Optical switching mechanism and detection device

Abstract

The utility model relates to the technical field of wafer detection, and particularly discloses an optical switching mechanism and a detection device, and the optical switching mechanism comprises a first switching piece and a second switching piece which are adjustably connected, a first adjusting assembly, and a second adjusting assembly. Wherein the first adapter is partially inserted into the adjusting groove of the second adapter along the optical axis direction; a first adjusting assembly and a second adjusting assembly are connected between the first adapter and the second adapter; the first adjusting assembly comprises a first adjusting part which can be telescopically adjusted in the first direction, the first adjusting part is used for adjusting the relative position of the first adapter and the second adapter in the first direction, and the first direction is perpendicular to the optical axis direction; the second adjusting assembly can be telescopically adjusted in the second direction, the second direction is perpendicular to the optical axis direction, deviates from the optical axis and is used for adjusting the relative angle of the first adapter and the second adapter in an adjusting plane, and the adjusting plane is perpendicular to the optical axis direction. The structure is simpler, and the cost is lower.

Description

Technical Field

[0001] This utility model relates to the field of wafer inspection technology, and in particular to an optical adapter mechanism and inspection device. Background Technology

[0002] In the wafer inspection industry, automated optical inspection methods are commonly used. These methods employ optical algorithms to measure critical dimensions of the wafer, such as linewidth, lineheight, film thickness, and surface roughness. Within the optical module, the optical detector and lens need to support three or even four degrees of freedom of adjustment. This adjustment process typically requires multiple adapters. Adjacent adapters can only adjust their relative position in one direction. Therefore, when multi-degree-of-freedom adjustment is needed, multiple adapters are generally required, and adjustment mechanisms must be placed between every two adjacent adapters. This results in a complex optical module structure, high cost, large space occupation, and inconvenience for the placement of other modules or the routing of cables and tubing.

[0003] Therefore, it is urgent to study an optical adapter and detection device to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide an optical adapter mechanism and a detection device to solve the problem that the existing technology requires multiple adapters and adjustment mechanisms when multiple degrees of freedom need to be adjusted, resulting in complex structure and high cost.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] An optical adapter mechanism having a through-hole extending along the optical axis includes:

[0007] An adjustable first adapter and a second adapter are provided, wherein the first adapter is partially inserted into the adjustment groove of the second adapter along the optical axis; a first adjustment component and a second adjustment component are connected between the first adapter and the second adapter.

[0008] The first adjustment component includes a first adjustment member that can be extended and adjusted along a first direction. The first adjustment member is used to adjust the relative position of the first adapter and the second adapter in the first direction, which is perpendicular to the optical axis direction.

[0009] The second adjustment component is telescopically adjustable along a second direction, which is perpendicular to and offset from the optical axis, and is used to adjust the relative angle between the first adapter and the second adapter in the adjustment plane, which is perpendicular to the optical axis.

[0010] As an optional technical solution for an optical adapter mechanism, the first adjusting member is a first adjusting screw, and the second adapter has a first adjusting hole that communicates with the adjusting groove in a first direction. The first adjusting screw is threadedly engaged with the first adjusting hole, and the end of the screw extending out of the first adjusting hole abuts against the first adapter.

[0011] As an optional technical solution for an optical adapter mechanism, the first adjusting screw has at least two, and the second adapter has at least two first adjusting holes communicating with the adjusting groove, and each hole corresponds to one of the at least two first adjusting screws.

[0012] As an optional technical solution for an optical adapter mechanism, the second adjustment component includes at least two second adjustment screws, and the second adapter also has at least two second adjustment holes. The axial directions of the two second adjustment holes are perpendicular to the optical axis and offset from the optical axis. The at least two second adjustment screws are threadedly engaged with the at least two second adjustment holes, and the ends extending out of the corresponding second adjustment holes abut against the first adapter.

[0013] As an optional technical solution for an optical adapter mechanism, a third adjustment component is further connected between the first adapter and the second adapter. The third adjustment component can be extended and retracted along a third direction, which is parallel to the optical axis. The third adjustment component is used to adjust the relative position of the first adapter and the second adapter in the third direction.

