Chuck and wire cutting device
By using radial support and rotary cutting with a chuck device, the problems of cutting line deformation and complex support structure during the separation of silicon carbide ring workpieces are solved, achieving high-precision and high-efficiency cutting results.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-26
- Publication Date
- 2026-03-24
AI Technical Summary
In existing silicon carbide ring workpiece separation processes, deformation and hysteresis of the cutting line lead to damage to the silicon carbide layer, resulting in low cutting accuracy and efficiency. Traditional support structures are complex and affect production efficiency.
The chuck device supports the annular workpiece through a radial support component, providing stable radial support force, simplifying installation, and optimizing the cutting path through rotary cutting to reduce cutting resistance and material loss.
It improves cutting accuracy and processing efficiency, reduces wear on cutting lines and ring-shaped workpieces, simplifies the workpiece installation process, and enhances overall processing quality.
Smart Images
Figure CN224028027U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of semiconductor manufacturing, especially a chuck and a wire cutting device. BACKGROUND
[0002] Silicon carbide (SiC) has been widely used in the fields of semiconductor, optoelectronic, aerospace, etc. due to its high hardness, high thermal conductivity, high temperature resistance and corrosion resistance, etc. In the manufacturing process of silicon carbide devices, a silicon carbide layer is usually deposited on a graphite substrate by chemical vapor deposition (CVD) or physical vapor deposition (PVT) process to obtain a silicon carbide product. In some application scenarios, silicon carbide materials need to exist in a ring structure, so the industry generally adopts the method of depositing a silicon carbide layer on both sides of a ring-shaped graphite substrate to prepare a ring-shaped workpiece.
[0003] The ring-shaped workpiece obtained by the above preparation process contains silicon carbide layers on both sides of the graphite substrate, and subsequent processing requires separating two independent silicon carbide products from the raw material. That is, cutting needs to be performed in the radial direction at the graphite substrate of the ring-shaped workpiece to divide the ring-shaped workpiece into two parts. The two parts obtained respectively consist of a graphite substrate and a silicon carbide layer formed on one side of the graphite substrate. The existing separation process mainly uses a cutting wire made of diamond for cutting. During cutting, the ring-shaped workpiece is placed horizontally and fixed by a limiting device to ensure stability during cutting.
[0004] However, in the actual processing process, the existing separation process still has certain limitations. For example, the deformation and hysteresis of the cutting wire during cutting may cause damage to the silicon carbide layer, and at the same time affect the service life of the cutting wire. In addition, the support method of the ring-shaped graphite substrate also has a great influence on cutting precision and process efficiency, and the currently used support structure is relatively complex in terms of adjustment and fixation, which is not conducive to improving production efficiency. Therefore, it is still necessary to optimize the existing silicon carbide ring separation process to improve cutting quality, increase processing efficiency and reduce material loss. SUMMARY
[0005] To solve the above technical problems, the utility model embodiment expects to propose a chuck and a wire cutting device, which optimizes the support method of the ring-shaped workpiece, makes it more stable during cutting, and reduces the cutting resistance. In addition, the chuck simplifies the installation operation of the ring-shaped workpiece and improves the cutting precision and overall processing efficiency by optimizing the stress state of the ring-shaped workpiece.
[0006] The technical scheme of the utility model is implemented as follows:
[0007] In a first aspect, the utility model discloses a chuck for supporting an annular workpiece in a wire cutting operation on the annular workpiece, the annular workpiece comprising a first annular layer, a second annular layer and a third annular layer arranged continuously along an axial direction of the annular workpiece, the wire cutting operation being for cutting the second annular layer from an outer peripheral surface of the annular workpiece in a radial direction of the annular workpiece, the chuck comprising:
[0008] A base;
[0009] A plurality of support assemblies arranged on a working surface of the base, the support assemblies being arranged spaced apart around a center of the working surface and being movable in a radial direction of the working surface, wherein each support assembly is arranged to be capable of exerting a support force outward in the radial direction on an inner peripheral surface of the first annular layer and an inner peripheral surface of the third annular layer.
[0010] In some optional examples, the height of the support assembly arranged to protrude from the working surface is adjustable to be suitable for supporting annular workpieces having different axial lengths.
[0011] In some optional examples, the support assembly comprises a connecting portion movably connected to the base and a support portion for supporting the annular workpiece, wherein the support portion is detachably connected to the connecting portion.
[0012] In some optional examples, the base is arranged to be capable of driving the annular workpiece to rotate around the central axis of the annular workpiece by the support assembly.
[0013] In some optional examples, the base is arranged to be capable of driving the annular workpiece to move towards a cutting wire for performing the wire cutting operation by the support assembly, so that the cutting wire performs the wire cutting operation on the annular workpiece.
[0014] In some optional examples, a scale is arranged on the working surface, the scale being used to identify the position of the support assembly relative to the center of the working surface.
