Mechanical arm and wet cleaning device

Abstract

The utility model relates to the technical field of semiconductor manufacturing equipment, and provides a mechanical arm and a wet cleaning device, which comprise an arm main body, a clamping jaw, a shading piece, an optical signal transmitting unit and an optical signal receiving unit, the optical signal transmitting unit and the optical signal receiving unit are oppositely arranged on the arm main body and are positioned on the same horizontal line; wherein the optical signal transmitting unit is used for transmitting an optical signal, and the optical signal receiving unit is used for receiving the optical signal; the shading part is rotationally connected with the arm main body, the lower end of the shading part extends to the position where the clamping jaw grabs the wafer boat, and when the clamping jaw clamps the wafer boat, the shading part rotates relative to the arm main body, and the upper end of the shading part moves to the position between the optical signal transmitting unit and the optical signal receiving unit, so that the propagation path of optical signals is blocked. The optical signal transmitted by the optical signal transmitting unit can be effectively blocked, and the detection precision and reliability of the sensor are improved, so that the risk of misjudgment of the clamping state of the wafer boat is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing equipment especially relates to a mechanical arm and wet cleaning equipment. BACKGROUND

[0002] In the process that the mechanical arm transmits the wafer boat to the cleaning tank, the mechanical arm needs to use the sensor to detect the state of the wafer boat clamped by the mechanical arm every time the wafer boat is clamped, to avoid loss or enlarged loss caused by unstable clamping of the wafer boat or failure of clamping the wafer boat.

[0003] In the related art, the detection of the wafer boat clamping state of the mechanical arm is usually completed by using a fiber-optic reflection sensor. A PFA (Perfluoroalkyl ethylene oxide copolymer, polytetrafluoroethylene) sleeve is installed on the mechanical arm of the wet cleaning machine, but since the PFA sleeve has high light transmittance, even if the PFA sleeve enters the light path area, part of the light can still penetrate the sleeve to reach the receiving end, resulting in a reduction in the signal intensity range detected by the sensor and an increase in the detection difficulty. Therefore, the fiber-optic reflection sensor may not be able to accurately determine whether the light signal emitted by the transmitting end is effectively blocked, increasing the risk of misjudgment of the wafer boat clamping state. SUMMARY

[0004] The utility model aims at providing a kind of mechanical arm and wet cleaning equipment, can effectively block the light signal emitted by light signal emitting unit, to reduce the risk of misjudgment of wafer boat clamping state.

[0005] In the first aspect, the present application provides a kind of mechanical arm, comprising: arm main body, clamping jaw, light shielding piece, light signal emitting unit and light signal receiving unit;

[0006] The light signal emitting unit and the light signal receiving unit are oppositely arranged on the arm main body and located on the same horizontal line;Wherein, the light signal emitting unit is used to emit light signal, and the light signal receiving unit is used to receive light signal;

[0007] The light shielding piece is rotationally connected with the arm main body, and the lower end of the light shielding piece extends to the position where the clamping jaw grips the wafer boat. When the clamping jaw clamps the wafer boat, the light shielding piece rotates relative to the arm main body, and the upper end of the light shielding piece moves to the middle of the light signal emitting unit and the light signal receiving unit to block the propagation path of the light signal.

[0008] In one embodiment, the light shielding member comprises a flexible light shielding band and a detection sleeve, the flexible light shielding band is fixedly wound on the detection sleeve; the detection sleeve comprises a light shielding area, the flexible light shielding band is wound on the light shielding area; when the upper end of the light shielding member moves to the middle of the light signal emitting unit and the light signal receiving unit, the light shielding area is located at the middle of the light signal emitting unit and the light signal receiving unit.

[0009] In one embodiment, the light shielding member comprises a light shielding coating and a detection sleeve; the detection sleeve comprises a light shielding area, the light shielding coating is coated on the light shielding area; when the upper end of the light shielding member moves to the middle of the light signal emitting unit and the light signal receiving unit, the light shielding area is located at the middle of the light signal emitting unit and the light signal receiving unit.

