Cold shield cleaning device

Abstract

The utility model provides a cold screen cleaning device which comprises a shell, an internal cleaning device, a spray head and an aeration disc, the upper portion of the shell supports and accommodates a cold screen and the internal cleaning device, an exhaust pipe is arranged on the side face of the shell, a drain outlet is formed in the bottom of the shell, the spray head is arranged on the side face of the shell, and the aeration disc is arranged at the bottom in the shell. Solution is sprayed from the water inlet of the internal cleaner, and gas is blown into the device through the aeration disc, so that the gas is fully mixed and reacted with impurities on the inner side and the outer side of the cold screen, and impurity particles attached to the inner side and the outer side of the cold screen are dissolved. Waste liquid generated in the cleaning process is uniformly collected through a lower drain outlet of the device, and waste gas is uniformly collected and filtered through a side tail gas outlet of the device. The liquid is sucked into the spray head to be sprayed out, liquid atomization is formed, the solution can be dispersed into a spraying mode and sprayed to the surface of the cold shield needing to be cleaned, the solution reacts with impurities on the surface of the cold shield, and the cleaning effect is achieved.

Description

Technical Field

[0001] This utility model relates to the field of cleaning devices, and in particular to a cold screen cleaning device. Background Technology

[0002] Molecular beam epitaxy (MBE) is a key process for preparing high-performance semiconductor quantum structure materials, widely used in optoelectronic and microelectronic devices. However, the cold screen in MBE equipment adsorbs highly toxic substances such as arsenic, phosphorus, and beryllium during the growth process; these substances, whether in their elemental form or in compounds, are highly toxic, flammable, and carcinogenic. Traditional manual cleaning requires wearing gas masks and scraping, forcing operators to directly contact these hazardous substances, facing serious risks of poisoning, fire, and even explosion, potentially causing irreversible damage. Furthermore, manual operation can easily damage equipment welds, leading to vacuum leaks and significant economic losses. This high-risk, low-efficiency cleaning method severely restricts the safe operation and maintenance of MBE technology. Therefore, a safe, automated cleaning solution is urgently needed. Utility Model Content

[0003] (a) Technical problems to be solved

[0004] To address the problem of the inability to automatically clean cold screens in existing technologies, this invention provides a safe and reliable cold screen cleaning device that eliminates the need for on-site manual operation, reduces risks, and improves cleaning efficiency.

[0005] (II) Technical Solution

[0006] To achieve the above objectives, the present invention adopts the following technical solution.

[0007] A cold screen cleaning device includes: a housing for accommodating the cold screen, an internal cleaner, a nozzle, and an aeration disc;

[0008] The housing has holes through which various components pass; an opening at the top supports and accommodates the cold shield; an exhaust pipe on the side; and a drain outlet at the bottom.

[0009] The internal cleaner is inserted from the top of the housing and is integrally disposed in the middle of the housing; it includes: a water inlet and multiple water outlets, wherein the water inlet 210 and the water outlet 220 are connected to form a liquid channel;

[0010] The nozzle is disposed on the side of the housing;

[0011] The aeration disc is located at the bottom of the shell and includes: an air supply pipe and an exhaust hole that penetrate the shell. The air supply pipe is connected to the exhaust hole to form an airflow passage.

[0012] Furthermore, the nozzle is a two-fluid atomizing nozzle, comprising: a nozzle housing, a first fluid conduit, and a second fluid channel, wherein the first fluid conduit and the second fluid channel have a communication point.

[0013] Furthermore, the diameter of the internal cleaner is the same as the diameter of the cold screen sample holder, and the internal cleaner replaces the cold screen sample holder and is fixed on the cold screen.

[0014] Furthermore, the aeration disc is annular and is located on the lower edge inside the shell.

[0015] Furthermore, there are multiple nozzles arranged in multiple rows around the side of the housing.

[0016] Furthermore, a support portion is provided at the bottom of the housing.

[0017] Furthermore, the cold screen includes: a cold screen body, a support, and a shielding layer. The support is provided with a cold screen sample holder fixing part, and the shielding layer is provided with an observation window.

[0018] (III) Beneficial Effects

[0019] The beneficial effects of this utility model are as follows:

[0020] 1. The cold screen cleaning device of this utility model uses a solution inlet from the internal cleaner at the top of the device, and gas is blown into the device through an aeration disc to fully mix and react with impurities on the inner and outer sides of the cold screen, thereby dissolving the impurity particles attached to the inner and outer sides of the cold screen. Waste liquid generated during the cleaning process is collected uniformly through the drain outlet at the bottom of the device. The cleaning effect of the cold screen can be judged by the composition of the waste liquid discharged from the drain outlet, or the cold screen can be directly removed after a certain period of operation to observe the cleaning effect. Exhaust gas is collected and filtered uniformly through the exhaust vent on the side of the device for convenient subsequent treatment.