[0015] In some optional examples, a recess is formed on a surface of the support assembly for supporting the annular workpiece, wherein the recess is arranged to allow the cutting wire to enter the recess after completing the wire cutting operation without contacting the support assembly.
[0016] In some optional examples, a flexible buffer layer is arranged on a surface of the support assembly for contacting the annular workpiece.
[0017] In a second aspect, the utility model discloses a wire cutting device, the wire cutting device comprising:
[0018] According to the chuck in the first aspect;
[0019] Cutting line.
[0020] In some optional examples, the position of the cutting line in a direction parallel to the central axis of the annular workpiece is adjustable.
[0021] This invention provides a chuck and a wire EDM device. The chuck includes a base and a radially movable support assembly to accommodate annular workpieces of different sizes and provide appropriate support force. The support assembly applies a radially outward support force to the inner circumferential surfaces of the first and third annular layers, fixing them in place during and after the wire EDM operation to prevent positional displacement or deformation caused by gravity or cutting force. This radial support method avoids the axial stress and additional cutting resistance that may be introduced by traditional clamping methods, improves cutting accuracy, ensures stable operation of the cutting wire along a predetermined path, and reduces trajectory deviation. Furthermore, this chuck optimizes processing efficiency, reduces wear on the annular workpiece and cutting wire, and improves the overall processing quality of the annular workpiece. Attached Figure Description
[0022] Figure 1 This is a three-dimensional schematic diagram of a ring-shaped workpiece.
[0023] Figure 2 for Figure 1 A cross-sectional view of the ring-shaped workpiece.
[0024] Figure 3 for Figure 1 A cross-sectional view of a ring-shaped workpiece after it has been cut.
[0025] Figure 4 A perspective view of a wire cutting device provided for an embodiment of this utility model.
[0026] Figure 5 for Figure 4 A three-dimensional schematic diagram of a part of a wire cutting machine.
[0027] Figure 6 A perspective view of the chuck provided for an embodiment of this utility model.
[0028] Figure 7 A perspective view of a chuck provided for another embodiment of this utility model.
[0029] Figure 8 This is a perspective view of a portion of a chuck provided in another embodiment of the present invention.
[0030] Figure 9The utility model provides a three -dimensional schematic view of wire cutting device for the embodiment of the utility model.
[0031] Figure 10 The utility model provides a three -dimensional schematic view of chuck for another embodiment of the utility model.
[0032] Figure 11 The utility model provides a three -dimensional schematic view of a part of chuck for another embodiment of the utility model. DETAILED DESCRIPTION
[0033] The technical solutions in the embodiments of the utility model will be apparently and completely described with reference to the drawings in the embodiments of the utility model.
[0034] The embodiments of the utility model will be specifically described below with reference to the drawings.
[0035] As shown in Figure 1 and Figure 2 , the annular workpiece 1 can be obtained by gas phase deposition on a graphite base. The annular workpiece 1 has an inner peripheral surface 1A and an outer peripheral surface 1B and comprises a first annular layer S1, a second annular layer S2 and a third annular layer S3 arranged continuously along the axial direction thereof, wherein the first annular layer S1 and the third annular layer S3 are silicon carbide layers, and the second annular layer S2 is a graphite layer. It should be understood that the inner peripheral surface 1A of the annular workpiece 1 is the inner side surface thereof around the central axis. The outer peripheral surface 1B of the annular workpiece 1 is the outer side surface thereof around the central axis. The inner peripheral surface 1A and the outer peripheral surface 1B of the annular workpiece 1 jointly define the annular structure of the annular workpiece 1, and correspond to the inner peripheral surface and the outer peripheral surface of the annular part obtained after cutting, respectively, after the cutting operation is completed. In addition, the continuous arrangement means that the first annular layer S1, the second annular layer S2 and the third annular layer S3 are sequentially connected in the axial direction of the annular workpiece 1 and form an integral structure, wherein the first annular layer S1 and the third annular layer S3 are respectively located at the two axial ends of the annular workpiece 1, and the second annular layer S2 is sandwiched between them.
[0036] In order to obtain a silicon carbide product, cutting can be performed at the second annular layer S2 along the radial direction of the annular workpiece 1 to separate the annular workpiece 1 into two independent annular parts, as shown in Figure 3 . The two separated annular parts have the same radial size as the annular workpiece 1 and respectively comprise a part of the second annular layer S2 and the first annular layer S1 or the third annular layer S3 on one annular surface of the second annular layer S2.
