Tin drop electromagnetic micro-spraying magnetic force regulation and control device

Abstract

The utility model provides a tin drop electromagnetic micro-spraying magnetic force regulation and control device, which comprises an electromagnetic micro-spraying valve and a plurality of magnetic blocks, the plurality of magnetic blocks are symmetrically arranged on two sides of the electromagnetic micro-spraying valve, the tin drop electromagnetic micro-spraying magnetic force regulation and control device is characterized by further comprising a guide rail and a driving mechanism, the guide rail is arranged at the bottom of the electromagnetic micro-spraying valve, and the guide rail is provided with a guide groove; a moving block is arranged at the bottom of each magnetic block, and the multiple magnetic blocks are slidably connected to the guide groove through the moving blocks; the driving mechanism can drive the magnetic blocks on the two sides of the electromagnetic micro-spraying valve to move reversely along the guide grooves so that the magnetic blocks on the two sides of the electromagnetic micro-spraying valve can get close to or get away from each other. By adjusting the distance between each group of magnetic blocks on the two sides of the electromagnetic micro-spraying valve, the magnetic field intensity, direction and distribution can be conveniently adjusted, and the optimal magnetic field matching can be quickly realized.

Description

Technical Field

[0001] This utility model relates to the field of electromagnetic valve technology, and more specifically, to a tin droplet electromagnetic micro-spray magnetic force control device. Background Technology

[0002] In cutting-edge fields such as microelectronics manufacturing, microelectromechanical systems (MEMS) processing, and high-precision photolithography, there are extremely high requirements for the precise and stable spraying of tiny molten tin droplets. Electromagnetic micro-spray tin droplet generators, as core equipment for achieving this crucial function, play an irreplaceable and vital role.

[0003] However, current electromagnetic micro-spraying tin droplet generators on the market exhibit a series of challenging problems in practical applications: existing generators struggle to control droplet size and positional accuracy. Due to limitations in magnetic field adjustment, the force exerted by the magnetic field on the molten tin cannot be precisely controlled, making it difficult to accurately control the process of molten tin separating from the nozzle to form droplets. This results in significant droplet size deviations, failing to meet the stringent droplet size requirements of different photolithography processes. Simultaneously, the uneven electromagnetic force experienced by the molten tin during spraying easily causes deviations in droplet spray direction, reducing the positional accuracy of the droplets landing on the substrate and severely impacting the accuracy of pattern creation in high-precision photolithography processes. Different photolithography processes may use tin alloys or other molten metals with varying compositions, and these materials exhibit significant differences in physical properties such as viscosity and surface tension. Traditional generators cannot flexibly adjust their magnetic fields according to material characteristics, making it difficult to achieve stable and uniform droplet spraying on various materials. Furthermore, facing different photolithography process requirements, such as different pattern densities and line widths, existing equipment cannot flexibly adjust droplet spraying parameters by optimizing the magnetic field, severely limiting its application in diverse processes. Utility Model Content

[0004] This invention provides a tin droplet electromagnetic micro-spraying magnetic force control device, which aims to improve at least one of the above-mentioned technical problems.

[0005] To solve the above-mentioned technical problems, this utility model provides a tin droplet electromagnetic micro-spraying magnetic force control device, including an electromagnetic micro-spraying valve and a plurality of magnetic blocks, the plurality of magnetic blocks being symmetrically arranged on both sides of the electromagnetic micro-spraying valve. It also includes a guide rail and a driving mechanism. The guide rail is disposed at the bottom of the electromagnetic micro-spraying valve and has a guide groove. Each magnetic block has a movable block at its bottom, and the plurality of magnetic blocks are slidably connected to the guide groove through the movable blocks. The driving mechanism can drive the magnetic blocks on both sides of the electromagnetic micro-spraying valve to move in opposite directions along the guide groove, so that the magnetic blocks on both sides of the electromagnetic micro-spraying valve move closer to or further away from each other.

[0006] As a further optimization, the drive mechanism includes a drive control plate, with guide rods and threaded rods respectively on both sides of the drive control plate. The two ends of the guide rail are respectively connected to the upper ends of the guide rods and the threaded rods. A steering wheel is provided at the top of the threaded rod for rotating the threaded rod to drive the drive control plate to move up and down along the guide rods. The drive control plate has a plurality of drive slots, which are symmetrically arranged. The moving block has a circular rod that passes through the drive slot. The drive slot is constructed such that when the drive control plate moves up and down, the drive slot can drive the magnetic blocks on both sides of the electromagnetic micro-spray valve to move in the opposite direction along the guide slots through the circular rods, so that the magnetic blocks on both sides of the electromagnetic micro-spray valve move closer or further apart from each other.

