-03-10

AI Technical Summary

Technical Problem

Existing cylindrical ceramic electrodes suffer from differences in the inner diameter of the two ends of the ceramic shell due to limitations in the firing process. This necessitates the filling of conductive materials, which reduces assembly efficiency and increases costs.

Method used

The double-arc design ensures that both the discharge surface of the discharge conductor and the inner wall of the limiting cavity are arc surfaces, enabling rapid fitting and installation while reducing or eliminating the need for conductive material filling.

Benefits of technology

It improves assembly efficiency, reduces costs, enhances environmental adaptability and discharge effect, and improves the yield of ceramic electrodes.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of plasma surface treatment. The ceramic electrode comprises a ceramic shell provided with a through hole in the longitudinal direction, a discharge conductor is arranged in a limiting cavity in the through hole, the discharge face of the discharge conductor is an arc face, the inner wall face, right opposite to the discharge face, of the limiting cavity is an arc face, and the radians of the two arc faces are the same; according to the utility model, the double-cambered-surface design is innovatively carried out, so that the discharge surface of the discharge conductor and the inner wall surface of the limiting cavity are cambered surfaces and have the same radian, and the discharge conductor is directly inserted into the limiting cavity to realize the fitting of the two cambered surfaces, so that the assembly can be realized, the assembly efficiency is improved, and the cost is reduced.
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Description

Technical Field

[0001] This utility model relates to the field of plasma surface treatment technology, and in particular to a ceramic electrode and a plasma surface treatment machine. Background Technology

[0002] The statements in this section are merely background information related to this utility model and do not necessarily constitute prior art.

[0003] A plasma surface treatment machine (or corona machine) is a device used for surface treatment of materials. The ceramic electrode is a key component of the plasma surface treatment machine. Its internal discharge conductor (or discharge sheet) is connected to a high-voltage power supply. When a sufficiently high voltage is applied, it will form a discharge electric field with the low-voltage end (such as a grounded guide roller or the foil to be treated), triggering a discharge phenomenon.

[0004] The inventors discovered in their research that existing cylindrical ceramic electrodes generally include a ceramic shell with a through hole and a cylindrical discharge conductor inserted into the through hole. Due to limitations in the firing process of the ceramic shell, there is a difference in the inner diameter at both ends of the ceramic shell. In order to ensure the discharge effect after the cylindrical discharge conductor and the ceramic shell are combined, conductive material needs to be filled between the cylindrical discharge conductor and the inner wall of the through hole, which not only reduces the assembly efficiency but also increases the cost. Utility Model Content

[0005] To address the shortcomings of existing technologies, this invention provides a ceramic electrode and a plasma surface treatment machine. It innovatively incorporates a double-arc surface design, ensuring that both the discharge surface of the discharge conductor and the inner wall of the limiting cavity are arc surfaces with equal curvature. Assembly can be achieved by directly inserting the discharge conductor into the limiting cavity to achieve the fit between the two arc surfaces, which not only improves assembly efficiency but also reduces costs.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] Firstly, this utility model provides a ceramic electrode.

[0008] A ceramic electrode includes: a ceramic shell with a through hole along the longitudinal direction, a discharge conductor arranged in a limiting cavity within the through hole, the discharge surface of the discharge conductor being an arc surface, the inner wall surface of the limiting cavity opposite the discharge surface being an arc surface, and the two arc surfaces having the same curvature.

[0009] As a further optional aspect of the first aspect of this utility model, the limiting cavity is a single cavity. In use, a discharge conductor is directly inserted into this limiting cavity. The arc surface of the discharge conductor has the same curvature as the inner wall surface (also an arc surface) of the limiting cavity. The two work together to achieve rapid fitting and installation, which reduces costs and ensures the discharge effect.

[0010] As a further optional aspect of the present invention, the limiting cavity includes at least two, and the discharge conductor is arranged in at least one limiting cavity. It is possible that a corresponding discharge conductor is arranged in each limiting cavity, or the discharge conductor is arranged in only one or more limiting cavities (i.e., not all limiting cavities need to be filled with discharge conductors). This allows the entire ceramic electrode to have better environmental adaptability, and the number of discharge conductors can be selected according to different operating conditions.

[0011] As a further optional aspect of the first aspect of this utility model, each limiting cavity is evenly distributed within the through hole of the ceramic shell (e.g., two, three, or four are evenly arranged); or, each limiting cavity is randomly distributed within the through hole of the ceramic shell (e.g., two, three, or four are unevenly arranged).

[0012] As a further optional aspect of the first aspect of this utility model, the dimensions of each limiting cavity can be different (and the corresponding dimensions of the discharge conductors are also different), thereby adapting to different usage environments.

