Filter element and filter device for filtering fluorine oil of vacuum pump

Abstract

The filter element comprises a filter screen, a filter barrel and a filter element cover, the filter screen is arranged in the filter barrel, the filter element cover is detachably arranged on the upper portion of the filter barrel, an oil inlet and an oil outlet are formed in the filter element cover, the filter screen comprises a first barrel body and a second barrel body, and the first barrel body and the second barrel body are arranged on the filter barrel. The first barrel is arranged inside the second barrel, the oil inlet is connected with the first barrel, the oil outlet is located on the outer side of the second barrel, filter paper is arranged on the inner wall of the second barrel, and a filtering object is arranged between the first barrel and the second barrel. According to the filter element, the to-be-filtered fluorine oil of the vacuum pump can be quickly filtered, the filter object and the filter paper of the filter element can be more conveniently replaced through the filter element cover and the filter barrel which are detachably connected, so that the purpose of recycling one filter element is achieved, the whole filtering process is short in time and good in sealing performance, and secondary pollution can be prevented.

Description

Technical Field

[0001] This application relates to the field of filtration device technology, and in particular to a filter element and filtration device for vacuum pump fluorinated oil filtration. Background Technology

[0002] Currently, the common methods for filtering fluorinated vacuum pump oil are filter paper filtration and ordinary oil filter element filtration. Both rely on filter paper filtration. At present, qualitative filter paper is commonly used for filtering fluorinated vacuum pump oil, but its filtration effect is poor and it is not suitable for large-area fluorinated vacuum pump oil filtration.

[0003] Filter paper has a long filtration time and poor effect on fluorinated vacuum pump oil. For discoloration fluorinated vacuum pump oil, problems such as blackening, yellowing and odor still exist after filtration, which have not been effectively solved. The use of filter paper has high environmental requirements. Long-term exposure can easily lead to the mixing of other foreign matter, resulting in secondary pollution of fluorinated vacuum pump oil.

[0004] Therefore, it is necessary to design a filter element for vacuum pump fluorinated oil filtration to solve the above problems. Utility Model Content

[0005] In view of this, in order to overcome the defects of the prior art, this utility model provides a filter element and filter device for vacuum pump fluorine oil filtration, which effectively solves the problems of poor filtration effect, blackening, yellowing and odor after filtration, and easy secondary pollution caused by the existing filtration method.

[0006] According to a first aspect of this utility model, a filter element for fluorinated oil filtration in a vacuum pump is provided, wherein the filter element includes a filter screen, a filter barrel, and a filter element cover. The filter screen is disposed inside the filter barrel, and the filter element cover is detachably disposed on the upper part of the filter barrel. The filter element cover has an oil inlet and an oil outlet. The filter screen includes a first cylinder and a second cylinder. The first cylinder is disposed inside the second cylinder. The oil inlet is connected to the first cylinder. The oil outlet is located on the outer side of the second cylinder. Filter paper is disposed on the inner wall of the second cylinder. Filter material is disposed between the first cylinder and the second cylinder.

[0007] Preferably, the height of the first cylinder and the height of the second cylinder are higher than the height of the filter barrel.

[0008] Preferably, the filter paper is attached to the inner wall of the second cylinder, and a sealing element is provided at the connection between the filter element cover and the second cylinder, so that the filter paper can be replaced in the second cylinder.

[0009] Preferably, the filter element cover has an abutment groove on its end face facing the filter barrel. The abutment groove is formed as an annular groove, with the inner ring of the annular groove abutting the first cylinder and the outer ring of the annular groove abutting the second cylinder.

[0010] Preferably, the seal is disposed at the outer ring of the annular groove.

[0011] Preferably, both the first cylinder and the second cylinder have multiple filter openings.

[0012] Preferably, the outer wall of the filter bucket near the end of the filter element cover is provided with external threads, the filter element cover includes a fastening part extending toward the filter bucket, the inner wall of the fastening part is provided with internal threads, and the filter bucket is detachably connected to the filter element cover through the external threads on the outer wall and the internal threads of the fastening part.

