Cleaning anti-blocking system and boron diffusion high-temperature furnace equipment

Abstract

The utility model provides a cleaning anti-blocking system and boron diffusion high-temperature furnace equipment, the cleaning anti-blocking system comprises a cleaning pipeline, the cleaning pipeline is connected into a rear tail pipe and a main tail discharge pipe, and cleaning liquid enters and cleans the rear tail pipe and the main tail discharge pipe through the cleaning pipeline. Through the arrangement of the cleaning pipeline, cleaning liquid can be conveyed to the rear tail pipe and the main tail exhaust pipe regularly or irregularly, accumulated powder is effectively removed, and the tail pipe is prevented from being blocked, so that the tail pipe can be effectively prevented from being blocked, the equipment operation efficiency is improved, and the maintenance cost and the safety risk are reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to mechanical manufacturing technical field, in particular to a kind of clean anti-blocking system, boron diffusion high temperature furnace equipment. BACKGROUND

[0002] Boron diffusion high temperature furnace equipment is an important process equipment.However, the tail exhaust system of current boron diffusion high temperature furnace equipment often faces powder blocking problem, which seriously affects the normal operation of equipment and production efficiency.

[0003] The existing boron diffusion high temperature furnace equipment usually uses conventional cooling liquid-accumulating bottle and fiber filter to filter B2O3 powder generated by boron diffusion tail gas.This method can play a certain filtering effect in the short term, but with long-time operation of equipment, tail pipe after pump and main tail exhaust of machine table will inevitably accumulate a large amount of powder.This powder accumulation will cause several serious problems:

[0004] Firstly, the accumulated powder will gradually block the tail pipe after pump and main tail exhaust pipe, causing pump suction pressure difficulty.This not only makes the running speed of pump abnormally high, but also may cause silicon wafer square resistance unqualified, directly affecting product quality.

[0005] Secondly, when the powder accumulates to a certain extent and completely blocks the tail exhaust pipe, it will cause suction pressure alarm, resulting in equipment downtime.This sudden equipment shutdown seriously affects the normal running time (uptime) of equipment and reduces production efficiency.

[0006] In addition, the cleaning work of accumulated powder has great difficulty and risk.Because the powder in tail exhaust system has certain toxicity, the cleaning process not only consumes a lot of manpower, but also has potential safety hazards.

[0007] In the prior art, although cooling liquid-accumulating bottle and fiber filter are installed to filter powder, the filtering effect of this method is limited, and the powder accumulation problem cannot be fundamentally solved.With the passage of time, tail pipe will still accumulate a large amount of powder, eventually leading to a series of problems mentioned above.

[0008] In view of the above problems, the prior art needs to be improved. UTILITY MODEL CONTENT

[0009] The utility model aims to provide a kind of clean anti-blocking system, boron diffusion high temperature furnace equipment, to solve the problem of powder accumulation in rear tail pipe and main tail exhaust pipe causing equipment failure in prior art.

[0010] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0011] The cleaning anti-blocking system according to the embodiment of the utility model, including: The cleaning pipeline is connected to the rear tail pipe and the main tail exhaust pipe, the cleaning liquid enters through the cleaning pipeline, and the rear tail pipe and the main tail exhaust pipe are cleaned.

[0012] In addition, the cleaning anti-blocking system according to the above embodiment of the application can also have the following additional technical features:

[0013] In some embodiments of the utility model, a first switch piece is further included, the cleaning pipeline is connected to a plurality of rear tail pipes in parallel, and is arranged close to the first power piece of the boron diffusion high-temperature furnace equipment, and the first switch piece is installed on the cleaning pipeline close to the rear tail pipe.

[0014] In some embodiments of the utility model, the cleaning pipeline includes a first section from the first switch piece to the rear tail pipe, the rear tail pipe includes a second section from the first power piece to the cleaning pipeline, and the pipe diameter d1 of the first section is equal to the pipe diameter d2 of the second section.

[0015] In some embodiments of the utility model, one end of the cleaning pipeline away from the first switch piece is connected to an external cleaning water source, and the water source pressure P satisfies: P >= 0.2 * d2.