[0014] As an optional technical solution for an optical adapter mechanism, the third adjustment component includes a third adjustment screw. Of the first adapter and the second adapter, one has a third adjustment hole extending along a third direction; the other has a second adjustment surface perpendicular to the optical axis. The third adjustment screw is threaded into the third adjustment hole, and the end of the third adjustment screw extending out of the third adjustment hole abuts against the second adjustment surface to drive the first adapter and the second adapter away from each other.

[0015] As an optional technical solution for an optical adapter mechanism, the first adjustment component further includes a fourth adjustment member that can be extended and adjusted along a fourth direction. The fourth adjustment member is used to adjust the relative position of the first adapter and the second adapter in the fourth direction, which is perpendicular to the optical axis direction and perpendicular to the first direction.

[0016] As an optional technical solution for an optical adapter mechanism, the first adapter has at least two first adjustment surfaces, the two first adjustment surfaces are arranged at intervals along a first direction, and the two first adjustment surfaces gradually approach the light-transmitting hole in a direction away from the second adapter. The first adjustment component has multiple first adjustment surfaces, each abutting against one of the first adjustment surfaces.

[0017] As an optional technical solution for an optical adapter mechanism, the second adapter includes a cylindrical adjustment body and an adjustment platform. The adjustment platform is located at one end of the adjustment body near the first adapter and on the outer periphery of the adjustment body. The adjustment groove is provided on the adjustment platform.

[0018] The detection device includes a detector, a lens, and an optical adapter mechanism as described in any of the above technical solutions, wherein the detector is disposed on the first adapter and the lens is disposed on the second adapter.

[0019] The beneficial effects of this utility model are as follows:

[0020] This utility model provides an optical adapter mechanism, which includes an adjustable first adapter and a second adapter, a first adjustment component, and a second adjustment component. The adjustable first adapter and the second adapter have the first adapter partially inserted into an adjustment groove in the second adapter along the optical axis. A first adjustment component and a second adjustment component are connected between the first adapter and the second adapter. The first adjustment component includes a first adjustment member that can be extended and retracted along a first direction, which is perpendicular to the optical axis. The second adjustment component can be extended and retracted along a second direction, which is perpendicular to the optical axis but offset from it, and is used to adjust the relative angle between the first adapter and the second adapter in an adjustment plane, which is perpendicular to the optical axis. The above configuration achieves the adjustment of the relative position of the second adapter and the first adapter in the first direction by means of a first adjustable member that is retractable along the first direction. The relative angle adjustment of the second adapter and the first adapter in the adjustment plane can be achieved by means of a second adjustable component that is retractable along the second direction. There is no need to set up more adapters. Two sets of adjustment components are set up between the first adapter and the second adapter respectively, which can realize the adjustment of the first adapter and the second adapter in two degrees of freedom. The structure is simple and the cost is lower.

[0021] This invention provides a detection device, which includes a detector, a lens, and an optical adapter mechanism. The detector is located on a first adapter, and the lens is located on a second adapter. The optical adapter mechanism eliminates the need for additional adapters in the detection device. By correspondingly placing two sets of adjustment components between the first and second adapters, adjustment of the first and second adapters in three degrees of freedom can be achieved. This results in a simpler structure and lower cost. Furthermore, the overall structure of the detection device is simpler, improving its aesthetics and minimizing its space requirements, which facilitates the placement of other modules and the arrangement of cables and tubing. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the detection device in an embodiment of the present invention;

[0024] Figure 2 This is a schematic diagram of the optical adapter mechanism in an embodiment of the present invention;

[0025] Figure 3 This is an exploded view of the optical adapter mechanism in an embodiment of this utility model from a first perspective;

[0026] Figure 4 This is an exploded view of the optical adapter mechanism from a second perspective in an embodiment of this utility model.