[0010] In one embodiment, the light shielding member comprises a light shielding sleeve and a detection sleeve, the detection sleeve comprises a light shielding area, the light shielding sleeve is sleeved on the light shielding area; when the upper end of the light shielding member moves to the middle of the light signal emitting unit and the light signal receiving unit, the light shielding area is located at the middle of the light signal emitting unit and the light signal receiving unit.

[0011] In one embodiment, the light shielding sleeve is a heat shrinkable sleeve.

[0012] In one embodiment, the light shielding member is a light shielding sleeve.

[0013] In one embodiment, the light signal emitting unit is a laser diode or a light emitting diode, and the light signal receiving unit is a photodiode, a phototriode or an avalanche photodiode.

[0014] In one embodiment, a protective cover with a mounting cavity is further included, the protective cover is arranged on the arm body, the light signal emitting unit and the light signal receiving unit are located in the mounting cavity, one mounting hole is arranged on one end of the protective cover close to the light shielding member, the upper end of the light shielding member passes through the mounting hole into the mounting cavity, and the mounting hole and the light shielding member are in clearance fit.

[0015] In one embodiment, a sealing groove is arranged on the inner wall of the mounting hole, an elastic sealing ring is embedded on the inner wall of the sealing groove, the inner diameter of the elastic sealing ring is smaller than the outer diameter of the light shielding member, and the outer diameter of the elastic sealing ring and the inner diameter of the sealing groove are in interference fit.

[0016] In the second aspect, a wet cleaning device comprises a cleaning tank and the above-mentioned mechanical arm.

[0017] The cleaning tank is located below the mechanical arm; the mechanical arm is used for clamping the wafer boat to the cleaning tank to perform wet cleaning on the wafers in the wafer boat.

[0018] The utility model discloses an advantageous effect is: because mechanical arm includes: arm main body, clamping claw, shading piece, light signal emission unit and light signal receiving unit, light signal emission unit and light signal receiving unit are opposite and set up on arm main body, and be located on same horizontal line, wherein, light signal emission unit is used for emitting light signal, and light signal receiving unit is used for receiving light signal, shading piece is rotatably connected with arm main body, and the lower end of shading piece extends to the position of clamping claw grabbing wafer boat, when clamping claw clamps wafer boat, make shading piece rotate relative to arm main body, and make the upper end of shading piece move to the middle place of light signal emission unit and light signal receiving unit to block the propagation path of light signal. In this way, when clamping claw clamps wafer boat, shading piece can move to the middle place of light signal emission unit and light signal receiving unit to block the propagation path of light signal, and then the propagation path of the light signal that light signal emission unit emits can be effectively blocked to prevent light signal receiving unit from receiving the light signal that light signal emission unit emits. In this way, when clamping claw clamps wafer boat, light signal receiving unit does not receive the light signal that light signal emission unit emits, when clamping claw does not hold wafer boat, light signal receiving unit can receive the light signal that light signal emission unit emits, can accurately judge wafer boat clamping state according to the detection result of light signal receiving unit to light signal, reduces the risk of wafer boat clamping state misjudgment. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is the light signal path transmission schematic diagram that shading piece does not move to the middle place of light signal emission unit and light signal receiving unit in the related art;

[0020] Figure 2 It is the light signal path transmission schematic diagram that shading piece moves to the middle place of light signal emission unit and light signal receiving unit in the related art;

[0021] Figure 3 It is the mechanical arm structure oblique view when shading piece does not move to the middle place of light signal emission unit and light signal receiving unit in one exemplary embodiment of the utility model;

[0022] Figure 4 It is the light signal path transmission schematic diagram when shading piece does not move to the middle place of light signal emission unit and light signal receiving unit in one exemplary embodiment of the utility model;

[0023] Figure 5 It is the light signal path transmission schematic diagram when shading piece moves to the middle place of light signal emission unit and light signal receiving unit in one exemplary embodiment of the utility model;

[0024] Figure 6 Figure 6 is a perspective view of the mechanical arm structure when the light shielding member moves to the middle of the light signal transmitting unit and the light signal receiving unit according to another exemplary embodiment of the present application;

[0025] Figure 7 Figure 6 is a perspective view of the mechanical arm structure when the light shielding member moves to the middle of the light signal transmitting unit and the light signal receiving unit according to another exemplary embodiment of the present application;