[0037] Referring to Figure 4It shows that some embodiments of the utility model provide linear cutting equipment 100, the linear cutting equipment 100 can be used to execute the cutting operation described above.Linear cutting equipment 100 can include upper holder 101 and lower holder 102, for simultaneously exerting force on the two annular surfaces of annular workpiece 1 to clamp annular workpiece 1, make it keep fixed in linear cutting equipment 100.Annular workpiece 1 is kept horizontally, namely it is kept to the central axis along the vertical direction perpendicular to the horizontal plane.In addition, linear cutting equipment 100 further includes cutting wire 103.Cutting wire 103 can be diamond wire for example, cutting wire 103 is arranged to be able to carry out high-speed reciprocating motion in the direction of its extension, and is fed from the outer peripheral surface 1B to the inner peripheral surface 1A of annular workpiece 1 at the second annular layer S2 to complete the cutting operation.
[0038] Referring to Figure 5 Lower holder 102 includes disc-shaped base plate 104 arranged along the horizontal direction and four wedge-shaped clamping blocks 105 arranged on base plate 104.The four wedge-shaped clamping blocks 105 are arranged uniformly spaced apart around the central axis of base plate 104.The upper surface of each wedge-shaped clamping block 105 is inclined downward toward the direction of the central axis of base plate 104, that is, its thickness in the vertical direction gradually decreases toward the direction of the central axis of base plate 104.By placing annular workpiece 1 on the inclined surfaces 105A of the four wedge-shaped clamping blocks 105 and locating the outer edge portion of annular workpiece 1 on the inclined surfaces 105A of the wedge-shaped clamping blocks 105, annular workpiece 1 can be clamped by the four wedge-shaped clamping blocks 105 in the radial direction to prevent its movement in the horizontal direction.In addition, the inclined surfaces 105A can be compatible with annular workpieces 1 of different radial dimensions, and the vertical position of annular workpiece 1 in linear cutting equipment 100 can be adjusted due to the different heights of different positions on the inclined surfaces 105A.
[0039] In the above linear cutting equipment 100, annular workpiece 1 is fixed in linear cutting equipment 100 by the clamping force of upper holder 101 and lower holder 102 to ensure its stability during cutting.However, this clamping method can adversely affect the cutting process.In particular, annular workpiece 1 is always constrained by the clamping force during cutting, especially during the process of cutting wire 103 gradually cutting into the second annular layer S2, the clamping force can cause the two annular portions after cutting to abut or press against each other.Due to the superposition of the clamping force and the weight of annular workpiece 1, cutting wire 103 needs to overcome greater cutting resistance when moving at high speed, which is prone to deformation or bending, causing the cutting path to deviate, thereby affecting the cutting accuracy.
[0040] Furthermore, as the cutting progresses, the cutting line 103 has not yet fully penetrated the second annular layer S2. Under the combined action of clamping force and gravity, the upper silicon carbide layer may shift downwards and make additional contact with the cutting line 103, which is still in the cutting process. This contact may not only damage the surface of the silicon carbide layer but also exacerbate the wear of the cutting line 103, reduce cutting performance, shorten its service life, and ultimately affect the overall processing efficiency.
[0041] The method of fixing the annular workpiece 1 also affects cutting efficiency. Although the wedge clamping block 105 can accommodate annular workpieces 1 with different radial dimensions and allows for a certain degree of height adjustment, the process of installing and adjusting the annular workpiece 1 is relatively cumbersome. For example, when the annular workpiece 1 needs to be removed from the wire cutting equipment 100, at least two wedge clamping blocks 105 need to be moved, and when re-clamping, the position of the wedge clamping blocks 105 needs to be readjusted, increasing installation time. In addition, in order to ensure that the cutting line 103 can be accurately aligned with the target cutting position of the annular workpiece 1, the annular workpiece 1 usually needs to be precisely positioned, which further increases the complexity of the installation operation. Such a complicated installation process not only prolongs the cutting preparation time but also reduces the overall production efficiency.
[0042] To address the aforementioned problems, embodiments of this invention propose a chuck and a wire cutting device. This chuck optimizes the support method for the ring-shaped workpiece, making it more stable during cutting and reducing cutting resistance. Furthermore, the chuck simplifies the installation operation of the ring-shaped workpiece and improves cutting accuracy and overall processing efficiency by optimizing the stress state of the workpiece.
[0043] Specifically, see Figure 6 Some embodiments of this utility model provide a chuck 2. The chuck 2 is used to support the annular workpiece 1 during wire cutting operations. Combined with... Figures 1 to 3 The annular workpiece 1 includes a first annular layer S1, a second annular layer S2, and a third annular layer S3 arranged continuously along its axial direction. A wire cutting operation is used to cut the second annular layer S2 from the outer peripheral surface 1B of the annular workpiece 1 along the radial direction of the annular workpiece 1 to obtain two annular portions, see [link to relevant documentation]. Figure 2 and Figure 3 Wire cutting operations can be performed through... Figure 4 The cutting line 103 shown is executed.