[0027] In the picture:

[0028] 100. First adapter; 101. Base body; 102. Connecting part; 103. Fixing hole; 110. First channel; 121. First adjusting surface; 122. Second adjusting surface;

[0029] 200. Second adapter; 201. Adjustment body; 202. Adjustment platform; 210. Second channel; 211. Main channel; 212. Installation channel; 220. Adjustment groove; 231. First adjustment hole; 232. Second adjustment hole; 233. Third adjustment hole; 234. Fourth adjustment hole; 235. Installation hole;

[0030] 300. Detector;

[0031] 400. Lens. Detailed Implementation

[0032] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0033] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0034] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0035] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0036] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​not using relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0037] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0038] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0039] To achieve adjustment, an optical adapter mechanism is installed between the camera and the lens. Currently, the optical adapter mechanism commonly used in the industry includes multiple adjustment mechanisms and multiple adapter components. The adjustment mechanism is located between two adjacent adapter components. Generally, the adjustment mechanism is mostly a split structure, that is, the X-axis and Y-axis adjustment mechanisms are two or even three sets of mechanisms compared to the Z-axis adjustment mechanism. Some devices also integrate the X and Y-axis adjustment mechanisms by using an XY slide. Although the function meets the usage requirements, the aesthetics of the structure are greatly reduced. Some structures may be too cumbersome, occupying a lot of space and affecting the placement of other modules or the arrangement of cables and pipes.

[0040] like Figures 1 to 4 As shown, this embodiment provides an optical adapter mechanism having a light-transmitting hole that extends along the optical axis, wherein the optical axis is the optical axis L (e.g., ...). Figure 2 As shown in the diagram, the optical adapter mechanism includes an adjustable first adapter 100 and a second adapter 200, a first adjustment component, and a second adjustment component. The first adapter 100 is partially inserted into the adjustment groove 220 of the second adapter 200 along the optical axis. The first adjustment component and the second adjustment component are connected and disposed between the first adapter 100 and the second adapter 200. The first adjustment component includes a first adjustment member that can be extended and retracted along a first direction, which is perpendicular to the optical axis. The second adjustment component can be extended and retracted along a second direction, which is perpendicular to the optical axis and offset from the optical axis L, and is used to adjust the relative angle between the first adapter 100 and the second adapter 200 in an adjustment plane perpendicular to the optical axis.

[0041] The first direction is the X direction, and the second direction is the Y direction.

[0042] The above configuration utilizes a first adjustable member that is retractable along the first direction to adjust the relative position of the second adapter 200 and the first adapter 100 in the first direction (X-axis). A second adjustable component that is retractable along the second direction allows for adjustment of the relative angle between the second adapter 200 and the first adapter 100 within the adjustment plane. Simultaneously, the coordinated adjustment of the first and second adjustable components also enables adjustment in the second direction (Y-axis). Therefore, without the need for additional adapters, two sets of adjustable components are correspondingly positioned between the first adapter 100 and the second adapter 200, achieving adjustment of the first adapter 100 and the second adapter 200 in three degrees of freedom: X-axis, Y-axis, and rotational freedom. This design is simple and cost-effective.

[0043] Specifically, in combination Figure 3 As shown, the first adjusting member is a first adjusting screw, and the second adapter 200 has a first adjusting hole 231 that communicates with the adjusting groove 220 in the first direction. The first adjusting screw is threaded into the first adjusting hole 231, and the end of the screw extending out of the first adjusting hole 231 abuts against the first adapter 100. In use, by screwing the first adjusting screw, the first adjusting screw passing through the first adjusting hole 231 abuts against the first adapter 100, thereby adjusting the relative position of the first adapter 100 and the second adapter 200 in the first direction.

[0044] The device comprises at least two first adjusting screws and at least two first adjusting holes 231 communicating with the adjusting grooves 220, each corresponding to one of the at least two first adjusting screws. Specifically, the two first adjusting holes 231 are arranged opposite each other, and in use, the movement direction of the second adjusting member 200 relative to the first adjusting member 100 is adjusted by adjusting the two first adjusting screws respectively. For example, when the two first adjusting screws are spaced apart along the X direction, rotating the left first adjusting screw clockwise and the right first adjusting screw counterclockwise can adjust the second adjusting member 200 to move to the left relative to the first adjusting member 100; rotating the left first adjusting screw counterclockwise and the right first adjusting screw clockwise can adjust the second adjusting member 200 to move to the right relative to the first adjusting member 100.

[0045] The first adapter 100 has at least two first adjustment surfaces 121, which are spaced apart along a first direction and gradually approach the light-transmitting hole in a direction away from the second adapter 200. Multiple first adjustment members abut against two of the first adjustment surfaces 121 respectively. Part of the first adjustment member abuts against one of the first adjustment surfaces 121, and part of the first adjustment member abuts against the other first adjustment surface 121. This arrangement allows the first adjustment surface 121 to both serve as the abutment point for the first adjustment member to adjust the relative position of the first adapter 100 and the second adapter 200 in the X direction, and as a limiting member to prevent the second adapter 200 from moving away from the first adapter 100 in the optical axis direction.