[0021] 2. The cold screen cleaning device described in this utility model uses a two-fluid atomizing nozzle composed of two different fluids. When gas flows in, it is instantly accelerated, generating airflow velocity. This accelerated airflow passes through a liquid inlet, drawing liquid into the nozzle. The two fluids mix at the nozzle and are simultaneously sprayed out, forming a liquid atomization. This disperses the solution into a spray pattern, which is then sprayed onto the surface of the cold screen to be cleaned, reacting with surface impurities to achieve the cleaning effect.

[0022] 3. The cold screen cleaning device described in this utility model features a modular design where the diameter of the internal cleaner matches the diameter of the cold screen sample holder. This allows for seamless replacement of the cold screen sample holder with the internal cleaner during the cleaning process. The cold screen sample holder can be directly removed and replaced with the internal cleaner during cleaning. This not only achieves efficient and safe cleaning and maintenance but also optimizes system performance in terms of compatibility, economy, and equipment lifespan.

[0023] 4. The cold screen cleaning device of this utility model has multiple nozzles arranged in multiple rows around the side of the housing, enabling faster and more effective comprehensive cleaning. A support is provided at the bottom of the housing to increase its stability. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a cold screen cleaning device.

[0025] Figure 2 This is a schematic diagram of a broken surface of a cold screen cleaning device.

[0026] Figure 3 This is a schematic diagram of the internal cleaner structure.

[0027] Figure 4 This is a schematic diagram of the cross-section of a two-fluid atomizing nozzle.

[0028] Figure 5 This is a schematic diagram of the structure of a cold screen.

[0029] Explanation of reference numerals in the attached drawings: 100-shell; 110-exhaust pipe; 120-drain outlet; 130-support; 200-internal cleaner; 210-inlet; 220-outlet; 300-nozzle; 310-nozzle shell; 320-first fluid pipe; 330-second fluid channel; 400-aeration disc; 410-air supply pipe; 420-exhaust hole; 500-cold shield; 510-cold shield body; 520-support; 521-fixing part; 530-shielding layer; 531-observation window. Detailed Implementation

[0030] To better explain and facilitate understanding of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] Please refer to Figures 1 to 4 This utility model provides a cold screen cleaning device, including: a housing 100 for accommodating a cold screen 500, an internal cleaner 200, a nozzle 300, and an aeration disc 400. The structure of the cold screen 500 can be referred to as follows. Figure 5 A schematic diagram of a cold screen. It includes: a cold screen body 510, a support 520 and a shielding layer 530. The support 520 is provided with a cold screen sample holder fixing part 521, and the shielding layer 530 is provided with an observation window 531.

[0032] The housing 100 has holes through which various components pass; the upper part of the housing 100 has an opening to support and accommodate the cold screen 500; the bracket 520 of the cold screen 500 is fixed to the upper part of the housing with screws; there is a certain gap between the interior of the housing 100 and the cold screen 500; an exhaust pipe 110 is provided on the side of the housing 100 and a drain outlet 120 is provided at the bottom.

[0033] The internal cleaner 200 is inserted from the top of the housing 100 and is integrally disposed in the middle of the housing 100; it includes: a long strip-shaped water inlet 210 and multiple water outlets 220, wherein the water inlet 210 and the water outlets 220 are connected to form a liquid channel.

[0034] Specifically, all outlets are of uniform length to avoid uneven water output due to path differences. The inlet 210 evenly distributes the solution to each outlet 220 through branch pipes or flow guiding cavities, achieving multi-channel flow distribution through an internal flow channel network. The liquid path is implemented as follows: external solution is injected into the inlet 210 for centralized pressurization, then distributed to each outlet 220, with multiple outlets 220 spraying out simultaneously.

[0035] The nozzle 300 is disposed on the side of the housing 100 and can spray liquid, gas or atomized particles into the housing.

[0036] The aeration disc 400 is located at the bottom of the shell and injects gas into the shell. It includes an air supply pipe 410 penetrating the shell 100 and an exhaust port 420. The air supply pipe 410 is directly connected to the exhaust port 420 through an internal channel or conduit, forming a continuous airflow path. Both share the same air path system, ensuring free gas flow.

[0037] In a specific implementation method, SC1 solution (NH4OH-H2O2) can be injected into the inlet 210, and high-purity nitrogen gas can be blown into the device through the aeration disc 400. This allows the nitrogen to fully mix and react with impurities on the inside and outside of the cold screen 500, dissolving the impurity particles attached to the inside and outside of the cold screen 500. Waste liquid generated during the cleaning process is collected uniformly through the drain outlet 120 at the bottom of the device. The cleaning effect of the cold screen 500 can be judged based on the composition of the waste liquid discharged from the drain outlet 120. Alternatively, after a certain period of operation, the cold screen 500 can be directly removed to observe the cleaning effect. Exhaust gas is collected and filtered uniformly through the exhaust vent on the side of the device and then properly treated.

