Ejector pin device and die bonding equipment

Abstract

The utility model is applicable to the technical field of die bonding, and provides an ejector pin device and die bonding equipment, the ejector pin device comprises a base, a pin sleeve assembly, an ejector pin assembly and a voice coil motor, and the die bonding equipment comprises any one of the ejector pin devices. The needle sleeve assembly is arranged on the base, the ejector pin assembly is further inserted in the sliding channel in the needle sleeve assembly, and the ejector pin assembly has the freedom degree of moving in the first direction relative to the needle sleeve assembly. Meanwhile, a voice coil motor is further arranged on the base, and the ejector pin assembly can be driven by the voice coil motor to reciprocate in the first direction. Compared with an ejector pin device in the prior art, the ejector pin device has the advantages that the operating speed and the jacking height of the ejector pin can be adjusted by adjusting the operating speed and the stroke of the voice coil motor, and the problems that the moving speed is unstable and the jacking height is difficult to control when a cam structure is adopted to drive the ejector pin to move are solved; and the operation speed and the jacking height of the ejector pin are more convenient to adjust.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the fixed point technology field especially, relate to a thimble device and fixed point equipment. BACKGROUND

[0002] The fixed point machine is one of the equipment for semiconductor device manufacturing, and its function is to connect the semiconductor wafer with other components together. In the working of the fixed point machine, the crystal ring is usually supported by the crystal supply platform, then the chip on the crystal ring is separated from the blue film through the thimble device, and finally the chip on the crystal ring is sucked by the fixed point suction nozzle, and the solder joint between the chip and the packaging substrate is firmly connected. However, the existing thimble device is driven by a motor to drive the cam structure to drive the thimble to reciprocate up and down, which causes the thimble device to have the problem of inconvenient adjustment of running speed and lifting height during use, which seriously affects the efficiency and precision of the fixed point equipment. SUMMARY

[0003] The utility model aims at providing a thimble device and fixed point equipment, and aims at solving the technical problem of inconvenient adjustment of running speed and lifting height of the thimble device in the prior art.

[0004] The utility model is realized as follows: in the first aspect, a thimble device is provided, which comprises a base, a needle sleeve assembly, a thimble assembly and a voice coil motor, the needle sleeve assembly is fixedly arranged on the base, the needle sleeve assembly has a sliding channel arranged in a first direction, the thimble assembly is inserted into the inside of the sliding channel, and the thimble assembly has a degree of freedom of movement in the first direction relative to the needle sleeve assembly, the voice coil motor is arranged on the base, and the voice coil motor is used to drive the thimble assembly to reciprocate in the first direction.

[0005] In an optional embodiment, a cross slide rail is arranged between the thimble assembly and the base, and the thimble assembly is slidably connected with the base through the cross slide rail.

[0006] In an optional embodiment, the cross slide rail comprises a main sliding part and two auxiliary sliding parts, the two auxiliary sliding parts are respectively located on both sides of the main sliding part in a second direction, the second direction is arranged at an angle with the first direction, the two auxiliary sliding parts are fixedly arranged on the base, the main sliding part and the two auxiliary sliding parts are slidably connected, the main sliding part has a degree of freedom of sliding in the first direction relative to the two auxiliary sliding parts, the thimble assembly is connected with the main sliding part, and the driving end of the voice coil motor is also connected with the main sliding part.

[0007] In an optional embodiment, two support blocks are arranged on the base, and each of the support blocks abuts against a side of the secondary sliding part away from the primary sliding part.

[0008] In an optional embodiment, an adjusting mechanism is arranged on the support block, and the adjusting mechanism is used to adjust the pressure applied by the secondary sliding part to the primary sliding part.

[0009] In an optional embodiment, the adjusting mechanism comprises a rotating stud and an elastic pushing member, the rotating stud is arranged through the support block in a second direction, the rotating stud is threadedly connected with the support block, and an accommodating recess is further arranged on an end of the rotating stud towards the secondary sliding part, the elastic pushing member abuts against an inner wall of the accommodating recess at one end and abuts against the secondary sliding part at the other end, and is used to apply a pushing force along the direction towards the primary sliding part to the secondary sliding part.