[0026] Figure 8 Figure 6 is a perspective view of the mechanical arm structure when the light shielding member moves to the middle of the light signal transmitting unit and the light signal receiving unit according to another exemplary embodiment of the present application;

[0027] Figure 9 Figure 6 is a perspective view of the mechanical arm structure when the light shielding member moves to the middle of the light signal transmitting unit and the light signal receiving unit according to another exemplary embodiment of the present application;

[0028] Figure 10 Figure 6 is a perspective view of the mechanical arm structure when the light shielding member moves to the middle of the light signal transmitting unit and the light signal receiving unit according to another exemplary embodiment of the present application.

[0029] Explanation of reference numerals in the drawings:

[0030] 1, light transmitting end; 2, light receiving end; 3, PFA sleeve; 4, arm main body; 5, clamping jaw; 6, light shielding member; 61, flexible light shielding belt; 62, detection sleeve; 63, light shielding coating; 64, detection sleeve; 65, light shielding sleeve; 66, detection sleeve; 7, light signal transmitting unit; 8, light signal receiving unit; 9, protective cover. DETAILED DESCRIPTION

[0031] In order to make the purpose, technical scheme and advantages of the utility model clearer, the technical scheme in the utility model embodiment will be clearly and completely described below in combination with the drawings of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art to which the utility model belongs. The "including" and similar words used in this paper mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. It should be noted that similar reference numbers and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. Meanwhile, in the description of the present application, the terms "first", "second" and the like are only used for differentiation, and cannot be understood as indicating or implying relative importance.

[0032] In the related art, a PFA sleeve is usually installed at the upper end of the mechanical arm of a wet cleaning machine, and a gripper is arranged at the end of the mechanical arm. The lower end of the PFA sleeve is close to the lower end of the gripper position, and the upper end of the PFA sleeve is at the edge of the optical fiber against the sensor. When the mechanical arm clamps the crystal boat, the gripper is closed, the PFA sleeve is driven to rotate by the lever principle, the upper end of the PFA sleeve moves to the light path area of the optical fiber against the sensor, and the light signal between the light emitting end and the light receiving end of the optical fiber against the sensor is blocked, realizing the switching of the optical fiber against the sensor signal from 0 to 1. The signal 0 is the low level when the optical fiber signal is not blocked, and the signal 1 is the high level when the light signal intensity of the receiving end is lower than the preset threshold value due to the blocking. However, due to the high light transmittance of the PFA sleeve material, the signal intensity range detected by the sensor is reduced, and the detection difficulty is increased. Specifically, due to the high light transmittance of the PFA sleeve material, even if the PFA sleeve enters the light path area, part of the light signal can still penetrate the sleeve to reach the light receiving end. In this case, the light signal intensity received by the light receiving end of the optical fiber against the sensor may be reduced, rather than completely blocked.

[0033] In addition to the problem of the PFA sleeve having high light transmittance, resulting in a reduced signal intensity range detected by the optical fiber opposed sensor and increasing the risk of false detection of the wafer boat clamping state, the related art also has the problem of the influence of water vapor on the optical fiber opposed sensor in the high-temperature tank environment of a wet cleaning machine. The solution vapor or water vapor in the high-temperature cleaning tank can form water droplets on the surface of the optical fiber opposed sensor, blocking the light beam or changing the light path, resulting in a false judgment of the light receiving end as being blocked by an object. The particulate matter or volatile substances in the solution can also scatter or absorb the light signal, reducing the light intensity of the light receiving end and triggering false alarms. At present, in order to overcome the influence of water vapor on the performance of the optical fiber sensor in the high-temperature tank environment of a wet cleaning machine, the industry often uses a pressure sensor to achieve the function of detecting the clamping state of the wafer boat. Although the use of a pressure sensor (non-optical sensor) can avoid the problem of false detection of the clamping state of the wafer boat caused by water vapor, the pressure sensor will deform over time, and the problem of false alarms caused by deformation of the sensor detection head cannot be avoided.

