Ultrathin silicon single crystal diamond wire cutting fluid floccule filtering device
By designing an ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device, a combination of cleaning and sealing devices is used to achieve automatic cleaning of flocculent material and convenient disassembly and replacement of the filter screen, solving the problem of high cleaning complexity in existing equipment and improving equipment operating efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-25
- Publication Date
- 2026-04-03
Smart Images

Figure CN224071287U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of flocculent filtration devices, and in particular to a flocculent filtration device for ultrathin silicon single crystal diamond wire cutting fluid. Background Technology
[0002] Against the backdrop of the rapid development of the photovoltaic industry, the preparation technology of monocrystalline silicon wafers has been continuously improved. In particular, diamond wire cutting technology has gradually become the mainstream cutting method due to its advantages such as high efficiency, low cost and environmental protection. However, in the process of diamond wire cutting monocrystalline silicon, a large amount of cutting fluid flocculents are generated. Their presence not only affects the performance and recycling efficiency of the cutting fluid, but may also have an adverse effect on the cutting equipment and the quality of silicon wafers. Therefore, it is necessary to filter the flocculents.
[0003] Currently, among existing cutting fluid filtration equipment, such as the patent with authorization announcement number CN105415084B, this invention belongs to the field of cutting fluid filtration equipment and relates to a cutting fluid filtration device. It includes a conventional filter and a metal filter; the conventional filter includes a filter box, inside which a filter screen is installed, and a liquid inlet is opened at the top of the filter box, pointing towards the inside of the filter screen; the bottom of the filter box is connected to the inlet of the metal filter; the metal filter includes a filter tube, inside which metal filter plates are arranged alternately, penetrating the wall of the filter tube.
[0004] However, during the use of the equipment, it was found that the filter screen needed to be disassembled for cleaning and maintenance, which increased the complexity of cleaning, reduced work efficiency, and affected the normal operation of the equipment. Utility Model Content
[0005] To solve the above-mentioned technical problems, this utility model provides an ultra-thin silicon single crystal diamond wire cutting fluid flocculent filter device that reduces the complexity of cleaning and maintenance after disassembling the filter screen, improves work efficiency, and enhances the ease of operation for disassembling and replacing the filter screen.
[0006] This utility model discloses an ultra-thin silicon single-crystal diamond wire cutting fluid flocculent filtration device, which includes a tank, an inlet pipe, and an outlet pipe. The inlet pipe and outlet pipe are respectively connected and installed on the outer wall of the tank. It also includes a cleaning device, a sealing device, a support ring, and a filter screen. The support ring is installed on the inner wall of the tank, and the bottom end of the filter screen is tightly attached to the top end of the support ring. The filter screen is placed inside the tank between the inlet pipe and the outlet pipe. The cleaning device is installed on the tank for cleaning the filter screen. The sealing device is located at the top opening of the tank and is used to close the tank opening and fix the filter screen. The cutting fluid is delivered to the tank through the inlet pipe and filtered through the filter screen, causing flocculent matter in the cutting fluid to settle at the bottom of the filter screen. The filtered cutting fluid is discharged through the outlet pipe for recycling. When the filter screen needs cleaning, the cleaning device is activated to automatically clean the flocculent matter at the bottom of the filter screen, thereby reducing the complexity of manual cleaning and maintenance of the filter screen and improving work efficiency. By opening the sealing device, the ease of operation for disassembling and replacing the filter screen is improved.
