Panel storage container and cleaning system

Abstract

The utility model provides a panel storage container and a cleaning system which can improve the cleaning efficiency of an internal space. The panel storage container includes: a container body having an inner space in which a plurality of panels are stored in a state of being stacked at intervals in the vertical direction, and an opening; the container body includes: a bottom plate defining a lower end of the internal space; a rear wall that defines the rear end of the internal space, the rear wall facing the lid in the front-rear direction in a state in which the lid closes the opening; a first check valve that is attached to a gas supply port provided in the bottom plate and that prevents gas from flowing out of the internal space; a second check valve that is attached to an exhaust port provided in the bottom plate and that prevents gas from flowing into the internal space; and a third check valve attached to a through hole provided in one of the cover and the rear wall, the third check valve preventing one of outflow of gas from the internal space and inflow of gas into the internal space.

Description

Technical Field

[0001] This disclosure relates to a panel storage container and a cleaning system. Background Technology

[0002] A technique for cleaning the internal space of a storage container using gas is known. For example, Japanese Patent Application Publication No. 2005-26674 discloses an air cleaning device comprising a housing and an air intake nozzle and a supply nozzle protruding from the housing. Air drawn in from the air intake nozzle is cleaned within the housing, and the cleaned air is then delivered from the supply nozzle. With the air intake nozzle connected to one of two vents located on the bottom plate of the storage container, and the supply nozzle connected to the other vent, the air in the storage container is circulated and cleaned simultaneously, maintaining the cleanliness of the storage container. Utility Model Content

[0003] In the storage container described in Japanese Patent Application Publication No. 2005-26674, two air vents, respectively connected to a supply nozzle and an air intake nozzle, are provided on the bottom plate of the storage container. For example, when a panel is housed in the storage container, the air supplied from the air vents is blocked by the panel and cannot reach the entire interior space of the storage container. Improved cleaning efficiency is desired in this technical field.

[0004] This disclosure describes a panel storage container and cleaning system that can improve the cleaning efficiency of interior spaces.

[0005] A panel storage container of this disclosure includes: a container body having an internal space and an opening, the internal space housing multiple panels stacked at intervals in a vertical direction; and a lid to close the opening. The container body has: a base plate defining the lower end of the internal space; a back wall, which, when the lid closes the opening, is opposite the lid in a front-rear direction intersecting the vertical direction, defining the rear end of the internal space; a first check valve installed at a gas inlet on the base plate to prevent gas from flowing out of the internal space; a second check valve installed at an exhaust port on the base plate to prevent gas from flowing into the internal space; and a third check valve installed in a through hole in either the lid or the back wall. The third check valve prevents either gas from flowing out of the internal space or gas from flowing into the internal space.

[0006] In the panel storage container, multiple panels are stacked in a vertically spaced manner within the container body. One of the lid and the back wall of the container body, which are opposite each other in the front-to-back direction, has a through hole. According to this structure, the through hole faces the peripheral end face of the panel and is not covered by the panel. For example, when the third check valve prevents gas from flowing out of the internal space, the through hole can be used as a gas supply port for supplying gas to the internal space. In this case, the gas supplied to the internal space through the through hole flows around the panel. When the third check valve prevents gas from flowing into the internal space, the through hole can be used as a gas outlet for discharging gas from the internal space. In this case, the gas discharged from the internal space through the through hole flows around the panel. As described above, regardless of whether the through hole is used as a gas supply port or a gas outlet, gas easily distributes throughout the entire internal space. As a result, the cleaning efficiency of the internal space can be improved.

[0007] In the panel storage container, the through hole can also be a first through hole located on the cover. A second through hole can also be provided on the back wall. The container body can also have a fourth check valve, which is installed in the second through hole to prevent either the outflow of gas from the internal space or the inflow of gas into the internal space. According to this structure, both the first and second through holes are opposite to the peripheral end face of the panel and are not covered by the panel. For example, when the first through hole is used as a gas supply port for supplying gas to the internal space and the second through hole is used as a gas outlet for discharging gas from the internal space, the gas flows from the first through hole toward the second through hole, bypassing the panel. When the second through hole is used as a gas supply port for supplying gas to the internal space and the first through hole is used as a gas outlet for discharging gas from the internal space, the gas flows from the second through hole toward the first through hole, bypassing the panel. Thus, the gas easily distributes throughout the entire internal space. As a result, the cleaning efficiency of the internal space can be improved.

[0008] In the panel storage container, the fourth check valve can also be embedded in the back wall. In this case, compared to a structure where the fourth check valve protrudes rearward from the back wall, the protrusion of the fourth check valve is smaller. When the maximum total length of the panel storage container in the front-to-back direction is specified according to the specifications, the specifications can be met without reducing the capacity of the container body.

[0009] In the panel storage container, a through hole may also be provided in the lid. The container body may also have a flange defining the opening. The lid may also have a first side facing the interior space and a second side opposite to the first side. The third check valve may also protrude forward from the second side. The front end of the third check valve may also be closer to the interior space than the front end face of the flange. For example, when the panel storage container is placed on a panel transfer device, the panel transfer device may sometimes need to bring the front end of the panel storage container into contact with the panel transfer device in order to operate the panel storage container. According to the above structure, since the front end face of the flange is located further forward than the front end of the third check valve, the possibility of the third check valve contacting the panel transfer device is reduced. Therefore, the possibility of the third check valve interfering with and breaking with the panel transfer device can be reduced.

[0010] Another aspect of the cleaning system disclosed herein includes: the panel storage container; and an air supply device for supplying gas to the interior space via a through-hole. A third check valve prevents gas from flowing out of the interior space. Because the cleaning system includes the panel storage container, the gas supplied to the interior space through the through-hole flows around the panel. Therefore, the gas easily distributes throughout the entire interior space. As a result, the cleaning efficiency of the interior space can be improved.

[0011] Another aspect of the cleaning system disclosed herein includes: the panel storage container; an air supply device for supplying gas to the interior space via an air supply port; and an exhaust device for discharging gas from the interior space via a through-hole. A third check valve prevents gas from flowing into the interior space. Because the cleaning system includes the panel storage container, the gas discharged from the interior space through the through-hole flows around the panel. Therefore, the gas easily distributes throughout the entire interior space. As a result, the cleaning efficiency of the interior space can be improved.

[0012] The cleaning system may also include a particle counter that counts the particles contained in the gas discharged from the interior space. The amount of particles in the gas discharged from the interior space is correlated with the amount of particles in the interior space. Therefore, the cleanliness of the interior space can be inferred from the particle counter's count.

[0013] The cleaning system may also include a barometer for measuring the air pressure inside the space. A measuring port for connecting the barometer may also be provided on the cover or back wall. For example, when a barometer and an exhaust device are connected to the same exhaust port, the pressure of the gas discharged from the exhaust port may increase due to the exhaust device, potentially deviating from the air pressure inside the space. According to this structure, since the barometer is connected to the measuring port, the measurement error of the air pressure caused by the exhaust device can be reduced.