[0010] In an optional embodiment, the needle device further comprises a measuring assembly, and the measuring assembly is used to detect the displacement of the primary sliding part in the first direction.

[0011] In an optional embodiment, the measuring assembly comprises a grating reader and a grating ruler structure, the grating reader is arranged on the base, and the grating ruler structure is connected with the primary sliding part and is used to cooperate with the grating reader to measure the moving distance of the primary sliding part.

[0012] In an optional embodiment, the voice coil motor comprises a fixed sleeve and a columnar mover, the fixed sleeve is fixedly arranged on the base, the columnar mover is arranged in the fixed sleeve, the inner wall of the fixed sleeve is provided with a magnetic part, the outer periphery of the columnar mover is provided with a coil part used to communicate with an external circuit, and the coil part is further used to interact with the magnetic part after being electrified to drive the columnar mover to move along the axial direction of the fixed sleeve.

[0013] In a second aspect, a die bonding apparatus is provided, comprising the needle device according to any one of the preceding aspects.

[0014] Compared with the prior art, the needle sleeve assembly is arranged on the base, and the needle assembly is further inserted into the sliding channel of the needle sleeve assembly, and the needle assembly has the freedom of movement along the first direction relative to the needle sleeve assembly. Meanwhile, the voice coil motor is arranged on the base, and the needle assembly can be driven to reciprocate along the first direction by the voice coil motor. Compared with the needle device in the prior art, the running speed and the stroke of the voice coil motor can be adjusted, the running speed and the lifting height of the needle can be adjusted, the problem that the movement speed is unstable and the lifting height is difficult to control when the cam structure is used to drive the needle to move is avoided, and the running speed and the lifting height of the needle are adjusted more conveniently.

[0015] It can be understood that the beneficial effects of the above-mentioned second aspect can be referred to the relevant description in the above-mentioned first aspect, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments of the present application or the prior art description. Obviously, the drawings described below are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0017] Figure 1 is a structural schematic diagram of a top pin device provided by the embodiment of the present application;

[0018] Figure 2 is a structural schematic diagram of a top pin device provided by the embodiment of the present application;

[0019] Figure 3 is a partial sectional view structural schematic diagram of a top pin device provided by the embodiment of the present application;

[0020] Figure 4 is Figure 3 enlarged structural schematic diagram of A in the figure.

[0021] Explanation of reference signs:

[0022] 1, base; 11, support stopper; 2, needle sleeve assembly; 3, top pin assembly; 4, voice coil motor; 41, fixed sleeve; 42, cylindrical mover; 5, cross slide rail; 51, main sliding part; 52, auxiliary sliding part; 6, adjusting mechanism; 61, rotating stud; 62, elastic pushing piece; 63, accommodating recess; 7, measuring assembly; 71, grating reader; 72, grating structure. DETAILED DESCRIPTION

[0023] The embodiments of the present application will be described in detail below, and the examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0024] In the description of the utility model, it is understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0025] In the embodiment, according to the XYZ rectangular coordinate system defined in Figure 1 In the embodiment, according to the XYZ rectangular coordinate system defined in

[0026] In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0027] In the utility model, unless otherwise specifically defined and limited, the terms "installation", "connection", "connection", "fixing" and the like should be understood broadly, for example, can be fixed connection, can also be detachable connection, or integrated; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the communication or interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0028] In order to make the purpose, technical scheme and advantages of the utility model more clear and obvious, the utility model is further described in detail below in combination with the drawings and examples.