[0016] In some embodiments of the utility model, the pipe length L of the second section satisfies: L <=

[0017] 100 * d2.

[0018] In some embodiments of the utility model, a second switch piece is included, the main tail exhaust pipe is arranged vertically to the horizontal plane on the boron diffusion high-temperature furnace equipment, one end of the main tail exhaust pipe away from the ground is provided with an exhaust port, one end of the main tail exhaust pipe close to the ground is provided with a drainage port, the cleaning pipeline is communicated with the main tail exhaust pipe and is arranged close to the exhaust port, and the first switch piece is arranged on the cleaning pipeline and close to the main tail exhaust pipe.

[0019] In some embodiments of the utility model, a spraying piece is further included, and the spraying piece is installed in the main tail exhaust pipe and communicated with the cleaning pipeline.

[0020] In some embodiments of the utility model, a waste liquid pipeline is further included, and the waste liquid pipeline is communicated with the drainage port.

[0021] In some embodiments of the utility model, a second power piece is included, and the second power piece is communicated with the waste liquid pipeline.

[0022] The utility model further provides a boron diffusion high-temperature furnace equipment, and the boron diffusion high-temperature furnace equipment includes a rear tail pipe, a main tail exhaust pipe, a first power piece and the above-mentioned cleaning anti-blocking system.

[0023] Compared with the prior art, the utility model has at least the following beneficial effects:

[0024] Through connecting the cleaning pipeline with the rear tail pipe and the main tail exhaust pipe, the cleaning liquid enters through the cleaning pipeline to clean the rear tail pipe and the main tail exhaust pipe. The cleaning pipeline can transport the cleaning liquid to the rear tail pipe and the main tail exhaust pipe regularly or irregularly, effectively removes the accumulated powder, prevents the tail pipe from being blocked, thereby effectively prevents the tail pipe from being blocked, improves the equipment operation efficiency, reduces the maintenance cost and the safety risk.

[0025] Additional aspects and advantages of the application will be described in the following description, will become apparent from the following description, or will be learned by practice of the application. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 The cleaning anti-blocking system structure schematic of the utility model embodiment Figure 1 ;

[0027] Figure 2 The cleaning anti-blocking system structure schematic of the utility model embodiment Figure 2 .

[0028] REFERENCE NUMERALS

[0029] 100, boron diffusion high-temperature furnace equipment

[0030] 1, cleaning anti-blocking system

[0031] 11, cleaning pipeline; 111, first section

[0032] 12, first switch part; 13, second switch part; 14, waste liquid pipeline; 15, second power part

[0033] 2, rear tail pipe; 21, second section

[0034] 3, main tail exhaust pipe; 31, exhaust port; 32, water outlet

[0035] 4, first power part DETAILED DESCRIPTION

[0036] The utility model of a kind of cleaning anti-blocking system, boron diffusion high-temperature furnace equipment will be described in more detail below, wherein the preferred embodiment of the utility model is shown, it should be understood that the utility model described herein can be modified by the person skilled in the art, and still achieve the advantageous effects of the utility model. Therefore, the following description should be understood as extensive knowledge for the person skilled in the art, and not as a limitation on the utility model.

[0037] In the description of the specification, "one embodiment" or "some embodiments" and the like mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the specification. Thus, the appearances of the phrase "in one embodiment", "in some embodiments", "in other embodiments", "in additional embodiments" and so on, throughout the specification, are not necessarily all referring to the same embodiment, unless otherwise specifically stated.

[0038] Embodiments of the present application are described in detail below with reference to examples of embodiments illustrated in the accompanying drawings, in which the same or similar elements or elements having the same or similar functions are denoted by the same or similar reference numerals throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are for the purpose of explanation of the present application only, and cannot be understood as limiting the present application.

[0039] A cleaning anti-blocking system 1 according to embodiments of the present application is described below with reference to the accompanying drawings.

[0040] The cleaning anti-blocking system 1 according to embodiments of the present application, as shown in Figure 1 the cleaning pipeline 11 is connected to the rear tail pipe 2 and the main tail exhaust pipe 3, and the cleaning liquid enters through the cleaning pipeline 11 to clean the rear tail pipe 2 and the main tail exhaust pipe 3.