[0034] In the related art, when the mechanical arm does not clamp the wafer boat, as shown in Figure 1 , the light signal emitted by the light emitting end 1 is not blocked by the PFA sleeve 3, and the light receiving end 2 normally receives the light signal. When the mechanical arm clamps the wafer boat, as shown in Figure 2 , the light emitted by the light emitting end 1 is blocked by the PFA sleeve 3, and the light receiving end 2 cannot receive the light signal. However, due to the high light transmittance of the PFA sleeve material, even if the PFA sleeve enters the light path area, part of the light signal can still penetrate the PFA sleeve to reach the light receiving end 2. In this case, the light signal intensity received by the light receiving end 2 may only be slightly reduced, rather than being completely blocked. Therefore, the sensor may have difficulty accurately determining whether an effective blockage has occurred, increasing the risk of false judgment.

[0035] To solve the problems in the related art, as shown in Figures 3 to 9 , the utility model provides a mechanical arm, which comprises: an arm body 4, a clamping jaw 5, a light shielding piece 6, a light signal emitting unit 7 and a light signal receiving unit 8; the light signal emitting unit 7 and the light signal receiving unit 8 are oppositely arranged on the arm body 4 and located on the same horizontal line; wherein the light signal emitting unit 7 is used for emitting a light signal, and the light signal receiving unit 8 is used for receiving a light signal; the light shielding piece 6 is rotationally connected with the arm body 4, the lower end of the light shielding piece 6 extends to the position where the clamping jaw 5 grips the wafer boat, when the clamping jaw 5 clamps the wafer boat, the light shielding piece 6 rotates relative to the arm body 4, and the upper end of the light shielding piece 6 moves to the middle of the light signal emitting unit 7 and the light signal receiving unit 8, so as to block the propagation path of the light signal.

[0036] When the light signal receiving unit 8 cannot receive the light signal emitted by the light signal emitting unit 7, it indicates that the gripper 5 clamps the wafer boat; when the light signal receiving unit 8 receives the light signal emitted by the light signal emitting unit 7, it indicates that the gripper 5 does not clamp the wafer boat. In this way, the wafer boat clamping state can be determined according to the detection result of the light signal receiving unit 8 on the light signal.

[0037] In the embodiment of the present application, as shown in Figure 4 the light signal path transmission schematic diagram when the light shielding piece 6 moves to the middle of the light signal emitting unit 7 and the light signal receiving unit 8 when the gripper 5 does not clamp the wafer boat.

[0038] In the embodiment of the present application, as shown in Figure 5 the light signal path transmission schematic diagram when the light shielding piece 6 moves to the middle of the light signal emitting unit 7 and the light signal receiving unit 8 when the gripper 5 clamps the wafer boat.

[0039] When the gripper 5 clamps the wafer boat, the light shielding piece 6 is rotated relative to the arm body 4, and the upper end of the light shielding piece 6 is moved to the middle of the light signal emitting unit 7 and the light signal receiving unit 8 to block the propagation path of the light signal, thereby realizing accurate detection of the wafer boat clamping state and improving the stability and success rate of the mechanical arm when clamping the wafer boat. At the same time, by using the light shielding piece 6, the complete blocking of the light source is ensured, thereby improving the accuracy and reliability of the sensor detection.

[0040] In a possible embodiment, as shown in Figure 6 the light shielding piece 6 includes a flexible light shielding belt 61 and a detection sleeve 62, the flexible light shielding belt 61 is wound and fixed on the detection sleeve 62; the detection sleeve 62 includes a light shielding area, the flexible light shielding belt 61 is wound around the light shielding area; when the upper end of the light shielding piece 6 moves to the middle of the light signal emitting unit 7 and the light signal receiving unit 8, the light shielding area is located at the middle of the light signal emitting unit 7 and the light signal receiving unit 8.

