Cooling liquid circulation system

Abstract

The utility model discloses a cooling liquid circulation system, and belongs to the technical field of cooling liquid treatment devices, and the cooling liquid circulation system comprises a first circulation flow path, a second circulation flow path and a third circulation flow path, the second circulating flow path comprises a liquid collecting assembly and a filtering assembly, the first storage part, the liquid collecting assembly and the filtering assembly are sequentially connected, and the filtering assembly is connected to the first storage part. When the wire cutting machine works, cooling liquid can be filtered through the first circulating flow path in the wire cutting machine, and after the wire cutting machine stops working, the cooling liquid can be filtered through the filtering assembly on the second circulating flow path, so that the treated cooling liquid can be guided into the wire cutting machine again for use, and the cooling efficiency of the wire cutting machine is improved. And when the on-line cutting machine works next time, the supplementing amount of the cooling liquid can be reduced, so that the using amount of the cooling liquid is reduced, and the using cost is reduced.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of cooling liquid processing devices, and particularly relates to a cooling liquid circulating system. BACKGROUND

[0002] A wire saw can cut a silicon wafer to form the silicon wafer. The wire saw needs to use cooling liquid to cool the cutting structure in the cutting process, and new cooling liquid needs to be continuously injected into the wire saw, resulting in a large amount of cooling liquid. CONTENT OF THE UTILITY MODEL

[0003] The utility model aims at overcoming the technical problem of a large amount of cooling liquid in the use of the wire saw.

[0004] TECHNICAL SCHEME: The cooling liquid circulating system comprises:

[0005] A first circulating flow path comprises a first storage member.

[0006] A second circulating flow path comprises a liquid collecting assembly and a filtering assembly, the first storage member, the liquid collecting assembly and the filtering assembly are connected in sequence, and the filtering assembly is connected to the first storage member.

[0007] In some embodiments, the filtering assembly comprises:

[0008] A membrane filtering member is connected to the liquid collecting assembly, and has a first output end and a second output end.

[0009] A pressure filtering member is connected to the first output end.

[0010] A storage member is connected to the pressure filtering member and connected to the second output end.

[0011] In some embodiments, the storage member has a first liquid outlet end, and the filtering assembly further comprises:

[0012] A concentrating member is connected to the first liquid outlet end.

[0013] A regulating member is connected to the concentrating member and the first storage member.

[0014] In some embodiments, the storage member has a second liquid outlet end, and the filtering assembly further comprises:

[0015] An ion exchange member is connected to the second liquid outlet end and connected to the concentrating member.

[0016] In some embodiments, the transfer element has a third liquid outlet, and the filtration assembly further includes:

[0017] A wastewater treatment unit, which is connected to the third outlet end.

[0018] In some embodiments, the second circulation path further includes:

[0019] A pre-coated component is provided, through which the liquid collection assembly is connected to the filter assembly.

[0020] In some embodiments, the liquid collection assembly includes a waste liquid lifting member, a liquid supply member, and a container connected in sequence, the waste liquid lifting member being connected to the first storage member, and the container being connected to the filtration assembly.

[0021] In some embodiments, the first circulating flow path further includes:

[0022] A fine filter element, which is connected to the first storage element;

[0023] Waste liquid collection device, which is connected to the fine filter and the first storage device respectively.

[0024] In some embodiments, the first circulation path further includes a first valve disposed in the flow path between the first storage element and the fine filter element.

[0025] In some embodiments, the first circulation path further includes a second valve and a third valve, the second valve being disposed in the flow path between the first storage device and the liquid collection assembly, and the third valve being disposed in the flow path between the first storage device and the filter assembly.

[0026] Beneficial Effects: The coolant circulation system of this application embodiment includes: a first circulation path including a first storage unit; and a second circulation path including a liquid collection assembly and a filter assembly. The first storage unit, the liquid collection assembly, and the filter assembly are connected in sequence, and the filter assembly is connected to the first storage unit. When the wire cutting machine is working, it can filter the coolant through the internal first circulation path. After stopping work, it can filter the coolant through the filter assembly on the second circulation path, thereby allowing the treated coolant to be reintroduced into the wire cutting machine for use. This reduces the amount of coolant needed for the next operation of the wire cutting machine, thus reducing coolant consumption and lowering operating costs. Attached Figure Description

[0027] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0028] Figure 1 This is a schematic diagram of the overall structure of the coolant circulation system according to an embodiment of this application;

