Pressure control type solid precursor heating device

Abstract

The present application provides a pressure control type solid precursor heating device, comprising: a steel cylinder having a bottom plate and an outer ring wall, the bottom plate and the outer ring wall defining an internal space; the plurality of vertically stacked disc bodies are separably arranged in the internal space, each disc body is provided with a bearing space, an additional circuit board, an annular edge and a circular ring, and the bearing space is defined among the additional circuit board, the annular edge and the circular ring; the buffer bottle is provided with a buffer space, and the buffer space is in fluid connection with the inner space; the pressure gauge is arranged in the buffer bottle and is used for sensing the air pressure in the buffer space; and the induction type heater is in signal connection with the pressure gauge, and the induction type heater is used for heating the steel cylinder through induction heating according to the air pressure sensed by the pressure gauge.

Description

Technical Field

[0001] This application relates to a heating device for generating vapor-phase chemical reagents. Background Technology

[0002] In industrial applications such as semiconductor manufacturing, vapor-phase chemicals are used in vapor-utilizing processes, where they are produced by heating and sublimating their solid precursors in a heated apparatus.

[0003] In existing technologies, the heating device for solid precursors uses an external heat source to heat a cylinder, which then conducts the heat to the solid precursor inside, causing it to sublimate. A temperature sensing component is installed on the outside of the cylinder to detect the external temperature, and the measured temperature is used to control the heating operation of the external heat source. The problem with this existing technology is that there is a temperature difference between the inside and outside of the cylinder. The external temperature measured by the temperature sensing component cannot accurately represent the internal temperature. Therefore, using the external temperature to control the heating operation of the external heat source will cause control lag, resulting in instability in the sublimation pressure of the solid precursor. Utility Model Content

[0004] The technical problem to be solved by this application is to provide a solid precursor heating device that can stably control vapor pressure.

[0005] To achieve the above and other objectives, this application provides a pressure-controlled solid precursor heating device, comprising: a cylinder having a base plate and an outer ring wall, the base plate and the outer ring wall defining an internal space; a plurality of vertically stacked trays detachably disposed in the internal space, each tray having a support space, an additional circuit board, an annular edge, and a ring, the support space being defined between the additional circuit board, the annular edge, and the ring, the additional circuit board being connected to the bottom of the annular edge and used to support the solid precursor, the ring being connected to the top of the annular edge, the annular edge being in close contact with the outer ring wall, the trays being the bottommost of which is a bottom tray, the additional circuit board of the bottom tray being non-perforated; wherein, the additional circuit boards of the other trays besides the bottom tray are all supported by the ring of the tray immediately below them; a buffer bottle having a buffer space, the buffer space being fluidly connected to (fluidly The internal space (connected); a pressure gauge located in the buffer bottle and used to sense the air pressure in the buffer space; and an induction heater connected to the pressure gauge, the induction heater being used to heat the cylinder by induction heating according to the air pressure sensed by the pressure gauge.

[0006] The advantage of this application is that by monitoring the gas pressure in the buffer space and feeding back to control the induction heater, the gas pressure in the buffer bottle can be maintained within a set range, thereby reducing the pressure fluctuations of the vapor phase chemical reagents subsequently supplied to the vapor utilization process.

[0007] The other effects and embodiments of this application are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0008] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0009] Figure 1 This is a schematic diagram of one embodiment of this application;

[0010] Figure 2 This is a perspective view of some components of one embodiment of this application;

[0011] Figure 3 This is an exploded view of some components of one embodiment of this application;

[0012] Figure 4 This is a cross-sectional view of some components of one embodiment of this application.

[0013] Symbol Explanation

[0014] 10: Gas cylinder 11: Base plate

[0015] 12: Outer ring wall 13: Lid

[0016] 14: Internal space 15: Locking components

[0017] 16: Exhaust pipes 20a, 20b, 20c: Disc body

[0018] 21: Load-bearing space; 22: Additional circuit board

[0019] 23: Ring edge 24: Circular ring

[0020] 25: Upright cylinder 26: Inner ring

[0021] 30: Buffer bottle; 31: Buffer space

[0022] 40: Pressure gauge; 50: Induction heater Detailed Implementation

[0023] In the embodiments described below, the positional relationships include: up, down, left, and right. Unless otherwise specified, they are all based on the direction shown by the components in the diagram.

[0024] Please refer to Figures 1 to 3 The illustration shows one embodiment of the pressure-controlled solid precursor heating device of this application. The solid precursor heating device includes a steel cylinder 10, a plurality of vertically stacked disks 20a, 20b, 20c, a buffer bottle 30, a pressure gauge 40, and an induction heater 50.

[0025] The cylinder 10 has a base plate 11, an outer ring wall 12, and a cap 13. The base plate 11 and the outer ring wall 12 define an internal space 14. The cap 13 is detachably disposed on the top of the outer ring wall 12. The cylinder 10 may also have multiple locking fasteners 15 for locking the cap 13 to the top of the outer ring wall 12. In addition, the cylinder 10 also has an exhaust pipe 16 disposed on the cap 13 and communicating with the internal space 14 for discharging vaporized chemical reagents. In a possible embodiment, the cylinder 10 is made of stainless steel. Preferably, the magnetic permeability of the cylinder 10 is higher than 1 H / m (especially in the outer ring wall portion), for example, between 1.04 and 1.05 H / m. In a possible embodiment, the stainless steel used may contain the following components: less than 1 wt% nickel (Ni), 17-20 wt% chromium (Cr), 1.75-2.5 wt% molybdenum (Mo), less than 0.025 wt% carbon (C), less than 0.035 wt% nitrogen (N), a total of about 0.8 wt% titanium (Ti) and niobium (Nb), with the balance being iron (Fe). Preferably, the nickel content in the above components is less than 0.6 wt%, the chromium content is 17.5-19.5 wt%, and the nitrogen content is less than 0.025 wt%. Stainless steel with the above characteristics has good thermal conductivity and induction heating efficiency.