[0041] By winding the flexible light shielding band 61 around the outer periphery of the detection sleeve 62, the flexible light shielding band 61 is ensured to move synchronously with the detection sleeve 62 during the rotation of the detection sleeve 62, and the light signal propagation path between the light signal emitting unit 7 and the light signal receiving unit 8 is dynamically shielded, thereby effectively blocking the light signal between the light signal emitting unit 7 and the light signal receiving unit 8, improving the stability of sensor detection, and further reducing the risk of misjudgment of the wafer boat clamping state. Specifically, the flexible light shielding band 61 can be made of a flexible material with high bending resistance and high light shielding rate, for example, light shielding polycarbonate, flexible conductive cloth, or polyurethane elastomer composite material. The flexible material of the flexible light shielding band 61 can maintain stable shape during the dynamic rotation of the detection sleeve 62, avoiding light shielding gaps caused by mechanical movement. In addition, the winding mode of the flexible light shielding band 61 can closely fit the surface of the detection sleeve 62, forming a continuous light shielding layer. The flexibility of the flexible light shielding band 61 enables it to adapt to the shape and size of the detection sleeve 62, eliminating the need for custom fixed structures, and only requiring re-winding during replacement or maintenance, without the need to disassemble the sensor or the detection sleeve 62, thereby reducing the cost of modification. Further, the light shielding effect can be optimized by adjusting the number of winding layers or the thickness of the material of the flexible light shielding band 61. Further, the flexible light shielding band 61 can be fixed at both ends by buckles, magic tapes, or elastic fasteners to ensure that it does not come off or shift during rotation.

[0042] In the embodiments of the present application, when the clamping jaw clamps the wafer boat, the light shielding member can move to the middle of the light signal emitting unit and the light signal receiving unit to block the propagation path of the light signal, thereby effectively blocking the propagation path of the light signal emitted by the light signal emitting unit to prevent the light signal receiving unit from receiving the light signal emitted by the light signal emitting unit. In this way, when the clamping jaw clamps the wafer boat, the light signal receiving unit cannot receive the light signal emitted by the light signal emitting unit, and when the clamping jaw does not clamp the wafer boat, the light signal receiving unit can receive the light signal emitted by the light signal emitting unit, so that the clamping state of the wafer boat can be accurately judged according to the detection result of the light signal receiving unit, thereby reducing the risk of misjudgment of the clamping state of the wafer boat.

[0043] In another possible embodiment, as shown in Figure 7 the light shielding member 6 includes a light shielding coating 63 and a detection sleeve 64; the detection sleeve 64 includes a light shielding area, and the light shielding coating 63 is coated on the light shielding area; when the upper end of the light shielding member 6 moves to the middle of the light signal emitting unit 7 and the light signal receiving unit 8, the light shielding area is located at the middle of the light signal emitting unit 7 and the light signal receiving unit 8.

[0044] Specifically, the light-shielding coating 63 can be formed by coating a light-shielding material on the detection sleeve 64, and the coating method is not limited to spraying, brushing, and dipping. This will not be described in detail here. The light-shielding material can be a material with good light-shielding performance, such as metal, cloth, polymer, ceramic, or paper composite material. Specifically, metal material has excellent light-shielding performance and durability, and is suitable for high-demand application scenarios; cloth material has softness and certain light-shielding performance, and is suitable for occasions that require a certain degree of flexibility; polymer material has good processing performance and light-shielding effect, and is suitable for various application environments; ceramic material has the characteristics of high temperature resistance and wear resistance, and is suitable for applications in high temperature environments; paper composite material has the advantages of light weight and low cost, and is suitable for occasions with strict requirements on weight and cost.

[0045] Further, the light-shielding coating 63 described above can be made of a light-absorbing material with a light absorption rate greater than or equal to 90%, such as a high polymer composite material. The light-shielding coating 63 coated on the light-shielding area of the detection sleeve 64 can rotate arbitrarily with the rotation angle of the detection sleeve 64, which can ensure that when the detection sleeve 64 rotates to the limit position, the light-shielding coating 63 can still completely block the sensor light path, achieving precise dynamic shielding of the sensor light path. The coating method of the light-shielding material makes it closely adhere to the detection sleeve 64, ensuring that when the detection sleeve 64 moves between the sensors, it can completely block the light source and avoid light passing through the gap of the mechanical arm, ensuring the stability and reliability of the light-shielding effect, thereby improving the detection accuracy of the sensor and avoiding the problem of incomplete light shielding caused by uneven mechanical arm structure or loose installation of the light-shielding member 6.