[0014] According to this disclosure, the cleaning efficiency of interior spaces can be improved. Attached Figure Description

[0015] Figure 1 This is a block diagram of a cleaning system according to one embodiment.

[0016] Figure 2 yes Figure 1 The diagram shown is an exploded perspective view of the panel storage container.

[0017] Figure 3 yes Figure 1 The back view of the panel storage container is shown.

[0018] Figure 4 yes Figure 1 The bottom view of the panel storage container is shown.

[0019] Figure 5 It is along Figure 2 A cross-sectional view of the VV line.

[0020] Figure 6 It is along Figure 3 A cross-sectional view of the VI-VI line.

[0021] Figure 7 It is a schematic representation Figure 1 The diagram shown illustrates the flow of gas within the panel's storage container.

[0022] Figure 8 This is a partially enlarged cross-sectional view of a modified panel storage container.

[0023] Explanation of icon numbers

[0024] 1: Panel storage container

[0025] 2: Container body

[0026] 2a: Opening

[0027] 3: Cover

[0028] 3a: Through hole (measuring port)

[0029] 3b, 3c: Through holes (first through hole)

[0030] 22: Base plate

[0031] 24: Back wall

[0032] 24a: Through hole (measuring port)

[0033] 24b, 24c: Through holes (second through holes)

[0034] 25: Flange

[0035] 25a: Front end face (end face)

[0036] 28: Gas supply valve (fourth check valve)

[0037] 29: Exhaust valve (fourth check valve)

[0038] 31a: Front surface (second surface)

[0039] 31b: Reverse side (first side)

[0040] 34: Gas supply valve (third check valve)

[0041] 35: Exhaust valve (third check valve)

[0042] 55: Gas supply valve (first check valve)

[0043] 56: Exhaust valve (second check valve)

[0044] 100: Cleaning System

[0045] 101: Gas supply device

[0046] 102: Exhaust device

[0047] 103: Particle Counter

[0048] 104: Barometer

[0049] V: Interior space Detailed Implementation

[0050] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Furthermore, in the description of the drawings, the same reference numerals will be used for the same elements, and repeated descriptions will be omitted. The XYZ coordinate system is shown in each figure. The Y-axis direction (first direction) is the direction that intersects (here, orthogonally) the X-axis direction and the Z-axis direction (second direction). The Z-axis direction is the direction that intersects (here, orthogonally) the X-axis direction and the Y-axis direction. As an example, the X-axis direction is the left-right direction (width direction), the Y-axis direction is the front-back direction (depth direction), and the Z-axis direction is the up-down direction (height direction).

[0051] While referring to Figure 1 The cleaning system of one embodiment is described below. Figure 1 This is a block diagram of a cleaning system according to one embodiment. Figure 1 The cleaning system 100 shown is for the internal space V (refer to) of the panel storage container 1. Figure 2 The cleaning system 100 includes a panel storage container 1, an air supply device 101, an exhaust device 102, a particle counter 103, and a barometer 104.

[0052] The cleaning system 100 removes particulate matter contained in the internal space V by supplying gas to the internal space V of the panel receiving container 1. The cleaning system 100 is installed, for example, in a cleanroom.

[0053] Panel storage container 1 is a container used to store multiple panels. Panel storage container 1 conforms to, for example, the specifications of the Semiconductor Equipment and Materials International (SEMI). Panel storage container 1 is, for example, called a front-opening unified pod (FOUP) and is used to transfer panels within a factory. Examples of panels include glass substrates for liquid crystal panels and panels containing electronic components. The panels are rectangular. Examples of panel sizes include 510mm × 515mm and 600mm × 600mm. The number of panels that can be stored in panel storage container 1 is arbitrary, for example, six, twelve, sixteen, or twenty-four panels.

[0054] The panel storage container 1 is used, for example, in a manufacturing apparatus for electronic component assemblies. The electronic component assemblies are manufactured, for example, through the following processes: mounting multiple electronic components on a large carrier plate such as a glass plate or stainless steel plate; sealing these electronic components using epoxy resin or the like; peeling the sealed electronic components from the carrier plate in panel form; and individually cutting out the panel-shaped electronic components. The panel storage container 1 is used to transfer panels between these processes. Details of the panel storage container 1 will be described later.

[0055] Gas supply device 101 is a device for supplying gas to the internal space V. The gas is, for example, clean dry air (CDA). CDA is dried air (dry air) conforming to JIS B8392, and is obtained by filtering more than 99% of the particles with a particle size of 0.01 μm or larger contained in the dry air. For example, dry air of grade 1 as specified in JIS B8392 is used. The gas supplied by gas supply device 101 may also be an inert gas such as nitrogen or argon. Here, CDA is used from the perspective of improved safety and cost reduction.

[0056] The cleaning system 100 includes an air supply pipe 105. An air supply device 101 is connected to the panel storage container 1 via the air supply pipe 105. The air supply device 101 supplies gas to the panel storage container 1 via the air supply pipe 105. The air supply pipe 105 may include one pipe or multiple pipes.

[0057] The exhaust device 102 is a device for discharging gas from the internal space V. The exhaust device 102 may include, for example, an exhaust fan. The cleaning system 100 includes an exhaust pipe 106. The exhaust device 102 is connected to the panel storage container 1 via the exhaust pipe 106. The exhaust device 102 discharges gas from the panel storage container 1 via the exhaust pipe 106. The exhaust pipe 106 may include one or more pipes.

[0058] The particle counter 103 is a machine that counts the particles contained in the gas discharged from the internal space V. The particle counter 103 outputs the particle count value to a display device (not shown). The cleaning system 100 includes piping 107. The particle counter 103 is connected to the exhaust pipe 106 via piping 107. The particle counter 103 can draw in a portion of the gas flowing through the exhaust pipe 106 via piping 107. When the exhaust device 102 discharges gas from the panel receiving container 1, a portion of the gas discharged from the internal space V by drawing in gas via the particle counter 103 branches off from the exhaust pipe 106 to piping 107. The particle counter 103 counts the particles contained in the branched gas.

[0059] The barometer 104 is a machine for measuring the air pressure in the internal space V. The cleaning system 100 includes piping 108. The barometer 104 is connected to the internal space V of the panel receiving container 1 via piping 108. The barometer 104 outputs the measured air pressure value to a display device (not shown) at predetermined time intervals.

[0060] Next, while referring to Figure 2 While explaining the details of panel storage container 1. Figure 2 yes Figure 1 The diagram shows an exploded perspective view of the panel storage container. (See diagram below.) Figure 2 As shown, the panel storage container 1 includes a container body 2, a lid 3, and a pair of handles 4.

[0061] The container body 2 is a cuboid-shaped container with an open front (front surface). In other words, the container body 2 is a front-opening box-type container with an opening 2a on its front surface. The container body 2 has an internal space V for accommodating multiple panels. Specifically, the container body 2 stores multiple panels in a stacked manner, spaced apart from each other in the vertical direction. The panels enter and exit the container body 2 through the opening 2a. Details of the container body 2 will be described later.