[0013] Preferably, both the oil inlet and the oil outlet extend in a direction away from the filter barrel to form a connecting portion, wherein the connecting portion of the oil inlet is used to connect to the oil inlet pipe, and the connecting portion of the oil outlet is used to connect to the oil outlet pipe.

[0014] Preferably, a accommodating space for filling the filter material is provided between the first cylinder and the second cylinder, so that when the filter element cover is separated from the filter barrel, the filter material can be filled into the accommodating space or taken out from the accommodating space.

[0015] According to a second aspect of the present invention, a filtration device is provided, wherein the filtration device includes a filter element for fluorinated oil filtration of a vacuum pump as described above.

[0016] According to the present invention, the filter element for vacuum pump fluorine oil filtration, through the cooperation of the filter element cover, filter barrel and filter screen, enables the vacuum pump fluorine oil to be filtered to be filtered quickly. The filter element cover and filter barrel are detachably connected, making it easier to replace the filter material and filter paper, so as to achieve the purpose of recycling one filter element. Through the filter screen including the first cylinder and the second cylinder, the vacuum pump fluorine oil to be filtered can be filtered twice, while the whole filtration process is short, the sealing performance is good, and secondary pollution can be prevented.

[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the structure of a filter element for fluorinated oil filtration in a vacuum pump according to an embodiment of the present invention is shown.

[0020] Figure 2 A cross-sectional view of a filter element for fluorinated oil filtration in a vacuum pump according to an embodiment of the present invention is shown.

[0021] Figure 3 A cross-sectional view of a vacuum pump fluorine oil filtration filter element according to an embodiment of the present invention is shown from another perspective.

[0022] Figure 4 A bottom view of the filter cover according to an embodiment of the present invention is shown;

[0023] Figure 5 A schematic diagram of the hidden filter cover for a vacuum pump fluorine oil filter element according to an embodiment of the present invention is shown.

[0024] Reference numerals in the attached drawings: 1-Filter element cover; 101-Oil inlet; 102-Oil outlet; 103-Abutting groove; 104-Connecting part; 105-Snap-fitting part; 2-Filter barrel; 3-Filter screen; 301-First cylinder; 302-Second cylinder; 4-Filter paper; 5-Accommodation space; 6-Sealing element. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0026] In the description of the embodiments of this application, it should be noted that the terms "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this application is in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0027] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of the embodiments of this application, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0029] According to a first aspect of this utility model, a filter element for fluorinated oil filtration in a vacuum pump is provided, such as... Figures 1 to 5 As shown, the vacuum pump fluorinated oil filter element is used for filtering fluorinated vacuum pump oil. The vacuum pump fluorinated oil filter element includes a filter element cover 1, a filter barrel 2, and a filter screen 3.

[0030] In the following description, reference will be made to Figures 1 to 5 This section describes the detailed structure of the filter element cover 1, filter barrel 2, and filter screen 3 of the fluorinated oil filtration filter element for the vacuum pump.

[0031] like Figures 1 to 3As shown, in this embodiment, the filter screen 3 serves as the main filtration component and is disposed inside the filter barrel 2. The filter screen 3 can also serve as a support component for other filter materials. The filter screen 3 includes two nested cylindrical bodies 301 and 302. Both the first cylindrical body 301 and the second cylindrical body 302 can be formed into cylindrical structures, with the first cylindrical body 301 having a smaller diameter and the second cylindrical body 302 having a larger diameter. The first cylindrical body 301 is disposed inside the second cylindrical body 302 to form a double-layer filtration structure. The filter screen 3 is disposed inside the filter barrel 2, which serves as a container and support component, allowing the vacuum pump fluorinated oil to be filtered to pass through.

