Furnace tube cleaning machine

Abstract

The utility model relates to the field of semiconductors, in particular to a furnace tube cleaning machine, which is characterized in that two groups of supporting mechanisms which are oppositely arranged along the width direction of a cleaning tank are arranged in the bottom of the cleaning tank, and a driving component for driving a furnace tube to rotate is arranged in the cleaning tank between the two groups of supporting mechanisms; the supporting mechanism comprises a supporting shaft extending in the length direction of the cleaning tank, a plurality of supporting rollers evenly arranged at intervals in the length direction of the supporting shaft are coaxially and fixedly installed on the supporting shaft, the two ends of the supporting shaft are rotationally installed on movable supports respectively, and sliding bases are fixedly installed at the lower ends of the movable supports. A sliding rail matched with the sliding seat is fixedly mounted on the bottom wall of the cleaning tank, the sliding rail extends in the width direction of the cleaning tank, and a limiting mechanism used for locking the sliding seat on the sliding rail is arranged on the sliding seat; after the limiting screws are loosened, the sliding seat and the movable support can slide left and right along the sliding rails, so that the distance between the left supporting shaft and the right supporting shaft is adjusted, and furnace tubes of different sizes can be supported through the supporting rollers on the two supporting shafts.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to a furnace tube cleaning machine. Background Technology

[0002] The furnace tube is used for wafer diffusion. After a period of use, deposits will form on the inner and outer walls of the quartz furnace tube, causing a decline in equipment performance. Therefore, the furnace tube needs to be cleaned regularly.

[0003] In the prior art, utility model patent application number CN202323535479.2 discloses a furnace tube cleaning device that prevents breakage. A cleaning component is installed at the top of the inside of the cleaning box, and an auxiliary rotating component is installed on the front and rear sides of the bottom of the cleaning box. A drive component is installed in the middle of the bottom of the cleaning box. By installing multiple equally spaced anti-corrosion bearings on the fixing rods of the two auxiliary rotating components, the furnace tube is subjected to more uniform force when rotating, which can ensure that the furnace tube is under uniform force during rotation, avoid damage, and thus improve the service life of the furnace tube.

[0004] However, the distance between the two auxiliary rotating components of the aforementioned furnace tube cleaning device is fixed and cannot be adjusted, so it can only be used for furnace tubes of one size, resulting in poor compatibility, which needs to be improved. Utility Model Content

[0005] The purpose of this invention is to provide a furnace tube cleaning machine that is applicable to furnace tubes of different sizes, thereby addressing the deficiencies mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A furnace tube cleaning machine includes a long, narrow cleaning tank. Two sets of support mechanisms are arranged opposite each other along the width direction of the cleaning tank at its bottom. A drive assembly for rotating the furnace tube is located within the cleaning tank between the two sets of support mechanisms. Each support mechanism includes a support shaft extending along the length direction of the cleaning tank. Multiple support rollers, evenly spaced along the length direction, are coaxially fixedly mounted on the support shaft. The support rollers support the bottom side of the furnace tube. Both ends of the support shaft are rotatably mounted on a movable bracket. A slide block is fixedly mounted at the lower end of the movable bracket. A slide rail matching the slide block is fixedly mounted on the bottom wall of the cleaning tank. The slide rail extends along the width direction of the cleaning tank. A limiting mechanism on the slide rail is provided for locking the slide block.

[0008] As a further improvement, the drive assembly includes a drive shaft driven by a motor, the drive shaft extending along the length of the cleaning tank, and a support assembly on the drive shaft. The support assembly includes two support plates arranged opposite each other along the length of the cleaning tank, the support plates being fixedly installed on the bottom wall of the cleaning tank. Two idler rollers arranged opposite each other along the width of the cleaning tank are rotatably installed between the two support plates. The idler rollers are arranged parallel to the drive shaft, and the drive shaft is connected to the two idler rollers by belts. A transmission belt for supporting the bottom of the furnace tube is sleeved between the two idler rollers.

[0009] As a further improvement, the support assembly is provided with multiple sets evenly spaced along the length direction of the drive shaft.

[0010] As a further improvement, a plurality of transmission belts are sleeved between the two idlers; the outer circumferential surface of the idler is provided with a plurality of annular baffles evenly spaced along its length, and the transmission belts are sleeved on the idler located between two adjacent annular baffles.

[0011] As a further improvement, the limiting mechanism includes a limiting screw screwed onto the slide block for abutting against the slide rail.

[0012] Compared with the prior art, the beneficial effects of this utility model are:

[0013] 1. After loosening the limit screw, the slide block and movable bracket can slide left and right along the slide rail to adjust the distance between the left and right support shafts so that the support rollers on the two support shafts can provide support for furnace tubes of different sizes; after adjusting the slide block and movable bracket to the position, tighten the limit screw, and the limit screw will press against the top of the slide rail to lock the position of the slide block.