[0013] As a further optional aspect of the first aspect of this utility model, the two corners of the limiting cavity are both arc-shaped grooves, and the arc-shaped grooves on both sides limit the discharge conductor in the limiting cavity.

[0014] As a further optional aspect of the first aspect of this utility model, the ceramic shell is cylindrical in shape and has a circular cross-section.

[0015] As a further optional aspect of the first aspect of this utility model, the ceramic shell is in the shape of a regular polygonal prism, and the cross-section of the ceramic shell is a regular polygon. The polygonal prism shape generally requires that the number of its edges is greater than 20, thus presenting an overall cylindrical structure.

[0016] As a further limitation of the first aspect of this utility model, the outer wall of the ceramic shell includes at least one inner groove, that is, the outer wall of the ceramic shell can be a concave part (can be an irregular shape), but cannot protrude outward.

[0017] The second aspect of this utility model provides a plasma surface treatment machine, including the ceramic electrode described in the first aspect of this utility model.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] 1. This utility model innovatively develops a ceramic electrode and innovatively adopts a double arc surface design, so that the discharge surface of the discharge conductor and the inner wall surface of the limiting cavity are both arc surfaces with equal curvature. The discharge conductor can be directly inserted into the limiting cavity to achieve the fit of the two arc surfaces to realize assembly, which not only improves the assembly efficiency, but also reduces the cost.

[0020] 2. The limiting cavity of this utility model can be a single cavity. In use, a discharge conductor is directly inserted into this limiting cavity. The arc surface of the discharge conductor has the same curvature as the inner wall surface (also an arc surface) of the limiting cavity. The two work together to achieve quick fitting and installation, which reduces costs and ensures the discharge effect.

[0021] 3. The limiting cavity of this utility model may include multiple cavities, and at least one limiting cavity is provided with the discharge conductor. It is possible to provide a corresponding discharge conductor in each limiting cavity, or to provide a discharge conductor in only one or more limiting cavities (i.e., not all limiting cavities need to be filled with discharge conductors). This allows the entire ceramic electrode to have better environmental adaptability, and the number of discharge conductors can be selected according to different operating conditions.

[0022] 4. The two corners of the limiting cavity of this utility model are both arc-shaped grooves. The arc-shaped grooves on both sides limit the discharge conductor in the limiting cavity, which can effectively ensure the limiting effect on the discharge conductor and reduce the difficulty of firing.

[0023] 5. The ceramic shell of this utility model is cylindrical or prismatic in shape. The outer wall of the ceramic shell can be concave (it can be irregular in shape). Under the premise of ensuring the discharge effect in the later stage, a strictly regular external structure is not required, which reduces the firing difficulty and improves the overall yield of ceramic electrode manufacturing.

[0024] Advantages of the present invention in additional aspects will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0025] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments of this utility model and their descriptions are used to explain this utility model and do not constitute an improper limitation of this utility model.

[0026] Figure 1 Schematic diagram of the ceramic electrode provided in Embodiment 1 of this utility model Figure 1 ;

[0027] Figure 2 Schematic diagram of the ceramic electrode provided in Embodiment 1 of this utility model Figure 2 ;

[0028] Figure 3 Schematic diagram of the ceramic electrode provided in Embodiment 1 of this utility model Figure 3 ;

[0029] Figure 4Schematic diagram of the ceramic electrode provided in Embodiment 1 of this utility model Figure 4 ;

[0030] Figure 5 Schematic diagram of the ceramic electrode provided in Embodiment 1 of this utility model Figure 5 ;

[0031] Figure 6 Schematic diagram of the ceramic electrode provided in Embodiment 1 of this utility model Figure 6

[0032] Figure 7 Schematic diagram of the ceramic electrode provided in Embodiment 2 of this utility model Figure 1 ;

[0033] Figure 8 Schematic diagram of the ceramic electrode provided in Embodiment 2 of this utility model Figure 2 ;

[0034] Figure 9 Schematic diagram of the ceramic electrode provided in Embodiment 2 of this utility model Figure 3 ;

[0035] Figure 10 Schematic diagram of the ceramic electrode provided in Embodiment 2 of this utility model Figure 4 ;

[0036] Among them, 1. ceramic shell; 2. discharge conductor; 3. limiting cavity; 4. inner groove. Detailed Implementation

[0037] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0038] It should be noted that the following detailed description is exemplary and intended to provide further explanation of the present invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0039] Where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other.

[0040] Example 1:

[0041] In this implementation, a ceramic electrode is proposed, such as... Figure 1 As shown, it includes: a ceramic shell 1 with a through hole along the longitudinal direction, a discharge conductor 2 arranged in a limiting cavity 3 within the through hole, the discharge surface of the discharge conductor 2 being an arc surface, and the inner wall surface of the limiting cavity 3 opposite to the discharge surface being an arc surface, the two arc surfaces having the same curvature.