[0041] Among them, the design of the cleaning pipeline 11 is the core part of the cleaning anti-blocking system 1, which connects the rear tail pipe 2 and the main tail exhaust pipe 3, allowing the cleaning liquid to flow. The cleaning pipeline 11 can be made of a variety of materials, such as stainless steel or high polymer materials, to ensure its corrosion resistance and high temperature resistance. The cleaning liquid can be injected through the cleaning pipeline 11 regularly, specifically, the injection time of the cleaning liquid can be controlled by a timer or a sensor to ensure regular cleaning during equipment operation. The selection of cleaning liquid should consider its ability to dissolve powder, for example, an aqueous solution containing specific chemical components can be selected to enhance its cleaning effect.

[0042] Further, the connection position of the cleaning pipeline 11 and the pressure of the cleaning liquid are also key factors. The cleaning pipeline 11 should be connected to the appropriate position of the rear tail pipe 2 and the main tail exhaust pipe 3 to ensure that the cleaning liquid can cover the entire inner wall of the pipeline. The pressure of the cleaning liquid should be high enough to ensure that it can effectively flush the inner wall of the pipeline to prevent powder accumulation. As a preferred embodiment, the pressure of the cleaning liquid can be controlled by adjusting the power of the pump to ensure that it meets the cleaning requirements.

[0043] Therefore, by the design of the cleaning pipeline 11 and the periodic injection of the cleaning liquid, the cleaning anti-blocking system 1 can effectively clean the rear tail pipe 2 and the main tail exhaust pipe 3, prevent powder accumulation and blocking, and keep the pipeline unblocked. This design directly aims at the problem of tail exhaust powder blocking, maintains the normal operation of the equipment through regular cleaning, and avoids equipment failure and downtime caused by blocking. Compared with the prior art, the system of the application not only improves the cleaning efficiency, but also reduces the need for manual cleaning, reduces the operation risk and maintenance cost.

[0044] In some embodiments of the present application, as shown in Figure 1 、 Figure 2 The cleaning pipeline 11 is connected in parallel to the rear tail pipe 2 and is arranged close to the first power component 4 of the boron diffusion high-temperature furnace equipment 100. The first switch component 12 is installed on the cleaning pipeline 11 close to the rear tail pipe 2.

[0045] The first switch component 12 is arranged to enable the cleaning pipeline 11 to be connected in parallel to the rear tail pipe 2. This design can effectively prevent the blocking problem that may occur when the cleaning liquid enters the rear tail pipe 2 through the cleaning pipeline 11. By arranging the first switch component 12 on the cleaning pipeline 11 close to the rear tail pipe 2, the flow of the cleaning liquid can be more accurately controlled to ensure that the cleaning liquid can smoothly enter the rear tail pipe 2, thereby achieving the effect of cleaning and anti-blocking.

[0046] Specifically, the first switch component 12 can be an electromagnetic valve or a manual valve, etc. By controlling the opening and closing of the switch component, the flow of the cleaning liquid can be accurately controlled. As a preferred embodiment, the first switch component 12 can be arranged close to the connection between the cleaning pipeline 11 and the rear tail pipe 2 to facilitate real-time monitoring and adjustment of the flow of the cleaning liquid.

[0047] Therefore, by arranging the first switch component 12 on the cleaning pipeline 11 and arranging it close to the rear tail pipe 2, the application achieves accurate control of the flow of the cleaning liquid, effectively solving the blocking problem that may occur when the cleaning pipeline 11 is connected to the rear tail pipe 2. Compared with the prior art, the technical solution of the application has higher cleaning efficiency and anti-blocking effect, can significantly reduce the risk of equipment failure and downtime, and improve the stability and operation efficiency of the equipment.

[0048] In some embodiments of the present application, as shown in Figure 2As shown, the cleaning pipeline 11 includes a first section 111 of the first switch 12 to the tail pipe 2, and the tail pipe 2 includes a second section 21 of the first power 4 to the cleaning pipeline 11, and the pipe diameter d1 of the first section 111 is equal to the pipe diameter d2 of the second section 21.