[0029] Figure 2 This is a schematic diagram of the connection structure of the membrane filter, the filter press, and the transfer device in the coolant circulation system of this application embodiment;

[0030] Figure 3 This is a schematic diagram of the connection structure of the filter assembly in the coolant circulation system according to an embodiment of this application;

[0031] Figure 4 This is a schematic diagram of the connection structure of the pre-coated parts of the coolant circulation system in an embodiment of this application;

[0032] Figure 5 This is a schematic diagram of the connection structure of the liquid collection assembly in the coolant circulation system according to an embodiment of this application;

[0033] Figure 6 This is a schematic diagram of the connection structure of the first circulation path in the coolant circulation system according to an embodiment of this application;

[0034] Figure 7 This is a schematic diagram of the overall structure of the coolant circulation system according to an embodiment of this application, wherein a first valve, a second valve, and a third valve are provided on the first circulation flow path.

[0035] Explanation of reference numerals in the attached drawings: 10-First circulation path; 11-First storage unit; 12-Fine filter element; 13-Waste liquid collection unit; 14-First valve; 15-Second valve; 16-Third valve; 20-Second circulation path; 21-Liquid collection assembly; 211-Waste liquid lifting unit; 212-Liquid supply unit; 213-Containing unit; 22-Filter assembly; 221-Membrane filter element; 222-First output end; 223-Second output end; 224-Pressure filter element; 225-Transfer unit; 226-First liquid outlet end; 227-Concentration unit; 228-Adjustment unit; 229-Second liquid outlet end; 230-Ion exchange unit; 231-Third liquid outlet end; 232-Wastewater treatment unit; 24-Pre-coating unit. Detailed Implementation

[0036] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0037] In the description of this application, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined as "first" or "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, and "at least one" can mean one, two, or more, unless otherwise explicitly specified.

[0038] Wire slitting machines cut silicon wafers into finished wafers. During the cutting process, coolant is used. This coolant is introduced into the cutting chamber of the wire slitting machine (where the silicon ingot is cut) to cool the cut structure and prevent overheating that could damage the machine's structure and the silicon wafer. Therefore, coolant needs to be continuously injected into the wire slitting machine to keep the structure and wafers cool. However, this process requires a large amount of coolant, increasing both the volume and cost.

[0039] In view of the above, embodiments of this application provide a coolant circulation system to overcome at least one of the above-mentioned technical problems.

[0040] Please see Figure 1 and Figure 6 In this embodiment of the application, the coolant circulation system includes a first circulation path 10 and a second circulation path 20.

[0041] The first circulation path 10 includes a first storage component 11. The second circulation path 20 includes a liquid collection component 21 and a filter component 22. The first storage component 11, the liquid collection component 21 and the filter component 22 are connected in sequence, and the filter component 22 is connected to the first storage component 11.

[0042] Understandably, the first circulation path 10 can be located inside the wire cutter, belonging to the internal structure of the wire cutter. During the cutting process of silicon rods, the coolant inside the wire cutter can be filtered and circulated in the first circulation path 10. The first circulation path 10 includes a first storage unit 11, a fine filter unit 12, and a waste liquid collection unit 13. The first storage unit 11 is used to store the coolant entering the wire cutter. The first storage unit 11 can be a small tank inside the wire cutter. Coolant needs to be introduced into the small tank of the wire cutter to cool the corresponding internal structures during the operation of the wire cutter. Before use, the coolant in the first storage unit 11 needs to be filtered by a fine filter 12 to remove impurities and ensure high purity. The fine filter 12 can be a fine filter tank (a fine filter tank is a device used for fine filtration, mainly used to remove suspended solids, colloids, and small particles from liquids. Fine filter tanks are usually used as a deep filtration stage in waste liquid treatment processes to ensure that the effluent meets high cleanliness or discharge standards). The fine filter tank removes small impurities and oily substances that may have entered the coolant during use, thus improving its quality. After filtration by the fine filter 12, the coolant is then transported to the appropriate structure for use, such as to the cutting chamber. The used coolant (i.e. waste liquid) is collected inside the waste liquid collection unit 13 and then transported to the first storage unit 11 through the waste liquid collection unit 13. After being filtered again by the fine filter unit 12, it is supplied to the corresponding structure for use, thus forming a cycle. The coolant can be reused, which can reduce the amount of coolant replenishment during silicon rod cutting, thereby reducing the use of coolant, reducing costs, and having low coolant treatment costs.