[0062] The cover 3 is a component used to close the opening 2a of the container body 2. The cover 3 airtightly closes the opening 2a of the container body 2 via sealing components such as gaskets. The cover 3 is detachably mounted on the flange 25 that defines the opening 2a. The cover 3 includes a cover body 31, a cover component 32, a locking mechanism 33, an air supply valve 34, an air exhaust valve 35, and a measuring pipe fitting 36.

[0063] The cover body 31 is the main body of the cover 3. The cover body 31 is a rectangular plate. The cover body 31 may contain metal materials such as aluminum and magnesium alloys. The cover body 31 may also contain thermoplastic resins such as polycarbonate resin. The cover body 31 has a front surface 31a (second surface) and a back surface 31b (first surface). The back surface 31b is the surface opposite to the internal space V and multiple panels in the front-back direction when the cover 3 has the opening 2a closed. The front surface 31a is the surface opposite to the back surface 31b in the front-back direction. The cover body 31 has a through hole 3a (measuring port), a through hole 3b (first through hole), and a through hole 3c (first through hole) that penetrate the cover body 31 in the front-back direction. When the panel storage container 1 is viewed from the front, the through hole 3a is located at the upper left corner of the cover body 31, the through hole 3b is located at the upper right corner of the cover body 31, and the through hole 3c is located at the lower right corner of the cover body 31.

[0064] The cover member 32 is a member that covers the front surface 31a of the cover body 31. The cover member 32 is a rectangular plate. The cover member 32 may contain, for example, a resin material such as polycarbonate. The cover member 32 is smaller than the cover body 31. A keyhole 32h is provided on the cover member 32. A key (not shown) is inserted into the keyhole 32h.

[0065] The locking mechanism 33 locks or unlocks the cover 3 by operating a key inserted into the keyhole 32h. The locking mechanism 33 includes a latch (not shown). With the cover 3 mounted on the flange 25, the latch is engaged into the locking hole 25h on the flange 25 by operating the key, thereby locking the cover 3. With the cover 3 locked, the latch is removed from the locking hole 25h by operating the key, thereby unlocking the cover 3.

[0066] The gas supply valve 34 is a mechanism for supplying gas to the internal space V. The gas supply valve 34 is configured as a check valve that allows gas to flow into the internal space V while preventing gas from flowing out of the internal space V. When the gas supply valve 34 is connected to the gas supply pipe 105, the gas supply valve 34 opens when the gas pressure in the gas supply pipe 105 is higher than the gas pressure in the internal space V by a predetermined pressure. The gas supply valve 34 is installed in the through hole 3c. The gas supply device 101 can be connected to the through hole 3c via the gas supply valve 34.

[0067] The exhaust valve 35 is a mechanism for discharging gas from the internal space V. The exhaust valve 35 is configured as a check valve that allows gas to flow out of the internal space V while preventing gas from flowing into the internal space V. When the exhaust valve 35 is connected to the exhaust pipe 106, the exhaust valve 35 opens when the gas pressure in the internal space V is higher than the gas pressure in the exhaust pipe 106 by a predetermined pressure. The exhaust valve 35 is installed in the through hole 3b. The exhaust device 102 can be connected to the through hole 3b via the exhaust valve 35.

[0068] Pipe fitting 36 connects the internal space V to the external space of the container body 2. Pipe fitting 36 is installed in the through hole 3a. Pipe 108 can be connected to pipe fitting 36. Barometer 104 can be connected to the through hole 3a via pipe fitting 36. When pipe fitting 36 is not connected to pipe 108, pipe fitting 36 is closed by a cap (not shown).

[0069] A pair of handles 4 are components used by the conveying device to transport the panel storage container 1. The pair of handles 4 are located at the left and right ends of the top plate 21. The conveying device grasps the pair of handles 4 to lift the panel storage container 1, thereby allowing the conveying device to transport the panel storage container 1.

[0070] The container body 2, the lid 3, and the pair of handles 4 are constructed by combining multiple parts formed from metal or resin materials. Examples of resins included in the molding material include thermoplastic resins. Examples of thermoplastic resins include polycarbonate, cyclic olefin polymers, polyetherimide, polyetherketone, polyetheretherketone, polybutylene terephthalate, polyacetal, liquid crystal polymers, polymethyl methacrylate, and acrylic resins such as acrylonitrile butadiene styrene copolymers. Mixtures of these resins may also be used as the molding material.

[0071] Conductive substances and various antistatic agents can also be added to these resins. Conductive substances include, for example, carbon fibers, carbon powder, carbon nanotubes, or conductive polymers. Anionic, cationic, and nonionic antistatic agents can be used. Benzotriazole, salicylic acid, cyanoacrylate, oxalate aniline, and hindered amine UV absorbers can also be added. Glass fibers or carbon fibers, which improve rigidity, can also be selectively added.

[0072] Next, while further referring to Figure 3 , while detailing the container body 2. Figure 3 yes Figure 1 The back view of the panel storage container is shown. Figure 2 and Figure 3As shown, the container body 2 includes a top plate 21, a bottom plate 22, a pair of side walls 23, a back wall 24, a flange 25, a frame 26, a base 27, an air supply valve 28 (fourth check valve), an exhaust valve 29 (fourth check valve), a measuring pipe fitting 30, and a cover component 37.

[0073] The top plate 21, bottom plate 22, side walls 23, and back wall 24 are rectangular plates. The top plate 21 and bottom plate 22 are opposite each other in the vertical direction and are substantially parallel. The pair of side walls 23 are opposite each other in the horizontal direction and are substantially parallel. The back wall 24 is opposite to the cover 3 in the front-back direction when the opening 2a of the cover 3 is closed. Two adjacent members of the top plate 21, bottom plate 22, side walls 23, and back wall 24 are connected. The internal space V is defined by the top plate 21, bottom plate 22, the pair of side walls 23, and back wall 24.

[0074] On the base plate 22, there are two air supply ports 22a that penetrate the base plate 22 in the vertical direction (see reference). Figure 5 ) and two exhaust ports 22b (refer to) Figure 5 Two air inlets 22a are located on the rear portion of the base plate 22, arranged horizontally between the two left-right shafts 62a described later when viewed from above. One air inlet 22a is located near one of the shafts 62a, and the other air inlet 22a is located near the other shaft 62a.

[0075] Two exhaust ports 22b are located on the front part of the base plate 22, arranged in a left-right direction between the two shafts 62a when viewed from above. One exhaust port 22b is located near one of the shafts 62a, and the other exhaust port 22b is located near the other shaft 62a.

[0076] The back wall 24 is provided with a through hole 24a (measuring port), a through hole 24b (second through hole), and a through hole 24c (second through hole) that extend through the back wall 24 in the front-back direction. When the panel storage container 1 is viewed from the front, the through hole 24a is located at the upper right corner of the back wall 24, the through hole 24b is located at the upper left corner of the back wall 24, and the through hole 24c is located at the lower left corner of the back wall 24.