[0049] Specifically, the pipe diameters of the first section 111 and the second section 21 are equal, which ensures smooth flow of the cleaning liquid between the cleaning pipeline 11 and the tail pipe 2, and avoids the problem of increased flow resistance or liquid stagnation caused by mismatched pipe diameters. This design optimizes the flow path of the cleaning liquid by ensuring consistency in pipe diameters, improves cleaning efficiency, and reduces the problem of incomplete cleaning or blockage caused by mismatched pipe diameters.

[0050] As a preferred embodiment, the pipe diameter d1 of the first section 111 and the pipe diameter d2 of the second section 21 can adopt the same standard pipe diameter, such as a pipe diameter of 10 mm in diameter, to ensure the flow efficiency of the cleaning liquid. Further, the first switch 12 can adopt a solenoid valve to adjust the flow path of the cleaning liquid by controlling the on-off state of the solenoid valve. The first power 4 can adopt a pump to push the cleaning liquid to flow in the pipeline by the pressure of the pump.

[0051] Thus, the present application solves the problem of matching the pipe diameters of the cleaning pipeline 11 and the tail pipe 2 by ensuring consistency in the pipe diameters of the cleaning pipeline 11 and the tail pipe 2, optimizes the flow path of the cleaning liquid, improves the cleaning efficiency, and reduces the problem of incomplete cleaning or blockage caused by mismatched pipe diameters. Compared with the prior art, the technical scheme of the present application can more effectively solve the problem of tailing blockage, and improve the operation efficiency and stability of the equipment.

[0052] In some embodiments of the present application, the cleaning pipeline 11 is connected to an external cleaning water source at one end away from the first switch 12, and the water source pressure P satisfies: P≥0.2*d2.

[0053] Specifically, the cleaning pipeline 11 is connected to an external cleaning water source, and the water source pressure P satisfies P≥0.2*d2, which ensures that the pressure of the cleaning liquid is sufficient to effectively clean the tailing pipe and prevent blockage caused by powder accumulation. By setting the lower limit of the water source pressure, the cleaning effect is guaranteed, thereby solving the technical problem of tailing pipe blockage.

[0054] wherein the calculation formula of the water source pressure P is P≥0.2*d2, and d2 represents the pipe diameter of the tail pipe 2. As a preferred embodiment, the water source pressure P can be achieved by adjusting the flow and pressure of the external cleaning water source, ensuring that it meets the requirement of P≥0.2*d2. Further, the design of the cleaning pipeline 11 can include multiple pressure sensors and regulating valves for real-time monitoring and adjustment of the water source pressure, ensuring that it meets the cleaning requirements under any working condition.

[0055] Therefore, by setting the lower limit of the water source pressure, the application ensures that the pressure of the cleaning liquid is sufficient to effectively clean the tail pipe and prevent blockage caused by powder accumulation. Compared with the prior art, the technical solution of the application not only improves the cleaning effect, but also reduces the equipment failure downtime caused by tail pipe blockage, improves the stability and operating efficiency of the equipment.

[0056] In some embodiments of the present application, as shown in Figure 2 The pipeline length L of the second section 21 satisfies: L≤100*d2.

[0057] Specifically, the pipeline length L of the second section 21 is a part of the cleaning pipeline 11, and its length is related to the pipe diameter d2. By setting L≤100*d2, it is ensured that the pipeline length will not be too long, thereby avoiding the problem that the cleaning liquid flows poorly due to the excessively long pipeline, which in turn affects the cleaning effect. This design limits the pipeline length to ensure the effective flow of cleaning liquid in the pipeline, improves the cleaning efficiency, and solves the influence of the tail pipe length on the cleaning effect.

[0058] As a preferred embodiment, the pipeline length L of the second section 21 can be determined by accurate measurement and calculation to ensure that it meets the condition of L≤100*d2. In addition, the pipeline length L can be further optimized by adjusting the size of the pipe diameter d2 to achieve the best cleaning effect.

[0059] Therefore, by setting the pipeline length L of the second section 21 to satisfy L≤100*d2, the application effectively solves the influence of the tail pipe length on the cleaning effect. Compared with the prior art, the technical solution of the application can ensure the effective flow of cleaning liquid in the pipeline, improve the cleaning efficiency, and avoid the problem of poor flow of cleaning liquid due to excessively long pipeline.