[0046] Therefore, by selecting different light-shielding materials, the present application can provide various implementation methods according to specific application requirements, ensuring that the sensor can accurately detect in various environments and improving the reliability and applicability of the system. The problem of increased difficulty in sensor detection caused by high material light transmittance in the prior art is solved.

[0047] In another possible embodiment, as shown in Figure 8 The light-shielding member 6 includes a light-shielding sleeve 65 and a detection sleeve 66, the detection sleeve 66 includes a light-shielding area, and the light-shielding sleeve 65 is sleeved on the light-shielding area; when the upper end of the light-shielding member 6 moves to the middle of the light signal emitting unit 7 and the light signal receiving unit 8, the light-shielding area is located at the middle of the light signal emitting unit 7 and the light signal receiving unit 8.

[0048] For the mechanical arm that needs to apply the beam sensor in emergency, the light shielding sleeve 65 is directly sleeved outside the detection sleeve 66, without the need for accurate alignment, fast assembly, and improvement of the application efficiency of the beam sensor. The light shielding sleeve 65 can be made of flexible silica gel material, which has light shielding and weather resistance. Weather resistance refers to the ability of a material to resist damage to its physical and chemical properties and appearance caused by external environmental factors such as sunlight, temperature changes, wind and rain, ozone, ultraviolet light, and humidity when exposed to natural climate conditions for a long time. This performance directly determines the service life and stability of the material in harsh environments. When the light shielding sleeve 65 changes the angle due to the mechanical arm, the light shielding sleeve 65 can follow the action through elastic deformation or sliding bearing, and always maintain the circumferential shielding of the light signal emitting unit 7 and the light signal receiving unit 8.

[0049] In another possible embodiment, as shown in Figure 8 The light shielding sleeve 65 is a heat shrinkable sleeve. By using a heat shrinkable sleeve as a light shielding sleeve, since the cleaning tank is located below the mechanical arm, the mechanical arm is used to clamp the wafer boat to the cleaning tank for wet cleaning of the wafers in the wafer boat. During the cleaning process, the liquid in the cleaning tank is heated, and the steam formed by the evaporation of the liquid heats the heat shrinkable sleeve to make the heat shrinkable sleeve tightly fit on the detection sleeve. The thermoplasticity and fitting characteristics of the heat shrinkable sleeve, due to the low cost of the heat shrinkable sleeve, can realize low-cost, lightweight, and high-reliability dynamic light shielding, solve the problem of loosening or displacement of the light shielding sleeve during the movement of the mechanical arm, further enhance the light shielding effect and fixing stability, and ensure that the sensor can accurately detect the change of the light signal, thereby improving the detection accuracy and reliability of the sensor.

[0050] Further, the material of the heat shrinkable sleeve is any one of polyolefin, polyvinyl chloride, polyvinylidene fluoride, and polytetrafluoroethylene. These materials have excellent insulation performance and mechanical strength, and can maintain stable performance under different environmental conditions. For example, polyolefin material has good heat resistance and chemical corrosion resistance, and is suitable for use in high-temperature environments; polyvinyl chloride material has good flame retardant performance, and is suitable for use in fireproof environments; polyvinylidene fluoride material has excellent weather resistance and ultraviolet resistance, and is suitable for outdoor use; polytetrafluoroethylene material has extremely low friction coefficient and excellent chemical corrosion resistance, and is suitable for use in high-wear environments. The selection of the material of the heat shrinkable sleeve directly affects the detection effect of the sensor. By using these materials, the light transmittance can be reduced, thereby enhancing the detection signal strength of the sensor and ensuring that the sensor can accurately detect the state of the mechanical arm. In addition, the heat shrinkable sleeve material also has excellent insulation performance and mechanical strength, and can maintain stable performance under different environmental conditions.

[0051] In another possible embodiment, as shown in Figure 9As shown, the light shielding member 6 is a light shielding sleeve. By directly setting the light shielding member 6 as a light shielding sleeve, the manual cost can be saved by avoiding determining the light shielding region on the light shielding member 6 between the light signal emitting unit 7 and the light signal receiving unit 8 when the clamping jaw 5 clamps the wafer boat through measurement or calculation.