[0043] After the wire cutter stops working, the first storage unit 11 will contain used coolant (i.e., waste liquid). This waste liquid can be filtered through the second circulation path 20. The second circulation path 20 includes the first storage unit 11, the liquid collection assembly 21, and the filter assembly 22 connected in sequence. The waste liquid in the first storage unit 11 can enter the liquid collection assembly 21 for treatment. The liquid collection assembly 21 can be a structure with storage function other than the wire cutter, and in addition to storage, it can also have functions such as mixing, sedimentation, collection, and lifting discharge. The waste liquid in the liquid collection assembly 21 then enters the filter assembly 22 for filtration, thereby removing impurities, oily substances, etc. The coolant produced after filtration can be transported back to the first storage unit 11 for storage, for use when the wire cutter cuts silicon rods again. Therefore, the waste liquid stored in the first storage container 11 can also be treated through the second circulation flow path 20 after the wire cutter stops working, so that the waste liquid generated by the wire cutter can be recycled, reducing material waste and also reducing the amount of coolant that needs to be added when the wire cutter is used next time (the coolant generated after being processed by the second circulation flow path 20 is re-inputted into the first storage container 11 for next use, so that when the wire cutter is used next time, only a small amount of coolant needs to be input into the first storage container 11 to meet the usage requirements of the device).

[0044] When in use, the liquid collection assembly 21 on the second circulation flow path 20 can be connected to multiple wire cutting machines simultaneously. Specifically, the first storage unit 11 on each wire cutting machine is connected to the liquid collection assembly 21, allowing waste liquid from multiple first storage units 11 to be transported into the liquid collection assembly 21. The waste liquid is then filtered through the second circulation flow path 20, and the filtered liquid is also transported to its corresponding first storage unit 11 for storage, ready for future use. This connection method allows the second circulation flow path 20 to process waste liquid generated from multiple wire cutting machines simultaneously, improving processing efficiency.

[0045] Please see Figure 2 In conjunction with the above embodiments, in some embodiments, the filter assembly 22 includes a membrane filter element 221, a pressure filter element 224, and a transfer element 225.

[0046] A membrane filter element 221 is connected to a liquid collection assembly 21, and the membrane filter element 221 has a first output end 222 and a second output end 223. A filter press element 224 is connected to the first output end 222. A transfer element 225 is connected to the filter press element 224 and is connected to the second output end 223.

[0047] It is understood that the liquid collection assembly 21 is connected to the membrane filter element 221 on the filter assembly 22, and the waste liquid in the liquid collection assembly 21 can be directly transported to the membrane filter element 221 for filtration. The membrane filter element 221 can be a tubular membrane filter, which is typically composed of multiple hollow fiber membrane elements connected in parallel or series. These membrane elements have semi-permeable membrane characteristics. During operation, the waste liquid enters the tubular membrane filter. Under a certain pressure, the waste liquid flows in from one end of the membrane tube. Small molecules permeate through the membrane wall to form clear liquid and are discharged, while large molecules or particles are trapped in the inner cavity of the membrane tube to form turbid liquid. Finally, the clear liquid and turbid liquid are collected and treated separately. This structural configuration improves filtration efficiency and allows for flexible adjustment of the throughput and separation performance according to needs. A first output end 222 and a second output end 223 can be provided on the membrane filter element 221. The first output end 222 is used to discharge the turbid liquid produced after filtration, and the second output end 223 is used to discharge the clear liquid produced after filtration.

[0048] The second output terminal 223 is connected to the transfer unit 225 on the filter assembly 22, allowing the clarified liquid produced by the membrane filter 221 to enter the transfer unit 225 for storage through the second output terminal 223. The transfer unit 225 can be a transfer tank, which can temporarily store liquids (a transfer tank is a container used for the temporary storage and transfer of liquids, playing an important role in waste liquid treatment. It is usually made of durable and corrosion-resistant materials, such as stainless steel or plastic, and the appropriate material is selected according to the specific waste liquid properties to ensure safety and durability. In the waste liquid treatment process, the transfer tank is mainly used to collect, store, and transport waste liquids, playing a buffering and transfer role, and is one of the key pieces of equipment in the entire treatment system).