[0060] In some embodiments of the present application, as shown in Figure 1As shown, the main tail exhaust pipe 3 is vertically arranged on the boron diffusion high-temperature furnace device 100, one end of the main tail exhaust pipe 3 away from the ground is provided with the exhaust port 31, one end of the main tail exhaust pipe 3 close to the ground is provided with the water outlet 32, the cleaning pipeline 11 is in communication with the main tail exhaust pipe 3 and is arranged close to the exhaust port 31, and the second switch element 13 is arranged on the cleaning pipeline 11 and close to the main tail exhaust pipe 3.

[0061] Specifically, the second switch element 13 ensures effective communication between the cleaning pipeline 11 and the main tail exhaust pipe 3. This design helps the cleaning liquid to enter the main tail exhaust pipe 3 more effectively, thereby cleaning and preventing powder accumulation. The vertical arrangement of the main tail exhaust pipe 3 and the configuration of the exhaust port 31 and the water outlet 32 further optimize the flow path of the waste liquid after cleaning, ensuring the cleaning effect. As a preferred embodiment, the second switch element 13 can adopt a solenoid valve or a manual valve, and the flow of the cleaning liquid is adjusted by controlling the switch state. In addition, the cleaning pipeline 11 can be made of stainless steel or high-temperature resistant plastic material to adapt to the high-temperature environment.

[0062] Therefore, by arranging the second switch element 13, the cleaning pipeline 11 and the main tail exhaust pipe 3 are effectively communicated. This design helps the cleaning liquid to enter the main tail exhaust pipe 3 more effectively, thereby cleaning and preventing powder accumulation. The vertical arrangement of the main tail exhaust pipe 3 and the configuration of the exhaust port 31 and the water outlet 32 further optimize the flow path of the waste liquid after cleaning, ensuring the cleaning effect. Through the mutual cooperation of these technical features, the cleaning and anti-blocking problems of the main tail exhaust pipe 3 are effectively solved. Compared with the prior art, the application has the advantages that by optimizing the flow path and control mode of the cleaning liquid, the cleaning effect is significantly improved, the powder accumulation is reduced, and the equipment failure rate and maintenance cost are reduced.

[0063] In some embodiments of the present application, a spraying element (not shown in the figure) is further included, which is installed in the main tail exhaust pipe 3 and in communication with the cleaning pipeline 11.

[0064] Specifically, the spray member can be a device with multiple nozzles uniformly distributed on the inner wall of the main tail pipe 3. The spray member is connected to an external cleaning water source through the cleaning pipeline 11, and the cleaning liquid is transported from the water source to the spray member through the cleaning pipeline 11. The nozzle design of the spray member can ensure that the cleaning liquid is uniformly distributed in the main tail pipe 3, thereby effectively dissolving and removing the powder in the pipe. As a preferred embodiment, the nozzles of the spray member can be designed to rotate or vibrate to increase the contact area of the cleaning liquid and the powder, thereby improving the cleaning effect. In addition, the spray member can also be equipped with a pressure regulating device to ensure that the pressure of the cleaning liquid is moderate, which can effectively clean the pipe wall without damaging it.

[0065] Therefore, the cleaning liquid is uniformly distributed in the main tail pipe 3 by the spray member. This technical feature can increase the contact area and uniformity of the cleaning liquid, thereby improving the cleaning effect and reducing the accumulation of powder in the tail pipe, thereby solving the problem of equipment failure caused by powder accumulation in the tail pipe. Compared with the prior art, the technical solution of the present application significantly improves the cleaning effect by increasing the contact area and uniformity of the cleaning liquid, thereby effectively avoiding the problem of equipment failure caused by tail pipe blockage.

[0066] In some embodiments of the present application, as shown in Figure 1 , Figure 2 As shown, it further comprises a waste liquid pipeline 14, which is in communication with the drain port 32.