[0032] Furthermore, the filter element cover 1 is detachably mounted on the upper part of the filter barrel 2. The filter element cover 1 has an oil inlet 101 and an oil outlet 102. The vacuum pump fluorine oil to be filtered enters the interior of the filter barrel 2 through the oil inlet 101 and contacts the filter screen 3 to achieve filtration. The filtered vacuum pump fluorine oil flows out through the oil outlet 102. Specifically, the oil inlet 101 is connected to the first cylinder 301 so that the vacuum pump fluorine oil to be filtered can first contact the first cylinder 301 and then contact the second cylinder 302, thereby completing the secondary filtration effect. The oil outlet 102 is located on the outside of the second cylinder 302. The vacuum pump fluorine oil after secondary filtration passes through the filter screen 3 and is finally discharged through the oil outlet 102.

[0033] Furthermore, the inner wall of the second cylinder 302 is provided with filter paper 4. Filter paper 4 can be common qualitative filter paper or other materials capable of filtering vacuum pump fluorinated oil. The filter paper 4 enhances the filtration of the vacuum pump fluorinated oil to be filtered, adsorbing impurities and pigments. A filter medium is disposed between the first cylinder 301 and the second cylinder 302. This filter medium can fill the space between the first cylinder 301 and the second cylinder 302, thereby enabling the filter screen 3 to achieve a superior filtration effect. In this embodiment, the filter medium can be, for example, silica gel decolorizing sand or activated clay. The choice of silica gel decolorizing sand or activated clay can be tailored to the type of vacuum pump fluorinated oil to be filtered. Silica gel decolorizing sand or activated clay are commonly used filter materials in the prior art, possessing high adsorption capacity and good decolorization performance.

[0034] In addition, the filter element for the vacuum pump fluorinated oil filtration can be subjected to high-pressure filtration using a booster machine to improve the filtration effect.

[0035] The vacuum pump fluorine oil filtration filter element, through the cooperation of filter element cover 1, filter barrel 2 and filter screen 3, enables the vacuum pump fluorine oil to be filtered to be filtered quickly. The filter element cover 1 and filter barrel 2, which are detachably connected, make it easier to replace the filter material and filter paper 4, so as to achieve the purpose of recycling a filter element. Through the filter screen 3, which includes the first cylinder 301 and the second cylinder 302, the vacuum pump fluorine oil to be filtered can be filtered twice, while the whole filtration process is short, has good sealing performance, and can prevent secondary pollution.

[0036] Preferably, such as Figures 1 to 3 As shown, in this embodiment, the height of the first cylinder 301 and the height of the second cylinder 302 are higher than the height of the filter cartridge 2. In order to achieve a good seal at the connection between the first cylinder 301 and the second cylinder 302 and the filter element cover 1, the height of the first cylinder 301 and the height of the second cylinder 302 are higher than the height of the filter cartridge 2, so as to facilitate the addition of the following sealing element 6 at the connection between the first cylinder 301 and the second cylinder 302 and the filter element cover 1.

[0037] Preferably, such as Figures 1 to 5 As shown, in this embodiment, the filter paper 4 is attached to the inner wall of the second cylinder 302, and a sealing element 6 is provided at the connection between the filter element cover 1 and the second cylinder 302, so that the filter paper 4 can be replaced in the second cylinder 302. To allow for the replacement of the filter paper 4, the filter element cover 1 and the filter barrel 2 are designed to be detachably connected. To ensure sealing performance, the height of the first cylinder 301 and the second cylinder 302 are higher than the height of the filter barrel 2. To ensure no air leakage, a sealing element 6 is provided at the connection between the first cylinder 301, the second cylinder 302, and the filter element cover 1. Thus, when using this vacuum pump fluorine oil filtration filter element, the filter paper 4 can be replaced as appropriate according to the usage conditions. The sealing element 6 can be, for example, a rubber gasket. Rubber gaskets have excellent chemical and sealing properties, ensuring normal filtration of the vacuum pump fluorine oil.