[0046] In other embodiments, the first adjusting member may be a telescopic cylinder or an electric push rod, which adjusts the relative position between the first adapter 100 and the second adapter 200 during the telescopic process of the first adjusting member.

[0047] The second adjustment assembly includes at least two second adjustment screws, and the second adapter 200 also has at least two second adjustment holes 232. The axial directions of the two second adjustment holes 232 are perpendicular to the optical axis and offset from the optical axis L. The at least two second adjustment screws are threaded into the at least two second adjustment holes 232 in a one-to-one correspondence, and the ends extending out of the corresponding second adjustment holes 232 abut against the first adapter 100. In use, one of the second adjustment screws is screwed in, and the other second adjustment screw is screwed out, thereby allowing the second adapter 200 to rotate relative to the first adapter 100. Specifically, four second adjustment holes 232 are provided, and four second adjustment screws are provided corresponding to the two second adjustment holes 232. The four second adjustment screws are screwed into the four second adjustment holes 232 one by one. At the position where the second adjustment holes 232 are provided, the outer contour of the second adapter 200 along the cross section perpendicular to the axis of the light-transmitting hole is square. The four side walls of the second adapter 200 are defined as a first side wall, a second side wall, a third side wall, and a fourth side wall connected in sequence. The first side wall is provided with two second adjustment holes 232 whose axes are located on both sides of the optical axis L. The fourth side wall is provided with two second adjustment holes 232 whose axes are located on both sides of the optical axis L. Two of the second adjustment holes 232 extend along the second direction along the axis of the second direction, and the other two second adjustment holes 232 extend along the first direction.

[0048] In some embodiments, a third adjustment component is further connected between the first adapter 100 and the second adapter 200. The third adjustment component is telescopically adjustable along a third direction, which is parallel to the optical axis. The third adjustment component is used to adjust the relative position of the first adapter 100 and the second adapter 200 in this third direction. Figure 2As shown, the third direction is the Z direction. The relative movement of the first adapter 100 and the second adapter 200 in the third direction is achieved through the third adjustment component. No additional adapter is required, further simplifying the overall structure and reducing costs. This Z-direction degree of freedom adjustment, combined with the aforementioned X-direction, Y-direction, and rotational degrees of freedom, achieves adjustment of all four degrees of freedom.

[0049] Specifically, the third adjustment assembly includes a third adjustment screw. Of the first adapter 100 and the second adapter 200, one has a third adjustment hole 233 extending along a third direction; the other has a second adjustment surface 122 perpendicular to the optical axis L. The third adjustment screw is threaded into the third adjustment hole 233, and the end of the third adjustment screw extending out of the third adjustment hole 233 abuts against the second adjustment surface 122, thereby causing the first adapter 100 and the second adapter 200 to move away from each other along the optical axis. The third adjustment hole 233 is located in the second adapter 200, and the third adjustment screw passes through the third adjustment hole 233 and abuts against the second adjustment surface 122 of the first adapter 100, causing the second adapter 200 to move away from the first adapter 100.

[0050] In some embodiments, the first adjustment assembly further includes a fourth adjustment member that is telescopically adjustable along a fourth direction. The fourth adjustment member is used to adjust the relative position of the first adapter 100 and the second adapter 200 in the fourth direction, which is perpendicular to the optical axis and perpendicular to the first direction. The relative movement of the first adapter 100 and the second adapter 200 in the fourth direction is achieved through the fourth adjustment member in the first adjustment assembly, eliminating the need for additional adapters, further simplifying the overall structure and reducing costs.