[0026] The discs 20a, 20b, and 20c are detachably disposed in the internal space 14. Each disc 20a, 20b, and 20c has a support space 21, an additional circuit board 22, an annular edge 23, and a ring 24. The support space 21 is defined between the additional circuit board 22, the annular edge 23, and the ring 24. The additional circuit board 22 is connected to the bottom of the annular edge 23 and is used to support solid precursors, such as tungsten precursors or molybdenum precursors. The solid precursors can become vaporized chemical reagents after being heated and vaporized. The ring 24 is connected to the top of the annular edge 23. The annular edge 23 is in close contact with the outer ring wall 12, so that the heat energy of the cylinder 10 can be conducted to the discs. The bottommost of these discs is a bottom disc 20c, whose additional circuit board 22 is not perforated. The additional circuit boards 22 of the other discs 20a and 20b, excluding the bottom disc 20c, are all supported by an annular ring 24 of the disc immediately below them. The topmost of these discs is a top disc 20a, whose additional circuit board 22 has a central perforation. Between the bottom disc 20c and the top disc 20a is at least one intermediate disc 20b (multiple intermediate discs in this embodiment). The additional circuit board 22 of the intermediate disc 20b has a vertical cylinder 25 that is open at both the top and bottom, and an inner ring 26 at its center. The inner ring 26 extends radially outward from the top of the vertical cylinder 25. The height of the vertical cylinder 25 of each intermediate disc 20b is less than the height of its annular edge 23, allowing the vapor-phase chemical reagent to be output externally through the channel formed by the vertical cylinder and the exhaust pipe 16.

[0027] The buffer bottle 30 has a buffer space 31, which is fluidly connected to the internal space 14, allowing vapor-phase chemical reagents to be supplied from the internal space 14 into the buffer space 31. A pressure gauge 40 is located in the buffer bottle 30 and is used to sense the gas pressure within the buffer space 31. An induction heater 50 is signal-connected to the pressure gauge 40 and can heat the cylinder 10 via induction heating based on the gas pressure sensed by the pressure gauge 40. Specifically, when the sensed gas pressure is lower than the required pressure range, the induction heater 50 can be turned on or its power increased to directly heat the cylinder, thereby indirectly heating the solid precursors inside the cylinder to supplement more vapor-phase chemical reagents. When the sensed gas pressure is higher than the required pressure range, the induction heater can be turned off or its power reduced to decrease heating of the cylinder, thereby reducing the supply of vapor-phase chemical reagents. In this way, the supply pressure of vapor-phase chemical reagents can be maintained more stably, thus solving the control hysteresis problem commonly found in the prior art. Furthermore, compared to existing technologies that often heat cylinders through conduction, the induction heating used in this invention also has better energy efficiency.

[0028] The embodiments and / or implementation methods described above are merely preferred embodiments and / or implementation methods for implementing the technology of this application, and are not intended to limit the implementation methods of the technology of this application in any way. Any person skilled in the art may make some modifications or alterations to other equivalent embodiments without departing from the scope of the technical means disclosed in this application, but these should still be regarded as the technology or embodiments that are substantially the same as those of this application.

Claims

1. A pressure-controlled solid precursor heating device, characterized in that, The pressure-controlled solid precursor heating device comprises: a cylinder having a bottom plate and an outer wall, the bottom plate and the outer wall defining an inner space; a plurality of vertically stacked discs separably arranged in the inner space, each of the discs having a carrying space, an additional circuit board, a ring-shaped edge and a circular ring, the carrying space being defined between the additional circuit board, the ring-shaped edge and the circular ring, the additional circuit board being connected to the bottom of the ring-shaped edge and used to carry the solid precursor, the circular ring being connected to the top of the ring-shaped edge, the ring-shaped edge being close to the outer wall, the bottommost one of the discs being a bottom disc, the additional circuit board of the bottom disc being non-hollow; wherein the additional circuit board of each of the discs other than the bottom disc is abutted against the circular ring of the disc immediately below; a buffer cylinder having a buffer space, the buffer space being fluidly connected to the inner space; a pressure gauge arranged in the buffer cylinder and used to sense the air pressure in the buffer space; and an inductive heater signal-connected to the pressure gauge, the inductive heater being used to heat the cylinder by inductive heating according to the air pressure sensed by the pressure gauge.

2. The pressure controlled solid precursor temperature elevation device of claim 1, wherein, The cylinder further has a cover separably arranged at the top of the outer wall.

3. The pressure controlled solid precursor temperature elevation device of claim 1, wherein, The topmost one of the discs is a top disc, the additional circuit board of the top disc being centrally hollow.

4. The pressure controlled solid precursor temperature elevation device of claim 3, wherein, The at least one intermediate disc is arranged between the bottom disc and the top disc, the additional circuit board of the intermediate disc having a top-bottom-through vertical cylinder and an inner circular ring, the inner circular ring extending radially outward from the top of the vertical cylinder, the height of the vertical cylinder of the at least one intermediate disc being less than the height of the ring-shaped edge of the at least one intermediate disc.

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