[0029] Please refer to Figures 1 to 4As shown in the utility model embodiment, in the first aspect, provide a needle device, including base 1, needle sleeve assembly 2, needle assembly 3 and voice coil motor 4, needle sleeve assembly 2 is fixedly arranged in base 1, needle sleeve assembly 2 has the sliding channel along the first direction in, needle assembly 3 is inserted in the inside of sliding channel, and needle assembly 3 has the freedom of movement along the first direction relative to needle sleeve assembly 2, voice coil motor 4 is arranged on base 1, and voice coil motor 4 is used to drive needle assembly 3 reciprocating motion along the first direction.

[0030] Specifically, base 1 refers to a support component with a certain height, base 1 can be blocky, plate-shaped or a combination of various shapes. Needle sleeve assembly 2 refers to a cylindrical component with a certain length, the cross-sectional shape of needle sleeve assembly 2 is generally circular, needle sleeve assembly 2 can be an integral component, or it can be assembled from multiple components. For example, needle sleeve assembly 2 can include needle sleeve base 1 and mounting sleeve, wherein needle sleeve base 1 is fixedly arranged on base 1, and mounting sleeve is arranged on needle sleeve base 1. The sliding channel refers to a channel structure with a certain accommodation space, and the cross-sectional shape of the sliding channel can be circular. Needle assembly 3 refers to a component with a moving length, and the end of needle assembly 3 has a sharp end for lifting the chip, and needle assembly 3 is slidably inserted into the sliding channel. Needle assembly 3 can be an integral structure, and needle assembly 3 can also include multiple parts, for example, needle assembly 3 can include a needle rod and a needle body clamped at the end of the needle rod. In addition, a Y-shaped sealing ring can be arranged between the needle assembly 3 and the inner wall of the sliding channel, which can make the sliding of the needle assembly 3 in the sliding channel smoother under the premise of ensuring the sealing of the inside of the sliding channel.

[0031] Voice coil motor 4 refers to a linear drive device based on electromagnetic principle, and its name comes from the voice coil structure in the loudspeaker. Voice coil motor 4 produces linear motion through the interaction of current and magnetic field, has the characteristics of high response speed, high precision, short axial size and compact structure. Among them, voice coil motor 4 can change the size, direction or frequency of the current flowing into voice coil motor 4 through external control circuit or other ways, so as to realize the adjustment of the driving speed and driving stroke of voice coil motor 4. The driving end of voice coil motor 4 can be directly connected with needle assembly 3, and the driving end of voice coil motor 4 can also be indirectly connected with needle assembly 3, for example, a connecting member or other rigid connecting component is arranged between the driving end of voice coil motor 4 and needle assembly 3.

[0032] The utility model embodiment provides a top pin device, through setting needle cover subassembly 2 on base 1, and still inserting top pin subassembly 3 in the sliding channel on needle cover subassembly 2, top pin subassembly 3 has the freedom degree of movement along the first direction relative to needle cover subassembly 2. Meanwhile still being provided with voice coil motor 4 on base 1, can drive top pin subassembly 3 reciprocating motion along the first direction through voice coil motor 4. Compared with the top pin device in prior art, can adjust through the running speed and the stroke of voice coil motor 4, realize the running speed and the lift height adjustment of top pin, avoided the problem that the lift height is difficult to control when using cam structure drive top pin movement speed unstable, make the running speed and the lift height adjustment of top pin more simple and convenient.

[0033] In one embodiment, referring to Figure 1 With Figure 2 Top pin subassembly 3 and base 1 are provided with cross slide rail 5, and top pin subassembly 3 is slidably connected with base 1 through cross slide rail 5. Specifically, cross slide rail 5 is also called cross roller linear slide rail, which is a component for realizing the sliding connection between two objects. Cross slide rail 5 can include at least two sliding parts that can slide relative to each other, and a cross-arranged roller and a retainer for stabilizing the roller are provided on one of the two sliding parts. High-precision linear motion is achieved through rolling friction. In use, the sliding parts can be installed on different objects through clamping, fastening, welding, or other methods to realize the sliding connection between the two objects. In this embodiment, by providing cross slide rail 5 between top pin subassembly 3 and base 1, the movement of top pin subassembly 3 is more stable and reliable, thereby improving the stability of the top pin device in use and further improving the accuracy of die bonding.