[0007] Preferably, the cleaning device includes a conveyor box, a motor, a conveying pipe, a hollow rod, an absorption box, a collection box, and a vacuum pump. The conveyor box is located at the bottom of the tank. The motor is mounted on the outer wall of the conveyor box. The inlet end of the conveying pipe is connected to the conveyor box, and the outlet end of the conveying pipe is connected to the collection box. A drain valve is installed on the collection box. The vacuum pump is mounted on the outer wall of the collection box, and its inlet end is connected to the collection box. The lower part of the hollow rod rotates and extends into the conveyor box, and the lower part of the hollow rod communicates with the inside of the conveyor box. The bottom end of the hollow rod is connected to the motor output end. The absorption box is connected to... The absorber is positioned at the top of a hollow rod, with an absorption port at the top that contacts the bottom of the filter screen. When cleaning the filter screen is required, a motor drives the hollow rod to rotate, causing the absorber to move circumferentially. Simultaneously, a vacuum pump draws air into the collection box, which in turn draws air into the delivery box through a conveying pipe. This, in turn, draws air into the absorber through the hollow rod, allowing the absorber to collect the fibrous material adhering to the bottom of the filter screen. The collected fibrous material is then transported to the collection box for storage, improving the convenience of automatic cleaning of different parts of the filter screen.
[0008] Preferably, the sealing device includes a top cover, a telescopic rod, and a spring. The top cover is installed at the top opening of the tank, the top end of the telescopic rod is connected to the bottom end of the top cover, and the spring is fitted onto the telescopic rod. When the top cover is installed at the top of the tank, the telescopic rod and the spring press the filter screen downwards, thereby improving the positioning effect of the filter screen and improving the convenience of filter screen installation and operation.
[0009] Preferably, it also includes a storage tank and a control valve. The storage tank is installed on the outer wall of the tank body. The top of the storage tank is connected to the drain pipe, and the bottom of the storage tank is connected to the collection tank through the control valve. When the cutting fluid is discharged outward through the drain pipe, some of the cutting fluid flows into the storage tank for storage. When it is necessary to discharge the flocculent material collected in the collection tank, the control valve is opened to allow the cutting fluid in the storage tank to flow into the collection tank, thereby flushing and cleaning the flocculent material in the collection tank and improving the convenience of cleaning and maintenance of the collection tank.
[0010] Preferably, it also includes a magnet, which is located at the bottom of the telescopic rod; the magnet is attracted to the top of the filter screen by contact, and when the top cover moves upward, the magnet drives the filter screen to move upward, improving the convenience of filter screen disassembly.
[0011] Preferably, it also includes a flow guide platform, which is located at the bottom of the collection box; by setting the flow guide platform, the convenience of discharging and cleaning the flocculent matter in the collection box is improved.
[0012] Preferably, a sealing ring is provided between the support ring and the filter screen to improve the sealing effect at the contact point between the support ring and the filter screen.
[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: the cutting fluid is transported into the tank through the inlet pipe, and the cutting fluid is filtered through the filter screen, causing the flocculent matter in the cutting fluid to settle at the bottom of the filter screen. The filtered cutting fluid is discharged through the drain pipe for recycling. When the filter screen needs to be cleaned, the flocculent matter at the bottom of the filter screen is automatically cleaned by activating the cleaning device, thereby reducing the complexity of personnel disassembling and cleaning the filter screen and improving work efficiency. By opening the sealing device, the operation convenience of disassembling and replacing the filter screen is improved. Attached Figure Description
[0014] Figure 1 This is a schematic diagram of the isometric structure of this utility model;
[0015] Figure 2 This is an isometric structural diagram of the connection between the drain pipe and the storage tank, etc.
[0016] Figure 3 This is a partial isometric structural diagram of the connection between the tank body and the support ring, etc.
[0017] Figure 4 This is a partial isometric structural diagram of the connection between the hollow rod and the absorption box, etc.
[0018] Figure 5 This is a partial isometric structural diagram of the connection between the top cover and the telescopic rod, etc.