[0044] The chuck 2 may include a base 10 and a plurality of support assemblies 11 disposed on a working surface 10A of the base 10. The support assemblies 11 are spaced apart around the center of the working surface 10A and are movable in the radial direction of the working surface 10A, wherein each support assembly 11 is configured to apply a radially outward supporting force to the inner peripheral surface of the first annular layer S1 and the inner peripheral surface of the third annular layer S3.
[0045] In the illustrated embodiment, the annular workpiece 1 is supported by a plurality of support assemblies 11 evenly arranged around the central axis of the annular workpiece 1 to ensure a stable support effect. The number of support assemblies 11 is not limited to a specific value, but can be adjusted according to the size, weight and processing requirements of the annular workpiece 1, for example, two, four or more support assemblies can be used, which are not specifically limited by the present application.
[0046] The support assemblies 11 only contact the inner peripheral surface 1A of the annular workpiece 1 and exert a support force in the radial direction, especially providing stable support to the inner peripheral surfaces of the first annular layer S1 and the third annular layer S3. These support forces cooperate with each other to form a plurality of balanced action and reaction forces, so that the annular workpiece 1 is firmly held in the chuck 2 and prevented from moving or rotating during the cutting process. In addition, the stable support force provided by the support assemblies 11 during the cutting process can effectively resist the cutting force, ensuring that the annular workpiece 1 remains in place after being stressed and does not deform, thereby ensuring that the cutting line 103 is uniformly cut along the predetermined path, improving cutting precision and stability.
[0047] Since the support assemblies 11 exert a support force from the inside of the annular workpiece 1, they do not interfere with the wire cutting operation. This internal support method allows the cutting wire 103 to freely enter from the outer peripheral surface 1B of the second annular layer S2 and continuously feed in the radial direction until the cutting is completed. Even after the first annular layer S1 and the third annular layer S3 are partially or completely separated, the support assemblies 11 always provide stable support to keep them in place. Compared with the traditional clamping and fixing method, the support assemblies 11 avoid applying clamping force in the thickness direction of the annular workpiece 1, thereby effectively reducing the cutting resistance, reducing the cutting deviation caused by the clamping force, improving the cutting precision, and reducing unnecessary wear and tear between the cutting wire 103 and the annular workpiece 1, improving processing efficiency and equipment life.
[0048] The base 10 of the chuck 2 provides a stable support base for the support assemblies 11. In some embodiments of the present application, the base 10 can be disc-shaped, with one circular end face as a working surface 10A. In some embodiments, the base 10 is arranged horizontally, with its upper surface as the working surface 10A. The support assemblies 11 are mounted on the working surface 10A and protrude upward from the working surface 10A, which can be used to provide stable support and avoid direct contact between the annular workpiece 1 and the base 10, thereby reducing damage caused by contact friction and ensuring the integrity of the workpiece during the cutting process.
[0049] In this embodiment, the chuck 2 keeps the annular workpiece 1 in a state where the central axis is along the vertical direction, but the utility model is not limited to this. In other embodiments, the chuck 2 can make the central axis of the annular workpiece 1 have a certain inclination angle relative to the vertical direction to adapt to the needs of different equipment or process conditions. Through the adjustable design of the support assembly 11, the support state of the annular workpiece 1 can be flexibly adjusted, the application range and processing efficiency of the chuck 2 are improved, and thus various processing needs can be adapted to.
[0050] The support assembly 11 is not fixedly arranged on the base 10, but can move along the radial direction to adjust the distance from the central axis of the annular workpiece 1. Such adjustability not only can change the support force applied by the support assembly 11 to the annular workpiece 1, but also enables it to adapt to annular workpieces 1 of different inner diameter sizes, thereby improving the applicability of the chuck 2. In addition, the adjustability of the support assembly 11 makes the installation and disassembly of the annular workpiece 1 more convenient, and the operator can quickly complete the fixation and replacement of the workpiece, reduce the adjustment time, and improve the processing efficiency.
[0051] The movement of the support assembly 11 on the base 10 can be realized in various ways. For example, in this embodiment, a sliding groove 101 is formed on the working surface 10A, and the support assembly 11 is arranged in the sliding groove 101 in the form of a sliding block and can slide along the sliding groove 101 to adjust its radial position. Such a sliding adjustment mechanism can flexibly adapt to annular workpieces 1 of different sizes and ensure smooth movement and accurate positioning of the support assembly 11, thereby improving the stability and applicability of the chuck 2.