[0052] In a possible embodiment, the light signal emitting unit 7 is a laser diode or a light emitting diode, and the light signal receiving unit 8 is a photodiode, a phototriode or an avalanche photodiode. The laser diode or the light emitting diode is configured to provide stable light signal output, ensuring the reliability of the light beam in a long distance or a complex environment. The light emitting diode is suitable for short to medium distance detection, while the laser diode is suitable for long distance or high precision scenarios. The light emitting diode is lower in cost and suitable for large-scale applications; although the laser diode is higher in cost, it has significant performance advantages. The photodiode is configured to detect weak light signals and is suitable for low light or high precision scenarios. The phototriode is configured to reduce environmental light interference.

[0053] In a possible embodiment, as shown in Figure 10 The above mechanical arm further includes a protective cover 9 with a mounting cavity, the protective cover 9 is arranged on the arm body 4, the light signal emitting unit 7 and the light signal receiving unit 8 are located in the mounting cavity, one end of the protective cover 9 close to the light shielding member 6 is provided with a mounting hole (not shown), the upper end of the light shielding member 6 passes through the mounting hole into the mounting cavity, the mounting hole is in clearance fit with the light shielding member 6, which can prevent the light signal transmission path between the light signal emitting unit 7 and the light signal receiving unit 8 from being affected by the high-temperature cleaning tank solution vapor, and the clamping state of the wafer boat is mis-detected. The protective cover 9 with the mounting cavity can be made of corrosion-resistant and high-temperature-resistant materials, such as stainless steel, aluminum alloy or high-strength plastic, to ensure its long-term use performance in harsh environments. The design of the protective cover 9 can be customized according to the shape and size of the sensor to ensure that it can completely shield the light signal emitting unit 7 and the light signal receiving unit 8, avoiding affecting the working effect of the light signal emitting unit 7 and the light signal receiving unit 8 due to improper installation. When the mechanical arm clamps the wafer boat, the light shielding member 6 rotates with the mechanical arm to the middle of the light signal emitting unit 7 and the light signal receiving unit 8, and is placed in the mounting cavity, avoiding the water vapor adhering to the light signal emitting unit 7, the light shielding member 6 and the light signal receiving unit 8, which may cause light wave diffuse reflection, effectively reducing the water vapor influence of the high-temperature tank solution on the sensor assembly, and improving the sensitivity of the sensor detection.

[0054] In another possible embodiment, the mechanical arm is further provided with an alarm device (not shown) connected with the light signal receiving unit 8. When the steam temporarily blocks the light path, the sensor misjudges as object intrusion, triggers the alarm and makes the machine stop. Or when the light path is misaligned, the light signal received by the light signal receiving unit 8 fluctuates periodically, causing intermittent alarm. Or when liquid adheres to the surface of the light signal transmitting unit 7 to form scattering, reducing the strength of the light signal transmission, triggering false alarm.

[0055] In a possible embodiment, the inner wall of the mounting hole is provided with a sealing groove (not shown), and the inner wall of the sealing groove is embedded with an elastic sealing ring (not shown). The inner diameter of the elastic sealing ring is smaller than the outer diameter of the light shielding piece 6, and the outer diameter of the elastic sealing ring is in interference fit with the inner diameter of the sealing groove. By setting the interference fit between the inner diameter of the elastic sealing ring and the outer diameter of the light shielding piece 6, a preset radial compression deformation of the sealing ring is generated during assembly, forming an elastic holding force on the light shielding piece 6, effectively preventing liquid, gas or light from penetrating through the circumferential gap, and realizing dynamic sealing. By setting the interference fit between the outer diameter of the sealing ring and the inner diameter of the sealing groove, the sealing ring is firmly embedded in the sealing groove, avoiding displacement or falling off due to vibration, pressure, etc. during assembly or use, and ensuring long-term stability. The bidirectional compression design with interference fit can realize stable connection between the sealing ring, the mounting hole and the light shielding piece 6 without additional adhesive or fasteners, reducing assembly complexity and cost. The above-mentioned elastic sealing ring can be made of high-temperature-resistant and corrosion-resistant elastic material, such as fluororubber or silicone rubber. The cross section of the above-mentioned sealing groove can be designed as an annular groove structure, effectively preventing high-temperature water vapor in the cleaning tank from entering the device interior through the gap, and at the same time adapting to thermal expansion and contraction caused by temperature changes, prolonging the service life of the sealing.