[0051] Specifically, the second adapter 200 is provided with a fourth adjustment hole 234 extending in the fourth direction; the fourth adjustment component is a fourth adjustment screw, and the second adapter 200 has a fourth adjustment hole 234 communicating with the adjustment groove 220 in the fourth direction. The fourth adjustment screw is threaded into the fourth adjustment hole 234, and the end extending out of the fourth adjustment hole 234 abuts against the first adapter 100. In use, by screwing the fourth adjustment screw, the end of the fourth adjustment screw passing through the fourth adjustment hole 234 abuts against the first adapter 100, thereby adjusting the relative position of the first adapter 100 and the second adapter 200 in the fourth direction. The combined use of the fourth adjustment component and the first adjustment component can directly realize the relative position of the first adapter 100 and the second adapter 200 in a plane perpendicular to the optical axis, without the need for the second adjustment component to indirectly achieve Y-axis adjustment, thus improving adjustment accuracy and efficiency. The fourth direction can be the Y-axis. In other embodiments, the fourth direction can be a direction at an acute angle to the Y-axis.

[0052] The device includes at least two fourth adjusting screws, and the second adapter 200 has at least two fourth adjusting holes 234 communicating with the adjusting grooves 220, each corresponding to one of the at least two fourth adjusting screws. Specifically, the two fourth adjusting holes 234 are arranged opposite each other, and in use, the movement direction of the second adapter 200 relative to the first adapter 100 is adjusted by adjusting the two fourth adjusting screws respectively. For example, when the two first adjusting screws are spaced apart along the Y direction, rotating the front fourth adjusting screw clockwise and the rear fourth adjusting screw counterclockwise can adjust the second adapter 200 to move backward relative to the first adapter 100; rotating the front fourth adjusting screw counterclockwise and the rear fourth adjusting screw clockwise can adjust the second adapter 200 to move forward relative to the first adapter 100.

[0053] The first adapter 100 has four first adjustment surfaces 121, two of which are spaced apart along a first direction and gradually approach the light-transmitting hole in a direction away from the second adapter 200. Two first adjustment members abut against the two spaced-apart first adjustment surfaces 121. The other two first adjustment surfaces 121 are spaced apart along a fourth direction and gradually approach the light-transmitting hole in a direction away from the second adapter 200. Two fourth adjustment members abut against the two spaced-apart first adjustment surfaces 121. In this embodiment, the first adapter 100 and the second adapter 200 can be adjusted to move closer to each other along the optical axis by cooperating with the first and fourth adjustment members and the four first adjustment surfaces 121. For example, when simultaneously screwed to bring the first and fourth adjustment members synchronously closer to the optical axis L, the first adapter 100 and the second adapter 200 move closer to each other.

[0054] In other embodiments, the second adjustment component, the third adjustment component, and the fourth adjustment component can all be telescopic cylinders or electric push rods.

[0055] The second adapter 200 includes a cylindrical adjusting body 201 and an adjusting platform 202. The adjusting platform 202 is located at one end of the adjusting body 201 near the first adapter 100 and on the outer periphery of the adjusting body 201. An adjusting groove 220 is provided on the adjusting platform 202. This arrangement helps to reduce the size of the adjusting body 201 and lower costs.

[0056] The first adapter 100 has a first channel 110, and the bottom of the adjustment groove 220 has a second channel 210 that penetrates the adjustment body 201. The first channel 110 and the second channel 210 are connected to form a light-transmitting hole.

[0057] This embodiment also provides a detection device, which includes a detector 300, a lens 400, and an optical adapter mechanism as described in any of the above embodiments. The detector 300 is disposed on a first adapter 100, and the lens 400 is disposed on a second adapter 200. The detector 300 can be a camera.

[0058] In some embodiments, the first adapter 100 includes a base body 101 and a connecting portion 102 disposed on the outer periphery of the base body 101. A first channel 110 passes through the base body 101, and the connecting portion 102 is connected to the detector 300. The connecting portion 102 has a fixing hole 103; a fixing screw passes through the fixing hole 103 and is threaded into the fixing screw hole of the detector 300.

[0059] Lens 400 is mounted on adjustment body 201. Specifically, part of lens 400 is inserted into second channel 210 and fixedly connected to adjustment body 201. Adjustment body 201 is provided with mounting hole 235 extending into second channel 210, mounting screw is threaded into mounting hole 235, and the end of mounting screw extending into second channel 210 abuts against lens 400.

[0060] Combination Figure 4 As shown, the second channel 210 includes a main channel 211 and an installation channel 212 that are connected to each other. The main channel 211 is located on the side of the installation channel 212 that is close to the first adapter 100. The inner diameter of the main channel 211 is smaller than that of the installation channel 212. The adjusting body 201 forms a limiting step surface between the main channel 211 and the installation channel 212. Part of the lens 400 is inserted into the installation channel 212 and abuts against the limiting step surface to achieve precise docking.