[0052] Some embodiments of the utility model provide a chuck 2, which comprises a base 10 and a support assembly 11 that can move along the radial direction to adapt to annular workpieces 1 of different sizes and provide appropriate support force. The support assembly 11 is used to apply a radial outward support force to the inner circumferential surfaces of the first annular layer S1 and the third annular layer S3, so as to fix them in place during and after the wire cutting operation, and prevent position deviation or deformation caused by gravity or cutting force. This radial support method avoids the axial stress and additional cutting resistance that may be introduced by the traditional clamping method, improves the cutting accuracy, makes the cutting wire run stably along the predetermined path, and reduces the trajectory deviation. In addition, the use of the chuck 2 can optimize the processing efficiency, reduce the loss of the annular workpiece 1 and the cutting wire, and improve the overall processing quality of the annular workpiece.
[0053] In actual application, the thickness of the annular workpiece 1 can vary greatly, and therefore, in some embodiments of the present disclosure, the height of the support assembly 11 protruding from the working surface 10A is adjustable to be applicable to support annular workpieces 1 having different axial lengths.
[0054] Reference Figure 6 andFigure 7 The height of the support assembly 11 protruding from the working surface 10A refers to the height of the portion protruding in the direction perpendicular to the working surface 10A. Since the axial length of the annular workpiece 1 can vary, the adjustability of the height of the support assembly 11 enables the chuck 2 to flexibly adapt to annular workpieces 1 of different thicknesses. Regardless of whether the annular workpiece 1 is thicker or thinner, the protruding height of the support assembly 11 can be adjusted to stably support the annular workpiece 1, ensuring that it remains fixed during cutting and avoiding the problem of insufficient support or unstable clamping due to height mismatch.
[0055] It can be understood that the protruding height of the support assembly 11 only needs to be sufficient to exert a radial outward support force on the inner peripheral surface of the first annular layer S1 and the third annular layer S3. If the protruding height of the support assembly 11 is greater than the axial length of the annular workpiece 1, the annular workpiece 1 is allowed to be properly adjusted in position along the support assembly 11 to ensure alignment with the cutting line 103. This adjustment enables precise positioning of the annular workpiece 1 before cutting, thereby improving cutting accuracy.
[0056] In addition, by adjusting the height of the support assembly 11, the annular workpiece 1 can be more conveniently installed and adjusted. For example, when replacing annular workpieces 1 of different thicknesses, only the height of the support assembly 11 needs to be adjusted to quickly adapt, improving the compatibility and operational convenience of the chuck 2. At the same time, a reasonable support height can ensure the optimal alignment position of the cutting line 103 with the annular workpiece 1, avoiding tilting or shaking of the annular workpiece during cutting due to improper support. In particular, during high-speed reciprocating cutting, stable support can effectively reduce the vibration of the annular workpiece, reducing cutting errors, thereby improving cutting accuracy and optimizing processing quality.
[0057] To achieve the above adjustability of the support assembly 11, in some embodiments of the present application, referring to Figure 7 The support assembly 11 can include a connecting portion 111 movably connected to the base 10 and a support portion 112 for supporting the annular workpiece 1, wherein the support portion 112 is detachably connected to the connecting portion 111.
[0058] In some examples, the connecting portion 111 can be formed as a sliding block and is slidably received into a sliding groove 101 on the working surface 10A of the base 10. The support portion 112 can be in direct contact with the inner peripheral surface 1A of the annular workpiece 1 and provide support to the annular workpiece 1 by exerting a radial support force. The sliding adjustment of the connecting portion 111 enables the radial position of the support portion 112 to be adjusted, thereby adapting to annular workpieces 1 of different inner diameters and ensuring their stability during cutting.
[0059] Further, the support part 112 is detachably connected to the connecting part 111, so that the two can be separated without being damaged. For example, the support part 112 can be connected to the connecting part 111 by a threaded connection. This design allows the support part 112 to be quickly detached and replaced when it needs to be replaced due to long-term use or accidental damage, or when the support structure needs to be adjusted according to the specific size of the annular workpiece 1, without the need to replace the entire support assembly 11. In addition, replacing the support part 112 of different sizes to match the thickness of the annular workpiece 1 can ensure reliable support of the workpiece during cutting, thereby optimizing cutting accuracy and improving processing stability.
[0060] Referring to Figure 8 To further enhance the adaptability of the support part 112, the support part 112 can include a first part 112A and a second part 112B. The first part 112A can be integrally formed with the second part 112B, or the first part 112A can be detachably fixed to the top of the second part 112B. The first part 112A is used to directly contact the inner circumferential surface 1A of the annular workpiece 1, while the second part 112B can contact one annular surface of the annular workpiece 1 to further enhance support stability.
[0061] When cutting annular workpieces 1 of different thicknesses, appropriate support can be provided by replacing first parts 112A of different heights. In addition, or as a supplementary measure, intermediate spacers 112C can be added to the surface of the second part 112B that contacts the annular workpiece 1 to further adjust the support height. The thickness of the intermediate spacer 112C determines the height of the second part 112B protruding from the work surface 10A, thereby changing the support position of the annular workpiece 1 relative to the first part 112A and the cutting line 103 to make the relative position more reasonable for precise cutting operation.