[0038] Preferably, such as Figure 3 and Figure 4 As shown in the embodiment, the end face of the filter element cover 1 facing the filter barrel 2 is provided with an abutment groove 103. The abutment groove 103 is formed as an annular groove, with the inner ring of the annular groove abutting the first cylinder 301 and the outer ring of the annular groove abutting the second cylinder 302. In order to make the installation of the first cylinder 301 and the second cylinder 302 stable and easy to reinstall after disassembly, the filter element cover 1 is provided with an abutment groove 103.

[0039] Preferably, such as Figures 3 to 5 As shown, in this embodiment, the sealing element 6 is disposed at the outer ring of the annular groove. That is, the sealing element 6 is disposed at the part where the second cylinder 302 abuts against the filter element cover 1 to ensure the sealing of the connection.

[0040] Preferably, such as Figure 2 and Figure 3 As shown, in this embodiment, both the first cylinder 301 and the second cylinder 302 have multiple filter openings. The filter 3 can be formed into a cylindrical structure with multiple filter openings made of stainless steel to facilitate the passage of the vacuum pump fluorinated oil to be filtered.

[0041] Preferably, such as Figures 1 to 5 As shown in the embodiment, the outer wall of the filter barrel 2 near the end of the filter element cover 1 is provided with external threads. The filter element cover 1 includes a fastening portion 105 extending toward the filter barrel 2, and the inner wall of the fastening portion 105 is provided with internal threads. The filter barrel 2 is detachably connected to the filter element cover 1 through the external threads on its outer wall and the internal threads of the fastening portion 105. The filter element cover 1 can be tightened to the upper part of the filter barrel 2 by means of a threaded connection. When tightened, the filter element cover 1 can compress the sealing element 6 located on the second cylinder 302 of the filter screen 3, thereby ensuring the sealing performance of the connection.

[0042] Preferably, such as Figures 1 to 3 As shown in the embodiment, both the oil inlet 101 and the oil outlet 102 extend away from the filter tank 2 to form a connecting portion 104. The connecting portion 104 can be formed into a cylindrical structure, which can connect the external oil inlet pipe and the oil outlet pipe. That is, the connecting portion 104 of the oil inlet 101 is used to connect the oil inlet pipe, and the connecting portion 104 of the oil outlet 102 is used to connect the oil outlet pipe. The vacuum pump fluorine oil to be filtered enters the interior of the filter tank 2 through the connecting portion 104 of the oil inlet 101, and the filtered vacuum pump fluorine oil is discharged through the connecting portion 104 of the oil outlet 102.

[0043] Preferably, such as Figure 2 and Figure 3 As shown in the embodiment, a accommodating space 5 for filling the filter material is provided between the first cylinder 301 and the second cylinder 302. When the filter element cover 1 is separated from the filter barrel 2, the filter material can be filled into or removed from the accommodating space 5. That is, the filter element for vacuum pump fluorinated oil filtration can replace both the filter material and the filter paper 4 simultaneously to ensure the best filtration effect during filtration.

[0044] The process for filtering the fluorinated oil filter element in this vacuum pump is as follows: (e.g., ...) Figure 2 As shown, on a flat surface, the vacuum pump fluorinated oil to be filtered is... Figure 2Moving in the direction indicated by the arrow, the oil first enters the interior of the first cylinder 301 through the oil inlet 101, then contacts the filter material filled between the first cylinder 301 and the second cylinder 302 for primary filtration. It then continues moving, contacting the filter paper 4 located inside the second cylinder 302 for secondary filtration. The filtered vacuum pump fluorinated oil is then discharged through the oil outlet 102. Furthermore, to further improve the filtration effect, multiple vacuum pump fluorinated oil filter elements can be connected in series, allowing the fluorinated oil to pass through multiple filter elements to ensure optimal filtration. Both the filter material and the filter paper 4 of the vacuum pump fluorinated oil filter element can be replaced. Additionally, a booster compressor can be used for rapid filtration of fluorinated vacuum pump oil, ultimately restoring the filtered vacuum pump fluorinated oil to its original color.