[0034] In one embodiment, referring to Figure 2 With Figure 3, the cross slide rail 5 comprises a main slide part 51 and two auxiliary slide parts 52, the two auxiliary slide parts 52 are respectively located on both sides of the main slide part 51 along a second direction, the second direction is arranged at an angle with the first direction, the two auxiliary slide parts 52 are fixedly arranged on the base 1, the main slide part 51 and the two auxiliary slide parts 52 are slidingly connected, the main slide part 51 has a degree of freedom of sliding along the first direction relative to the two auxiliary slide parts 52, the pin assembly 3 is connected with the main slide part 51, and the driving end of the voice coil motor 4 is also connected with the main slide part 51. Specifically, the main slide part 51 refers to a component with a certain length, and the main slide part 51 can be columnar, block-shaped or strip-shaped. The auxiliary slide part 52 also refers to a component with a certain length, and the auxiliary slide part 52 can be columnar, block-shaped or strip-shaped. The main slide part 51 is provided with cross-arranged rollers and a retainer for stabilizing the rollers on both sides of the main slide part 51 along the second direction, and a V-shaped sliding groove is arranged on the side of the auxiliary slide part 52 facing the main slide part 51, so that the main slide part 51 and the auxiliary slide part 52 can slide relative to each other while ensuring the stability of the sliding. In this embodiment, the cross slide rail 5 is divided into the main slide part 51 and the two auxiliary slide parts 52, and the two auxiliary slide parts 52 are respectively located on both sides of the main slide part 51 along the second direction. At the same time, the two auxiliary slide parts 52 are fixedly arranged on the base 1, and the main slide part 51 and the two auxiliary slide parts 52 are slidingly connected, so that the main slide part 51 can slide between the two auxiliary slide parts 52. And the driving end of the voice coil motor 4 can be connected with the pin assembly 3 through the main slide part 51, so that the pin assembly 3 can move more stably and reliably, and the stability and accuracy of the pin device during use are improved.

[0035] In an optional embodiment, as shown in Figure 2 , the auxiliary slide part 52 can be fixed to the base 1 by fasteners, and the fasteners can press the auxiliary slide part 52 against the base 1 along a third direction, the third direction is arranged at an angle with the first direction and the second direction, so that the auxiliary slide part 52 can be fixed more firmly and conveniently.

[0036] As shown in Figure 1 , the angle between the first direction and the second direction can be a right angle, and the angles between the third direction and the first direction and the second direction are right angles. Preferably, the first direction can be the arrow Z direction, the second direction can be along the arrow X direction, and the third direction can be arranged along the arrow Z direction.

[0037] In an embodiment, as shown in Figure 2 and Figure 3The base 1 is provided with two support stops 11, and the support stops 11 abut against one side of the secondary sliding part 52 away from the primary sliding part 51. Specifically, the support stop 11 refers to a component with a certain volume, and the support stop 11 can be block-shaped, plate-shaped, or a combination of multiple shapes. The support stop 11 can be an integral molding structure with the base 1, for example, integral molding through die casting or machining. The support stop 11 can also be a separate component, and the support stop 11 is installed on the base 1 through clamping, welding, or fastener connection. In this embodiment, by providing two support stops 11 on the base 1, and the support stops 11 abut against one side of the secondary sliding part 52 away from the primary sliding part 51, the secondary sliding part 52 can be supported by the support stop 11, avoiding the secondary sliding part 52 moving in the second direction away from the primary sliding part 51, making the overall installation of the cross slide rail 5 more stable and reliable, and also improving the stability and accuracy of the top pin assembly 3 sliding.