[0062] For example, the intermediate spacer 112C can be magnetically attracted to the second part 112B, with the magnetic force being set to provide sufficient support to secure the annular workpiece 1 and to resist the cutting force exerted by the cutting line 103 during cutting, ensuring that the annular workpiece 1 remains stable during cutting. This detachable and height-adjustable support design not only improves the adaptability of the chuck 2, making it flexible for use with different sizes of workpieces, but also improves the precision and safety of the cutting operation.
[0063] According to some embodiments of the present disclosure, the base 10 is configured to drive the annular workpiece 1 to rotate around the central axis of the annular workpiece 1 by the support assembly 11, so that the cutting line 103 can perform the cutting operation while the annular workpiece 1 is rotating.
[0064] The rotation of the base 10 can be driven by an electric motor, such as a servo motor or a stepper motor, and can be combined with a gear transmission mechanism, a synchronous belt or other mechanical transmission structure to achieve precise rotation control, which is not shown in the figure. In some embodiments not shown, the base 10 can include a driving system for adjusting the rotation speed to adapt to different materials and processing needs. For example, during cutting of harder materials, the stress on the cutting line 103 can be reduced by reducing the rotation speed, thereby improving cutting stability; while in the cutting of softer materials or thinner annular workpieces 1, the rotation speed can be appropriately increased to speed up the operation.
[0065] Compared with cutting through the diameter, the annular workpiece 1 in the rotating state can significantly shorten the movement distance of the cutting line 103 during cutting. Specifically, the cutting line 103 only needs to move a distance slightly larger than the difference between the outer diameter and the inner diameter of the annular workpiece 1 to complete the cutting, without needing to pass through the entire diameter. Due to the shortening of the cutting path, the cutting idle time is correspondingly reduced, thereby improving the overall cutting efficiency. In addition, since this cutting method does not need to cut to the diameter position of the annular workpiece 1, it can be applied to annular workpieces 1 with larger diameters.
[0066] In addition, the rotating cutting method can also improve the cutting quality and stability. Since the annular workpiece 1 is continuously rotated during cutting, the cutting line 103 can uniformly act on the second annular layer S2 of the annular workpiece 1, avoiding the deviation or breakage of the cutting line 103 caused by uneven local stress. Moreover, the cutting line 103 always maintains stable and uniform contact with the annular workpiece 1, which not only reduces the stress concentration during cutting, but also effectively reduces the risk of deformation or damage of the annular workpiece 1 due to uneven stress. This method can also reduce the local excessive wear of the cutting line 103, improve the consistency and accuracy of cutting.
[0067] During cutting, the cutting feed of the cutting line 103 relative to the annular workpiece 1 can be achieved by the movement of the cutting line 103 and the annular workpiece 1 relative to each other. In some embodiments of the present application, the cutting feed is achieved by the movement of the base 10. Specifically, the base 10 can be configured to move the annular workpiece 1 in the direction of the cutting line 103 by the support assembly 11, so that the cutting line 103 performs a cutting operation on the annular workpiece 1.
[0068] As Figure 9As shown, the chuck 2 can further include a sliding table 14 and a sliding rail 15, wherein the sliding table 14 is capable of moving along the sliding rail 15, and the base table 10 is fixedly arranged above the sliding table 14, so as to be capable of moving synchronously with the sliding table 14. The cutting line 103 is arranged on the moving path of the sliding table 14, so that when the sliding table 14 moves, the base table 10 can drive the annular workpiece 1 to approach the cutting line 103, thereby realizing the cutting operation of the annular workpiece 1 without the overall movement of the cutting line 103 only by reciprocating movement.
[0069] The above design scheme realizes the cutting feed of the annular workpiece 1 through the movement of the base table 10, so that the cutting line 103 can always remain in a fixed position and only needs to reciprocate to complete the cutting. Since the annular workpiece 1 is stably supported by the support assembly 11 during the cutting process and gradually enters the cutting area with the smooth movement of the sliding table 14, the deviation or vibration caused by uneven force is avoided.
[0070] In some examples, the movement of the sliding table 14 along the sliding rail 15 can be driven by a motor and realized through a lead screw, a gear rack or other transmission mechanism to ensure the accuracy and controllability of the movement. The utility model does not limit this.
[0071] In order to accurately position the working position of the support assembly 11, according to some embodiments of the utility model, referring to Figure 10 A scale 16 can be arranged on the working surface 10A, which is used to identify the position of the support assembly 11 relative to the center of the working surface 10A, thereby realizing the accurate adjustment of the support assembly 11.