[0077] The flange 25 is a rectangular frame, extending to the front end of the top plate 21, the front end of the bottom plate 22, and the front ends of a pair of side walls 23. The flange 25 defines an opening 2a. Two locking holes 25h are provided on the upper and lower frame portions of the flange 25, spaced apart in the left-right direction. The locking holes 25h on the upper and lower frame portions are positioned opposite each other in the vertical direction. The flange 25 has a front surface 25a that forms the front end of the flange 25. Viewed from the front, the front surface 25a surrounds the opening 2a of the container body 2.

[0078] The frame 26 is used to fix the top plate 21, the bottom plate 22, the pair of side walls 23, and the back wall 24. The frame 26 may be made of metal materials such as aluminum or stainless steel. The frame 26 is provided on the front surface of the back wall 24. The frame 26 has a frame portion 26a, a support column 26b, and a pair of support columns 26c. The frame portion 26a is a rectangular member and is provided along the perimeter of the back wall 24.

[0079] The support column 26b and the pair of support columns 26c are columnar members extending vertically. One support column 26c, support column 26b, and the other support column 26c are arranged sequentially in the left-right direction and are substantially parallel to each other. The support column 26b and the pair of support columns 26c extend from the upper frame portion of the frame portion 26a to the lower frame portion. The support column 26b is located at the center of the frame 26 in the left-right direction, and the pair of support columns 26c are located near both ends of the frame 26 in the left-right direction. The support column 26b has multiple fitting holes for mounting the shaft 61a of the support member 61 (described later). The support column 26c has multiple fitting holes for mounting the shaft 62a of the support member 62 (described later).

[0080] The pedestal portion 27 serves as the base for the container body 2. The pedestal portion 27 is located on the lower surface of the base plate 22. The pedestal portion 27 is constructed by assembling multiple columnar support members.

[0081] The gas supply valve 28 is a mechanism for supplying gas to the internal space V. The gas supply valve 28 is configured as a check valve that allows gas to flow into the internal space V while preventing gas from flowing out of the internal space V. When the gas supply valve 28 is connected to the gas supply pipe 105, the gas supply valve 28 opens when the gas pressure in the gas supply pipe 105 is higher than the gas pressure in the internal space V by a predetermined pressure. The gas supply valve 28 is installed in the through hole 24c and embedded in the back wall 24. The gas supply device 101 can be connected to the through hole 24c via the gas supply valve 28.

[0082] The exhaust valve 29 is a mechanism for discharging gas from the internal space V. The exhaust valve 29 is configured as a check valve that allows gas to flow out of the internal space V while preventing gas from flowing into the internal space V. When the exhaust valve 29 is connected to the exhaust pipe 106, the exhaust valve 29 opens when the gas pressure in the internal space V is higher than the gas pressure in the exhaust pipe 106 by a predetermined pressure. The exhaust valve 29 is installed in the through hole 24b and embedded in the back wall 24. The exhaust device 102 can be connected to the through hole 24b via the exhaust valve 29.

[0083] Piping connector 30 connects the internal space V to the external space of the container body 2. Piping connector 30 is installed in the through hole 24a and embedded in the back wall 24. Piping 108 can be connected to piping connector 30. Barometer 104 can be connected to the through hole 24a via piping connector 30. When piping connector 30 is not connected to piping 108, piping connector 30 is closed by a cap (not shown).

[0084] Thus, when viewed from the front, the air supply valve 28 is positioned at the lower left corner of the back wall 24, and the exhaust valve 35 is positioned at the upper right corner. Therefore, the air supply valve 28 and the exhaust valve 35 are positioned along the diagonal of the panel storage container 1. Similarly, the air supply valve 34 and the exhaust valve 29 are positioned along the diagonal of the panel storage container 1.

[0085] Next, while referring to Figure 4 The components located at the bottom of the panel storage container 1 are explained. Figure 4 yes Figure 1 The diagram shows the bottom surface of the panel storage container. (See attached image.) Figure 4 As shown, the panel storage container 1 further includes a base plate 51, a mounting plate 52, a mounting plate 53, a positioning member 54, an air supply valve 55 (first check valve), and an exhaust valve 56 (second check valve).

[0086] The base plate 51 is a substrate for mounting the positioning member 54, the air supply valve 55, and the exhaust valve 56. The base plate 51 is a rectangular plate. The base plate 51 is located below the pedestal portion 27. The base plate 51 has through holes 51h for mounting the air supply valve 55 and through holes 51j for mounting the exhaust valve 56. The base plate 51 has two through holes 51h and two through holes 51j. The two through holes 51h are located at the rear corners of the four corners of the base plate 51. The two through holes 51j are located at the front corners of the four corners of the base plate 51. The through holes 51h connect to the air supply port 22a (see reference 22a) on the base plate 22 via the air supply valve 55. Figure 5 The through hole 51j is connected to the exhaust port 22b (see reference) located on the base plate 22 via the exhaust valve 56. Figure 5 Connect.

[0087] Mounting plates 52 and 53 are components used to mount the positioning member 54 to the base plate 51. Mounting plates 52 and 53 are plate-shaped components. Mounting plate 52 has two through holes 52g for exposing the positioning member 54. Between the two through holes 52g, mounting plate 52 has two through holes 52h for fixing the panel storage container 1. The two through holes 52h are arranged in a left-right direction. Each through hole 52h is, for example, a rectangular elongated hole extending in the left-right direction.

[0088] Mounting plate 53 is provided on the lower surface of the rear portion of base plate 51. Through holes 53g are provided on mounting plate 53 to expose positioning members 54. Positioning members 54 are components used by external devices such as conveying devices or processing devices for positioning the panel storage container 1 (container body 2). Positioning members 54 are V-shaped plates. Positioning members 54 are recessed into mounting holes in base plate 51 towards the bottom plate 22 (facing upwards). V-shaped grooves are defined by the V-shaped surface of positioning members 54. The V-shaped surface undergoes a wear-resistant surface treatment. The panel storage container 1 includes three positioning members 54.

[0089] The gas supply valve 55 and the exhaust valve 56 are used to maintain the cleanliness and low humidity of the interior (internal space V) of the panel storage container 1. The gas supply valve 55 is a mechanism for supplying gas to the internal space V. The gas supply valve 55 is configured as a check valve that allows gas to flow into the internal space V while preventing gas from flowing out of the internal space V. When the gas supply valve 55 is connected to the gas supply pipe 105, the gas supply valve 55 opens when the gas pressure in the gas supply pipe 105 is higher than the gas pressure in the internal space V by a predetermined pressure. The gas supply valve 55 is installed in the gas supply port 22a with its insertion through the through hole 51h. The gas supply device 101 can be connected to the gas supply port 22a via the gas supply valve 55. In this embodiment, the panel storage container 1 includes two gas supply valves 55. The two gas supply valves 55 are provided to protrude from the two through holes 51h respectively.