[0038] In one embodiment, referring to Figure 3 With Figure 4 The support stop 11 is provided with an adjusting mechanism 6, and the adjusting mechanism 6 is used to adjust the pressure applied by the secondary sliding part 52 to the primary sliding part 51. Specifically, the adjusting mechanism 6 refers to a component that can adjust the position of an object. In this embodiment, by providing the adjusting mechanism 6 on the support stop 11, the secondary sliding part 52 can be pre-fixed in the moving degree before being completely fixed, and then the adjusting mechanism 6 can be used to adjust the pressure applied by the secondary sliding part 52 to the primary sliding part 51 in the second direction, so as to achieve the purpose of adjusting the friction between the secondary sliding part 52 and the primary sliding part 51. When the pressure applied by the secondary sliding part 52 to the primary sliding part 51 increases, the clamping action of the two secondary sliding parts 52 will make the sliding of the primary sliding part 51 more stable, avoiding the primary sliding part 51 from deviating or shaking in the second direction, but at the same time, the friction between the primary sliding part 51 and the secondary sliding part 52 will also be greater, resulting in that the secondary sliding part 52 will slide less smoothly. However, when the pressure applied by the secondary sliding part 52 to the primary sliding part 51 decreases, the friction between the primary sliding part 51 and the secondary sliding part 52 will be smaller, so that the sliding of the primary sliding part 51 is more smooth. Therefore, the pressure applied by the secondary sliding part 52 to the primary sliding part 51 can be adjusted to an appropriate range by the adjusting mechanism 6, which can make the primary sliding part 51 slide more smoothly under the premise of ensuring the stable installation of the primary sliding part 51, so as to make the use of the cross slide rail 5 more convenient.

[0039] In an optional embodiment, referring to Figure 2, the number of adjusting mechanisms 6 can be multiple, and the multiple adjusting mechanisms 6 are sequentially and spacedly arranged along the first direction. In the embodiment, by arranging multiple adjusting mechanisms 6 and sequentially and spacedly arranging the multiple adjusting mechanisms 6 along the first direction, the sub-sliding part 52 is adjusted at multiple positions along the first direction, so that the pressure applied by the sub-sliding part 52 to the main-sliding part 51 is kept uniform along the first direction, and the deflection caused by the large length of the sub-sliding part 52 is avoided, so that the cross slide 5 is more convenient to use.

[0040] In one embodiment, referring to Figure 4 , the adjusting mechanism 6 comprises a rotating stud 61 and an elastic pushing piece 62. The rotating stud 61 penetrates the support block 11 along the second direction and is threadedly connected with the support block 11. An accommodating recess 63 is arranged at one end of the rotating stud 61 facing the sub-sliding part 52. The elastic pushing piece 62 is abutted against the inner wall of the accommodating recess 63 at one end and is abutted against the sub-sliding part 52 at the other end, so as to apply a pushing force to the sub-sliding part 52 along the direction towards the main-sliding part 51. Specifically, the rotating stud 61 refers to a columnar part with a certain length, and a thread is arranged on the outer wall of the rotating stud 61. The rotating stud 61 can be directly used as a screw. The elastic pushing piece 62 refers to an elastic part with a certain length. The elastic pushing piece 62 can be a spring, a rubber column or an elastic sheet, etc. The accommodating recess 63 refers to a blind hole structure with a certain depth. In the embodiment, a threaded hole can be arranged on the support block 11 and penetrates the support block 11. The rotating stud 61 can penetrate the support block 11 along the second direction through the threaded hole and be threadedly connected with the support block 11. Meanwhile, the accommodating recess 63 is arranged at one end of the rotating stud 61 facing the sub-sliding part 52. The elastic pushing piece 62 is abutted against the inner wall of the accommodating recess 63 at one end and is abutted against the sub-sliding part 52 at the other end, so that the elastic pushing piece 62 can apply a pushing force to the sub-sliding part 52 along the direction towards the main-sliding part 51. The rotating stud 61 can be moved along the second direction by rotating the rotating stud 61, so as to adjust the distance between the bottom surface of the accommodating recess 63 and the sub-sliding part 52, change the compression degree of the elastic pushing piece 62, and further change the pushing force applied by the elastic pushing piece 62 to the sub-sliding part 52. The adjusting mechanism 6 makes the adjustment of the pushing force more simple and convenient by using the above structure.