[0049] The first output end 222 is connected to the filter press 224 on the filter assembly 22, so that the turbid liquid produced by the membrane filter 221 enters the filter press 224 through the first output end 222 for filtration. The filter press 224 can be a filter press (a filter press consists of alternately arranged filter plates and filter frames, with filter cloth covering the surface of the filter plates as the filter medium. A sealed filter chamber is formed between the filter plates and the filter frames. Pressure is provided by a hydraulic device to press the filter plates together, ensuring the airtightness of the filter chamber. The suspension is pressed into the filter chamber by a feed pump, the filtrate passes through the filter cloth and is discharged, and solid particles are trapped on the surface of the filter cloth to form a filter cake. After filtration, the hydraulic system releases the filter plates, the filter cake falls off, and the filter cloth can be cleaned or replaced). By treating the turbid liquid with the filter press 224, a portion of the filtrate can be obtained. This portion of the filtrate is transported to the transfer unit 225 for storage, thereby improving the efficiency of waste liquid recycling. If the requirements for coolant usage are not high, the treated filtrate in transfer unit 225 can be directly transferred to the first storage unit 11 for use in the next wire cutting machine operation.

[0050] Please see Figure 3 In conjunction with the above embodiments, in some embodiments, the transfer member 225 has a first liquid outlet 226, and the filter assembly 22 further includes a concentrator 227 and a regulating member 228.

[0051] The concentrator 227 is connected to the first liquid outlet 226. The adjusting part 228 is connected to the concentrator 227 and the first storage part 11 respectively.

[0052] It is understandable that a concentrator 227 and a mixing device 228 can also be provided on the filter assembly 22. The liquid meeting the requirements in the transfer unit 225 can be transported to the concentrator 227 through the first outlet 226. The concentrator 227 can be a finished liquid tank, which is also a storage structure. It can seal and preserve the qualified clear liquid to prevent the entry of external substances and protect the clear liquid from contamination or loss. The filtrate stored in the concentrator 227 can be transported to the mixing device 228 for mixing. After mixing by the mixing device 228, the required finished liquid (i.e., a coolant that can be used directly) is formed. Then, the finished liquid mixed by the mixing device 228 is transported to the first storage unit 11 for storage. The mixing device 228 can be a mixing tank. The mixing tank plays an important role in mixing, diluting, and neutralizing liquids during the liquid treatment process. It is used to uniformly mix liquids of different types or concentrations in proportion and add necessary chemical reagents (such as neutralizing agents, coagulants, etc.) to promote the subsequent treatment effect.

[0053] Please see Figure 3 In conjunction with the above embodiments, in some embodiments, the transfer unit 225 has a second liquid outlet 229, and the filter assembly 22 further includes an ion exchange unit 230. The ion exchange unit 230 is connected to the second liquid outlet 229 and to the collection unit 227.

[0054] It is understandable that an ion exchange unit 230 can also be installed on the filter assembly 22, and the transfer unit 225 can play a certain role in treating the liquid inside. Some of the liquid treated by the transfer unit 225 may need to undergo ion exchange before it can be used. Therefore, this portion of liquid can be transported to the ion exchange unit 230 for treatment through the second outlet 229 on the transfer unit 225. The ion exchange unit 230 typically contains cation or anion exchange resin to remove metal ions or other target ions from the clarified liquid, ensuring that this portion of the liquid meets the requirements. The liquid that meets the requirements after treatment by the ion exchange unit 230 is then transported to the collection unit 227 for storage. The ion exchange unit 230 can treat some of the liquid in the transfer unit 225 that does not meet the requirements, avoiding waste and further improving the efficiency of waste liquid recycling.

[0055] Please see Figure 3In conjunction with the above embodiments, in some embodiments, the transfer component 225 has a third liquid outlet 231, and the filter assembly 22 further includes a wastewater treatment component 232. The wastewater treatment component 232 is connected to the third liquid outlet 231.

[0056] Understandably, the filter assembly 22 is also equipped with a wastewater treatment component 232, which is connected to the third outlet 231 on the transfer unit 225. This allows non-recoverable liquid generated after treatment by the transfer unit 225 to enter the wastewater treatment component 232 for collection and centralized treatment. The wastewater treatment component 232 can detect, classify, store, and treat this portion of the liquid to ensure it meets environmental protection requirements, reduce the spread of pollution, and ensure the environmental friendliness of industrial production.

[0057] Please see Figure 4 In conjunction with the above embodiments, in some embodiments, the second circulation path 20 further includes a pre-coating component 24, and the liquid collection component 21 is connected to the filter component 22 through the pre-coating component 24.