[0014] 2. This application uses a drive shaft to drive two idler rollers to rotate synchronously. The two idler rollers drive the transmission belt to rotate, which in turn drives the furnace tube to rotate. When the furnace tube is pressed against the top of the transmission belt between the two idler rollers, the top of the transmission belt is pressed down, thereby increasing the contact area between the transmission belt and the furnace tube. This can drive the furnace tube to rotate more efficiently and avoid slippage. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1This is a structural schematic diagram of an embodiment of the present utility model;

[0017] Figure 2 This is a schematic diagram of the internal structure of the cleaning tank according to an embodiment of the present invention;

[0018] Figure 3 This is a cross-sectional view of the cleaning tank according to an embodiment of the present utility model;

[0019] Figure 4 This is a schematic diagram of the support mechanism and drive assembly according to an embodiment of the present invention;

[0020] Figure 5 This is a schematic diagram of the support component according to an embodiment of the present utility model.

[0021] In the diagram: 1-Chassis; 2-Cleaning tank; 3-Furnace tube; 4-Robot arm mechanism; 5-Furnace tube hook; 6-Support mechanism; 7-Drive assembly; 8-Support shaft; 9-Support roller; 10-Modible bracket; 11-Slide seat; 12-Slide rail; 13-Strip groove; 14-Protruding strip; 15-Limit screw; 16-Motor; 17-Drive shaft; 18-Support assembly; 19-Support plate; 20-Idler roller; 21-Belt; 22-Transmission belt; 23-Annular baffle. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] like Figures 1 to 5 As shown, the furnace tube cleaning machine includes a housing 1. The housing 1 has multiple cleaning tanks 2 arranged horizontally at intervals. The multiple cleaning tanks 2 are filled with different cleaning solutions. The top of the housing 1 is equipped with a robotic arm mechanism 4 for moving the furnace tubes 3 in different cleaning tanks 2. The robotic arm mechanism 4 is equipped with furnace tube hooks 5 for hoisting the furnace tubes 3.

[0024] Specifically, the cleaning tank 2 is a long strip extending from front to back, such as... Figure 2 and Figure 3As shown, the cleaning tank 2 has an opening at the top, and two sets of support mechanisms 6 are arranged opposite each other along the width direction of the cleaning tank 2 at the bottom. A drive assembly 7 for rotating the furnace tube 3 is located within the cleaning tank 2 between the two sets of support mechanisms 6. In use, the furnace tube 3 is hoisted into the cleaning tank 2 by a robotic arm mechanism 4, so that the bottom of the furnace tube 3 contacts the drive assembly 7. Simultaneously, the two sets of support mechanisms 6 support the furnace tube 3 on opposite sides of its bottom, thus preventing the furnace tube 3 from rolling off the top of the drive assembly 7.

[0025] In this embodiment, the support mechanism includes a support shaft 8 extending back and forth along the length of the cleaning tank 2, such as... Figure 4 As shown, multiple support rollers 9 are coaxially fixedly mounted on the support shaft 8, evenly spaced along its length. A space is formed between adjacent support rollers 9 to avoid the furnace tube hook 5. The support rollers 9 are supported on the bottom side of the furnace tube 3. Both ends of the support shaft 8 are rotatably mounted on movable brackets 10 via bearings. An inverted U-shaped slide block 11 is bolted to the lower end of the movable bracket 10. A slide rail 12 matching the slide block 11 is bolted to the bottom wall of the cleaning tank 2. The slide rail 12 extends laterally along the width of the cleaning tank 2. Strip grooves 13 extending along its length are provided on the front and rear sides of the slide rail 12. The inner sides of the two vertical walls of the slide block 11 are integrally formed with protrusions 14 that match the strip grooves 13, thereby improving the stability of the slide block 11 sliding along the slide rail 12. In addition, to improve the stability between the two movable brackets 10, a connecting plate is bolted between the two movable brackets 10 located below the support shaft 8.

[0026] The slide block 11 is provided with a limiting mechanism on the slide rail 12 for locking it. In this embodiment, the limiting mechanism includes a limiting screw 15 screwed onto the slide block 11 for abutting against the slide rail 12. The top wall of the slide block 11 is provided with a vertically penetrating screw hole, and the limiting screw 15 is screwed into the screw hole on the top wall of the slide block 11.

[0027] After loosening the limiting screw 15, the slide block 11 and the movable bracket 10 can be slid left and right along the slide rail 12 to adjust the distance between the left and right support shafts 8, so that the support rollers 9 on the two support shafts 8 can provide support for furnace tubes of different sizes. After adjusting the slide block 11 and the movable bracket 10 into place, tighten the limiting screw 15, so that the limiting screw 15 abuts against the top of the slide rail 12, thereby locking the position of the slide block 11. In addition, a scale can be set on the slide rail 12 to make uniform adjustment of the support shafts 8 on both sides.

