Ceramic capacitive pressure sensor capable of instantly sensing temperature and pressure

Abstract

The utility model discloses a temperature and pressure instant induction ceramic capacitive pressure sensor, which comprises a ceramic base, a glass sealing layer, a ceramic induction diaphragm, an upper electrode, a lower electrode, at least two pressure pins, at least two pressure interfaces, a plurality of groups of temperature pins and a plurality of temperature interfaces which are sequentially arranged from bottom to top, the upper electrode is arranged on the surface of the bottom of the ceramic sensing diaphragm, and the lower electrode is arranged on the surface of the top of the ceramic base; the two pressure guide needles penetrate through the ceramic base and are downwards led out to form a pressure interface; the upper parts and the lower parts of the group of temperature guide pins are connected through wires. The pressure sensor and the temperature sensor are integrated, so that the pressure sensor can be used for pressure detection and temperature detection, and is convenient to use and wide in application range.

Description

TECHNICAL FIELD

[0001] The utility model relates to pressure sensor technical field mainly relates to a temperature pressure instantaneous response's ceramic electric capacity pressure sensor. BACKGROUND

[0002] In recent years, the pressure sensing technology is developing vigorously in China, and the application field is also expanding rapidly. Because the pressure sensor technology involves a wide range of technologies, with the development trend of intelligentization in the fields of automobiles, industries and Internet of Things, the pressure sensor is growing rapidly. The ceramic capacitive pressure sensor has many advantages such as corrosion resistance, wear resistance, impact resistance, good thermal stability, high measurement accuracy, large range, no pollution, etc. It is widely used in key systems such as pneumatic monitoring, light hydraulic pressure, brake pressure, oil pressure, transmission device, air brake of truck / trailer, high-performance industrial control pressure transmitter, etc. to maintain the performance of the equipment.

[0003] However, the existing ceramic capacitive pressure sensor is composed of multiple components, has low integration, involves too many materials and processing fields, has high cost, complex assembly, long production cycle, and cannot meet the needs of rapid development and low cost. The upper metal circuit of the ceramic base and the lower metal electrode are connected through the through-hole space. After long use, leakage may occur, affecting the detection accuracy of the pressure sensor. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of the prior art, the utility model provides a temperature pressure instantaneous response's ceramic electric capacity pressure sensor, which integrates the pressure sensor and the temperature sensor, can be used for pressure detection and temperature detection, is convenient to use and has wide application range.

[0005] The technical problem solved by the utility model can be solved by the following technical scheme:

[0006] A temperature pressure instantaneous response's ceramic electric capacity pressure sensor comprises a ceramic base, a glass sealing layer and a ceramic sensing diaphragm arranged in sequence from bottom to top, and the ceramic base and the ceramic sensing diaphragm are sealingly connected through the glass sealing layer. The utility model is characterized by further comprising an upper electrode, a lower electrode, at least two pressure pins, at least two pressure interfaces, a plurality of groups of temperature pins and a plurality of temperature interfaces.

[0007] At least two pressure needles pass through the ceramic base and lead out downward to form pressure interfaces, and the upper electrode and the lower electrode are respectively connected to the at least two pressure needles.

[0008] In a preferred embodiment of the present application, the ceramic base is provided with three pressure pads on one side of the bottom, and one pressure needle is arranged in each pressure pad; the upper electrode is connected to the first pressure needle.

[0009] In a preferred embodiment of the present application, the lower electrode comprises a circular electrode and a ring electrode, the ring electrode is connected to the second pressure needle, and the circular electrode is connected to the third pressure needle.

[0010] In a preferred embodiment of the present application, two temperature pads are symmetrically arranged on both sides of the bottom of the ceramic base, and two temperature pads are symmetrically arranged on the other side of the top of the ceramic induction diaphragm, and one temperature needle is arranged in each temperature pad; the first temperature needle and the second temperature needle are respectively connected by wires, and the other end of the second temperature needle is connected to an NTC thermistor for temperature detection.