[0058] It is understandable that the waste liquid in the collection component 21 can be pre-treated in the pre-coating component 24 before entering the filter component 22 for filtration. Specifically, the waste liquid treated by the pre-coating component 24 enters the membrane filter element 221 in the filter component 22 for filtration. The pre-coating component 24 can be a pre-coating tank, which can improve the filtration effect of the waste liquid in the filter component 22. Special pre-coating materials, such as diatomaceous earth and perlite, are usually added to the pre-coating tank. These materials can form a uniform pre-coating layer on the surface of the filter media (such as filter cartridges and filter screens). Before entering the formal filtration equipment, the waste liquid is pre-treated in the pre-coating tank. The pre-coating material adheres to the filter media in the pre-coating tank, which can improve the filtration accuracy and efficiency of the filter media, help intercept finer impurity particles, prevent impurities from clogging the filter media, extend the service life of the filter media, and benefit the subsequent filtration of the liquid by the filter component 22. This can improve the working efficiency and filtration effect of the filter component 22, thereby increasing the service life of the filter component 22.

[0059] The pre-coating element 24 can also be disposed between the membrane filter element 221 and the filter press element 224, allowing the turbid liquid produced after filtration by the membrane filter element 221 to enter the pre-coating element 24 for pre-treatment before being transported to the interior of the filter press element 224. This makes it easier for the filter press element 224 to filter the treated turbid liquid, reducing damage to the filter press element 224, improving the working efficiency of the filter press element 224, extending the service life of the filter cloth inside the filter press element 224, ensuring the filtration effect of the filter press element 224, and thus extending its service life. Alternatively, the pre-coating element 24 can be disposed before both the membrane filter element 221 and the filter press element 224, so that the waste liquid is pre-treated by the pre-coating element 24 before entering the corresponding filtration structure. This allows the filtration structure to better filter the waste liquid, improves the filtration effect, reduces the probability of damage to the filtration structure by the waste liquid, and extends the service life of the filtration structure.

[0060] Please see Figure 5 In conjunction with the above embodiments, in some embodiments, the liquid collection assembly 21 includes a waste liquid lifting member 211, a liquid supply member 212 and a container 213 connected in sequence. The waste liquid lifting member 211 is connected to the first storage member 11 and the container 213 is connected to the filter assembly 22.

[0061] Understandably, to ensure the continuity of wastewater treatment and avoid intermittent entry of wastewater into the filter assembly 22, the wastewater in the first storage unit 11 can first enter the collection assembly 21. When the wastewater collected in the collection assembly 21 reaches a certain volume, it is then transported to the filter assembly 22 for treatment. When the wastewater in the first storage unit 11 enters the collection assembly 21 for treatment, it first enters the wastewater lifting unit 211 of the collection assembly 21. The wastewater lifting unit 211 can be a wastewater lifting tank, used for collecting and storing wastewater. It performs preliminary adjustment of parameters such as pH and temperature of the collected wastewater to be treated, making it more suitable for the requirements of subsequent treatment processes. Its main function is to use equipment such as a lift pump to lift the wastewater to be treated to a certain height, overcome pipeline resistance and gravity, and transport the wastewater to the subsequent treatment unit. The waste liquid treated by the waste liquid lifting component 211 is then transported to the supply component 212. The supply component 212 can be a centralized supply tank, which, in addition to storing, settling impurities, and regulating temperature, can also provide unified supply to multiple equipment or process points, facilitating the management and control of the waste liquid to be treated and reducing the complexity and uncertainty that may arise from decentralized supply. The waste liquid treated by the supply component 212 is then transported to the container 213, which can be a waste liquid tank. The container 213 has the function of collecting and temporarily storing the waste liquid to be treated, and can store the waste liquid transported by the supply component 212 so that the waste liquid to be treated can be transported to the subsequent treatment structure for further treatment.

[0062] Please see Figure 7 In conjunction with the above embodiments, in some embodiments, the first circulation path 10 further includes a first valve 14, and the first storage unit 11 is connected to the fine filter unit 12 through the first valve 14. The first circulation path 10 also includes a second valve 15 and a third valve 16, the first storage unit 11 is connected to the liquid collection assembly 21 through the second valve 15, and the first storage unit 11 is connected to the filter assembly 22 through the third valve 16.

[0063] Understandably, a first valve 14 is provided between the first storage unit 11 and the fine filter unit 12, which can control the flow of liquid between the two components. A second valve 15 is provided between the first storage unit 11 and the liquid collection assembly 21 (specifically, between the waste liquid lifting component 211 on the first storage unit 11 and the liquid collection assembly 21), which can also control the flow of liquid between the two components. A third valve 16 is provided between the first storage unit 11 and the filter assembly 22 (specifically, between the adjusting component 228 on the first storage unit 11 and the filter assembly 22), which can also control the flow of liquid between the two components.