[0042] In this implementation, preferably, the limiting cavity 3 is a single cavity, such as... Figure 1As shown, during use, a discharge conductor 2 is directly inserted into this limiting cavity 3. The arc surface of the discharge conductor 2 has the same curvature as the inner wall surface (also an arc surface) of the limiting cavity 3. The two work together to achieve quick fitting and installation, which reduces costs and ensures the discharge effect.

[0043] In this implementation, preferably, the discharge conductor 2 is an arc-shaped discharge sheet, which can be quickly inserted into the limiting cavity 3 during assembly. It is understood that in some other implementations, the shape of the discharge conductor 2 can also be arbitrary, as long as it can be inserted into the limiting cavity 3 and the discharge surface can be guaranteed to be an arc surface. The specific shape is not limited here, and those skilled in the art can choose according to the specific working conditions, which will not be elaborated here.

[0044] In this implementation, optionally, the limiting cavity 3 may include two, such as... Figure 2 and Figure 3 As shown, the limiting cavity 3 may include three, such as Figure 4 As shown, the limiting cavity 3 may include four, such as Figure 5 As shown; of course, the number of limiting cavities 3 here can also include more, such as five, six or even more, which will not be listed here.

[0045] It should be noted that in this implementation, the discharge electrode is placed in only one limiting cavity 3, and the other limiting cavities 3 can be used as backups, which makes the entire ceramic electrode more adaptable to the environment and allows the number of discharge conductors 2 to be selected according to different operating conditions.

[0046] In this implementation, preferably, each limiting cavity 3 is evenly distributed within the through hole of the ceramic shell 1, such as... Figure 2 , Figure 4 and Figure 5 As shown, the limiting cavities 3 are evenly arranged along the internal through holes; it can be understood that in some other implementations, the limiting cavities 3 may also be unevenly distributed within the through holes of the ceramic housing 1, such as... Figure 3 As shown, those skilled in the art can make the selection based on specific working conditions, which will not be elaborated further here.

[0047] In this implementation, preferably, both corners of the limiting cavity 3 are arc-shaped grooves. The arc-shaped grooves on both sides limit the discharge conductor 2 in the limiting cavity 3, which can effectively ensure the limiting effect on the discharge conductor 2 and reduce the difficulty of firing. It is understood that in some other implementations, the limiting cavity 3 can also adopt other structural forms, as long as it can ensure that the inner surface facing the discharge surface of the discharge conductor 2 is an arc surface and can achieve the limiting effect on the discharge conductor 2, and its specific form is not limited.

[0048] In this implementation, preferably, the ceramic shell 1 is cylindrical in shape and has a circular cross-section; alternatively, in other implementations, the ceramic shell 1 is a regular polygonal prism in shape and has a regular polygonal cross-section. The polygonal prism generally requires that the number of its edges is greater than 20 (e.g., 23, 24 or 25, etc.), and the denser the better, thus presenting an overall cylindrical structure.

[0049] Understandably, in some other implementations, the ceramic shell 1 can also take other shapes, as long as it can ensure that there is a limiting cavity 3, and that the inner surface of the limiting cavity 3 facing the discharge surface of the discharge conductor 2 is an arc surface and can limit the discharge conductor 2. Examples of various shapes will not be given here.

[0050] In this implementation, preferably, the outer wall of the ceramic shell 1 includes at least one inner groove 4, such as... Figure 6 As shown, the outer wall of the ceramic shell 1 can be concave (it can be an irregular shape), but it cannot protrude outward. Under the premise of ensuring the discharge effect in the later stage, a strictly regular external structure is not required, which reduces the firing difficulty and improves the overall yield of ceramic electrode manufacturing.

[0051] Example 2:

[0052] In this implementation, a ceramic electrode is proposed, comprising: a ceramic shell 1 with a through hole along the longitudinal direction, a discharge conductor 2 arranged in a limiting cavity 3 within the through hole, the discharge surface of the discharge conductor 2 being an arc surface, and the inner wall surface of the limiting cavity 3 facing the discharge surface being an arc surface, the two arc surfaces having the same curvature.

[0053] In this implementation, preferably, the discharge conductor 2 is an arc-shaped discharge sheet, which can be quickly inserted into the limiting cavity 3 during assembly. It is understood that in some other implementations, the shape of the discharge conductor 2 can also be arbitrary, as long as it can be inserted into the limiting cavity 3 and the discharge surface can be guaranteed to be an arc surface. The specific shape is not limited here, and those skilled in the art can choose according to the specific working conditions, which will not be elaborated here.