[0072] In Figure 10 In the illustrated embodiment, an independent scale 16 is arranged near each support assembly 11. By reading the scale value of the support assembly 11 on the scale 16, the distance of the support assembly 11 from the center of the working surface 10A can be determined intuitively, and then the position of the support assembly 11 on the working surface 10A can be adjusted accurately. By adjusting each support assembly 11 to the same scale value, it can be ensured that the distance of all support assemblies 11 from the center of the working surface 10A is equal, thereby realizing the symmetrical and uniform support of the annular workpiece 1 and ensuring the stability and accuracy of the annular workpiece 1 during the cutting process.
[0073] The arrangement of the scale 16 not only improves the adjustment efficiency of the support assembly 11, but also enables the operator to quickly and intuitively adjust the support assembly 11 to the appropriate position without relying on additional measuring tools, thereby avoiding the problems of inclination or uneven force of the annular workpiece 1 caused by uneven position of the support assembly 11.
[0074] In order to ensure that the cutting line 103 successfully completes the cutting operation of the annular workpiece 1 and avoids damaging the support assembly 11, in some embodiments of the utility model, as shown inFigure 11 As shown, the surface of the support assembly 11 for supporting the annular workpiece 1 can be formed with a recess 113, wherein the recess 113 is arranged to allow the cutting line 103 to enter the recess after cutting the annular workpiece 1 into two annular parts without contacting the support assembly 11, thereby effectively avoiding the cutting line 103 damaging the support assembly 11.
[0075] As shown, the support assembly 11 is taken as an example for illustration. The support assembly 11 can be generally in the shape of an I-beam, and includes recesses 113 formed on the opposite surfaces. Each support assembly 11 is installed with one of the surfaces provided with the recess 113 facing the inner circumferential surface 1A of the annular workpiece 1, so as to support the annular workpiece 1 via the surface. Since the cutting line 103 will cut through the annular workpiece 1 for the purpose of cutting, it is easy to cause damage to the support assembly 11. Figure 11 By arranging the recess 113 on the support assembly 112 and aligning the recess 113 with the predetermined cutting path of the cutting line 103 before cutting, it can be ensured that the cutting line 103 directly enters the recess 113 after cutting is completed, without contacting the support assembly 112. The recess 113 provides sufficient accommodation space, effectively preventing the cutting line 103 from unnecessary friction or collision with the support assembly 11 under the action of inertia. Therefore, the arrangement of the recess 113 effectively prevents unnecessary damage between the support assembly 11 and the cutting line 103.
[0076] In order to prevent the support assembly 11 from damaging the annular workpiece 1 when applying a supporting force to the annular workpiece 1, in some embodiments of the present application, referring to
[0077] , a flexible buffer layer 17 is arranged on the surface of the support assembly 11 for contacting the annular workpiece 1. The buffer layer can disperse the local pressure of the support assembly 11 on the annular workpiece 1 while providing stable support, thereby effectively reducing the stress concentration at the contact site and avoiding cracks or damage to the surface of the annular workpiece 1 due to uneven stress. Figure 11 For example, a buffer layer 17 made of rubber, silicone or other elastic materials can be arranged on the surface of the support assembly 112 for supporting. The material of the buffer layer 17 can be selected according to the material and processing requirements of the annular workpiece 1 to ensure that it can provide sufficient supporting force and play a buffering and protection role. In addition, the thickness and hardness of the buffer layer 17 can be optimized according to specific application scenarios, so that it can adapt to annular workpieces 1 of different sizes and materials while maintaining the stability of the support assembly 11 during supporting.
[0078] Referring to
[0079] Figure 9 Some embodiments of the utility model also provide a linear cutting device 3, the linear cutting device 3 can include chuck 2 and cutting wire 103 described above.
[0080] Cutting wire 103 is arranged near the support assembly 11 of chuck 2 and does not cause interference during the loading and unloading of annular workpiece 1. In order to ensure cutting accuracy and stability, cutting wire 103 can be arranged in a plane perpendicular to the central axis of annular workpiece 1. Referring to Figure 9 , cutting wire 103 can be tensioned by spool 12 and reciprocate along its extension direction through the rotation of spool 12 to complete the cutting operation. After annular workpiece 1 is stably supported by support assembly 11 and before the cutting operation starts, cutting wire 103 can be adjusted to accurately align with the predetermined cutting position. At this time, cutting wire 103 is located near annular workpiece 1 but does not directly contact to avoid friction or interference when not started. The predetermined cutting position is usually set on the outer peripheral surface of the second annular layer S2 and located at the middle position in the thickness direction to ensure that the two annular parts after cutting are evenly distributed with silicon carbide layer and reduce material loss.
[0081] When the cutting operation is started, cutting wire 103 reciprocates at high speed in its extension direction and at the same time gradually approaches annular workpiece 1 in the radial direction. After cutting wire 103 contacts the outer peripheral surface 1B of annular workpiece 1, it continues to approach the central axis in the radial direction, thereby gradually cutting and separating the second annular layer S2. In this process, the support force provided by support assembly 11 ensures that annular workpiece 1 does not displace or shake due to the cutting force, so that cutting wire 103 can uniformly cut along the predetermined path and finally obtain two independent annular parts.