[0067] The waste liquid pipeline 14 is provided to effectively discharge the waste liquid generated during the cleaning process, thereby avoiding the problem of blockage caused by the accumulation of waste liquid in the tail pipe. The communication between the waste liquid pipeline 14 and the drain port 32 ensures that the waste liquid can be smoothly discharged, thereby further improving the efficiency and reliability of the cleaning and anti-blocking system 1. Specifically, the waste liquid pipeline 14 can be designed with various materials and structures, for example, the waste liquid pipeline 14 can be made of corrosion-resistant materials to prevent damage to the pipeline caused by waste liquid. In addition, the design of the waste liquid pipeline 14 can also consider adding a filtering device to further reduce the solid particles in the waste liquid, thereby prolonging the service life of the pipeline. As a preferred embodiment, the waste liquid pipeline 14 can be designed as a straight-through pipeline directly connected to the drain port 32 to ensure the rapid discharge of waste liquid.

[0068] Therefore, the application solves the technical problem of equipment failure shutdown caused by tail pipe blockage by setting the waste liquid pipeline 14 and communicating with the drain port 32. The setting of the waste liquid pipeline 14 not only can effectively discharge the waste liquid generated in the cleaning process, avoid the blockage problem caused by the accumulation of waste liquid, but also through the communication with the drain port 32, ensures the smooth discharge of the waste liquid, improves the efficiency and reliability of the cleaning anti-blocking system 1. Compared with the prior art, the technical scheme of the application has higher cleaning effect and system reliability, can effectively reduce the risk of equipment failure shutdown, and improves the operation efficiency and stability of the equipment.

[0069] In some embodiments of the present application, as shown in Figure 1 、 Figure 2 The second power member 15 is communicated with the waste liquid pipeline 14.

[0070] Specifically, the second power member 15 can be a pump or a compressor, which provides the necessary power for the waste liquid pipeline 14 to ensure that the waste liquid can be smoothly discharged through the waste liquid pipeline 14. As a preferred embodiment, the second power member 15 can be arranged at the inlet of the waste liquid pipeline 14 to push the waste liquid to flow by the pressure generated thereby; the second power member 15 can also be arranged at the outlet of the waste liquid pipeline 14 to extract the waste liquid in the waste liquid pipeline 14. Further, the second power member 15 can also be equipped with a sensor and a control system to monitor the flow state of the waste liquid in real time and adjust the power output as needed to ensure the smoothness of the waste liquid pipeline 14.

[0071] Therefore, the second power member 15 is provided to provide power to ensure that the waste liquid can be smoothly discharged through the waste liquid pipeline 14. This technical feature plays a key role in solving the power problem in waste liquid discharge. By providing the necessary power, the smoothness of the waste liquid pipeline 14 is ensured, thereby avoiding the problem of poor waste liquid discharge or blockage caused by insufficient power. Compared with the prior art, the technical scheme of the application can more effectively solve the power problem in waste liquid discharge, ensure the stable operation of the equipment, and reduce the equipment failure and downtime caused by poor waste liquid discharge.

[0072] According to the boron diffusion high-temperature furnace equipment 100, the cleaning anti-blocking system 1 is connected to the rear tail pipe 2 and the main tail pipe 3 through the cleaning pipeline 11, and the cleaning liquid enters through the cleaning pipeline 11 to clean the rear tail pipe 2 and the main tail pipe 3. The cleaning anti-blocking system 1 further comprises the first switch 12, the spraying part, the waste liquid pipeline 14 and the second power part 15, and these components cooperate with each other to ensure the effective flow of the cleaning liquid and the timely discharge of the waste liquid, thereby preventing the tail pipe from being blocked and maintaining the normal operation of the equipment.

[0073] The cleaning pipeline 11 can be made of various materials, such as stainless steel or high-temperature resistant plastic, to ensure stability and durability in high-temperature environments. The first switch 12 can be an electromagnetic valve for controlling the flow of cleaning liquid, and is located near the rear tail pipe 2 to quickly cut off or open the supply of cleaning liquid when needed. The spraying part can be designed as a porous structure to ensure uniform distribution of cleaning liquid in the tail pipe and improve cleaning effect. The waste liquid pipeline 14 can be connected to the drain 32, and the waste liquid is pumped out by the second power part 15 (such as a pump) to ensure timely discharge of waste liquid and prevent secondary blockage.