[0054] The limiting cavity 3 may include two, such as Figure 7 and Figure 8 As shown, the limiting cavity 3 may include three, such as Figure 9 As shown, the limiting cavity 3 may include four, such as Figure 10As shown; of course, the number of limiting cavities 3 can also include more, such as five, six or even more, which will not be listed here. In use, a discharge conductor 2 is directly inserted into each limiting cavity 3. The arc surface of the discharge conductor 2 has the same curvature as the inner wall surface (also an arc surface) of the limiting cavity 3. The two cooperate to achieve quick and easy installation, which reduces costs and ensures the discharge effect.

[0055] It should be noted that, in this implementation, placing a discharge electrode in each limiting cavity 3 can achieve a better discharge effect.

[0056] In this implementation, preferably, each limiting cavity 3 is evenly distributed within the through hole of the ceramic shell 1, such as... Figure 7 , Figure 9 and Figure 10 As shown, the limiting cavities 3 are evenly arranged along the internal through holes; it can be understood that in some other implementations, the limiting cavities 3 may also be unevenly distributed within the through holes of the ceramic housing 1, such as... Figure 8 As shown, those skilled in the art can make the selection based on specific working conditions, which will not be elaborated further here.

[0057] In this implementation, preferably, both corners of the limiting cavity 3 are arc-shaped grooves. The arc-shaped grooves on both sides limit the discharge conductor 2 in the limiting cavity 3, which can effectively ensure the limiting effect on the discharge conductor 2 and reduce the difficulty of firing. It is understood that in some other implementations, the limiting cavity 3 can also adopt other structural forms, as long as it can ensure that the inner surface facing the discharge surface of the discharge conductor 2 is an arc surface and can achieve the limiting effect on the discharge conductor 2, and its specific form is not limited.

[0058] In this implementation, preferably, the ceramic shell 1 is cylindrical in shape and has a circular cross-section; alternatively, in other implementations, the ceramic shell 1 is a regular polygonal prism in shape and has a regular polygonal cross-section. The polygonal prism generally requires that the number of its edges is greater than 20 (e.g., 23, 24 or 25, etc.), and the denser the better, thus presenting an overall cylindrical structure.

[0059] Understandably, in some other implementations, the ceramic shell 1 can also take other shapes, as long as it can ensure that there is a limiting cavity 3, and that the inner surface of the limiting cavity 3 facing the discharge surface of the discharge conductor 2 is an arc surface and can limit the discharge conductor 2. Examples of various shapes will not be given here.

[0060] In this implementation, preferably, the outer wall of the ceramic shell 1 includes at least one inner groove 4, that is, the outer wall of the ceramic shell 1 can be a concave part (can be an irregular shape), but cannot protrude outward. Under the premise of ensuring the discharge effect in the later stage, a strictly regular external structure is not required, which reduces the firing difficulty and improves the overall yield of ceramic electrode manufacturing.

[0061] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A ceramic electrode, characterized in that, comprising: a ceramic shell with a longitudinal through hole, a discharge conductor is arranged in a limiting cavity in the through hole, the discharge surface of the discharge conductor is a circular arc surface, and the inner wall surface of the limiting cavity opposite to the discharge surface is also a circular arc surface, and the radii of the two circular arc surfaces are the same.

2. The ceramic electrode according to claim 1, characterized in that, the limiting cavity is one.

3. The ceramic electrode according to claim 1, characterized in that, the limiting cavity includes at least two, and at least one limiting cavity is arranged with the discharge conductor.

4. The ceramic electrode according to claim 3, characterized in that, each limiting cavity is uniformly distributed in the through hole of the ceramic shell; or each limiting cavity is randomly distributed in the through hole of the ceramic shell.

5. The ceramic electrode according to any one of claims 1-3, characterized in that, both sides of the limiting cavity are circular arc grooves, and the circular arc grooves on both sides limit the discharge conductor in the limiting cavity.

6. The ceramic electrode according to any one of claims 1-3, characterized in that, the ceramic shell is in the shape of a cylinder as a whole, and the cross section of the ceramic shell is circular.

7. The ceramic electrode according to claim 6, characterized in that, the outer side wall of the ceramic shell includes at least one inner groove.

8. The ceramic electrode according to any one of claims 1-3, characterized in that, the ceramic shell is in the shape of a regular polygonal prism as a whole, and the cross section of the ceramic shell is a regular polygon.

9. The ceramic electrode according to claim 8, characterized in that, the outer side wall of the ceramic shell includes at least one inner groove.

10. A plasma surface treatment machine characterized by comprising: comprising the ceramic electrode according to any one of claims 1-9.