[0019] The following are labeled in the attached diagram: 1. Tank body; 2. Inlet pipe; 3. Drain pipe; 4. Support ring; 5. Filter screen; 6. Conveying box; 7. Motor; 8. Conveying pipe; 9. Hollow rod; 10. Absorption box; 11. Collection box; 12. Vacuum pump; 13. Top cover; 14. Telescopic rod; 15. Spring; 16. Storage box; 17. Control valve; 18. Magnet; 19. Guide platform. Detailed Implementation
[0020] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. This utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to make the disclosure of this utility model more thorough and complete. Example 1
[0021] like Figures 1 to 5 As shown, the present invention provides a flocculent filtration device for ultra-thin silicon single crystal diamond wire cutting fluid, which includes a tank 1, an inlet pipe 2, and an outlet pipe 3. The inlet pipe 2 and the outlet pipe 3 are respectively connected and installed on the outer side wall of the tank 1. It also includes a cleaning device, a sealing device, a support ring 4, and a filter screen 5. The support ring 4 is installed on the inner side wall of the tank 1. The bottom end of the filter screen 5 is tightly attached to the top end of the support ring 4. The filter screen 5 is installed inside the tank 1 between the inlet pipe 2 and the outlet pipe 3. The tank 1 is provided with a cleaning device for cleaning the filter screen 5. The sealing device is installed at the top opening of the tank 1 for sealing the opening of the tank 1 and fixing the filter screen 5.
[0022] like Figure 2 As shown, the cleaning device includes a conveying box 6, a motor 7, a conveying pipe 8, a hollow rod 9, an absorption box 10, a collection box 11, and a vacuum pump 12. The conveying box 6 is located at the bottom of the tank 1. The motor 7 is installed on the outer wall of the conveying box 6. The input end of the conveying pipe 8 is connected to the conveying box 6, and the output end of the conveying pipe 8 is connected to the collection box 11. A drain valve is provided on the collection box 11. The vacuum pump 12 is installed on the outer wall of the collection box 11, and the input end of the vacuum pump 12 is connected to the collection box 11. The lower part of the hollow rod 9 rotates and extends into the conveying box 6, and the lower part of the hollow rod 9 communicates with the inside of the conveying box 6. The bottom end of the hollow rod 9 is connected to the output end of the motor 7. The absorption box 10 is connected and located at the top of the hollow rod 9. An absorption port is provided at the top of the absorption box 10, and the absorption port contacts the bottom of the filter screen 5.
[0023] In this embodiment, the cutting fluid is delivered to the tank 1 through the inlet pipe 2 and filtered through the filter screen 5, causing flocculent matter in the cutting fluid to settle at the bottom of the filter screen 5. The filtered cutting fluid is discharged through the drain pipe 3 for recycling. When the filter screen 5 needs to be cleaned, the cleaning device is activated to automatically clean the flocculent matter at the bottom of the filter screen 5, thereby reducing the complexity of personnel disassembling and cleaning the filter screen 5 and improving work efficiency. By opening the sealing device, the ease of operation for disassembling and replacing the filter screen 5 is improved. Example 2
[0024] Based on Example 1, this utility model provides an ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device, such as... Figure 3 As shown, the sealing device includes a top cover 13, a telescopic rod 14 and a spring 15. The top cover 13 is installed on the top opening of the tank body 1, the top end of the telescopic rod 14 is connected to the bottom end of the top cover 13, and the spring 15 is fitted onto the telescopic rod 14.
[0025] like Figure 2 As shown, it also includes a storage tank 16 and a control valve 17. The storage tank 16 is installed on the outer wall of the tank body 1. The top of the storage tank 16 is connected to the drain pipe 3, and the bottom of the storage tank 16 is connected to the collection tank 11 through the control valve 17.
[0026] like Figure 4 As shown, it also includes a magnet 18, which is disposed at the bottom end of the telescopic rod 14;
[0027] like Figure 2 As shown, it also includes a flow guide platform 19, which is disposed at the bottom of the collection box 11;
[0028] like Figure 2 As shown, a sealing ring is provided between the support ring 4 and the filter screen 5;
[0029] In this embodiment, when the filter screen 5 needs to be cleaned, the hollow rod 9 is rotated by the motor 7, causing the hollow rod 9 to move the absorption box 10 circumferentially. At the same time, the vacuum pump 12 draws air into the collection box 11, causing the collection box 11 to draw air into the conveying box 6 through the conveying pipe 8. This causes the conveying box 6 to draw air into the absorption box 10 through the hollow rod 9, allowing the absorption box 10 to collect the flocculent material attached to the bottom of the filter screen 5. The collected flocculent material is then transported to the collection box 11 for storage, improving the convenience of automatic cleaning of different positions of the filter screen 5. After the top cover 13 is installed on the top of the tank 1, the filter screen 5 is pressed downward by the telescopic rod 14 and the spring 15, thereby improving the positioning effect of the filter screen 5 and improving the convenience of installation and operation of the filter screen 5.