[0041] In one embodiment, referring to Figure 2 , the thimble device further comprises a measuring assembly 7 for detecting the displacement of the main-sliding part 51 along the first direction. Specifically, the measuring assembly 7 refers to a part or assembly that can measure the displacement of an object. The measuring assembly 7 can be a pointer scale structure, or can be a laser measuring structure or an optoelectronic measuring structure. In the embodiment, the displacement of the main-sliding part 51 along the first direction can be detected by arranging the measuring assembly 7, so that the control of the thimble assembly 3 is more accurate and convenient.

[0042] In one embodiment, referring to Figure 2 , the measuring assembly 7 comprises a grating reader 71 and a grating ruler structure 72, the grating reader 71 is arranged on the base 1, and the grating ruler structure 72 is connected to the main sliding part 51 and used to cooperate with the grating reader 71 to measure the moving distance of the main sliding part 51. Specifically, the grating ruler structure 72 refers to a component with a certain length, and the grating ruler structure 72 is provided with grating lines capable of acting on light. The grating reader 71 refers to a component composed of an indicating grating, a lens group, and a photoelectric element, etc., and is responsible for signal acquisition and conversion. In the working process, the grating reader 71 can emit light, and the light produces interference through the grating lines on the grating ruler structure 72 to form alternating bright and dark Moiré fringes. And in the moving process of the grating reader 71, the periodic change of the fringes is converted into an electric pulse signal by the photoelectric element, and the displacement amount is accurately calculated through the counting pulse. In this embodiment, the cooperation of the grating reader 71 and the grating ruler structure 72 can make the displacement detection result more accurate.

[0043] In an optional embodiment, referring to Figure 2 and Figure 3 , a connecting block is further arranged between the driving end of the voice coil motor 4 and the main sliding part 51, and the driving end of the voice coil motor 4 is connected to the main sliding part 51 through the connecting block. The grating ruler structure 72 can be fixed on the connecting block, since the connecting block is connected to the main sliding part 51, the grating ruler structure 72 is connected to the main sliding part 51, so that the installation of the grating ruler structure 72 is more simple and convenient.

[0044] In one embodiment, referring to Figure 2 and Figure 3 , the voice coil motor 4 comprises a fixed sleeve 41 and a columnar mover 42, the fixed sleeve 41 is fixedly arranged on the base 1, the columnar mover 42 is arranged in the fixed sleeve 41, the inner wall of the fixed sleeve 41 has a magnetic part, the outer periphery of the columnar mover 42 is provided with a coil part for communicating with an external circuit, and the coil part is further used to interact with the magnetic part after being energized to drive the columnar mover 42 to move along the axial direction of the fixed sleeve 41.

[0045] Specifically, the fixed sleeve 41 refers to a cylindrical component with a certain height, one end of the fixed sleeve 41 is closed and the other end is open. The columnar mover 42 refers to a columnar component with a certain height, and a winding structure for winding a coil can be provided on the outer wall of the columnar mover 42. The magnetic part refers to a component with magnetism and can generate a stable magnetic field. The magnetic part can be block-shaped, plate-shaped or sheet-shaped, etc. The magnetic part can be fixed to the inner wall of the fixed sleeve 41 by clamping, fastener connection or pasting, etc., and is uniformly distributed along the axis of the fixed sleeve 41. The coil part refers to a structure wound by a wire. When the voice coil motor 4 works, the coil part can be connected with an external circuit, and a magnetic field will also be generated after the coil part is powered on. In this embodiment, when the voice coil motor 4 works, the coil part can be connected with an external circuit, and a magnetic field will also be generated after the coil part is powered on, and interacts with the magnetic field generated by the magnetic part to make the columnar mover 42 move along a straight line or an arc line, and by changing the direction of the current flowing into the coil part (for example, alternating current is flowed in), the reciprocating motion of the columnar mover 42 can be realized. Wherein, the end of the columnar mover 42 away from the fixed sleeve 41 is the driving end of the voice coil motor 4, and the driving end of the columnar mover 42 is directly or indirectly connected with the needle assembly 3, so as to realize the purpose of driving the needle assembly 3 to move.