[0045] This vacuum pump fluorine oil filtration filter element, through the cooperation of the filter element cover, filter barrel, and filter screen, enables the vacuum pump fluorine oil to be filtered to be filtered quickly. The detachable filter element cover and filter barrel make it easier to replace the filter material and filter paper, so as to achieve the purpose of recycling a filter element. Through the filter screen including the first cylinder and the second cylinder, the vacuum pump fluorine oil to be filtered can be filtered twice, while the whole filtration process is short, has good sealing performance, and can prevent secondary contamination.

[0046] Furthermore, according to a second aspect of this utility model, a filtration device is provided, the filtration device comprising a filter element for filtering vacuum pump fluorinated oil as described above. This filtration device, utilizing the filter element for filtering vacuum pump fluorinated oil as described above, can filter vacuum pump fluorinated oil and restore the vacuum pump fluorinated oil to its original color.

[0047] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The protection scope of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the technical scope disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the protection scope of this application. Therefore, the protection scope of this application should be determined by the protection scope of the claims.

Claims

1. A filter element for fluorinated oil filtration in a vacuum pump, characterized in that, The filter element for fluorinated oil filtration in the vacuum pump includes a filter screen, a filter barrel, and a filter element cover. The filter screen is disposed inside the filter barrel, and the filter element cover is detachably disposed on the upper part of the filter barrel. The filter element cover has an oil inlet and an oil outlet. The filter screen includes a first cylinder and a second cylinder. The first cylinder is disposed inside the second cylinder. The oil inlet is connected to the first cylinder, and the oil outlet is located on the outside of the second cylinder. Filter paper is disposed on the inner wall of the second cylinder, and filter material is disposed between the first cylinder and the second cylinder.

2. The filter element for vacuum pump fluorinated oil filtration according to claim 1, characterized in that, The height of the first cylinder and the height of the second cylinder are higher than the height of the filter barrel.

3. The filter element for vacuum pump fluorinated oil filtration according to claim 1, characterized in that, The filter paper is attached to the inner wall of the second cylinder, and a sealing element is provided at the connection between the filter element cover and the second cylinder, so that the filter paper can be replaced in the second cylinder.

4. The filter element for vacuum pump fluorinated oil filtration according to claim 3, characterized in that, The filter element cover has an abutment groove on the end face of the filter barrel. The abutment groove is formed into an annular groove. The inner ring of the annular groove abuts against the first cylinder body, and the outer ring of the annular groove abuts against the second cylinder body.

5. The filter element for vacuum pump fluorinated oil filtration according to claim 4, characterized in that, The seal is disposed at the outer ring of the annular groove.

6. The filter element for vacuum pump fluorinated oil filtration according to claim 1, characterized in that, Both the first cylinder and the second cylinder have multiple filter openings.

7. The filter element for vacuum pump fluorinated oil filtration according to claim 1, characterized in that, The outer wall of the filter barrel near the end of the filter element cover is provided with external threads. The filter element cover includes a fastening part extending toward the filter barrel. The inner wall of the fastening part is provided with internal threads. The filter barrel is detachably connected to the filter element cover through the external threads on the outer wall and the internal threads of the fastening part.

8. The filter element for vacuum pump fluorinated oil filtration according to claim 1, characterized in that, Both the oil inlet and the oil outlet extend away from the filter barrel to form a connecting portion. The connecting portion of the oil inlet is used to connect to the oil inlet pipe, and the connecting portion of the oil outlet is used to connect to the oil outlet pipe.

9. The filter element for vacuum pump fluorinated oil filtration according to claim 1, characterized in that, A accommodating space for filling the filter material is provided between the first cylinder and the second cylinder. When the filter element cover is separated from the filter barrel, the filter material can be filled into the accommodating space or taken out from the accommodating space.

10. A filtration device, characterized in that, The filtration device includes a filter element for vacuum pump fluorinated oil filtration as described in any one of claims 1 to 9.

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