[0007] As a further optimization, the drive groove is provided with an upper stagnation groove, a push groove and a lower stagnation groove from top to bottom. The upper stagnation groove and the lower stagnation groove extend in the vertical direction, and the height of the upper stagnation groove increases from the middle to both sides, while the height of the lower stagnation groove decreases from the middle to both sides. The push groove slopes downward from both sides towards the middle.

[0008] As a further optimization, both the magnetic blocks and the drive slots are provided in eights, and are arranged in pairs, symmetrically on both sides of the electromagnetic micro-spray valve.

[0009] As a further optimization, two guide rails are arranged in parallel, and the guide grooves are provided on two adjacent sides of the two guide rails. Baffles are connected to both ends of the guide rails, and the guide rails are connected to the upper ends of the guide rod and the threaded rod through the baffles.

[0010] As a further optimization, the two side walls of the movable block are provided with connecting blocks that are adapted to the guide groove, and the movable block is slidably connected to the guide groove through the connecting blocks.

[0011] As a further optimization, the drive control board is provided with connecting rods on both sides, one of the connecting rods having a through hole adapted to the guide rod, and the other connecting rod having a threaded hole adapted to the threaded rod. The drive control board is connected to the guide rod and the threaded rod through the connecting rods.

[0012] As a further optimization, limit blocks are provided at the bottom of both the guide rod and the threaded rod.

[0013] By adopting the above technical solution, the present invention can achieve the following technical effects:

[0014] This application utilizes a guide rail at the bottom of an electromagnetic micro-spray valve, with several magnetic blocks symmetrically arranged on both sides of the valve and slidably connected to the guide rail. A drive mechanism can drive the magnetic blocks on both sides of the electromagnetic micro-spray valve to move in opposite directions, thereby changing the distance between them. During equipment commissioning, technicians can easily and precisely adjust the magnetic field strength, direction, and distribution by sequentially adjusting the spacing between each group of magnetic blocks on both sides of the electromagnetic micro-spray valve, based on the actual solder droplet spraying effect. This allows for rapid achievement of optimal magnetic field matching, significantly shortening commissioning time and improving commissioning accuracy and efficiency. During equipment operation, if any abnormality occurs in solder droplet spraying, the adjustable function of the magnetic blocks allows for rapid identification of whether the problem is related to the magnetic field. If adjusting the magnetic blocks resolves the issue, the cause of the magnetic field problem can be quickly pinpointed, allowing for targeted maintenance and repair, significantly reducing equipment downtime and improving equipment reliability and availability. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the tin droplet electromagnetic micro-spraying magnetic force control device of this application from a first-view perspective.

[0017] Figure 2 This is a schematic diagram of the tin droplet electromagnetic micro-spraying magnetic force control device of this application from a second perspective.

[0018] Figure 3 This is a schematic diagram of the tin droplet electromagnetic micro-spraying magnetic force control device of this application from a third-person perspective.

[0019] Figure 4 This is a front view of the tin droplet electromagnetic micro-spray magnetic force control device of this application;

[0020] In the diagram: 1-Electromagnetic micro-spray valve; 2-Magnetic block; 3-Guide rail; 4-Baffle; 5-Drive control plate; 501-Drive slot; 5011-Push slot; 5012-Upper slack slot; 5013-Lower slack slot; 6-Guide rod; 7-Threaded rod; 8-Connecting rod; 9-Limit block; 10-Moving block; 11-Circular rod; 12-Connecting block; 13-Guide slot; 14-Steering wheel. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0022] Example

[0023] See Figure 1-4 A magnetic force control device for electromagnetic micro-spraying of tin droplets includes an electromagnetic micro-spraying valve 1, a plurality of magnetic blocks 2, a guide rail 3, and a driving mechanism. The plurality of magnetic blocks 2 are symmetrically arranged on both sides of the electromagnetic micro-spraying valve 1. The guide rail 3 is located at the bottom of the electromagnetic micro-spraying valve 1 and extends horizontally along both sides of the electromagnetic micro-spraying valve 1. Each magnetic block 2 has a movable block 10 at its bottom, and the magnetic block 2 is slidably connected to the guide groove 13 through the movable block 10. The driving mechanism can drive the magnetic blocks on both sides of the electromagnetic micro-spraying valve 1 to move in opposite directions along the guide groove 13, so that the magnetic blocks 2 on both sides of the electromagnetic micro-spraying valve 1 move closer or further apart, thereby controlling the magnetic field strength, direction, and distribution.