[0028] The drive assembly includes a drive shaft 17 driven to rotate by a motor 16. The drive shaft 17 extends back and forth along the length of the cleaning tank 2. The motor 16 is mounted on the rear end of the cleaning tank 2 by bolts. The rotating shaft of the motor 16 extends forward into the cleaning tank 2 and is connected to the rear end of the drive shaft 17 by a coupling. The front end of the drive shaft 17 is rotatably connected to the inner wall of the cleaning tank 2 by a bearing.

[0029] like Figure 4 and Figure 5 As shown, a support assembly 18 is provided on the drive shaft 17. The support assembly 18 includes two support plates 19 arranged opposite each other along the length of the cleaning tank 2. The lower end of the support plate 19 is fixedly installed on the bottom wall of the cleaning tank 2 by bolts. The support plate 19 is provided with a clearance hole for the drive shaft 17 to pass through. Two rollers 20 arranged opposite each other along the width of the cleaning tank 2 are rotatably installed between the two support plates 19 located above the drive shaft 17 via bearings. The rollers 20 are arranged parallel to the drive shaft 17. The drive shaft 17 and the two rollers 20 are respectively connected by belts 21. A transmission belt 22 for supporting the bottom of the furnace tube 3 is sleeved between the two rollers 20.

[0030] In operation, the drive shaft 17 drives the two idler rollers 20 to rotate synchronously. The two idler rollers 20 drive the transmission belt 22 to rotate, which in turn drives the furnace tube 3 to rotate. When the furnace tube 3 is pressed against the top of the transmission belt 22 between the two idler rollers 20, the top of the transmission belt 22 is pressed down, thereby increasing the contact area between the transmission belt 22 and the furnace tube 3, which can drive the furnace tube 3 to rotate more efficiently and avoid slippage.

[0031] In this embodiment, multiple sets of support components 18 are evenly spaced back and forth along the length of the drive shaft 17, which further improves the efficiency of driving the furnace tube 3 to rotate, and a space is formed between two adjacent sets of support components 18 to avoid the furnace tube hook 5.

[0032] In this embodiment, a plurality of transmission belts 22 are sleeved between two idler rollers 20; a plurality of annular baffles 23 are integrally formed on the outer circumferential surface of the idler roller 20 and are evenly spaced along its length direction. The size of the annular baffles 23 protruding from the outer circumferential surface of the idler roller 20 is smaller than the thickness of the transmission belts 22. The transmission belts 22 are sleeved on the idler roller 20 located between two adjacent annular baffles 23, which can prevent the transmission belts 22 from moving along the axial direction of the idler roller 20.

[0033] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely preferred examples and are not intended to limit the utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A furnace tube cleaning machine characterised in that: The application relates to a long-strip-shaped cleaning tank, which is internally provided with two groups of supporting mechanisms arranged oppositely along the width direction of the cleaning tank, and is internally provided with a driving assembly for driving the rotation of a furnace tube between the two groups of supporting mechanisms; the supporting mechanism comprises a supporting shaft extending along the length direction of the cleaning tank, a plurality of supporting rollers are uniformly and spacedly arranged on the supporting shaft in the length direction of the supporting shaft, the supporting rollers are supported on the bottom side of the furnace tube, the two ends of the supporting shaft are rotatably arranged on movable supports, the lower end of the movable support is fixedly arranged with a sliding seat, the bottom wall of the cleaning tank is fixedly arranged with a sliding rail matched with the sliding seat, the sliding rail extends along the width direction of the cleaning tank, the sliding seat is arranged with a limiting mechanism on the sliding rail for locking the sliding seat.

2. The furnace tube cleaning machine of claim 1, wherein: The driving assembly comprises a driving shaft driven to rotate by a motor, the driving shaft extends along the length direction of the cleaning tank, the driving shaft is arranged with a supporting assembly, the supporting assembly comprises two supporting plates arranged oppositely along the length direction of the cleaning tank, the supporting plates are fixedly arranged on the bottom wall of the cleaning tank, two supporting rollers arranged oppositely along the width direction of the cleaning tank are rotatably arranged between the two supporting plates, the supporting rollers are arranged in parallel with the driving shaft, the driving shaft and the two supporting rollers are connected by belts, and a transmission belt for supporting the bottom of the furnace tube is arranged between the two supporting rollers.

3. The furnace tube cleaning machine of claim 2, wherein: The supporting assembly is uniformly and spacedly arranged with a plurality of groups along the length direction of the driving shaft.

4. The furnace tube cleaning machine of claim 2 wherein: A plurality of transmission belts are arranged between the two supporting rollers; a plurality of annular baffles are uniformly and spacedly arranged on the outer circumferential surface of the supporting roller in the length direction of the supporting roller, and the transmission belts are arranged on the supporting roller between adjacent two annular baffles.

5. The furnace tube cleaning machine of claim 1 wherein: The limiting mechanism comprises a limiting screw screwed on the sliding seat and used for abutting against the sliding rail.

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