[0090] The exhaust valve 56 is a mechanism for discharging gas from the internal space V. The exhaust valve 56 is configured as a check valve that allows gas to flow out of the internal space V while preventing gas from flowing into the internal space V. When the exhaust valve 56 is connected to the exhaust pipe 106, the exhaust valve 56 opens when the gas pressure in the internal space V is higher than the gas pressure in the exhaust pipe 106 by a predetermined pressure. The exhaust valve 56 is installed in the exhaust port 22b with its insertion through the through hole 51j. The exhaust device 102 can be connected to the exhaust port 22b via the exhaust valve 56. In this embodiment, the panel storage container 1 includes two exhaust valves 56. The two exhaust valves 56 are provided to protrude from the two through holes 51j respectively.

[0091] At the corner of the container body 2, a cover member 37 is provided to prevent microparticles from entering the internal space V.

[0092] Next, while referring to Figure 5 On the one hand, the internal structure of container body 2 is explained. Figure 5 It is along Figure 2 A cross-sectional view of the VV line. (See figure) Figure 5As shown, the panel storage container 1 includes multiple support members 61, multiple support members 62, multiple pillars 63, multiple retainers 64, and multiple side plates 65.

[0093] Each support member 61 is a portion used to support the central part of the panel in the left-right direction. Each support member 61 includes a shaft 61a and a plurality of elastic bodies 61b. Each support member 62 is a portion used to support the end part of the panel in the left-right direction. Each support member 62 includes a shaft 62a, a plurality of elastic bodies 62b, a stop 62c, and a stop 62d.

[0094] Shafts 61a and 62a are columnar (e.g., cylindrical) components extending in the front-rear direction. The rear end of shaft 61a is fixed to support column 26b. The rear end of shaft 62a is fixed to support column 26c. Shafts 61a and 62a may contain materials with high bending stiffness. Examples of materials for shafts 61a and 62a include stainless steel and aluminum, as well as carbon fiber reinforced plastics. The length of shaft 62a in the front-rear direction is slightly longer than the length of the panel in the front-rear direction, and longer than the length of shaft 61a in the front-rear direction.

[0095] Each elastomer 61b is an annular (e.g., circular) component located on the outer circumferential surface of shaft 61a about its axis. Each elastomer 62b is an annular (e.g., circular) component located on the outer circumferential surface of shaft 62a about its axis. Elastomers 61b and 62b are provided to suppress panel slippage and improve panel positioning accuracy. Elastomers 61b and 62b may include, for example, rubber materials. Examples of rubber materials include ethylene propylene diene monomer (EPDM), silicone rubber, and fluororubber. Multiple elastomers 61b are arranged at certain intervals along the extension direction of shaft 61a. Multiple elastomers 62b are arranged at certain intervals along the extension direction of shaft 62a.

[0096] The stop 62c is a component used to determine the position of the rear end of the panel. The stop 62c comprises, for example, the resin material. The stop 62c is provided at the rear end of the shaft 62a. The stop 62c has a block-shaped form. The stop 62c has a through hole for inserting the shaft 62a in the front-rear direction.

[0097] The stop 62d is a component used to prevent the panel from flying off and to determine the position of the front end of the panel. The stop 62d contains, for example, the resin material. The stop 62d is provided at the front end of the shaft 62a.

[0098] The number of support members 61 and 62 varies according to the number of panels that can be stored in the panel storage container 1. In this embodiment, the panel storage container 1 includes one support member 61 and two support members 62 for each panel. In other words, a storage layer for storing one panel is formed by one support member 61 and two support members 62. In the left-right direction, a support member 61 is arranged between the two support members 62.

[0099] Each support column 63 is a component for mounting the retainer 64. Each support column 63 is a columnar member extending vertically from the top plate 21 to the bottom plate 22. Each support column 63 is made of metal materials such as aluminum and stainless steel. Each support column 63 is provided on the inner surface of the side wall 23. In this embodiment, two support columns 63 are provided on each side wall 23. The two support columns 63 are arranged in the front-rear direction and are substantially parallel to each other.

[0100] Each retainer 64 is a component used to retain (support) the shaft 62a and support the left-right end of the panel. In this embodiment, each retainer 64 is provided as a storage layer covering four layers. Three retainers 64 are provided in the vertical direction corresponding to each pillar 63. The front surface of the retainer 64 abuts against the rear surface of the pillar 63, and the retainer 64 is fixed to the pillar 63 by screws. Therefore, in this embodiment, six retainers 64 are provided on each side wall 23.

[0101] Each retainer 64 includes a number of mounting portions 64a equal to the number of shafts 62a that can be held by the retainer 64. In this embodiment, each retainer 64 includes four mounting portions 64a. Each mounting portion 64a is the end portion of the mounting panel in the left-right direction and is the portion that holds the shaft 62a. Each mounting portion 64a protrudes toward the internal space V in the left-right direction. Each mounting portion 64a has a through hole that extends through the mounting portion 64a in the front-back direction, and the shaft 62a is inserted into the through hole.

[0102] Each side plate 65 is a component for mounting the support column 63. Each side plate 65 is a plate-shaped component extending in the vertical direction. Each side plate 65 is made of metal materials such as aluminum and stainless steel. Each side plate 65 is provided on the outer surface of the side wall 23. In this embodiment, each side wall 23 is provided with two side plates 65. The two side plates 65 are arranged in the front-rear direction and are substantially parallel to each other. One side plate 65 is provided near the center in the front-rear direction of the side wall 23, and the other side plate 65 is provided near the front end in the front-rear direction of the side wall 23.

[0103] Next, while referring to Figure 6 On the one hand, the positional relationship of each valve and each pipe joint is explained. Figure 6 It is along Figure 3 A cross-sectional view of the VI-VI line.

[0104] like Figure 6 As shown, the air supply valve 34 protrudes forward from the front surface 31a. The front end 34a of the air supply valve 34 is located further rearward than the front surface of the cover member 32 and further rearward than the front end face 25a of the flange 25. That is, the front end 34a of the air supply valve 34 is closer to the internal space V than the front end face 25a of the flange 25. In other words, the distance between the front end 34a and the internal space V is shorter than the distance between the front end face 25a and the internal space V. Similarly, the exhaust valve 35 protrudes forward from the front surface 31a. The front end 35a of the exhaust valve 35 is located further rearward than the front surface of the cover member 32 and further rearward than the front end face 25a of the flange 25. That is, the front end 35a of the exhaust valve 35 is closer to the internal space V than the front end face 25a of the flange 25. In other words, the distance between the front end 35a and the internal space V is shorter than the distance between the front end face 25a and the internal space V. Similarly, the pipe fitting 36 (see reference) Figure 2 The pipe fitting 36 protrudes forward from the front surface 31a. The front end of the pipe fitting 36 is located further rearward than the front surface of the cover member 32, and further rearward than the front end face 25a of the flange 25. That is, the front end of the pipe fitting 36 is closer to the internal space V than the front end face 25a of the flange 25. In other words, the distance between the front end of the pipe fitting 36 and the internal space V is shorter than the distance between the front end face 25a and the internal space V.