[0024] Specifically, the drive mechanism includes a drive control plate 5, with guide rods 6 and threaded rods 7 respectively arranged on both sides of the drive control plate 5. Connecting rods 8 are fixedly installed on both sides of the drive control plate 5. One connecting rod 8 has a through hole and is slidably fitted onto the guide rod 6 through the through hole; the other connecting rod 8 has a threaded hole and is threadedly connected to the threaded rod 7 through the threaded hole. The upper end of the guide rod 6 is fixedly connected to one end of the guide rail 3, and the upper end of the threaded rod 7 is rotatably connected to the other end of the guide rail 3. A steering wheel 14 is fixedly connected to the top of the threaded rod 7, which drives the threaded rod 7 to rotate, thereby driving the drive control plate 5 to move up and down along the guide rod 6.

[0025] The drive control board 5 is provided with drive slots 501. Preferably, the number of magnetic blocks 2 and drive slots 501 are both set to eight, and they are symmetrically arranged on both sides of the electromagnetic micro-jet valve 1. Among them, two symmetrical ones form a group, and there are a total of four groups. The drive slots 501 include an upper stagnation slot 5012, a push slot 5011 and a lower stagnation slot 5013 from top to bottom. The upper stagnation slots 5012 and lower stagnation slots 5013 extend in the vertical direction, and the heights of the upper stagnation slots 5012 and lower stagnation slots 5013 in each group are different. The height of the upper stagnation slot 5012 increases from the middle to both sides, and the height of the lower stagnation slot 5013 decreases from the middle to both sides. The length of the push slots 5011 in each group is also different. The push slots 5011 extend downward at an angle from both sides to the middle, and their length decreases from both sides to the middle.

[0026] A circular rod 11 is fixedly installed on the bottom of the movable block 10 near the drive control plate 5. The circular rod 11 passes through the drive groove 501, so that when the drive control plate 5 moves up and down, it can drive the magnetic block 2 to move along the guide groove 13 through the cooperation of the drive groove 501 and the circular rod 11. By setting the upper stagnation groove 5012, the push groove 5011 and the lower stagnation groove 5013, the magnetic block 2 can only be pushed and moved when the circular rod 11 is in the push groove 5011. During the lifting and lowering process of the drive control board 5, due to the different heights of the upper slack groove 5012 and lower slack groove 5013 inside each set of drive grooves 501, the height of the upper slack groove 5012 increases from the middle to both sides, while the height of the lower slack groove 5013 decreases from the middle to both sides. Therefore, during the lifting process of the drive control board 5, due to the presence of the upper slack groove 5012, initially only the set of drive grooves 501 closest to the middle position can drive the corresponding set of magnetic blocks 2 to move closer to the electromagnetic micro-spray valve 1. After the drive control board 5 continues to rise, the drive grooves 501 far from the center position will sequentially drive the corresponding magnetic blocks 2 to move closer to the center. Similarly, during the lowering process of the drive control board 5, due to the presence of the lower slack groove 5013, the two magnetic blocks 2 in the same group are driven away from the middle sequentially from both sides. This allows each set of magnetic blocks 2 to move sequentially, enabling technicians to easily and precisely adjust the magnetic field strength, direction, and distribution by sequentially adjusting the spacing of each set of magnetic blocks 2 based on the actual solder droplet ejection effect. This quickly achieves optimal magnetic field matching, significantly shortening debugging time and improving debugging accuracy and efficiency. Furthermore, by decreasing or increasing the distance between the electromagnetic micro-spray valve 1 and multiple magnetic blocks 2, the overall magnetic field strength can be increased or decreased, ultimately allowing the user to adjust the force of the magnetic field on the molten solder. This allows for controllable changes in the magnetic field, which can more efficiently induce current. The magnetic field generated by the current can then act more precisely on the molten solder, forming excellent electromagnetic interaction. This effectively ensures the stability and controllability of solder droplet ejection, significantly reducing energy loss and ejection instability caused by low electromagnetic conversion efficiency.

[0027] Furthermore, two guide rails 13 are arranged in parallel, and guide grooves 13 are formed on the side walls of the two guide rails 3 that are close to each other. The moving block 10 is placed between the two guide rails, and two symmetrically arranged connecting blocks 12 are installed on both sides of the outer wall of the moving block 10. The connecting blocks 12 are adapted to the guide grooves 13, and the moving block 10 can be slidably connected to the inside of the guide grooves 13 through the connecting blocks 12. By setting two parallel guide rails 3, the movement of the magnetic block 2 is made more stable. Baffles 4 are provided at both ends of the guide rails 3, and the guide rails 3 are connected to the guide rods 6 and threaded rods 7 through the baffles 4. The baffles 4 are used to prevent the magnetic block 2 from detaching from the guide rails, and are also used for fixed connection with external equipment.

[0028] Furthermore, limit blocks 9 are fixedly installed at the bottom of both the guide rod 6 and the threaded rod 7 to limit the movement of the drive control plate 5 and prevent the drive control plate 5 from falling off.