[0082] In order to accurately align cutting wire 103 with the predetermined cutting position, in some embodiments of the disclosure, the position of cutting wire 103 relative to annular workpiece 1 can be adjusted in a direction parallel to the central axis of annular workpiece 1.
[0083] Referring to Figure 9 , in the case of cutting wire 103 being tensioned by spool 12, spool 12 can be raised and lowered in a direction parallel to the central axis of annular workpiece 1 to adjust the position of cutting wire 103 relative to annular workpiece 1, especially the position of cutting wire 103 relative to the second annular layer S2, so that cutting wire 103 is accurately aligned with the predetermined cutting position. Therefore, not only can the position of annular workpiece 1 be adjusted by adjusting support assembly 11 to align with cutting wire 103, but also the height of cutting wire 103 can be directly adjusted to ensure that it is in the best cutting position, thereby improving cutting accuracy and processing quality.
[0084] The adjustment function enables the cutting line 103 to adapt to ring-shaped workpieces 1 of different sizes or thicknesses, and in particular when processing ring-shaped workpieces of greater thickness or special structure, the height of the cutting line 103 can be adjusted to ensure that it is always in the optimal cutting position, avoiding processing errors caused by deviation of the cutting position. In addition, the adjustment function can also be used to correct slight position deviations caused by installation of the ring-shaped workpiece 1 or adjustment of the supporting assembly 11, further improving the cutting precision and ensuring the processing quality of the workpiece.
[0085] Further, the adjustability of the cutting line 103 enables the same chuck 2 to be compatible with a plurality of different specifications of workpieces, without the need to replace or modify the equipment structure, thereby improving the versatility of the equipment, reducing the adjustment time and production cost. Moreover, the adjustment mode can also optimize the controllability of the cutting process, so that the cutting line 103 can reduce the loss of the cutting line while ensuring stable cutting according to different processing requirements, improve the cutting efficiency, and optimize the surface quality of the workpiece.
[0086] It should be noted that the technical solutions disclosed in the embodiments of the utility model can be combined arbitrarily without conflict.
[0087] The above is only a specific implementation manner of the utility model, but the protection scope of the utility model is not limited to this, and any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the utility model, which should be covered in the protection scope of the utility model. Therefore, the protection scope of the utility model should be subject to the protection scope of the claims.
Claims
1. A chuck for supporting a ring-shaped workpiece in a wire cutting operation, the ring-shaped workpiece comprising a first annular layer, a second annular layer, and a third annular layer continuously arranged along its axial direction, the wire cutting operation being used to cut the second annular layer from the outer peripheral surface of the ring-shaped workpiece along the radial direction of the ring-shaped workpiece, characterized in that... The chuck includes: abutment; Multiple support components are disposed on the working surface of the base, the support components are arranged spaced apart around the center of the working surface and are movable in the radial direction of the working surface, wherein each support component is configured to apply an outward support force in the radial direction to the inner peripheral surface of the first annular layer and the inner peripheral surface of the third annular layer.
2. The chuck according to claim 1, characterized in that, The support assembly is configured such that the height of its projection from the working surface is adjustable to accommodate ring-shaped workpieces with different axial lengths.
3. The chuck according to claim 2, characterized in that, The support assembly includes a connecting portion movably connected to the base and a support portion for supporting the annular workpiece, wherein the support portion is detachably connected to the connecting portion.
4. The chuck according to claim 1, characterized in that, The base is configured to drive the annular workpiece to rotate around the central axis of the annular workpiece via the support assembly.
5. The chuck according to any one of claims 1 to 4, characterized in that, The base is configured to move the annular workpiece toward a cutting line for performing the wire cutting operation via the support assembly, so that the cutting line performs the wire cutting operation on the annular workpiece.
6. The chuck according to any one of claims 1 to 4, characterized in that, A scale is arranged on the working surface to mark the position of the support assembly relative to the center of the working surface.
7. The chuck according to any one of claims 1 to 4, characterized in that, The support assembly has a recess formed on its surface for supporting the annular workpiece, wherein the recess is configured to allow the cutting wire to enter the recess after the wire cutting operation is completed without contacting the support assembly.
8. The chuck according to any one of claims 1 to 4, characterized in that, A flexible buffer layer is provided on the surface of the support assembly that is in contact with the annular workpiece.
9. A wire cutting device, characterized in that, The wire cutting device includes: The chuck according to any one of claims 1 to 8; Cutting line.
10. The wire cutting apparatus according to claim 9, characterized in that, The position of the cutting line in a direction parallel to the central axis of the annular workpiece is adjustable.