[0064] When the wire cutter needs to cut silicon rods, the first valve 14 can be opened, and the second valve 15 and the third valve 16 can be closed, allowing liquid to circulate in the first circulation path 10. This allows for cooling of the corresponding structure and collection and filtration of waste liquid, enabling some waste liquid to be recycled and reducing the amount of coolant required. When the wire cutter stops working, the first valve 14 can be closed, and the second valve 15 and the third valve 16 can be opened, allowing waste liquid in the first storage unit 11 to circulate in the second circulation path 20. The waste liquid sequentially enters the liquid collection assembly 21 and the filter assembly 22 for treatment. The liquid treated by the filter assembly 22 returns to the first storage unit 11 for storage, ready for use the next time the wire cutter operates.

[0065] If the liquid processing efficiency in the first circulation path 10 is low during operation of the wire cutting machine, the first valve 14, the second valve 15, and the third valve 16 can be opened simultaneously. This allows the waste liquid stored in the first storage unit 11 to be filtered in both the first circulation path 10 and the second circulation path 20. Simultaneous filtration through both circulation paths improves filtration efficiency and ensures adequate coolant supply. This configuration requires the first storage unit 11 to include at least two chambers: one chamber stores the filtered liquid or unused coolant, and the other chamber stores the waste liquid generated after use. The filtered liquid or unused coolant can enter the corresponding chamber for use through the fine filter 12. The waste liquid in the first storage unit 11 can enter the second circulation path 20 for filtration and then enter the corresponding chamber in the first storage unit 11. Alternatively, the waste liquid in the first storage unit 11 can enter the fine filter 12 in the first circulation path 10 for filtration and then enter the corresponding chamber for use.

[0066] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0067] The coolant circulation system provided in the embodiments of this application has been described in detail above, and specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the technical solutions and core ideas of this application. Those skilled in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A coolant circulation system, characterized in that, include: The first circulation path (10) includes a first storage component (11); The second circulation path (20) includes a liquid collection assembly (21) and a filter assembly (22). The first storage unit (11), the liquid collection assembly (21) and the filter assembly (22) are connected in sequence, and the filter assembly (22) is connected to the first storage unit (11).

2. The coolant circulation system according to claim 1, characterized in that, The filter assembly (22) includes: A membrane filter element (221) is connected to the liquid collection assembly (21), and the membrane filter element (221) has a first output end (222) and a second output end (223); A filter press (224) is connected to the first output end (222); Transfer unit (225) is connected to the filter press (224) and connected to the second output terminal (223).

3. The coolant circulation system according to claim 2, characterized in that, The transfer unit (225) has a first liquid outlet (226), and the filter assembly (22) further includes: A concentrator (227) is connected to the first liquid outlet (226); Adjustment component (228) is connected to the concentrator (227) and the first storage component (11) respectively.

4. The coolant circulation system according to claim 3, characterized in that, The transfer unit (225) has a second liquid outlet (229), and the filter assembly (22) further includes: An ion exchanger (230) is connected to the second liquid outlet (229) and to the concentrator (227).

5. The coolant circulation system according to claim 2, characterized in that, The transfer unit (225) has a third liquid outlet (231), and the filter assembly (22) further includes: Wastewater treatment component (232) is connected to the third outlet end (231).

6. The coolant circulation system according to claim 1, characterized in that, The second circulation path (20) further includes: The pre-coated part (24) is used to connect the liquid collection assembly (21) to the filter assembly (22).

7. The coolant circulation system according to claim 1, characterized in that, The liquid collection assembly (21) includes a waste liquid lifting component (211), a liquid supply component (212), and a container (213) connected in sequence. The waste liquid lifting component (211) is connected to the first storage component (11), and the container (213) is connected to the filter assembly (22).

8. The coolant circulation system according to claim 1, characterized in that, The first circulating flow path (10) further includes: A fine filter element (12) is connected to the first storage element (11); Waste liquid collection device (13) is connected to the fine filter device (12) and the first storage device (11) respectively.

9. The coolant circulation system according to claim 8, characterized in that, The first circulation path (10) further includes a first valve (14), which is disposed in the flow path between the first storage element (11) and the fine filter element (12).

10. The coolant circulation system according to claim 9, characterized in that, The first circulation path (10) further includes a second valve (15) and a third valve (16). The second valve (15) is disposed in the flow path between the first storage device (11) and the liquid collection assembly (21), and the third valve (16) is disposed in the flow path between the first storage device (11) and the filter assembly (22).

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