[0105] As described above, the air supply valve 28 and the exhaust valve 29 (see reference) Figure 3 The front end 28a (rear end) of the air supply valve 28 protrudes slightly rearward from the back wall 24, extending to a position substantially the same as the rear end 37a of the cover member 37 in the longitudinal direction. Similarly, the front end 29a (rear end) of the exhaust valve 29 protrudes slightly rearward from the back wall 24, extending to a position substantially the same as the rear end 37a of the cover member 37 in the longitudinal direction. Likewise, the front end 30a (rear end) of the pipe connector 30 protrudes slightly rearward from the back wall 24, extending to a position substantially the same as the rear end 37a of the cover member 37 in the longitudinal direction. That is, the front ends 28a, 29a, and 30a are located on the same plane orthogonal to the longitudinal direction as the rear end of the cover member 37.

[0106] Next, while referring to Figure 7 The flow of gas relative to the panel storage container 1 is explained. Figure 7 It is a schematic representation Figure 1 The diagram shown illustrates the gas flow within the panel housing the container. Figure 7The diagram shows the flows FL1, FL2, FL3, FL4, FL5, and FL6. Flow FL1 is the flow of gas supplied to gas supply valve 55. Flow FL2 is the flow of gas supplied to gas supply valve 28. Flow FL3 is the flow of gas supplied to gas supply valve 34. Flow FL4 is the flow of gas discharged from exhaust valve 56. Flow FL5 is the flow of gas discharged from exhaust valve 29. Flow FL6 is the flow of gas discharged from exhaust valve 35.

[0107] The air supply device 101 is selectively connected to one or more air supply valves, including air supply valve 28, air supply valve 34, and air supply valve 55, via air supply pipe 105. The exhaust device 102 is selectively connected to one or more exhaust valves, including exhaust valve 29, exhaust valve 35, and exhaust valve 56, via exhaust pipe 106. Thus, selective operation is achieved. Figure 7 The flow of gas is shown.

[0108] Next, the cleaning method for panel storage container 1 will be explained. First, a preparation process is performed. In the preparation process, panel storage container 1, which is to be cleaned, is prepared. Furthermore, air supply device 101, exhaust device 102, barometer 104, and particle counter 103 are connected to panel storage container 1.

[0109] In this embodiment, the panel storage container 1 has a gas supply valve 28, a gas supply valve 34, and a gas supply valve 55 as valves that can supply gas to the internal space V. Therefore, at least one of these gas supply valves is connected to the gas supply device 101 via a gas supply pipe 105. Similarly, in this embodiment, the panel storage container 1 has an exhaust valve 29, an exhaust valve 35, and an exhaust valve 56 as valves that can discharge gas from the internal space V. Therefore, at least one of these exhaust valves is connected to the exhaust device 102 via an exhaust pipe 106. In this embodiment, the panel storage container 1 has a pipe connector 30 and a pipe connector 36 as pipe connectors for measurement. Therefore, at least one of these pipe connectors is connected to the barometer 104 via a pipe 108. Furthermore, the particle counter 103 is connected to the exhaust pipe 106 via a pipe 107. The following description illustrates the case where the exhaust device 102 is connected to the gas supply valve 28, the exhaust device 102 is connected to the exhaust valve 35, and the barometer 104 is connected to the pipe connector 36.

[0110] Next, a cleaning process is performed to clean the internal space V. In this cleaning process, the barometer 104 is first activated to begin measurement. The air supply device 101 is set to obtain the desired air supply flow rate to begin supplying air, and the exhaust device 102 is set to obtain the desired exhaust flow rate to begin exhausting air. The particle counter 103 is activated together with the exhaust device 102 to begin measurement. Furthermore, the air supply flow rate and exhaust flow rate are set such that the air pressure in the internal space V remains positive. Positive pressure means that the air pressure in the internal space V is greater than the air pressure outside the container body 2. The exhaust flow rate is, for example, the sum of the exhaust flow rate of the exhaust device 102 and the exhaust flow rate of the particle counter 103. For example, the air supply flow rate is set to a value greater than the exhaust flow rate.

[0111] Therefore, as Figure 7 As shown in flow FL2, gas (CDA) is supplied to the internal space V from the gas supply device 101 via the gas supply pipe 105 and the gas supply valve 28. The gas supplied from the gas supply device 101 removes particles adhering to the components within the internal space V. Furthermore, as... Figure 7 As shown in the flow FL6, the brushed-off particles, along with the gas, are discharged from the internal space V through the exhaust valve 35 and the exhaust pipe 106.

[0112] When viewing the panel housing 1 from the front, the gas supply valve 28 is located at the lower left corner of the rear wall 24, and the exhaust valve 35 is located at the upper right corner of the cover body 31. Therefore, gas is supplied from the lower left rear of the internal space V and discharged from the upper right front of the internal space V. Consequently, the gas is widely distributed throughout the internal space V. This efficiently removes particulate matter.

[0113] Furthermore, in this example, the gas supply flow rate is set to a value greater than the exhaust flow rate, thus creating a positive pressure in the internal space V. Therefore, the likelihood of particles entering the internal space V from the outside of the container body 2 is reduced. While the internal space V is under positive pressure, gas may also be discharged from exhaust valves 56 and 29. In this case, gas flows along flows FL4 and FL5 in addition to flows FL2 and FL6.

[0114] Next, it is determined whether the conditions for ending the cleaning of the internal space V have been met, i.e., the termination condition. Here, as an example of the termination condition, the count value of the particle counter 103 is lower than a preset target value. If the count value output from the particle counter 103 is greater than the target value, it is determined that the termination condition has not yet been met, and the cleaning process continues until the termination condition is met.

[0115] On the other hand, if the count value output from the particle counter 103 is less than the target value, it is determined that the termination condition has been met, and the cleaning process ends. Furthermore, the operation of the air supply device 101, the exhaust device 102, the barometer 104, and the particle counter 103 is stopped, and the air supply device 101, the exhaust device 102, the barometer 104, and the particle counter 103 are removed from the panel storage container 1.

[0116] The above steps complete the cleaning process.

[0117] In the panel storage container 1, cleaning system 100, and cleaning method of panel storage container 1 described above, multiple panels are stored in the container body 2 in a stacked manner with intervals between them in the vertical direction. The cover 3 has through holes 3b and 3c, and the back wall 24 has through holes 24b and 24c. The through holes 3b, 3c, 24b, and 24c face the peripheral surfaces of the panels but are not covered by them. Gas supplied to the internal space V through the through holes 3c and 24c flows away from the panels. Gas discharged from the internal space V through the through holes 3b and 24b flows away from the panels. As described above, since the gas supplied or discharged through the through holes 3b, 3c, 24b, and 24c flows away from the panels, the gas easily permeates the entire internal space V. As a result, the cleaning efficiency of the internal space V can be improved.