[0038] The nozzle 300 is a two-fluid atomizing nozzle, comprising: a nozzle housing 310, a first fluid conduit 320, and a second fluid channel 330, wherein the first fluid conduit 320 and the second fluid channel 330 are connected. Specifically, the fluid in the first fluid conduit 320 is high-purity nitrogen (PN2), and the fluid in the second fluid channel 330 is ultrapure water (UPW). When the gas flows in, it is instantly accelerated, generating an airflow velocity. The accelerated airflow passes through the liquid inlet and draws the liquid into the nozzle 300. The two fluids are mixed at the nozzle and sprayed out simultaneously, forming a liquid atomization. This disperses the solution into a spray pattern, which is then sprayed onto the surface of the cold screen 500 that needs cleaning, reacting with surface impurities to achieve the cleaning purpose.

[0039] The internal cleaner 200 has the same diameter as the cold screen sample holder, and the internal cleaner replaces the cold screen sample holder fixed on the cold screen 500. Since the cold screen sample holder is fixed to the top of the cold screen 500 during operation and is entirely inside the cold screen 500, the utility model makes the diameter of the internal cleaner 200 the same as the diameter of the cold screen sample holder so that when cleaning the cold screen 500, the cold screen sample holder can be directly removed and replaced with the internal cleaner 200.

[0040] The aeration disc 400 is circular and is located at the lower edge inside the housing 100.

[0041] There are multiple nozzles 300, arranged in multiple rows around the side of the housing 100. Specifically, there are 12 nozzles 300, arranged in two rows around the side of the housing 100, evenly distributed. Multiple nozzles 300 can perform comprehensive cleaning more quickly and effectively, but this is not the only possible arrangement; the number and position can be adjusted according to the actual situation.

[0042] The bottom of the housing 100 is provided with a support part 130. Specifically, the support part 130 can be configured as at least 3 support columns. The support columns are inclined to increase the stability of the bottom.

[0043] The above are merely embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent modifications made based on the description and drawings of this utility model, or direct or indirect applications in related technical fields, are similarly included within the patent protection scope of this utility model. The circuits, electronic components, and modules involved are all prior art, which can be fully implemented by those skilled in the art, and need not be elaborated upon. The scope of protection of this utility model does not involve improvements to the software and methods.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A cold screen washing apparatus, characterized by, The utility model relates to a cold screen cleaning device, including: The shell (100) containing the cold screen (500), the internal cleaner (200), the shower head (300) and the aeration disc (400); The shell (100) is provided with the hole through each device, is provided with the opening in the upper portion, supports and contains the cold screen (500) and is placed, is provided with the exhaust pipe (110) on the side, is provided with the blowdown port (120) in the bottom portion; The internal cleaner (200) is placed from the upper portion of the shell (100) and is integrally arranged in the middle portion of the shell (100), including: the water inlet (210) and multiple water outlets (220), the water inlet (210) is connected with the water outlet (220) and forms the liquid passage; The shower head (300) is arranged on the side of the shell (100); The aeration disc (400) is arranged in the bottom of the shell and includes the gas delivery pipe (410) and the exhaust hole (420) through the shell (100), the gas delivery pipe (410) is connected with the exhaust hole (420) and forms the airflow passage.

2. A cold screen washing device according to claim 1, characterized in that The shower head (300) is a two-fluid atomizing shower head, including: the shower head shell (310), the first fluid pipe (320) and the second fluid passage (330), the first fluid pipe (320) and the second fluid passage (330) have a communication place.

3. A cold screen washing apparatus according to claim 1, wherein The caliber of the internal cleaner (200) is consistent with the caliber of the cold screen sample holder, and the internal cleaner (200) is fixed on the cold screen (500) by replacing the cold screen sample holder.

4. A cold screen washing apparatus according to claim 1, wherein The aeration disc is a circular ring and is arranged at the lower edge inside the shell (100).

5. A cold screen washing device according to any of claims 1 or 2, characterized in that The shower head (300) is multiple and is arranged in multiple rows around the side of the shell (100).

6. A cold screen washing apparatus according to claim 1, wherein The bottom portion of the shell (100) is provided with a support portion (130).

7. A cold screen washing apparatus according to claim 1, wherein The cold screen (500) includes: the cold screen main body (510), the support (520) and the shielding layer (530), the support (520) is provided with the cold screen sample holder fixing portion (521) inside, and the shielding layer (530) is provided with the observation window (531).

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