[0061] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. An optical relay mechanism having a light passage hole provided through in the direction of an optical axis, characterized by, The application relates to an adjustable connection device for a lens, which comprises: a first adapter (100) and a second adapter (200) which are partially inserted into each other along the optical axis direction; a first adjusting assembly and a second adjusting assembly are arranged between the first adapter (100) and the second adapter (200); the first adjusting assembly comprises a first adjusting screw which can be adjusted along a first direction, and the first adjusting screw is used for adjusting the relative position of the first adapter (100) and the second adapter (200) along the first direction which is perpendicular to the optical axis direction; the second adjusting assembly can be adjusted along a second direction which is perpendicular to the optical axis direction and deviates from the optical axis, and is used for adjusting the relative angle of the first adapter (100) and the second adapter (200) in an adjusting plane which is perpendicular to the optical axis direction.

2. The optical adapter of claim 1, wherein, the first adjusting screw is a first adjusting screw, the second adapter (200) has a first adjusting hole (231) which is connected to the adjusting groove (220) along the first direction, the first adjusting screw is screwed into the first adjusting hole (231), and the end of the first adjusting screw which is out of the first adjusting hole (231) abuts against the first adapter (100).

3. The optical adapter of claim 2, wherein, the first adjusting screw has at least two, the second adapter (200) has at least two first adjusting holes (231) which are connected to the adjusting groove (220), and the at least two first adjusting holes (231) correspond to the at least two first adjusting screws.

4. The optical adapter of claim 2, wherein, the second adjusting assembly comprises at least two second adjusting screws, the second adapter (200) further has at least two second adjusting holes (232), the axis direction of the two second adjusting holes (232) is perpendicular to the optical axis direction and deviates from the optical axis, at least two second adjusting screws are screwed into the at least two second adjusting holes (232), and the end of the at least two second adjusting screws which is out of the corresponding second adjusting hole (232) abuts against the first adapter (100).

5. The optical adapter of claim 1, wherein, a third adjusting assembly is further arranged between the first adapter (100) and the second adapter (200), the third adjusting assembly can be adjusted along a third direction, the third direction is parallel to the optical axis direction, and the third adjusting assembly is used for adjusting the relative position of the first adapter (100) and the second adapter (200) along the third direction.

6. The optical adapter of claim 5, wherein, the third adjusting assembly comprises a third adjusting screw, one of the first adapter (100) and the second adapter (200) is provided with a third adjusting hole (233) which extends along the third direction, and the other has a second adjusting surface (122) which is perpendicular to the optical axis; the third adjusting screw is screwed into the third adjusting hole (233), and the end of the third adjusting screw which is out of the third adjusting hole (233) abuts against the second adjusting surface (122) to drive the first adapter (100) and the second adapter (200) to move away from each other.

7. The optical adapter of claim 1, wherein, The first adjusting assembly further comprises a fourth adjusting member telescopically adjustable in a fourth direction, the fourth adjusting member being used to adjust the relative position of the first adapter (100) and the second adapter (200) in the fourth direction, the fourth direction being perpendicular to the optical axis direction and perpendicular to the first direction.

8. The optical interface according to any of claims 1 to 7, characterized in that The first adapter (100) has at least two first adjusting surfaces (121), the two first adjusting surfaces (121) being arranged in a spaced manner in the first direction, and the two first adjusting surfaces (121) gradually approaching the light passing hole in a direction away from the second adapter (200), the first adjusting member having a plurality of and respectively abutting the two first adjusting surfaces (121).

9. The optical interface according to any of claims 1-7, wherein, The second adapter (200) comprises a cylindrical adjusting body (201) and an adjusting platform (202), the adjusting platform (202) being located at one end of the adjusting body (201) close to the first adapter (100) and at the outer periphery of the adjusting body (201), and the adjusting groove (220) being arranged on the adjusting platform (202).

10. A detection device, characterized in that An optical detection device comprising a detector (300), a lens (400) and an optical adapter mechanism according to any one of claims 1-9, the detector (300) being arranged on the first adapter (100), and the lens (400) being arranged on the second adapter (200).

Images