[0118] For example, when gas is supplied to the internal space V through the through-hole 3c and discharged from the internal space V through the through-hole 24b, the gas flows from the through-hole 3c toward the through-hole 24b, bypassing the panel. Similarly, when gas is supplied to the internal space V through the through-hole 24c and discharged from the internal space V through the through-hole 3b, the gas flows from the through-hole 24c toward the through-hole 3b, bypassing the panel. This allows the gas to easily distribute throughout the entire internal space V. As a result, the cleaning efficiency of the internal space V can be improved.

[0119] Through holes 3c and 24b are arranged along the diagonal of the panel receiving container 1. Similarly, through holes 3b and 24c are arranged along the diagonal of the panel receiving container 1. Therefore, the distance between the through holes used as air inlets and the through holes used as exhaust outlets can be increased, allowing gas to easily spread throughout the entire interior space V. As a result, the cleaning efficiency of the interior space V can be further improved.

[0120] The air supply valve 28, exhaust valve 29, and pipe fitting 30 are respectively embedded in the rear wall 24. Compared to a structure where these valves and pipe fittings protrude rearward from the rear wall 24, the protrusion of these valves and pipe fittings is small. The SEMI specification specifies the maximum value of the total length of the panel housing container 1 in the front-to-back direction, thus allowing compliance with the SEMI specification without reducing the capacity of the container body 2.

[0121] For example, when the panel storage container 1 is placed on a panel transfer device (loading port), the panel transfer device sometimes needs to bring the front end of the panel storage container 1 into contact with it in order to operate the panel storage container 1. In the panel storage container 1, the front end face 25a of the flange 25 is located further forward than the front end 34a of the air supply valve 34, the front end 35a of the exhaust valve 35, and the front end of the pipe connector 36. Therefore, the possibility of the air supply valve 34, the exhaust valve 35, and the pipe connector 36 contacting the panel transfer device is reduced. Consequently, the possibility of the air supply valve 34, the exhaust valve 35, and the pipe connector 36 interfering with and being damaged by the panel transfer device can be reduced.

[0122] The particle counter 103 counts the particles contained in the gas discharged from the internal space V. During the cleaning process, the particles contained in the gas discharged from the internal space V are counted. The amount of particles contained in the gas discharged from the internal space V is related to the amount of particles contained in the internal space V. Therefore, the cleanliness of the internal space can be inferred from the count value of the particle counter. Therefore, if the count value is lower than the target value, it can be determined that the internal space V has been sufficiently cleaned, and the cleaning process ends.

[0123] For example, when a barometer 104 and an exhaust device 102 are connected to the same exhaust port, the pressure of the gas discharged from the exhaust port will increase due to the exhaust device 102, and this pressure may deviate from the air pressure of the internal space V. In the panel storage container 1, a barometer 104 is connected to a through hole 3a or through hole 24a. With this structure, the barometer 104 is connected to a through hole 3a or through hole 24a that is different from the exhaust port, thus reducing the measurement error of the air pressure caused by the exhaust device 102. For example, when the measurement value of the barometer 104 is displayed on a display device (not shown), the operator can more accurately grasp the air pressure of the internal space V.

[0124] During the cleaning process, the air supply and exhaust flow rates are controlled to maintain a positive pressure in the internal space V. When the internal space V is under positive pressure, the likelihood of particles entering the internal space V from the outside of the container body 2 is reduced. Therefore, the cleaning efficiency of the internal space V can be improved.

[0125] Next, while referring to Figure 8The panel storage container of the modified example is explained. Figure 8 This is a partially enlarged cross-sectional view of a modified panel storage container. For example... Figure 8 As shown, the main difference between the modified panel storage container 1A and the panel storage container 1 lies in the installation configuration of the gas supply valve 28, the exhaust valve 29, and the pipe fitting 30.

[0126] In the panel storage container 1A, the air supply valve 28, the exhaust valve 29, and the pipe connector 30 protrude rearward from the back wall 24. The front end 28a of the air supply valve 28, the front end 29a of the exhaust valve 29, and the front end 30a of the pipe connector 30 are each located further rearward than the rear end 37a of the cover member 37. For example, when the panel storage container 1 is placed on the panel transfer device (loading port), the air supply valve 28, the exhaust valve 29, and the pipe connector 30 will not come into contact with the panel transfer device, and therefore will not interfere with the panel transfer device.

[0127] Furthermore, the panel storage container, cleaning system, and cleaning method disclosed herein are not limited to the embodiments described.

[0128] Panel storage container 1 can also be a front-opening shipping box (FOSB) used for transporting panels (substrates) between factories.

[0129] Alternatively, at least one of the through hole 3a and through hole 24a may be omitted.

[0130] In the panel storage container 1, it is sufficient to have at least one of the following: through hole 3b, through hole 3c, through hole 24b, and through hole 24c. For example, if at least one of through hole 3b and through hole 3c is provided, but neither through hole 24b nor through hole 24c is provided, it is not necessary to form a through hole on the back wall 24. Therefore, the panel storage container 1 can be easily manufactured by simply changing the design of the cover, which is a component of conventional panel storage containers.

[0131] Through holes 3a, 3b, 3c, 24a, 24b, and 24c can each be used as an air supply port, an exhaust port, or a measuring port. Each through hole is equipped with a valve or piping fitting corresponding to its function.

[0132] When the cover 3 has a through hole but the back wall 24 does not, the air supply valve 34 and the exhaust valve 35 may also be arranged along the diagonal of the cover 3. Similarly, when the back wall 24 has a through hole but the cover 3 does not, the air supply valve 28 and the exhaust valve 29 may also be arranged along the diagonal of the back wall 24.

[0133] The positions of the through holes 3a, 3b, and 3c are not limited to [specific locations]. Figure 2 The positions shown are as follows. For through holes 3a, 3b, and 3c, they can be placed at any position as long as they are locations in the front surface 31a that are not covered by the cover member 32.

[0134] The positions of the through holes 24a, 24b, and 24c are not limited to [specific locations]. Figure 3 The positions shown are as follows. For through holes 24a, 24b, and 24c, they can be placed at any position as long as they are in the back wall 24 and will not interfere with the frame 26.

[0135] The front end 34a of the air supply valve 34, the front end 35a of the exhaust valve 35, and the front end of the pipe fitting 36 may also be located further forward than the front end face 25a of the flange 25.

[0136] Alternatively, two or more of the gas supply valves 28, 34, and 55 can be connected to the gas supply pipe 105. In this case, the gas supply pipe 105 may also have branch pipes connecting each gas supply valve to the gas supply device 101, and each branch pipe is equipped with a valve. According to this structure, the operator can select which of the gas supply valves 28, 34, and 55 to supply gas to the internal space V via by opening and closing the valves provided in each branch pipe.