[0029] When it is necessary to adjust the force of the magnetic field on the molten tin, the user needs to adjust the position of the magnetic blocks 2 on both sides of the electromagnetic micro-spray valve 1 to control the magnitude of the force. During the adjustment process, the user can rotate the steering wheel 14 to drive the threaded rod 7 to rotate. The threaded rod 7 drives the drive control plate 5 to rise and fall through the thread action, and the drive control plate 5 will also rise and fall synchronously. During the rise and fall of the drive control plate 5, the position of the drive groove 501 changes, and the circular rod 11 inside the drive groove 501 will be driven to move, thereby driving the magnetic block 2 to move. It is understood that in other embodiments, the steering wheel 14 can also be driven by an external belt, chain, or gear transmission device.

[0030] This device provides a step-by-step gradient magnetic field construction, employing an asynchronous drive groove guiding mechanism (increased upper hysteresis groove 5012 / decreased lower hysteresis groove 5013) to achieve a magnetic field intensity gradient change rate ≤0.15T / mm, ensuring dynamic balance during droplet formation. The differentiated design of the upper hysteresis groove 5012 and the lower hysteresis groove 5013 (increased upper groove, decreased lower groove) achieves magnetic field gradient change through step-by-step drive of the magnetic block 2, increasing the effective current density ratio to 99.6% and ensuring that the Lorentz force field is concentrated on the injection area.

[0031] The locking function of the upper and lower stagnation grooves, combined with the optimized nozzle structure, prevents jet disturbance caused by magnetic block vibration or displacement, ensuring droplet morphology stability even under 200Hz high-frequency jetting. Adjusting magnetic block 2 increases the magnetic field strength within the liquid tank to 2T. Combined with an electrode spacing of 36mm, according to the formula fL=σE×B, the Lorentz force density is increased to 1.05×10⁻⁶. 6 N / m³, which is 40% higher than that of the traditional structure.

[0032] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A tin droplet electromagnetic micro-spraying magnetic force control device, comprising an electromagnetic micro-spraying valve and a plurality of magnetic blocks, wherein the plurality of magnetic blocks are symmetrically arranged on both sides of the electromagnetic micro-spraying valve, characterized in that, It also includes a guide rail and a drive mechanism. The guide rail is located at the bottom of the electromagnetic micro-spray valve and has a guide groove. Each magnetic block has a moving block at its bottom, and the magnetic blocks are slidably connected to the guide groove through the moving blocks. The drive mechanism can drive the magnetic blocks on both sides of the electromagnetic micro-spray valve to move in the opposite direction along the guide groove, so that the magnetic blocks on both sides of the electromagnetic micro-spray valve move closer to or further away from each other.

2. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 1, characterized in that... The driving mechanism includes a drive control plate, with guide rods and threaded rods on both sides of the drive control plate. The guide rail is connected at both ends to the upper ends of the guide rods and the threaded rods, respectively. A steering wheel is provided at the top of the threaded rod for rotating the threaded rod to drive the drive control plate to move up and down along the guide rods. The drive control plate has several drive slots arranged symmetrically. The moving block has a circular rod that passes through the drive slot. The drive slot is constructed such that when the drive control plate moves up and down, the drive slot can drive the magnetic blocks on both sides of the electromagnetic micro-spray valve to move in the opposite direction along the guide slots via the circular rod, so that the magnetic blocks on both sides of the electromagnetic micro-spray valve move closer or further apart.

3. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 2, characterized in that... The drive groove is provided with an upper stagnation groove, a push groove and a lower stagnation groove from top to bottom. The upper stagnation groove and the lower stagnation groove extend vertically, and the height of the upper stagnation groove increases from the middle to both sides, while the height of the lower stagnation groove decreases from the middle to both sides. The push groove slopes downward from both sides towards the middle.

4. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 2, characterized in that... The magnetic blocks and the drive slots are each provided in groups of eight, and are arranged symmetrically on both sides of the electromagnetic micro-spray valve in pairs.

5. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 2, characterized in that... Two guide rails are arranged in parallel. The guide grooves are located on two adjacent sides of the two guide rails. Baffles are connected to both ends of the guide rails. The guide rails are connected to the upper ends of the guide rod and the threaded rod through the baffles.

6. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 5, characterized in that... The movable block has connecting blocks on both sides that are adapted to the guide groove, and the movable block is slidably connected to the guide groove through the connecting blocks.

7. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 2, characterized in that... The drive control board is provided with connecting rods on both sides. One of the connecting rods is provided with a through hole that matches the guide rod, and the other connecting rod is provided with a threaded hole that matches the threaded rod. The drive control board is connected to the guide rod and the threaded rod through the connecting rods.

8. The tin droplet electromagnetic micro-spraying magnetic control device according to claim 2, characterized in that... Both the guide rod and the threaded rod are provided with limit blocks at their bottoms.

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