[0056] In another exemplary embodiment, a wet cleaning device is provided, which comprises a cleaning tank and the above-mentioned mechanical arm. The cleaning tank is located below the mechanical arm. The mechanical arm is used to clamp the wafer boat to the cleaning tank to perform wet cleaning on the wafers in the wafer boat.

[0057] Although the embodiments of the present application have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the present application as described in the claims. Moreover, the present application described herein can have other embodiments and can be implemented or realized in various ways.

Claims

1. A robotic arm, characterized in that, include: The arm body, grippers, light shield, optical signal transmitting unit, and optical signal receiving unit; The optical signal transmitting unit and the optical signal receiving unit are disposed opposite to each other on the arm body and are located on the same horizontal line; wherein, the optical signal transmitting unit is used to transmit optical signals and the optical signal receiving unit is used to receive optical signals; The light-shielding component is rotatably connected to the arm body. The lower end of the light-shielding component extends to the position where the gripper grasps the crystal boat. When the gripper grasps the crystal boat, the light-shielding component rotates relative to the arm body, and the upper end of the light-shielding component moves to the middle of the optical signal transmitting unit and the optical signal receiving unit to block the propagation path of the optical signal.

2. The robotic arm according to claim 1, characterized in that, The light-shielding component includes a flexible light-shielding strip and a detection sleeve, wherein the flexible light-shielding strip is wrapped and fixed on the detection sleeve; The detection sleeve includes a light-shielding area, and the flexible light-shielding strip is wrapped around the light-shielding area; When the upper end of the light-shielding member moves to the middle of the optical signal transmitting unit and the optical signal receiving unit, the light-shielding area is located in the middle of the optical signal transmitting unit and the optical signal receiving unit.

3. The robotic arm according to claim 1, characterized in that, The light-shielding component includes a light-shielding coating and a detection sleeve; The detection sleeve includes a light-shielding area, and the light-shielding coating is applied to the light-shielding area; When the upper end of the light-shielding member moves to the middle of the optical signal transmitting unit and the optical signal receiving unit, the light-shielding area is located in the middle of the optical signal transmitting unit and the optical signal receiving unit.

4. The robotic arm according to claim 1, characterized in that, The light-shielding component includes a light-shielding sleeve and a detection sleeve. The detection sleeve includes a light-shielding area, and the light-shielding sleeve is sleeved on the light-shielding area; When the upper end of the light-shielding member moves to the middle of the optical signal transmitting unit and the optical signal receiving unit, the light-shielding area is located in the middle of the optical signal transmitting unit and the optical signal receiving unit.

5. The robotic arm according to claim 4, characterized in that, The light-shielding sleeve is a heat-shrink sleeve.

6. The robotic arm according to claim 1, characterized in that, The light-shielding component is a light-shielding sleeve.

7. The robotic arm according to claim 1, characterized in that, The optical signal transmitting unit is a laser diode or a light-emitting diode, and the optical signal receiving unit is a photodiode, a phototransistor, or an avalanche photodiode.

8. The robotic arm according to claim 1, characterized in that, It also includes a protective cover with a mounting cavity, which is disposed on the arm body. The optical signal transmitting unit and the optical signal receiving unit are located in the mounting cavity. The protective cover has a mounting hole at one end near the light shield. The upper end of the light shield passes through the mounting hole and enters the mounting cavity. The mounting hole is clearance-fitted with the light shield.

9. The robotic arm according to claim 8, characterized in that, The inner wall of the mounting hole is provided with a sealing groove, and an elastic sealing ring is embedded in the inner wall of the sealing groove. The inner diameter of the elastic sealing ring is smaller than the outer diameter of the light-shielding component, and the outer diameter of the elastic sealing ring is interference-fitted with the inner diameter of the sealing groove.

10. A wet cleaning apparatus, characterized in that, Includes a cleaning tank and the robotic arm as described in any one of claims 1 to 9; The cleaning tank is located below the robotic arm; the robotic arm is used to grip the wafer boat and place it into the cleaning tank to perform wet cleaning on the wafer in the wafer boat.

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