[0046] In a second aspect, a die bonding apparatus is provided, which comprises the needle device according to any one of the above. It can be understood that the beneficial effects of the second aspect are described above in the first aspect, and will not be repeated here.

[0047] The above is only a preferred embodiment of the present application, and only the technical principle of the present application is specifically described. These descriptions are only for explaining the principle of the present application, and cannot be explained as a limitation on the protection scope of the present application in any way. Based on the above explanation, any modification, equivalent replacement and improvement within the spirit and principle of the present application, and other specific embodiments of the present application which can be easily conceived by those skilled in the art without creative labor, should be included in the protection scope of the present application.

Claims

1. A pin device, characterized in that, The needle device comprises a base, a needle sleeve assembly, a thimble assembly and a voice coil motor, the needle sleeve assembly is fixedly arranged on the base, the needle sleeve assembly has a sliding channel arranged in a first direction, the thimble assembly is inserted into the sliding channel, and the thimble assembly has a freedom degree of movement in the first direction relative to the needle sleeve assembly, the voice coil motor is arranged on the base, and the voice coil motor is used to drive the thimble assembly to reciprocate in the first direction. The thimble assembly and the base are provided with a cross slide rail, the thimble assembly is slidably connected with the base through the cross slide rail, the cross slide rail comprises a main sliding part and two auxiliary sliding parts, the two auxiliary sliding parts are respectively located on both sides of the main sliding part in a second direction, the second direction is arranged at an angle with the first direction, the two auxiliary sliding parts are fixedly arranged on the base, the main sliding part and the two auxiliary sliding parts are slidably connected, the main sliding part has a freedom degree of sliding in the first direction relative to the two auxiliary sliding parts, the thimble assembly is connected with the main sliding part, and a driving end of the voice coil motor is also connected with the main sliding part. Two support blocks are arranged on the base, and the support blocks abut against one side of the auxiliary sliding part away from the main sliding part, an adjusting mechanism is arranged on the support block, and the adjusting mechanism is used to adjust the pressure applied by the auxiliary sliding part to the main sliding part.

2. The pim device of claim 1, wherein The adjusting mechanism comprises a rotating stud and an elastic pushing piece, the rotating stud is arranged through the support block in the second direction, the rotating stud is threadedly connected with the support block, and one end of the rotating stud away from the auxiliary sliding part is further provided with a receiving recess, one end of the elastic pushing piece abuts against the bottom surface of the receiving recess, and the other end of the elastic pushing piece abuts against the auxiliary sliding part, so as to apply a pushing force to the auxiliary sliding part in a direction towards the main sliding part.

3. The pim device of claim 1 wherein, The needle device further comprises a measuring assembly, and the measuring assembly is used to detect the displacement of the main sliding part in the first direction.

4. The pim device of claim 3, wherein The measuring assembly comprises a grating reader and a grating ruler structure, the grating reader is connected to the base, and the grating ruler structure is arranged on the main sliding part and used to cooperate with the grating reader to measure the movement distance of the main sliding part.

5. A thimble assembly as claimed in any one of claims 1 to 4, wherein, The voice coil motor comprises a fixed sleeve and a columnar mover, the fixed sleeve is fixedly arranged on the base, the columnar mover is arranged in the fixed sleeve, the inner wall of the fixed sleeve has a magnetic part, the outer periphery of the columnar mover is provided with a coil part used to communicate with an external circuit, and the coil part is used to interact with the magnetic part after being energized, so as to drive the columnar mover to move in the axial direction of the fixed sleeve.

6. A die bonding apparatus, characterized in that, The needle device comprises the thimble device according to any one of claims 1 to 5.

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