[0137] Similarly, exhaust pipe 106 can be connected to two or more of the exhaust valves among exhaust valves 29, 35, and 56. In this case, exhaust pipe 106 may also have branch pipes connecting each exhaust valve to exhaust device 102, with a valve provided on each branch pipe. According to this structure, the operator can select which of the exhaust valves 29, 35, and 56 to discharge gas from the internal space V via by opening and closing the valves provided on each branch pipe. When exhaust pipe 106 is connected to two or more of the exhaust valves 29, 35, and 56, exhaust pipe 106 may also include: branch pipe sections connected to the exhaust valves and the same number of exhaust valves connected to exhaust pipe 106; and a main pipe section that merges all the branch pipe sections. In this case, particle counter 103 can also be connected to the main pipe section via piping 107. Alternatively, the cleaning system 100 may also include the same number of particulate counters 103 as the exhaust valves connected to the exhaust pipe 106, and the particulate counters 103 may be connected to each branch pipe via piping.

[0138] The air supply device 101, the exhaust device 102, the particle counter 103, and the barometer 104 can also be integrated into a cleaning device.

[0139] When gas is supplied to the internal space V through the gas supply device 101, the gas pressure in the internal space V is higher than the gas pressure outside the container body 2, so it can be naturally discharged from each exhaust valve. Therefore, the cleaning system 100 may not include the exhaust device 102.

[0140] The cleaning system 100 may also omit the barometer 104. In this case, the air pressure of the internal space V can be calculated based on the air supply flow rate of the air supply device 101, the exhaust flow rate of the exhaust device 102, the elapsed time from the start of operation of the air supply device 101, and the elapsed time from the start of operation of the exhaust device 102. In this case, neither the through hole 3a nor the through hole 24a may be provided.

[0141] The cleaning system 100 may also omit the particle counter 103. In this case, for example, the elapsed time since the start of cleaning can be used as the end condition for the cleaning process.

[0142] During the cleaning process, if the count value of the particle counter 103 exceeds a specified value after a specified time (e.g., five minutes) has elapsed since the start of air supply and exhaust, it can be determined that the internal space V of the panel storage container 1 must be cleaned with water.

[0143] (Note)

[0144] [Item 1]

[0145] A panel storage container, comprising:

[0146] The container body has an internal space and an opening, wherein the internal space houses multiple panels stacked at intervals in the vertical direction; and

[0147] The cover seals the opening.

[0148] The container body has:

[0149] The base plate defines the lower end of the internal space;

[0150] The back wall, with the opening closed by the cover, is opposite to the cover in the front-back direction that intersects the vertical direction, defining the rear end of the internal space;

[0151] A first check valve is installed at the air supply port on the base plate to prevent gas from flowing out of the internal space.

[0152] A second check valve is installed at the vent on the base plate to prevent gas from flowing into the internal space; and

[0153] The third check valve is installed in a through hole in one of the cover and the back wall.

[0154] The third check valve prevents either the outflow of gas from the internal space or the inflow of gas toward the internal space.

[0155] [Item 2]

[0156] According to Clause 1, the panel storage container, wherein the through hole is a first through hole provided in the cover body.

[0157] A second through hole is provided on the back wall.

[0158] The container body has a fourth check valve, which is installed in the second through hole to prevent either the outflow of gas from the internal space or the inflow of gas toward the internal space.

[0159] [Item 3]

[0160] According to Clause 2, the panel storage container wherein the fourth check valve is embedded in the back wall.

[0161] [Item 4]

[0162] The panel storage container according to any one of clauses 1 to 3, wherein the through hole is provided in the cover body.

[0163] The container body has a flange that defines the opening.

[0164] The cover has a first side facing the interior space and a second side opposite to the first side.

[0165] The third check valve protrudes forward from the second side.

[0166] The front end of the third check valve is closer to the internal space than the front end face of the flange.

[0167] [Item 5]

[0168] A cleaning system comprising: a panel storage container according to any one of claims 1 to 4; and

[0169] A gas supply device supplies gas to the internal space through the through hole.

[0170] The third check valve prevents gas from flowing out of the internal space.

[0171] [Item 6]

[0172] A cleaning system comprising: a panel storage container according to any one of claims 1 to 4;

[0173] A gas supply device supplies gas to the interior space via the gas supply port; and

[0174] An exhaust device discharges gas from the interior space through the through-hole.

[0175] The third check valve prevents gas from flowing into the internal space.

[0176] [Item 7]

[0177] The cleaning system according to item 5 or item 6 further includes: a particle counter for counting particles contained in the gas discharged from the interior space.

[0178] [Item 8]

[0179] The cleaning system according to any one of items 5 to 7 further includes: a barometer for measuring the air pressure of the interior space.

[0180] The cover or the back wall is provided with a measuring port for connecting the barometer.

Claims

1. A panel storage container characterized by, including: a container body having an internal space and an opening, the internal space receiving a plurality of panels in a state of being stacked at intervals from each other in a vertical direction; and a lid body closing the opening, wherein the container body has: a bottom plate defining a lower end of the internal space; a back wall defining a rear end of the internal space opposite to the lid body in a front-rear direction crossing the vertical direction in a state where the lid body closes the opening; a first check valve installed at a gas supply port provided in the bottom plate, preventing outflow of gas from the internal space; a second check valve installed at a gas discharge port provided in the bottom plate, preventing inflow of gas toward the internal space; and a third check valve installed at a through-hole provided in one of the lid body and the back wall, the third check valve preventing one of outflow of gas from the internal space and inflow of gas toward the internal space.

2. The panel storage container according to claim 1, wherein the through-hole is a first through-hole provided in the lid body, a second through-hole is provided in the back wall, the container body has a fourth check valve installed at the second through-hole, preventing the other of outflow of gas from the internal space and inflow of gas toward the internal space.

3. The panel storage container according to claim 2, wherein the fourth check valve is buried in the back wall.

4. The panel storage container according to any one of claims 1 to 3, wherein the through-hole is provided in the lid body, the container body has a flange defining the opening, the lid body has a first surface facing the internal space and a second surface opposite to the first surface, the third check valve protrudes forward from the second surface, a front end of the third check valve is closer to the internal space than a front end surface of the flange.

5. A cleaning system characterized by, including: the panel storage container according to any one of claims 1 to 3; and a gas supply device supplying gas to the internal space via the through-hole, wherein the third check valve prevents outflow of gas from the internal space.

6. The cleaning system of claim 5, wherein, further including: a particle counter counting particles contained in gas discharged from the internal space.

7. The cleaning system of claim 5, wherein, further including: a barometer measuring a gas pressure of the internal space, a measurement port of the barometer is provided in the lid body or the back wall.

8. A cleaning system characterized by, including: the panel storage container according to any one of claims 1 to 3; a gas supply device supplying gas to the internal space via the gas supply port; and a gas discharge device discharging gas from the internal space via the through-hole, wherein the third check valve prevents inflow of gas toward the internal space.

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