[0011] In a preferred embodiment of the present application, a metal circuit is arranged in the ceramic base, and the metal circuit is connected to the first pressure needle, the second pressure needle and the third pressure needle.

[0012] In a preferred embodiment of the present application, the ceramic base and the ceramic induction diaphragm are made of alumina ceramic material, the glass sealing layer is made of an elastic material, and the three pressure needles and the four temperature needles are made of copper-gold plating material.

[0013] In a preferred embodiment of the present application, the ceramic capacitor pressure sensor has a square or circular cross section.

[0014] In a preferred embodiment of the present application, the ceramic capacitor pressure sensor is provided with a limiting groove on one side, and the limiting groove has a semicircular shape.

[0015] The utility model discloses a temperature pressure instantaneous response's ceramic condenser pressure sensor, and the pressure sensor and temperature sensor are integrated, can be used for pressure detection, can be used for temperature detection, convenient to use and wide application range, utilize ceramic material and thick film printing technology, and the ceramic pressure pressure sensing element is fused together with signal conditioning chip, realizes single ceramic component and can convert pressure signal into voltage signal, and the structure is simplified, and the anti -interference ability is better. BRIEF DESCRIPTION OF DRAWINGS

[0016] Fig. 1 It is the structure schematic diagram of pressure lead and temperature lead of the utility model. Fig. 2 It is the connection structure schematic diagram of upper electrode, lower electrode and lead of the utility model.

[0017] Fig. 3 It is the structure schematic diagram of second temperature lead side of the utility model.

[0018] Reference signs:

[0019] 11 ceramic base, 12 lower electrode, 13 glass sealing layer, 14 upper electrode, 15 ceramic sensing diaphragm;121 circular electrode, 122 ring electrode;Metal circuit, 17 limit slot.

[0020] Pressure pad, 21 first pressure lead, 22 second pressure lead, 23 third pressure lead, pressure interface;Temperature pad, 31 first temperature lead, 32 second temperature lead, temperature interface.41 Conductive adhesive. DETAILED DESCRIPTION

[0021] In order to make the technical means, creation features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific drawings.

[0022] Referring to Figs. 1 to 3 , the utility model discloses a temperature pressure instantaneous response's ceramic condenser pressure sensor, including ceramic base 11, glass sealing layer 13, ceramic sensing diaphragm 15 arranged in sequence from bottom to top, and ceramic base 11 and ceramic sensing diaphragm 15 are sealedly connected through glass sealing layer 13;Still include upper electrode 14, lower electrode 12, at least 2 pressure leads, at least 2 pressure interfaces, several groups of temperature leads, several temperature interfaces, the bottom surface of ceramic sensing diaphragm 15 is provided with upper electrode 14, and the top surface of ceramic base 11 is provided with lower electrode 12;

[0023] At least two pressure needles pass through the ceramic base 11 and are led out downward to form pressure interfaces, and the upper electrode 14 and the lower electrode 12 are connected and conducted with the at least one pressure needle, respectively; the upper parts of a group of temperature needles pass through the ceramic sensing diaphragm 15, the lower parts pass through the ceramic base 11, and are respectively led out to form temperature interfaces, and the upper parts and the lower parts of the group of temperature needles are connected by wires.

[0024] The ceramic capacitor pressure sensor integrates the pressure sensor and the temperature sensor, can be used for pressure detection and temperature detection, is convenient to use, has wide application range, and realizes that a single ceramic component can convert a pressure signal into a voltage signal by fusing the ceramic pressure sensing element and the signal conditioning chip together, so that the structure is simplified and the anti-interference capability is better.

[0025] In the preferred embodiment, the bottom side of the ceramic base 11 is provided with three pressure pads, one pressure needle is arranged in each pressure pad, and the upper electrode 14 is connected and conducted with the first pressure needle 21. Specifically, the pressure pads and the outer walls of the pressure needles are filled with conductive adhesive 41.