[0074] Specifically, the flow path of the cleaning liquid can be designed to enter the cleaning pipeline 11 from an external cleaning water source, pass through the first switch 12, enter the rear tail pipe 2 and the main tail pipe 3, be uniformly distributed by the spraying part, and finally be discharged through the waste liquid pipeline 14. The water source pressure P should satisfy P >= 0.2*d2 to ensure that the cleaning liquid can effectively enter and clean the tail pipe. The pipeline length L should satisfy L <= 100*d2 to reduce the resistance of the cleaning liquid flow and improve the cleaning efficiency.

[0075] Therefore, the cleaning anti-blocking system 1 of the present application can effectively prevent the tail pipe of the boron diffusion high-temperature furnace equipment 100 from being blocked by reasonably designing the flow path of the cleaning liquid and the cooperation of the components, and maintaining the normal operation of the equipment. Compared with the prior art, the system of the present application not only improves the cleaning effect, but also reduces the risk of equipment failure downtime, reduces maintenance cost and difficulty. As a preferred embodiment, the system of the present application is particularly suitable for the boron diffusion high-temperature furnace equipment 100 which runs for a long time, and can significantly improve the stability and production efficiency of the equipment.

[0076] It should be understood that the above specific embodiments of the present application are only used for illustrative or explanatory purposes of the principles of the present application, and do not constitute a limitation on the present application. Therefore, any modification, equivalent replacement, improvement, etc. made without departing from the spirit and scope of the present application shall be included in the protection scope of the present application. In addition, the appended claims of the present application are intended to cover all changes and modifications falling within the scope and boundaries of the appended claims, or the equivalent forms of such scope and boundaries.

Claims

1. A cleaning and anti-clogging system, characterized in that, include: A cleaning pipeline is connected to the rear tailpipe and the main tailpipe. Cleaning fluid enters through the cleaning pipeline to clean the rear tailpipe and the main tailpipe.

2. The cleaning and anti-clogging system according to claim 1, characterized in that, It also includes a first switching element, wherein the cleaning pipeline is connected in parallel to multiple of the rear tail pipes and is located near the first power component of the boron diffusion high-temperature furnace equipment, and the first switching element is installed on the cleaning pipeline near the rear tail pipes.

3. The cleaning and anti-clogging system according to claim 2, characterized in that, The cleaning pipeline includes a first section from the first switching element to the rear tailpipe, and the rear tailpipe includes a second section from the first power element to the cleaning pipeline, wherein the diameter d1 of the first section is equal to the diameter d2 of the second section.

4. The cleaning and anti-clogging system according to claim 3, characterized in that, The end of the cleaning pipeline away from the first switch is connected to an external cleaning water source, and the pressure P of the water source satisfies: P≥0.2*d2.

5. The cleaning and anti-clogging system according to claim 3, characterized in that, The length L of the second section of the pipeline satisfies: L≤100*d2.

6. The cleaning and anti-clogging system according to claim 2, characterized in that, The device includes a second switch. The main tailpipe is installed vertically and horizontally on the boron diffusion high-temperature furnace equipment. An exhaust port is provided at the end of the main tailpipe away from the ground, and a drain port is provided at the end of the main tailpipe close to the ground. The cleaning pipeline is connected to the main tailpipe and is located close to the exhaust port. The first switch is located on the cleaning pipeline and close to the main tailpipe.

7. The cleaning and anti-clogging system according to claim 6, characterized in that, It includes a spraying component, which is installed inside the main tailpipe and connected to the cleaning pipeline.

8. The cleaning and anti-clogging system according to claim 6, characterized in that, It includes a waste liquid pipeline, which is connected to the drain outlet.

9. The cleaning and anti-clogging system according to claim 8, characterized in that, It includes a second power component, which is connected to the waste liquid pipeline.

10. A boron diffusion high-temperature furnace device, characterized in that, The boron diffusion high-temperature furnace equipment includes a rear tailpipe, a main tailpipe, a first power component, and a cleaning and anti-clogging system as described in any one of claims 1 to 9.

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