[0030] This utility model discloses an ultra-thin silicon single crystal diamond wire cutting fluid flocculent filtration device. During operation, the cutting fluid is delivered to the tank 1 through the inlet pipe 2 and filtered through the filter screen 5, causing the flocculent matter in the cutting fluid to settle at the bottom of the filter screen 5. The filtered cutting fluid is discharged through the drain pipe 3 for recycling. When the filter screen 5 needs to be cleaned, the cleaning device is activated to automatically clean the flocculent matter at the bottom of the filter screen 5.
[0031] The motor 7 and vacuum pump 12 of the ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device of this utility model are commercially available. Technical personnel in this industry only need to install and operate them according to the accompanying instruction manual, without requiring any creative work from those skilled in the art.
[0032] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.
Claims
1. A flocculent filtration device for ultrathin silicon single crystal diamond wire cutting fluid, further comprising a tank (1), an inlet pipe (2), and a drain pipe (3), wherein the inlet pipe (2) and the drain pipe (3) are respectively connected to the outer wall of the tank (1); characterized in that, It also includes a cleaning device, a sealing device, a support ring (4) and a filter screen (5). The support ring (4) is installed on the inner wall of the tank (1). The bottom end of the filter screen (5) is close to the top end of the support ring (4). The filter screen (5) is set inside the tank (1) between the inlet pipe (2) and the outlet pipe (3). The tank (1) is equipped with a cleaning device for cleaning the filter screen (5). The sealing device is set at the top opening of the tank (1) for sealing the opening of the tank (1) and for fixing the filter screen (5).
2. The ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device as described in claim 1, characterized in that, The cleaning device includes a conveying box (6), a motor (7), a conveying pipe (8), a hollow rod (9), an absorption box (10), a collection box (11), and a vacuum pump (12). The conveying box (6) is located at the bottom of the tank (1). The motor (7) is installed on the outer wall of the conveying box (6). The input end of the conveying pipe (8) is connected to the conveying box (6), and the output end of the conveying pipe (8) is connected to the collection box (11). A drain valve is provided on the collection box (11). The vacuum pump (12) is installed on the outer wall of the collection box (11). The input end of the vacuum pump (12) is connected to the collection box (11). The lower part of the hollow rod (9) rotates into the conveying box (6), and the lower part of the hollow rod (9) is connected to the inside of the conveying box (6). The bottom end of the hollow rod (9) is connected to the output end of the motor (7). The absorption box (10) is connected to the top of the hollow rod (9). An absorption port is provided at the top of the absorption box (10), and the absorption port is in contact with the bottom of the filter screen (5).
3. The ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device as described in claim 1, characterized in that, The sealing device includes a top cover (13), a telescopic rod (14) and a spring (15). The top cover (13) is installed at the top opening of the tank (1). The top end of the telescopic rod (14) is connected to the bottom end of the top cover (13). The spring (15) is fitted onto the telescopic rod (14).
4. The ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device as described in claim 2, characterized in that, It also includes a storage tank (16) and a control valve (17). The storage tank (16) is installed on the outer wall of the tank body (1). The top of the storage tank (16) is connected to the drain pipe (3), and the bottom of the storage tank (16) is connected to the collection tank (11) through the control valve (17).
5. The ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device as described in claim 3, characterized in that, It also includes a magnet (18), which is located at the bottom of the telescopic rod (14).
6. The ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device as described in claim 2, characterized in that, It also includes a flow guide (19), which is located at the bottom of the collection box (11).
7. The ultrathin silicon single crystal diamond wire cutting fluid flocculent filtration device as described in claim 1, characterized in that, A sealing ring is provided between the support ring (4) and the filter screen (5).
Citation Information
Patent Citations
Cutting fluid filtration device
CN105415084B