[0026] Further, the lower electrode 12 includes a circular electrode 121 and an annular electrode 122, the annular electrode 122 is connected and conducted with the second pressure needle 22, and the circular electrode 121 is connected and conducted with the third pressure needle 23.

[0027] In the preferred embodiment, the bottom two sides of the ceramic base 11 are symmetrically provided with two temperature pads, the top other side of the ceramic sensing diaphragm 15 is symmetrically provided with two temperature pads, and one temperature needle is arranged in each temperature pad; the two first temperature needles 31 and the second temperature needle 32 are respectively connected and conducted by wires, and the other end of the second temperature needle 32 is connected with an NTC thermistor for temperature detection by a wire. Specifically, the temperature pads and the outer walls of the temperature needles are filled with conductive adhesive 41.

[0028] In the preferred embodiment, the inside of the ceramic base 11 is provided with a metal circuit, and the metal circuit is connected and conducted with the first pressure needle 21, the second pressure needle 22 and the third pressure needle 23, respectively.

[0029] Further, the ceramic base 11 and the ceramic sensing diaphragm 15 are made of alumina ceramic material, and the three pressure needles and the four temperature needles are made of copper-gold plating material. The glass sealing layer 13 is made of existing material capable of elastic deformation, and during work, according to the pressure change borne by the ceramic capacitor pressure sensor, when pressure is applied, the thickness change of the glass sealing layer 13 will cause the capacitance value to change, so as to detect the pressure.

[0030] Further, the ceramic capacitive pressure sensor has a square or circular cross section.

[0031] Further, the ceramic capacitive pressure sensor is provided with a limiting groove 17 on one side, and the limiting groove 17 has a semicircular shape.

[0032] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application. The scope of protection of the present application is defined by the appended claims and equivalents thereof.

Claims

1. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing, comprising a ceramic base, a glass sealing layer, and a ceramic sensing diaphragm arranged sequentially from bottom to top, wherein the ceramic base and the ceramic sensing diaphragm are sealed together by the glass sealing layer; characterized in that, It also includes an upper electrode, a lower electrode, at least two pressure pins, at least two pressure interfaces, several sets of temperature pins, and several temperature interfaces. The upper electrode is disposed on the bottom surface of the ceramic sensing diaphragm, and the lower electrode is disposed on the top surface of the ceramic base. At least two of the pressure pins pass through the ceramic base and extend downward to form a pressure interface. The upper electrode and the lower electrode are respectively connected to at least one of the pressure pins for conduction. The upper part of a set of temperature pins passes through the ceramic sensing diaphragm and the lower part passes through the ceramic base, and extends outward to form a temperature interface. The upper and lower parts of the set of temperature pins are connected by a wire.

2. The ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, Three pressure pads are provided on one side of the bottom of the ceramic base, and one pressure pin is provided in each pressure pad; the upper electrode is connected to the first pressure pin.

3. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, The lower electrode includes a circular electrode and an annular electrode. The annular electrode is connected to the second pressure pin, and the circular electrode is connected to the third pressure pin.

4. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, Two temperature pads are symmetrically arranged on both sides of the bottom of the ceramic base, and two temperature pads are symmetrically arranged on the other side of the top of the ceramic sensing diaphragm. Each temperature pad contains one temperature pin. The two first temperature pins and the second temperature pin are connected by wires. The other end of the second temperature pin is connected by a wire to an NTC thermistor for temperature detection.

5. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, The ceramic base has a metal circuit inside, which is connected to the first pressure pin, the second pressure pin, and the third pressure pin respectively.

6. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, The ceramic base and ceramic sensing diaphragm are made of alumina ceramic material, the glass sealing layer is made of elastically deformable material, and the three pressure pins and four temperature pins are made of copper-plated gold material.

7. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, The cross-section of the ceramic capacitive pressure sensor is square or circular.

8. A ceramic capacitive pressure sensor for instantaneous temperature and pressure sensing as described in claim 1, characterized in that, The ceramic capacitive pressure sensor has a limiting groove on one side, and the limiting groove is semi-circular in shape.

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